CN105890759A - Fiber grating demodulation system utilizing micro-motion detector array to improve spectrum resolution - Google Patents
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Abstract
本发明提供了一种采用微动探测器阵列提高线阵图像传感器光谱分辨率的光纤光栅解调系统,所述解调系统包括泵浦源、波分复用器、布拉格光纤光栅、光阑、狭缝、准直镜、分光光栅、成像镜和线阵探测器、压电执行元件及电压控制系统,其中所述泵浦源、波分复用器和布拉格光纤光栅依次连接,所述波分复用器同时连接光阑,所述泵浦源发出的光通过波分复用器的耦合后进入布拉格光纤光栅,所述布拉格光纤光栅的反射谱作为注入光进入光纤光栅解调系统,注入光通过狭缝后,依次通过准直镜、分光光栅、成像镜的反射,最终汇聚到线阵探测器上,其中所述线阵探测器沿其长轴方向左右移动微小距离。
The invention provides a fiber grating demodulation system that uses a micro-movement detector array to improve the spectral resolution of a line array image sensor. The demodulation system includes a pump source, a wavelength division multiplexer, a fiber Bragg grating, an aperture, A slit, a collimating mirror, a spectroscopic grating, an imaging mirror and a linear array detector, a piezoelectric actuator and a voltage control system, wherein the pump source, the wavelength division multiplexer and the fiber Bragg grating are connected in sequence, and the wavelength division The multiplexer is connected to the aperture at the same time, and the light emitted by the pump source enters the fiber Bragg grating after being coupled by the wavelength division multiplexer, and the reflection spectrum of the fiber Bragg grating enters the fiber Bragg grating demodulation system as injected light, and the injected light After passing through the slit, it passes through the reflection of the collimating mirror, the spectroscopic grating, and the imaging mirror in turn, and finally converges on the line array detector, wherein the line array detector moves left and right along its long axis for a small distance.
Description
技术领域 technical field
本发明涉及光纤传感领域,特别涉及一种采用微动探测器阵列提高光谱分辨率的光纤光栅解调系统及方法。 The invention relates to the field of optical fiber sensing, in particular to an optical fiber grating demodulation system and method for improving spectral resolution by using a micro-motion detector array.
背景技术 Background technique
光纤光栅是一种新型无源传感元件,具有高灵敏度,抗电磁干扰能力强,耐腐蚀等诸多优点,自用于传感以来,已经取得了快速持续的发展,在航空航天、建筑结构、石油等领域的安全监测方面有着广阔的应用前景。光纤光栅解调系统是整个传感系统的关键部分,实现高精度、高分辨率、动态和静态参量结合、多点复用检测和低成本是光纤光栅解调技术发展的趋势。光纤解调的方法有多种,调谐F-P滤波法只能用于测量静态应变,可调谐激光器法的成本非常高,非平衡M-Z干涉法易受环境影响,不利于工程应用。随着近年来光学探测器的迅猛发展,使得小型化光纤光谱仪快速发展,基于光谱成像法的光纤解调技术也随之发展起来。基于光谱成像法的光纤光栅解调仪体积小,集成化程度高,可用于测量静态和动态应变,在众多解调方法中具有突出优点,是解调系统研究的一个重要方向,其中,解调仪的光学系统性能直接影响了系统的分辨率,是解调仪的一个关键。 Fiber Bragg Grating is a new type of passive sensing element, which has many advantages such as high sensitivity, strong anti-electromagnetic interference, and corrosion resistance. Since it is used in sensing, it has achieved rapid and sustainable development. It has broad application prospects in security monitoring in other fields. Fiber Bragg grating demodulation system is the key part of the whole sensing system, realizing high precision, high resolution, combination of dynamic and static parameters, multi-point multiplexing detection and low cost is the development trend of fiber Bragg grating demodulation technology. There are many methods of optical fiber demodulation. The tuned F-P filter method can only be used to measure static strain. The cost of the tunable laser method is very high. The unbalanced M-Z interferometry is easily affected by the environment and is not conducive to engineering applications. With the rapid development of optical detectors in recent years, miniaturized fiber optic spectrometers have developed rapidly, and fiber demodulation technology based on spectral imaging has also developed. The fiber grating demodulator based on the spectral imaging method is small in size and highly integrated, and can be used to measure static and dynamic strains. It has outstanding advantages in many demodulation methods and is an important direction of demodulation system research. Among them, demodulation The performance of the optical system of the instrument directly affects the resolution of the system, which is a key to the demodulator.
光栅光谱仪的光学系统结构种类较多,目前应用比较普遍的是Czerny-Turner光路结构,即以两面凹面反射镜分别作为准直镜和成像镜,以平面反射光栅作为色散元件。这一方面是因为平面光栅设计难度低,复制成本低廉,衍射效率高;另一方面是由于Czerny-Turner结构可调节和布置的结构参数较多,可以避免二次或多次衍射,便于采用光电阵列探测器接收光谱。常见的小型Czerny-Turner光谱仪主要分为交叉型和M型2种结构。M型是Czerny-Turner光谱仪的经典结构,代表产品是荷兰Avantes公司研制的Avaspec系列小型光纤光谱仪;交叉型则是由其演变而来,其结构更紧凑,空间利用率高。然而,由于线阵列图像传感器像素数目有限,光谱空间分辨 率受到限制。 There are many types of optical system structures for grating spectrometers. At present, the Czerny-Turner optical path structure is more commonly used, that is, two concave mirrors are used as the collimator and imaging mirror respectively, and the plane reflective grating is used as the dispersion element. On the one hand, this is due to the low difficulty of planar grating design, low replication cost, and high diffraction efficiency; on the other hand, due to the fact that the Czerny-Turner structure can be adjusted and arranged with more structural parameters, it can avoid secondary or multiple diffractions, and it is convenient to use photoelectric An array detector receives the spectrum. Common small Czerny-Turner spectrometers are mainly divided into two structures: cross type and M type. The M type is the classic structure of the Czerny-Turner spectrometer, and the representative product is the Avaspec series of small fiber optic spectrometers developed by Avantes in the Netherlands; the cross type is evolved from it, with a more compact structure and high space utilization. However, due to the limited number of pixels in line array image sensors, the spectral spatial resolution is limited.
因此,能否在线阵传感器像素有限的情况下实现高分辨率光栅波长精确解调,是本领域亟待解决的技术问题。 Therefore, it is a technical problem to be solved urgently in this field whether it is possible to realize accurate demodulation of the wavelength of the high-resolution grating under the condition that the pixels of the line array sensor are limited.
发明内容 Contents of the invention
本发明的目的在于提供一种采用微动探测器阵列提高线阵图像传感器光谱分辨率的光纤光栅解调系统,所述解调系统包括泵浦源、波分复用器、布拉格光纤光栅、光阑、狭缝、准直镜、分光光栅、成像镜和线阵探测器、压电执行元件及电压控制系统,其中所述泵浦源、波分复用器和布拉格光纤光栅依次连接,所述波分复用器同时连接光阑,所述泵浦源发出的光通过波分复用器的耦合后进入布拉格光纤光栅,所述布拉格光纤光栅的反射谱作为注入光进入光纤光栅解调系统,注入光通过狭缝后,依次通过准直镜、分光光栅、成像镜的反射,最终汇聚到线阵探测器上,其中所述线阵探测器沿其长轴方向左右移动微小距离。 The object of the present invention is to provide a fiber grating demodulation system that uses a micro-motion detector array to improve the spectral resolution of a linear image sensor. The demodulation system includes a pump source, a wavelength division multiplexer, a fiber Bragg grating, an optical diaphragm, slit, collimating mirror, spectroscopic grating, imaging mirror and linear array detector, piezoelectric actuator and voltage control system, wherein the pumping source, wavelength division multiplexer and fiber Bragg grating are connected in sequence, and the The wavelength division multiplexer is connected to the diaphragm at the same time, the light emitted by the pump source enters the fiber Bragg grating after being coupled by the wavelength division multiplexer, and the reflection spectrum of the fiber Bragg grating enters the fiber Bragg grating demodulation system as injected light, After the injected light passes through the slit, it is sequentially reflected by the collimating mirror, the beam splitting grating, and the imaging mirror, and finally converges on the line array detector, wherein the line array detector moves left and right along its long axis for a small distance.
优选地,所述线阵探测器移动范围在0-1厘米之间。 Preferably, the moving range of the linear array detector is between 0-1 cm.
优选地,所述线阵探测器通过压电执行元件来高速调整。 Preferably, the linear array detector is adjusted at high speed through piezoelectric actuators.
优选地,所述移动微小距离的方法如下: Preferably, the method of moving a small distance is as follows:
a)压电执行元件调节至最低端,此电压为初调电压; a) The piezoelectric actuator is adjusted to the lowest end, and this voltage is the initial adjustment voltage;
b)记录最低端光谱数据为初始光谱; b) Record the lowest end spectral data as the initial spectrum;
c)小步距调节压电执行元件,计算当前光谱与初始光谱,所述压电执行元件为位置伺服,通过输入位置指令来控制线阵探测器进行微移动,对入射光的空间位置进行调节,最终确定光谱成像位置; c) Adjust the piezoelectric actuator with a small step to calculate the current spectrum and the initial spectrum. The piezoelectric actuator is a position servo, and the linear array detector is controlled to move slightly by inputting a position command, and the spatial position of the incident light is adjusted. , finally determine the spectral imaging position;
d)首次相关度峰值时的调节电压记录为终调电压; d) The adjusted voltage at the first correlation peak value is recorded as the final adjusted voltage;
e)将初调电压与终调电压间等分为若干等级,每次解调均对各等级进行测量,以获得更高的空间分辨率。 e) Divide the initial adjustment voltage and the final adjustment voltage into several levels, and measure each level for each demodulation to obtain higher spatial resolution.
优选地,所述子步骤b)的具体处理过程如下: Preferably, the specific process of the sub-step b) is as follows:
当有256个像素时,则可以得到256个分段积分值:{I0,I1,I2,........I255},当像素沿某一方向微动扫描时,得到另一数列:{I0’,I1’,I2’,........I255’},将此数列前去前者,得到:{I0’-I0,I1’-I1,I2’-I2,......I255’-I255,},即{G1-G0,G2-G1,G3-G2,......};其中G0表示第0位置的光强真值,G1表示1位置的光强值;对此数列进行求和,得到{G1-G0,G2-G0,G3-G0,......G255-G0},这样得到的是第一次微调后的新值,然后是第二次微调后的新值,如果微调了N次,就得到N次的插值。 When there are 256 pixels, you can get 256 segmented integral values: {I0, I1, I2, ..... I255}, when the pixel scans slightly along a certain direction, you get another sequence : {I0', I1', I2', .....I255'}, put this sequence to the former, get: {I0'-I0, I1'-I1, I2'-I2, .. ....I255'-I255,}, that is, {G1-G0, G2-G1, G3-G2,...}; where G0 represents the true value of light intensity at position 0, and G1 represents the true value of light intensity at position 1 Light intensity value; sum this sequence to get {G1-G0, G2-G0, G3-G0,...G255-G0}, so that the new value after the first fine-tuning is obtained, and then is the new value after the second fine-tuning. If N times of fine-tuning is performed, N times of interpolation will be obtained.
应当理解,前述大体的描述和后续详尽的描述均为示例性说明和解释,并不应当用作对本发明所要求保护内容的限制。 It should be understood that both the foregoing general description and the following detailed description are exemplary illustrations and explanations, and should not be used as limitations on the claimed content of the present invention.
附图说明 Description of drawings
参考随附的附图,本发明更多的目的、功能和优点将通过本发明实施方式的如下描述得以阐明,其中: With reference to the accompanying drawings, more objects, functions and advantages of the present invention will be clarified through the following description of the embodiments of the present invention, wherein:
图1为根据本发明的提高线阵图像传感器光谱分辨率的光纤光栅解调系统的结构示意图; Fig. 1 is the structure schematic diagram of the fiber grating demodulation system that improves the linear array image sensor spectral resolution according to the present invention;
图2示意性示出了采用狭缝平移提高线阵图像传感器光谱分辨率的光纤光栅解调系统的结构示意图; Fig. 2 schematically shows a schematic structural diagram of a fiber grating demodulation system that uses slit translation to improve the spectral resolution of a line array image sensor;
图3示意性示出采用准直镜微调提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图; Fig. 3 schematically shows the structure schematic diagram of the fiber grating demodulation system that adopts collimating mirror fine-tuning to improve the spectral resolution of the detector array;
图4示意性示出采用微动光栅提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图; Fig. 4 schematically shows a schematic structural view of a fiber grating demodulation system using a micro-movable grating to improve the spectral resolution of the detector array;
图5示意性示出采用成像镜微调提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图; Fig. 5 schematically shows a schematic structural view of a fiber grating demodulation system that uses fine-tuning of an imaging mirror to improve the spectral resolution of a detector array;
图6示意性示出采用线阵探测器微调提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图; Fig. 6 schematically shows a schematic structural view of a fiber grating demodulation system that uses linear array detector fine-tuning to improve the spectral resolution of the detector array;
图7示意性示出提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图; Fig. 7 schematically shows a structural diagram of a fiber grating demodulation system for improving the spectral resolution of a detector array;
图8示意性示出根据本发明的采用线阵探测器微动扫描提高光谱分辨率的光纤光栅解调系统提高线阵图像传感器光谱分辨率的光纤光栅解调系统的反馈控制方法的流程图; Fig. 8 schematically shows a flow chart of the feedback control method of the fiber grating demodulation system for improving the spectral resolution of the line array image sensor according to the present invention by micro-scanning the line array detector;
图9(a)示出了一个光强在空间呈一维高斯曲线分布图; Fig. 9 (a) shows a light intensity in space and is a one-dimensional Gaussian curve distribution graph;
图9(b)示出了不调节狭缝时扫描后的多次测量结果插值后的结果图; Figure 9(b) shows the interpolated result graph of multiple measurement results after scanning when the slit is not adjusted;
图9(c)示出了调节狭缝时扫描后的多次测量结果插值后的结果图。 Fig. 9(c) shows the interpolation result graph of the multiple measurement results after scanning when the slit is adjusted.
具体实施方式 detailed description
图1为根据本发明的提高线阵图像传感器光谱分辨率的光纤光栅解调系统的结构示意图;本发明提供的一种采用线阵探测器微动提高线阵图像传感器光谱分辨率的光纤光栅解调系统100如图1所示,所述光纤光栅解调系统100包括泵浦源(LD)101、波分复用器(WDM)102、布拉格光纤光栅(FBG) 103、光阑104、狭缝105、分光光栅106、准直镜107、成像镜108和线阵探测器(CCD)109。泵浦源101、波分复用器102和布拉格光纤光栅103依次连接,波分复用器102同时连接光阑104。泵浦源101发出的光通过波分复用器102的耦合后进入布拉格光纤光栅103,布拉格光纤光栅103的反射谱作为注入光进入光纤光栅解调系统。注入光通过狭缝105后,依次通过准直镜106、分光光栅107、成像镜108的反射,最终汇聚到线阵探测器(CCD)109上。 Fig. 1 is a schematic structural diagram of a fiber grating demodulation system for improving the spectral resolution of a line array image sensor according to the present invention; a fiber grating demodulation system for improving the spectral resolution of a line array image sensor by micro-movement of a line array detector provided by the present invention Modulation system 100 is shown in Figure 1, and described fiber Bragg grating demodulation system 100 comprises pump source (LD) 101, wavelength division multiplexer (WDM) 102, fiber Bragg grating (FBG) 103, diaphragm 104, slit 105 , a spectroscopic grating 106 , a collimating mirror 107 , an imaging mirror 108 and a line array detector (CCD) 109 . The pump source 101 , the wavelength division multiplexer 102 and the fiber Bragg grating 103 are connected in sequence, and the wavelength division multiplexer 102 is connected to the aperture 104 at the same time. The light emitted by the pump source 101 enters the fiber Bragg grating 103 after being coupled by the wavelength division multiplexer 102, and the reflection spectrum of the fiber Bragg grating 103 enters the fiber Bragg grating demodulation system as injected light. After the injected light passes through the slit 105 , it is sequentially reflected by the collimating mirror 106 , the beam splitting grating 107 , and the imaging mirror 108 , and finally converges on the linear array detector (CCD) 109 .
首先,将泵浦源101、波分复用器102、布拉格光纤光栅103以图1所示方式熔接,其中布拉格光纤光栅103应具有较高的反射率以及较窄的线宽。根据本发明的实施方式的波分复用器(WDM)102、布拉格光纤光栅(FBG)103的参数选择均需要同泵浦波长、激光出射波长参数匹配,具体的参数如表1所示。 Firstly, the pumping source 101, the wavelength division multiplexer 102, and the fiber Bragg grating 103 are fused in the manner shown in FIG. 1, wherein the fiber Bragg grating 103 should have a higher reflectivity and a narrower line width. According to the embodiment of the present invention, the parameters of the wavelength division multiplexer (WDM) 102 and the fiber Bragg grating (FBG) 103 need to be matched with the parameters of the pump wavelength and laser emission wavelength. The specific parameters are shown in Table 1.
表1根据本发明的解调系统的反射谱光源参数 Table 1 according to the reflection spectrum light source parameter of demodulation system of the present invention
实施方式中若选用芯径为10/125μm掺铒光纤作为增益介质,泵浦源LD尾纤、波分复用器WDM需选取同样型号芯径。泵浦源LD输出波长976nm,波分复用器WDM工作波长976/1550nm,布拉格光纤光栅FBG选取范围为1530nm-1560nm,可在该范围内获得激光输出。实验中若选用芯径为10/125μm掺镱光纤作为增益介质,泵浦源LD尾纤、波分复用器WDM需选取同样型号芯径。泵浦源LD为915nm单模输出,波分复用器WDM工作波长 915/1064nm,布拉格光纤光栅FBG选取1064nm附近,可在该范围内获得激光输出。 In the embodiment, if an erbium-doped fiber with a core diameter of 10/125 μm is selected as the gain medium, the pump source LD pigtail and the wavelength division multiplexer WDM need to select the same type of core diameter. The output wavelength of the pump source LD is 976nm, the working wavelength of the wavelength division multiplexer WDM is 976/1550nm, and the selection range of the fiber Bragg grating FBG is 1530nm-1560nm, and the laser output can be obtained within this range. In the experiment, if the ytterbium-doped fiber with a core diameter of 10/125 μm is selected as the gain medium, the pump source LD pigtail and the wavelength division multiplexer WDM need to select the same type of core diameter. The pump source LD is 915nm single-mode output, the wavelength division multiplexer WDM works at 915/1064nm, and the fiber Bragg grating FBG is selected around 1064nm, and the laser output can be obtained within this range.
布拉格光纤光栅103的反射光作为入射光a经过光阑104照射到准直镜106维持光束的准直性,然后准直光照射到分光光栅107上进行衍射分光,之后经过成像镜108,汇聚在线阵探测器109。 The reflected light of the fiber Bragg grating 103 is used as the incident light a through the diaphragm 104 to the collimating mirror 106 to maintain the collimation of the beam, and then the collimated light is irradiated to the beam splitting grating 107 for diffraction and splitting. array detector 109 .
分光光栅107可由公式(1)表示 Spectroscopic grating 107 can be represented by formula (1)
nλ=d(sinα±sinβ) (1) nλ=d(sinα±sinβ) (1)
其中n为光谱级,n=0,±1,±2....;α为入射角;β为反射角;θ为闪耀角;d为光栅常数。 Among them, n is the spectral level, n=0, ±1, ±2...; α is the incident angle; β is the reflection angle; θ is the blaze angle; d is the grating constant.
n=0为零级光谱,此时,β与λ无关,即无分光作用;n=±1,±2对应为一级光谱和二级光谱,其中一级光谱能量强,可用于实现分光。光栅分辨率与波长无关,分离后的光谱属于均排光谱,光栅的理论分辨率为光栅刻线数与光谱级次的乘积,可有公式(2)表示 n=0 is the zero-order spectrum, at this time, β has nothing to do with λ, that is, there is no spectroscopic effect; n=±1, ±2 corresponds to the first-order spectrum and the second-order spectrum, and the first-order spectrum has strong energy and can be used to realize spectroscopy. The resolution of the grating has nothing to do with the wavelength. The separated spectrum belongs to the homogeneous spectrum. The theoretical resolution of the grating is the product of the number of grating lines and the order of the spectrum, which can be expressed by formula (2)
R=nN (2) R=nN (2)
对于宽度为50mm,刻线数为1200条/mm的光栅,其一级光谱的分辨率为6×104。 For a grating with a width of 50 mm and a number of scribed lines of 1200 lines/mm, the resolution of the primary spectrum is 6×104.
将布拉格光纤光栅103反射光作为注入光源,这样减小了入射光的谱宽,在光栅分辨率确定的条件下能够获得更间隔更加精细的干涉条纹。此时对狭缝、光阑、分光光栅、准直镜、成像镜和线阵探测器进行调节,通过输入位置指令来控制狭缝微移动或控制分光光栅、准直镜、成像镜和线阵探测器的微转动,对入射光的空间位置进行调节,则入射到成像镜的光路发生变化,汇聚到线阵探测器上的条纹也发生相应的变化,最终确定光谱成像位置。 The light reflected by the fiber Bragg grating 103 is used as the injection light source, which reduces the spectral width of the incident light, and under the condition that the resolution of the grating is determined, interference fringes with finer intervals can be obtained. At this time, adjust the slit, aperture, spectroscopic grating, collimating mirror, imaging mirror and line array detector, and control the micro-movement of the slit or control the spectroscopic grating, collimating mirror, imaging mirror and line array by inputting position commands The micro-rotation of the detector adjusts the spatial position of the incident light, the light path incident to the imaging mirror changes, and the fringes converged on the line array detector also change accordingly, finally determining the spectral imaging position.
具体地,由以下实施例进行详细描述。 Specifically, it is described in detail by the following examples.
实施例1 Example 1
图2中(a)示意性示出了采用狭缝平移提高线阵图像传感器光谱分辨率的光纤光栅解调系统的结构示意图。如图2中(a)所示,对狭缝105进行调节,使狭缝沿图示箭头b方向移动,狭缝移动步长为0.1微米,调节范围在0-1厘米之间。狭缝105通过压电执行元件来高速调整。压电执行元件通过电压控制系统来控制,使光谱成像于线阵图像传感器的位置在最小像素间隔范围内进行移动。这样,入射到成像镜108的光路就会发生变化,汇聚到线阵探测器109上的条纹也发生相应的变化,光路变化示意图如图2中(b)所示。通过调节光纤入射狭缝的宽度,能够实现条纹的微小移动,从而达到提高测试精度 的作用。 (a) of FIG. 2 schematically shows a schematic structural diagram of a fiber grating demodulation system that uses slit translation to improve the spectral resolution of a line array image sensor. As shown in (a) of FIG. 2 , the slit 105 is adjusted so that the slit moves in the direction of the arrow b shown in the figure. The slit movement step is 0.1 micron, and the adjustment range is between 0-1 cm. The slit 105 is adjusted at high speed by a piezoelectric actuator. The piezoelectric actuator is controlled by a voltage control system, so that the spectral imaging position on the line image sensor can be moved within the minimum pixel interval. In this way, the light path incident on the imaging mirror 108 will change, and the fringes converging on the line array detector 109 will also change accordingly. The schematic diagram of the light path change is shown in (b) in FIG. By adjusting the width of the incident slit of the fiber, the slight movement of the stripes can be realized, thereby improving the test accuracy.
实施例2 Example 2
图3示意性示出采用准直镜微调提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图。如图3所示,对准直镜106进行调节,使准直镜沿图示箭头c方向旋转,旋转角度为逆时针或顺时针旋转10°-30°。准直镜106通过压电执行元件来高速调整。压电执行元件通过电压控制系统来控制,使光谱成像于线阵图像传感器的位置在最小像素间隔范围内进行移动。这样,入射到成像镜108的光路就会发生变化,汇聚到线阵探测器109上的条纹也发生相应的变化。通过调节准直镜的旋转角度,能够实现条纹的微小移动,从而达到提高测试精度的作用。 Fig. 3 schematically shows the structure diagram of a fiber grating demodulation system for improving the spectral resolution of a detector array by fine-tuning a collimating mirror. As shown in FIG. 3 , the collimating mirror 106 is adjusted so that the collimating mirror rotates in the direction of arrow c in the figure, and the rotation angle is 10°-30° counterclockwise or clockwise. The collimating mirror 106 is adjusted at high speed by piezoelectric actuators. The piezoelectric actuator is controlled by a voltage control system, so that the spectral imaging position on the line image sensor can be moved within the minimum pixel interval. In this way, the light path incident on the imaging mirror 108 will change, and the fringes converged on the line array detector 109 will also change accordingly. By adjusting the rotation angle of the collimating mirror, the slight movement of the stripes can be realized, thereby achieving the effect of improving the test accuracy.
实施例3 Example 3
图4示意性示出采用微动光栅提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图。如图4所示,对分光光栅107进行调节,使分光光栅沿图示箭头d方向旋转,旋转角度为逆时针或顺时针旋转10°-30°。分光光栅107通过压电执行元件来高速调整。压电执行元件通过电压控制系统来控制,使光谱成像于线阵图像传感器的位置在最小像素间隔范围内进行移动。这样,入射到成像镜108的光路就会发生变化,汇聚到线阵探测器109上的条纹也发生相应的变化。通过调节分光光栅的旋转角度,能够实现条纹的微小移动,从而达到提高测试精度的作用。 Fig. 4 schematically shows the structure diagram of a fiber grating demodulation system using a micro grating to improve the spectral resolution of a detector array. As shown in FIG. 4 , the spectroscopic grating 107 is adjusted so that the spectroscopic grating rotates in the direction of arrow d in the figure, and the rotation angle is 10°-30° counterclockwise or clockwise. The split grating 107 is adjusted at high speed by piezoelectric actuators. The piezoelectric actuator is controlled by a voltage control system, so that the spectral imaging position on the line image sensor can be moved within the minimum pixel interval. In this way, the light path incident on the imaging mirror 108 will change, and the fringes converged on the line array detector 109 will also change accordingly. By adjusting the rotation angle of the spectroscopic grating, the slight movement of the fringe can be realized, thereby achieving the effect of improving the test accuracy.
实施例4 Example 4
图5示意性示出采用成像镜微调提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图。如图5所示,对成像镜108进行调节,使分光光栅沿图示箭头e方向旋转,旋转角度为逆时针或顺时针旋转10°-30°。成像镜108通过压电执行元件来高速调整。压电执行元件通过电压控制系统来控制,使光谱成像于线阵图像传感器的位置在最小像素间隔范围内进行移动,汇聚到线阵探测器109上的条纹也发生相应的变化。通过调节成像镜的旋转角度,能够实现条纹的微小移动,从而达到提高测试精度的作用。 Fig. 5 schematically shows the structural diagram of a fiber grating demodulation system that uses imaging mirror fine-tuning to improve the spectral resolution of the detector array. As shown in FIG. 5 , the imaging mirror 108 is adjusted so that the spectroscopic grating rotates in the direction of arrow e in the figure, and the rotation angle is 10°-30° counterclockwise or clockwise. The imaging mirror 108 is adjusted at high speed by piezoelectric actuators. The piezoelectric actuator is controlled by the voltage control system, so that the spectral imaging position on the line array image sensor moves within the minimum pixel interval range, and the fringes converged on the line array detector 109 also change accordingly. By adjusting the rotation angle of the imaging mirror, the small movement of the stripes can be realized, thereby achieving the effect of improving the test accuracy.
实施例5 Example 5
图6示意性示出采用线阵探测器微调提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图。如图5所示,对线阵探测器109进行调节,使分光光栅沿图示箭头f方向左右移动。狭缝移动步长为0.1微米,调节范围在0-1厘米之间。线阵探测器109通过压电执行元件来高速调整。压电执行元件通过电压控制系统来控制,使光谱成像于线阵图像传感器的位置在 最小像素间隔范围内进行移动。通过调节线阵探测器的旋转角度,能够实现条纹的微小移动,从而达到提高测试精度的作用。 Fig. 6 schematically shows the structural diagram of a fiber grating demodulation system that adopts linear array detector fine-tuning to improve the spectral resolution of the detector array. As shown in FIG. 5 , the linear array detector 109 is adjusted so that the spectroscopic grating moves left and right along the direction of the arrow f shown in the figure. The slit movement step is 0.1 micron, and the adjustment range is between 0-1 cm. The linear detector 109 is adjusted at high speed by piezoelectric actuators. The piezoelectric actuator is controlled by a voltage control system, so that the position of the spectral image on the line image sensor can be moved within the minimum pixel interval. By adjusting the rotation angle of the line array detector, the slight movement of the stripes can be realized, thereby achieving the effect of improving the test accuracy.
实施例6 Example 6
图7示意性示出提高探测器阵列光谱分辨率的光纤光栅解调系统的结构示意图。如图7所示,对狭缝、光阑、分光光栅、准直镜、成像镜和线阵探测器中的至少两个进行微调,所述狭缝、光阑、分光光栅、准直镜、成像镜和线阵探测器通过压电执行元件来高速调整。压电执行元件通过电压控制系统来控制,使光谱成像于线阵图像传感器的位置在最小像素间隔范围内进行移动。通过调节狭缝、光阑、分光光栅、准直镜、成像镜和线阵探测器的旋转角度,从而达到提高测试精度的作用。 Fig. 7 schematically shows a schematic structural diagram of a fiber Bragg grating demodulation system for improving the spectral resolution of a detector array. As shown in Figure 7, at least two of the slit, aperture, splitting grating, collimating mirror, imaging mirror and line array detector are fine-tuned, and the slit, diaphragm, splitting grating, collimating mirror, Imaging mirrors and line array detectors are adjusted at high speed by piezoelectric actuators. The piezoelectric actuator is controlled by a voltage control system, so that the spectral imaging position on the line image sensor can be moved within the minimum pixel interval. By adjusting the rotation angles of slits, diaphragms, splitting gratings, collimating mirrors, imaging mirrors and line array detectors, the test accuracy can be improved.
图8示意性示出根据本发明的提高线阵图像传感器光谱分辨率的光纤光栅解调系统的反馈控制方法的流程图。具体控制方法如下: Fig. 8 schematically shows a flow chart of a feedback control method of a fiber grating demodulation system for improving the spectral resolution of a line array image sensor according to the present invention. The specific control method is as follows:
首先,步骤801,压电执行元件调节至最低端,此电压为初调电压; First, in step 801, the piezoelectric actuator is adjusted to the lowest end, and this voltage is the initial adjustment voltage;
步骤802,记录最低端光谱数据为初始光谱; Step 802, record the lowest end spectrum data as the initial spectrum;
步骤803,小步距调节压电元件,压电元件为位置伺服,通过输入位置指令,分别调节狭缝、分光光栅、准直镜、成像镜或线阵探测器,计算当前光谱与初始光谱。调节高斯图像在CCD上的移动距离到达一个像素宽度时,即完成一次扫描,把一次扫描的各次测量数据分别插值,形成一个更为平滑的曲线。其处理过程是这样的,像素的输出是对光强曲线的分段积分,当有256个像素时,则可以得到256个分段积分值:{I0,I1,I2,........I255},当像素沿某一方向微动扫描时,得到另一数列:{I0’,I1’,I2’,........I255’},将此数列前去前者,得到:{I0’-I0,I1’-I1,I2’-I2,......I255’-I255,},即{G1-G0,G2-G1,G3-G2,......}。其中G0表示第0位置的光强真值(注意是0位置,而非在像素尺度内的光强积分),G1表示1位置的光强值。对此数列进行求和,得到{G1-G0,G2-G0,G3-G0,......G255-G0},这样得到的是第一次微调后的新值,然后是第二次微调后的新值,如果微调了N次,就得到N次的插值。 Step 803, adjust the piezoelectric element with a small step. The piezoelectric element is a position servo. By inputting a position command, adjust the slit, spectroscopic grating, collimating mirror, imaging mirror or linear array detector respectively, and calculate the current spectrum and the initial spectrum. When the moving distance of the Gaussian image on the CCD is adjusted to reach one pixel width, one scan is completed, and each measurement data of one scan is interpolated separately to form a smoother curve. The processing process is like this, the pixel output is the segmental integration of the light intensity curve, when there are 256 pixels, you can get 256 segmental integral values: {I0, I1, I2,... ..I255}, when the pixel scans slightly along a certain direction, another sequence is obtained: {I0', I1', I2', .....I255'}, and this sequence is forwarded to the former, Get: {I0'-I0, I1'-I1, I2'-I2, ... I255'-I255,}, namely {G1-G0, G2-G1, G3-G2,..... .}. Among them, G0 represents the true value of light intensity at position 0 (note that it is position 0, not the integral of light intensity within the pixel scale), and G1 represents the value of light intensity at position 1. Sum this sequence to get {G1-G0, G2-G0, G3-G0,...G255-G0}, so that you get the new value after the first fine-tuning, and then the second The new value after fine-tuning, if it is fine-tuned N times, it will get N times of interpolation.
步骤804,首次相关度峰值时的调节电压记录为终调电压; Step 804, the adjusted voltage at the first correlation peak value is recorded as the final adjusted voltage;
步骤805,将初调电压与终调电压间等分为若干等级,根据各个等级来确定狭缝的移动距离或分光光栅、准直镜、成像镜或线阵探测器的旋转角度。 Step 805, divide the initial adjustment voltage and the final adjustment voltage into several levels, and determine the moving distance of the slit or the rotation angle of the spectroscopic grating, collimating mirror, imaging mirror or line array detector according to each level.
步骤806,返回步骤803,每次解调均对各等级进行测量,以获得更高的空间分辨率。 Step 806 , return to step 803 , measure each level for each demodulation to obtain higher spatial resolution.
图9(a)-9(c)示出了本发明调节狭缝、分光光栅、准直镜、成像镜或线阵探测器提高光谱空间分辨率的原理。图9(a)示出了光强在空间呈一维高斯曲线分布图。一个光强在空间呈一维高斯曲线分布的光束照射到一个CCD传感器上,CCD的各像素紧密排列,每个像素相当于一个竖格,如图9(a)所示,像素的输出实际是对落在一个像素上的光强总量的积分。由于离散化过大,导致对图像分辨率较低,为提高曲线的采样点数,通过调节狭缝、分光光栅、准直镜、成像镜或线阵探测器,来改变高斯曲线在CCD传感器上的位置,相当于移动CCD传感器对曲线的不同位置进行采集。狭缝、分光光栅、准直镜、成像镜或线阵探测器的微调,相当于对传感器的位置微调,这样就得到对曲线更加细腻的刻画。图9(b)为不调节狭缝、分光光栅、准直镜、成像镜或线阵探测器时扫描后的多次测量结果插值后的结果图。图9(c)为调节狭缝、分光光栅、准直镜、成像镜或线阵探测器时扫描后的多次测量结果插值后的结果图。由图9(b)和9(c)可知,调节狭缝、分光光栅、准直镜、成像镜或线阵探测器,调节高斯图像在CCD上的移动距离到达一个像素宽度时,即完成一次扫描,把一次扫描的各次测量数据分别插值,形成一个更为平滑的曲线。 Figures 9(a)-9(c) show the principle of the present invention to improve spectral spatial resolution by adjusting slits, spectroscopic gratings, collimating mirrors, imaging mirrors or linear array detectors. FIG. 9( a ) shows a distribution graph of light intensity in space as a one-dimensional Gaussian curve. A light beam whose light intensity is distributed in a one-dimensional Gaussian curve in space is irradiated on a CCD sensor. The pixels of the CCD are closely arranged, and each pixel is equivalent to a vertical grid. As shown in Figure 9(a), the output of the pixel is actually Integral of the total amount of light intensity falling on a pixel. Due to the excessive discretization, the resolution of the image is low. In order to increase the number of sampling points of the curve, the Gaussian curve on the CCD sensor can be changed by adjusting the slit, spectroscopic grating, collimating mirror, imaging mirror or linear array detector. The position is equivalent to moving the CCD sensor to collect different positions of the curve. The fine-tuning of slits, beam-splitting gratings, collimating mirrors, imaging mirrors, or linear array detectors is equivalent to fine-tuning the position of the sensor, so that a more delicate description of the curve can be obtained. Fig. 9(b) is an interpolation result diagram of multiple measurement results after scanning without adjusting the slit, spectroscopic grating, collimating mirror, imaging mirror or linear array detector. Fig. 9(c) is a result diagram after interpolation of multiple measurement results after scanning when adjusting the slit, spectroscopic grating, collimating mirror, imaging mirror or linear array detector. It can be seen from Figures 9(b) and 9(c) that when the moving distance of the Gaussian image on the CCD reaches one pixel width by adjusting the slit, splitting grating, collimating mirror, imaging mirror or line array detector, it is completed once Scanning, interpolating each measurement data of one scanning to form a smoother curve.
结合这里披露的本发明的说明和实践,本发明的其他实施例对于本领域技术人员都是易于想到和理解的。说明和实施例仅被认为是示例性的,本发明的真正范围和主旨均由权利要求所限定。 Other embodiments of the invention will be apparent to and understood by those skilled in the art from consideration of the specification and practice of the invention disclosed herein. The description and examples are considered exemplary only, with the true scope and spirit of the invention defined by the claims.
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