CN107941343A - High-precision optical micro-scanning micro-thermal imaging system - Google Patents
High-precision optical micro-scanning micro-thermal imaging system Download PDFInfo
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The invention discloses a kind of high-precision optical micro-scanning micro-thermal imaging system.For there are larger micro scanning error in the patent application " the high resolution micro imaging method for carrying optical flat micro scanner " that Chinese Patent Application No. is 200710160758.1, spatial resolution is low, it is and stringent to machinery, optical manufacturing required precision, the commercialization problem of system is not utilized, the core purpose of the present invention is to provide a kind of optical flat rotation micro scanning system of higher precision, and the high-precision optical micro-scanning micro-thermal imaging system that integrated design obtains is completed with original micro-thermal imaging system.The present invention considers multifactor error mathematic model by establishing, further optimize system design, reduce the micro scanning error for having developed optical micro-scanning micro-thermal imaging system, improve the spatial resolution of system, so that system performance is further lifted, the instantiation and commercialization of system are more favorable for.
Description
Technical field
The invention belongs to infrared thermal imaging field, is related to one of the non-brake method high resolution based on optical flat micro scanner
Kind high-precision optical micro-scanning micro-thermal imaging system.
Background technology
Thermal imaging has been widely applied in fields such as industrial detection, medical diagnosis and scientific researches at present, into
For effective thermal diagnosis instrument.But current most of thermal imaging systems are operating mode of looking in the distance, it is not suitable for applying micro- in needs
Analysis and the occasion of detection, have impact on the analysis to the understanding and failure of things.And reality has many micro- heat analysis of needs
With the occasion of detection.For example, in the design, fail-safe analysis and defects detection of microelectronics integrated chip and its circuit, need
Non-cpntact measurement diagnosis is carried out using micro-thermal imaging technology；, it is necessary to utilize micro-thermal imaging skill in biomedical diagnostic
Diagnosis of the art to cancer cell provides technological means etc. with growth analysis.
In order to meet the needs in above-mentioned field, there is different types of micro-thermal imaging the nineties in twentieth century in foreign countries
Product.But external micro-thermal imaging system uses refrigeration mode detector more, and not only system bulk weight is big, but also expensive
(often cover system price at 20~400,000 dollars), makes the application at home of micro-thermal imaging technology and development greatly be limited
System.Only have several to be reported on microscopical use of import refrigeration mode thermal imaging at present.For example, domestic electronics 5 draws for 1996
Studied into U.S. microscopic thermographer InfraScope.Tsinghua University's Zhu De loyalties etc. using import TVS-5000 thermal imaging systems into
Row experimental study.Thermometric accuracy existing for microscopic thermographer InfrascopeII is not enough divided in Zhang Yixuan and Confucianism east with space
Distinguish that the problem of power is not high is inquired into.TaiWan, China Tsinghua University MEMS laboratories utilize micro-thermal imaging system pair within 2009
The tunable camera lens of thermal drivers has carried out heat analysis detection.The infrared microscopy thermal imaging analysis power device of beam France in 2011
Part reliability, good effect is played in actual device design process.Liu Xia U.S.s in 2015 et al. elaborate micro- red
Application of the outer thermal imaging in failure analysis fault location, provides the malfunction and failure analysis of component and validation checking
Directive function.2011, operation principle of the Wang Guodong et al. based on infrared microscope thermal imaging system, with human engineering
Learn, successfully have developed the infrared microscopy thermal imaging system that enlargement ratio is 3 times.
Uncooled fpa detector has compared with high performance-price ratio, without refrigeration, the characteristic such as low in energy consumption, small, light-weight,
Particularly substantially reduced recently as the development of thermal imaging, uncooled fpa detector cost, promote it each
The application in kind field.But at that time there is not yet special report or production based on uncooled fpa detector micro-thermal imaging system
Product.
For this reason, applicant have developed a kind of microscopic thermographer based on non-refrigerated infrared focal plane probe, China is applied for
Patent, its is entitled《Microscopic thermal imaging method and its device》, Chinese Patent Application No. 200710100165.6.Shown in Fig. 1
It is the photo in kind of the micro-thermal imaging device.Due to detector array scale is smaller (320 × 240 or 384 × 288) and visit
It is larger (45 45 μm of μ ms or 38 μm × 38 μm) to survey device unit size, in order to obtain the spatial resolution of higher, applicant is into one
Step have studied a kind of high resolution micro-thermal imaging system based on optical flat rotation micro scanner as shown in Fig. 2, and applying
Chinese patent, its is entitled《High resolution micro imaging method with optical flat micro scanner》, Chinese patent application
Number be 200710160758.1.But this system is there are larger micro scanning error, and it is tight to machinery, optical manufacturing required precision
Lattice, are unfavorable for the commercialization of system.For this reason, a kind of optical flat rotation micro scanner of higher precision of present invention research, and with
Original micro-thermal imaging system completes integrated design and obtains high resolution micro-thermal imaging system.
The content of the invention
" height of optical flat micro scanner is carried for the patent application that Chinese Patent Application No. is 200710160758.1
There are larger micro scanning error in resolving power micro imaging method ", spatial resolution is low, and to machinery, optical manufacturing essence
Degree requires strictly, not utilizing the commercialization problem of system, and core purpose of the invention is to provide a kind of optics of higher precision and puts down
Plate rotates micro scanning system, and completing the high-precision optical micro scanning that integrated design obtains with original micro-thermal imaging system shows
Low-grade fever imaging system.
It is 200710160758.1 in Chinese Patent Application No.《High resolution with optical flat micro scanner is micro-
Imaging method》In patent application, the micro-thermal imaging system with optical flat micro scanner, including infrared microscopy thing
Mirror, optical flat micro scanner, FLIR infrared thermal imaging components Tau2-324, micro- thermal image processing system, hand-operated lifting platform
And power supply；Infrared micro-objective is used to object infrared radiation images amplification being imaged on uncooled fpa detector；
The optical flat micro scanner is mainly by infrared optics tablet, precision optics plate bearing, High Precision Automatic rotation
Turn platform and programmable controller composition；Precision optics plate bearing makes infrared optics tablet be fixed on High Precision Automatic rotation
On platform, and infrared optics tablet ensures to keep optimum angle of incidence with optical axis；Infrared optics tablet can be any around optical axis rotation
Specified angle, controls the High Precision Automatic rotating platform of fixed infrared optics tablet to make micro- by programmable controller in systems
After thermal image is by infrared optics tablet, under the conditions of four differ 90 ° of inclination angle successively, 2 × 2 micro scanning mould of standard is formed
Formula, obtains four frame low resolution images；
The FLIR infrared thermal imagings component Tau2-324 is used to be converted to the radiation image that infrared micro-objective is formed
Electronic image, is exported by normal video, and four frame low resolution normal video thermal images are converted into digital picture, is stored in calculating
In machine；The micro- thermal image processing system mainly passes through the mode mixing together four low point identical with obtaining micro scanning image
Distinguish that the undersampled image of power is the over-sampling thermal image of a panel height resolving power, at the same complete the display of thermal image, analysis, storage and
Other processing functions；Hand-operated lifting platform and power supply are used to integrate micro-thermal imaging device, and provide working power.
As known uncooled fpa detector pel spacing L, 2 × 2 scan pattern of standard is obtained, can be by
Determine micro-displacement Δ value；Then the refractive index n and slab-thickness d according to the optical plate glass material used,
Flat optical element normal orientation and focus planar detector normal direction are determined by Δ=dsin α (1-1/n)
Angle α (it is paraxial rays to think to incide the light on focal plane)；
Axial displacement Z is determined by Z=dcos α (1-1/n)；
The micro-displacement tolerance δ Δs given according to overall system design, byDetermine the tolerance of slab-thickness d
δd；
The present invention uses optical flat rotary process, considers micro scanning overall error, including incide flat optical element
On the non-paraxial error brought of light and processing and installation error, the inclined best angle of tablet is determined, to reduce frequency
Obscure so as to improve the resolving power of system.
The micro-displacement tolerance δ Δs given according to overall system design, byDetermine the tolerance of tablet inclination alpha
δα；ByDetermine platen parallel degree angle of deviation δ φ.
The present invention considers multifactor error mathematic model by establishing, and further optimizes system design, reduces
The micro scanning error of optical micro-scanning micro-thermal imaging system is developed, improves the spatial resolution of system so that system performance
Further lifted, be more favorable for the instantiation and commercialization of system.
Brief description of the drawings
Fig. 1 is the microscopic thermographer without optical microscanner；
Fig. 2 is the micro-thermal imaging system photo with optical flat rotation micro scanning；
Fig. 3 is the optical path analysis that optical flat realizes micro scanning；
Fig. 4 is 2 × 2 micro scanning mode imaging position of standard；
Fig. 5 is original pixel and pixel position relationship after 2 × 2 micro scanning of standard；
Fig. 6 is optical flat thickness d and its inclination alpha graph of a relation；
Fig. 7 is infrared optical system emergent ray index path；
Fig. 8 is micro scanner installation error schematic diagram；
Fig. 9 is micro scanning mechanical system structure figure.
Embodiment
The core of the present invention is " to be put down for the patent application that Chinese Patent Application No. is 200710160758.1 with optics
There are larger micro scanning error in the high resolution micro imaging method of plate micro scanner ", spatial resolution is low, and to machine
Tool, optical manufacturing required precision are stringent, the problem of not utilizing the commercialization of system, have studied a kind of optical flat of higher precision
Micro scanning system, and with former micro-thermal imaging system complete integrated design obtain high resolution optical micro-scanning it is micro- heat into
As system.
Further illustrate technical scheme with reference to the accompanying drawings and examples.
The micro-thermal imaging system based on optical flat micro scanner of higher precision of the present invention, as shown in Fig. 2, including red
Outer microcobjective, optical flat micro scanner, FLIR infrared thermal imaging components Tau2-324, micro- thermal image processing system, hand
Dynamic lifting platform and power supply.Infrared micro-objective is used to object infrared radiation images amplification being imaged on uncooled fpa detector
On；Optical flat micro scanner mainly by infrared optics tablet, precision optics plate bearing, High Precision Automatic rotating platform and
Programmable controller forms.Optical flat bearing makes optical flat be fixed on rotating platform, and optical flat ensures and light
Axis keeps optimum angle of incidence.Optical flat can be arbitrarily designated angle around optical axis rotation, control fixed light by controller in systems
After the rotating platform of tablet makes micro- thermal image by optical flat, under the conditions of four differ 90 ° of inclination angle successively, formed
2 × 2 micro scanning patterns, it is as shown in Figure 4 to obtain four frame low resolution images；Infrared thermal imaging component is used for infrared micro-objective
Into radiation image be converted to electronic image, and four frame low resolution normal video thermal images are converted into digital picture, are stored in
In computer；Micro- thermal image processing system mainly passes through the mode mixing together four low point identical with obtaining micro scanning image
Distinguish that the undersampled image of power is the over-sampling thermal image of a panel height resolving power, at the same complete the display of thermal image, analysis, storage and
Other processing；Hand-operated lifting platform and power supply are used to integrate micro-thermal imaging device, and provide working power.
The method determined on optical flat is as follows：It is inclined flat when adding one piece in input path according to optical principle
Row optical flat, will make light keep it is parallel with original optical path under conditions of generation meridian direction displacement, axial displacement Z, such as
Shown in Fig. 3；By geometric optical theory, obtain：
The refracting lengths L of refracted light in optical flat elementreFor：
The length d of L4L4, Δ L is expressed as：
It is not difficult to lead：
If light L1 is paraxial rays, due to incidence angle θ very little, then formula (5) approximate representation is：
Δ L=d (1-1/n) (6)
Assuming that the angle of flat optical element normal orientation and focus planar detector normal direction is α, and think to incide
Light on focal plane is paraxial rays, then position of the picture of IR Scene along focal plane parallel direction and focal plane normal direction
Move Δ and Z is respectively：
Δ=Δ L × sin α=d (1-1/n) sin α (7)
Z=Δ L × cos α=d (1-1/n) cos α (8)
I.e. Δ, Z are only related with the refractive index n of tablet, the thickness d of tablet and tablet inclination alpha.If the refractive index of tablet
N, the thickness d of tablet and angle of incidence of light θ are constant, and tablet incline direction around optical axis carry out azimuth rotation when, then can light harvesting
The focus point of beam will be formed centered on preimage point on non-refrigeration focal surface, the circumference using Δ as radius.If rotary optical
Tablet makes it rest on 45 °, 135 °, 225 ° and 315 ° this four positions for being separated by 90 ° progress lack sampling imagings, such as Fig. 4 respectively
It is shown, that is, complete the system micro scanning image of 2 × 2 micro scanning pattern of standard.
Neighbouring sample point is in the micro-displacement amount P of detector face
P=L/2 (9)
Wherein, L is the pixel center square of focus planar detector, then micro scanning micro-displacement amount Δ is
As known uncooled fpa detector pixel center square L, Δ value is determined by formula (10), then according to optical flat
The refractive index n of the material and slab-thickness d of selection, inclination alpha of the optical flat with respect to optical axis is can determine that by formula (7).It is but above-mentioned
Method have ignored the non-paraxial error brought of the light incided on flat optical element and system processing, the error of installation, institute
It is bigger with the composition error that micro scanning system is brought, cause the spatial resolution of micro-thermal imaging system relatively low.
The present invention still uses optical flat rotary process, considers micro scanning overall error and (incides flat optical element
On the non-paraxial error brought of light and processing, installation error), the inclined best angle of tablet is determined, to reduce frequency
Obscure so as to improve the resolving power of system, specific improvement part is as follows：
Fig. 5 show original pixel and by the pixel position graph of a relation after micro scanning.Bold box represents original in figure
Pixel position, filament frame represent the pixel position after micro scanning.Micro-displacement amount is Δ after known micro scanning, in order to meet micro scanning
Pixel position relation, original pixel o1 after the refraction of planar optics original paper after the scanning that is formed pixel can in m1 positions,
Can also be in m2 positions, it might even be possible to pixel position after any micro scanning in arrow direction in figure 3.So micro-displacement
Amount Δ needs to meet formula (11)：
Therefore, the angle of inclination model of flat optical element micro scanning is：
Fig. 6 is optical flat thickness d and its inclination alpha graph of a relation；It will be appreciated from fig. 6 that when the timings of α mono-, the value of k is smaller, light
Slab-thickness d is smaller, and yield rate and difficulty of processing are bigger.Therefore the value of k cannot be too small, and specific value condition will be below
Analyzed.
The present invention is by establishing the error for inciding far-off axle light rays on optical flat and bringing, micro scanning component is processed and peace
The mathematical model of error is filled, determines the optimum tilt angle of optical flat.
Fig. 7 is infrared optical system emergent ray index path, point A on object space optical axis a bit, O1OO2For infrared optics
The emergent pupil of system, P1P2For optical system focal plane, point A' be point A through optical system focal plane into picture.Set out pupil face and point
The maximum angle that A' is formed is θomax。
The derivation of the germanium wafer angle of inclination model of flat optical element micro scanning is all to assume that θ is sufficiently small, with formula (6)
Based on establishment, the optical system of selection must is fulfilled for formula (6), according to Fig. 7, when optical flat element be inserted into optical system with
Have when between focus planar detector：
θmax=θomax+α (13)
θ in formulamaxFor in optical system exit light with the maximum in flat optical element normal angle；α is optical system
The angle of system optical axis and flat optical element normal.
Present system uses material of the germanium as optical flat, its refractive index is 4.00319, density 5.32g/
cm3.Due to having determined a diameter of 22mm of optical flat, the yield rate of comprehensive analysis diameter 22mm germanium wafers processing, quality and
The transmitance of infrared light, the final thickness d for determining germanium wafer are 1.5mm.Because focus planar detector pixel spacing L is 25 μm, that
Obtained by formula (12)：
The field angle θ of 2 times of infrared objectives in known present systemomax=27.6997 °.When germanium wafer thickness is 1.5mm
When, tilt angle alpha and the correspondence of parameter k are as shown in table 1.
Table 1
By table 1 as it can be seen that with the increase of k, the inclination alpha of optical flat, θomaxAnd θmaxAnd then increase.And angle of inclination
Determine to incide error caused by far-off axle light rays on optical flat when taking different value firstly the need of calculating k.Infrared optics system
Unite θmaxValue and micro scanning error (unit；μm) specific as shown in table 2, whereinFor theory
Value, Δ '=d (1-1/n) sin α are actual value, then corresponding error is (Δ-Δ ')/Δ, i.e.,
Table 2
As shown in Table 2, when k values are different, α values are also changing, and cause θmaxAlso change.α values are smaller in theory, incident
Error is also smaller caused by far-off axle light rays on to optical flat, it is clear that error minimum 3.7323% when k values take 0.
But micro scanner is inevitably present certain installation error in actual installation process, therefore also need to
Consider error caused by the processing of micro scanning component and installation.
Fig. 8 is micro scanner installation error schematic diagram, and α is infrared optical system optical axis and flat optical element normal angle
Theoretical value, α ' be installation after actual angle, M is optical flat diameter 22mm.Pass through the current machining accuracy energy of inspection information
Enough reach ± 5 μm, therefore error delta H is maximum up to 5 μm.Then have：
TE is micro scanning overall error, that is, ignore because incide the non-paraxial error brought of the light on flat optical element and
The ratio of processing, the error actual parameter value of installation and ideal situation parameter value, that is, incide on flat optical element
The non-paraxial error brought of light and processing, the product for the error installed.
Preferable α values and actual α ' values and micro scanning system overall error coefficient when table 3 takes 0,1,2,3 respectively for k.When
Corresponding α, α when k takes different value ' and micro scanning system overall error coefficient T E it is as shown in table 3.
Table 3
Final k values choose the data that depend in table 3.From this table it can be seen that when k is 2, TE is minimum.Cause
This, finally selectes k=2, at this time α=2.2508 °；Corresponding axial displacement Z=1.124430643mm, it is to image space
Influence to be corrected by the focusing of infrared lens；
Refractive index n, the slab-thickness d and optical flat inclining with respect to optical axis of optical plate glass material are understood by (7) formula
The precision of angle α can all influence the precision of meridian direction displacement.The precision for understanding displacement by (9) and (11) formula finally influences
The precision of the micro-displacement P of the undersampled image of four positions for being separated by 90 °, so as to influence last high resolution image co-registration knot
Fruit.Discounting for these influence factors, finally make the micro-displacement of four width undersampled images beyond high resolution image co-registration
The precision that algorithm is allowed, will not obtain good fusion results, or even obtain than the four worse figures of width undersampled image quality
Picture.Whole system design will fall short of success for lack of final effort, therefore, it is necessary to provide optical flat error analysis, to instruct system processing and adjustment.
Optical flat error and its analysis
Formula (4) is deployable to be：
Since optical micro-scanning belongs to low-angle scanning, α values are typically small, and formula (8) can be also reduced to
If the tolerance of slab-thickness d is δ d；The tolerance of tablet inclination alpha is δ α, is not difficult to draw by (9) formula：
It is visible after the material of optical flat determines by deriving above, the tolerance δ d and tablet inclination alpha of parallel surface plate thickness d
Tolerance δ α all can bring error to micro-displacement Δ.It is assumed that the appearance using Δ during four width undersampled images fusion high resolution image
Perhaps error is δ Δs, then the tolerance δ d of slab-thickness d and the tolerance δ α of tablet inclination alpha can be determined by (19) and (20) formula.So as to
Claim to optically and mechanically machining accuracy.
When deviation occurs for the depth of parallelism of optical flat, light path shifted by delta ' value after reflecting twice will be sent out with design load Δ
Raw deviation.The distance of optical flat range imaging sensor is let d be, the tolerance δ φ of platen parallel degree are represented by：
Since D is bigger, δ Δs caused by same δ φ are bigger, and the influence to system is bigger, so, removing in the design should
While reducing the nonparallelism of tablet, should try one's best makes optical flat close to sensor.
Determine that the tolerance δ Δs of displacement distance Δ are 0.315 μm according to the relevant parameter of image registration accuracy and the system,
Then slab-thickness d tolerances δ d=10.68857189 μm；α angle allowance δ α=0.016038558 °；Tablet processes depth of parallelism tolerance
δ φ=0.025698077 '.It is finally completed the design and dress of the associated mechanical parts of whole optical flat rotation micro scanner
It is as shown in Figure 9 with emulation.
The course of work of optical flat micro scanner
As shown in figure 4, rotary optical tablet completes first to the upper left side first position 1 from the horizontal by 45 ° first
Secondary imaging；Then rotate clockwise 90 ° of optical flat, image space is moved right on detector array L/2, i.e., with level
The direction upper right side second place 2 at 45 °, completes second of image；On the basis of the second place 2, then rotate clockwise light
90 ° of tablet is learned, image space, to bottom offset L/2, is obtained the 3rd width image of lower right the third place 3 in detector array；
Finally it is further continued for rotating clockwise 90 ° of the 4th positions 4 of arrival, obtains the 4th imaging.Above procedure loop cycle carries out, and uses
Newest 4 width low resolution image can obtain the over-sampling image of 1 panel height resolving power by fusion.
Beneficial effects of the present invention
The present invention " carries the high resolution of optical flat micro scanner for the patent of Application No. 200710160758.1
Micro imaging method ", there are larger micro scanning error, the problems such as yield rate is low, and difficulty of processing is big, research establish consider it is multifactor
Error mathematic model, further optimize system design, reduction has been developed the micro- of optical micro-scanning micro-thermal imaging system and swept
Retouch error, improve the spatial resolution of system so that system performance is further lifted, be more favorable for system instantiation and
Commercialization.
In conclusion the present invention provides higher precision the high resolution based on optical flat micro scanner it is micro- heat into
As system.Present system is applied to microelectronics and opto-electronic device and its application field, can improve IC chip and its
Reliability design is horizontal, ensures the performance and quality of microelectronics and opto-electronic device and products thereof；Applied to medical domain, can be
The new technological means of the offers such as medical diagnosis, cancer detection；Applied to field of scientific study, new point can be provided for scientific and technical personnel
Analysis instrument；Applied to police criminal detection field, new technological means can be indescribably supplied for suspicious material evidence, detecing for trace, had good
Application prospect and promotional value.The micro-thermal imaging system of the present invention will be big further combined with super-resolution image processing algorithm
Amplitude improves the spatial resolution of system, so that applied to the field for more needing the trickle heat analysis of high resolution.
Claims (1)
1. a kind of high-precision optical micro-scanning micro-thermal imaging system, including infrared micro-objective, optical flat micro scanner,
FLIR infrared thermal imaging components Tau2-324, micro- thermal image processing system, hand-operated lifting platform and power supply；Infrared micro-objective is used
It is imaged in by the amplification of object infrared radiation images on uncooled fpa detector.
The optical flat micro scanner is mainly by infrared optics tablet, precision optics plate bearing, High Precision Automatic rotary flat
Platform and programmable controller composition；Precision optics plate bearing makes infrared optics tablet be fixed on High Precision Automatic rotating platform
On, and infrared optics tablet ensures to keep optimum angle of incidence with optical axis；Infrared optics tablet can be arbitrarily designated around optical axis rotation
Angle, the High Precision Automatic rotating platform for controlling fixed infrared optics tablet by programmable controller in systems make micro- thermal map
After by infrared optics tablet, under the conditions of four differ 90 ° of inclination angle successively, 2 × 2 micro scanning pattern of standard is formed, is obtained
To four frame low resolution images；
The work step of the optical flat micro scanner is as follows：
Rotary optical tablet is completed to be imaged for the first time to the upper left side first position from the horizontal by 45 ° first；Then up time
90 ° of pin rotary optical tablet, makes image space move right on detector array L/2, the i.e. upper right from the horizontal by 45 °
The square second place, completes second of image；On the basis of the second place, then 90 ° of optical flat is rotated clockwise, make into image position
Put in detector array to bottom offset L/2, obtain the 3rd width image of lower right the third place；Finally it is further continued for rotating clockwise
90 ° of the 4th positions of arrival, obtain the 4th imaging；Above procedure loop cycle carries out, using newest four width low resolution figure
Over-sampling image as a panel height resolving power can be obtained by fusion；
The radiation image that infrared micro-objective is formed is converted to electronic image by the FLIR infrared thermal imagings component Tau2-324,
Four frame low resolution normal video thermal images are converted into digital picture, are stored in computer；The micro- thermal image processing system
System is mainly a panel height by the undersampled image of the mode mixing together four width low resolution identical with obtaining micro scanning image
The over-sampling thermal image of resolving power, while complete display, analysis, storage and the other processing functions of thermal image；Hand-operated lifting platform
And power supply is used to integrate micro-thermal imaging device, and provide working power；
As known uncooled fpa detector pel spacing L, 2 × 2 micro scanning pattern of standard is obtained, can be byReally
Determine micro-displacement Δ value；Then the refractive index n and slab-thickness d according to the optical plate glass material used,
The angle α of flat optical element normal orientation and focus planar detector normal direction is determined by Δ=dsin α (1-1/n)
(it is paraxial rays to think to incide the light on focal plane)；
Axial displacement Z is determined by Z=dcos α (1-1/n)；
The micro-displacement tolerance δ Δs given according to overall system design, byDetermine the tolerance δ d of slab-thickness d；
It is characterized in that：The micro-displacement tolerance δ Δs given according to overall system design, byDetermine tablet inclination alpha
Tolerance δ α；ByDetermine platen parallel degree angle of deviation δ φ；
Final calculation result is as follows：
L=25 μm of focus planar detector pixel centre-to-centre spacing, infrared optics tablet select germanium single crystal n=4.0028 as optical flat
Material, optical flat thickness d=1.5mm, to realize the micro scanning of standard 2 × 2, inclination alpha=2.2508 ° of optical flat, phase
The axial displacement Z=1.124430643mm answered, its influence to image space are corrected by the focusing of infrared lens；
According to the required precision of system image reconstruction, the tolerance of micro scanning displacement is takenThen optical flat plus
Work tolerance is determined as：The tolerance of slab-thickness d：α angle allowances：δ α=0.016038558 °；
The processing depth of parallelism tolerance of tablet：δ φ=0.025698077 '.
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