CN111338387B - Micro-scanning super-resolution control system and method based on piezoelectric driving - Google Patents
Micro-scanning super-resolution control system and method based on piezoelectric driving Download PDFInfo
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- CN111338387B CN111338387B CN201811547823.0A CN201811547823A CN111338387B CN 111338387 B CN111338387 B CN 111338387B CN 201811547823 A CN201811547823 A CN 201811547823A CN 111338387 B CN111338387 B CN 111338387B
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Abstract
The invention discloses a micro-scanning super-resolution control system and method based on piezoelectric driving, comprising a two-dimensional piezoelectric high-speed high-precision micro-scanning platform provided with a specific lens or a reflecting mirror, a miniaturized high-frequency controller and an image algorithm processor, wherein the two-dimensional piezoelectric high-speed high-precision micro-scanning platform is physically connected with a specific lens or a reflecting mirror in an optical system, original image data obtained by a detector is transmitted into the image algorithm processor, the two-dimensional piezoelectric high-speed high-precision micro-scanning platform and the miniaturized high-frequency controller are used for controlling data transmission, and the miniaturized high-frequency controller and an upper computer are used for controlling data transmission. The invention greatly reduces the design and production difficulty of the control system, reduces the size of the control system and the cost of the system, and simultaneously can greatly improve the positioning precision of the micro scanning platform of the micro scanning system under the condition of large wide temperature due to the introduction of the temperature compensation technology, thereby fully ensuring the imaging quality of the micro scanning super-resolution system.
Description
Technical Field
The invention relates to the technical field of optical super-resolution, in particular to a micro-scanning super-resolution control system and method based on piezoelectric driving.
Background
The traditional optical super-resolution system adopts closed-loop control, and a sensor and a closed-loop control module are required to be introduced, so that the control system is often complicated, and meanwhile, the closed-loop control is a process of continuously correcting parameters to approach command parameters, so that the response time is long, the frame frequency of the detector is required to be reduced to match the in-place time of a micro-scanning device, and the performance of the detector is wasted; if the frame rate of the detector is not reduced, the micro-scanning lens can vibrate or cannot be completely in place during the exposure time of the detector, so that the picture has motion blur, and the detection capability of the system is reduced. The piezoelectric material is sensitive to temperature, the temperature change can lead to the change of indexes such as capacitance, displacement and the like, meanwhile, the accuracy of the position sensor is greatly influenced by temperature, and the displacement error caused by temperature cannot be completely eliminated, and for some special applications, the positioning accuracy under the full-temperature wide use condition cannot be ensured by using Wen Kuangao to 110 ℃, so that the super-resolution effect is poor. Conventional closed loop control systems are relatively complex and cannot be made sufficiently compact.
Disclosure of Invention
The invention aims to provide a micro-scanning super-resolution control system and a micro-scanning super-resolution control method based on piezoelectric driving, which greatly reduce the design and production difficulty of the control system, reduce the size of the control system and reduce the system cost. Meanwhile, the control system is simplified, so that the power consumption of the control system can be greatly reduced, and the problems in the background technology are solved.
In order to achieve the above purpose, the present invention provides the following technical solutions: the micro-scanning super-resolution control system based on piezoelectric driving comprises an optical system, a two-dimensional piezoelectric high-speed high-precision micro-scanning platform provided with a certain specific lens or reflecting mirror in the optical system, a miniaturized high-frequency controller and an image algorithm processor, wherein the two-dimensional piezoelectric high-speed high-precision micro-scanning platform is based on a two-dimensional horizontal displacement or two-axis rotating mechanism driven by piezoelectric, the two-dimensional piezoelectric high-precision micro-scanning platform is physically connected with the specific lens/reflecting mirror, light rays emitted by the optical system are processed to enable the light rays to be imaged on a detector, original data image data obtained by the detector are transmitted to the image algorithm processor to carry out super-resolution image reconstruction, the image algorithm processor is connected with a display and carries out super-resolution image data output, and the two-dimensional piezoelectric high-speed high-precision micro-scanning platform and the miniaturized high-frequency controller carry out control data transmission, and the miniaturized high-frequency controller and an upper computer carry out control data transmission.
Further, the two-dimensional piezoelectric high-speed high-precision micro-scanning platform is internally provided with a piezoelectric motion mechanism and integrates a temperature sensor, wherein,
the piezoelectric motion mechanism enables the position of a specific lens/reflecting mirror to generate micro displacement or angle to generate micro deflection, so that the optical axis generates sub-pixel level micro displacement at the focal plane position of the detector;
the temperature sensor can monitor the temperature of the two-dimensional piezoelectric high-speed high-precision micro-scanning platform in real time.
Further, the miniaturized high-frequency controller is composed of a digital signal processing module, a voltage amplifying module and a calibration parameter storage module, wherein the digital signal processing module comprises a synchronous triggering module, a pre-shaping module and a temperature compensation module,
the synchronous triggering module receives a scanning mode command sent by the upper computer, triggers a signal, transmits a command waveform signal to the pre-shaping module, and sends a pre-shaped and corrected waveform command signal to the voltage amplifying module;
the voltage amplification module amplifies the low-voltage input voltage to high-voltage driving voltage for driving the piezoelectric motion mechanism;
the temperature compensation module receives a detected temperature signal from the temperature sensor, sends a voltage correction parameter to the pre-shaping module, and transmits a temperature/compensation parameter with the calibration parameter storage module;
the calibration parameter storage module is used for storing displacement parameters of the high-precision micro-scanning platform, which are obtained through experiments, along with temperature changes.
The invention provides another technical scheme that: the micro-scanning super-resolution control method based on piezoelectric driving comprises the following control steps:
s1: the digital signal processing system reads the external trigger signal and combines the stored scanning mode and the scanning interval time parameter to generate a micro-scanning command signal waveform;
s2: the temperature sensor converts temperature information into voltage signals in real time, the voltage-temperature conversion module converts the obtained voltage signals into temperature information and is matched with temperature calibration parameters to obtain temperature correction coefficients, and the voltage amplitude of the micro-scanning command signals is corrected;
s3: smoothing the abrupt step signal by pre-shaping the corrected micro-scanning command signal to generate a pre-shaped command waveform;
s4: the voltage amplification module amplifies the pre-shaped command waveform and directly drives the piezoelectric motion mechanism to move;
s5: after the piezoelectric movement mechanism moves in place, the camera starts to expose;
s6: the waveform cycle is circulated, so that a low-resolution original image sequence is obtained;
s7: and carrying out image reconstruction on the low-resolution original image sequence to obtain a high-resolution image.
Further, the step of temperature calibration of S2 is as follows: the method comprises the steps that a high-low temperature box and a capacitance sensor are used as measuring equipment, a data acquisition card is used as data acquisition equipment, and voltage amplitude values of command waveforms actually generated by a miniaturized high-frequency controller required by a piezoelectric motion mechanism to reach a designated position at different temperatures are obtained through an upper computer program;
further, the two-dimensional piezoelectric high-speed high-precision micro-scanning platform and the miniaturized high-frequency controller are simultaneously placed in a high-low temperature box, a temperature value is set, measurement is required to be carried out under a stable state for at least one hour for each test point, so that the temperature of the two-dimensional piezoelectric high-speed high-precision micro-scanning platform is ensured to be properly stable, an upper computer is set to send a sine signal with the frequency of 2Hz to the two-dimensional piezoelectric high-speed high-precision micro-scanning platform, and a voltage command of the upper computer is regulated according to the feedback of a capacitive sensor until a piezoelectric motion mechanism reaches a designated position.
Compared with the prior art, the invention has the beneficial effects that: the micro-scanning super-resolution control system and method based on the piezoelectric driving provided by the invention have the advantages that the closed-loop control is not needed, so that the design and production difficulty of the control system is greatly reduced, the size of the control system is reduced, the cost of the system is reduced, and meanwhile, the temperature sensitivity of the piezoelectric material is compensated due to the introduction of the temperature compensation technology, so that the positioning precision of a micro-scanning platform of the micro-scanning system under the condition of large wide temperature can be greatly improved, and the imaging quality of the micro-scanning super-resolution system is fully ensured. Meanwhile, the control system is simplified, so that the power consumption of the control system can be greatly reduced. Compared with the traditional piezoelectric control system adopting PID closed-loop control, the control system and the method can reduce the size by more than 30%, and under the condition of full temperature and width, the positioning accuracy can reach 500nm for the stroke of 20um, and the micro-scanning stabilizing time is greatly improved by adopting open-loop control.
Drawings
FIG. 1 is a block diagram of a micro-scanning super-resolution control system according to the present invention;
FIG. 2 is a schematic diagram showing the effect of micro-scan displacement on an optical path according to the present invention;
FIG. 3 is a control logic diagram of a micro-scanning super-resolution control system according to the present invention;
FIG. 4 is a control flow chart of the micro-scanning super-resolution control system of the present invention;
FIG. 5 is a control graph of a micro-scanning super-resolution control system according to the present invention;
FIG. 6 is a schematic diagram of temperature calibration of the micro-scanning super-resolution control system according to the present invention.
In the figure: 1. an optical system; 11. a specific lens/mirror; 2. a two-dimensional piezoelectric high-speed high-precision micro-scanning platform; 21. a piezoelectric motion mechanism; 22. a temperature sensor; 3. a miniaturized high frequency controller; 31. a digital signal processing module; 311. a synchronous triggering module; 312. a pre-shaping module; 313. a temperature compensation module; 32. a voltage amplifying module; 33. a calibration parameter storage module; 4. an image algorithm processor; 6. a detector; 7. a display; 8. and an upper computer.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-3, a micro-scanning super-resolution control system based on piezoelectric driving includes an optical system 1, a two-dimensional piezoelectric high-speed high-precision micro-scanning platform 2 provided with a lens or a reflecting mirror 11 in the optical system, a miniaturized high-frequency controller 3, and an image algorithm processor 4, wherein the two-dimensional piezoelectric high-speed high-precision micro-scanning platform 2 is based on a two-dimensional horizontal displacement or two-axis rotation mechanism of the piezoelectric driving, and is physically connected with the lens/reflecting mirror 11, light emitted by the optical system 1 is processed to form an image on a detector 6, raw data image data obtained by the detector 6 is transmitted to the image algorithm processor 4 for super-resolution image reconstruction, the image algorithm processor 4 is connected with a display 7 for super-resolution image data output, the two-dimensional piezoelectric high-speed high-precision micro-scanning platform 2 and the miniaturized high-frequency controller 3 are used for controlling data transmission, the miniaturized high-frequency controller 3 and the upper computer 8 are used for controlling data transmission, and the upper computer 8 can set a related micro-scanning mode and a micro-scanning time interval.
The two-dimensional piezoelectric high-speed high-precision micro-scanning platform 2 is internally provided with a piezoelectric motion mechanism 21 and is integrated with a temperature sensor 22, wherein the piezoelectric motion mechanism 21 enables light rays to generate sub-pixel level micro-displacement at the imaging position of the detector 6, and the control mode of the piezoelectric motion mechanism 21 is pre-shaping open-loop control with a temperature correction function; the temperature sensor 22 can monitor the temperature of the two-dimensional piezoelectric high-speed high-precision micro-scanning platform 2 in real time. The miniaturized high-frequency controller 3 is composed of a digital signal processing module 31, a voltage amplifying module 32 and a calibration parameter storage module 33, wherein the digital signal processing module 31 is used as a communication center at the same time, receives an upper computer 8 parameter setting command and receives a synchronous starting command, the digital signal processing module 31 comprises a synchronous triggering module 311, a pre-shaping module 312 and a temperature compensation module 313, the synchronous triggering module 311 receives a scanning mode command sent by the upper computer 8, triggers a signal and transmits a command waveform signal to the pre-shaping module 312, and the pre-shaping module 312 sends a pre-shaped and corrected waveform command signal to the voltage amplifying module 32; the voltage amplification module 32 amplifies the low-voltage input voltage to a high-voltage driving voltage for driving the piezoelectric motion mechanism 21; the temperature compensation module 313 receives the detected temperature signal from the temperature sensor 22, sends the voltage correction parameter to the pre-shaping module 312, and performs temperature/compensation parameter transfer with the calibration parameter storage module 33; the calibration parameter storage module 33 is used for storing displacement parameters of the high-precision micro-scanning platform, which are obtained through experiments and change along with temperature, and the micro-scanning stepping type is a scanning mode of 2x2, 3x3 and 4x 4.
In order to better demonstrate the control flow of the micro-scanning super-resolution control system based on piezoelectric driving, a micro-scanning super-resolution control method based on piezoelectric driving is provided, the control flow is shown as figure 4, and the method comprises the following control steps:
step 1: the digital signal processing system reads the external trigger signal and combines the stored scanning mode and the scanning interval time parameter to generate a micro-scanning command signal waveform;
step 2: the temperature sensor 22 converts temperature information into voltage signals in real time, the voltage-temperature conversion module converts the obtained voltage signals into temperature information and matches the temperature calibration parameters to obtain temperature correction coefficients, and the voltage amplitude of the micro-scanning command signals is corrected;
step 3: the modified micro-scanning command signal is subjected to smoothing processing by a pre-shaping module 312 to generate a pre-shaped command waveform;
step 4: the voltage amplification module 32 amplifies the pre-shaped command waveform and directly drives the piezoelectric motion mechanism 21 to move, and the piezoelectric motion mechanism 21 enables the optical axis to generate sub-pixel level micro displacement;
step 5: after the piezoelectric movement mechanism 21 moves in place, the camera starts exposure;
step 6: the waveform cycle is circulated, so that a low-resolution original image sequence is obtained;
step 7: and carrying out image reconstruction on the low-resolution original image sequence to obtain a high-resolution image.
Compared with the traditional control scheme, the method can greatly improve the in-place time of the micro scanning lens, effectively eliminate the vibration problem after the micro scanning lens is in place, effectively solve the problem of displacement drift under the condition of large temperature width by adopting the method of calibrating and compensating the temperature sensor 22, and control results are shown in figure 5.
The temperature calibration comprises the following steps: the high-low temperature box and the capacitance sensor are adopted as measuring equipment, the data acquisition card is adopted as data acquisition equipment, and the voltage amplitude of a command waveform actually generated by the miniaturized high-frequency controller 3 required by the piezoelectric motion mechanism 21 reaching the designated position under different temperatures is obtained through the program of the upper computer 8, so that the calibration of temperature parameters is realized; the platform is placed in a high-low temperature box, the temperature value is set, for each test point, the measurement must be performed in a steady state for at least one hour to ensure that the temperature of the platform is properly stable, the upper computer 8 is set to send a sinusoidal signal with the frequency of 2Hz to the platform, and the voltage command of the upper computer 8 is adjusted according to the feedback of the capacitive sensor until the specified position is reached.
As shown in fig. 6, the displacement of the piezoelectric motion mechanism 21 under the condition of fixed voltage is measured every 10 ℃ interval, a data graph of the fixed displacement along with the change of temperature is calculated, and data information of the fixed displacement along with the change of temperature is input into the calibration parameter storage module 33.
Because of the micro scanning super resolution technology, the scanning position of the lens is relatively fixed, such as a 2×2 micro scanning mode, and the position of each axis is two fixed points separated by 0.5 pixels, so that the nonlinear effect (hysteresis effect) of the piezoelectric ceramic has little influence on the displacement precision. The micro scanning super resolution technology requires the in-place time of the lens to be sub-millisecond and the position maintaining time to be about ten milliseconds, so that the influence of the creep effect of the piezoelectric ceramics is small.
Compared with closed loop control, the open loop control can greatly improve the in-place time of the micro scanning lens, but can generate longer-time oscillation after in-place. By adopting the control method of pre-shaping, the vibration problem after the micro scanning lens is in place is effectively eliminated under the condition that the in-place time is not influenced.
Meanwhile, in order to meet the requirement of high precision in a large temperature width (110 ℃) range, a method of calibrating and compensating by the temperature sensor 22 is adopted, so that the problem of displacement drift under the large temperature width is effectively solved.
In summary, the micro-scanning super-resolution control system and method based on piezoelectric driving provided by the invention have the advantages that closed-loop control is not needed, so that the design and production difficulties of the control system are greatly reduced, the size of the control system is reduced, the system cost is reduced, and meanwhile, the temperature sensitivity of the piezoelectric material is compensated by introducing a temperature compensation technology, so that the positioning precision of a micro-scanning platform of the micro-scanning system under a wide-temperature condition can be greatly improved, and the imaging quality of the micro-scanning super-resolution system is fully ensured. Meanwhile, the control system is simplified, so that the power consumption of the control system can be greatly reduced. Compared with the traditional piezoelectric control system adopting PID closed-loop control, the control system and the method can reduce the size by more than 30%, and under the condition of full temperature and width, the positioning accuracy can reach 500nm for a stroke of 20um, and the micro-scanning stabilizing time is greatly improved due to the adoption of open-loop control.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should be covered by the protection scope of the present invention by making equivalents and modifications to the technical solution and the inventive concept thereof.
Claims (4)
1. The micro-scanning super-resolution control system based on piezoelectric driving comprises an optical system (1), a two-dimensional piezoelectric high-speed high-precision micro-scanning platform (2) provided with a specific lens/reflecting mirror (11) in the optical system, a miniaturized high-frequency controller (3) and an image algorithm processor (4), and is characterized in that the two-dimensional piezoelectric high-precision micro-scanning platform (2) is based on a two-dimensional horizontal displacement or two-axis rotating mechanism driven by the piezoelectric and is physically connected with the specific lens/reflecting mirror (11), light rays emitted by the optical system (1) are processed to form images on the detector (6), raw data image data obtained by the detector (6) are transmitted into the image algorithm processor (4) to carry out super-resolution image reconstruction, the image algorithm processor (4) is connected with a display (7) and carries out super-resolution image data output, the two-dimensional piezoelectric high-speed high-precision micro-scanning platform (2) and the miniaturized high-frequency controller (3) carry out control data transmission, and the miniaturized high-frequency controller (3) and an upper computer (8) carry out control data transmission;
the two-dimensional piezoelectric high-speed high-precision micro-scanning platform (2) is internally provided with a piezoelectric motion mechanism (21) and integrates a temperature sensor (22), wherein,
the piezoelectric motion mechanism (21) enables the position of the specific lens/reflecting mirror (11) to generate micro displacement or angle to generate micro deflection, so that the optical axis generates sub-pixel level micro displacement at the focal plane position of the detector (6);
the temperature sensor (22) can monitor the temperature of the two-dimensional piezoelectric high-speed high-precision micro-scanning platform (2) in real time;
the miniaturized high-frequency controller (3) consists of a digital signal processing module (31), a voltage amplifying module (32) and a calibration parameter storage module (33), wherein the digital signal processing module (31) comprises a synchronous triggering module (311), a pre-shaping module (312) and a temperature compensation module (313),
the synchronous triggering module (311) receives a scanning mode command and a triggering signal sent by the upper computer (8), and transmits a command waveform signal to the pre-shaping module (312), and the pre-shaping module (312) sends a pre-shaped and corrected waveform command signal to the voltage amplifying module (32);
the voltage amplification module (32) amplifies the low-voltage input voltage to a high-voltage driving voltage for driving the piezoelectric motion mechanism (21);
the temperature compensation module (313) receives a detected temperature signal from the temperature sensor (22), sends a voltage correction parameter to the pre-shaping module (312), and carries out temperature/compensation parameter transmission with the calibration parameter storage module (33);
the calibration parameter storage module (33) is used for storing displacement parameters of the two-dimensional piezoelectric high-speed high-precision micro-scanning platform (2) which are obtained through experiments and change along with temperature.
2. The micro-scanning super-resolution control method based on piezoelectric driving by using the system as claimed in claim 1, comprising the following control steps:
s1: the digital signal processing system reads the external trigger signal and combines the stored scanning mode and the scanning interval time parameter to generate a micro-scanning command signal waveform;
s2: the temperature sensor (22) converts temperature information into voltage signals in real time, the voltage-temperature conversion module converts the obtained voltage signals into temperature information and is matched with temperature calibration parameters to obtain temperature correction coefficients, and the voltage amplitude of the micro-scanning command signals is corrected;
s3: smoothing the abrupt step signal by pre-shaping the corrected micro-scanning command signal to generate a pre-shaped command waveform;
s4: the voltage amplification module (32) amplifies the pre-shaped command waveform and directly drives the piezoelectric movement mechanism (21) to move;
s5: after the piezoelectric movement mechanism (21) moves in place, the camera starts exposure;
s6: the waveform cycle is circulated, so that a low-resolution original image sequence is obtained;
s7: and carrying out image reconstruction on the low-resolution original image sequence to obtain a high-resolution image.
3. The micro-scanning super-resolution control method based on piezoelectric driving according to claim 2, wherein the step of temperature calibration of S2 is: the high-low temperature box and the capacitance sensor are used as measuring equipment, the data acquisition card is used as data acquisition equipment, and the upper computer (8) sends a command to obtain the voltage amplitude of a command waveform which is actually generated by the miniaturized high-frequency controller (3) and is required by the piezoelectric motion mechanism (21) to reach the designated position at different temperatures.
4. A micro-scanning super-resolution control method based on piezoelectric driving according to claim 3, characterized in that the two-dimensional piezoelectric high-speed high-precision micro-scanning platform (2) and the miniaturized high-frequency controller (3) are placed in a high-low temperature box at the same time, a temperature value is set, for each test point, measurement is required to be performed in a stable state for at least one hour, so as to ensure that the temperature of the two-dimensional piezoelectric high-speed high-precision micro-scanning platform (2) is properly stable, an upper computer is set to send a sine signal with the frequency of 2Hz to the two-dimensional piezoelectric high-precision micro-scanning platform (2), and the voltage command of the upper computer is regulated according to the feedback of a capacitance sensor until the piezoelectric motion mechanism (21) reaches a designated position.
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