CN107941246A - A kind of contactless self-driven electronic skin and preparation method thereof - Google Patents
A kind of contactless self-driven electronic skin and preparation method thereof Download PDFInfo
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- CN107941246A CN107941246A CN201711104078.8A CN201711104078A CN107941246A CN 107941246 A CN107941246 A CN 107941246A CN 201711104078 A CN201711104078 A CN 201711104078A CN 107941246 A CN107941246 A CN 107941246A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/011—Arrangements for interaction with the human body, e.g. for user immersion in virtual reality
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The present invention provides a kind of contactless self-driven electronic skin, it is related to sensor and electronic skin technical field, includes friction layer film, frictional layer film surface is uniformly provided with some micro-structure friction elements；Isolated protective layer, the lower surface of isolated protective layer are connected with flexible substrate, electrode are clamped between flexible substrate and isolated protective layer；Isolated protective layer is equipped with the contact zone that the friction layer film can be made to contact with each other when being subject to ambient pressure with the flexible substrate layer.The interaction sensing of the achievable multi-motion mode of the present invention; contact separation process makes friction layer film powered; the layer film that rubs afterwards can not contact and empty slip on it with the three-decker of isolated protective layer, electrode, flexible substrate composition, and the electric signal that the displacement terminal point coordinate of slip can be received by analyzing electrode obtains；Using self-driven sensing mode, preparation process is simple and convenient, can be according to efficiently adjusting process parameter is actually needed, and production cost is low, suitable for batch production.
Description
Technical field
The present invention relates to sensor technical field, and in particular to a kind of contactless self-driven electronic skin and its preparation side
Method.
Background technology
In recent years, electronic skin field because its wearable electronic characteristic and can be integrated as skin a variety of
The potentiality of sensing function have attracted more and more concerns, and the motion-sensing performance of electronic skin is most for artificial intelligence
One of important function.Most electronic skins rely on sensing contact and realize motion-sensing, and take integrated such as pressure drag, electricity
The modes of the sensing units such as appearance, active device realizes feeler.However, above-mentioned contact motion-sensing power consumption is big,
Therefore need to charge to battery in time, in order to lift resolution ratio, then need to set enough number of electrodes, so as to seriously affect
Feasibility using electronic skin as the portable electronic system of major function.Nevertheless, self actuating system and analog sensing
Principle, which has been pointed out, possible solution.The energy that the former is gathered in surrounding environment energizes for device, therefore can break away from battery
Constraint, electrode that the latter then can be a small amount of realizes infinitely great theoretical resolution.
The electronic skin of contact-sensing makes the performance of electronic skin reduce, together since prolonged contact causes to wear
When, contact-sensing limits the possibility and diversity of movement, i.e., some only limited type of exercise, such as touch and slide
It can be detected.If the movement of people obtains more frees degree, then human-computer interaction will become more efficient and have attraction
Power.Therefore, the electronic skin with contactless motion-sensing is in the potential application such as integrating with smart mobile phone screen
It is very promising, because it has liberated the finger of people out from touching, and makes it possible to roam above interface, can
Realize the interaction sensing of multi-motion mode.
The content of the invention
It can realize that multi-motion mode interacts the contactless self-driven of sensing it is an object of the invention to provide a kind of
Electronic skin, big to solve contact-type electronic skin power consumption present in above-mentioned background technology, number of electrodes requires high technology
Problem.
To achieve these goals, this invention takes following technical solution：
A kind of contactless self-driven electronic skin, including：
Rub layer film, and the frictional layer film surface is uniformly provided with some micro-structure friction elements；
Isolated protective layer, the lower surface of the isolated protective layer are connected with flexible substrate, the flexible substrate with it is described every
From being clamped with electrode between protective layer；The isolated protective layer, which is equipped with, can make the friction layer film be subject to ambient pressure
When the contact zone that contacts with each other with the flexible substrate layer.The contact zone of setting is can not after making friction layer film electrically charged
Flexible substrate, electrode, the three-decker of isolated protective layer composition are contacted again, make friction layer film sliding in the range of sky 5cm on it
It is dynamic.The displacement of the slip can be received by the electrode, and above-mentioned sliding motion terminal can be determined by the analysis to electric signal
Coordinate.
Further, the contact zone is circular through hole, and the micro-structure friction element is rectangular pyramid structure.
Further, the electrode is cirque structure.
Further, the friction layer film and the isolated protective layer are made by polydimethylsiloxane.
Further, the electrode is made of tin indium oxide ITO, and the flexible substrate is by polyethylene terephthalate
PET is made.
A kind of preparation method of contactless self-driven electronic skin as described above, includes the following steps：
Step S110：The silica of thermal oxide is made on silicon chip, photolithography plate of the covering with quadrate array carries out
After exposure, developing liquid developing is put into, deionized water cleaning, is etched to expose silicon chip, acetone cleaning, reuses by sulfur hexafluoride
Potassium hydroxide solution carries out wet etching, until reaction completely, obtains frictional layer film die；
Step S120：In the frictional layer film die surface spin coating PDMS liquid, the friction layer film of PDMS will be scribbled
After mould is heating and curing, the PDMS liquid is set to form one layer of PDMS film, separation PDMS film must rub layer film；
Step S130：The ITO films that one layer of sheet resistance is 35 Ω/sq are sputtered using magnetron sputtering apparatus on PET substrate,
The ito thin film is made by cirque structure by laser etching method and obtains electrode, the PET substrate is as flexible substrate；
Step S140：PDMS liquid is spin-coated on square glass substrate, the glass substrate that spin coating has PDMS is heated solid
Change, PDMS liquid is formed PDMS film in the glass substrate, a circular through hole is made at PDMS film center, finally will
PDMS film with through hole separates to obtain isolated protective layer with the glass substrate；
Step S150：The isolated protective layer is fitted in the flexible substrate, electrode is located at the insulation blocking
The centre of layer and the flexible substrate, the through hole are located at the centre of electrode, obtain contactless self-driven electronic skin.
Further, the spin coating thickness in frictional layer film die surface spin coating PDMS liquid is 500 μm.
Further, the temperature that the frictional layer film die for scribbling PDMS is heating and curing is 80 DEG C, is cured
Time is 2h.
Further, spin coating thickness PDMS liquid being spin-coated on square glass substrate is 500 μm.
Further, the temperature that the glass substrate that spin coating is had PDMS is heating and curing is 80 DEG C, hardening time 2h.
Beneficial effect of the present invention：The interaction sensing of multi-motion mode can be achieved, contact separation process makes friction layer film
It is powered, afterwards rub layer film can not with isolated protective layer, electrode, flexible substrate composition three-decker contact and on it sky
Slide, the electric signal that the displacement terminal point coordinate of slip can be received by analyzing electrode obtains；Using self-driven sensing side
Formula, preparation process is simple and convenient, can be according to efficiently adjusting process parameter is actually needed, and production cost is low, suitable for batch production.
The additional aspect of the present invention and advantage will be set forth in part in the description, these will become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for this
For the those of ordinary skill of field, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is the contactless self-driven electronic skin structure decomposition figure described in the embodiment of the present invention.
Fig. 2 is the frictional layer film die structure chart described in the embodiment of the present invention.
Fig. 3 is the friction layer film structure figure described in the embodiment of the present invention.
Fig. 4 is the flexible substrate overlooking structure figure with electrode described in the embodiment of the present invention.
Fig. 5 is the non-contact self-driven electronic skin use state diagram described in the embodiment of the present invention.
Wherein：1- friction layer films；2- micro-structure friction elements；3- isolated protective layers；4- flexible substrates；5- electrodes；6-
Through hole
Embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning
Same or similar element is represented to same or similar label eventually or there is same or like module.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and is only used for explaining the present invention, and is not construed as limiting the claims.
Those skilled in the art of the present technique are appreciated that unless expressly stated, singulative " one " used herein, " one
It is a ", " described " and "the" may also comprise plural form.It is to be further understood that what is used in the specification of the present invention arranges
Diction " comprising " refer to there are the feature, integer, step, operation, element and/or module, but it is not excluded that in the presence of or addition
One or more other features, integer, step, operation, element, module and/or their groups.
It should be noted that in embodiment of the present invention, unless otherwise clearly defined and limited, term is " even
Connect ", " fixation " etc. should be interpreted broadly, can be fixedly connected or be detachably connected, or can be machine integrally
Tool is connected or is electrically connected, and can be directly connected to or be indirectly connected with by intermediary, can is two
Connection inside element, or the interaction relationship of two elements, unless with clearly restriction.For those skilled in the art
For, the concrete meaning of above-mentioned term in embodiments of the present invention can be understood as the case may be.
Those skilled in the art of the present technique are appreciated that unless otherwise defined, all terms used herein (including technology
Term and scientific terminology) there is the meaning identical with the general understanding of the those of ordinary skill in fields of the present invention.Should also
It should be appreciated that those terms such as defined in the general dictionary should be understood that with the context of the prior art
The consistent meaning of meaning, and unless defined as here, will not be explained with the implication of idealization or overly formal.
For ease of the understanding to the embodiment of the present invention, solved below in conjunction with attached drawing is further by taking specific embodiment as an example
Explanation is released, and embodiment does not form the restriction to the embodiment of the present invention.
Fig. 1 is the contactless self-driven electronic skin structure decomposition figure described in the embodiment of the present invention, and Fig. 2 is real for the present invention
The frictional layer film die structure chart described in example is applied, Fig. 3 is the friction layer film structure figure described in the embodiment of the present invention, and Fig. 4 is
The flexible substrate overlooking structure figure with electrode described in the embodiment of the present invention, Fig. 5 are non-contact described in the embodiment of the present invention
Self-driven electronic skin use state diagram.
Those of ordinary skill in the art are it should be appreciated that attached drawing is the schematic diagram of one embodiment, the portion in attached drawing
Part or device are not necessarily implemented necessary to the present invention.
As shown in Figure 1, a kind of contactless self-driven electronic skin described in the embodiment of the present invention, including friction layer film
1,1 surface of the friction layer film is uniformly provided with some micro-structure friction elements 2；Isolated protective layer 3, the isolated protective layer 3
Lower surface be connected with flexible substrate 4, be clamped with electrode 5 between the flexible substrate 4 and the isolated protective layer 3；It is described every
From protective layer 3 be equipped with can make it is described friction layer film 1 when being subject to ambient pressure with the 4 phase mutual connection of flexible substrate layer
Tactile contact zone.
In one particular embodiment of the present invention, the contact zone is circular through hole 6, the micro-structure friction element 2
For rectangular pyramid structure.
In one particular embodiment of the present invention, the electrode 5 is cirque structure.
In one particular embodiment of the present invention, the friction layer film 1 and the isolated protective layer 3 are by poly- diformazan
Radical siloxane PDMS is made.
In one particular embodiment of the present invention, the electrode 5 is made of tin indium oxide ITO, the flexible substrate 4 by
Polyethylene terephtalate is made.
A kind of preparation method for the contactless self-driven electronic skin, includes the following steps：
Step S110：The silica of thermal oxide is made on silicon chip, photolithography plate of the covering with quadrate array carries out
After exposure, developing liquid developing is put into, deionized water cleaning, is etched to expose silicon chip, acetone cleaning, reuses by sulfur hexafluoride
Potassium hydroxide solution carries out wet etching, until reaction completely, obtains frictional layer film die；
Step S120：In the frictional layer film die surface spin coating PDMS liquid, the friction layer film of PDMS will be scribbled
After mould is heating and curing, the PDMS liquid is set to form one layer of PDMS film, separation PDMS film must rub layer film 1；
Step S130：The ITO films that one layer of sheet resistance is 35 Ω/sq are sputtered using magnetron sputtering apparatus on PET substrate,
The ito thin film is made by cirque structure by laser etching method and obtains electrode 5, the PET substrates are as flexible substrate 4；
Step S140：PDMS liquid is spin-coated on square glass substrate, the glass substrate that spin coating has PDMS is heated solid
Change, PDMS liquid is formed PDMS film in the glass substrate, make a circular through hole 6 at PDMS film center, finally
PDMS film with through hole 6 is separated into obtain isolated protective layer 3 with the glass substrate；
Step S150：The isolated protective layer 3 is fitted in the flexible substrate 4, electrode 5 is protected positioned at the isolation
The centre of sheath 3 and the flexible substrate 4, the through hole 6 are located at the centre of electrode 5, obtain contactless self-driven electronic skin.
It is described in frictional layer film die surface spin coating PDMS in the preparation of the contactless self-driven electronic skin
The spin coating thickness of liquid is 500 μm, and the temperature that the frictional layer film die for scribbling PDMS is heating and curing is 80 DEG C,
Hardening time is 2h, and spin coating thickness PDMS liquid being spin-coated on square glass substrate is 500 μm, described to have spin coating
The temperature that the glass substrate of PDMS is heating and curing is 80 DEG C, hardening time 2h.
In the silica (SiO2) of (100) grown above silicon thermal oxide, and the photolithography plate covered with quadrate array into
Row exposure.Silicon chip is put into developing liquid developing afterwards, then is cleaned with deionized water.Sulfur hexafluoride (SF6) is carried out to silicon chip afterwards
It is etched to expose silicon chip.Remaining photoresist is cleaned by acetone and removed.It is wet to silicon chip progress to reuse potassium hydroxide (KOH) solution
Method is corroded, until the reaction is complete.The foregoing describe the preparation process of the silicon chip mould with rectangular pyramid micro-structure.Obtained mould
The structure of tool is as shown in Figure 2.
In silicon chip die surface spin coating PDMS liquid, thickness is 500 μm.Mould is placed on 80 DEG C of hot plates and heats 2h with solid
Change.PDMS film is separated from silicon chip surface, completes the preparation of the friction layer film with micro-structure.Obtained friction layer film
Structure it is as shown in Figure 3.
On PET substrate the ito thin film that one layer of sheet resistance is 35 Ω/sq is sputtered using magnetron sputtering apparatus.Input figure afterwards
The graphical scheme shown, patterned process is completed using the mode of laser ablation, and the flexible liner with circular ring electrode is made
Bottom is as shown in Figure 4.
PDMS is spin-coated on square glass substrate, thickness is 500 μm.It is placed on 80 DEG C of hot plates and heats 2h with solid
Change.The circular portion of a hollow out is made at PDMS film center using circular die and scalpel, then separates PDMS film and glass
Glass substrate.Finally the PDMS protective layers of preparation are bonded with PET substrate-ITO electrode (make ITO in an intermediate position), you can complete
Into the preparation process of transparent flexible electronic skin.
The layer film 1 as shown in figure 5, contactless self-driven electronic skin of the present invention when specifically used, rubs
Under the action of pressure F, electric charge is produced by the circular through hole 6 on isolated protective layer 3 and the friction of flexible substrate 4, completes electrification
After process, friction layer film 1 can no longer be in contact with isolated protective layer-electrode-meat shape substrate three-decker, but empty on it
Slide；And the electrode 5 of the area covers beyond the circular through hole 6 of isolated protective layer 3, the biography to slip completed by electrode 5
Sense, determines to slide the coordinate of terminal eventually through analysis electric signal.
In conclusion the present invention on friction layer film 1 by setting rectangular pyramid micro-structure to rub so as to increase contact
Area is wiped, improves sensing efficiency, circular ring electrode 5 is equipped with circle in the lower surface of isolated protective layer 3, isolated protective layer 3
Through hole 6, the contact zone being in contact as friction layer film 1 with flexible substrate 4, circular through hole 6 are located at the center of circular ring electrode 5
Position, makes friction layer film 1 not contacted with electrode 5, ensure that high-resolution, improve the service life of electronic skin.
In addition, flexible transparent substrate-electrode-isolation that the preparation method for the contactless self-driven electronic skin for passing through the present invention makes
Protective layer structure has the multiple dimensioned controllable characteristic such as area, thickness, the transparency, electrode pattern, by wet etching, reverse mould with
And the manufacture craft of magnetron sputtering, laser ablation is simple and convenient, cost is low, it is adapted to large-scale production.
Apparatus and system embodiment described above is only schematical, illustrates wherein described as separating component
Unit may or may not be physically separate, and thing is may or may not be as the component that unit is shown
Manage unit, you can with positioned at a place, or can also be distributed in multiple network unit.It can select according to the actual needs
Some or all of module therein is selected to realize the purpose of this embodiment scheme.Those of ordinary skill in the art are not paying wound
In the case that the property made is worked, you can to understand and implement.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can readily occur in,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of the claims
Subject to.
Claims (10)
- A kind of 1. contactless self-driven electronic skin, it is characterised in that including：Rub layer film (1), and described friction layer film (1) surface is uniformly provided with some micro-structure friction elements (2)；Isolated protective layer (3), the lower surface of the isolated protective layer (3) are connected with flexible substrate (4), the flexible substrate (4) Electrode (5) is clamped between the isolated protective layer (3)；The isolated protective layer (3), which is equipped with, can make the frictional layer The contact zone that film (1) contacts with each other when being subject to ambient pressure with the flexible substrate layer (4).
- 2. contactless self-driven electronic skin according to claim 1, it is characterised in that the contact zone is circular logical Hole (6), the micro-structure friction element (2) are rectangular pyramid structure.
- 3. contactless self-driven electronic skin according to claim 2, it is characterised in that the electrode (5) is annulus Shape structure.
- 4. contactless self-driven electronic skin according to claim 3, it is characterised in that the friction layer film (1) It is made with the isolated protective layer (3) by polydimethylsiloxane.
- 5. contactless self-driven electronic skin according to claim 4, it is characterised in that the electrode (5) is by aoxidizing Indium tin ITO is made, and the flexible substrate (4) is made of polyethylene terephtalate.
- It is 6. a kind of as the preparation method of the contactless self-driven electronic skin of claim 1-5 any one of them, its feature exist In including the following steps：Step S110：The silica of thermal oxide is made on silicon chip, photolithography plate of the covering with quadrate array is exposed Afterwards, developing liquid developing is put into, deionized water cleaning, is etched to expose silicon chip, acetone cleaning, reuses hydrogen-oxygen by sulfur hexafluoride Change potassium solution and carry out wet etching, until reaction completely, obtains frictional layer film die；Step S120：In the frictional layer film die surface spin coating PDMS liquid, the frictional layer film die of PDMS will be scribbled After being heating and curing, the PDMS liquid is set to form one layer of PDMS film, separation PDMS film must rub layer film (1)；Step S130：The ito thin film that one layer of sheet resistance is 35 Ω/sq is sputtered using magnetron sputtering apparatus on PET substrate, by swashing The ito thin film is made cirque structure and obtains electrode (5) by lithographic methods, and the PET substrate is as flexible substrate (4)；Step S140：PDMS liquid is spin-coated on square glass substrate, the glass substrate that spin coating has PDMS is heating and curing, is made PDMS liquid forms PDMS film in the glass substrate, a circular through hole (6) is made at PDMS film center, finally by band There are the PDMS film of through hole (6) and the glass substrate to separate to obtain isolated protective layer (3)；Step S150：The isolated protective layer (3) is fitted in the flexible substrate (4), electrode (5) is located at the isolation The centre of protective layer (3) and the flexible substrate (4), the through hole (6) are located at the centre of electrode (5), obtain contactless self-powered Dynamic electronic skin.
- 7. according to the method described in claim 6, it is characterized in that：It is described in frictional layer film die surface spin coating PDMS liquid Spin coating thickness be 500 μm.
- 8. according to the method described in claim 7, it is characterized in that：It is described to be added the frictional layer film die for scribbling PDMS The temperature of heat cure is 80 DEG C, hardening time 2h.
- 9. according to the method described in claim 6, it is characterized in that：It is described that PDMS liquid is spin-coated on square glass substrate Spin coating thickness is 500 μm.
- 10. according to the method described in claim 9, it is characterized in that：The glass substrate that spin coating is had PDMS is heating and curing Temperature be 80 DEG C, hardening time 2h.
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| CN110132457A (en) * | 2019-05-28 | 2019-08-16 | 华中科技大学 | A kind of flexible sensor of multifunctional sensing and preparation method thereof |
| CN112667101A (en) * | 2020-12-18 | 2021-04-16 | 广东省科学院半导体研究所 | Self-driven perspiration electronic skin and preparation method thereof |
| CN113232031A (en) * | 2021-01-20 | 2021-08-10 | 北京航空航天大学 | Novel electronic skin with adjustable pressure sensing range |
| CN115990020A (en) * | 2023-02-27 | 2023-04-21 | 湘潭大学 | Ultrathin flexible dry electrode with high resolution and high signal-to-noise ratio and electroencephalogram acquisition circuit |
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| CN110132457A (en) * | 2019-05-28 | 2019-08-16 | 华中科技大学 | A kind of flexible sensor of multifunctional sensing and preparation method thereof |
| CN110132457B (en) * | 2019-05-28 | 2024-06-04 | 华中科技大学 | Multifunctional sensing flexible sensor and preparation method thereof |
| CN112667101A (en) * | 2020-12-18 | 2021-04-16 | 广东省科学院半导体研究所 | Self-driven perspiration electronic skin and preparation method thereof |
| CN113232031A (en) * | 2021-01-20 | 2021-08-10 | 北京航空航天大学 | Novel electronic skin with adjustable pressure sensing range |
| CN115990020A (en) * | 2023-02-27 | 2023-04-21 | 湘潭大学 | Ultrathin flexible dry electrode with high resolution and high signal-to-noise ratio and electroencephalogram acquisition circuit |
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