CN107941246B - It is a kind of contactless from driving electronic skin and preparation method thereof - Google Patents
It is a kind of contactless from driving electronic skin and preparation method thereof Download PDFInfo
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- CN107941246B CN107941246B CN201711104078.8A CN201711104078A CN107941246B CN 107941246 B CN107941246 B CN 107941246B CN 201711104078 A CN201711104078 A CN 201711104078A CN 107941246 B CN107941246 B CN 107941246B
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/011—Arrangements for interaction with the human body, e.g. for user immersion in virtual reality
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention provides a kind of contactless driving electronic skins certainly, are related to sensor and electronic skin technical field, include friction layer film, frictional layer film surface is uniformly provided with several micro-structure friction elements；Isolated protective layer, the lower surface of isolated protective layer are connected with flexible substrate, electrode are clamped between flexible substrate and isolated protective layer；Isolated protective layer is equipped with the contact zone that the friction layer film can be made to contact with each other when by ambient pressure with the flexible substrate layer.The interaction sensing of multi-motion mode can be achieved in the present invention; contact separation process makes the layer film electrification that rubs; friction layer film can not contact and empty sliding on it with the three-decker of isolated protective layer, electrode, flexible substrate composition later, and the displacement terminal point coordinate of sliding can be obtained by analyzing the electric signal that electrode receive；Using the sensing mode from driving, preparation process is simple and convenient, can efficiently adjusting process parameter according to actual needs, production cost is low, is suitable for batch production.
Description
Technical field
The present invention relates to sensor technical fields, and in particular to a kind of contactless from driving electronic skin and its preparation side
Method.
Background technique
In recent years, electronic skin field because its wearable electronic characteristic and can be integrated as skin a variety of
The potentiality of sensing function have attracted more and more concerns, and the motion-sensing performance of electronic skin is most for artificial intelligence
One of important function.Most electronic skins rely on sensing contact and realize motion-sensing, and take integrated such as pressure drag, electricity
The modes of the sensing units such as appearance, active device realizes contact sensor.However, above-mentioned contact motion-sensing power consumption is big,
Therefore it needs to charge to battery in time, in order to promote resolution ratio, then needs that enough number of electrodes are arranged, to seriously affect
Using electronic skin as the feasibility of the portable electronic system of major function.Nevertheless, self actuating system and analog sensing
Principle, which has been pointed out, possible solution.The former acquires the energy in ambient enviroment as device energy supply, therefore can get rid of battery
Constraint, electrode that the latter then can be a small amount of realizes infinitely great theoretical resolution.
The electronic skin of contact-sensing causes to wear due to contacting for a long time, makes the reduced performance of electronic skin, together
When, a possibility that contact-sensing limits movement and diversity, i.e., only limited some type of exercise are such as touched and sliding
It can be detected.If the movement of people obtains more freedom degrees, human-computer interaction will become more efficient and have attraction
Power.Therefore, the electronic skin with contactless motion-sensing be in the potential applications such as smart phone screen is integrated
It is very promising, is come out because it has liberated the finger of people from touching, and make it possible to roam above interface, it can
Realize the interaction sensing of multi-motion mode.
Summary of the invention
It can be realized the contactless from driving of multi-motion mode interaction sensing the purpose of the present invention is to provide a kind of
Electronic skin, number of electrodes demanding technology big to solve contact-type electronic skin power consumption present in above-mentioned background technique
Problem.
To achieve the goals above, this invention takes following technical solutions:
It is a kind of contactless from driving electronic skin, comprising:
Rub layer film, and the frictional layer film surface is uniformly provided with several micro-structure friction elements；
Isolated protective layer, the lower surface of the isolated protective layer are connected with flexible substrate, the flexible substrate and it is described every
From being clamped with electrode between protective layer；The isolated protective layer, which is equipped with, can make the friction layer film by ambient pressure
When the contact zone that contacts with each other with the flexible substrate layer.The contact zone of setting is can not after making friction layer film electrically charged
The three-decker for contacting flexible substrate, electrode, isolated protective layer composition again makes the layer film cunning within the scope of sky 5cm on it that rubs
It is dynamic.The displacement of the sliding can be received by the electrode, can determine above-mentioned sliding motion terminal by the analysis to electric signal
Coordinate.
Further, the contact zone is circular through hole, and the micro-structure friction element is rectangular pyramid structure.
Further, the electrode is cirque structure.
Further, the friction layer film and the isolated protective layer are made of polydimethylsiloxane.
Further, the electrode is made of tin indium oxide ITO, and the flexible substrate is by polyethylene terephthalate
PET is made.
It is a kind of as described above contactless from the preparation method for driving electronic skin, include the following steps:
Step S110: being made the silica of thermal oxide on silicon wafer, and covering, there is the photolithography plate of quadrate array to carry out
After exposure, it is put into developing liquid developing, deionized water cleaning is etched to expose silicon wafer by sulfur hexafluoride, and acetone cleaning reuses
Potassium hydroxide solution carries out wet etching, until reaction completely, obtains frictional layer film die；
Step S120: in frictional layer film die surface spin coating PDMS liquid, the friction layer film of PDMS will be coated with
After mold is heating and curing, the PDMS liquid is made to form one layer of PDMS film, separation PDMS film must rub layer film；
Step S130: sputtering one layer of sheet resistance using magnetron sputtering apparatus on PET substrate is 35 Ω/sq ITO film,
Cirque structure is made in the ito thin film by laser etching method and obtains electrode, the PET substrate is as flexible substrate；
Step S140: PDMS liquid is spin-coated on square glass substrate, the glass substrate that spin coating has PDMS is heated solid
Change, PDMS liquid is made to form PDMS film in the glass substrate, makes a circular through hole at PDMS film center, finally will
PDMS film with through-hole separates to obtain isolated protective layer with the glass substrate；
Step S150: the isolated protective layer is fitted in the flexible substrate, and electrode is made to be located at the insulation blocking
The centre of layer and the flexible substrate, the through-hole are located at the centre of electrode, obtain contactless from driving electronic skin.
Further, the spin coating in frictional layer film die surface spin coating PDMS liquid is with a thickness of 500 μm.
Further, the temperature that the frictional layer film die that will be coated with PDMS is heating and curing is 80 DEG C, solidification
Time is 2h.
Further, described that PDMS liquid is spin-coated on the spin coating on square glass substrate with a thickness of 500 μm.
Further, the temperature for having the glass substrate of PDMS to be heating and curing spin coating is 80 DEG C, curing time 2h.
The invention has the advantages that: the interaction sensing of achievable multi-motion mode, contact separation process makes the layer film that rubs
Electrification, later rub layer film can not with isolated protective layer, electrode, flexible substrate composition three-decker contact and on it sky
The displacement terminal point coordinate of sliding, sliding can be obtained by analyzing the electric signal that electrode receives；Using the sensing side of driving certainly
Formula, preparation process is simple and convenient, can efficiently adjusting process parameter according to actual needs, production cost is low, is suitable for batch production.
The additional aspect of the present invention and advantage will be set forth in part in the description, these will become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill of field, without creative efforts, it can also be obtained according to these attached drawings others
Attached drawing.
Fig. 1 is contactless from driving electronic skin structural exploded view described in the embodiment of the present invention.
Fig. 2 is frictional layer film die structure chart described in the embodiment of the present invention.
Fig. 3 is friction layer film structure figure described in the embodiment of the present invention.
Fig. 4 is the flexible substrate overlooking structure figure that electrode is had described in the embodiment of the present invention.
Fig. 5 is non-contact from driving electronic skin use state diagram described in the embodiment of the present invention.
Wherein: 1- friction layer film；2- micro-structure friction element；3- isolated protective layer；4- flexible substrate；5- electrode；6-
Through-hole
Specific embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning
Same or similar element or module with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and for explaining only the invention, and is not construed as limiting the claims.
Those skilled in the art of the present technique are appreciated that unless expressly stated, singular " one " used herein, " one
It is a ", " described " and "the" may also comprise plural form.It is to be further understood that being arranged used in specification of the invention
Diction " comprising " refer to that there are the feature, integer, step, operation, element and/or modules, but it is not excluded that in the presence of or addition
Other one or more features, integer, step, operation, element, module and/or their group.
It should be noted that in embodiment of the present invention unless specifically defined or limited otherwise, term is " even
Connect ", " fixation " etc. shall be understood in a broad sense, may be a fixed connection, may be a detachable connection, or is integral, can be machine
Tool connection, is also possible to be electrically connected, can be and be directly connected to, be also possible to be indirectly connected with by intermediary, can be two
The interaction relationship of connection or two elements inside element, unless having specific limit.For those skilled in the art
For, the concrete meaning of above-mentioned term in embodiments of the present invention can be understood as the case may be.
Those skilled in the art of the present technique are appreciated that unless otherwise defined, all terms used herein (including technology
Term and scientific term) there is meaning identical with the general understanding of those of ordinary skill in fields of the present invention.Also answer
It should be appreciated that those terms such as defined in the general dictionary should be understood that have in the context of the prior art
The consistent meaning of meaning, and unless defined as here, it will not be explained in an idealized or overly formal meaning.
In order to facilitate understanding of embodiments of the present invention, further by taking specific embodiment as an example below in conjunction with attached drawing to be solved
Explanation is released, and embodiment does not constitute the restriction to the embodiment of the present invention.
Fig. 1 is contactless driving electronic skin structural exploded view certainly described in the embodiment of the present invention, and Fig. 2 is that the present invention is real
Frictional layer film die structure chart described in example is applied, Fig. 3 is friction layer film structure figure described in the embodiment of the present invention, and Fig. 4 is
The flexible substrate overlooking structure figure of electrode is had described in the embodiment of the present invention, Fig. 5 is non-contact described in the embodiment of the present invention
From driving electronic skin use state diagram.
Those of ordinary skill in the art are it should be understood that attached drawing is the schematic diagram of one embodiment, the portion in attached drawing
Part or device are not necessarily implemented necessary to the present invention.
As shown in Figure 1, one kind described in the embodiment of the present invention is contactless from driving electronic skin, including friction layer film
1,1 surface of friction layer film is uniformly provided with several micro-structure friction elements 2；Isolated protective layer 3, the isolated protective layer 3
Lower surface be connected with flexible substrate 4, be clamped with electrode 5 between the flexible substrate 4 and the isolated protective layer 3；It is described every
From protective layer 3 be equipped with can make the friction layer film 1 when by ambient pressure with the 4 phase mutual connection of flexible substrate layer
The contact zone of touching.
In one particular embodiment of the present invention, the contact zone is circular through hole 6, the micro-structure friction element 2
For rectangular pyramid structure.
In one particular embodiment of the present invention, the electrode 5 is cirque structure.
In one particular embodiment of the present invention, the friction layer film 1 and the isolated protective layer 3 are by poly- diformazan
Radical siloxane PDMS is made.
In one particular embodiment of the present invention, the electrode 5 is made of tin indium oxide ITO, the flexible substrate 4 by
Polyethylene terephtalate is made.
It is a kind of the contactless preparation method from driving electronic skin, include the following steps:
Step S110: being made the silica of thermal oxide on silicon wafer, and covering, there is the photolithography plate of quadrate array to carry out
After exposure, it is put into developing liquid developing, deionized water cleaning is etched to expose silicon wafer by sulfur hexafluoride, and acetone cleaning reuses
Potassium hydroxide solution carries out wet etching, until reaction completely, obtains frictional layer film die；
Step S120: in frictional layer film die surface spin coating PDMS liquid, the friction layer film of PDMS will be coated with
After mold is heating and curing, the PDMS liquid is made to form one layer of PDMS film, separation PDMS film must rub layer film 1；
Step S130: sputtering one layer of sheet resistance using magnetron sputtering apparatus on PET substrate is 35 Ω/sq ITO film,
Cirque structure is made in the ito thin film by laser etching method and obtains electrode 5, the PET substrate is as flexible substrate 4；
Step S140: PDMS liquid is spin-coated on square glass substrate, the glass substrate that spin coating has PDMS is heated solid
Change, PDMS liquid is made to form PDMS film in the glass substrate, makes a circular through hole 6 at PDMS film center, finally
PDMS film with through-hole 6 is separated into obtain isolated protective layer 3 with the glass substrate；
Step S150: the isolated protective layer 3 is fitted in the flexible substrate 4, and electrode 5 is made to be located at isolation guarantor
The centre of sheath 3 and the flexible substrate 4, the through-hole 6 are located at the centre of electrode 5, obtain contactless from driving electronic skin.
It is described in frictional layer film die surface spin coating PDMS in the preparation of the contactless electronic skin of driving certainly
With a thickness of 500 μm, the temperature that the frictional layer film die that will be coated with PDMS is heating and curing is 80 DEG C for the spin coating of liquid,
Curing time is 2h, described that PDMS liquid is spin-coated on the spin coating on square glass substrate with a thickness of 500 μm, described to have spin coating
The temperature that the glass substrate of PDMS is heating and curing is 80 DEG C, curing time 2h.
In the silica (SiO2) of (100) grown above silicon thermal oxide, and be covered with the photolithography plate of quadrate array into
Row exposure.Silicon wafer is put into developing liquid developing later, then is cleaned with deionized water.Sulfur hexafluoride (SF6) is carried out to silicon wafer later
It is etched to expose silicon wafer.Remaining photoresist is cleaned by acetone and is removed.It is wet to silicon wafer progress to reuse potassium hydroxide (KOH) solution
Method corrosion, until the reaction is complete.The foregoing describe the preparation process of the silicon wafer mold with rectangular pyramid micro-structure.Mould obtained
The structure of tool is as shown in Figure 2.
In silicon wafer die surface spin coating PDMS liquid, with a thickness of 500 μm.Mold is placed on 80 DEG C of hot plates and heats 2h with solid
Change.PDMS film is separated from silicon chip surface, completes the preparation of the friction layer film with micro-structure.Friction layer film obtained
Structure it is as shown in Figure 3.
Sputtering one layer of sheet resistance using magnetron sputtering apparatus on PET substrate is 35 Ω/sq ito thin film.Input figure later
The graphical scheme shown completes patterned process using the mode of laser ablation, and the flexible liner with circular ring electrode is made
Bottom is as shown in Figure 4.
PDMS is spin-coated on square glass substrate, with a thickness of 500 μm.It places it on 80 DEG C of hot plates and heats 2h with solid
Change.The circular portion of a hollow out is made at PDMS film center using circular die and scalpel, then separates PDMS film and glass
Glass substrate.Finally the PDMS protective layer of preparation is bonded with PET substrate-ITO electrode and (enables ITO in an intermediate position), it can be complete
At the preparation process of transparent flexible electronic skin.
As shown in figure 5, of the present invention contactless from electronic skin is driven when specifically used, rub layer film 1
Under the action of pressure F, by the circular through hole 6 and the friction generation charge of flexible substrate 4 on isolated protective layer 3, electrification is completed
After process, friction layer film 1 can no longer be in contact with isolated protective layer-electrode-meat shape substrate three-decker, but empty on it
Sliding；And the electrode 5 of the area covers other than the circular through hole 6 of isolated protective layer 3, the biography to sliding is completed by electrode 5
Sense determines the coordinate of sliding terminal eventually by analysis electric signal.
In conclusion the present invention is rubbed by the way that rectangular pyramid micro-structure is arranged on friction layer film 1 to increase contact
Area is wiped, sensing efficiency is improved, circular ring electrode 5 is equipped with circle in the lower surface of isolated protective layer 3, isolated protective layer 3
Through-hole 6, as the contact zone that friction layer film 1 is in contact with flexible substrate 4, circular through hole 6 is located at the center of circular ring electrode 5
Position contact friction layer film 1 will not with electrode 5, ensure that high-resolution, improve the service life of electronic skin.
In addition, flexible transparent substrate-electrode-isolation of the contactless preparation method production from driving electronic skin through the invention
Protective layer structure has the multiple dimensioned controllable characteristic such as area, thickness, the transparency, electrode pattern, by wet etching, reverse mould with
And the manufacture craft of magnetron sputtering, laser ablation is simple and convenient, at low cost, is suitble to large-scale production.
Apparatus and system embodiment described above is only schematical, wherein it is described as illustrated by the separation member
Unit may or may not be physically separated, and component shown as a unit may or may not be object
Manage unit, it can it is in one place, or may be distributed over multiple network units.It can select according to the actual needs
Some or all of the modules therein is selected to achieve the purpose of the solution of this embodiment.Those of ordinary skill in the art are not paying wound
In the case that the property made is worked, it can understand and implement.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of protection of the claims
Subject to.
Claims (10)
1. a kind of contactless from driving electronic skin characterized by comprising
It rubs layer film (1), friction layer film (1) surface is uniformly provided with several micro-structure friction elements (2)；
The lower surface of isolated protective layer (3), the isolated protective layer (3) is connected with flexible substrate (4), the flexible substrate (4)
Electrode (5) are clamped between the isolated protective layer (3)；The isolated protective layer (3), which is equipped with, can make the frictional layer
The contact zone that film (1) contacts with each other when by ambient pressure with the flexible substrate layer (4)；Friction layer film passes through contact
Area and flexible substrate friction generate charge after, friction layer film can no longer with isolated protective layer-electrode-flexible substrate three-decker
It is in contact, but is slided in the overhead of three-decker.
2. according to claim 1 contactless from driving electronic skin, which is characterized in that the contact zone is round logical
Hole (6), the micro-structure friction element (2) are rectangular pyramid structure.
3. according to claim 2 contactless from driving electronic skin, which is characterized in that the electrode (5) is annulus
Shape structure.
4. according to claim 3 contactless from driving electronic skin, which is characterized in that the friction layer film (1)
It is made with the isolated protective layer (3) of polydimethylsiloxane.
5. according to claim 4 contactless from driving electronic skin, which is characterized in that the electrode (5) is by aoxidizing
Indium tin ITO is made, and the flexible substrate (4) is made of polyethylene terephtalate.
6. a kind of as described in any one in claim 1-5 contactless from the preparation method for driving electronic skin, feature exists
In including the following steps:
Step S110: being made the silica of thermal oxide on silicon wafer, and covering, there is the photolithography plate of quadrate array to be exposed
Afterwards, it is put into developing liquid developing, deionized water cleaning is etched to expose silicon wafer by sulfur hexafluoride, and acetone cleaning reuses hydrogen-oxygen
Change potassium solution and carry out wet etching, until reaction completely, obtains frictional layer film die；
Step S120: in frictional layer film die surface spin coating PDMS liquid, the frictional layer film die of PDMS will be coated with
After being heating and curing, the PDMS liquid is made to form one layer of PDMS film, separation PDMS film must rub layer film (1)；
Step S130: sputtering one layer of sheet resistance using magnetron sputtering apparatus on PET substrate is 35 Ω/sq ito thin film, by swashing
The ito thin film is made cirque structure and obtained electrode (5) by lithographic methods, and the PET substrate is as flexible substrate (4)；
Step S140: PDMS liquid is spin-coated on square glass substrate, is had the glass substrate of PDMS to be heating and curing spin coating, is made
PDMS liquid forms PDMS film in the glass substrate, a circular through hole (6) is made at PDMS film center, finally by band
There is the PDMS film of through-hole (6) to separate to obtain isolated protective layer (3) with the glass substrate；
Step S150: the isolated protective layer (3) is fitted on the flexible substrate (4), and electrode (5) is made to be located at the isolation
The centre of protective layer (3) and the flexible substrate (4), the through-hole (6) are located at the centre of electrode (5), obtain contactless self-powered
Dynamic electronic skin.
7. according to the method described in claim 6, it is characterized by: described in frictional layer film die surface spin coating PDMS liquid
Spin coating with a thickness of 500 μm.
8. according to the method described in claim 7, it is characterized by: the frictional layer film die that will be coated with PDMS is added
The temperature of heat cure is 80 DEG C, curing time 2h.
9. according to the method described in claim 6, it is characterized by: described be spin-coated on PDMS liquid on square glass substrate
Spin coating is with a thickness of 500 μm.
10. according to the method described in claim 9, it is characterized by: described have the glass substrate of PDMS to be heating and curing spin coating
Temperature be 80 DEG C, curing time 2h.
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| CN110132457A (en) * | 2019-05-28 | 2019-08-16 | 华中科技大学 | A kind of flexible sensor of multifunctional sensing and preparation method thereof |
| CN112667101B (en) * | 2020-12-18 | 2021-07-09 | 广东省科学院半导体研究所 | Self-driven perspiration electronic skin and preparation method thereof |
| CN113232031A (en) * | 2021-01-20 | 2021-08-10 | 北京航空航天大学 | Novel electronic skin with adjustable pressure sensing range |
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