CN107939634A - A kind of passive heated type minitype pneumatic pump - Google Patents
A kind of passive heated type minitype pneumatic pump Download PDFInfo
- Publication number
- CN107939634A CN107939634A CN201711382550.4A CN201711382550A CN107939634A CN 107939634 A CN107939634 A CN 107939634A CN 201711382550 A CN201711382550 A CN 201711382550A CN 107939634 A CN107939634 A CN 107939634A
- Authority
- CN
- China
- Prior art keywords
- heated type
- pneumatic pump
- minitype pneumatic
- type minitype
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/20—Other positive-displacement pumps
- F04B19/24—Pumping by heat expansion of pumped fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/08—Cooling; Heating; Preventing freezing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
Abstract
The invention discloses a kind of passive heated type minitype pneumatic to pump, including flow plate, is equipped with cover board at the top of flow plate, flow plate bottom is equipped with wireless heating plate；The flow plate is equipped with outlet pipe, and outlet pipe is connected with water pipe through pipeline, and the stretched device of water pipe is connected with heating chamber；The cover board is equipped with outlet and entrance, and outlet is connected with outlet pipe, and entrance is connected with water pipe；The wireless heating plate is equipped with the LC heaters below heating chamber, and transmitting coil is equipped with below LC heaters.The present invention considerably increases the stability and efficiency and service life of equipment without elastic film and Valve controlling；Wireless heating mode is also used, by the operation of the frequency selection control micropump of external magnetic field, improves practicality and convenience.
Description
Technical field
The present invention relates to a kind of passive heated type minitype pneumatic to pump, particularly a kind of passive heated type based on frequency selection
Minitype pneumatic pumps.
Background technology
Since precision is high, it is easily controllable the advantages that, the micropump of the making based on MEMS technology by experimental verification simultaneously
Biomedical and microfluidic control field has been put into extensively.According to current technology, micropump mainly uses piezoelectric type, electromagnetism
The operation principle of formula and hot gas formula, wherein having low-voltage power supply using the micropump that hot gas drives, controls the advantage such as accurate to obtain
Substantial amounts of research and development.The micropump utilizes the temperature difference of heating region, is drawn by the heating to gas and cooling
The yaw motion for playing driving film realizes operation, and check valve is used to the liquid flow direction inside coupling channel, generally requires more
A driver is installed together the push process for realizing liquid at the same time.The assembly technology difficulty of this structure is big, manufactures
This height；And since long-term moves back and forth, elastic film and valve can largely be worn, and be greatly reduced
The stability and reliability of mechanical equipment, service life are also restricted.On the other hand, supplied using external power supply or battery
The micropump of electricity so that the convenience and applicability of product receive serious limitation, so as to greatly reduce answering for micropump
Use scope.
The content of the invention
It is an object of the present invention to provide a kind of passive heated type minitype pneumatic to pump.The present invention is without elastic film and valve
Gate system, considerably increases the stability and efficiency and service life of equipment；Wireless heating mode is also used, passes through exterior magnetic
The operation of the frequency selection control micropump of field, improves practicality and convenience.
Technical scheme：A kind of passive heated type minitype pneumatic pump, including flow plate, flow plate top are equipped with lid
Plate, flow plate bottom are equipped with wireless heating plate；The flow plate is equipped with outlet pipe, and outlet pipe is connected with water pipe through pipeline,
The stretched device of water pipe is connected with heating chamber；The cover board is equipped with outlet and entrance, and outlet is connected with outlet pipe, and entrance is with storing
Water pipe connects；The wireless heating plate is equipped with the LC heaters below heating chamber, and emission lines are equipped with below LC heaters
Circle.
In foregoing passive heated type minitype pneumatic pump, the angle of release of the expander is 10-12 °, the depth of the heating chamber
Degree is respectively than outlet pipe, pipeline, water pipe and expander depth 0.5mm-0.8mm.
In foregoing passive heated type minitype pneumatic pump, gas is equipped with the heating chamber, gas is nitrogen, titanium dioxide
Carbon, oxygen or air.
In foregoing passive heated type minitype pneumatic pump, the outlet and entrance are through-hole structure, its a diameter of 1-2mm.
In foregoing passive heated type minitype pneumatic pump, the LC heaters are to produce a helical layer using photoetching process
Pattern copper electrode；The width of spiral pattern copper electrode is 100-200 μm, and gap is 50-100 μm, and thickness is 15-20 μm.
In foregoing passive heated type minitype pneumatic pump, the preparation process of the photoetching process is as follows：
1. prepare a Kapton and cleaned successively with alcohol, acetone and deionized water respectively；
2. one layer of copper material bed of material is deposited on the Kapton surface using magnetic control sputtering system, will using spin coating technique
Photoresist is uniformly covered on above the copper material bed of material, and the mask plate with spiral pattern made is placed in litho machine simultaneously
It is exposed；
3. taking-up after the Kapton after exposure is placed in corresponding photoresist etching liquid so that photoresist layer shape
Into corresponding spiral pattern；
4. being performed etching to the copper material bed of material, the transfer of spiral pattern is realized；
5. remaining photoresist is all removed, finally film is cleaned with deionized water, obtains finished product.
In foregoing passive heated type minitype pneumatic pump, the wireless heating plate is polyimide film material, thickness model
Enclose for 50-100 μm.
In foregoing passive heated type minitype pneumatic pump, the maximum width of the pipeline is 0.4-0.5mm.
In foregoing passive heated type minitype pneumatic pump, the cover board and flow plate by dimethyl silicone polymer, polylactic acid,
Polyhydroxyalkanoates, starch plastic, polyolefin or polyvinyl chloride are formed；Or by polymethyl methacrylate, ABS resin or silicon rubber
Glue is formed.
In foregoing passive heated type minitype pneumatic pump, the jet method of the passive heated type minitype pneumatic pump is：Outside
The liquid on boundary is entered flow plate by entrance and is stored in water pipe, which flows through pipeline by push and reach outlet pipe, and
It is connected by outlet outflow and with extraneous receiving channel, the frequency provided when external magnetic field and the frequency institute of wireless heating plate
During matching, LC heaters start to work and produce electric current, so as to distribute heat to surrounding, which can be to the gas in heating chamber
Body carries out laser heating, promotes the liquid remained in water pipe to flow through pipe based on air plus thermogenetic volumetric expansion
Road sprays in exit.
Compared with prior art, the present invention is produced using the signal transmission that radio-frequency signal generator and amplifier produce to external coil
Magnetisation field, the resonant frequency of micropump is matched so as to fulfill the function of wirelessly heating by controlling field frequency.Based on air
Add thermogenetic volumetric expansion to promote the liquid passes through conduit remained in water pipe to be sprayed in opening, which disappears
The risk of mechanical breakdown is easily produced except portable film pushes, there is preferable stability, reliability, security, significantly
Add service life of equipment.The present invention uses the wireless mode of heating based on transmitting coil, it is not necessary to is equipped with special power supply
Connection, realizes portable operating mode, adds convenience.The material of the present invention can be selected elastomeric or have biological
The macromolecule membrane of compatibility, also can be selected transparent membrane, is added significantly to application range, such as opening in flexible electronic field
Hair utilizes, the potential application of implantable medical device, the integrated system of wearable device and installed in the small-sized of industry spot
Change in equipment.The present invention realizes micromation, and overall dimensions are no more than 1200mm3(30×10×4mm3).The present invention is without elasticity
Film and Valve controlling, considerably increase the stability and efficiency and service life of equipment；Wireless heating mode is also used, is led to
The operation of the frequency selection control micropump of external magnetic field is crossed, improves practicality and convenience.
The outlet of the present invention and the diameter of entrance use 1-2mm, are conducive to the smooth of microchannel liquid and flow into and spray；Together
The maximum width of Shi Peihe pipelines is 0.4-0.5mm so that the liquid in water pipe can uniformly flow into outlet pipe；Expander is opened
Angle is 10-12 degree, and fixed liquid resistance can be formed between water pipe and heating chamber, avoids liquid from pouring in down a chimney to heating chamber；
The depth of the heating chamber than outlet pipe, pipeline, water pipe and expander depth 0.5mm-0.8mm, ensures that heating chamber is built-in respectively
There is enough gas, so that the thrust that the expansion of gas produces when heating meets the needs of driving liquid flowing.Using spiral figure
The width of case copper electrode is 100-200 μm so that required operating current when electrode can bear to produce maximum heating amount, and
And screw electrode still has the more number of turns, increased heating efficiency.Gap (is typically chosen in the one of width for 50-100 μm
Half), thickness is 15-20 μm, has preferable electric conductivity and heating property while reducing the difficulty and time cost of making.
Wireless heating plate should select can heat safe polyimides (Kapton) thin-film material, thickness range is 50-100 μm, be easy into
Row surface processes, and ensures to have preferable flexible, toughness and chemical stability.If also may be used during the transparent application scenarios of demand
To select the polytetrafluoroethylene (PTFE) of same thickness (PTFE) film.
Brief description of the drawings
Fig. 1 be the present invention split structure diagram；
Fig. 2 is the encapsulating structure schematic diagram of the present invention；
Fig. 3 is the front schematic view of the flow plate of the present invention；
Fig. 4 is the side view of the present invention；
Fig. 5 is the exemplary applications and test platform of the present invention；
Fig. 6 is the photolithography process figure of the wireless heating plate of the present invention.
Embodiment
The present invention is further illustrated with reference to the accompanying drawings and examples, but be not intended as to the present invention limit according to
According to.
Embodiment.A kind of passive heated type minitype pneumatic pump, is formed as shown in Figure 1,2 and 3, including flow plate 11, flowing
The top of plate 11 is equipped with cover board 12, and 11 bottom of flow plate is equipped with wireless heating plate 10；The flow plate 11 is equipped with outlet pipe 3, goes out
Water pipe 3 is connected with water pipe 5 through pipeline 4, and the stretched device 6 of water pipe 5 is connected with heating chamber 7；The cover board 12 is equipped with outlet 1
With entrance 2, outlet 1 is connected with outlet pipe 3, and entrance 2 is connected with water pipe 5；The wireless heating plate 10 is equipped with positioned at heating
The LC heaters 8 of the lower section of chamber 7, the lower section of LC heaters 8 are equipped with transmitting coil 9.Transmitting coil 9 can be at suspension and be not connected to state,
Two output terminals of the transmitting coil 9 are arranged to positive and negative anodes and are sequentially connected with radio-frequency signal generator and amplifier.
The angle of release of the expander 6 is 10-12 °, and the depth of the heating chamber 7 is respectively than outlet pipe 3, pipeline 4, water pipe
The 5 and depth of expander 6 0.5mm-0.8mm.
Gas is equipped with the heating chamber 7, gas is nitrogen, carbon dioxide, oxygen or air；Its internal pressure should be greater than
Environment or room atmosphere pressure.
The outlet 1 and entrance 2 are through-hole structure, its a diameter of 1-2mm.
The LC heaters 8 are to produce a helical layer pattern copper electrode using photoetching process；Spiral pattern copper electrode
Width is 100-200 μm, and gap is 50-100 μm, and thickness is 15-20 μm.
As shown in fig. 6, the preparation process of the photoetching process is as follows：
1. prepare a Kapton and cleaned successively with alcohol, acetone and deionized water respectively；
2. one layer of copper material bed of material is deposited on the Kapton surface using magnetic control sputtering system, will using spin coating technique
Photoresist is uniformly covered on above the copper material bed of material, and the mask plate with spiral pattern made is placed in litho machine simultaneously
It is exposed；
3. taking-up after the Kapton after exposure is placed in corresponding photoresist etching liquid so that photoresist layer shape
Into corresponding spiral pattern；
4. being performed etching to the copper material bed of material, the transfer of spiral pattern is realized；
5. remaining photoresist is all removed, finally film is cleaned with deionized water, obtains finished product.
The wireless heating plate 10 is polyimide film material, and thickness range is 50-100 μm.
The maximum width of the pipeline 4 is 0.4-0.5mm.
The integral diameter of the transmitting coil 9 should be greater than the width of heating chamber 7, and coil turn can be adjusted arbitrarily, coil
It is made of copper bare conductor.
The cover board 12 and flow plate 11 are by dimethyl silicone polymer, polylactic acid, polyhydroxyalkanoates, starch plastic, poly-
Alkene or polyvinyl chloride are formed；Or it is made of polymethyl methacrylate, ABS resin or silicon rubber.
As shown in Figures 3 and 4, the jet method of the passive heated type minitype pneumatic pump is：Extraneous liquid by entrance into
Enter flow plate and be stored in water pipe, the liquid by push flow through pipeline reach outlet pipe, and by outlet outflow and with it is outer
The receiving channel on boundary is connected, when the frequency and the frequency of wireless heating plate that external magnetic field is provided match, LC heaters
Start to work and produce electric current, so as to distribute heat to surrounding, which can carry out laser heating to the gas in heating chamber,
The liquid passes through conduit remained in water pipe is promoted to be sprayed in exit based on air plus thermogenetic volumetric expansion.
As shown in figure 5, the present invention produces magnetic using the signal transmission that radio-frequency signal generator and amplifier produce to external coil
, the resonant frequency of minitype pneumatic pump is matched so as to fulfill the function of wirelessly heating by controlling field frequency.Using micro-
To control, microscopic camera pumps the fluid flow rate of internal channel to type computer to minitype pneumatic and flow condition is monitored and takes pictures
Record.Using pressure sensor with outlet connection so as to measure and calculate the pressure and volume of the liquid of outflow.
Claims (10)
- A kind of 1. passive heated type minitype pneumatic pump, it is characterised in that：Including flow plate (11), lid is equipped with the top of flow plate (11) Plate (12), flow plate (11) bottom are equipped with wireless heating plate (10)；The flow plate (11) is equipped with outlet pipe (3), outlet pipe (3) water pipe (5) is connected with through pipeline (4), water pipe (5) stretched device (6) is connected with heating chamber (7)；The cover board (12) Outlet (1) and entrance (2) are equipped with, outlet (1) is connected with outlet pipe (3), and entrance (2) is connected with water pipe (5)；It is described wireless Heating plate (10) is equipped with the LC heaters (8) below heating chamber (7), and transmitting coil is equipped with below LC heaters (8) (9)。
- 2. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The angle of release of the expander (6) For 10-12 °, the depth of the heating chamber (7) is deeper than outlet pipe (3), pipeline (4), water pipe (5) and expander (6) respectively 0.5mm-0.8mm。
- 3. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：It is equipped with the heating chamber (7) Gas, gas are nitrogen, carbon dioxide, oxygen or air.
- 4. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The outlet (1) and entrance (2) For through-hole structure, its a diameter of 1-2mm.
- 5. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The LC heaters (8) are profit A helical layer pattern copper electrode is produced with photoetching process；The width of spiral pattern copper electrode is 100-200 μm, gap 50- 100 μm, thickness is 15-20 μm.
- 6. passive heated type minitype pneumatic pump according to claim 5, it is characterised in that：The preparation of the photoetching process Journey is as follows：1. prepare a Kapton and cleaned successively with alcohol, acetone and deionized water respectively；2. one layer of copper material bed of material is deposited on the Kapton surface using magnetic control sputtering system, using spin coating technique by photoetching Glue is uniformly covered on above the copper material bed of material, and the mask plate with spiral pattern made is placed in litho machine and is carried out Exposure；3. taking-up after the Kapton after exposure is placed in corresponding photoresist etching liquid so that photoresist layer forms Corresponding spiral pattern；4. being performed etching to the copper material bed of material, the transfer of spiral pattern is realized；5. remaining photoresist is all removed, finally film is cleaned with deionized water, obtains finished product.
- 7. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The wireless heating plate (10) is Polyimide film material, thickness range are 50-100 μm.
- 8. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The maximum of the pipeline (4) is wide Spend for 0.4-0.5mm.
- 9. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The cover board (12) and flow plate (11) it is made of dimethyl silicone polymer, polylactic acid, polyhydroxyalkanoates, starch plastic, polyolefin or polyvinyl chloride；Or by gathering Methyl methacrylate, ABS resin or silicon rubber are formed.
- 10. pumped according to the passive heated type minitype pneumatic of claim 1-9 any one of them, it is characterised in that it is described passive plus Hot type minitype pneumatic pump jet method be：Extraneous liquid is entered flow plate by entrance and is stored in water pipe, the liquid Pipeline is flowed through by push and reaches outlet pipe, and is connected by outlet outflow and with extraneous receiving channel, when external magnetic field institute When the frequency of the frequency of offer and wireless heating plate matches, LC heaters start to work and produce electric current, so as to be dissipated to surrounding Caloric value, the heat can be carried out laser heating to the gas in heating chamber, be pushed away based on air plus thermogenetic volumetric expansion The dynamic liquid passes through conduit remained in water pipe sprays in exit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711382550.4A CN107939634A (en) | 2017-12-20 | 2017-12-20 | A kind of passive heated type minitype pneumatic pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711382550.4A CN107939634A (en) | 2017-12-20 | 2017-12-20 | A kind of passive heated type minitype pneumatic pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107939634A true CN107939634A (en) | 2018-04-20 |
Family
ID=61941961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711382550.4A Pending CN107939634A (en) | 2017-12-20 | 2017-12-20 | A kind of passive heated type minitype pneumatic pump |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050129529A1 (en) * | 2003-12-15 | 2005-06-16 | Samsung Electronics Co., Ltd. | Device and method for pumping fluids employing the movement of gas bubbles in microscale |
| WO2008150210A1 (en) * | 2007-06-07 | 2008-12-11 | Ge Healthcare Bio-Sciences Ab | Micropump |
| CN103967740A (en) * | 2014-04-12 | 2014-08-06 | 北京工业大学 | Steam-bubble-driven micro pump conducting heating through induction |
| EP3075451A1 (en) * | 2015-03-31 | 2016-10-05 | Coris Bioconcept SPRL | Disposable flow chip device |
| CN107039370A (en) * | 2016-12-06 | 2017-08-11 | 北京理工大学 | A kind of fluid channel cooling system driven by bubble Micropump |
| CN207583583U (en) * | 2017-12-20 | 2018-07-06 | 爱科赛智能科技（台州）有限公司 | A kind of passive heated type minitype pneumatic pump |
-
2017
- 2017-12-20 CN CN201711382550.4A patent/CN107939634A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050129529A1 (en) * | 2003-12-15 | 2005-06-16 | Samsung Electronics Co., Ltd. | Device and method for pumping fluids employing the movement of gas bubbles in microscale |
| WO2008150210A1 (en) * | 2007-06-07 | 2008-12-11 | Ge Healthcare Bio-Sciences Ab | Micropump |
| CN103967740A (en) * | 2014-04-12 | 2014-08-06 | 北京工业大学 | Steam-bubble-driven micro pump conducting heating through induction |
| EP3075451A1 (en) * | 2015-03-31 | 2016-10-05 | Coris Bioconcept SPRL | Disposable flow chip device |
| CN107039370A (en) * | 2016-12-06 | 2017-08-11 | 北京理工大学 | A kind of fluid channel cooling system driven by bubble Micropump |
| CN207583583U (en) * | 2017-12-20 | 2018-07-06 | 爱科赛智能科技（台州）有限公司 | A kind of passive heated type minitype pneumatic pump |
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