CN207583583U - A kind of passive heated type minitype pneumatic pump - Google Patents
A kind of passive heated type minitype pneumatic pump Download PDFInfo
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- CN207583583U CN207583583U CN201721790911.4U CN201721790911U CN207583583U CN 207583583 U CN207583583 U CN 207583583U CN 201721790911 U CN201721790911 U CN 201721790911U CN 207583583 U CN207583583 U CN 207583583U
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- heated type
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- type minitype
- water pipe
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Abstract
The utility model discloses a kind of passive heated type minitype pneumatics to pump, and including flow plate, cover board is equipped at the top of flow plate, flow plate bottom is equipped with wireless heating plate；The flow plate is equipped with outlet pipe, and outlet pipe is connected with water pipe through pipeline, and the stretched device of water pipe is connected with heating chamber；The cover board is equipped with outlet and entrance, and outlet is connected with outlet pipe, and entrance is connected with water pipe；The wireless heating plate is equipped with the LC heaters being located at below heating chamber, and transmitting coil is equipped with below LC heaters.The utility model is controlled without elastic film and valve, considerably increases the stability of equipment and efficiency and service life；Also using wireless heating mode, by the operation of the frequency selection control micropump of external magnetic field, practicability and convenience are improved.
Description
Technical field
The utility model is related to a kind of passive heated type minitype pneumatics to pump, particularly a kind of to be added based on the passive of frequency selection
Hot type minitype pneumatic pumps.
Background technology
Due to precision height, it is easily controllable the advantages that, the micropump of the making based on MEMS technology by experimental verification simultaneously
Biomedical and microfluidic control field has been put into extensively.According to current technology, micropump is mainly using piezoelectric type, electromagnetism
The operation principle of formula and hot gas formula wherein having low-voltage power supply using the micropump of hot gas driving, controls the advantages such as accurate to obtain
A large amount of research and development.The micropump utilizes the temperature difference of heating region, is drawn by the heating to gas and cooling
The yaw motion for playing driving film realizes operation, and check valve is used to the liquid flow direction inside coupling channel, generally requires more
A driver is installed together the push process for realizing liquid simultaneously.The assembly technology difficulty of this structure is big, manufactures
This height；And since long-term moves back and forth, elastic film and valve can largely be worn, and be greatly reduced
The stability and reliability of mechanical equipment, service life are also restricted.On the other hand, it is supplied using external power supply or battery
The micropump of electricity so that the convenience and applicability of product receive serious limitation, so as to greatly reduce answering for micropump
Use range.
Utility model content
The purpose of the utility model is to provide a kind of passive heated type minitype pneumatics to pump.The utility model is without elasticity
Film and valve control, considerably increase the stability of equipment and efficiency and service life；Also using wireless heating mode, lead to
The operation of the frequency selection control micropump of external magnetic field is crossed, improves practicability and convenience.
The technical solution of the utility model：A kind of passive heated type minitype pneumatic pump, including flow plate, sets at the top of flow plate
There is cover board, flow plate bottom is equipped with wireless heating plate；The flow plate is equipped with outlet pipe, and outlet pipe is connected with water storage through pipeline
Pipe, the stretched device of water pipe are connected with heating chamber；The cover board is equipped with outlet and entrance, and outlet is connected with outlet pipe, entrance
It is connected with water pipe；The wireless heating plate is equipped with the LC heaters being located at below heating chamber, and hair is equipped with below LC heaters
Ray circle.
In aforementioned passive heated type minitype pneumatic pump, the angle of release of the expander is 10-12 °, the depth of the heating chamber
Degree is respectively than outlet pipe, pipeline, water pipe and expander depth 0.5mm-0.8mm.
In aforementioned passive heated type minitype pneumatic pump, gas is equipped in the heating chamber, gas is nitrogen, titanium dioxide
Carbon, oxygen or air.
In aforementioned passive heated type minitype pneumatic pump, the outlet and entrance are through-hole structure, a diameter of 1-2mm.
In aforementioned passive heated type minitype pneumatic pump, the LC heaters are to produce a helical layer using photoetching process
Pattern copper electrode；The width of spiral pattern copper electrode is 100-200 μm, and gap is 50-100 μm, and thickness is 15-20 μm.
In aforementioned passive heated type minitype pneumatic pump, the preparation process of the photoetching process is as follows：
1. prepare a Kapton and cleaned successively with alcohol, acetone and deionized water respectively；
2. one layer of copper material bed of material is deposited on the Kapton surface using magnetic control sputtering system, it will using spin coating technique
Photoresist is uniformly covered on above the copper material bed of material, and the mask plate with spiral pattern made is placed in litho machine simultaneously
It is exposed；
3. taken out after the Kapton after exposure is placed in corresponding photoresist etching liquid so that photoresist layer shape
Into corresponding spiral pattern；
4. being performed etching to the copper material bed of material, the transfer of spiral pattern is realized；
5. remaining photoresist is all removed, finally film is cleaned with deionized water, obtains finished product.
In aforementioned passive heated type minitype pneumatic pump, the wireless heating plate is polyimide film material, thickness model
Enclose is 50-100 μm.
In aforementioned passive heated type minitype pneumatic pump, the maximum width of the pipeline is 0.4-0.5mm.
In aforementioned passive heated type minitype pneumatic pump, the cover board and flow plate by dimethyl silicone polymer, polylactic acid,
Polyhydroxyalkanoates, starch plastic, polyolefin or polyvinyl chloride are formed；Or by polymethyl methacrylate, ABS resin or silicon rubber
Glue is formed.
In aforementioned passive heated type minitype pneumatic pump, the jet method of the passive heated type minitype pneumatic pump is：Outside
The liquid on boundary is entered flow plate by entrance and is stored in water pipe, which flows through pipeline by push and reach outlet pipe, and
It is connected by outlet outflow and with extraneous receiving channel, the frequency provided when external magnetic field and the frequency institute of wireless heating plate
During matching, LC heaters start to work and generate electric current, and so as to distribute heat to surrounding, which can be to the gas in heating chamber
Body carries out laser heating, the liquid remained in water pipe is pushed to flow through pipe based on air plus thermogenetic volume expansion
Road sprays in exit.
Compared with prior art, the utility model utilizes the signal transmission that radio-frequency signal generator and amplifier generate to outer lines
Circle generates magnetic field, and the resonant frequency of micropump is matched so as to fulfill the function of wirelessly heating by controlling field frequency.It is based on
Air adds thermogenetic volume expansion the liquid passes through conduit remained in water pipe to be pushed to be sprayed in opening, the knot
Structure eliminates the risk that the push of mobile film easily generates mechanical breakdown, has preferable stability, reliability, safety,
Considerably increase service life of equipment.The utility model uses the wireless mode of heating based on transmitting coil, does not need to be equipped with special
The power supply connection of door, realizes mobile operating mode, increases convenience.The material of the utility model can be selected elastomeric
Or the macromolecule membrane with bio-compatibility, transparent membrane also can be selected, be added significantly to application range, such as in flexibility
The utilization of electronic field, the potential application of implantable medical device, the integrated system of wearable device and mounted on work
On the compact apparatus at industry scene.The utility model realizes micromation, and overall dimensions are no more than 1200mm3(30×10×
4mm3).The utility model is controlled without elastic film and valve, considerably increases the stability of equipment and efficiency and using the longevity
Life；Also using wireless heating mode, by the operation of the frequency selection control micropump of external magnetic field, practicability and just is improved
Profit.
The outlet of the utility model and the diameter of entrance are conducive to the smooth of microchannel liquid and are flowed into and sprayed using 1-2mm
Go out；The maximum width for coordinating pipeline simultaneously is 0.4-0.5mm so that the liquid in water pipe can uniformly flow into outlet pipe；Expansion
The angle of release of device is 10-12 degree, and fixed liquid resistance can be formed between water pipe and heating chamber, liquid is avoided to pour in down a chimney to heating
Intracavitary；The depth of the heating chamber than outlet pipe, pipeline, water pipe and expander depth 0.5mm-0.8mm, ensures heating chamber respectively
It is interior equipped with enough gas, the thrust that the expansion of gas generates during so as to heat meets the needs of driving liquid flows.Using spiral shell
The width for revolving pattern copper electrode is 100-200 μm so that electrode can bear to generate required work electricity during maximum heating amount
Stream, and screw electrode still has the more number of turns, increased heating efficiency.Gap (is typically chosen in width for 50-100 μm
Half), thickness is 15-20 μm, has preferable electric conductivity and fever while reducing the difficulty and time cost of making
Performance.Wireless heating plate should select can heat safe polyimides (Kapton) thin-film material, thickness range is 50-100 μm, easily
In progress surface processing, and ensure to have preferable flexible, toughness and chemical stability.If during the transparent application scenarios of demand
Polytetrafluoroethylene (PTFE) (PTFE) film of same thickness can also be selected.
Description of the drawings
Fig. 1 is that the utility model splits structure diagram；
Fig. 2 is the encapsulating structure schematic diagram of the utility model；
Fig. 3 is the front schematic view of the flow plate of the utility model；
Fig. 4 is the side view of the utility model；
Fig. 5 is the exemplary applications and test platform of the utility model.
Specific embodiment
The utility model is further described with reference to the accompanying drawings and examples, but is not intended as to the utility model
The foundation of limitation.
Embodiment.A kind of passive heated type minitype pneumatic pump, is formed as shown in Figure 1,2 and 3, including flow plate 11, flowing
11 top of plate is equipped with cover board 12, and 11 bottom of flow plate is equipped with wireless heating plate 10；The flow plate 11 is equipped with outlet pipe 3, goes out
Water pipe 3 is connected with water pipe 5 through pipeline 4, and 5 stretched device 6 of water pipe is connected with heating chamber 7；The cover board 12 is equipped with outlet 1
With entrance 2, outlet 1 is connected with outlet pipe 3, and entrance 2 is connected with water pipe 5；The wireless heating plate 10, which is equipped with, is located at heating
The LC heaters 8 of 7 lower section of chamber, 8 lower section of LC heaters are equipped with transmitting coil 9.Transmitting coil 9, which can be at suspending, is not connected to state,
Two output terminals of the transmitting coil 9 are set as positive and negative anodes and are sequentially connected with radio-frequency signal generator and amplifier.
The angle of release of the expander 6 is 10-12 °, and the depth of the heating chamber 7 is respectively than outlet pipe 3, pipeline 4, water pipe
5 and 6 depth 0.5mm-0.8mm of expander.
Gas is equipped in the heating chamber 7, gas is nitrogen, carbon dioxide, oxygen or air；Its internal pressure should be greater than
Environment or room atmosphere pressure.
It is described outlet 1 and entrance 2 be through-hole structure, a diameter of 1-2mm.
The LC heaters 8 are to produce a helical layer pattern copper electrode using photoetching process；Spiral pattern copper electrode
Width is 100-200 μm, and gap is 50-100 μm, and thickness is 15-20 μm.
The preparation process of the photoetching process is as follows：
1. prepare a Kapton and cleaned successively with alcohol, acetone and deionized water respectively；
2. one layer of copper material bed of material is deposited on the Kapton surface using magnetic control sputtering system, it will using spin coating technique
Photoresist is uniformly covered on above the copper material bed of material, and the mask plate with spiral pattern made is placed in litho machine simultaneously
It is exposed；
3. taken out after the Kapton after exposure is placed in corresponding photoresist etching liquid so that photoresist layer shape
Into corresponding spiral pattern；
4. being performed etching to the copper material bed of material, the transfer of spiral pattern is realized；
5. remaining photoresist is all removed, finally film is cleaned with deionized water, obtains finished product.
The wireless heating plate 10 is polyimide film material, and thickness range is 50-100 μm.
The maximum width of the pipeline 4 is 0.4-0.5mm.
The integral diameter of the transmitting coil 9 should be greater than the width of heating chamber 7, and coil turn can be adjusted arbitrarily, coil
It is made of copper bare conductor.
The cover board 12 and flow plate 11 are by dimethyl silicone polymer, polylactic acid, polyhydroxyalkanoates, starch plastic, poly-
Alkene or polyvinyl chloride are formed；Or it is made of polymethyl methacrylate, ABS resin or silicon rubber.
As shown in Figures 3 and 4, the jet method of the passive heated type minitype pneumatic pump is：Extraneous liquid by entrance into
Enter flow plate and be stored in water pipe, the liquid by push flow through pipeline reach outlet pipe, and by outlet outflow and with it is outer
The receiving channel on boundary is connected, when the frequency and the frequency of wireless heating plate that external magnetic field is provided match, LC heaters
It starts to work and generates electric current, so as to distribute heat to surrounding, which can carry out laser heating to the gas in heating chamber,
The liquid passes through conduit remained in water pipe is pushed to be sprayed in exit based on air plus thermogenetic volume expansion.
As shown in figure 5, the utility model is produced using the signal transmission that radio-frequency signal generator and amplifier generate to external coil
Magnetisation field matches the resonant frequency of minitype pneumatic pump so as to fulfill the function of wirelessly heating by controlling field frequency.It can profit
With microcomputer come control microscopic camera to minitype pneumatic pump internal channel fluid flow rate and flow condition be monitored and
It photographs to record.Using pressure sensor with outlet connection so as to measure and calculate the pressure and volume of the liquid of outflow.
Claims (7)
1. a kind of passive heated type minitype pneumatic pump, it is characterised in that：Including flow plate (11), lid is equipped at the top of flow plate (11)
Plate (12), flow plate (11) bottom are equipped with wireless heating plate (10)；The flow plate (11) is equipped with outlet pipe (3), outlet pipe
(3) water pipe (5) is connected with through pipeline (4), water pipe (5) stretched device (6) is connected with heating chamber (7)；The cover board (12)
Outlet (1) and entrance (2) are equipped with, outlet (1) is connected with outlet pipe (3), and entrance (2) is connected with water pipe (5)；It is described wireless
Heating plate (10) is equipped with the LC heaters (8) being located at below heating chamber (7), and transmitting coil is equipped with below LC heaters (8)
(9)。
2. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The angle of release of the expander (6)
It it is 10-12 °, the depth of the heating chamber (7) is deeper than outlet pipe (3), pipeline (4), water pipe (5) and expander (6) respectively
0.5mm-0.8mm。
3. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：It is equipped in the heating chamber (7)
Gas, gas are nitrogen, carbon dioxide, oxygen or air.
4. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The outlet (1) and entrance (2)
For through-hole structure, a diameter of 1-2mm.
5. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The LC heaters (8) are one
Helical layer pattern copper electrode；The width of spiral pattern copper electrode is 100-200 μm, and gap is 50-100 μm, and thickness is 15-20 μ
m。
6. passive heated type minitype pneumatic pump according to claim 1, it is characterised in that：The wireless heating plate (10) is
Polyimide film material, thickness range are 50-100 μm.
7. it is pumped according to the passive heated type minitype pneumatic of claim 1-6 any one of them, it is characterised in that：The pipeline (4)
Width be 0.4-0.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721790911.4U CN207583583U (en) | 2017-12-20 | 2017-12-20 | A kind of passive heated type minitype pneumatic pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721790911.4U CN207583583U (en) | 2017-12-20 | 2017-12-20 | A kind of passive heated type minitype pneumatic pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207583583U true CN207583583U (en) | 2018-07-06 |
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ID=62739505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721790911.4U Active CN207583583U (en) | 2017-12-20 | 2017-12-20 | A kind of passive heated type minitype pneumatic pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207583583U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107939634A (en) * | 2017-12-20 | 2018-04-20 | 爱科赛智能科技（台州）有限公司 | A kind of passive heated type minitype pneumatic pump |
-
2017
- 2017-12-20 CN CN201721790911.4U patent/CN207583583U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107939634A (en) * | 2017-12-20 | 2018-04-20 | 爱科赛智能科技（台州）有限公司 | A kind of passive heated type minitype pneumatic pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 317500 9th Floor, 490 Daxi North Road, Daxi Town, Wenling City, Taizhou City, Zhejiang Province Patentee after: AGCO Intelligent Technology (Zhejiang) Co., Ltd Address before: Wenling Wenqiao Town, Wei Tong Village in Taizhou City, Zhejiang province 317527 Patentee before: Ikesai Intelligent Technology (Taizhou) Co., Ltd. |
|
| CP03 | Change of name, title or address | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Passive heating type micro pneumatic pump Effective date of registration: 20191211 Granted publication date: 20180706 Pledgee: Zhejiang Tyrone commercial bank Limited by Share Ltd Taizhou Wenling branch Pledgor: AGCO Intelligent Technology (Zhejiang) Co., Ltd Registration number: Y2019330000302 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |