CN107916417A - Passivation device and method - Google Patents
Passivation device and method Download PDFInfo
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- CN107916417A CN107916417A CN201710753735.5A CN201710753735A CN107916417A CN 107916417 A CN107916417 A CN 107916417A CN 201710753735 A CN201710753735 A CN 201710753735A CN 107916417 A CN107916417 A CN 107916417A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/73—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/73—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process
- C23C22/77—Controlling or regulating of the coating process
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- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Treatment Of Metals (AREA)
- Surgical Instruments (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The present invention provides a kind of passivation device and method, and processing can be to easily and reliably passivated to treated object.Passivation device possesses：Storage treatment fluid simultaneously impregnates the treatment trough (2) of treated object；Attract the gas in discharge treatment trough (2) towards the outside and to the decompressing unit (5) of decompression in treatment trough (2)；Import gas in towards treatment trough (2) after decompression and the multiple pressure unit (6,4) to being pressed again in treatment trough (2)；And control each unit and the control unit of processing is passivated to treated object.Control unit is performed utilizes action of the pressure unit (6,4) to being pressed again in treatment trough (2) again after decompressing unit (5) is utilized to decompression in treatment trough (2).Preferably, during decompression in treatment trough (2), treatment fluid is seethed with excitement, in the boiling, multiple pressure is carried out to gas phase portion or liquid phase portion supply.
Description
Technical field
The present invention relates to the device and method that the various articles such as medical instrument are passivated with processing.
Background technology
In the past, such as following patent documents 1【0002】As section is disclosed, in order to improve the corrosion-resistant of stainless steel etc.
Property, it is known to use the Passivation Treatment of nitric acid.Specifically, 30% or so salpeter solution is heated to 60 DEG C or so in advance,
Stainless steel is impregnated in the salpeter solution about 1 it is small when to be passivated processing be usual way.
Citation
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2003-113485 publications (【0002】Section)
The content of the invention
The subject that the invention solves
However, treated object has various forms, such as with gap or hole etc., it thus may also produce air trapping.
Therefore, in the case where being only that treated object is impregnated in treatment fluid, the contact with treatment fluid can not fully be carried out, it is possible to
Discreet portions can not realize desired Passivation Treatment.
For this reason, the problem to be solved by the present invention is to provide place can be to easily and reliably passivated to treated object
The passivation device and method of reason.
Means for solving the problems
The present invention makes for solve the problem, and the invention described in technical solution 1 is related at a kind of passivation
Device is managed, it is passivated treated object processing, it is characterised in that the passivation device possesses：Treatment trough, it is stored
Treatment fluid simultaneously impregnates treated object；Decompressing unit, it attracts to discharge towards the outside the gas in the treatment trough and to the treatment trough
Interior decompression；Unit is pressed again, it towards importing gas in the treatment trough after decompression and to pressing again in the treatment trough；And control
Unit, it controls each unit, included in described multiple to being utilized after decompression in the treatment trough using the decompressing unit
Action of the unit to being pressed again in the treatment trough is pressed, processing is passivated to treated object.
According to the invention described in technical solution 1, the shape of treated object is impregnated with the storage treatment fluid into treatment trough
Under state, implement the action pressed again after to decompression in treatment trough.Thereby, it is possible to flow treatment fluid, and sky can be eliminated
The stagnation of the circulation of vital energy is stayed and processing is to easily and reliably passivated to treated object.
Invention described in technical solution 2, it is characterised in that in the base of the passivation device described in technical solution 1
It is single using the multiple pressure after treatment fluid boiling is made to being depressurized in the treatment trough using the decompressing unit on plinth
Action of the member to being pressed again in the treatment trough, is passivated treated object processing.
According to the invention described in technical solution 2, implement to depressurize in treatment trough and make treatment fluid seethe with excitement after to processing
The action pressed again in groove.By the boiling for the treatment of fluid, treatment fluid can be flowed, in addition, by seething with excitement and its stopping, Neng Gouyin
The generation and disappearance of steam bubble are played, flows treatment fluid.Thereby, it is possible to place is to easily and reliably passivated to treated object
Reason.
Invention described in technical solution 3, it is characterised in that in the passivation device described in technical solution 1 or 2
On the basis of, the passivation device possesses to the heating unit that the treatment fluid in the treatment trough is heated as described multiple
Unit is pressed, possesses gas phase portion into the treatment trough and imports the gas phase air supply unit of extraneous gas and to the treatment trough
Interior liquid phase portion imports the one side or both sides in the liquid phase air supply unit of extraneous gas, the place in by the treatment trough
Reason liquid is heated to after design temperature, treatment fluid is seethed with excitement to being depressurized in the treatment trough using the decompressing unit, at this
In boiling, start based on the action of the supply of the gas phase air supply unit or the liquid phase air supply unit, to treated object into
Row Passivation Treatment.
According to the invention described in technical solution 3, implement to make treatment fluid seethe with excitement to depressurizing in treatment trough, in the boiling
The action in gas phase portion or liquid phase portion supply into treatment trough.In the case of being supplied in decompression boiling to gas phase portion, pass through
So far the condensation of steam bubble that boiling produces in a liquid, pressure wave or pressure differential during using the condensation stir treatment fluid
Mix and transfer, treatment fluid can be made reliably to be contacted with treated object.In addition, in the case of treated object is with hole, lead to
The decompression boiling for the treatment of fluid is crossed, steam is produced in hole and is detained, but by the supply towards gas phase portion, is detained such steam
Disappear, treatment fluid can be made reliably to be contacted with treated object.On the other hand, situation about being supplied in decompression boiling to liquid phase portion
Under, air bubble that liquid phase portion into boiling imports is by entering boiling steam and The explosive expansion, and the larger bubble is in liquid phase
Portion rises, and treatment fluid is fallen after significantly having sprayed.Fallen, made with what the immediately spray rose by fulminant sprayed
Treatment fluid large-amplitude sloshing in treatment trough, can be such that treatment fluid is reliably contacted with treated object.Even if it should be noted that
To gas phase portion and liquid phase portion any one of in the case of supply, can by the way that treatment fluid is heated to design temperature in advance
Realize stable and reliable decompression boiling and Passivation Treatment.
Invention described in technical solution 4, it is characterised in that in the base of the passivation device described in technical solution 3
On plinth, the passivation device possesses the both sides of the gas phase air supply unit and the liquid phase air supply unit, by the place
During treatment fluid in reason groove is heated to design temperature, the decompression based on the decompressing unit is repeated and is based on described
The supply towards liquid phase portion of liquid phase air supply unit, stirs the treatment fluid, and the treatment fluid in by the treatment trough adds
After heat to design temperature, treatment fluid is set to seethe with excitement to being depressurized in the treatment trough using the decompressing unit, in the boiling,
The action of the supply towards gas phase portion of the gas phase air supply unit is started based on, processing is passivated to treated object.
According to the invention described in technical solution 4, during treatment fluid is heated to design temperature, place is repeated
The decompression in groove and the supply towards the liquid phase portion in treatment trough are managed, being capable of mixing treating liquid.Thereby, it is possible to Processing for removing liquid
Temperature is uneven, is heated to design temperature.Afterwards, treatment fluid is made to seethe with excitement to being depressurized in treatment trough, to treatment trough in the boiling
Interior gas phase portion supply, can be passivated treated object processing.
Invention described in technical solution 5, it is characterised in that at the passivation described in any one of technical solution 1~4
Manage device on the basis of, repeatedly setting number the treatment fluid based on the decompressing unit decompression boiling be based on it is described multiple
After the boiling stopping for pressing the treatment fluid of unit, treated object is impregnated by the stipulated time in treatment fluid with set point of temperature.
According to the invention described in technical solution 5, boiled by the decompression of the treatment fluid in the treatment trough of repeatedly setting number
Rise and stop with the boiling of the treatment fluid based on the multiple pressure in treatment trough, and the stipulated time is placed with set point of temperature afterwards, thus
Processing can be to easily and reliably passivated to treated object.
Invention described in technical solution 6, it is characterised in that at the passivation described in any one of technical solution 1~5
On the basis of managing device, the treated object is medical instrument, and the treatment fluid is to be mixed into be made of food additives in water
The aqueous solution that forms of inorganic agent.
According to the invention described in technical solution 6, even if treated object is medical instrument, by using by food additives
The inorganic agent of composition, thus be also safety.
In addition, the invention described in technical solution 7 is related to a kind of deactivating process for the treatment of, it is characterised in that in treatment trough
In the state of storing treatment fluid and impregnating treated object, included in the action to being pressed again after being depressurized in the treatment trough, to quilt
Processed material is passivated processing.
According to the invention described in technical solution 7, the state of treated object is impregnated in the storage treatment fluid into treatment trough
Under, implement the action pressed again after to decompression in treatment trough.Thereby, it is possible to flow treatment fluid, and air can be eliminated
It is detained and processing is to easily and reliably passivated to treated object.
Invention effect
Passivation device according to the present invention and method, to easily and reliably can be passivated treated object place
Reason.
Brief description of the drawings
Fig. 1 is the synoptic diagram for the passivation device for representing one embodiment of the invention, and a part is shown with profile type
Go out.
Description of reference numerals：
1 passivation device；
2 treatment troughs；
3 heating units；
4 liquid phase air supply units (pressing unit again)；
5 decompressing units；
6 gas phase air supply units (pressing unit again)；
7 pressure sensors；
8 temperature sensors；
9 water supplying units；
10 liquid-supply units；
11 water routes；
12 feed water valves；
13 hold-up tanks；
14 supply fluid path；
15 supplying valves；
16 electric heaters；
17 device for vacuum generation；
18 exhaust lines；
19 gas phases supply gas circuit；
20 gas phase steam supply valves；
21 air spray component.
Embodiment
Hereinafter, based on attached drawing come the specific embodiment that the present invention will be described in detail.
Fig. 1 is the synoptic diagram for the passivation device 1 for representing one embodiment of the invention, and a part is shown with profile type
Go out.
The passivation device 1 of the present embodiment possesses：Storage treatment fluid simultaneously impregnates the processing of treated object (illustration omitted)
Groove 2；The heating unit 3 heated to the treatment fluid in the treatment trough 2；Agitating unit as the treatment fluid in treatment trough 2
Liquid phase air supply unit 4；Gas in treatment trough 2 is attracted towards the outside to discharge and the decompressing unit 5 to depressurizing in treatment trough 2；
Gas is imported in towards the treatment trough 2 after decompression and makes multiple pressure unit (gas phase air supply unit 6 and the liquid phase confession pressed again in treatment trough
Gas unit 4)；And control above-mentioned each unit and the control unit (illustration omitted) of processing is passivated to treated object.
Treated object is not particularly limited, and is, for example, the medical instrument such as pliers or scalpel.A part for treated object or
The made of metal that person is passivated all through the contact with treatment fluid, typical case for be stainless steel.
Treatment trough 2 is the hollow container for the decompression that can bear inner space, can be opened and closed by door (illustration omitted).Typical case
For, treatment trough 2 is by the door structure for the opening portion of the processing groove body and gastight closing processing groove body being open upward
Into.
In treatment trough 2, storage treatment fluid to middle part.As a result, it is divided into gas phase portion and liquid phase portion in treatment trough 2.
Liquid in the pressure sensor 7 and detection process groove 2 of the pressure in the gas phase portion in detection process groove 2 is set in treatment trough 2
The temperature sensor 8 of the temperature in phase portion.In addition, according to expectation, water level sensor (illustration omitted) is also set up.
Treated object is housed in treatment trough 2, and stores treatment fluid until impregnating the treated object.At this point it is possible to
The supply for the treatment of trough 2 is pre-adjusted as the treatment fluid of setting concentration, but in the present embodiment, supply water based on water supplying unit 9 with
Based on the inorganic agent of liquid-supply unit 10, the treatment fluid for setting concentration is mixed in treatment trough 2.
Treatment fluid be for by the contact with treated object to be passivated processing to treated object, in other words in quilt
The surface of processed material forms the liquid of relatively thin passivating film (oxide film thereon of corrosion resistance).In the present embodiment, it is formed in water
In be mixed into the aqueous solution for setting concentration (such as in the case where inorganic agent is citric acid be more than 1 weight %) of inorganic agent.Place
It can also be known nitric acid etc. to manage agent, but in the case where treated object is medical instrument, preferably by food additives
Form.As the inorganic agent being made of food additives, such as citric acid or ascorbic acid can be enumerated.Need what is illustrated
It is that in the present embodiment, inorganic agent (being citric acid for typical case) is normal concentration (concentration higher than the setting concentration)
Aqueous solution.
Water supplying unit 9 is the unit for supplying water into treatment trough 2.As the water, tap water, soft water or pure can be used
Water etc..In any case, the water route 11 from watering is connected with treatment trough 2, be equipped with and supply in the water route 11
Water valve 12.By the opening and closing of feed water valve 12, can control towards the water supply in treatment trough 2.Wherein, feed water valve 12 can also be substituted
Or on this basis, water supply pump is set in water route 11, stopped by the startup of the water supply pump, controlled towards treatment trough 2
Interior water supply.Alternatively, can also be according to circumstances different, adjust the aperture of feed water valve 12 or inverter control is carried out to water supply pump
System.
Liquid-supply unit 10 is the unit that inorganic agent is supplied into treatment trough 2.In the present embodiment, the hold-up tank 13 of inorganic agent
It is connected via for fluid path 14 with treatment trough 2, at this for being equipped with supplying valve 15 in fluid path 14.It will be handled when using decompressing unit 5
When opening supplying valve 15 in the state of providing is decompressed in groove 2, the inside and outside pressure difference for the treatment of trough 2 can be utilized, from hold-up tank 13
The inorganic agent of supply ormal weight in towards treatment trough 2.Wherein, supplying valve 15 or on this basis can also be substituted, in feed flow
Road 14 sets solution feed pump, using the solution feed pump, controls towards the feed flow in treatment trough 2.In any case, by adjusting base
Water supply in water supplying unit 9 and the liquid supply rate based on liquid-supply unit 10 so that the concentration of inorganic agent converges in treatment trough 2
Setting range.
Heating unit 3 is the unit heated to the storage liquid in treatment trough 2.The structure of heating unit 3 is not special
Limit, be made of in the present embodiment electric heater 16.Usually control is opened and closed in electric heater 16, but can also be according to circumstances
To control output.Wherein, heating unit 3 can also not be electric heater 16, such as is made of steam heater.Using steam
In the case of heater, control the presence or absence of steam supply towards steam heater or measure.
Agitating unit is the unit being stirred to the storage liquid in treatment trough 2.The structure of agitating unit does not limit especially
It is fixed, in the present embodiment for towards the air supply unit in liquid phase portion.In other words, in the present embodiment, liquid phase air supply unit 4 doubles as
Agitating unit.Using liquid phase air supply unit 4, the bottom out for the treatment of trough 2 imports gas into storage liquid, thus, it is possible to realize storage
The stirring of liquid storage.
Decompressing unit 5 is towards exterior attraction discharge and to the unit of decompression in treatment trough 2 by the gas in treatment trough 2.
Specifically, decompressing unit 5 possesses device for vacuum generation 17, and the device for vacuum generation 17 is via in exhaust line 18 and treatment trough 2
Gas phase portion connection.The concrete structure of device for vacuum generation 17 is not particularly limited, and possesses the vacuum pump of hydrolock for typical case,
Can also be in the heat exchanger for, being further equipped with making on the upstream side the steam in exhaust line 18 to condense than the vacuum pump.
Gas phase air supply unit 6 is that the gas phase portion into treatment trough 2 imports extraneous gas and makes the list pressed again in treatment trough 2
Member.Specifically, gas phase air supply unit 6 is configured in the gas phase towards in treatment trough 2 for being equipped with gas phase steam supply valve in gas circuit 19
20., can using the inside and outside pressure difference for the treatment of trough 2 when opening gas phase steam supply valve 20 in the state of being depressurized in treatment trough 2
Via gas phase extraneous gas is imported towards the gas phase portion in treatment trough 2 for gas circuit 19.It should be noted that it can also be supplied in gas phase
Filter is pre-set on road 19, the air after the filter is supplied towards treatment trough 2 is interior.
Liquid phase air supply unit 4 is that the liquid phase portion into treatment trough 2 imports extraneous gas and makes the list pressed again in treatment trough 2
Member.Specifically, liquid phase air supply unit 4 is configured in the liquid phase towards in treatment trough 2 for being equipped with liquid in gas circuit (illustration omitted)
Phase steam supply valve (illustration omitted).When opening liquid phase steam supply valve in the state of being depressurized in treatment trough 2, treatment trough 2 is utilized
Inside and outside pressure difference, can import extraneous gas for gas circuit via liquid phase towards the liquid phase portion in treatment trough.It should be noted that also may be used
, for pre-setting filter in gas circuit, the air after the filter to be supplied towards treatment trough 2 is interior in liquid phase.In addition, can
In the position as liquid phase portion and it is than treated object position on the lower (in other words, for typical case with treatment trough 2
For the bottom in treatment trough 2), pre-set air and spray component 21, the hole that component 21 is sprayed from the air sprays air.
Control unit be control in detection signal or elapsed time based on each sensor 7,8 etc. each unit 3~
6th, 9,10 controller (illustration omitted).Specifically, controller with feed water valve 12, supplying valve 15, electric heater 16, vacuum
Outside generation device 17, gas phase steam supply valve 20, the connection of liquid phase steam supply valve, also connect with pressure sensor 7 and the grade of temperature sensor 8
Connect.Then, controller is as described below like that according to the order (program) of regulation, realizes the blunt of treated object in treatment trough 2
Change is handled.
Hereinafter, the method for operation to the passivation device 1 of the present embodiment, an example of in other words deactivating process for the treatment of
Illustrate.
Before operation start, each unit 3~6,9,10 stops.Specifically, each valve 12,15,20, which is in, closes shape
State, electric heater 16 and device for vacuum generation 17 stop.In this condition, treated object is housed in treatment trough 2, will located
Manage the door gastight closing of groove 2.Then, when pressing defined operation start button by user, operation start.In other words,
Controller controls each unit, stores treatment fluid into treatment trough 2 and impregnates treated object, thus treated object is carried out blunt
Change is handled.It is preferred that be included in makes to make place using pressure unit 6,4 again after decompression in treatment trough 2 during this period using decompressing unit 5
The action pressed again in reason groove 2, is passivated treated object processing.Refer to aftermentioned, the decompression based on decompressing unit 5 can be not
The treatment fluid in treatment trough 2 is carried out in the range of seething with excitement, can also carry out until making the treatment fluid in treatment trough 2 seethe with excitement.Separately
Outside, the decompression in treatment trough 2 can also carry out repeatedly with multiple pressure.
In the present embodiment, for typical case, perform water supply action successively, feed flow action, heating action, main process task act,
Draining acts, and processing is passivated to treated object.
《Water supply acts》
In water supply action, using water supplying unit 9 towards water supply in treatment trough 2 extremely for the setting water level of treated object dipping.
When the water of storage desired amount in treatment trough 2, stop the water supply based on water supplying unit 9.In the water supply based on water supplying unit 9
In, gas phase steam supply valve 20 can also be opened in the state of decompressing unit 5 is stopped, but in the present embodiment, feed flow described as follows
As action possesses, decompressing unit 5 is worked in the state of gas phase steam supply valve 20 is closed, realize subtracting in treatment trough 2
Pressure.
《Feed flow acts》
In feed flow action, the work of the decompressing unit 5 continuing to be acted by water supply, first by decompression in treatment trough 2
To authorized pressure.Then, when becoming in treatment trough 2 below authorized pressure, supplying valve 15 is opened.Thus, in hold-up tank 13
Inorganic agent is supplied towards treatment trough 2 is interior.Then, after by the stipulated time, supplying valve 15 is closed.The quantity delivered of inorganic agent can
It is adjusted according to the pressure in treatment trough 2 by the time of open feed liquid valve 15.It should be noted that here, illustrate to handle
Agent is citric acid, but temperature conditionss described later or time conditions etc. can suitably be changed according to inorganic agent.
《Heating acts》
In heating action, the storage liquid in treatment trough 2 is heated to design temperature using heating unit 3.As heating
The design temperature of target temperature is set properly, and is usually set at less than more than 70 DEG C 100 DEG C of scope, is preferably set to 80
Less than 95 DEG C more than DEG C.
In heating action, can repeat decompression based on decompressing unit 5 with based on liquid phase air supply unit 4 towards liquid phase
The supply in portion, realizes the stirring of storage liquid.Specifically, can be in the range of the storage liquid in treatment trough 2 is seethed with excitement, profit
With decompressing unit 5 to decompression in treatment trough 2, afterwards, open liquid phase steam supply valve and import extraneous gas, stir process groove to liquid phase portion
Storage liquid in 2.Thereby, it is possible to realize the mixing of water and the inorganic agent based on liquid-supply unit 10 based on water supplying unit 9
Meanwhile no temperature unevenly heats the treatment fluid as the mixed liquor.It should be noted that towards the supply in treatment trough 2
In, decompressing unit 5 can stop, and can continue to work (following, to be same in addition to the situation of special instruction).Work as place
When storage liquid in reason groove 2 becomes design temperature, stop heating unit 3.These, it is preferred to acted in follow-up main process task
In also utilize heating unit 3, substantially (remove in the cooling based on decompression boiling) to maintain the storage liquid in treatment trough 2 and set
Constant temperature degree.
《Main process task acts》
In main process task action, in the state of the treatment fluid that treated object is impregnated in treatment trough 2, setting time is kept
(being more than 60 minutes for typical case), is passivated treated object processing.During this period, in the present embodiment, at least perform
Decompression once based on decompressing unit 5 and answering based on pressure unit 6,4 (gas phase air supply unit 6 or liquid phase air supply unit 4) again
Pressure.Acted as such pressure reduction/restoration, such as following either mode can be enumerated.These patterns can be moved only in main process task
The front half section (after particularly starting) of work carries out, and can also continuously or intermittently be carried out in main process task action.In addition,
Only carry out outside either mode, multiple patterns can also be carried out according to setting order.
It should be noted that in the case of carrying out pressure reduction/restoration action after only in the beginning of main process task action, main place
Reason action can be handled as follows：In the decompression of repeatedly setting number (once or repeatedly) based on decompressing unit 5 with being based on
Again press unit 6,4 multiple pressure after, in the state of decompressing unit 5 is stopped, with set point of temperature by treated object into treatment fluid
Impregnate the stipulated time.In this case, it is specified that the Fixed Initial Point of time can also be main process task action at the beginning of carve.
Under first mode (no-boil mode), using decompressing unit 5, do not make the storage liquid boiling in treatment trough 2
In the range of, it will be decompressed in treatment trough 2 after goal pressure (either object time) by gas phase air supply unit 6 or liquid phase
Air supply unit 4, will be depressed into atmospheric pressure again and is either set as the authorized pressure of insufficient atmospheric pressure (or during regulation in treatment trough 2
Between).By the decompression in treatment trough 2 and multiple pressure, treatment fluid can be flowed.Particularly, answered towards liquid phase portion supply
In the case of pressure, treatment fluid can be made significantly to flow.In addition, for example, even if treated object there are gap or hole etc., and at it
In remain air, also air can be excluded by expansion based on decompression, answering after can utilizing presses to gap or hole etc.
Import treatment fluid.In such manner, it is possible to treatment fluid is directed into the discreet portions of treated object and contacts them.Need what is illustrated
It is, can also be by the multiple pressure repeatedly setting number (or setting time) in the decompression in treatment trough 2 and treatment trough 2.
Under second mode (gas phase blowing model), boil treatment fluid decompression in treatment trough 2 using decompressing unit 5
After rising, multiple pressure is carried out to gas phase portion supply using gas phase air supply unit 6.It is particularly preferred that using decompressing unit 5 to processing
Depressurized in groove 2 and treatment fluid is seethed with excitement, in the boiling, the supply using gas phase air supply unit 6 initially towards gas phase portion.Separately
Outside, the decompression in treatment trough 2 and the supply towards gas phase portion can also be repeated.
For example, it can handle as described below.That is, (such as liquid temperature becomes as defined in meet untill termination condition
Untill target temperature) persistently carry out the exhaust in the slave treatment trough 2 based on decompressing unit and make what the pressure in treatment trough 2 reduced
During, moment in treatment trough 2 can also be made using gas phase air supply unit 6 in the boiling of the storage liquid based on the decompression repeatedly
The boiling for being temporarily depressed into storage liquid again stops.Afterwards, the storage liquid in treatment trough 2 can also be again heated to design temperature,
Repeat same processing.
In the case of being supplied in decompression boiling to gas phase portion, steam bubble wink for being produced in a liquid by boiling so far
Between condense, the pressure wave or pressure differential during by the condensation are stirred and transfer to treatment fluid, can make treatment fluid and quilt
Processed material reliably contacts.In addition, in the case of treated object is with hole, by the decompression boiling for the treatment of fluid, produced in hole
Raw steam is detained, but by the supply towards gas phase portion, such steam is detained momentary loss, can make treatment fluid with being located
Reason thing reliably contacts.
Under the third mode (liquid phase blowing model), boil treatment fluid decompression in treatment trough 2 using decompressing unit 5
After rising, multiple pressure is carried out to liquid phase portion supply using liquid phase air supply unit 4.It is particularly preferred that using decompressing unit 5 to processing
Depressurized in groove 2 and treatment fluid is seethed with excitement, in the boiling, the supply using liquid phase air supply unit 4 initially towards liquid phase portion.Separately
Outside, the decompression in treatment trough 2 and the supply towards liquid phase portion can also be repeated.
For example, it can handle as described below.That is, boil storage liquid decompression in treatment trough 2 using decompressing unit 5
Rise, in the boiling, in the state of persistently carrying out the exhaust out for the treatment of trough 2, treatment trough 2 is utilized by liquid phase air supply unit 4
Liquid phase portion of the inside and outside pressure difference into treatment trough 2 import extraneous gas.Then, can also be by the storage liquid in treatment trough 2 again
It is secondary to be heated to design temperature, repeat same processing.
In the case of being supplied in decompression boiling to liquid phase portion, the air bubble in the liquid phase portion importeding into boiling is as boiling
Core and enter boiling steam, thus The explosive expansion.Specifically, first, in the present embodiment, based on liquid phase air supply unit
4 supply towards liquid phase portion is carried out naturally by the inside and outside pressure difference for the treatment of trough 2, therefore the pressure for the bubble importeding into liquid
It is the pressure itself in treatment trough 2 before initial bubble reaches gas phase portion.Therefore, it imported into bubble in liquid under reduced pressure
Treatment trough 2 in expansion, and entered by the boiling steam of liquid further to expand, and rise in liquid phase portion.Then, should
Larger bubble rises in liquid phase portion, treatment fluid is fallen after by larger sprayed.Using this it is fulminant sprayed with it is tight
Falling for the spray is connect, makes the treatment fluid large-amplitude sloshing in treatment trough 2, treatment fluid can be made reliably to be contacted with treated object.
Each pattern more than use carries out main process task process.For example, boiled by the decompression of the treatment fluid based on decompressing unit 5
Rise and stop being repeated more than once and after predetermined setting number with the boiling of the treatment fluid based on multiple pressure unit 6,4, with regulation
Treated object is impregnated the stipulated time by temperature in treatment fluid, carries out main process task process.Then, in the situation using arbitrary patterns
Under, in main process task action, finally in the state of stopping decompressing unit 5 and closing liquid phase steam supply valve, open gas phase and supply
Air valve 20, makes to become the state for being depressed into atmospheric pressure again in treatment trough 2.
《Draining acts》
In draining action, by opening the row set on the draining road (illustration omitted) from the bottom for the treatment of trough 2
Water valve, from 2 internal drainage for the treatment of trough.After the draining out for the treatment of trough 2 is carried out, drain valve is closed, terminates a series of operating.Need
It is noted that by using decompressing unit 5 to decompression in treatment trough 2, it can also realize removing for treated object after draining
After liquid, stop decompressing unit 5 and will be depressed into atmospheric pressure again in treatment trough 2 using gas phase air supply unit 6.
In draining action, the treatment fluid in treatment trough 2 is discharged towards the outside, but the draining is preferably in and device
Draining is carried out after being neutralized in (illustration omitted).It can put into neutralizer to treatment fluid in treatment trough 2 to neutralize device
Structure or the structure for being mixed into neutralizer into draining in the drainage system from treatment trough 2.As described later,
In the case of the passivation device 1 that cleaning or the rinsing of treated object can be carried out before or after Passivation Treatment, as
Cleaning agent and possess alkaline cleaner sometimes, but can also by the alkaline cleaner be used as treatment fluid neutralizer.
By above-mentioned a series of Passivation Treatment process, treated object is passivated.It is, for example, to make in treated object
In the case of medical instrument (medical steel small articles) with martensitic stainless steel SUS420J2, the material is as stainless
Steel material is easier to get rusty, but by implementing above-mentioned Passivation Treatment, realizes the reinforcing of the passivation epithelium of anticorrosive environment.By
This, it is possible to increase corrosion resistance and long-time service.Thus, it is also possible to suppress the replacement purchase cost of medical instrument.
It can also implement the cleaning of treated object before the Passivation Treatment process being made of above-mentioned a series of action
Process or rinsing process.Alternatively, it is also possible to implement rinsing process of treated object etc. after Passivation Treatment process.In the situation
Under, the Passivation Treatment function of treated object is not only assigned to passivation device 1, also assigns cleaning function or rinsing function.Change
Yan Zhi, passivation device 1 can also be configured to the cleaning device with Passivation Treatment function.
In the case where assigning cleaning function to passivation device 1, as liquid-supply unit 10, the preferably storage in inorganic agent
Deposit beyond tank 13, also set up the hold-up tank 13 of cleaning agent (such as alkaline cleaner, the agent of enzyme matching purge).In this case, respectively
Hold-up tank 13 is connected via for fluid path 14 with treatment trough 2 respectively, and supplying valve 15 is set for fluid path 14 each.
Also, it is identical with the situation of the Passivation Treatment in order to clean treated object, for typical case, confession is performed successively
Hydrodynamic(al) work, feed flow action, heating action, main process task action, draining action, clean treated object.Wherein, in feed flow action,
Alternate process agent and supply cleaning agent, the storage cleaning solution in the treatment trough 2.Then, as long as after the cleaning solution is heated, to place
Manage pressure reduction/restoration etc. in groove 2 and clean after treated object, discharge cleaning solution.Each action and the situation phase of Passivation Treatment
Together, and the description is omitted.
It should be noted that in cleaning process, feed flow action can also be omitted.In other words, can also be without input
Cleaning agent and clean treated object merely with the water of water supplying unit 9.It is then preferred that afterwards, putting into cleaning agent, utilize
Cleaning solution cleans treated object.
In the case where assigning rinsing function to passivation device 1, as liquid-supply unit 10, the preferably storage in inorganic agent
Deposit the hold-up tank 13 that purificant (such as lubricating and antirust agent) is additionally provided with beyond tank 13.In this case, each hold-up tank 13 passes through respectively
By being connected for fluid path 14 with treatment trough 2, supplying valve 15 is equipped with for fluid path 14 each.
Also, it is identical with the situation of the Passivation Treatment in order to rinse treated object, for typical case, confession is performed successively
Hydrodynamic(al) work, feed flow action, heating action, main process task action, draining action, rinse treated object.Wherein, in feed flow action,
Alternate process agent and supply purificant, the storage rinsing liquid in the treatment trough 2.Then, as long as after the rinsing liquid is heated, to place
Pressure reduction/restoration etc. in reason groove 2 and after rinsing treated object, discharge rinsing liquid.Each action and the situation phase of Passivation Treatment
Together, and the description is omitted.
It should be noted that in the rinsing process, feed flow action can also be omitted.In other words, can also be without input
Purificant and rinse treated object merely with the water of water supplying unit 9.It is then preferred that putting into purificant afterwards, drift is utilized
Washing lotion rinses treated object.For example, in the rinsing process carried out after Passivation Treatment process, first merely with water supplying unit 9
Water rinsed, afterwards, finishing processing is carried out using lubricating and antirust agent as purificant.
However, the deactivating process for the treatment of of the present invention is not limited to the situation using above-mentioned passivation device 1, in the feelings
It can also implement beyond condition.In any case, impregnate and located in the storage treatment fluid into treatment trough 2 as described above
In the state of managing thing, comprising the action to being pressed again after decompression in treatment trough 2, processing is passivated to treated object.It is special
It is not that may be embodied in decompression in treatment trough 2 and after making treatment fluid boiling, the action to being pressed again in treatment trough 2, to being located
Reason thing is passivated processing.
As an example, after the treatment fluid in by treatment trough 2 is heated to design temperature, in treatment trough 2
Depressurize and treatment fluid is seethed with excitement, in the boiling, initially towards the dynamic of the gas phase portion in treatment trough 2 or the supply in liquid phase portion
Make, processing is passivated to treated object.At this time, it is generally desirable to, the treatment fluid in by treatment trough 2 is heated to design temperature
During, the decompression in treatment trough 2 and the supply towards the liquid phase portion in treatment trough 2, mixing treating liquid is repeated.Then,
It can be included in after the treatment fluid in treatment trough 2 is heated to design temperature, boil treatment fluid decompression in treatment trough 2
Rise, in the boiling, initially towards the action of the supply in the gas phase portion in treatment trough 2, processing is passivated to treated object.Need
It is noted that can also be in the decompression boiling of the treatment fluid in the treatment trough 2 of repeatedly setting number and based in treatment trough 2
After the boiling for the treatment fluid pressed again stops, treated object is impregnated by the stipulated time in treatment fluid with set point of temperature.
Also, also it can perform cleaning process or rinsing process before Passivation Treatment, as described.Alternatively, also can
Enough after Passivation Treatment, as described, cleaning process or rinsing process are performed.In any case, in cleaning process
In, the storage cleaning solution in treatment trough 2, into the cleaning solution, dipping treated object is cleaned.In addition, in the rinsing process,
The storage rinsing liquid in treatment trough 2, is rinsed to rinsing liquid dipping treated object.
The passivation device and method of the present invention is not limited to the embodiment, can suitably change.Particularly, if
Passivation device 1 possesses：Treatment trough 2, it is stored treatment fluid and impregnates treated object；Decompressing unit 5, it attracts to arrange towards the outside
Go out the gas in the treatment trough 2 and depressurized to treatment trough 2 is interior；Unit 6,4 is pressed again, it imports gas towards the treatment trough 2 after decompression is interior
Body and to being pressed again in treatment trough 2；And control unit, it controls described each unit, included in utilization decompressing unit 5 to treatment trough
The action pressed again in 6,4 pairs for the treatment of troughs 2 of unit after decompression using pressing again in 2, is passivated treated object processing, then other
Structure and control can suitably change.In addition, similarly, if deactivating process for the treatment of storage treatment fluid in treatment trough 2
And be impregnated with the state of treated object, comprising the action to carrying out multiple pressure after decompression in treatment trough 2, treated object is carried out
Passivation Treatment, then other contents be not particularly limited.
For example, in the described embodiment, passivation device 1 possesses water supplying unit 9 and liquid-supply unit 10, feed flow list is utilized
Member 10 is mixed into inorganic agent in the water based on water supplying unit 9 and forms treatment fluid, but tune in advance can be also supplied into treatment trough 2
The treatment fluid of system.
Alternatively, it is also possible to not utilize liquid-supply unit 10 to put into inorganic agent, but inorganic agent is put into treatment trough 2 manually.
In other words, can also be before operation start, when housing treated object in treatment trough 2, by solid (such as tablet shape)
Or the inorganic agent (such as citric acid) of powdered grade is put into treatment trough 2.
In addition, in the described embodiment, as the multiple pressure unit in the treatment trough 2 under decompression, equipped with gas phase air supply unit 6
With both liquid phase air supply units 4, but either of which side can also be only set.
In addition, in the described embodiment, gas phase air supply unit 6 and liquid phase air supply unit 4 are configured to be utilized respectively processing
The inside and outside pressure difference of groove 2 can also utilize pump or air blower etc. towards 2 internal pressure for the treatment of trough towards supply in treatment trough 2, but according to circumstances
Enter air.Also, air is not limited to towards the fluid of feeding in treatment trough 2 for the multiple pressure in treatment trough 2, such as can also be made
The non-active gas as nitrogen.
In addition, in the described embodiment, in Passivation Treatment process, water supply action, feed flow action are performed successively, heats and moves
Work, main process task action, draining action, but main process task action is at least carried out, such as heating action can be saved according to circumstances
Slightly.In addition, in Passivation Treatment process, treatment fluid is remained into design temperature, but the design temperature can also be changed halfway.And
And, naturally it is also possible in the mutual change design temperature of cleaning process, rinsing process, Passivation Treatment process etc..
In addition, for the cleaning process or rinsing process of the progress before and after Passivation Treatment process, in the described embodiment,
Treated object is cleaned to pressure reduction/restoration in treatment trough 2, but according to circumstances, ultrasonic cleaning or cleaning showers can also be carried out.
In the case where carrying out ultrasonic cleaning, ultrasonic oscillator is pre-set in treatment trough 2, makes to surpass in the cleaning of treated object etc.
Acoustic wave transducer works.In addition, in the case where carrying out cleaning showers, pre-set on the top for the treatment of trough 2 or side etc.
Spray spout (in this case, treated object is not impregnated in liquid), then sprays cleaning solution etc. i.e. towards treated object
Can.It should be noted that according to circumstances, in Passivation Treatment process, the pressure reduction/restoration described in the embodiment can also be substituted
Act or on this basis, ultrasonic oscillator is worked, or treatment fluid is sprayed from spray spout towards treated object.
Claims (7)
1. a kind of passivation device, it is passivated treated object processing, it is characterised in that
The passivation device possesses：
Treatment trough, it is stored treatment fluid and impregnates treated object；
Decompressing unit, it attracts to discharge towards the outside the gas in the treatment trough and to being depressurized in the treatment trough；
Unit is pressed again, it towards importing gas in the treatment trough after decompression and to pressing again in the treatment trough；And
Control unit, it controls each unit, included in sharp afterwards to decompression in the treatment trough using the decompressing unit
Action of the unit to being pressed again in the treatment trough is pressed again with described, and processing is passivated to treated object.
2. passivation device according to claim 1, it is characterised in that
It is single using the multiple pressure after treatment fluid boiling is made to being depressurized in the treatment trough using the decompressing unit
Action of the member to being pressed again in the treatment trough, is passivated treated object processing.
3. passivation device according to claim 1 or 2, it is characterised in that
The passivation device possesses the heating unit heated to the treatment fluid in the treatment trough,
Press unit again as described, possess gas phase portion into the treatment trough import extraneous gas gas phase air supply unit, with
And the liquid phase portion into the treatment trough imports the one side or both sides in the liquid phase air supply unit of extraneous gas,
After treatment fluid in by the treatment trough is heated to design temperature, using the decompressing unit to the processing
Depressurized in groove and treatment fluid is seethed with excitement, in the boiling, started based on the gas phase air supply unit or liquid phase supply is single
The action of the supply of member, is passivated treated object processing.
4. passivation device according to claim 3, it is characterised in that
The passivation device possesses the both sides of the gas phase air supply unit and the liquid phase air supply unit,
During treatment fluid in by the treatment trough is heated to design temperature, it is repeated based on the decompressing unit
Decompression and the supply towards liquid phase portion based on the liquid phase air supply unit, stir the treatment fluid,
After treatment fluid in by the treatment trough is heated to design temperature, using the decompressing unit to the processing
Depressurized in groove and treatment fluid is seethed with excitement, in the boiling, start based on the supply towards gas phase portion of the gas phase air supply unit
Action, processing is passivated to treated object.
5. passivation device according to claim 1 or 2, it is characterised in that
Decompression boiling in the treatment fluid based on the decompressing unit of repeatedly setting number and the place based on the unit of pressure again
After the boiling stopping for managing liquid, treated object is impregnated by the stipulated time in treatment fluid with set point of temperature.
6. passivation device according to claim 1 or 2, it is characterised in that
The treated object is medical instrument,
The treatment fluid is to be mixed into the aqueous solution that the inorganic agent being made of food additives forms in water.
A kind of 7. deactivating process for the treatment of, it is characterised in that
It is multiple after to decompression in the treatment trough in the state for the treatment of fluid is stored in treatment trough and impregnates treated object
The action of pressure, is passivated treated object processing.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-200362 | 2016-10-11 | ||
| JP2016200362A JP6803040B2 (en) | 2016-10-11 | 2016-10-11 | Passivation processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107916417A true CN107916417A (en) | 2018-04-17 |
Family
ID=61898737
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710753735.5A Pending CN107916417A (en) | 2016-10-11 | 2017-08-28 | Passivation device and method |
| CN201721087312.6U Expired - Fee Related CN207259596U (en) | 2016-10-11 | 2017-08-28 | Passivation device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721087312.6U Expired - Fee Related CN207259596U (en) | 2016-10-11 | 2017-08-28 | Passivation device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6803040B2 (en) |
| KR (1) | KR20180040074A (en) |
| CN (2) | CN107916417A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111519178A (en) * | 2020-05-06 | 2020-08-11 | 中国科学院微电子研究所 | Workpiece pretreatment equipment and pretreatment method thereof |
| CN117512585A (en) * | 2023-12-04 | 2024-02-06 | 江苏南理范群装备科技有限公司 | Cladding passivation equipment |
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| DE102007022033A1 (en) * | 2007-05-08 | 2008-11-13 | W.C. Heraeus Gmbh | Passivation of small diameter stainless steel tubes, e.g. hypotubes comprises arranging them upright in holder, flooding them with electrolyte, applying suction, draining electrolyte, flooding with water and draining |
| CN101988179A (en) * | 2010-10-27 | 2011-03-23 | 中国石油化工股份有限公司 | Gas-phase passivation system for petrochemical device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167566A (en) * | 1985-01-21 | 1986-07-29 | Fujitsu Ltd | Manufacture of ink jet head |
| MXPA02006761A (en) * | 2000-02-28 | 2003-10-14 | Conmed Corp | Electrosurgical blade with direct adhesion of silicon coating. |
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2016
- 2016-10-11 JP JP2016200362A patent/JP6803040B2/en active Active
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2017
- 2017-08-28 CN CN201710753735.5A patent/CN107916417A/en active Pending
- 2017-08-28 CN CN201721087312.6U patent/CN207259596U/en not_active Expired - Fee Related
- 2017-09-07 KR KR1020170114453A patent/KR20180040074A/en unknown
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007022033A1 (en) * | 2007-05-08 | 2008-11-13 | W.C. Heraeus Gmbh | Passivation of small diameter stainless steel tubes, e.g. hypotubes comprises arranging them upright in holder, flooding them with electrolyte, applying suction, draining electrolyte, flooding with water and draining |
| CN102333600A (en) * | 2009-03-10 | 2012-01-25 | 三浦工业株式会社 | Cleaning equipment and cleaning method |
| JP2011183324A (en) * | 2010-03-10 | 2011-09-22 | Miura Co Ltd | Washing apparatus |
| CN101988179A (en) * | 2010-10-27 | 2011-03-23 | 中国石油化工股份有限公司 | Gas-phase passivation system for petrochemical device |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6803040B2 (en) | 2020-12-23 |
| KR20180040074A (en) | 2018-04-19 |
| CN207259596U (en) | 2018-04-20 |
| JP2018062679A (en) | 2018-04-19 |
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