CN107907103A - A kind of surface acoustic wave double-shaft tilt angle sensing structure - Google Patents
A kind of surface acoustic wave double-shaft tilt angle sensing structure Download PDFInfo
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- CN107907103A CN107907103A CN201711346349.0A CN201711346349A CN107907103A CN 107907103 A CN107907103 A CN 107907103A CN 201711346349 A CN201711346349 A CN 201711346349A CN 107907103 A CN107907103 A CN 107907103A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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Abstract
A kind of surface acoustic wave double-shaft tilt angle sensing structure, belongs to micro electronmechanical field of sensing technologies.Multiple SAW resonator groups are made at the silicon single crystal substrate back side, the input/output electrode pair of each SAW resonator of face is made in silicon single crystal substrate front, each input/output electrode makes the clamped bridged electrode of both-end above array, angle of inclination according to substrate, one of output electrode in array is contacted with corresponding input/output electrode respectively, or the gap-contact between corresponding input/output electrode pair, connection or not corresponding SAW resonator and output signal electrode, output or the resonance signal without output respective resonant frequency, it can obtain the double-shaft tilt angle of the flat state and horizontality residing for the surface acoustic wave double-shaft tilt angle sensing structure substrate.
Description
Technical field
The invention belongs to micro electronmechanical field of sensing technologies, is related to a kind of sensor construction, more particularly to one kind is based on sound table
The double-shaft tilt angle sensing structure and method of surface wave resonator.
Background technology
Inclination angle measurement mainly measurement measurand relative to its horizontal level gradient, double-shaft tilt angle sensing device or
Apparatus measures are sensed the gradient of with respect to the horizontal plane orthogonal two axial directions of plane where object, for sensed pair
As the monitoring and control of posture, tiny inclination angle is measured in precision instrument leveling, aerospace and ship's navigation gesture stability, satellite
The various fields such as communication and radar equipment orientation suffer from extremely being widely applied.
Obliquity sensor in current art, has based on Newton's law gravity principle, as patent 2008100377.X is borrowed
Electrolyte is helped, when changing at the inclination angle of tested plane, electrolyte makes electrolyte because the effect of gravity keeps horizontality
Electrical parameter（Resistance）Change, detect the change of pitch angle of testee accordingly.Shortcoming is that measurement range is small, sensitivity
Low, size sensor is larger.
Have based on optical principle, as patent 200780000628.X receives and sense light source incidence to arrive using photodetector
The reflected light of measurand, the output electric signal of optical detector change with reflected light relative to the angular displacement of incident light,
The change at detection object inclination angle accordingly, and patent 201110188720.1 is according to the centre wavelength of two Fiber Bragg Grating FBGs
Change and the size and Orientation at the correspondence detection measurand inclination angle at inclination angle.Shortcoming is that optical sensing system composition is more multiple
Miscellaneous, measurement accuracy is difficult to meet measurement request when measurement range is big.
Change of MEMS (MEMS) sensor to physical quantity has very high sensitivity, is also applied to object
In the measurement at inclination angle, the component size such as using mems accelerometer measurement acceleration of gravity on two axis of accelerometer, really
Twin shaft gravity accelerometer is fixed on by the angle of inclination of plane, 201610068956 .4 of patent where determining accelerometer
Tilted cylindrical envelope side to be measured, by moving to obtain its inclination maximum with x-axis, y-axis along inclination column side face to be measured, calculates twin shaft
Deviation angle when gravity accelerometer measuring table mutually agrees with tilted cylindrical envelope, obtains inclining for tilted cylindrical envelope to be measured and z-axis
Angle, and 103528567 A combination gravity principles of patent CN, using two micropressure sensors set in symmetric position to liquid
The non-equilibrium state of body is detected, and realizes the detection at inclination angle.Shortcoming is that sensing output signal is mostly analog quantity, is not easy to profit
Further Signal acquiring and processing is carried out with digital display circuit.
The content of the invention
In order to overcome deficiency of the prior art, the present invention provides a kind of based on including SAW resonator and micro electronmechanical
The surface acoustic wave double-shaft tilt angle sensing structure of the double-shaft tilt angle sensing of system two-end fixed beam.
The present invention includes substrate, in four SAW resonator groups of substrate back setting, is respectively overlay in four sound tables
Four piezoelectric membrane areas in surface wave resonator group, set four input/output electrode groups, four both-ends clamped in substrate front
Bridged electrode, four input signal electrodes, four output signal electrodes, several grounding electrodes, set break-through base on substrate
Four input/output metal throuth hole groups of piece and some grounded metal through holes；
Four SAW resonator groups are respectively first, second, third, fourth SAW resonator group, and described
First, the second SAW resonator group is relatively arranged on the front and rear part of the substrate, and the described 3rd, falling tone surface resonator
Group is relatively arranged on the left and right portion of the substrate；Described first, it is parallel that the 3rd SAW resonator group includes N number of transverse direction respectively
The SAW resonator of arrangement, described second, falling tone surface resonator group include N-1 transverse direction parallel arranged respectively
SAW resonator；The N is odd number；
Four input/output electrode groups are respectively first, second, third, fourth input/output electrode group, described first,
Second, third, the 4th input/output electrode group be respectively arranged at substrate front side and the first, second, third, fourth sound table
Surface wave resonator group correspond set, the first, second, third, fourth input/output electrode group respectively include with it is corresponding
SAW resonator group in the equal number of input/output electrode pair of SAW resonator, each input/output electrode
To being respectively equipped with input electrode, output electrode；
Four input signal electrodes are respectively first, second, third, fourth input signal electrode；Four output signal electrodes point
Wei not first, second, third, fourth output signal electrode；The first, second, third, fourth input/output electrode group
Each input electrode is collected to first, second, third, fourth input signal electrode respectively；
Four clamped bridged electrodes of both-end are respectively the clamped bridged electrode of first, second, third, fourth both-end, and described
First, second, third, the clamped bridged electrode both ends of the 4th both-end be fixed on respectively by hold-down support on substrate, each input/
The output electrode of output electrode pair respectively as the clamped bridged electrode of each both-end hearth electrode, described first, second, third,
One of hold-down support at the clamped bridged electrode both ends of four both-ends respectively with first, second, third, fourth output signal electrode
It is connected；Each clamped bridged electrode of the both-end is across each input/output electrode above array respectively, and the both-end is clamped outstanding
Hang electrode to naturally droop, depending on the angle of inclination of the position foundation substrate of its sag point；
The input/output metal throuth hole group is separately positioned in each input/output electrode group, each input/output gold
Belong to sets of vias to include with the input/output electrode in corresponding input/output electrode group to equal number of input/output metal
Through hole pair, input/output metal throuth hole to including an input metal aperture, an output metal aperture, the input metal respectively
The corresponding input electrode in one end connection substrate front of through hole, the corresponding SAW resonator of other end connection substrate back
Input signal bus electrode, the corresponding output electrode in one end connection substrate front of the output metal throuth hole, other end connection
The output signal bus electrode of the corresponding SAW resonator of substrate back；
The grounding electrode is divided at two, and the grounding electrode distinguishes the short of each SAW resonator both ends of face substrate back
Road bus electrode, each positive corresponding grounding electrode of grounded metal through hole one end connection substrate, other end connection substrate
The short-circuit bus electrode of the corresponding SAW resonator in the back side.
The present invention makes multiple SAW resonator groups in substrate back, forms respectively along longitudinal anteroposterior direction and transverse direction
Two groups of SAW resonator arrays that left and right directions is set, it is humorous to make each surface acoustic wave of face substrate back in substrate front
Shake the input/output electrode pair of device, form respectively along two groups of input/output electrode of longitudinal anteroposterior direction and horizontal left and right directions
Array, the positive each input/output electrode of substrate is to the corresponding each SAW resonator of face substrate back successively, respectively
A input/output electrode made above array across the clamped bridged electrode of both-end, the clamped bridged electrode of both-end naturally droops,
Depending on the position of its sag point is according to the angle of inclination of substrate, respectively with its across input/output electrode group in one it is defeated
Go out electrode contact, either with its across input/output electrode group in an output electrode gap-contact connection or do not connect
Lead to corresponding SAW resonator and output signal electrode, output or the resonance signal for not exporting respective resonant frequency, root
According to the assemblage characteristic of the resonant frequency value of the resonance signal of four output signal electrode output, the resonance according to export resonance signal
Position in affiliated SAW resonator group of frequency values, the corresponding SAW resonator of the resonant frequency, that is, corresponding double
The position and surface acoustic wave double-shaft tilt angle sensing structure substrate for holding the output electrode that the sag point of clamped bridged electrode contacted exist
The relation between angle of inclination in both direction, you can obtain putting down where the surface acoustic wave double-shaft tilt angle sensing structure substrate
Face and the double-shaft tilt angle of horizontal plane.
The double-shaft tilt angle of plane with respect to the horizontal plane where the present invention can sense sensed object in real time, online, sensing
Digital frequency values subject to amount, easily digitlization, easy to further being gathered, handled to measurement result using digital display circuit and
Transmission, and the surface acoustic wave double-shaft tilt angle sensing structure made based on silicon single crystal substrate, are easy to implement and peripheral signal processing electricity
The on piece on road integrates, is small, is light-weight.
Gap is equipped between each SAW resonator of the present invention, gap is the width of a SAW resonator；Institute
It is the width of an input/output electrode pair, each input/output to state the gap between each input/output electrode pair
Electrode pair be of same size and with the equivalent width of the SAW resonator of substrate back, easy to it is each input metal throuth hole pair
It is accurate and connect corresponding input electrode and input signal bus electrode and each metal throuth hole that exports is aligned and connects corresponding
Output electrode and output signal bus electrode.
Each input/output electrode in the second input/output electrode group is to the electricity of the first input/output of face successively
The gap of each input/output electrode pair in the group of pole, each input/output electricity in the 4th input/output electrode group
Extremely to the gap of each input/output electrode pair in the 3rd input/output electrode group of face successively；Then draw when because substrate tilts
The vertical point of the clamped bridged electrode of both-end is played when being moved in corresponding input/output electrode group, if first（Or the 3rd）Both-end is consolidated
The vertical point of branch bridged electrode falls the gap location in an input/output electrode pair, and corresponding second（Or the 4th）Both-end is consolidated
The vertical point of branch bridged electrode fall just with the output electrode in the gap face a input/output electrode pair, it is on the contrary
As the same, the vertical point that each clamped bridged electrode of both-end so can be achieved is contacted with the seamless of each input/output electrode pair, is ensured
The continuity of whole sensing process.
The resonant frequency of each SAW resonator of the present invention is from left to right according to first SAW resonator
First SAW resonator of group, first SAW resonator, described of the second SAW resonator group
Second SAW resonator of the first SAW resonator group, second sound of the second SAW resonator group
The N-1 SAW resonator of surface resonator ... the first SAW resonator group, the rising tone surface
The N-1 SAW resonator of wave resonator group, the n-th SAW resonator of the first SAW resonator group
It is sequentially incremented by successively or successively decrease successively；
The resonant frequency of each SAW resonator is from front to back according to first of the 3rd SAW resonator group
SAW resonator, first SAW resonator of the falling tone surface resonator group, the 3rd sound surface
Second SAW resonator of wave resonator group, second surface acoustic wave resonance of the falling tone surface resonator group
The N-1 SAW resonator of device ... the 3rd SAW resonator group, the falling tone surface resonator group
The N-1 SAW resonator, the order of n-th SAW resonator of the 3rd SAW resonator group passs successively
Increase or successively decrease successively.
SAW resonator of the present invention includes interdigital transducer and is located at two of interdigital transducer both sides respectively
Short-circuiting reflection battle array, the interdigital transducer include two groups of interdigital electrodes staggered in opposite directions and its input signal confluence at both ends
Electrode and output signal bus electrode, the short-circuiting reflection battle array include two short circuit confluences that one group of short circuit refers to electrode and its both ends
Electrode, each SAW resonator are of same size, and the width of the SAW resonator is SAW resonator
The sum of width of the aperture of interdigital electrode and its both ends input signal bus electrode and output signal bus electrode or sound surface
The short circuit of wave resonator refers to the sum of width of the two short-circuit bus electrodes in aperture and its both ends of electrode.Due to the different resonance
The aperture that the interdigital electrode of the SAW resonator of frequency or short circuit refer to electrode is different, the input signal confluence at its both ends
The width of electrode and output signal bus electrode or two short-circuit bus electrodes is accordingly arranged to make each SAW resonator
Be of same size.
The material of substrate of the present invention is monocrystalline silicon or quartz, and the material in the piezoelectric membrane area is zinc oxide, or
Person's aluminium nitride, the interdigital electrode of the interdigital transducer, input signal bus electrode, output signal bus electrode, short-circuiting reflection
The short-circuiting electrode of battle array, short-circuit bus electrode, input electrode, output electrode, input signal electrode, output signal electrode, ground connection electricity
Pole and metal throuth hole inner wall are golden either copper or aluminum or aluminium copper matter membrane structure, and the both-end is clamped outstanding
Electrode is hung as soft golden bulk structure, its clamped pedestal is golden or copper bulk structure.
Brief description of the drawings
Fig. 1 is the substrate back structure diagram of the present invention；
Fig. 2 is the substrate positive structure schematic of the present invention；
Fig. 3 is the clamped bridged electrode area partial structural diagram of both-end of the present invention；
Fig. 4 be the present invention substrate back SAW resonator structure and its with substrate front input/output electrode to, input
Signal electrode, grounding electrode and input/output metal throuth hole are to the position relationship schematic diagram between, grounded metal through hole.
Embodiment
As shown in Figure 1,2,3, 4, this surface acoustic wave double-shaft tilt angle sensing structure, including substrate 1, are produced on 1 back side of substrate
Four SAW resonator groups 2-1,2-2,2-3,2-4 be respectively overlay in four in four SAW resonator groups pressures
Conductive film area 3, it is clamped outstanding to be produced on 1 positive four input/output electrode group 4-1,4-2 of substrate, 4-3,4-4, four both-ends
Hang electrode 8-1,8-2,8-3,8-4, four input signal electrodes 51,52,53,54, four output signal electrodes 61,62,63,
64th, several grounding electrodes 7, if making on the substrate 1 and four input/output metal throuth hole groups of break-through substrate 1 and stem grafting
Ground metal throuth hole 10；
In four SAW resonator groups 2-1,2-2,2-3,2-4, the first SAW resonator group 2-1 and rising tone surface
Wave resonator group 2-2 is set before and after 1 back side of substrate, and the first SAW resonator group 2-1 of front side is parallel comprising N number of transverse direction
The SAW resonator 21 of arrangement, the second SAW resonator group 2-2 of rear side include the sound table of N-1 transverse direction parallel arrangeds
Surface wave resonator 21, the gap between each SAW resonator 21 are 21 width of SAW resonator, the rising tone
Each SAW resonator 21 in surface resonator group 2-2 is each in face the first SAW resonator group 2-1 successively
Gap between a SAW resonator 21, the N are odd number；
In four SAW resonator groups 2-1,2-2,2-3,2-4, the 3rd SAW resonator group 2-3 and falling tone surface
Wave resonator group 2-4 is set at 1 back side of substrate or so, and the 3rd SAW resonator group 2-3 in left side is parallel comprising N number of longitudinal direction
The SAW resonator 21 of arrangement, the falling tone surface resonator group 2-4 on right side include the sound table of N-1 longitudinal directions parallel arranged
Surface wave resonator 21, the gap between each SAW resonator 21 are 21 width of SAW resonator, the falling tone
Each SAW resonator 21 in surface resonator group 2-4 is each in the 3rd SAW resonator group 2-3 of face successively
Gap between a SAW resonator 21, the N are odd number；
First SAW resonator group 2-1 and each SAW resonator in the second SAW resonator group 2-2
Resonant frequency is different, and the resonant frequency of each SAW resonator from left to right presses the first SAW resonator group 2-
First SAW resonator in 1, first SAW resonator in the second SAW resonator group 2-2,
Second SAW resonator in one SAW resonator group 2-1 ..., in the first SAW resonator group 2-1
N-1 SAW resonators, the N-1 SAW resonators in the second SAW resonator group 2-2, the first sound surface
The order of n-th SAW resonator in wave resonator group 2-1 is incremented by successively or successively decreases successively, and the N is odd number；
Each surface acoustic wave resonance in the 3rd SAW resonator group 2-3 and falling tone surface resonator group 2-4
The resonant frequency of device is different, and the resonant frequency of each SAW resonator presses the 3rd SAW resonator from front to back
First SAW resonator in group 2-3, first surface acoustic wave resonance in falling tone surface resonator group 2-4
Device, second SAW resonator in the 3rd SAW resonator group 2-3 ..., the 3rd SAW resonator group 2-3
In N-1 SAW resonators, the N-1 SAW resonators in falling tone surface resonator group 2-4, the 3rd sound
The order of n-th SAW resonator in surface resonator group 2-3 is incremented by successively or successively decreases successively, and the N is strange
Number；
SAW resonator 21 includes interdigital transducer 22 and is located at two short-circuiting reflection battle arrays of interdigital transducer both sides respectively
23, interdigital transducer 22 includes the input signal bus electrode 222 at two groups of interdigital electrodes 221 staggered in opposite directions and its both ends
With output signal bus electrode 223, short-circuiting reflection battle array 23 includes two short circuit confluences that one group of short circuit refers to electrode 231 and its both ends
Electrode 232, each SAW resonator are of same size, and the width of SAW resonator is the fork of SAW resonator
Refer to aperture and its both ends input signal bus electrode 222 of electrode 221 and export the sum of width of signal bus electrode 223 or
The short circuit of SAW resonator refers to the sum of width of the two short-circuit bus electrodes 232 in aperture and its both ends of electrode 231, described
The aperture that the interdigital electrode 221 of the SAW resonator of different resonant frequencies or short circuit refer to electrode 231 is different, its both ends
Input signal bus electrode 222 and the width of output signal bus electrode 223 or two short-circuit bus electrodes 232 be correspondingly arranged
To make being of same size for each SAW resonator；
In four input/output electrode groups 4-1,4-2,4-3,4-4, the inputs of the first input/output electrode group 4-1 and second/defeated
Go out electrode group 4-2 in the front and rear setting in the front of substrate 1 and the first SAW resonator group 2-1 at 1 back side of face substrate and second
SAW resonator group 2-2, the 3rd input/output electrode group 2-3 and the 4th input/output electrode 2-4 are left in the front of substrate 1
Right setting and the 3rd SAW resonator group 2-3 and falling tone surface resonator group 2-4 at 1 back side of face substrate, it is described
Each input/output electrode group includes identical with 21 number of SAW resonator in corresponding SAW resonator group
Input/output electrode to 41, each input/output electrode to 41 face each SAW resonators 21 accordingly successively,
Each input/output electrode is an input/output electrode to 41 width, each input/defeated to the gap between 41
Go out electrode pair 41 be of same size and with the equivalent width of the SAW resonator 21 at 1 back side of substrate, it is described second input/it is defeated
Go out each input/output electrode in electrode group 4-2 to each defeated in 41 successively face the first input/output electrode group 4-1
Enter/output electrode to 41 gap, each input/output electrode in the 4th input/output electrode group 4-4 to 41 successively
Each input/output electrode in the 3rd input/output electrode group 4-3 of face to 41 gap；
Input/output electrode includes an input electrode 411 and an output electrode 412 to 41, and each input electrode 411 is distinguished
The input signal bus electrode 222 of the corresponding each SAW resonator in 1 back side of face substrate, each output electrode 412 are divided
The output signal bus electrode 223 of the corresponding each SAW resonator 21 in other 1 back side of face substrate, the first input/output
Electrode group 4-1, the second input/output electrode group 4-2, the 3rd input/output electrode group 4-3 and the 4th input/output electrode group
It is defeated that each input electrode 411 in 4-4 is collected to the first input signal electrode 51, the second input signal electrode the 52, the 3rd respectively
Enter 53 and the 4th input signal electrode 54 of signal electrode, it is each defeated in each input/output electrode group 8-1,8-2,8-3,8-4
Go out electrode 412 while the hearth electrode as the clamped bridged electrode of corresponding both-end；
Each both-end clamped bridged electrode 8-1,8-2,8-3,8-4 are separately fixed on the clamped pedestal 81 at its both ends, wherein the
The clamped bridged electrode 8-1 of one both-end, the clamped bridged electrode 8-2 of the second both-end, clamped bridged electrode 8-3 and the 4th pair of the 3rd both-end
Hold clamped bridged electrode 8-4 respectively across the first input/output electrode group 4-1 as its hearth electrode, the second input/output electricity
Each output electrode 412 in pole group 4-2, the 3rd input/output electrode group 4-3 and the 4th input/output electrode group 4-4, the
The clamped bridged electrode 8-1 of one both-end, the clamped bridged electrode 8-2 of the second both-end, clamped bridged electrode 8-3 and the 4th pair of the 3rd both-end
Hold one in two clamped pedestals 81 of clamped bridged electrode 8-4 to export with the first output signal electrode 61, second respectively to believe
Number electrode 62, the 3rd output signal electrode 63 are connected with the 4th output signal electrode 64；
Each input/output metal throuth hole group 9 is produced in corresponding input/output electrode group, each input/output gold
Belong to sets of vias 9 to include with the input/output electrode in corresponding input/output electrode group to equal number of input/output gold
Belonging to through hole to 91, input/output metal throuth hole includes an input metal throuth hole 911 and an output metal throuth hole 912 to 91,
The corresponding input electrode 411 in 1 front of one end connection substrate of the input metal throuth hole 911,1 back side pair of other end connection substrate
The input signal bus electrode 222 of the interdigital transducer 22 for the SAW resonator 21 answered, exports one end of metal throuth hole 912
Connect the corresponding output electrode 412 in the front of substrate 1, the fork of the corresponding SAW resonator 21 in 1 back side of other end connection substrate
The output signal bus electrode 223 of finger transducer 22；
The short-circuit bus electrode 232 of each SAW resonator short-circuiting reflection battle array 23 at 7 face substrate of grounding electrode, 1 back side,
Each grounded metal through hole 10, the corresponding grounding electrode 7 in 1 front of its one end connection substrate, 1 back side of other end connection substrate corresponds to
SAW resonator short-circuiting reflection battle array 23 short-circuit bus electrode 232.
Above-mentioned SAW resonator is single-ended to resonance structure, or both-end is to resonance structure；
The material of substrate is monocrystalline silicon, or quartz, and the material in the piezoelectric membrane area 3 is zinc oxide, or aluminium nitride, described
Interdigital electrode 221, input signal bus electrode 222, output signal bus electrode 223, the short-circuiting reflection battle array of interdigital transducer 22
23 short-circuiting electrode 231, short-circuit bus electrode 232, input electrode 411, output electrode 412, input signal electrode 51, output letter
Number electrode 62, grounding electrode 7 and metal throuth hole inner wall are golden either copper or aluminum or aluminium copper matter film knot
Structure, the clamped bridged electrode of both-end are soft golden bulk structure, its clamped pedestal is golden or copper bulk structure.
The operation principle of this surface acoustic wave double-shaft tilt angle sensing structure is as follows：
Substrate 1 and the surface acoustic wave double-shaft tilt angle sensing structure made thereon form surface acoustic wave double-shaft tilt angle sensor chip；
The first input signal electrode 51, the second input signal electrode 52, the 3rd input signal electrode 53 and the 4th on chip is defeated
Enter signal electrode 54 and form four input ports with corresponding grounding electrode 7 respectively, the first output signal electrode 61 on chip,
Second output signal electrode 62, the 3rd output signal electrode 63 and the 4th output signal electrode 64 respectively with corresponding grounding electrode
7 four output ports of composition, each group input port and the external Network Analyzer of output port or frequency recorder, it is each for detecting
The resonance signal and its frequency of SAW resonator output；
If plane where surface acoustic wave double-shaft tilt angle sensor chip is horizontal, under each clamped bridged electrode nature of both-end
Hang down, its sag point is bridged electrode midpoint, and the first both-end clamped bridged electrode 8-1 and the clamped bridged electrode 8-3 of the 3rd both-end
Sag point just respectively with below as the first input/output electrode group 4-1 of its hearth electrode and the 3rd input/output electricity
Output electrode 412 placed in the middle is in contact in the group 4-3 of pole, corresponding SAW resonator 21 is connected with output signal electrode 62
Logical, the output phase answers the resonance signal of resonant frequency value, and the clamped bridged electrode 8-2 of the second both-end and the clamped suspension of the 4th both-end are electric
The sag point of pole 8-4 just respectively with the second input/output electrode group 4-2 and the 4th input/output electrode group 4-4 below
In output electrode gap placed in the middle be in contact, corresponding SAW resonator 21 and output signal electrode 62 are not connected, without humorous
Shake signal output；
If plane where surface acoustic wave double-shaft tilt angle sensor chip is tilted to the left or is tilted to the right, the clamped suspension electricity of the first both-end
The sag point of pole 8-1 and the clamped bridged electrode 8-2 of the second both-end are moved to left or moved to right, corresponding to the inclined angle of substrate：Or the
The sag point of the clamped bridged electrode 8-1 of one both-end just with the first input/output electrode group 4-1 as its hearth electrode below
In a center-left or center-right output electrode 412 be in contact, make corresponding SAW resonator 21 with it is defeated
Go out signal electrode 62 to connect, the output phase answers the resonance signal of resonant frequency value, and the clamped bridged electrode 8-2's of the second both-end is sagging
Put an output electrode gap in the second input/output electrode group 4-2 of output electrode 412 above-mentioned with face below just
It is in contact, does not connect corresponding SAW resonator 21 and output signal electrode 62, resonance free signal output, or second pair
Hold the sag point of clamped bridged electrode 8-2 just with below as in the second input/output electrode group 4-2 of its hearth electrode
A center-left or center-right output electrode 412 is in contact, and corresponding SAW resonator 21 is believed with output
Number electrode 62 connects, and the output phase answers the resonance signal of resonant frequency value, and the sag point of the clamped bridged electrode 8-1 of the first both-end is proper
An output electrode gap in first input/output electrode group 4-1 of good output electrode 412 above-mentioned with face below connects
Touch, do not connect corresponding SAW resonator 21 and output signal electrode 62, resonance free signal output, while the 3rd both-end is consolidated
The sag point of branch bridged electrode 8-3 keep with below as in the 3rd input/output electrode group 4-3 of its hearth electrode between two parties
Output electrode 412 is in contact, and corresponding SAW resonator 21 is connected with output signal electrode 62, and the output phase answers resonance frequency
The resonance signal of rate value, the sag point of the clamped bridged electrode 8-4 of the 4th both-end are kept and the 4th input/output electrode below
Output electrode gap placed in the middle is in contact in group 4-4, does not connect corresponding SAW resonator 21 and output signal electrode 62,
Resonance free signal output；
If surface acoustic wave double-shaft tilt angle sensor chip plane is turned forward or tilted backwards, the clamped bridged electrode 8- of the 3rd both-end
3 and the 4th the clamped bridged electrode 8-4 of both-end sag point reach or it is rear move, corresponding to the inclined angle of substrate：Or the 3rd pair
Hold the sag point of clamped bridged electrode 8-3 just with the 3rd input/output electrode group 4-3 below as each of its hearth electrode
Centre in a output electrode 412 is to the front or a middle output electrode 412 to the rear is in contact, and makes corresponding surface acoustic wave
Resonator 21 is connected with output signal electrode 63, and the output phase answers the resonance signal of resonant frequency value, and the 4th clamped suspension of both-end
The sag point of electrode 8-4 is just defeated with one in the 4th input/output electrode group 4-4 of the above-mentioned output electrode of face below
Go out electrode gap to be in contact, do not connect corresponding SAW resonator 21 and output signal electrode 64, resonance free signal output,
Or the 4th the clamped bridged electrode 8-4 of both-end sag point just with below as its hearth electrode the 4th input/output electricity
Centre in the group 4-4 of pole in each output electrode 412 is to the front or a middle output electrode 412 to the rear is in contact, and makes pair
The SAW resonator 21 answered is connected with output signal electrode 64, and the output phase answers the resonance signal of resonant frequency value, and the 3rd
3rd input/output electrode of the sag point of the clamped bridged electrode 8-3 of both-end output electrode 412 above-mentioned with face below just
An output electrode gap in group 4-3 is in contact, and does not connect corresponding SAW resonator 21 and output signal electrode 63,
Resonance free signal output, while the sag point of the clamped bridged electrode 8-1 of the first both-end is kept and below as its hearth electrode
Output electrode 412 placed in the middle is in contact in first input/output electrode group 4-1, make corresponding SAW resonator 21 with it is defeated
Go out signal electrode 61 to connect, the output phase answers the resonance signal of resonant frequency value, the sag point of the clamped bridged electrode 8-2 of the second both-end
Holding is in contact with output electrode gap placed in the middle in the second input/output electrode group 4-2 below, does not connect corresponding sound
Surface resonator 21 and output signal electrode 62, resonance free signal output；
I.e. when plane where surface acoustic wave double-shaft tilt angle sensor chip is horizontal, the first output signal electrode 61 and the 3rd
Output signal electrode 63 exports SAW resonator 21 placed in the middle in exactly corresponding SAW resonator group respectively
The resonance signal of resonant frequency value, and the second output signal electrode 62 and the 4th output signal electrode 64 not export resonance signal；
That is, when plane "Left"-deviationist where surface acoustic wave double-shaft tilt angle sensor chip or Right deviation, 61 He of the first output signal electrode
Sound surface to the left or to the right in the corresponding SAW resonator group of one of output of second output signal electrode 62
The resonance signal of the resonant frequency value of wave resonator 21, another not export resonance signal, and the 3rd output signal electrode 63 is defeated
Go out the resonance signal of the resonant frequency value of SAW resonator 21 placed in the middle in exactly corresponding SAW resonator group,
4th output signal electrode 64 not export resonance signal；
That is, the plane where the surface acoustic wave double-shaft tilt angle sensor chip leans forward or during hypsokinesis, 63 He of the 3rd output signal electrode
Sound surface to the front or to the rear in the corresponding SAW resonator group of one of output of 4th output signal electrode 64
The resonance signal of the resonant frequency value of wave resonator 21, another not export resonance signal, and the first output signal electrode 61 is defeated
Go out the resonance signal of the resonant frequency value of SAW resonator 21 placed in the middle in exactly corresponding SAW resonator group,
Second output signal electrode 62 not export resonance signal；
Accordingly, while the resonant frequency value of the resonance signal of four output signal electrodes output is measured, analyzes exported four
The assemblage characteristic of the resonant frequency value of resonance signal, and resonant frequency value according to above-mentioned export resonance signal, the resonant frequency
Position, that is, corresponding both-end clamped bridged electrode of the corresponding SAW resonator in affiliated SAW resonator group
The position for the output electrode that sag point is contacted is with surface acoustic wave double-shaft tilt angle sensing structure substrate in orthogonal two axis
Relation between upward angle of inclination, you can plane where obtaining the surface acoustic wave double-shaft tilt angle sensing structure substrate is opposite
In the double-shaft tilt angle of horizontal plane.
In application, the input port and input signal that can also be made up of input signal electrode with corresponding grounding electrode
The external feedback amplifier of output port and phase-shift network that electrode is formed with corresponding grounding electrode form high-frequency oscillating circuits,
High-frequency oscillating circuits produces its frequency high-frequency oscillation signal consistent with corresponding SAW resonator resonant frequency, uses network
Analyzer or frequency recorder detect this high-frequency oscillation signal and its frequency, substitute and directly detect export resonance signal and its frequency,
To improve detection sensitivity and operability.
The typical case of surface acoustic wave double-shaft tilt angle sensing structure realizes step, specific as follows：
（1）Silicon single crystal substrate spin coating positive photoresist, exposure imaging remove the photoresist glued membrane at silicon hole place to be made；
（2）Etching forms silicon hole；
（3）Magnetron sputtering, silicon hole inner wall aluminium coating tin-copper alloy film；
（4）Remove photoresist；
（5）Silicon single crystal substrate twin polishing；
（6）Silicon single crystal substrate bottom surface spin coating positive photoresist, exposure imaging, removal include interdigital electrode, input signal confluence electricity
Where pole, output signal bus electrode, short-circuit 4 SAW resonator group metal structures for referring to electrode, short-circuit bus electrode
The photoresist glued membrane at place；
（7）Magnetron sputtering aluminium coating tin-copper alloy film；
（8）Remove photoresist, together with covering aluminium copper film thereon is removed, obtain including interdigital electrode, input signal bus electrode, defeated
Go out signal bus electrode, short circuit refers to electrode, 4 SAW resonator group metal structures of short-circuit bus electrode；
（9）Clean silicon single crystal substrate；
（10）Magnetron sputtering, covers zinc-oxide film in the SAW resonator group metal structure of substrate bottom surface 4；
（11）Spin coating positive photoresist on zinc-oxide film, photoetching remove the photoresist glued membrane of non-piezoelectric thin film region part；
（12）Wet etching removes the zinc-oxide film of non-piezoelectric thin film region part；
（13）Remove photoresist；
（14）Above-mentioned substrate front spin coating positive photoresist, exposure imaging remove 4 groups of input/output electrode groups to be made, 4 it is defeated
Enter the photoresist glued membrane at signal electrode, 4 output signal electrodes and grounding electrode place；
（15）Magnetron sputtering aluminium coating tin-copper alloy film；
（16）Remove photoresist, together with the aluminium copper film of covering thereon is removed, obtain 4 groups of input/output electrode groups, 4 input signals
Electrode, 4 output signal electrodes and grounding electrode；
（17）Said structure layer surface spin coating positive photoresist, exposure imaging 4 clamped bridged electrode both ends of both-end of removal are consolidated
Photoresist glued membrane at where fixed electrode；
（18）Magnetron sputtering covers golden film；
（19）Remove photoresist, together with the golden film of covering thereon is removed, obtain the kind of the fixation electrode at the clamped bridged electrode both ends of 4 both-ends
Sublayer；
（20）Said structure layer surface spin coating positive photoresist, photoetching remove the fixed electricity at the clamped bridged electrode both ends of 4 both-ends
Photoresist glued membrane above the Seed Layer of pole；
（21）Plating thick golden film；
（22）Remove photoresist, obtain the fixation electrode at the clamped bridged electrode both ends of 4 both-ends；
（23）Said structure layer surface spin coating positive photoresist, photoetching removes sacrifices under 4 clamped bridged electrodes of both-end to be made
Photoresist glued membrane at where layer；
（24）Magnetron sputtering covers silica thick film；
（25）Remove photoresist, together with the silicon dioxide film of covering thereon is removed, it is sacrificial to obtain silica under 4 clamped bridged electrodes of both-end
Domestic animal layer；
（26）Said structure layer surface spin coating positive photoresist, photoetching remove two fixed electricity of 4 clamped bridged electrodes of both-end
Photoresist glued membrane above pole, silicon dioxide sacrificial layer；
（27）Magnetron sputtering covers golden film；
（28）Remove photoresist, together with the golden film of covering thereon is removed, obtain the Seed Layer of 4 clamped bridged electrodes of both-end；
（29）Said structure layer surface spin coating positive photoresist, photoetching are removed above the Seed Layer of 4 clamped bridged electrodes of both-end
Photoresist glued membrane；
（30）Electroplate soft thick gold membrane；
（31）Remove photoresist；
（32）Silicon dioxide sacrificial layer under 4 clamped bridged electrodes of both-end is removed, discharges 4 clamped bridged electrodes of both-end, so that
The making of surface acoustic wave double-shaft tilt angle sensing structure is completed, and obtains surface acoustic wave double-shaft tilt angle sensor chip.
It is a kind of use above-mentioned surface acoustic wave double-shaft tilt angle sensor chip realize double-shaft tilt angle sensing specific implementation step for：
（1）Calibration chip horizontality
The resonant frequency for the resonance signal that measurement is exported by first, second, third, fourth output signal electrode respectively, and according to
Measured value by chip make it is appropriate lean forward or hypsokinesis, or left-leaning or Right deviation adjustment exports the first output signal electrode and the 3rd
The resonant frequency of the resonance signal of signal electrode output is respectively the first SAW resonator group and the 3rd surface acoustic wave just
The resonant frequency of the SAW resonator placed in the middle of resonator group, and the second output signal electrode and the 4th output signal electrode
Resonance free signal output, at this time, plane where chip are in horizontality；
（2）Edit the relation at chip inclination angle and export resonance signal resonant frequency
1. make chip from horizontality（0°）Start to be tilted to the left, record the first output signal electrode or the second output signal
The resonant frequency value of the resonance signal of electrode output and corresponding inclination value, until output is maximum（It is or minimum）Resonant frequency value
Resonance signal untill；
2. make chip from horizontality（0°）Start to be tilted to the right, record the first output signal electrode or the second output signal
The resonant frequency value of the resonance signal of electrode output and corresponding inclination value, until output is minimum（It is or maximum）Resonant frequency value
Resonance signal untill；
3. make chip from horizontality（0°）Start to turn forward, record the 3rd output signal electrode or the 4th output signal
The resonant frequency value of the resonance signal of electrode output and corresponding inclination value, until output is maximum（It is or minimum）Resonant frequency value
Resonance signal untill；
4. make chip from horizontality（0°）Start to tilt backwards, record the 3rd output signal electrode or the 4th output signal
The resonant frequency value of the resonance signal of electrode output and corresponding inclination value, until output is minimum（It is or maximum）Resonant frequency value
Resonance signal untill；
5. by the inclination value of some groups of orthogonal two axial directions of measure above and the resonance of corresponding export resonance signal
Frequency values are made inclination angle and edit table；
6. either above-mentioned some groups of measured values are fitted to obtain and edit function to inclination angle or inclination angle edits curve.
（3）Measure the double-shaft tilt angle of chip
For any state of chip, measurement is believed by the resonance of first, second, third, fourth output signal electrode output respectively
Number resonant frequency, edit table with reference to chip inclination angle and either edit function or edit curve, plane where determining chip is opposite
In the double-shaft tilt angle of horizontal plane, i.e.,：
The resonant frequency value of the resonance signal exported according to the first output signal electrode or the second output signal electrode, determines core
Plane where piece leans forward or the inclination value of hypsokinesis, the resonant frequency value of the resonance signal of the 3rd output signal electrode output at this time
The exactly resonant frequency of the SAW resonator placed in the middle of the 3rd SAW resonator group, and the 4th output signal electrode
Resonance free signal output；
The resonant frequency value of the resonance signal either exported according to the 3rd output signal electrode or the 4th output signal electrode, really
The inclination value of plane "Left"-deviationist or Right deviation where determining chip, the resonance frequency of the resonance signal of the first output signal electrode output at this time
Rate value is exactly the resonant frequency of the SAW resonator placed in the middle of the first SAW resonator group, and second exports signal
Electrode resonance free signal output；
Either according to the first output signal electrode or the second output signal electrode and the 3rd output signal electrode or the 4th
The resonant frequency of the resonance signal of output signal electrode output, while determine the double-shaft tilt angle of chip place plane.
Those skilled in the art scholar will be understood that, can although having been described for specific embodiment here for the ease of explaining
Various changes are made without departing from the spirit and scope of the invention.Therefore, except as by the appended claims, it is impossible to use
In the limitation present invention.
Claims (7)
1. a kind of surface acoustic wave double-shaft tilt angle sensing structure, it is characterised in that including substrate, four sound tables are set in substrate back
Surface wave resonator group, four piezoelectric membrane areas being respectively overlay in four SAW resonator groups, are set in substrate front
If four input/output electrode groups, the clamped bridged electrode of four both-ends, four input signal electrodes, four output signal electrodes,
Dry grounding electrode, sets four input/output metal throuth hole groups of break-through substrate and some grounded metal through holes on substrate；
Four SAW resonator groups are respectively first, second, third, fourth SAW resonator group, and described
First, the second SAW resonator group is relatively arranged on the front and rear part of the substrate, and the described 3rd, falling tone surface resonator
Group is relatively arranged on the left and right portion of the substrate；Described first, it is parallel that the 3rd SAW resonator group includes N number of transverse direction respectively
The SAW resonator of arrangement, described second, falling tone surface resonator group include N-1 transverse direction parallel arranged respectively
SAW resonator；The N is odd number；
Four input/output electrode groups are respectively first, second, third, fourth input/output electrode group, described first,
Second, third, the 4th input/output electrode group be respectively arranged at substrate front side and the first, second, third, fourth sound table
Surface wave resonator group correspond set, the first, second, third, fourth input/output electrode group respectively include with it is corresponding
SAW resonator group in the equal number of input/output electrode pair of SAW resonator, each input/output electrode
To being respectively equipped with input electrode, output electrode；
Four input signal electrodes are respectively first, second, third, fourth input signal electrode；Four output signal electrodes point
Wei not first, second, third, fourth output signal electrode；The first, second, third, fourth input/output electrode group
Each input electrode is collected to first, second, third, fourth input signal electrode respectively；
Four clamped bridged electrodes of both-end are respectively the clamped bridged electrode of first, second, third, fourth both-end, and described
First, second, third, the clamped bridged electrode both ends of the 4th both-end be fixed on respectively by hold-down support on substrate, each input/
The output electrode of output electrode pair respectively as the clamped bridged electrode of each both-end hearth electrode, described first, second, third,
One of hold-down support at the clamped bridged electrode both ends of four both-ends respectively with first, second, third, fourth output signal electrode
It is connected；Each clamped bridged electrode of the both-end is across each input/output electrode above array respectively, and the both-end is clamped outstanding
Hang electrode to naturally droop, depending on the angle of inclination of the position foundation substrate of its sag point；
The input/output metal throuth hole group is separately positioned in each input/output electrode group, each input/output gold
Belong to sets of vias to include with the input/output electrode in corresponding input/output electrode group to equal number of input/output metal
Through hole pair, input/output metal throuth hole to including an input metal aperture, an output metal aperture, the input metal respectively
The corresponding input electrode in one end connection substrate front of through hole, the corresponding SAW resonator of other end connection substrate back
Input signal bus electrode, the corresponding output electrode in one end connection substrate front of the output metal throuth hole, other end connection
The output signal bus electrode of the corresponding SAW resonator of substrate back；
The grounding electrode is divided at two, and the grounding electrode distinguishes the short of each SAW resonator both ends of face substrate back
Road bus electrode, each positive corresponding grounding electrode of grounded metal through hole one end connection substrate, other end connection substrate
The short-circuit bus electrode of the corresponding SAW resonator in the back side.
2. a kind of surface acoustic wave double-shaft tilt angle sensing structure according to claim 1, it is characterised in that each surface acoustic wave is humorous
Shake and gap be equipped between device, gap for a SAW resonator width；Between each input/output electrode pair
Gap for input/output electrode pair width, each input/output electrode pair be of same size and and substrate back
SAW resonator equivalent width.
A kind of 3. surface acoustic wave double-shaft tilt angle sensing structure according to claim 1, it is characterised in that second input/
Each input/output electrode in output electrode group is to each input/output in the first input/output electrode of face group successively
The gap of electrode pair, each input/output electrode in the 4th input/output electrode group to the input of face the 3rd successively/
The gap of each input/output electrode pair in output electrode group.
A kind of 4. surface acoustic wave double-shaft tilt angle sensing structure according to claim 1, it is characterised in that each surface acoustic wave
The resonant frequency of resonator is from left to right according to first SAW resonator of the first SAW resonator group, institute
State the second SAW resonator group first SAW resonator, second of the first SAW resonator group
Second SAW resonator ... the first sound surface of SAW resonator, the second SAW resonator group
The N-1 SAW resonator of wave resonator group, the N-1 surface acoustic wave of the second SAW resonator group are humorous
Shake device, the first SAW resonator group n-th SAW resonator order it is incremented by successively or successively decrease successively.
A kind of 5. surface acoustic wave double-shaft tilt angle sensing structure according to claim 1, it is characterised in that each surface acoustic wave
The resonant frequency of resonator is from front to back according to first SAW resonator of the 3rd SAW resonator group, institute
State falling tone surface resonator group first SAW resonator, second of the 3rd SAW resonator group
Second SAW resonator ... the 3rd sound surface of SAW resonator, the falling tone surface resonator group
The N-1 SAW resonator, the N-1 surface acoustic wave of the falling tone surface resonator group of wave resonator group are humorous
Shake device, the 3rd SAW resonator group n-th SAW resonator order it is incremented by successively or successively decrease successively.
A kind of 6. surface acoustic wave double-shaft tilt angle sensing structure according to claim 1, it is characterised in that the surface acoustic wave
Resonator includes interdigital transducer and is located at two short-circuiting reflection battle arrays of interdigital transducer both sides, the interdigital transducer respectively
Input signal bus electrode and output signal bus electrode including two groups of interdigital electrodes staggered in opposite directions and its both ends, institute
State short-circuiting reflection battle array and refer to electrode and its two short-circuit bus electrodes at both ends including one group of short circuit, each SAW resonator
It is of same size, the width of the SAW resonator inputs for the aperture of the interdigital electrode of SAW resonator with its both ends
The short circuit of the sum of width of signal bus electrode and output signal bus electrode or SAW resonator refers to the aperture of electrode
The sum of with the width of the short-circuit bus electrode in two, its both ends, the interdigital electrode of the SAW resonator of the difference resonant frequencies
Or short circuit refer to electrode aperture it is different, the input signal bus electrode at its both ends and output signal bus electrode or two short
The width of road bus electrode is correspondingly arranged to make being of same size for each SAW resonator.
7. a kind of surface acoustic wave double-shaft tilt angle sensing structure according to claim 1 or 5, it is characterised in that the piezoelectricity is thin
The material in film area is zinc oxide, or aluminium nitride, the interdigital electrode of the interdigital transducer, input signal bus electrode, output
Signal bus electrode, the short-circuiting electrode of short-circuiting reflection battle array, short-circuit bus electrode, input electrode, output electrode, input signal electricity
Pole, output signal electrode, grounding electrode and metal throuth hole inner wall are golden either copper or aluminum or aluminium copper matter
Membrane structure, the clamped bridged electrode of both-end are soft golden bulk structure, its clamped pedestal is golden or copper bulk structure.
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| CN110360995A (en) * | 2019-07-30 | 2019-10-22 | 扬州大学 | A kind of resonator type sound surface wave twin shaft gyro |
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