CN107886205A - pressure drop recovery system - Google Patents
pressure drop recovery system Download PDFInfo
- Publication number
- CN107886205A CN107886205A CN201610863733.7A CN201610863733A CN107886205A CN 107886205 A CN107886205 A CN 107886205A CN 201610863733 A CN201610863733 A CN 201610863733A CN 107886205 A CN107886205 A CN 107886205A
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- equipment
- product
- pressure drop
- module
- risk class
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q10/063—Operations research, analysis or management
- G06Q10/0635—Risk analysis of enterprise or organisation activities
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q50/00—Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
- G06Q50/06—Electricity, gas or water supply
Abstract
Present invention is disclosed a kind of pressure drop recovery system.The pressure drop recovery system includes：Equipment restoration schedule module, there is provided equipment recovers priority；Risk analysis module, the risk class of impacted product is assessed, there is provided real-time risk class；Product treatment module, according to it is described in real time risk class impacted product is handled, and with the risk analysis module real-time, interactive, to update the real-time risk class；And whether health degree monitoring module, the equipment after monitoring recovers are normal.The pressure drop recovery system of the present invention can efficiently realize that the plant produced after power failure is recovered.
Description
Technical field
The present invention relates to technical field of semiconductors, more particularly to a kind of pressure drop recovery system.
Background technology
Factory's power failure (Fab Power Glitch issue) is due to go wrong during outer net circuit transmission,
The phenomenon of pressure drop occurs for electric power in caused fab.When power failure produces, equipment can be had an impact, cause equipment alarm,
The production process of wafer is influenceed, serious meeting causes equipment to be delayed machine (down), triggers wafer loss (scrap).Fab is extensive in electric power
After answering normally, board can be answered a pager's call, and be tested related data (monitor), and the risk of product is assessed,
Carry out follow-up deployment.These are generally all artificially to assess, and are mostly based on the manually operated of experience, so both take, and not
These problems of the processing that can more optimize.
The content of the invention
It is an object of the invention to provide a kind of pressure drop recovery system, efficiently to realize the plant produced after power failure
Recover.
In order to solve the above technical problems, the present invention provides a kind of pressure drop recovery system, including：
Equipment restoration schedule module, there is provided equipment recovers priority；
Risk analysis module, the risk class of impacted product is assessed, there is provided real-time risk class；
Product treatment module, according to it is described in real time risk class impacted product is handled, and with the risk
Analysis module real-time, interactive, to update the real-time risk class；And
Whether health degree monitoring module, the equipment after monitoring recovers are normal.
Optionally, one is connected respectively in product system for described pressure drop recovery system, the equipment restoration schedule module
System, a manufacturing execution system and a historical information database, it is described to be provided in product system to the equipment restoration schedule module
In product information, the manufacturing execution system to the equipment restoration schedule module provide equipment whether single machine information, it is described to go through
History information database provides device history abnormal information, the equipment restoration schedule module knot to the equipment restoration schedule module
Close described whether single machine information and device history abnormal information determine that the equipment recovers priority in product information, equipment.
Optionally, for described pressure drop recovery system, the equipment recovers priority=based in the original excellent of product
First level+priority the knots modification based on manufacturing execution system and historical information database.
Optionally, for described pressure drop recovery system, if equipment is unit, the priority knots modification be -2~-
1；If equipment history of existence is abnormal, the priority knots modification is 1~2.
Optionally, it is evaluated as described pressure drop recovery system, the risk class to impacted product：It is logical
Initial risks grade and a Dynamic gene are crossed to obtain the risk class of impacted product, the Dynamic gene is to the initial wind
Dangerous grade is adjusted.
Optionally, a failure mode and effect point are connected for described pressure drop recovery system, the risk analysis module
Analysis system and a manufacturing execution system, to obtain initial risks grade.
Optionally, the first risk class and the second risk are included for described pressure drop recovery system, the risk class
Grade, the product treatment module is scrapped by the impacted product of the first risk class or testing reliability, to second
The impacted product of risk class carries out defects detection, probe in detecting and permitted to receive detection, and first risk class is higher than second
Risk class.
Optionally, striven for described pressure drop recovery system, the one reliability data storehouse of product treatment module connection, one
The reliability data measured is transferred to institute by view estimating and examining system system and an Engineering system, the product treatment module
Reliability data storehouse is stated, and obtains the first data after the reliability data storehouse processing；The product treatment module will measure
The defects of data, probe data and permitting receive data be all transferred to the dispute estimating and examining system system, Engineering system and
Manufacturing execution system, and after obtaining the dispute estimating and examining system system, Engineering system and manufacturing execution system processing
The second data.
Optionally, for described pressure drop recovery system, the second data after the first data and processing after the processing
The Dynamic gene is updated, and is transferred to the failure mode and effect analysis system.
Optionally, for described pressure drop recovery system, the health degree monitoring module includes one statistic processes control of connection
Whether the statistical Process Control part of system processed and equipment compatible portion, the equipment after regular monitoring recovers are normal.
Pressure drop recovery system provided by the invention, there is following advantage：
1) the equipment restoration schedule module of optimization is provided, avoids conventional method from considering WIP situation merely so that equipment is extensive
It is multiple efficient in order；
2) risk analysis module and product treatment module real-time, interactive, so as to being run into combination product processing procedure
The problem of, rational adjustment is timely made, improves the efficiency to product treatment；
3) health degree monitoring module can persistently monitor after equipment recovery, find the latent abnormal feelings after pressure drop in time
Condition, realize overall monitor；
4) the pressure drop recovery system is connected to each existing management system, realizes automatic output information needed, reduces people
The desirability of work operation, saves manpower and materials, improves efficiency.
Brief description of the drawings
Fig. 1 is the schematic diagram of pressure drop recovery system in the present invention；
Fig. 2 is the schematic diagram of the equipment restoration schedule module of pressure drop recovery system in the present invention；
Fig. 3 is the graph of a relation between the risk analysis module and product treatment module of pressure drop recovery system in the present invention；
Fig. 4 is the schematic diagram of the health degree monitoring module of pressure drop recovery system in the present invention.
Embodiment
The pressure drop recovery system of the present invention is described in more detail below in conjunction with schematic diagram, which show this hair
Bright preferred embodiment, it should be appreciated that those skilled in the art can change invention described herein, and still realize this hair
Bright advantageous effects.Therefore, description below is appreciated that for the widely known of those skilled in the art, and is not intended as
Limitation of the present invention.
More specifically description is of the invention by way of example referring to the drawings in the following passage.Will according to following explanation and right
Book is sought, advantages and features of the invention will become apparent from.It should be noted that accompanying drawing is using very simplified form and using non-
Accurately ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Inventor has found in long-term production work, at present after power failure occurs, is substantially carried out to the extensive of equipment
It is multiple, the assessment to product riskses, and the processing to impacted product (impact lot), these operations are all manual operations,
And be relatively fixed, do not take into account that many factors and adjust in real time, substantially without harmony, after this causes power failure
Recover inefficient.
Then, inventor proposes a kind of pressure drop recovery system, as shown in figure 1, including：
Equipment restoration schedule module, there is provided equipment recovers priority；
Risk analysis module, the risk class of impacted product is assessed；
Product treatment module, according to it is described in real time risk class impacted product is handled, and with the risk
Analysis module real-time, interactive, to update the real-time risk class；And
Whether health degree monitoring module, the equipment after monitoring recovers are normal.
Below incorporated by reference to Fig. 2-Fig. 4, the pressure drop recovery system of the present invention is described in detail.Wherein, Fig. 2 is the present invention
The schematic diagram of the equipment restoration schedule module of middle pressure drop recovery system；Fig. 3 is the risk analysis of pressure drop recovery system in the present invention
Graph of a relation between module and product treatment module；Fig. 4 is that the health degree monitoring module of pressure drop recovery system in the present invention shows
It is intended to.
It is understood that equipment is recovered to be the primary action after power recovery, there is diversified set in the factory
It is standby, such as including main engine bed (Fab tool), factory service board (FAC tool), measurement platform (Metrology tool), detection
Board (QRE tool) etc., and consider limited personnel, it is necessary to the recovery priority (priority) to these equipment is made
Correct instruction.The equipment restoration schedule module obtains relevant information by connecting related system, exports each department
(module) priority of corresponding board, so as to provide most rational priority for the personnel of answering a pager's call.
As shown in Fig. 2 the equipment restoration schedule module is connected to a WIP (Working In Process, in product)
System, a MES system (Manufacturing Execution System, manufacturing execution system) and a history information data
Storehouse, the WIP systems provide to the equipment restoration schedule module to be recovered in product information, the MES system to the equipment
Scheduler module provide equipment whether single machine information, the historical information database to the equipment restoration schedule module provide equipment
History abnormal information, WIP information that the equipment restoration schedule module provides with reference to the WIP systems, the MES system provide
Equipment whether the device history abnormal information decision device that unit and the historical information database provide recovers priority.Example
Such as, it is contemplated that the anomalies such as defect (defect) is higher easily occur after power-off is answered a pager's call in some equipment, should to the kind equipment
The reduction priority, avoid, due to excessive test (monitor) and processing aberrant batches product, causing more long delay.
Therefore, the equipment restoration schedule module can recover priority by following standard to provide equipment：It is described to set
It is standby to recover priority=original priority based on WIP+priority knots modification based on MES system and historical information database.
Specifically, if equipment is unit, 1-2 priority is improved, if that is, described priority knots modification sets for -2~-1
Standby history of existence is abnormal, then reduces 1-2 priority, i.e., described priority knots modification is 1~2.Certainly, if for being both list
Machine, it is the abnormal situation of history of existence again, then needs to combine real needs to judge, in order to avoid cause unnecessary loss.
After the equipment restoration schedule module makes equipment recovery priority, notice is arrived into corresponding department, at this
In inventive embodiments, the automatic notification mode of mail can be selected, auxiliary telephone communicative mode, is striven under instruction in the very first time
Reach, to enable relevant departments fast and effectively to complete equipment recovery operation.
, it is necessary to carry out risk assessment to impacted product after power recovery, for the product of different risk class, have not
Same processing method.Definition for risk class at present is all set in advance, however, the risk class of impacted product is also
It can be influenceed by situation at that time, and it also requires in view of that whether can have incubation period, i.e., whether not found in preceding working procedure
It is abnormal, but trigger exception in later process.Based on this, the risk analysis module in the present invention will be according to historical data
And the operational data (batch data) of similar-type products makes corresponding adjustment to risk class, realize that real-time update adjusts
Risk class.
Specifically, the risk class to impacted product be evaluated as by initial risks grade and one adjustment because
Son obtains the risk class of impacted product, and the Dynamic gene is adjusted to the initial risks grade.Such as Fig. 3 institutes
Show, the risk analysis module connects a FMEA (Failure Mode and Effect Analysis, failure mode and effect
Analysis) system and a MES system, to obtain initial risks grade.And Dynamic gene is according to historical data and same type
The adjustment that the operational data of product is made.In the present invention, the risk analysis module is connected with the product treatment module
And interact, thus Dynamic gene will be described with reference to the product treatment module.
The risk class includes the first risk class and the second risk class, and the product treatment module is to the first risk
The impacted product of grade is scrapped (scrap) or testing reliability (reliability), to the second risk class by
Product is influenceed to carry out defects detection (trace defect), probe in detecting (CP test) and permit to receive detection (Wafer
Acceptance Test, WAT), wherein, first risk class is higher than the second risk class, that is, for comparing, the first wind
Dangerous grade is excessive risk, and the second risk class is low-risk, and the height of specific risk class can be by the risk analysis module
Set according to the data of the FMEA systems and the MES system.
The product treatment module connection one reliability data storehouse (reliability database), a DRB systems
(Dispution Review Board, estimating and examining system of disputing on) and an EDA (Engineer Data Analysis, project data
Analysis) system, the reliability data measured is transferred to the reliability data storehouse, passes through the data pair of same or similar product
Than the first data after being handled；The defects of measuring data, probe data and permit receive data be all transferred to the DRB systems
System, SEDA systems and MES system, and by the data comparison of same or similar product, the second data after being handled.So
Afterwards, the Dynamic gene is updated by means of the first data after the processing and the second data after processing, and be transferred to described
FMEA systems, the adjustment to initial risks grade is realized, the risk class (i.e. real-time risk class) after being updated, and foundation
Risk class after the renewal is handled product.Thus the risk analysis module and the product treatment are realized
The interaction of module, science, correct processing method are made to impacted product.
The health degree monitoring module realizes the regular monitoring after equipment recovery, prevents equipment performance from producing skew.It please join
Fig. 4 is examined, the health degree monitoring module includes one SPC systems of connection, and (Statistical Process Control, were counted
Process control system) SPC part and equipment compatible portion, regular monitoring recover after equipment it is whether normal.For example, in positive reason
Under condition, equipment is required for carrying out PM (periodic maintenance), but the PM cycles are longer, generally comprise one month once, a season one
It is inferior, it is also inconsistent according to specific cycle, maintenance scheme.But after power failure, it is possible to cause equipment internal and external environment etc.
Factor changes, if also adhering to normal PM flows, it is easy to causes device parameter to change, can be caused to product can not be pre-
The influence of material.Then, by the health degree monitoring module, the regular monitoring after equipment recovery, such as intraday ginseng are realized
Number situations, parameter situation in one week etc., to find unfavorable condition in time, loss is minimized.
On the one hand, by SPC parts come the variation of the SPC forms (chart) of monitoring device, such as P- can be set up
Value (P values) comparison etc..If finding unqualified situation by SPC parts, relevant departments are notified immediately, are stopped in time
Machine check.
On the other hand, by equipment compatible portion come the matching rate (matching ratio) of monitoring device, such as can be with
Compare average and change (mean shift), standard deviation changes (SD shift) etc..If likewise, found by equipment compatible portion
Unqualified situation, then relevant departments are notified immediately, carry out shutdown inspection in time.
In summary, pressure drop recovery system provided by the invention, including equipment restoration schedule module, there is provided equipment recovers excellent
First level；Risk analysis module, the risk class of impacted product is assessed, there is provided real-time risk class；Product treatment mould
Block, according to it is described in real time risk class impacted product is handled, and with the risk analysis module real-time, interactive, with
Update the real-time risk class；And whether health degree monitoring module, the equipment after monitoring recovers are normal.
Therefore, pressure drop recovery system provided by the invention has following advantage：
1) the equipment restoration schedule module of optimization is provided, avoids conventional method from considering WIP situation merely so that equipment is extensive
It is multiple efficient in order；
2) risk analysis module and product treatment module real-time, interactive, so as to being run into combination product processing procedure
The problem of, rational adjustment is timely made, improves the efficiency to product treatment；
3) health degree monitoring module can persistently monitor after equipment recovery, find the latent abnormal feelings after pressure drop in time
Condition, realize overall monitor；
4) the pressure drop recovery system is connected to each existing management system, realizes automatic output information needed, reduces people
The desirability of work operation, saves manpower and materials, improves efficiency.
Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the present invention to the present invention
God and scope.So, if these modifications and variations of the present invention belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising including these changes and modification.
Claims (10)
- A kind of 1. pressure drop recovery system, it is characterised in that including：Equipment restoration schedule module, there is provided equipment recovers priority；Risk analysis module, the risk class of impacted product is assessed, there is provided real-time risk class；Product treatment module, according to it is described in real time risk class impacted product is handled, and with the risk analysis Module real-time, interactive, to update the real-time risk class；AndWhether health degree monitoring module, the equipment after monitoring recovers are normal.
- 2. pressure drop recovery system as claimed in claim 1, it is characterised in that the equipment restoration schedule module connects one respectively In product system, a manufacturing execution system and a historical information database, it is described in product system to the equipment restoration schedule Module is provided in product information, and the manufacturing execution system to equipment restoration schedule module offer equipment, whether believe by unit Breath, the historical information database provide device history abnormal information to the equipment restoration schedule module, and the equipment is recovered In product information, equipment, whether single machine information and device history abnormal information determine that the equipment is recovered to scheduler module with reference to described Priority.
- 3. pressure drop recovery system as claimed in claim 2, it is characterised in that the equipment recovery priority=be based in product Original priority+priority knots modification based on manufacturing execution system and historical information database.
- 4. pressure drop recovery system as claimed in claim 3, it is characterised in that if equipment is unit, the priority changes Measure as -2~-1；If equipment history of existence is abnormal, the priority knots modification is 1~2.
- 5. pressure drop recovery system as claimed in claim 1, it is characterised in that the risk class to impacted product is carried out It is evaluated as：The risk class of impacted product, the Dynamic gene pair are obtained by initial risks grade and a Dynamic gene The initial risks grade is adjusted.
- 6. pressure drop recovery system as claimed in claim 5, it is characterised in that the risk analysis module connects a failure mode With effect analysis system and a manufacturing execution system, to obtain initial risks grade.
- 7. pressure drop recovery system as claimed in claim 6, it is characterised in that the risk class include the first risk class and Second risk class, the product treatment module are scrapped to the impacted product of the first risk class or tested reliable Property, the impacted product of the second risk class is carried out defects detection, probe in detecting and permitted to receive detection, first risk class Higher than the second risk class.
- 8. pressure drop recovery system as claimed in claim 7, it is characterised in that the product treatment module connects a reliability number According to storehouse, a dispute estimating and examining system system and an Engineering system, the reliability number that the product treatment module will measure According to being transferred to the reliability data storehouse, and obtain the first data after the reliability data storehouse processing；The product treatment The defects of module will measure data, probe data and fair data of receiving all are transferred to the dispute estimating and examining system system, project data Analysis system and manufacturing execution system, and obtain dispute estimating and examining system system, Engineering system and the manufacture and perform The second data after system processing.
- 9. pressure drop recovery system as claimed in claim 8, it is characterised in that after the first data and processing after the processing Second data update the Dynamic gene, and are transferred to the failure mode and effect analysis system.
- 10. pressure drop recovery system as claimed in claim 1, it is characterised in that the health degree monitoring module includes connection one The statistical Process Control part of statistical process control system and equipment compatible portion, just whether the equipment after regular monitoring recovery Often.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610863733.7A CN107886205B (en) | 2016-09-29 | 2016-09-29 | Pressure drop recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610863733.7A CN107886205B (en) | 2016-09-29 | 2016-09-29 | Pressure drop recovery system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107886205A true CN107886205A (en) | 2018-04-06 |
| CN107886205B CN107886205B (en) | 2022-03-04 |
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ID=61768978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201610863733.7A Active CN107886205B (en) | 2016-09-29 | 2016-09-29 | Pressure drop recovery system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113282929A (en) * | 2021-06-29 | 2021-08-20 | 北京安天网络安全技术有限公司 | Behavior processing method, behavior processing device, behavior processing equipment and storage medium of mobile storage equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102737287A (en) * | 2012-04-23 | 2012-10-17 | 中国电力科学研究院 | Regional power grid on-line power supply risk assessment system |
| KR20130109506A (en) * | 2012-03-27 | 2013-10-08 | 한국남동발전 주식회사 | Risk based maintenance system for power generation facilities |
| CN104463696A (en) * | 2014-11-26 | 2015-03-25 | 国家电网公司 | Power grid operating risk recognition and prevention method and system |
| CN104751238A (en) * | 2015-03-06 | 2015-07-01 | 国家电网公司 | Reserve dispatch solving method based on analyzing analysis and priority judgment |
-
2016
- 2016-09-29 CN CN201610863733.7A patent/CN107886205B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130109506A (en) * | 2012-03-27 | 2013-10-08 | 한국남동발전 주식회사 | Risk based maintenance system for power generation facilities |
| CN102737287A (en) * | 2012-04-23 | 2012-10-17 | 中国电力科学研究院 | Regional power grid on-line power supply risk assessment system |
| CN104463696A (en) * | 2014-11-26 | 2015-03-25 | 国家电网公司 | Power grid operating risk recognition and prevention method and system |
| CN104751238A (en) * | 2015-03-06 | 2015-07-01 | 国家电网公司 | Reserve dispatch solving method based on analyzing analysis and priority judgment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113282929A (en) * | 2021-06-29 | 2021-08-20 | 北京安天网络安全技术有限公司 | Behavior processing method, behavior processing device, behavior processing equipment and storage medium of mobile storage equipment |
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| CN107886205B (en) | 2022-03-04 |
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