CN107870004A - flexible sensing device based on liquid metal - Google Patents
flexible sensing device based on liquid metal Download PDFInfo
- Publication number
- CN107870004A CN107870004A CN201610853227.XA CN201610853227A CN107870004A CN 107870004 A CN107870004 A CN 107870004A CN 201610853227 A CN201610853227 A CN 201610853227A CN 107870004 A CN107870004 A CN 107870004A
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- Prior art keywords
- flexible
- liquid metal
- sensor
- sensing device
- electric capacity
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- 229910001338 liquidmetal Inorganic materials 0.000 title claims abstract description 75
- 238000001514 detection method Methods 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- 238000009413 insulation Methods 0.000 claims description 8
- 238000010276 construction Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 7
- 239000004205 dimethyl polysiloxane Substances 0.000 description 5
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 5
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 5
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 5
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000000560 biocompatible material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000011895 specific detection Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/42—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using fluid means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention provides a flexible sensing device based on liquid metal, which comprises: the flexible sensor based on the liquid metal is connected with external detection equipment through a lead so as to realize sensing detection. The flexible sensing device based on the liquid metal can improve the detection precision of the flexible sensing device.
Description
Technical field
The present invention relates to flexible device technical field, and in particular to a kind of flexible sensing device based on liquid metal.
Background technology
Flexible electronic device will be being chased as market and technical field in recent years and in following a very long time
One of focus.With the hommization increasingly and intellectuality of electronic equipment, exploitation has high-precision flexible sensor for meeting
Electronic equipment future development is significant.
Flexible sensor is less desirable in accuracy of detection at present, and causing flexible sensor to promote well makes
With.
The content of the invention
For in the prior art the defects of, the present invention provide a flexible sensing device based on liquid metal, energy of the present invention
Enough improve the accuracy of detection of flexible sensing device.
To solve the above problems, the invention provides following technical scheme：
The invention provides a kind of flexible sensing device based on liquid metal, the device includes：
Flexible substrates, the external flexible base material in the flexible substrates, and in the external flexible base material
The flexible sensor based on liquid metal in portion, it is described to be set based on the flexible sensor of liquid metal through lead and the detection of outside
It is standby to connect to realize sensing detection.
Further, the flexible sensor based on liquid metal is resistance or capacitance type sensor.
Further, when the flexible sensor based on liquid metal is capacitance type sensor, the flexible sensing
Device includes at least one pair of liquid metal pole plate, and the flexible insulation dielectric layer between liquid metal pole plate.
Further, when the flexible sensor based on liquid metal is capacitance type sensor, by setting reference
The mode of electric capacity and detection electric capacity eliminates external interference completely or partially.
Further, it is described to be based on liquid when the flexible sensor based on liquid metal is capacitance type sensor
The flexible sensor of metal includes at least one sensor group, the sensor group include reference electric capacity in parallel relationship and
Electric capacity is detected, wherein, relay is provided with the parallel branch where detecting electric capacity, by the opening and closing for controlling the relay
State obtains detecting the actual measured value of electric capacity, to eliminate external interference completely or partially.
Further, when the flexible sensor based on liquid metal is resistance sensor, the more of resistance are passed through
Collimation method eliminates external interference completely or partially.
Further, the fully wrapped around flexible sensor based on liquid metal of the external flexible base material.
Further, the flexible sensor based on liquid metal is shaped as cuboid, spheroid or centrum.
Further, the structure of the flexible sensor based on liquid metal is sandwich construction or symmetrical structure.
Further, flexible material is with biofacies used by the flexible substrates and the external flexible base material
The flexible material of capacitive.
As shown from the above technical solution, the flexible sensing device of the present invention based on liquid metal, as a result of
Flexible sensor based on liquid metal, hence in so that testing result is more accurate.Specific using the sensing device detected
Cheng Wei：When external force is acted on external flexible base material, cause the internal flexible sensor based on liquid metal that corresponding shape occurs
Become, cause sensor parameters to change, so as to play a part of sensing detection.Further, since flexible biography provided by the invention
Induction device, not only substrate and external flexible base material are made of flexible material, and the internal flexible sensor for being used to detect
Also it is made of flexible preferably liquid metal, therefore whole flexible sensing device is with preferably flexible.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are the present invention
Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
These accompanying drawings obtain other accompanying drawings.
Fig. 1 is a kind of structural representation of flexible sensing device based on liquid metal provided in an embodiment of the present invention；
Fig. 2 is the structural representation of another flexible sensing device based on liquid metal provided in an embodiment of the present invention；
Fig. 3 is the structural representation of another flexible sensing device based on liquid metal provided in an embodiment of the present invention；
Fig. 4 is the structural representation of another flexible sensing device based on liquid metal provided in an embodiment of the present invention.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, clear, complete description is carried out to the technical scheme in the embodiment of the present invention, it is clear that described embodiment is
Part of the embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
One embodiment of the invention provides a kind of flexible sensing device based on liquid metal, referring to Fig. 1, the device bag
Include：Flexible substrates 1, the external flexible base material 2 in the flexible substrates, and inside the external flexible base material 2
The flexible sensor 3 based on liquid metal, the flexible sensor 3 based on liquid metal is through lead 4 and outside detection
Equipment (not shown) is connected to realize sensing detection.
The flexible sensing device based on liquid metal described in the embodiment of the present invention, as a result of based on liquid metal
Flexible sensor, hence in so that testing result is more accurate.It is using the specific detection process of the sensing device：When external force acts on
When on outside flexible parent metal, cause the internal flexible sensor based on liquid metal that corresponding deformation occurs, cause sensor to be joined
Number changes, so as to play a part of sensing detection.Further, since flexible sensing device provided by the invention, not only substrate
It is made with external flexible base material of flexible material, and the internal flexible sensor for being used to detect also uses flexibility preferably
Liquid metal is made, therefore whole flexible sensing device has preferably flexibility.
In a kind of embodiment of the present embodiment, the external flexible base material is fully wrapped around described based on liquid gold
The flexible sensor of category.It is of course also possible to the flexible sensor based on liquid metal described in portion envelops.When the external flexible
During the fully wrapped around flexible sensor based on liquid metal of base material, accuracy of detection can be not only improved, but also can carry
The security of high device.Wherein, the species and proportioning for the liquid metal that the internal flexible sensor based on liquid metal uses
It can be selected according to actual conditions, such as can be gallium-indium alloy.
In a kind of embodiment of the present embodiment, the flexible sensor based on liquid metal is shaped as growing
Cube, spheroid or centrum.In the specific implementation, the shape that flexible sensor can be set according to being actually needed, due to liquid gold
Accessory has preferable mobility, therefore is easier that variously-shaped flexible sensor is made.
In a kind of embodiment of the present embodiment, the structure of the flexible sensor based on liquid metal is more
Rotating fields or symmetrical structure.In the specific implementation, the structure that can set flexible sensor according to being actually needed, is such as arranged to more
Layer or symmetric form etc..Such as the capacitance type sensor of FIG. 3 below introduction, it is possible to regard symmetrical structure as.Certainly, according to reality
Border is needed it can also be provided that unsymmetric structure.
In a kind of embodiment of the present embodiment, the flexible substrates and the external flexible base material are used
Flexible material be the flexible material with biocompatibility.In terms of so the sensing device may be used for biologic medical, expand
Its big use range.Preferably, flexible substrates use for good biocompatibility, and be easy to combine closely with external flexible base material
Flexible material, such as PDMS.
For example, flexible substrates 1 can choose flexible and biocompatible materials PMDS, external flexible base according to the actual requirements
Material 2 jointly fixes the encapsulation of flexible sensor 3 based on liquid metal with flexible substrates 1.When external force is applied to external flexible
When on base material 2, the flexible sensor 3 (such as liquid metal resistance or electric capacity) of the liquid metal of inside can be caused to deform upon, from
And cause its resistance or electric capacity to change, then the resistance detected or capacitance variations are output to external device by lead,
So as to obtain the size of applied external force.
Preferably, the flexible sensor 3 based on liquid metal is resistance or capacitance type sensor.For example, shown in Fig. 2
The flexible sensor 3 based on liquid metal be resistance sensor；The flexible sensor 3 based on liquid metal shown in Fig. 3
For capacitance type sensor.It can be seen that when the flexible sensor 3 based on liquid metal is capacitance type sensor, the flexibility
Sensor 3 includes at least one pair of liquid metal pole plate 3 ' and 3 ", and the flexible insulation between liquid metal pole plate 3 ' and 3 "
Dielectric layer 5；Wherein, top crown and bottom crown of the liquid metal pole plate 3 ' and 3 " as flexible sensor 3, flexible insulation dielectric layer
5 dielectric layer as flexible sensor 3.The dielectric of flexible insulation dielectric layer 5 can be solid-state, liquid, gaseous state or other
Binary states, tri-state material.Preferably, flexible insulation dielectric layer 5 is using the material of good biocompatibility, such as water, air, PDMS
Deng；When using PDMS material, PDMS film or the PDMS film with air bag etc. can be made.
For the flexible sensing device shown in Fig. 3, when external force is applied on external flexible base material 2, liquid can be caused golden
Category pole plate (3 ' and 3 ") and flexible insulation dielectric layer 5 deform upon, and so as to cause its capacitance to change, then will detect
Capacitance variations by lead be output to outside detection device, so as to obtain the size of applied external force.
It is understood that the flexible sensing device shown in Fig. 3, can regard the flexible biography shown in universal model Fig. 1 as
The symmetrical expression model of induction device, and flexible insulation dielectric layer 5 can be considered as to the public flexible substrates of upper and lower liquid metal pole plate
1。
Flexible sensing device provided in an embodiment of the present invention based on liquid metal, by using liquid metal and flexible material
Material drastically increases the flexibility of flexible sensor.Due to liquid metal with mobility and flexible material with it is good
Elasticity, hence in so that the accuracy of detection of the sensing device is higher and easy to process and produces in batches；Meanwhile by from biofacies
The good material of capacitive, in terms of the sensing device also can be widely used in biologic medical.
The flexible sensing device provided referring to Fig. 4, another embodiment of the present invention, can eliminate external disturbance.Shown in Fig. 4
Flexible sensing device is capacitive flexible sensing device., can be by setting reference for capacitive flexible sensing device
The mode of electric capacity and detection electric capacity eliminates external interference completely or partially.
Referring to Fig. 4, the flexible sensor 3 based on liquid metal includes at least one sensor group, the sensor group bag
Reference electric capacity 31 and detection electric capacity 32 in parallel relationship are included, wherein, reference electric capacity 31 and detection electric capacity 32 are based on liquid
The condenser type flexible sensor of state metal.Wherein, relay 33 is provided with the parallel branch where detection electric capacity 32, passed through
The open and-shut mode of the relay 33 is controlled to obtain detecting the actual measured value of electric capacity 32, it is extraneous dry to eliminate completely or partially
Disturb.
The operation principle of flexible sensing device shown in Fig. 4 is：
Relay 33 is made to be in normally-closed contact, reference electric capacity 31 and detection electric capacity 32 is in parallel in circuit and obtains electricity in parallel
Capacitance C1；After voltage is applied to relay 33, relay just disconnects so that reference electric capacity 31 is individually connected in circuit simultaneously
Reference capacitance C2 is obtained, C1, which subtracts C2, can obtain detection capacitance i.e. C3.By setting reference electric capacity and control relay to lead to
It is disconnected, influence of the external interference for actual capacitance value can be effectively eliminated, so as to obtain accurately detecting capacitance.Such as
When external force is applied on external flexible base material, the interference volume in addition to external force may be introduced, can be complete by upper method
Or external interference is partially removed, accurately actually detected capacitance is obtained, and then obtain external force size.
It is understood that the above-mentioned flexible capacitance type sensor group for eliminating interference based on liquid metal can enter one
Step extension, more capacitance groups or the accurate ratio that reference end and test side are set are introduced, simplifies testing process, improves detection essence
Degree.
In addition, when the flexible sensor based on liquid metal is resistance sensor, pass through the multiple line method of resistance
External interference is eliminated completely or partially, is no longer described in detail herein.
Flexible sensing device provided in an embodiment of the present invention based on liquid metal, by using liquid metal and flexible material
Material drastically increases the flexibility of sensing device.Due to liquid metal with mobility and flexible material with good bullet
Property, thus the sensing device accuracy of detection it is higher and easy to process and batch production；Meanwhile by from good biocompatibility
Material, in terms of the sensing device also can be widely used in biologic medical.As can be seen here, it is provided in an embodiment of the present invention to be based on liquid
The flexible sensing device of state metal, can not only meet flexible requirement, and with Detection results it is obvious, it is easy to process,
Many advantages, such as being adapted to user's a variety of demands.
In the description of the invention, it is necessary to illustrate, herein, such as first and second or the like relational terms
It is used merely to make a distinction an entity or operation with another entity or operation, and not necessarily requires or imply these
Any this actual relation or order be present between entity or operation.Moreover, term " comprising ", "comprising" or its is any
Other variants are intended to including for nonexcludability, so that process, method, article or equipment including a series of elements
Not only include those key elements, but also the other element including being not expressly set out, or also include for this process, side
Method, article or the intrinsic key element of equipment.In the absence of more restrictions, limited by sentence "including a ..."
Key element, it is not excluded that other identical element in the process including the key element, method, article or equipment also be present.
Above example is merely to illustrate technical scheme, rather than its limitations；Although with reference to the foregoing embodiments
The present invention is described in detail, it will be understood by those within the art that：It still can be to foregoing each implementation
Technical scheme described in example is modified, or carries out equivalent substitution to which part technical characteristic；And these are changed or replaced
Change, the essence of appropriate technical solution is departed from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (10)
1. a kind of flexible sensing device based on liquid metal, it is characterised in that the device includes：
Flexible substrates, the external flexible base material in the flexible substrates, and inside the external flexible base material
Flexible sensor based on liquid metal, it is described to be connected based on the flexible sensor of liquid metal through lead and outside detection device
Connect to realize sensing detection.
2. flexible sensing device according to claim 1, it is characterised in that the flexible sensor based on liquid metal
For resistance or capacitance type sensor.
3. flexible sensing device according to claim 2, it is characterised in that when the flexible sensing based on liquid metal
When device is capacitance type sensor, the flexible sensor includes at least one pair of liquid metal pole plate, and positioned at liquid metal pole
Flexible insulation dielectric layer between plate.
4. flexible sensing device according to claim 2, it is characterised in that when the flexible sensing based on liquid metal
When device is capacitance type sensor, external interference is eliminated completely or partially by way of reference electric capacity and detection electric capacity are set.
5. flexible sensing device according to claim 4, it is characterised in that when the flexible sensing based on liquid metal
When device is capacitance type sensor, the flexible sensor based on liquid metal includes at least one sensor group, the sensing
Device group includes reference electric capacity and detection electric capacity in parallel relationship, wherein, set in the parallel branch where detecting electric capacity
There is relay, by controlling the open and-shut mode of the relay to obtain detecting the actual measured value of electric capacity, to disappear completely or partially
Except external interference.
6. flexible sensing device according to claim 2, it is characterised in that when the flexible sensing based on liquid metal
When device is resistance sensor, external interference is eliminated by the multiple line method of resistance completely or partially.
7. flexible sensing device according to claim 1, it is characterised in that the external flexible base material is fully wrapped around described
Flexible sensor based on liquid metal.
8. the flexible sensing device according to any one of claim 1~7, it is characterised in that described based on liquid metal
Flexible sensor is shaped as cuboid, spheroid or centrum.
9. the flexible sensing device according to any one of claim 1~7, it is characterised in that described based on liquid metal
The structure of flexible sensor is sandwich construction or symmetrical structure.
10. the flexible sensing device according to any one of claim 1~7, it is characterised in that the flexible substrates and institute
Flexible material is the flexible material with biocompatibility used by stating external flexible base material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610853227.XA CN107870004A (en) | 2016-09-26 | 2016-09-26 | flexible sensing device based on liquid metal |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610853227.XA CN107870004A (en) | 2016-09-26 | 2016-09-26 | flexible sensing device based on liquid metal |
Publications (1)
| Publication Number | Publication Date |
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| CN107870004A true CN107870004A (en) | 2018-04-03 |
Family
ID=61752148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201610853227.XA Pending CN107870004A (en) | 2016-09-26 | 2016-09-26 | flexible sensing device based on liquid metal |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108962600A (en) * | 2018-07-31 | 2018-12-07 | 北京梦之墨科技有限公司 | A kind of variable condenser and electronic equipment |
| CN109364467A (en) * | 2018-11-01 | 2019-02-22 | 天津大学 | A kind of true man's battle shooting game change system based on liquid metal |
| CN109512426A (en) * | 2018-11-05 | 2019-03-26 | 天津大学 | Portable muscular atrophy prevention system based on liquid metals flexible capacitor |
| CN109645998A (en) * | 2018-11-05 | 2019-04-19 | 天津大学 | Muscular atrophy prevention system based on liquid metals flexible capacitor |
| CN109646006A (en) * | 2018-11-27 | 2019-04-19 | 华中科技大学 | It is a kind of for measuring the flexible capacitance type sensor of human synovial angle |
| CN109646007A (en) * | 2018-11-27 | 2019-04-19 | 华中科技大学 | A kind of human synovial angle measuring system towards wearable flexible sensor |
| CN109646923A (en) * | 2018-11-01 | 2019-04-19 | 天津大学 | A kind of fencing referee machine based on liquid metal |
| CN110392456A (en) * | 2018-04-20 | 2019-10-29 | 中国科学院理化技术研究所 | A kind of flexible resistor micro-heater based on liquid metal |
| CN110391044A (en) * | 2018-04-20 | 2019-10-29 | 中国科学院理化技术研究所 | A kind of flexible wire based on composite liquefied metal |
| CN110388997A (en) * | 2018-04-20 | 2019-10-29 | 中国科学院理化技术研究所 | A kind of pliable pressure sensor of composite liquefied metal electrode |
| CN110501086A (en) * | 2019-08-01 | 2019-11-26 | 电子科技大学 | A kind of flexibility temperature sensor and preparation method thereof |
| CN110553766A (en) * | 2018-05-30 | 2019-12-10 | 浙江清华柔性电子技术研究院 | Force sensor and method for manufacturing the same |
| CN113252092A (en) * | 2020-02-13 | 2021-08-13 | 中国科学院理化技术研究所 | Strain temperature control experiment testing device and testing method thereof |
| US20230008612A1 (en) * | 2021-07-01 | 2023-01-12 | Samsung Electronics Co., Ltd. | Electronic device including flexible display |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1130755A (en) * | 1995-08-16 | 1996-09-11 | 何学新 | Frequency-offset type sensor measuring circuit and signal treatment method |
| CN101950644A (en) * | 2010-09-09 | 2011-01-19 | 西北工业大学 | Manufacturing method of flexible heat-sensitive thin film resistor array |
| CN103959029A (en) * | 2011-09-24 | 2014-07-30 | 哈佛大学校长及研究员协会 | Artificial skin and elastic strain sensor |
| CN104949789A (en) * | 2014-03-26 | 2015-09-30 | 中国科学院理化技术研究所 | Micro-channel pressure sensor |
| CN105136351A (en) * | 2015-08-19 | 2015-12-09 | 东南大学 | Capacitive pressure sensor and preparation method thereof |
| CN105527014A (en) * | 2016-01-12 | 2016-04-27 | 湖北大学 | Manufacturing method for flexible vibration sensor based on PVDF nanofiber |
-
2016
- 2016-09-26 CN CN201610853227.XA patent/CN107870004A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1130755A (en) * | 1995-08-16 | 1996-09-11 | 何学新 | Frequency-offset type sensor measuring circuit and signal treatment method |
| CN101950644A (en) * | 2010-09-09 | 2011-01-19 | 西北工业大学 | Manufacturing method of flexible heat-sensitive thin film resistor array |
| CN103959029A (en) * | 2011-09-24 | 2014-07-30 | 哈佛大学校长及研究员协会 | Artificial skin and elastic strain sensor |
| CN104949789A (en) * | 2014-03-26 | 2015-09-30 | 中国科学院理化技术研究所 | Micro-channel pressure sensor |
| CN105136351A (en) * | 2015-08-19 | 2015-12-09 | 东南大学 | Capacitive pressure sensor and preparation method thereof |
| CN105527014A (en) * | 2016-01-12 | 2016-04-27 | 湖北大学 | Manufacturing method for flexible vibration sensor based on PVDF nanofiber |
Non-Patent Citations (2)
| Title |
|---|
| RUBEN D.PONCE WONG ETC: ""Flexible microfluidic normal force sensor skin for tactile feedback"", 《SENSORS AND ACTUATORS A:PHYSICAL》 * |
| 郭小辉 等: ""全柔性电容式触觉传感阵列设计与实验"", 《电子测量与仪器学报》 * |
Cited By (21)
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|---|---|---|---|---|
| CN110388997A (en) * | 2018-04-20 | 2019-10-29 | 中国科学院理化技术研究所 | A kind of pliable pressure sensor of composite liquefied metal electrode |
| CN110392456B (en) * | 2018-04-20 | 2021-07-20 | 中国科学院理化技术研究所 | Flexible resistance micro-heater based on liquid metal |
| CN110388997B (en) * | 2018-04-20 | 2021-02-19 | 中国科学院理化技术研究所 | Flexible pressure sensor of composite liquid metal electrode |
| CN110392456A (en) * | 2018-04-20 | 2019-10-29 | 中国科学院理化技术研究所 | A kind of flexible resistor micro-heater based on liquid metal |
| CN110391044A (en) * | 2018-04-20 | 2019-10-29 | 中国科学院理化技术研究所 | A kind of flexible wire based on composite liquefied metal |
| CN110553767A (en) * | 2018-05-30 | 2019-12-10 | 浙江清华柔性电子技术研究院 | method for manufacturing force sensor |
| CN110553766A (en) * | 2018-05-30 | 2019-12-10 | 浙江清华柔性电子技术研究院 | Force sensor and method for manufacturing the same |
| CN108962600B (en) * | 2018-07-31 | 2023-12-26 | 北京梦之墨科技有限公司 | Variable capacitor and electronic equipment |
| CN108962600A (en) * | 2018-07-31 | 2018-12-07 | 北京梦之墨科技有限公司 | A kind of variable condenser and electronic equipment |
| CN109646923A (en) * | 2018-11-01 | 2019-04-19 | 天津大学 | A kind of fencing referee machine based on liquid metal |
| CN109364467A (en) * | 2018-11-01 | 2019-02-22 | 天津大学 | A kind of true man's battle shooting game change system based on liquid metal |
| CN109645998A (en) * | 2018-11-05 | 2019-04-19 | 天津大学 | Muscular atrophy prevention system based on liquid metals flexible capacitor |
| CN109512426A (en) * | 2018-11-05 | 2019-03-26 | 天津大学 | Portable muscular atrophy prevention system based on liquid metals flexible capacitor |
| CN109646007A (en) * | 2018-11-27 | 2019-04-19 | 华中科技大学 | A kind of human synovial angle measuring system towards wearable flexible sensor |
| CN109646006A (en) * | 2018-11-27 | 2019-04-19 | 华中科技大学 | It is a kind of for measuring the flexible capacitance type sensor of human synovial angle |
| CN110501086B (en) * | 2019-08-01 | 2020-09-25 | 电子科技大学 | Flexible temperature sensor and preparation method thereof |
| CN110501086A (en) * | 2019-08-01 | 2019-11-26 | 电子科技大学 | A kind of flexibility temperature sensor and preparation method thereof |
| CN113252092A (en) * | 2020-02-13 | 2021-08-13 | 中国科学院理化技术研究所 | Strain temperature control experiment testing device and testing method thereof |
| CN113252092B (en) * | 2020-02-13 | 2022-11-01 | 中国科学院理化技术研究所 | Strain temperature control experiment testing device and testing method thereof |
| US20230008612A1 (en) * | 2021-07-01 | 2023-01-12 | Samsung Electronics Co., Ltd. | Electronic device including flexible display |
| US12082357B2 (en) * | 2021-07-01 | 2024-09-03 | Samsung Electronics Co., Ltd. | Electronic device including flexible display |
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