CN107863901A - 一种六自由度微位移压电驱动调节装置及调节方法 - Google Patents
一种六自由度微位移压电驱动调节装置及调节方法 Download PDFInfo
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- CN107863901A CN107863901A CN201711207896.0A CN201711207896A CN107863901A CN 107863901 A CN107863901 A CN 107863901A CN 201711207896 A CN201711207896 A CN 201711207896A CN 107863901 A CN107863901 A CN 107863901A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 235
- 238000000034 method Methods 0.000 title claims abstract description 8
- 230000007246 mechanism Effects 0.000 claims abstract description 178
- 230000033001 locomotion Effects 0.000 claims abstract description 40
- 239000000203 mixture Substances 0.000 claims abstract description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 20
- 239000010432 diamond Substances 0.000 claims description 20
- 230000000694 effects Effects 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 8
- 235000003283 Pachira macrocarpa Nutrition 0.000 claims description 5
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- 235000009165 saligot Nutrition 0.000 claims description 5
- 230000008450 motivation Effects 0.000 claims description 4
- 230000010354 integration Effects 0.000 claims description 3
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
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- 238000005461 lubrication Methods 0.000 description 2
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- 230000033228 biological regulation Effects 0.000 description 1
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- 238000011109 contamination Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
- H02N2/123—Mechanical transmission means, e.g. for gearing
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
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Priority Applications (1)
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CN201711207896.0A CN107863901B (zh) | 2017-11-27 | 2017-11-27 | 一种六自由度微位移压电驱动调节装置及调节方法 |
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CN201711207896.0A CN107863901B (zh) | 2017-11-27 | 2017-11-27 | 一种六自由度微位移压电驱动调节装置及调节方法 |
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CN107863901A true CN107863901A (zh) | 2018-03-30 |
CN107863901B CN107863901B (zh) | 2019-03-12 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108726106A (zh) * | 2018-06-11 | 2018-11-02 | 广东科学技术职业学院 | 一种压电叠堆驱动送料底座 |
CN110104227A (zh) * | 2019-04-17 | 2019-08-09 | 西安交通大学 | 双轴平动自传感超分辨率成像平台及方法 |
CN110492781A (zh) * | 2019-08-05 | 2019-11-22 | 包头稀土研究院 | 三级微位移放大机构及其放大方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4175159A1 (de) * | 2021-10-29 | 2023-05-03 | Curaden AG | Piezoelektrischer antrieb |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080297281A1 (en) * | 2007-06-01 | 2008-12-04 | Georgia Tech Research Corporation | Piezo-on-diamond resonators and resonator systems |
KR20100106715A (ko) * | 2009-03-24 | 2010-10-04 | 한국과학기술원 | 다자유도를 갖는 압전 선형구동기, 그 구동방법 및 이를 이용한 초점 조절장치 |
CN103177774A (zh) * | 2013-01-30 | 2013-06-26 | 西安交通大学 | 两自由度柔性微角位移压电作动平台 |
JP2016040986A (ja) * | 2014-08-13 | 2016-03-24 | セイコーエプソン株式会社 | 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法 |
-
2017
- 2017-11-27 CN CN201711207896.0A patent/CN107863901B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080297281A1 (en) * | 2007-06-01 | 2008-12-04 | Georgia Tech Research Corporation | Piezo-on-diamond resonators and resonator systems |
KR20100106715A (ko) * | 2009-03-24 | 2010-10-04 | 한국과학기술원 | 다자유도를 갖는 압전 선형구동기, 그 구동방법 및 이를 이용한 초점 조절장치 |
CN103177774A (zh) * | 2013-01-30 | 2013-06-26 | 西安交通大学 | 两自由度柔性微角位移压电作动平台 |
JP2016040986A (ja) * | 2014-08-13 | 2016-03-24 | セイコーエプソン株式会社 | 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法 |
Non-Patent Citations (1)
Title |
---|
吴啟琛、葛东明、肖刚等: ""基于双极菱形压电作动器的振动主动隔离研究"", 《第十届动力学与控制学术会议 摘要集》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108726106A (zh) * | 2018-06-11 | 2018-11-02 | 广东科学技术职业学院 | 一种压电叠堆驱动送料底座 |
CN110104227A (zh) * | 2019-04-17 | 2019-08-09 | 西安交通大学 | 双轴平动自传感超分辨率成像平台及方法 |
CN110492781A (zh) * | 2019-08-05 | 2019-11-22 | 包头稀土研究院 | 三级微位移放大机构及其放大方法 |
CN110492781B (zh) * | 2019-08-05 | 2024-03-29 | 包头稀土研究院 | 三级微位移放大机构及其放大方法 |
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Effective date of registration: 20240320 Address after: 1st Floor, Northwest Building of Eleven Science and Technology, No. 532 Shenzhousan Road, National Civil Aerospace Industry Base, Xi'an City, Shaanxi Province, 710100 Patentee after: XI'AN LANGWEI TECHNOLOGY Co.,Ltd. Country or region after: Zhong Guo Address before: Beilin District Xianning West Road 710049, Shaanxi city of Xi'an province No. 28 Patentee before: XI'AN JIAOTONG University Country or region before: Zhong Guo |