CN107858534A - A kind of processing sapphire crystallization furnace tungsten calandria simultaneously reclaims the method and apparatus of metal molybdenum - Google Patents

A kind of processing sapphire crystallization furnace tungsten calandria simultaneously reclaims the method and apparatus of metal molybdenum Download PDF

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Publication number
CN107858534A
CN107858534A CN201711178301.3A CN201711178301A CN107858534A CN 107858534 A CN107858534 A CN 107858534A CN 201711178301 A CN201711178301 A CN 201711178301A CN 107858534 A CN107858534 A CN 107858534A
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China
Prior art keywords
tungsten
reactor
calandria
molybdenum
sedimentary
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CN201711178301.3A
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Chinese (zh)
Inventor
左洪波
杨鑫宏
李铁
其他发明人请求不公开姓名
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Harbin Aurora Optoelectronics Technology Co Ltd
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Harbin Aurora Optoelectronics Technology Co Ltd
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Priority to CN201711178301.3A priority Critical patent/CN107858534A/en
Publication of CN107858534A publication Critical patent/CN107858534A/en
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22BPRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B34/00Obtaining refractory metals
    • C22B34/30Obtaining chromium, molybdenum or tungsten
    • C22B34/34Obtaining molybdenum
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure

Abstract

The invention provides a kind of processing sapphire crystallization furnace tungsten calandria and the method and apparatus of metal molybdenum is reclaimed, using a reactor assembly system, processing surface deposited the sapphire crystallization furnace tungsten calandria of Mo layer.Go to reduce the thickness of deposition molybdenum layer using ultrasonic wave, recycle chemical method to remove remaining molybdenum layer.Chemical method refers to react raw MoCl with molybdenum atom using chlorine gas selecting5Volatile molecules, so as to remove the Mo layer on tungsten bar surface, regeneration tungsten calandria surface is reached, has extended the service life of tungsten calandria.Meanwhile volatility MoCl5Molecule is by alkali liquor absorption, by generating MoO2Afterwards, being reduced property gas reduction is into molybdenum atom.The present invention can both extend the service life of tungsten bar calandria, can recycle infusibility non-ferrous metal molybdenum again.

Description

A kind of processing sapphire crystallization furnace tungsten calandria simultaneously reclaims the method and apparatus of metal molybdenum
Technical field
The present invention relates to a kind of extension method of service life of sapphire crystallization furnace tungsten bar calandria and metal molybdenum again The method of recovery.
Background technology
Sapphire, also known as corundum, it is a kind of oxide being made up of aluminium element and oxygen element.Its hardness is very big, optics Light transmittance is excellent.It has been applied to the screen of the electronic equipments such as personal consumption electronic product, such as mobile phone, Ipad, while it is Microelectronics and the particularly important base material of photoelectronic industry, may serve as the base material of LED.With personal consumption electricity The growth of sub- product demand and the needs for saving the energy, the demand of sapphire material are increasing.
The growing method of sapphire monocrystal has a lot, main to include bubble hair tonic, czochralski method, reverse mould method and heat exchange Method.No matter any method, it is required for polycrystalline alpha-alumina crystals or alumina powder melting sources, forms the molten of aluminum oxide Melt body.This process is general to use resistance heating or the method for inductive heating.Sapphire crystallization furnace interior, there is birdcage shape Tungsten bar calandria, it is crucible inside tungsten bar calandria, and the outside thermal insulation board for having molybdenum matter.At high temperature, tungsten has with materials such as molybdenums Certain volatility, forms a kind of mixed volatilization thing, and main component is molybdenum element.This volatile matter can be deposited on tungsten bar calandria Surface, and the lamination that more sinks is thicker, and the diameter difference maximum of upper and lower tungsten bar can be more than 2 millimeters.This volatile matter influences length Brilliant process has two aspects:First, volatile matter can enter Crystallization nonferrous layer, be commonly called as " peeling " phenomenon, influence the matter of crystal Amount.Second, according to Ohm's law, the diameter of resistance is thicker, and resistance value can decline.The temperature field point of crystal growth can so be changed Cloth, crystalline heterogeneity is caused, can also influence crystal mass.Therefore, the volatile matter being immersed on birdcage shape tungsten bar calandria Layer is, it is necessary to a kind of effective processing method, the service life of increase tungsten bar calandria.Production cost so can be not only reduced, The metallics volatilized can be reclaimed.
The content of the invention
It is an object of the invention to provide a kind of volatile matter that can be removed and be deposited on sapphire crystallization furnace tungsten bar calandria Layer so that the diameter of tungsten bar calandria is homogeneous, increases tungsten calandria service life, while reclaim the processing of metal molybdenum in volatile matter Sapphire crystallization furnace tungsten calandria and the method for reclaiming metal molybdenum.
In order to solve above-mentioned technical problem, the object of the present invention is achieved like this:
(1)Design and make a gas reactor, this reactor includes two sealing lids, and a lid installs ultrasonic wave Generator, another installation gas introducing system and pressure gauge.Inside reactor has Teflon liner, and reactor bottom carries The vapor-liquid outlet of one sealing, the diameter of Teflon liner are more than the size of birdcage shape tungsten calandria, and tungsten calandria can be with whole Body enters inside reactor, but copper-based seat must be removed;
(2)When the volatilization nitride layer being deposited on tungsten bar is thicker, the thickness of volatilization nitride layer is reduced first with physical method;By tungsten Rod calandria enters in the aqueous solution, while adds ultrasonic wave above tungsten bar;In the presence of ultrasonic wave, a part of loose deposition Layer can come off because of vibration, and the thickness of volatile matter sedimentary diminishes;Further enter from vapor-liquid outlet withdrawal liquid and cast Row chemical treatment;
(3)After reactor with tungsten bar calandria is dried, the operation that chemical method removes sedimentary is carried out;Replacing carries gas The closure of body pressure gauge, chlorine is passed through to inside reactor, is sealed after air is discharged.The reactor of this sealing is heated, And temperature is controlled 200 ~ 250oBetween C;Following chemical reaction occurs for inside reactor:
2Mo (s) + 5Cl2(g)2MoCl5 (g)
The molybdenum layer metal on tungsten bar surface, changes into gaseous MoCl5Molecule, with unnecessary chlorine outflow reactor, and by Outside alkali liquor absorption, tungsten under this reaction temperature, not with chlorine reaction;
(4)In alkalescence absorbs groove, chlorine is eventually converted into chlorion or hypochlorite ion;Adjust the pH of solution so that MoCl5Molecule changes into Mo (OH)2Or Mo (OH)3Precipitation, after filtering further thermal conversion into molybdenum oxide, finally by and also Reduced oxide is reclaimed metal molybdenum by originality gas.
Another object of the present invention is to provide a kind of processing sapphire crystallization furnace tungsten calandria for realizing the above method simultaneously Reclaim the device of metal molybdenum.What this purpose of the present invention was realized in:It includes reactor, the lid with excusing from death wave producer Son 3, the closure 4 with gas gauge and the tungsten bar 7 with molybdenum sedimentary being arranged in reactor, reactor is by reacting Device box hat 1 and Teflon liner 2 form, and reactor lower end is provided with vapor-liquid outlet 6, when the closure with excusing from death wave producer Physical is formed when on reactor reduces deposit thickness device, and deposited layers of material chip 9 is provided with device, and band is super The closure connection excusing from death wave producer of raw wave producer;The group when the closure with gas gauge is arranged on reactor Sedimentary device is removed into chemical method, closure connection gas introducing system and pressure gauge with gas gauge, gas-liquid row Outlet connects closed lye tank (vat) 12, and digital pH meter 13 is provided with closed lye tank (vat) 12, and external computer connects digital pH meter 13 and thermocouple 14, in the coupled reaction device of thermocouple 14.
The present invention also has so some technical characteristics:
1st, described chemical method removes the external equipment that the connection of sedimentary device produces chlorine molecule;
2nd, described Physical reduces deposit thickness device and chemical method removes in sedimentary device and is provided with water liquid, heat Water liquid in the contact reactor of galvanic couple 14;
3rd, the heating-up temperature of the described tungsten bar calandria with molybdenum sedimentary is 200 ~ 250oC;
4th, the diameter of described reactor Teflon liner is more than the tungsten bar with molybdenum sedimentary.
Brief description of the drawings
Fig. 1-3 is the structure chart of gas reactor and the structural representation of two kinds of closures;
Fig. 4 is the structural representation that Physical reduces deposit thickness device;
Fig. 5 is the structural representation that chemical method removes sedimentary device.
Embodiment
The present invention is described further with reference to the accompanying drawings and detailed description:
Embodiment 1
With reference to Fig. 1-5, the present embodiment takes out birdcage shape tungsten bar calandria, the copper bottom of removal calandria from sapphire crystallization furnace Seat.Several points are respectively selected in the upper and lower part of tungsten bar calandria, the diameter of tungsten bar is determined with slide measure.If that puts up and down is straight Footpath differs by more than 1 millimeter, illustrates the thicker of sedimentary, and this tungsten bar calandria needs two steps of physics and chemistry to carry out again It is raw.First, tungsten bar calandria is loaded into reactor 1, injects certain water liquid 8, liquid level is higher than the height of calandria.So Afterwards, using the sealing lid 3 for being connected to ultrasonic generator, reactor assembly is sealed, and implement ultrasound using ultrasonic generator 5 Ripple vibration washing.After certain time, the tungsten bar calandria 7 with molybdenum sedimentary is taken out, continues to be measured with slide measure, and Diameter difference above and below record.If diameter difference diminishes, illustrate that the thickness of deposit layer diminishes.Repeat above-mentioned operation, it is known that straight One constant of footpath difference convergence.Now, the pH value for adjusting solution reaches acid, repeats an aforesaid operations.Then, reaction is passed through Sealing vapor-liquid outlet 6 below device collects solution and sedimentary chip.In next step, carry out the elution of deionized water and dry behaviour Make.The closure 4 with gas gauge is changed, chlorine molecule 11, flow constant (20 are imported to the inside of reactor Ml/min), outlet is sealed after discharging the air in reactor using chlorine.Then, heating response device is overall, keeping temperature 200 ~ 250oIn the range of C.Inside reactor, chlorine are chemically reacted under this temperature range with metal molybdenum, and generation is waved The MoCl of hair property5Gas molecule 10.In this temperature range, tungsten does not react with chlorine.After reacting a period of time, Continue to discharge product molecule mixture with chlorine.The chlorine and MoCl of discharge5Molecule is inhaled by the alkali lye in closed lye tank (vat) 12 Receive, generate chlorion and Mo (OH)2Precipitate molecules.Filter to isolate Mo (OH)2Precipitation, the oxide mixing of molybdenum is generated after heating Thing, recycle reducibility gas that oxide is reduced into recovery metal molybdenum.After being repeated several times such operate, there is no heavy in alkali lye Precipitation goes out, and illustrates do not have MoCl in gaseous emission5Molecule.Stopping is passed through chlorine, and stops heating response device.Utilize nitrogen Empty residual chlorine qi leel in reactor.Reactor is opened, tungsten bar calandria is eluted with deionized water, is taken out after drying.Group After loading onto copper pedestal, it is reloaded into sapphire crystallization furnace and is continuing with.Due to eliminating the sedimentary on tungsten bar surface to greatest extent, The diameter difference very little of upper and lower tungsten bar, the distribution of resistance of calandria both add heating rod service life than more uniform, cause production again Raw temperature field is advantageous to the growth course of sapphire crystal than more uniform, improves the yields of crystal generation.Closed lye tank (vat) Digital pH meter 13 is provided with 12, external computer connects digital pH meter 13 and thermocouple 14, the contact reactor of thermocouple 14 Interior water liquid.
Embodiment 2
Tungsten bar calandria, the copper pedestal of removal calandria are taken out from sapphire crystallization furnace.On the top of tungsten bar calandria with Portion respectively selects several points, and the diameter of tungsten bar is determined with slide measure.If the diameter difference put up and down is less than 1 millimeter, illustrate now The thickness of sedimentary is smaller.In this case, it is convenient to omit ultrasonic wave reduces the process of deposit thickness, directly utilizes chemistry side Method removes the sedimentary on tungsten bar surface, and reclaims refractory metal molybdenum.The tungsten bar calandria of birdcage shape is integrally fitted into reactor, Utilize the seal cap sealing reactor with gas gauge.Chlorine is imported to the inside of reactor, is discharged and reacted using chlorine Outlet is sealed after air in device.Then, heating response device is overall, maintains the temperature at 200 ~ 250oIn the range of C.In reactor Portion, chlorine chemically react under this temperature range with metal molybdenum, generate volatile MoCl5Molecule.When reacting one section Between after, continue with chlorine discharge product molecule mixture.The chlorine and MoCl of discharge5Molecule is by alkali liquor absorption.Adjust alkali lye PH value, generate chlorion and Mo (OH)2Precipitate molecules.Filter to isolate Mo (OH)2Precipitation, the oxide of molybdenum is generated after heating Mixture, recycle reducibility gas that oxide is reduced into recovery metal molybdenum.After being repeated several times such operate, do not exist in alkali lye There is Precipitation, illustrate there is no MoCl in gaseous emission5Molecule.Stopping is passed through chlorine, and stops heating response device.Utilize Residual chlorine qi leel in nitrogen purge reactor.Reactor is opened, tungsten bar calandria is eluted with deionized water, is taken after drying Go out.In assembling after copper pedestal, it is reloaded into sapphire crystallization furnace and is continuing with.

Claims (6)

  1. A kind of 1. method for handling sapphire crystallization furnace tungsten calandria and reclaiming metal molybdenum, it is characterised in that it includes following step Suddenly:
    (1)Design and make a gas reactor, this reactor includes two sealing lids, and a lid installs ultrasonic wave Generator, another installation gas introducing system and pressure gauge;Inside reactor has Teflon liner, and reactor bottom carries The vapor-liquid outlet of one sealing, the diameter of Teflon liner are more than the size of birdcage shape tungsten calandria, and tungsten calandria can be with whole Body enters inside reactor, but copper-based seat must be removed;
    (2)When the volatilization nitride layer being deposited on tungsten bar is thicker, the thickness of volatilization nitride layer is reduced first with physical method;By tungsten Rod calandria enters in the aqueous solution, while adds ultrasonic wave above tungsten bar;In the presence of ultrasonic wave, a part of loose deposition Layer can come off because of vibration, and the thickness of volatile matter sedimentary diminishes;Further enter from vapor-liquid outlet withdrawal liquid and cast Row chemical treatment;
    (3)After reactor with tungsten bar calandria is dried, the operation that chemical method removes sedimentary is carried out;Replacing carries gas The closure of body pressure gauge, chlorine is passed through to inside reactor, is sealed after air is discharged;
    The reactor of this sealing is heated, and controls temperature 200 ~ 250oBetween C;Following chemistry occurs for inside reactor Reaction:
    2Mo (s) + 5Cl2(g)2MoCl5 (g)
    The molybdenum layer metal on tungsten bar surface, changes into gaseous MoCl5Molecule, with unnecessary chlorine outflow reactor, and it is outer The alkali liquor absorption in portion, tungsten under this reaction temperature, not with chlorine reaction;
    (4)In alkalescence absorbs groove, chlorine is eventually converted into chlorion or hypochlorite ion;Adjust the pH of solution so that MoCl5Molecule changes into Mo (OH)2Or Mo (OH)3Precipitation, after filtering further thermal conversion into molybdenum oxide, finally by and also Reduced oxide is reclaimed metal molybdenum by originality gas.
  2. 2. a kind of processing sapphire crystallization furnace tungsten calandria simultaneously reclaims the device of metal molybdenum, it is characterised in that it include reactor, Lid, the closure with gas gauge and the tungsten with molybdenum sedimentary being arranged in reactor with excusing from death wave producer Rod, reactor are made up of reactor box hat and Teflon liner, and reactor lower end is provided with vapor-liquid outlet, when band excusing from death ripple hair The closure of raw device forms Physical when being arranged on reactor reduce deposit thickness device, and sedimentary thing is provided with device Matter chip, the closure connection excusing from death wave producer with excusing from death wave producer;When the closure with gas gauge is arranged on Constitutional chemistry method removes sedimentary device when on reactor, closure connection gas introducing system and pressure with gas gauge Power table, vapor-liquid outlet connect closed lye tank (vat), and digital pH meter is provided with closed lye tank (vat), and external computer connection is digital PH meter and thermocouple, in thermocouple coupled reaction device.
  3. 3. a kind of processing sapphire crystallization furnace tungsten calandria according to claim 2 simultaneously reclaims the device of metal molybdenum, it is special Sign is that described chemical method removes the external equipment that the connection of sedimentary device produces chlorine molecule.
  4. 4. a kind of processing sapphire crystallization furnace tungsten calandria according to claim 3 simultaneously reclaims the device of metal molybdenum, it is special Sign is that described Physical reduces deposit thickness device and chemical method removes in sedimentary device and is provided with water liquid, heat Water liquid in galvanic contact reactor.
  5. 5. a kind of processing sapphire crystallization furnace tungsten calandria according to claim 4 simultaneously reclaims the device of metal molybdenum, it is special Sign is that the heating-up temperature of the described tungsten bar calandria with molybdenum sedimentary is 200 ~ 250oC。
  6. 6. a kind of processing sapphire crystallization furnace tungsten calandria according to claim 5 simultaneously reclaims the device of metal molybdenum, it is special Sign is that the diameter of described reactor Teflon liner is more than the tungsten bar with molybdenum sedimentary.
CN201711178301.3A 2017-11-23 2017-11-23 A kind of processing sapphire crystallization furnace tungsten calandria simultaneously reclaims the method and apparatus of metal molybdenum Pending CN107858534A (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5814149A (en) * 1994-11-25 1998-09-29 Kabushiki Kaisha Kobe Seiko Sho Methods for manufacturing monocrystalline diamond films
JP2012153570A (en) * 2011-01-26 2012-08-16 Daiichi Kiden:Kk Pulling-up sapphire single crystal growing apparatus
CN102912430A (en) * 2012-11-15 2013-02-06 上海中电振华晶体技术有限公司 Sapphire crystal growth equipment and method
CN104058458A (en) * 2014-07-07 2014-09-24 中国科学技术大学 Method for preparing high-quality single/double-layer controllable molybdenum disulfide
CN106498496A (en) * 2016-11-02 2017-03-15 苏州恒嘉晶体材料有限公司 A kind of heating element of tungsten processing method
CN206052206U (en) * 2016-08-30 2017-03-29 天通银厦新材料有限公司 A kind of sapphire single-crystal furnace
US9803291B2 (en) * 2012-09-28 2017-10-31 A.L.M.T. Corp. Crucible for growing sapphire single crystal, and method for producing crucible for growing sapphire single crystal
CN207608603U (en) * 2017-11-23 2018-07-13 哈尔滨奥瑞德光电技术有限公司 A kind of device for handling sapphire crystallization furnace tungsten calandria and recycling metal molybdenum

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5814149A (en) * 1994-11-25 1998-09-29 Kabushiki Kaisha Kobe Seiko Sho Methods for manufacturing monocrystalline diamond films
JP2012153570A (en) * 2011-01-26 2012-08-16 Daiichi Kiden:Kk Pulling-up sapphire single crystal growing apparatus
US9803291B2 (en) * 2012-09-28 2017-10-31 A.L.M.T. Corp. Crucible for growing sapphire single crystal, and method for producing crucible for growing sapphire single crystal
CN102912430A (en) * 2012-11-15 2013-02-06 上海中电振华晶体技术有限公司 Sapphire crystal growth equipment and method
CN104058458A (en) * 2014-07-07 2014-09-24 中国科学技术大学 Method for preparing high-quality single/double-layer controllable molybdenum disulfide
CN206052206U (en) * 2016-08-30 2017-03-29 天通银厦新材料有限公司 A kind of sapphire single-crystal furnace
CN106498496A (en) * 2016-11-02 2017-03-15 苏州恒嘉晶体材料有限公司 A kind of heating element of tungsten processing method
CN207608603U (en) * 2017-11-23 2018-07-13 哈尔滨奥瑞德光电技术有限公司 A kind of device for handling sapphire crystallization furnace tungsten calandria and recycling metal molybdenum

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Application publication date: 20180330