CN107845704A - A kind of device for graphite boat consolidation silicon chip - Google Patents
A kind of device for graphite boat consolidation silicon chip Download PDFInfo
- Publication number
- CN107845704A CN107845704A CN201711320292.7A CN201711320292A CN107845704A CN 107845704 A CN107845704 A CN 107845704A CN 201711320292 A CN201711320292 A CN 201711320292A CN 107845704 A CN107845704 A CN 107845704A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- silicon chip
- cylinder
- transmission plate
- detent mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 74
- 239000010439 graphite Substances 0.000 title claims abstract description 74
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 73
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 34
- 239000010703 silicon Substances 0.000 title claims abstract description 34
- 238000007596 consolidation process Methods 0.000 title claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 49
- 238000003032 molecular docking Methods 0.000 claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims description 44
- 210000001503 joint Anatomy 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 230000032683 aging Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigging Conveyors (AREA)
Abstract
The invention discloses the device for graphite boat consolidation silicon chip, including：Base；Detent mechanism, for being positioned to the graphite boat；One or more vibrating devices, it is arranged on the base, is provided with vibration source and docked with the detent mechanism and controllable docking structure, the vibration source are transferred vibrations on the graphite boat by the docking structure.The present invention extends the service life of graphite boat, reduces its maintenance cost, while the use of the graphite boat piece suitable for the different degrees of wear.
Description
Technical field
The present invention relates to photovoltaic manufacturing field, more particularly to a kind of device for graphite boat consolidation silicon chip.
Background technology
By the effort of last decade, China has turned into the maximum photovoltaic manufacture in the whole world and photovoltaic application state.Photovoltaic manufactures
It is related to a variety of devices and equipment, wherein, a kind of carrier when graphite boat is solar battery sheet coated with antireflection film.Existing graphite
Boat includes：The graphite accessories such as graphite boat piece, ceramic jacket, ceramic bar, graphite bars, graphite spacer block.Its operation principle is not plate
The silicon chip of film is placed on the stuck point of graphite boat piece, and the silicon chip of fixed qty can be put on each boat piece.Then, graphite boat is placed
In the cavity of PECVD vacuum coating equipments, electric discharge plated film is carried out using pecvd process.After plated film terminates, graphite boat is taken out,
Silicon chip is unloaded from graphite boat and taken off.
Over time, as the important tool of photovoltaic industry, graphite boat generally existing normal use wear and aging
Situation, the success rate of graphite boat loading-unloading plate machine auto loading is directly affected, inserted sheet situation not in place often occurs, to follow-up work
Skill production adversely affects.
The content of the invention
The purpose of the present invention is in view of the above-mentioned drawbacks of the prior art, offer is a kind of to be used for graphite boat consolidation silicon chip
Device.
The technical solution adopted by the present invention is a kind of device for graphite boat consolidation silicon chip, including：
Base；
Detent mechanism, for being positioned to the graphite boat；
One or more vibrating devices, it is arranged on the base, is provided with vibration source and is docked with the detent mechanism
And controllable docking structure, the vibration source are transferred vibrations on the graphite boat by the docking structure.
Preferably, the docking structure includes vibration transmission plate and the elevator with the vibration transmission plate drive connection
Structure, the vibration source are arranged in the vibration transmission plate, and the hoisting mechanism is used to be lifted the vibration transmission plate
So that it achieves a butt joint with the detent mechanism.
Preferably, the hoisting mechanism includes：Cylinder, the push rod of the cylinder with it is described vibration transmission plate drive connection with
For lifting the vibration transmission plate.
Preferably, the cylinder is horizontally placed on the base, and the push rod end of the cylinder is provided with cylinder jacking
Block, the vibration transmission plate downside are provided with the first cushion block, Relative vertical between first cushion block and cylinder jacking block
Set and by contact of incline plane, when the cylinder promotes the cylinder jacking block by the inclined-plane by the first cushion block top
Rise and then jack up the vibration transmission plate.
Preferably, the second cushion block is additionally provided with below the cylinder jacking block to support the cylinder jacking block.
Preferably, the docking structure also includes guiding mechanism, and the guiding mechanism includes the linear bearing of fixed setting
And the guide pillar on the linear bearing is arranged on, the guide pillar is fixedly connected with the vibration transmission plate.
Preferably, in addition to one is arranged on graphite boat conveying device on the base, and the graphite boat conveying device is used
In the top that the graphite boat and the detent mechanism are transported to the vibrating device.
Preferably, the graphite boat conveying device includes：It is arranged on the power source of described base one end and is moved with described
The transmission belt component of the output shaft drive connection in power source.
Preferably, the transmission belt component both sides are additionally provided with for carrying out spacing positive stop strip to the detent mechanism.
Preferably, in addition to position sensor and the controller of signal connection therewith, the controller and the vibration
Device signal connects, and the position sensor is used for the positional information for obtaining the detent mechanism, and the controller is according to
Positional information controls the docking structure to be docked with the detent mechanism.
Compared with prior art, the present invention at least has the advantages that：The present invention is by being arranged on graphite boat bottom
Vibrating device graphite boat is vibrated, conducted oneself with dignity using silicon chip, using stress silicon chip vibration principle, make it along graphite boat stuck point
Inclined working is snapped down on correct position with vibration, and graphite boat stuck point is repositioned to reach the silicon chip for making to fail to insert in place
Interior purpose, it ensure that the accurate of load and unloading piece position.So, solve graphite boat because it is different abrasion, aging conditions and
The problem of caused silicon chip can not be inserted to correct position, extend the service life of graphite boat and reduce maintenance cost.Together
When, for the mixed situation of the old and new's boat, it also ensure that the positional precision of load and unloading piece.
Brief description of the drawings
Fig. 1 is the device and graphite boat matching chart that the present invention is used for graphite boat consolidation silicon chip.
Fig. 2 is the apparatus structure schematic diagram that the present invention is used for graphite boat consolidation silicon chip.
Fig. 3 is the front view of vibrating device in the present invention.
Fig. 4 is the top view of vibrating device in the present invention.
Fig. 5 is the left view of vibrating device in the present invention.
Fig. 6 is the structural representation of detent mechanism in the present invention.
Embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
As shown in Figures 1 and 2, the present invention proposes a kind of device for graphite boat consolidation silicon chip, and it includes：Base
110th, detent mechanism 170 and one or more vibrating devices 150.Wherein, detent mechanism 170 is used for the graphite boat 100
Positioned；One or more vibrating devices 150 are arranged on the base 110, vibrating device 150 be provided with vibration source, with
And docking structure docking and controllable with the detent mechanism 170, the vibration source will be vibrated by the docking structure to be passed
It is delivered on the graphite boat.Wherein, base 110 mainly plays support and fixed to detent mechanism 170 and vibrating device 150
Effect, graphite boat 100 can be placed into the top of vibrating device 150 by detent mechanism 170.The present invention is by being arranged on graphite boat
The vibrating device 150 of 100 bottoms vibrates to graphite boat 100, is conducted oneself with dignity using silicon chip, using stress silicon chip vibration principle, makes
It is snapped down on correct position along the stuck point inclined working of graphite boat 100 with vibration, makes to fail to insert silicon chip weight in place to reach
Purpose in new definition to the stuck point of graphite boat 100, it ensure that the accurate of load and unloading piece position.So, solves graphite boat 100
Because different abrasions, silicon chip can not be inserted to correct position caused by aging conditions the problem of, extend the use of graphite boat
Life-span and reduce maintenance cost.Meanwhile for the situation that the old and new's boat is used with, it also ensure that the positional precision of load and unloading piece.
As in Figure 3-5, as a kind of embodiment, the docking structure of vibrating device 150 include vibration transmission plate 151 with
And the hoisting mechanism 152 being connected with the vibration transmission plate 151, the vibration source 153 are arranged on the vibration transmission plate
On 151, the hoisting mechanism 152 is used to be lifted the vibration transmission plate 151 so that it is real with the detent mechanism 170
Now dock.In the present embodiment, vibration transmission plate 151 and detent mechanism 170 dock can be contact form docking, that is,
Say, vibration transmission plate 151 withstands on the lower section of detent mechanism 170 and is in contact with it after being lifted, fixed so as to transfer vibrations to
In the mechanism 170 of position, and then realize the vibration of graphite boat 100.Vibration source can use hopper wall vibrator in this implementation, can also adopt
With other types of vibrator.
As a kind of structure type of hoisting mechanism 152, it includes：Cylinder 154, the push rod of the cylinder 154 with it is described
Vibration transmission plate 151 is connected for lifting the vibration transmission plate 151.For example, the push rod of cylinder 154 directly with it is described
The downside connection of transmission plate 151 is vibrated, cylinder 154 is vertically arranged, and can be lifted or be declined the vibration transmission plate 151, cylinder
It is provided with adjustable test tube joint 154a.
As a preferred embodiment, the cylinder 154 can be horizontally placed on the base 110, the cylinder 154
Push rod end set a cylinder to jack block 156 by a connecting plate 155, vibration transmission plate 151 downside is provided with first
Relative vertical is set and by contact of incline plane between cushion block 157a, the first cushion block 157a and cylinder jacking block 156, when
The cylinder 154 promotes and is jacked up the first cushion block 157a to jack up by the inclined-plane during cylinder jacking block 156
The vibration transmission plate 151.Such set-up mode make it that the space shared by cylinder 154 is smaller, and then causes whole device
Volume it is smaller.
In the present embodiment, the lower section of cylinder jacking block 156 is additionally provided with the second cushion block 157b to support the gas
Cylinder jacks block 156, thus is avoided that pressure of the push rod by radial direction of cylinder 154, it is ensured that the job security of cylinder 154.
As a further improvement, the docking structure also includes guiding mechanism, and the guiding mechanism includes fixed setting
Linear bearing 158 and the guide pillar 159 that is arranged on the linear bearing 158, the guide pillar 159 and the vibration transmission plate
151 are fixedly connected.Guiding mechanism ensure that path accuracy of the vibration transmission plate 151 in process of rising or falling, so as to also protect
Card vibration transmission plate 151 and the contact surface of detent mechanism 170 are bigger, and it is more preferable to transmit vibration.
Such as Fig. 1-2 and with reference to shown in Fig. 6, as a further improvement, for graphite boat consolidation silicon chip in the present embodiment
Device also includes a graphite boat conveying device 130 being arranged on the base 110, and the graphite boat conveying device 130 is used for
The graphite boat 100 and the detent mechanism 170 are transported to the top of the vibrating device 150.Graphite so can be achieved
Boat 100 carries out the purpose of automatic consolidation silicon chip after auto loading is carried out, so as to realize the automation of whole process.
As a kind of embodiment of graphite boat conveying device, it includes：It is arranged on the power source of described one end of base 110
131 and the transmission belt component 132 that is connected with the output shaft of the power source 131.The quantity of transmission belt component 132 is two
It is individual, the two edges position of the bottom surface of detent mechanism 170 is corresponded to respectively, and so as to ensure the stationarity of transmission, power source 131 can be
Motor.Certainly, the structure of other forms is can also be as other embodiments, graphite boat conveying device, for example, can lead to
The transmission structure mode for crossing slide rail and sliding block is transmitted or the mode of live-roller is transmitted.
In the present embodiment, the both sides of transmission belt component 132 are additionally provided with for limiting the detent mechanism 170
The positive stop strip 134 of position.Pass through the spacing accuracy for ensureing positioner and being run on transmission belt component 132 of positive stop strip 134.
In the present embodiment, in order to realize the control mode of automation, the device for graphite boat consolidation silicon chip also includes
Position sensor 133 and the therewith controller of signal connection（It is not shown）, the controller and the signal of vibrating device 150
Connection, the position sensor 133 are used for the positional information for obtaining the detent mechanism 170, and the controller is according to institute's rheme
Confidence breath controls the docking structure to be docked with the detent mechanism 170.To use air cylinder lifting to vibrate in the present embodiment
Exemplified by the mode of transmission plate 151, after position sensor 133 senses positioner 170 and graphite boat thereon in place, position
Signal passes to controller, and controller controls cylinder 154 to start according to position signalling makes it with determining to lift vibration transmission plate 151
Position mechanism contacts, now vibration source start working, complete the consolidation of silicon chip, in whole process, graphite boat is placed on detent mechanism,
It is unaffected to ensure that its subsequent technique can be normally carried out.
Above-described embodiment is merely to illustrate the embodiment of the present invention.It should be pointed out that for the general of this area
For logical technical staff, without departing from the inventive concept of the premise, some deformations and change can also be made, these deformations and
Change should all belong to protection scope of the present invention.
Claims (10)
- A kind of 1. device for graphite boat consolidation silicon chip, it is characterised in that including：Base；Detent mechanism, for being positioned to the graphite boat；One or more vibrating devices, it is arranged on the base, is provided with vibration source and is docked with the detent mechanism And controllable docking structure, the vibration source are transferred vibrations on the graphite boat by the docking structure.
- 2. the device according to claim 1 for graphite boat consolidation silicon chip, it is characterised in that the docking structure includes Vibrate transmission plate and the hoisting mechanism with the vibration transmission plate drive connection, the vibration source are arranged on the vibration and transmitted On plate, the hoisting mechanism is used to be lifted the vibration transmission plate so that it achieves a butt joint with the detent mechanism.
- 3. the device according to claim 2 for graphite boat consolidation silicon chip, it is characterised in that the hoisting mechanism bag Include：Cylinder, the push rod of the cylinder is with the vibration transmission plate drive connection for the lifting vibration transmission plate.
- 4. the device according to claim 3 for graphite boat consolidation silicon chip, it is characterised in that the cylinder is horizontally placed at On the base, the push rod end of the cylinder is provided with cylinder jacking block, and first is provided with the downside of the vibration transmission plate Cushion block, Relative vertical is set and by contact of incline plane between first cushion block and cylinder jacking block, when the cylinder pushes away First cushion block is jacked up to jack up the vibration transmission plate by the inclined-plane during the dynamic cylinder jacking block.
- 5. the device according to claim 4 for graphite boat consolidation silicon chip, it is characterised in that under the cylinder jacking block Side is additionally provided with the second cushion block to support the cylinder jacking block.
- 6. the device according to claim 2 for graphite boat consolidation silicon chip, it is characterised in that the docking structure also wraps Guiding mechanism is included, the guiding mechanism includes the linear bearing being fixedly installed and the guide pillar being arranged on the linear bearing, The guide pillar is fixedly connected with the vibration transmission plate.
- 7. the device according to claim 1 for graphite boat consolidation silicon chip, it is characterised in that be also arranged on institute including one The graphite boat conveying device on base is stated, the graphite boat conveying device is used for the graphite boat and the detent mechanism is defeated It is sent to the top of the vibrating device.
- 8. the device according to claim 7 for graphite boat consolidation silicon chip, it is characterised in that the graphite boat conveying dress Put including：It is arranged on the power source of described base one end and the transmission belt group with the output shaft drive connection of the power source Part.
- 9. the device according to claim 8 for graphite boat consolidation silicon chip, it is characterised in that the transmission belt component two Side is additionally provided with for carrying out spacing positive stop strip to the detent mechanism.
- 10. the device according to claim 7 for graphite boat consolidation silicon chip, it is characterised in that also including position sensing The controller that device and therewith signal connect, the controller are connected with the vibrating device signal, and the position sensor is used In the positional information for obtaining the detent mechanism, the controller according to the positional information control the docking structure with it is described Detent mechanism is docked.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711320292.7A CN107845704B (en) | 2017-12-12 | 2017-12-12 | Device for arranging silicon wafers on graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711320292.7A CN107845704B (en) | 2017-12-12 | 2017-12-12 | Device for arranging silicon wafers on graphite boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107845704A true CN107845704A (en) | 2018-03-27 |
| CN107845704B CN107845704B (en) | 2024-03-26 |
Family
ID=61664904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711320292.7A Active CN107845704B (en) | 2017-12-12 | 2017-12-12 | Device for arranging silicon wafers on graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107845704B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108878329A (en) * | 2018-07-19 | 2018-11-23 | 深圳市捷佳伟创新能源装备股份有限公司 | For detecting the detection device, silicon wafer processing system and detection method of position of silicon wafer |
| CN115962630A (en) * | 2022-12-28 | 2023-04-14 | 无锡亚电智能装备有限公司 | Graphite boat draining groove |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010045630A (en) * | 1999-11-05 | 2001-06-05 | 윤종용 | Apparatus for moving boat and wafer in semiconductor vertical diffusion furnace |
| JP2005300524A (en) * | 2004-03-17 | 2005-10-27 | Toyota Motor Corp | Vibration transmission property analyzer for engine block and vibration transmission property analysis method using above analyzer |
| KR20100029661A (en) * | 2008-09-08 | 2010-03-17 | (주)에이에스티 | Lead frame loading system |
| CN204396558U (en) * | 2014-11-02 | 2015-06-17 | 合肥联鑫智能科技有限公司 | Automatic pipebender |
| CN205011836U (en) * | 2015-08-12 | 2016-02-03 | 深圳丰盛装备股份有限公司 | Graphite boat positioner |
| CN205050814U (en) * | 2015-07-20 | 2016-02-24 | 宁波精达成形装备股份有限公司 | Silicon chip feeding and discharging device |
| CN105951059A (en) * | 2016-06-27 | 2016-09-21 | 常州亿晶光电科技有限公司 | Fully-automatic tubular PECVD graphite boat process point installation device |
| CN205621702U (en) * | 2016-05-18 | 2016-10-05 | 上海柏凌电子科技有限公司 | Latent detection device that splits of silicon chip |
| CN207637826U (en) * | 2017-12-12 | 2018-07-20 | 深圳市捷佳伟创新能源装备股份有限公司 | Device for graphite boat consolidation silicon chip |
-
2017
- 2017-12-12 CN CN201711320292.7A patent/CN107845704B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010045630A (en) * | 1999-11-05 | 2001-06-05 | 윤종용 | Apparatus for moving boat and wafer in semiconductor vertical diffusion furnace |
| JP2005300524A (en) * | 2004-03-17 | 2005-10-27 | Toyota Motor Corp | Vibration transmission property analyzer for engine block and vibration transmission property analysis method using above analyzer |
| KR20100029661A (en) * | 2008-09-08 | 2010-03-17 | (주)에이에스티 | Lead frame loading system |
| CN204396558U (en) * | 2014-11-02 | 2015-06-17 | 合肥联鑫智能科技有限公司 | Automatic pipebender |
| CN205050814U (en) * | 2015-07-20 | 2016-02-24 | 宁波精达成形装备股份有限公司 | Silicon chip feeding and discharging device |
| CN205011836U (en) * | 2015-08-12 | 2016-02-03 | 深圳丰盛装备股份有限公司 | Graphite boat positioner |
| CN205621702U (en) * | 2016-05-18 | 2016-10-05 | 上海柏凌电子科技有限公司 | Latent detection device that splits of silicon chip |
| CN105951059A (en) * | 2016-06-27 | 2016-09-21 | 常州亿晶光电科技有限公司 | Fully-automatic tubular PECVD graphite boat process point installation device |
| CN207637826U (en) * | 2017-12-12 | 2018-07-20 | 深圳市捷佳伟创新能源装备股份有限公司 | Device for graphite boat consolidation silicon chip |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108878329A (en) * | 2018-07-19 | 2018-11-23 | 深圳市捷佳伟创新能源装备股份有限公司 | For detecting the detection device, silicon wafer processing system and detection method of position of silicon wafer |
| CN115962630A (en) * | 2022-12-28 | 2023-04-14 | 无锡亚电智能装备有限公司 | Graphite boat draining groove |
| CN115962630B (en) * | 2022-12-28 | 2023-12-01 | 无锡亚电智能装备有限公司 | Graphite boat draining groove |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107845704B (en) | 2024-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207637826U (en) | Device for graphite boat consolidation silicon chip | |
| CN103910101B (en) | Scan weigh labelling machine and using method thereof | |
| CN109119354B (en) | Solar cell efficiency testing method | |
| CN107845704A (en) | A kind of device for graphite boat consolidation silicon chip | |
| CN217335386U (en) | Rotor dynamic balance measurement correction equipment | |
| JP4799856B2 (en) | Structure levitation control device and levitation control method | |
| CN108545468A (en) | A kind of automatic stack feeder of silicon chip with weight detecting function | |
| CN111822371A (en) | Long steel pipe transmission and detection screening device | |
| CN209427659U (en) | Ceramic tile surface pattern detection machine, which is matched, applies jacking conveying equipment | |
| CN107806852A (en) | A kind of robot of automatic detection plate parts flatness | |
| CN214149542U (en) | Single-clad welded pipe automatic weighing device | |
| TWI735741B (en) | Transportation system and transportation method | |
| CN203602052U (en) | Bottle stack lifting mechanism of bottle stack unloading machine | |
| CN210108255U (en) | Electromagnetic clutch flatness detection device | |
| CN218646205U (en) | Optical lens piece thickness detection device | |
| CN107200272B (en) | A kind of righting mechanism for sling lifting station | |
| CN109794421A (en) | A kind of visual identity detection stacking counting apparatus | |
| CN115593873A (en) | Send board test assembly line | |
| CN109361296B (en) | ABS motor rotor eccentric shaft press-fitting device | |
| CN204470145U (en) | A kind of point oil pump assembly/assembly air tightness detection machine | |
| CN109746162B (en) | Automatic dispensing and drying equipment and working method thereof | |
| CN105880176A (en) | Oil distribution pump component/assembly air tightness detection machine and use method thereof | |
| JP6429789B2 (en) | Circuit board support system | |
| CN219790737U (en) | Double-station measuring station | |
| CN107570981B (en) | Rotor feeding system and feeding method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 518000 D Silicon Valley, Guangdong Province, Longgang, Henggang, Shenzhen No. 89 Ping Ping Road, No. Applicant after: SHENZHEN HEADQUARTER: S.C NEW ENERGY TECHNOLOGY Corp. Address before: 518000 R & D Office of D Silicon Valley, No. 89 Heng Ping highway, Longgang street, Shenzhen, Guangdong. Applicant before: SHENZHEN HEADQUARTER: S.C NEW ENERGY TECHNOLOGY Corp. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |