CN107843986A - Manual variable optical systems and its method based on VCSEL laser diodes composition - Google Patents

Manual variable optical systems and its method based on VCSEL laser diodes composition Download PDF

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Publication number
CN107843986A
CN107843986A CN201711057008.1A CN201711057008A CN107843986A CN 107843986 A CN107843986 A CN 107843986A CN 201711057008 A CN201711057008 A CN 201711057008A CN 107843986 A CN107843986 A CN 107843986A
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China
Prior art keywords
lens
optical lens
vcsel
light
homogenizing
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CN201711057008.1A
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Inventor
罗玉辉
何兵
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Shenzhen New Bright Intelligent Technology Co Ltd
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Shenzhen New Bright Intelligent Technology Co Ltd
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Priority to CN201711057008.1A priority Critical patent/CN107843986A/en
Publication of CN107843986A publication Critical patent/CN107843986A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0916Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
    • G02B27/0922Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers the semiconductor light source comprising an array of light emitters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Abstract

The invention discloses a kind of manual variable optical systems and its method based on VCSEL laser diodes composition, the system includes VCSEL laser diodes, homogenizes device, lens mount and optical lens;By homogenizing device after VCSEL chip arrays transmitting laser, the transmitting laser Gauss light shaping or homogenize by homogenizing device, it is radiated on object;The light transmitted again by optical lens to object does secondary Gauss light shaping or homogenized;Secondary Gauss light shaping changes the uniformity of light beam after homogenizing and makes light beam in focusing on or expand state;And movement is made to change the size of beam divergence angle by mobile optical lens.It is of the invention to make its light beam rearrangement and control laser beam divergent angle with optical system, so as to realize transmitance with, further according to the variable mirror-seat structure of its screw thread, the real-time regulation to its spot size manually can be achieved, to realize different angles while uniformity raising.

Description

Manual variable optical systems and its method based on VCSEL laser diodes composition
Technical field
The present invention relates to semiconductor laser field, more particularly to it is a kind of based on VCSEL laser diodes composition Manual variable optical systems and its method.
Background technology
The past during the decade, in field of semiconductor lasers, the edge-emission semiconductor laser based on GaAs materials is always Dominant position is occupied, and is widely used in the fields such as industry, medical treatment, scientific research.However, but there is it in edge-emission semiconductor laser The defects of fatal, although its life expectancy is up to tens thousand of hours, edge-emitting laser because one is single-point laser light source, Corresponding technical requirements can not all be reached completely in terms of thermal conductivity transmission and its laser eye safety, because its heat conductivility does not reach The reason for being worked under 60 degree of environment above, or causing permanent failure after work, causes application field to be limited;Simultaneously because it is adopted With single-point laser light source, add the technology that direct current generator rotates by means of frosted glass in terms of optics homogenizes processing, it is possible to cause Electromechanics fails, and has dry point after beam homogenization, so as to influence beam quality, furthermore, because it increases its material(Direct current generator Or frosted glass)Make 5-10 times that cost is this product, accordingly, it is desirable to provide a kind of new semiconductor available for industrial circle swashs Light device.
In field of semiconductor lasers, according to the relation of vertical plane where light emission direction and laser chip, laser can Be divided into vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser, abbreviation VCSEL) with Edge-emission semiconductor laser (Edge Emitting Laser Diode) two classes.Wherein, the hair of vertical cavity surface emitting laser Light direction is perpendicular to laser cavity surface direction, and from the top surface injection of cavity, and the light emission direction of edge-emission semiconductor laser is put down Row projects in epitaxial wafer direction from the edge of reaction zone.
Edge-emission semiconductor laser and VCSEL have following features respectively:Edge-emission semiconductor laser is linear light Source, because its light beam in process of production by lens compresses its angle, it is in the angle of divergence both vertically and horizontally Greatly (for vertical direction full-shape about at 60~70 degree or so, horizontal direction full-shape is about at 7~10 degree or so, in 10 for difference:1 light Beam rectangular profile), and spike distribution is presented in its far field light intensity;And VCSEL is sphere shape light, the smaller (hair of its angle of divergence It is about 22 degree or so to dissipate angle full-shape), its far field light intensity approximation flat-top distribution, Energy distribution is evenly.Therefore, partly led with edge emitting Body laser is compared, and evenly, and Gaussian Energy Distribution is uniform on far field objects thing for the light of VCSEL transmittings.In addition, with The advantages of edge-emission semiconductor laser is compared, and VCSEL also has other, such as:With higher operating temperature, it is contemplated that the longevity Order that longer and fault rate is low, degradation shows that the theoretical life-span of VCSEL laser diodes has reached 50000 hours, and can So that using planar package, packaging technology requires lower.However, due to traditional VCSEL because relatively low opto-electronic conversion is imitated Rate and higher production cost, it is set never to obtain excessive concern in market competition.
With advances in technology, VCSEL gradually realizes the high-power output close to edge-emission semiconductor laser, together When due to its unique structure, its apply present in plurality of advantages, such as high reliability, high temperature resistant, uniform optical distribution, resistance to Adverse circumstances etc..Furthermore multiple spot LASER Light Source will be may require that due to the progress of its existing industrial technology, in market to be applied to Gesture identification, recognition of face, 3D sensings etc., it will bring a brand-new revolution to VCSEL laser fields.It is but existing VCSEL can not adjust the angle of divergence of light beam, therefore can not meet range requirement of the different user to different angle.
The content of the invention
For weak point present in above-mentioned technology, the present invention provides a kind of based on VCSEL laser diodes composition Manual variable optical systems and its method, transmitting laser do a Gauss light by homogenizing device and homogenized and shaping, then passes through again Cross the secondary Gauss light of optical lens to homogenize and shaping, the laser beam of the different angles of divergence is obtained after finally focusing on or expand, with reality Existing different angle.
To achieve the above object, the present invention provides a kind of manual variable optical system based on VCSEL laser diodes composition System, including VCSEL laser diodes, homogenize device, lens mount and optical lens;The VCSEL laser diodes it is luminous in The heart, homogenize device and optical lens three is centrally located on same horizontal linear;The VCSEL laser diodes include by The VCSEL chip arrays of multiple VCSEL chips compositions;
The device that homogenizes homogenizes body another side including homogenizing body, being arranged on the smooth surface for homogenizing body one side and be arranged on Grating etching face, the smooth surface cover the light-emitting zone of VCSEL chip arrays and perpendicular to the light-emitting areas of VCSEL chip arrays;
The inside dimension of the lens mount is adapted with the full-size of optical lens, and in being internally provided with of the lens mount Screw thread, the outer surface of the optical lens are provided with the external screw thread being adapted with internal thread, and the optical lens passes through internal thread Formula can be moved up and down in lens mount with externally threaded be adapted;By the mobile change optical lens of optical lens with it is even Change the distance between device;
The area of the optical lens is more than the surface area for homogenizing device, and the grating etching face for homogenizing device is located at lens mount Underface, and the plane of the optical lens is perpendicular to the grating etching face for homogenizing device;
By homogenizing device after the VCSEL chip arrays transmitting laser, by homogenizing being carried out once to the transmitting laser for device Gauss light shaping homogenizes, and it is radiated on object;The light transmitted again by optical lens to object does secondary height This light shaping homogenizes;Secondary Gauss light shaping changes the uniformity of light beam after homogenizing and makes light beam in focusing on or expand state; And movement is made to change the size of beam divergence angle by mobile optical lens.
Wherein, when the optical lens is convex lens, light beam is in focus state;When the lower surface of convex lens is in lens mount Top and distance homogenize device it is farthest when, beam emissions angle be 4.8 degree;Lens mount bottom is in when convex lens are displaced downwardly to its lower surface End and distance homogenize device it is nearest when, beam emissions angle be 55 degree.
Wherein, when the optical lens is concavees lens, light beam is in expand state;When the lower surface of concavees lens is in lens mount Bottom and distance homogenize device it is nearest when, beam emissions angle be 60 degree;Lens mount top is in when moving to its lower surface on concavees lens End and distance homogenize device it is farthest when, beam emissions angle be 88 degree.
Wherein, the system also includes regulating jig, and the bottom of the regulating jig is provided with the bayonet socket of clamping optical lens, After optical lens is caught in bayonet socket, position of the optical lens in lens mount is adjusted by regulating jig.
Wherein, the system also includes stake body, and the lens mount is fixed in stake body, and the device that homogenizes is fixed on branch In the bottom of support body.
Wherein, the device also includes base, is fixed on after the VCSEL laser diode packages by gum on base.
Wherein, the VCSEL chip arrays are in parallel array, product word array or four parallel array distributions.
Wherein, it is described to homogenize device to homogenize film.
To achieve the above object, the present invention also provides a kind of manual variable optical based on VCSEL laser diodes composition Method, this method be VCSEL laser diodes launch laser after by homogenizing hair device, by homogenize device to the transmitting laser Carry out a Gauss light shaping or homogenize, it is radiated on object;The light transmitted again by optical lens to object Do secondary Gauss light shaping or homogenize;Secondary Gauss light shaping changes the uniformity of light beam after homogenizing and makes light beam in focusing on or expand Pencil state;And movement is made to change the size of beam divergence angle by mobile optical lens;
When the optical lens is convex lens, light beam is in focus state;When the lower surface of convex lens be in lens mount top and away from From homogenize device it is farthest when, beam emissions angle be 4.8 degree;Lens mount bottom and distance are in when convex lens are displaced downwardly to its lower surface Homogenize device it is nearest when, beam emissions angle be 55 degree;
When the optical lens is concavees lens, light beam is in expand state;When the lower surface of concavees lens be in lens mount bottom and away from From homogenize device it is nearest when, beam emissions angle be 60 degree;Lens mount top and distance are in when moving to its lower surface on concavees lens Homogenize device it is farthest when, beam emissions angle be 88 degree.
The beneficial effects of the invention are as follows:Compared with prior art, it is provided by the invention to be formed based on VCSEL laser diodes Manual variable optical systems and its method, the system include VCSEL laser diodes, homogenize device, lens mount and optical lens Mirror, the improvement of said system structure, adjust optical lens using screw thread variable technique manually and homogenize the distance between device, To change the size of beam divergence angle;Realize that laser facula can root using homogenizing while device carries out a Gauss light shaping Different spot sizes is realized according to different required distances, this structure can dissipate its laser beam, realize the wider model of laser The diverging requirement enclosed, it is possibility to have effect converging beam, further converge the optical power density of exiting surface.This structure fully should Possess its wide market space for industrial machine vision or security protection laser night vision field, can fully save its end user's Development time and meet range requirement of the different user to different angle, light beam can be realized by adjusting optical system manually with this set Effective manual angle adjustable of the angle of divergence from 4.8 degree to 88 degree, this structure can be used for industrial automation, safety monitoring, automobile night Depending on illumination, the multiple fields such as automobile assistant driving system.The present invention can make its light beam rearrangement and control laser with optical system Beam divergence angle, so as to realize transmitance with, further according to the variable mirror-seat structure of its screw thread, hand can be achieved while uniformity raising The dynamic real-time regulation to its spot size, to realize different angles.
Brief description of the drawings
Fig. 1 is to homogenize showing for device in the manual variable optical systems based on VCSEL laser diodes composition in the present invention It is intended to;
Fig. 2 is the smooth surface structure chart that device is homogenized in Fig. 1;
Fig. 3 is the grating etching face structure chart that device is homogenized in Fig. 1;
Fig. 4 is the sectional view that optical lens is convex lens;
Fig. 5 is the structural representation that beam divergence angle is 4.8 degree when product focuses on;
Fig. 6 is the structural representation that beam divergence angle is 55 degree when product focuses on;
Fig. 7 is the sectional view that optical lens is concavees lens;
Fig. 8 is the structural representation that beam divergence angle is 60 degree when product expands;
Fig. 9 is the structural representation that beam divergence angle is 88 degree when product expands;
Figure 10 is the use state figure of regulating jig.
Embodiment
In order to more clearly state the present invention, the present invention is further described below in conjunction with the accompanying drawings.
Refer to Fig. 1-10, the manual variable optical systems provided by the invention based on VCSEL laser diodes composition, bag Include VCSEL laser diodes 10, homogenize device 11, lens mount 12 and optical lens;The VCSEL laser diodes it is luminous in The heart, homogenize device and optical lens three is centrally located on same horizontal linear;The VCSEL laser diodes include by The VCSEL chip arrays of multiple VCSEL chips compositions;
The device that homogenizes includes homogenizing body 111, is arranged on the smooth surface 112 for homogenizing body one side and is arranged on that to homogenize body another Grating etching face 113 simultaneously, the smooth surface cover the light-emitting zone of VCSEL chip arrays and perpendicular to VCSEL chip arrays Light-emitting area;
The inside dimension of the lens mount is adapted with the full-size of optical lens, and in being internally provided with of the lens mount Screw thread 121, the outer surface of the optical lens are provided with the external screw thread being adapted with internal thread, and the optical lens passes through interior spiral shell Line can move up and down formula in lens mount with externally threaded be adapted;By the mobile change optical lens of optical lens with Homogenize the distance between device;
The area of the optical lens is more than the surface area for homogenizing device, and the grating etching face for homogenizing device is located at lens mount Underface, and the plane of the optical lens is perpendicular to the grating etching face for homogenizing device;
By homogenizing device after the VCSEL chip arrays transmitting laser, by homogenizing being carried out once to the transmitting laser for device Gauss light shaping homogenizes, and it is radiated on object;The light transmitted again by optical lens to object does secondary height This light shaping homogenizes;Secondary Gauss light shaping changes the uniformity of light beam after homogenizing and makes light beam in focusing on or expand state; And movement is made to change the size of beam divergence angle by mobile optical lens.
The present invention using transmitting light of the device to VCSEL chip arrays is homogenized arrange again simultaneously after effectively upsetting sequence Reset, it is radiated on object;It is controlled by the optical grating point distribution density of the grating etching face for homogenizing device of design Upset VCSEL laser diodes beam distribution state lay equal stress on arrangement arrangement beam divergence angle after;Again by optical lens again Making Gauss light shaping or homogenize and finally changing its beam uniformity makes light beam in focusing on or expand state.Can with the optical system Make its light beam rearrangement and control laser beam divergent angle, so as to realize that transmitance can further according to its screw thread with uniformity while raising Become mirror-seat structure, the real-time regulation to its spot size manually can be achieved.
In the present embodiment, when the optical lens is convex lens 13A, light beam is in focus state;When the lower end of convex lens Face is in lens mount top and distance homogenize device it is farthest when, beam emissions angle is 4.8 degree;When convex lens are displaced downwardly to its lower surface In lens mount bottom and distance homogenize device it is nearest when, beam emissions angle is 55 degree.
In the present embodiment, when the optical lens is concavees lens 13B, light beam is in expand state;When the lower end of concavees lens Face is in lens mount bottom and distance homogenize device it is nearest when, beam emissions angle is 60 degree;When moving to its lower surface on concavees lens In lens mount top and distance homogenize device it is farthest when, beam emissions angle is 88 degree.
In the present embodiment, the system also includes regulating jig 14, and the bottom of the regulating jig is provided with clamping optics The bayonet socket of lens, after optical lens is caught in bayonet socket, position of the optical lens in lens mount is adjusted by regulating jig.This case In be not limited to the concrete structure of regulating jig, as long as can realize either manually or by regulating jig regulation optical lens movement reality Mode is applied, the simple transformation or change of this case is belonged to, falls into the protection domain of this case.
In the present embodiment, the system also includes stake body 15, and the lens mount is fixed in stake body, the homogenizer Part is fixed in the bottom of stake body.The device also includes base 16, passes through gum 17 after the VCSEL laser diode packages It is fixed on base.
In the present embodiment, the VCSEL chip arrays are in parallel array, product word array or four parallel array distributions. It is, of course, also possible to it is in other kinds of array distribution.It is described to homogenize device to homogenize film.The outside of lens mount can be hexagon added Fillet, can also be other structures certainly.
To achieve the above object, the present invention also provides a kind of manual variable optical based on VCSEL laser diodes composition Method, this method be VCSEL laser diodes launch laser after by homogenizing hair device, by homogenize device to the transmitting laser Carry out a Gauss light shaping or homogenize, it is radiated on object;The light transmitted again by optical lens to object Do secondary Gauss light shaping or homogenize;Secondary Gauss light shaping changes the uniformity of light beam after homogenizing and makes light beam in focusing on or expand Pencil state;And movement is made to change the size of beam divergence angle by mobile optical lens;
When the optical lens is convex lens, light beam is in focus state;When the lower surface of convex lens be in lens mount top and away from From homogenize device it is farthest when, beam emissions angle be 4.8 degree;Lens mount bottom and distance are in when convex lens are displaced downwardly to its lower surface Homogenize device it is nearest when, beam emissions angle be 55 degree;
When the optical lens is concavees lens, light beam is in expand state;When the lower surface of concavees lens be in lens mount bottom and away from From homogenize device it is nearest when, beam emissions angle be 60 degree;Lens mount top and distance are in when moving to its lower surface on concavees lens Homogenize device it is farthest when, beam emissions angle be 88 degree.
Compared to prior art, the manual variable optical systems provided by the invention based on VCSEL laser diodes composition And its method, the system include VCSEL laser diodes, homogenize device, lens mount and optical lens, said system structure changes Enter, adjust optical lens using screw thread variable technique manually and homogenize the distance between device, to change beam divergence angle Size;Realize that laser facula can be real according to different required distances while device carries out a Gauss light shaping using homogenizing Existing different spot size, this structure can dissipate its laser beam, realize the diverging requirement of laser wider scope, can also Effective converging beam, further converge the optical power density of exiting surface.This structure be fully applicable to industrial machine vision or Security protection laser night vision field possesses its wide market space, and the development time that can fully save its end user is different with satisfaction For user to the range requirement of different angle, adjusting optical system manually with this set can realize beam divergence angle from 4.8 degree to 88 Effective manual angle adjustable of degree, this structure can be used for industrial automation, safety monitoring, vehicle night vision illumination, and automobile auxiliary is driven Sail the multiple fields such as system.The present invention can make its light beam rearrangement and control laser beam divergent angle with optical system, so as to real Further according to the variable mirror-seat structure of its screw thread while existing transmitance improves with uniformity, can be achieved manually to the reality of its spot size When adjust, to realize different angles.
Disclosed above is only several specific embodiments of the present invention, but the present invention is not limited to this, any ability What the technical staff in domain can think change should all fall into protection scope of the present invention.

Claims (9)

  1. A kind of 1. manual variable optical systems based on VCSEL laser diodes composition, it is characterised in that the pole of VCSEL laser two Manage, homogenize device, lens mount and optical lens;The centre of luminescence of the VCSEL laser diodes, homogenize device and optical lens Three is centrally located on same horizontal linear;The VCSEL laser diodes include what is be made up of multiple VCSEL chips VCSEL chip arrays;
    The device that homogenizes homogenizes body another side including homogenizing body, being arranged on the smooth surface for homogenizing body one side and be arranged on Grating etching face, the smooth surface cover the light-emitting zone of VCSEL chip arrays and perpendicular to the light-emitting areas of VCSEL chip arrays;
    The inside dimension of the lens mount is adapted with the full-size of optical lens, and in being internally provided with of the lens mount Screw thread, the outer surface of the optical lens are provided with the external screw thread being adapted with internal thread, and the optical lens passes through internal thread Formula can be moved up and down in lens mount with externally threaded be adapted;By the mobile change optical lens of optical lens with it is even Change the distance between device;
    The area of the optical lens is more than the surface area for homogenizing device, and the grating etching face for homogenizing device is located at lens mount Underface, and the plane of the optical lens is perpendicular to the grating etching face for homogenizing device;
    By homogenizing device after the VCSEL chip arrays transmitting laser, by homogenizing being carried out once to the transmitting laser for device Gauss light shaping homogenizes, and it is radiated on object;The light transmitted again by optical lens to object does secondary height This light shaping homogenizes;Secondary Gauss light shaping changes the uniformity of light beam after homogenizing and makes light beam in focusing on or expand state; And movement is made to change the size of beam divergence angle by mobile optical lens.
  2. 2. the manual variable optical systems according to claim 1 based on VCSEL laser diodes composition, its feature exist In when the optical lens is convex lens, light beam is in focus state;When the lower surface of convex lens is in lens mount top and distance Homogenize device it is farthest when, beam emissions angle be 4.8 degree;Lens mount bottom is in when convex lens are displaced downwardly to its lower surface and apart from even When change device is nearest, beam emissions angle is 55 degree.
  3. 3. the manual variable optical systems according to claim 1 based on VCSEL laser diodes composition, its feature exist In when the optical lens is concavees lens, light beam is in expand state;When the lower surface of concavees lens is in lens mount bottom and distance Homogenize device it is nearest when, beam emissions angle be 60 degree;Lens mount top is in when moving to its lower surface on concavees lens and apart from even When change device is farthest, beam emissions angle is 88 degree.
  4. 4. the manual variable optical systems according to claim 1 based on VCSEL laser diodes composition, its feature exist In the system also includes regulating jig, and the bottom of the regulating jig is provided with the bayonet socket of clamping optical lens, optical lens card After in card inlet, position of the optical lens in lens mount is adjusted by regulating jig.
  5. 5. the manual variable optical systems according to claim 1 based on VCSEL laser diodes composition, its feature exist In the system also includes stake body, and the lens mount is fixed in stake body, the bottom for homogenizing device and being fixed on stake body It is interior.
  6. 6. the manual variable optical systems according to claim 1 based on VCSEL laser diodes composition, its feature exist In the device also includes base, is fixed on after the VCSEL laser diode packages by gum on base.
  7. 7. the manual variable optical systems according to claim 6 based on VCSEL laser diodes composition, its feature exist In the VCSEL chip arrays are in parallel array, product word array or four parallel array distributions.
  8. 8. the manual variable optical systems according to claim 1 based on VCSEL laser diodes composition, its feature exist In described to homogenize device to homogenize film.
  9. 9. the manual variable optical method based on VCSEL laser diodes composition, it is characterised in that this method is VCSEL laser By homogenizing device after diodes emitting laser light, by homogenize device to the transmitting laser carry out a Gauss light shaping or even Change, it is radiated on object;The light transmitted again by optical lens to object does secondary Gauss light shaping or homogenized; Secondary Gauss light shaping changes the uniformity of light beam after homogenizing and makes light beam in focusing on or expand state;And pass through mobile optical lens Mirror makes movement to change the size of beam divergence angle;
    When the optical lens is convex lens, light beam is in focus state;When the lower surface of convex lens be in lens mount top and away from From homogenize device it is farthest when, beam emissions angle be 4.8 degree;Lens mount bottom and distance are in when convex lens are displaced downwardly to its lower surface Homogenize device it is nearest when, beam emissions angle be 55 degree;
    When the optical lens is concavees lens, light beam is in expand state;When the lower surface of concavees lens be in lens mount bottom and away from From homogenize device it is nearest when, beam emissions angle be 60 degree;Lens mount top and distance are in when moving to its lower surface on concavees lens Homogenize device it is farthest when, beam emissions angle be 88 degree.
CN201711057008.1A 2017-11-01 2017-11-01 Manual variable optical systems and its method based on VCSEL laser diodes composition Pending CN107843986A (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111308725A (en) * 2020-04-02 2020-06-19 杭州欧镭激光技术有限公司 Light beam shaping device for laser radar and shaping method of far-field light spot
CN112361234A (en) * 2020-11-17 2021-02-12 中国科学院长春光学精密机械与物理研究所 VCSEL laser illumination homogenization system

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US20090097522A1 (en) * 2006-02-03 2009-04-16 John Justice Vertical cavity surface emitting laser device
CN201805141U (en) * 2010-07-15 2011-04-20 武汉滨湖电子有限责任公司 Uniform laser ray device based on high-power semi-conductor laser
CN102608855A (en) * 2012-03-19 2012-07-25 中国科学院半导体研究所 Lamp optical system for projected display of 3-LCOS (Liquid Crystal On Silicon) laser
CN105204167A (en) * 2014-06-30 2015-12-30 山东华光光电子有限公司 Edge emission laser illumination module group with insulated shell
CN105739102A (en) * 2016-01-15 2016-07-06 深圳市三千米光电科技有限公司 Infrared laser smoothing system based on VCSEL

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090097522A1 (en) * 2006-02-03 2009-04-16 John Justice Vertical cavity surface emitting laser device
CN201805141U (en) * 2010-07-15 2011-04-20 武汉滨湖电子有限责任公司 Uniform laser ray device based on high-power semi-conductor laser
CN102608855A (en) * 2012-03-19 2012-07-25 中国科学院半导体研究所 Lamp optical system for projected display of 3-LCOS (Liquid Crystal On Silicon) laser
CN105204167A (en) * 2014-06-30 2015-12-30 山东华光光电子有限公司 Edge emission laser illumination module group with insulated shell
CN105739102A (en) * 2016-01-15 2016-07-06 深圳市三千米光电科技有限公司 Infrared laser smoothing system based on VCSEL

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111308725A (en) * 2020-04-02 2020-06-19 杭州欧镭激光技术有限公司 Light beam shaping device for laser radar and shaping method of far-field light spot
CN111308725B (en) * 2020-04-02 2023-11-14 杭州欧镭激光技术有限公司 Beam shaping device for laser radar and shaping method of beam shaping device for laser radar on far-field light spots
CN112361234A (en) * 2020-11-17 2021-02-12 中国科学院长春光学精密机械与物理研究所 VCSEL laser illumination homogenization system

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