CN107838508B - Electrolytic machining device and equipment for inner wall microstructure - Google Patents
Electrolytic machining device and equipment for inner wall microstructure Download PDFInfo
- Publication number
- CN107838508B CN107838508B CN201711341310.XA CN201711341310A CN107838508B CN 107838508 B CN107838508 B CN 107838508B CN 201711341310 A CN201711341310 A CN 201711341310A CN 107838508 B CN107838508 B CN 107838508B
- Authority
- CN
- China
- Prior art keywords
- wall
- processed
- mask plate
- liquid outlet
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003754 machining Methods 0.000 title claims abstract description 35
- 239000007788 liquid Substances 0.000 claims abstract description 121
- 239000007921 spray Substances 0.000 claims abstract description 49
- 239000003792 electrolyte Substances 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims abstract description 27
- 238000003860 storage Methods 0.000 claims abstract description 18
- 238000005507 spraying Methods 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 4
- 238000007688 edging Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 abstract description 53
- 238000011010 flushing procedure Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/10—Supply or regeneration of working media
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The embodiment of the application discloses an electrolytic machining device and equipment for an inner wall microstructure, wherein the electrolytic machining device comprises a workbench, a clamp, a liquid storage tank, a liquid discharge pipe, a cathode spray head and a mask plate; the cathode spray head is provided with a liquid inlet and a liquid outlet, the liquid outlet is of a circular arc line structure, the curvature of the liquid outlet is consistent with the curvature of the inner wall to be processed of the workpiece to be processed, and the plane where the liquid outlet is located is perpendicular to the curved surface where the inner wall to be processed is located; the workbench is used for fixing a workpiece to be processed through the clamp; the mask plate is attached to the inner wall to be processed; the liquid storage tank is used for storing electrolyte, the liquid discharge pipe is used for conveying the electrolyte from the liquid storage tank to the liquid inlet of the cathode nozzle, and the liquid outlet of the cathode nozzle is used for spraying the electrolyte, so that the formed arc jet is sprayed onto the mask plate to process the inner wall to be processed. The embodiment of the application has the advantages of larger application range and higher flexibility, and improves the processing quality and accuracy of the inner wall microstructure in the use process.
Description
Technical Field
The embodiment of the application relates to the technical field of microstructure processing, in particular to an electrolytic processing device and equipment for an inner wall microstructure.
Background
Along with the development of science and technology, the surface function structure is widely applied and is mainly applied to the fields of machinery, chemical industry, electric power, aviation, national defense industry and the like. The texture of the friction pair surface can effectively improve the surface tribological performance, for example, in the inner wall of a cylinder sleeve of an automobile engine, and the reasonable surface microstructure not only can generate the hydrodynamic pressure effect, but also can store lubricating oil, so that the phenomena of abrasion and seizure of a cylinder/a piston are prevented.
The inner wall microstructure is a microstructure such as a rib groove, a pit or a boss which is processed on an inner curved surface such as a shaft sleeve, a piston ring, a cylinder body, a pipeline inner wall and the like, is beneficial to increasing the contact area between fluid and the inner surface, and plays roles in reducing friction and resistance. For example, a micro heat pipe having a micro fin structure on an inner wall thereof, the heat collection efficiency per day is improved; the inner wall of the copper pipe is provided with a micro-groove structure, the heat transfer power of the single pipe is up to 80W, and the heat transfer efficiency is 4 times of that of the light pipe. Based on the advantages of the inner wall microstructure, the application of the inner wall microstructure is more and more wide, so that the processing of the inner wall structure becomes a hot spot for people to study.
At present, a micro-electrochemical machining technology is generally used to machine an inner wall microstructure, and the micro-electrochemical machining technology can be classified into maskless micro-electrochemical machining and mask micro-electrochemical machining, wherein the mask micro-electrochemical machining is to form a masking layer on the surface of a workpiece by means of a certain patterning means, then selectively dissolve a part which is not protected by the masking layer, and finally machine a required shape.
An electrolyte flow field layout schematic diagram in a processing device for micro-electrolytic processing of an inner wall microstructure of a traditional mask is shown in fig. 1, electrolyte enters a clamp from a liquid inlet 11, then enters the inside of a liquid flushing cavity, is sprayed onto a mask plate from a liquid outlet of a side wall 13 of the liquid flushing cavity through a flow channel 12, and is etched and removed by utilizing the anode dissolution principle, wherein the electrolyte after passing through a processing area flows in a flow channel 14 formed by a conductive template and the clamp, namely, flows out from the liquid outlet of the clamp and then winds to the rear of the liquid outlet, and flows out of the clamp.
In the traditional processing device for micro-electrolytic processing of the inner wall microstructure of the mask, a vertical seam along the axis is formed on the side wall of the liquid flushing cavity and is used as a liquid outlet, on one hand, as the liquid outlet is a vertical seam on the side wall of the liquid flushing cavity and the curved surface to be processed has a certain radian, the distances from the electrolyte to each position of the processing area after being flushed out from the liquid outlet are different, so that the consistency of processing gaps is difficult to ensure, and the processing accuracy of the inner wall microstructure is reduced; in addition, because electrolyte needs to reach the liquid flushing cavity after entering from the liquid inlet, and then can reach the processing area through the liquid outlet of the side wall of the liquid flushing cavity and the mask plate, the speed and the pressure of the electrolyte reaching the processing area are insufficient, the mask plate cannot be ensured to be tightly attached to the inner wall of a workpiece to be processed, and an electrolytic product cannot be taken away in time, so that the processing quality and the accuracy of an inner wall microstructure are reduced.
In view of this, how to provide an electrolytic machining device and equipment for inner wall microstructure that solve the above technical problems is a problem to be solved by those skilled in the art.
Disclosure of Invention
The application aims to provide an electrolytic machining device and equipment for an inner wall microstructure, which have the advantages of wide application range and high flexibility, and the machining quality and accuracy of the inner wall microstructure are improved in the use process.
In order to solve the technical problems, the embodiment of the application provides an electrolytic machining device for an inner wall microstructure, which comprises a workbench, a clamp, a liquid storage tank, a liquid discharge pipe, a cathode spray head and a mask plate; wherein:
the cathode spray head is provided with a liquid inlet and a liquid outlet, the liquid outlet is of a circular arc line structure, the curvature of the liquid outlet is consistent with the curvature of the inner wall to be processed of the workpiece to be processed, and the plane of the liquid outlet is perpendicular to the curved surface of the inner wall to be processed; the workbench is used for fixing the workpiece to be processed through the clamp; the mask plate is attached to the inner wall to be processed; the liquid storage tank is used for storing electrolyte, the liquid discharge pipe is used for conveying the electrolyte from the liquid storage tank to a liquid inlet of the cathode nozzle, and a liquid outlet of the cathode nozzle is used for spraying the electrolyte, so that formed arc jet flow is sprayed onto the mask plate to process the inner wall to be processed.
Optionally, the cathode nozzle is in a spherical structure, and the liquid outlet is positioned at the center of the bottom of the cathode nozzle.
Optionally, the cathode nozzle is in a cylindrical structure, and the plane of the liquid outlet is perpendicular to the axis of the cathode nozzle.
Optionally, the curvature of the liquid outlet is not greater than 180 °.
Optionally, the width of the liquid outlet ranges from 0.1mm to 1mm.
Optionally, the device further comprises a numerical control platform for controlling the cathode nozzle to perform up-and-down scanning movement or rotating movement.
Optionally, the cathode spray head is a spray head made of a metal material, and the mask plate is an insulating mask plate.
Optionally, the insulating mask plate is a flexible insulating mask plate.
Optionally, the cathode spray head is a spray head made of a nonmetallic material, and the mask plate is a conductive mask plate.
The embodiment of the application also provides an electrolytic machining device for the inner wall microstructure, which comprises the electrolytic machining device for the inner wall microstructure.
The embodiment of the application provides an electrolytic machining device and equipment for an inner wall microstructure, wherein the electrolytic machining device comprises a workbench, a clamp, a liquid storage tank, a liquid discharge pipe, a cathode spray head and a mask plate; the cathode spray head is provided with a liquid inlet and a liquid outlet, the liquid outlet is of a circular arc line structure, the curvature of the liquid outlet is consistent with the curvature of the inner wall to be processed of the workpiece to be processed, and the plane where the liquid outlet is located is perpendicular to the curved surface where the inner wall to be processed is located; the workbench is used for fixing a workpiece to be processed through the clamp; the mask plate is attached to the inner wall to be processed; the liquid storage tank is used for storing electrolyte, the liquid discharge pipe is used for conveying the electrolyte from the liquid storage tank to the liquid inlet of the cathode nozzle, and the liquid outlet of the cathode nozzle is used for spraying the electrolyte, so that the formed arc jet is sprayed onto the mask plate to process the inner wall to be processed.
According to the embodiment of the application, the electrolyte is sprayed out through the liquid outlet of the circular arc structure on the cathode spray head to form the arc jet, and as the curvature of the liquid outlet is consistent with that of the inner wall to be processed, and the plane of the liquid outlet is perpendicular to the curved surface of the inner wall to be processed, the distances from the arc jet to all positions on the processing area are consistent, so that the consistency of processing gaps in the processing process can be ensured, and the liquid outlet in the cathode spray head can directly spray the arc jet onto the mask plate attached to the inner wall to be processed, and the electrolyte always keeps forward flushing liquid in the processing process, so that the speed and pressure of the electrolyte reaching the processing area can be ensured, the mask plate is tightly attached to the inner wall to be processed, the attachment degree of the mask plate and the inner wall to be processed is improved, and electrolytic products can be taken away in time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required in the prior art and the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an electrolyte flow field layout in a processing device for micro-electrolytic processing of an inner wall microstructure by using a mask in the prior art;
FIG. 2 is a schematic view of another electrolytic machining device for micro-structures of inner walls according to an embodiment of the present application;
FIG. 3 is a schematic cross-sectional view of a spherical cathode nozzle according to an embodiment of the present application;
FIG. 4 is a schematic cross-sectional view of a cylindrical cathode nozzle according to an embodiment of the present application;
fig. 5 is a schematic diagram of a cylindrical cathode nozzle for processing an inner wall microstructure according to an embodiment of the present application;
fig. 6 is a schematic structural diagram of an electrolytic machining device for an inner wall microstructure according to an embodiment of the present application.
Detailed Description
The embodiment of the application provides an electrolytic machining device and equipment for an inner wall microstructure, which have the advantages of larger application range and higher flexibility, and the machining quality and accuracy of the inner wall microstructure are improved in the use process.
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The electro-jet mask electrolytic machining is a novel process for printing the surface functional micro-texture based on the principle that metal is dissolved in electrolyte by an anode, and the high-speed charged electrolyte is constrained by a high-resolution mask to form an array micro-scale liquid electrode, so that the photoetching and pattern transfer technology of electro-hydraulic beams is realized, and macro preparation of the surface micro-nano structure with large area and high resolution can be performed. The electro-jet mask processing has no processing stress, no tool electrode loss, high processing efficiency, smooth structure surface, no deformation on the surface of a workpiece, no heat affected zone and no removal of materials in an ion scale, so the electro-jet mask processing method is very suitable for processing a microstructure and is widely and widely applied in the fields of aerospace, automobiles, machinery and the like.
Referring to fig. 2, fig. 2 is a schematic structural diagram of an electrolytic machining device for micro-structures of inner walls according to an embodiment of the application.
The application provides an electrolytic machining device for an inner wall microstructure, which comprises a workbench 1, a clamp 2, a liquid storage tank 3, a liquid discharge pipe 4, a cathode spray head 5 and a mask plate 6; wherein:
the cathode spray head 5 is provided with a liquid inlet 51 and a liquid outlet 52, the liquid outlet 52 is of a circular arc line structure, the curvature of the liquid outlet 52 is consistent with the curvature of the inner wall to be processed of the workpiece to be processed, and the plane of the liquid outlet 52 is vertical to the curved surface of the inner wall to be processed; the workbench 1 is used for fixing a workpiece to be processed through the clamp 2; the mask plate 6 is attached to the inner wall to be processed; the liquid storage tank 3 is used for storing electrolyte, the liquid discharge pipe 4 is used for conveying the electrolyte from the liquid storage tank 3 to the liquid inlet 51 of the cathode spray head 5, the liquid outlet 52 of the cathode spray head 5 is used for spraying the electrolyte, and the formed arc jet is sprayed onto the mask plate 6 so as to process the inner wall to be processed.
It should be noted that, in the embodiment of the present application, the electrolyte in the liquid storage tank 3 is stored in the liquid storage tank 3, the electrolyte in the liquid storage tank 3 can be conveyed to the liquid inlet 51 of the cathode spray head 5 through the liquid discharge pipe 4 by driving of the pump, one end of the cathode spray head 5 provided with the liquid outlet 52 is in a curved surface structure, the specific shape of the liquid outlet 52 is in a circular arc linear structure, the curvature of the liquid outlet 52 can be determined according to the curvature of the inner wall to be processed of the workpiece to be processed, and in order to make the electrolyte sprayed out of the liquid outlet 52 reach the processing area, the consistency of the processing gap can be maintained, so that the curvature of the liquid outlet 52 is consistent with the curvature of the inner wall to be processed, and it can be ensured that the liquid outlet 52 sprays a uniform and stable arc jet consistent with the curvature of the inner wall to be processed, and the formed arc jet is the jet electrode.
Specifically, after the electrolyte is sprayed out from the liquid outlet 52 of the cathode spray head 5, the electrolyte with high-speed electrification forms a micro-scale array liquid electrode under the constraint of the high-resolution mask plate 6, and the inner wall microstructure is processed based on the anode dissolution principle by applying a certain processing voltage between the cathode spray head 5 and the anode workpiece. In the processing process, electrolyte is directly sprayed onto the mask plate 6 through the liquid outlet 52 of the cathode spray head 5, and then the processing area is reached, so that forward flushing is always kept, the application can ensure the uniformity of a flow field and an electric field of a curved surface processing area in the inner wall to be processed, and the forward flushing can ensure that the flow velocity of the electrolyte in the processing area of the curved surface of the inner wall to be processed meets the processing requirement, and is beneficial to 'compacting' the mask plate 6, so that the mask plate 6 is tightly attached to the inner wall to be processed, the attaching degree of the mask plate 6 and the inner wall to be processed is improved, and the higher attaching degree can improve the precision of the micro structure of the processed inner wall and also improve the processing efficiency; in addition, the electrolyte has enough flow rate to timely take away the processing products and heat generated in the processing process, the residues of the processing products can cause short circuit of the processed inner wall microstructure in the use process, the quality of the products is seriously affected, and meanwhile, the residues of the heat can also cause the temperature of the electrolyte in the processing area to be increased, so that the quality of the products is affected to a certain extent.
It should be further noted that, the design of the cathode nozzle 5 in the embodiment of the present application is simple, and the design of the fixture 2 for fixing the workpiece to be processed is also simpler. In addition, the application is applicable to various workpieces to be processed, the length of the workpieces to be processed is not limited, the corresponding cathode spray head 5 is designed according to the curvature of the inner wall to be processed of the workpieces to be processed, the application range is wide, and the flexibility is high.
According to the embodiment of the application, the electrolyte is sprayed out through the liquid outlet of the circular arc structure on the cathode spray head to form the arc jet, and as the curvature of the liquid outlet is consistent with that of the inner wall to be processed, and the plane of the liquid outlet is perpendicular to the curved surface of the inner wall to be processed, the distances from the arc jet to all positions on the processing area are consistent, so that the consistency of processing gaps in the processing process can be ensured, and the liquid outlet in the cathode spray head can directly spray the arc jet onto the mask plate attached to the inner wall to be processed, and the electrolyte always keeps forward flushing liquid in the processing process, so that the speed and pressure of the electrolyte reaching the processing area can be ensured, the mask plate is tightly attached to the inner wall to be processed, the attachment degree of the mask plate and the inner wall to be processed is improved, and electrolytic products can be taken away in time.
As a preferred embodiment, the cathode nozzle is of a spherical structure, and the liquid outlet is positioned at the center of the bottom of the cathode nozzle.
It should be noted that, in the embodiment of the present application, the cathode nozzle may have a spherical structure, specifically referring to fig. 3, the upper end of the cathode nozzle is a liquid inlet, and the lower end is a liquid outlet. In order to ensure that the arc jet has better stability and uniformity and ensure that the speed and the pressure of the arc jet meet the processing requirements, a liquid outlet is preferably arranged at the center position of a spherical surface at the bottom of the cathode nozzle, namely, a gap is formed at the center position of the spherical surface, and the gap is of an arc linear structure.
When the inner wall microstructure electrolytic machining is performed on the bearing bush-shaped part, the U-shaped edging strip can be used for fixing the mask plate on the inner wall surface of the bearing bush-shaped part, so that the arc jet ejected by the spherical cathode nozzle further compresses the mask plate to be tightly attached to the inner wall of the workpiece to be machined.
As a preferred embodiment, the cathode nozzle is in a cylindrical structure, and the plane of the liquid outlet is perpendicular to the axis of the cathode nozzle.
It should be noted that, in the embodiment of the present application, the cathode nozzle may have a cylindrical structure, referring to fig. 4 and 5, the upper end of the cathode nozzle is a liquid inlet, and the circular arc-shaped gap formed on the sidewall of the cylindrical cathode nozzle is a liquid outlet. In order to ensure that the arc jet has better stability and uniformity, ensure that the speed and the pressure of the arc jet reach the processing requirements, and ensure that the processing clearance is consistent after the arc jet sprayed from the liquid outlet is sprayed to the mask plate, the plane where the liquid outlet is preferably perpendicular to the axis of the cathode nozzle.
When the cathode nozzle with the cylindrical structure is used for carrying out inner wall microstructure electrolytic processing on the bushing-shaped part or the cylindrical part, the two ends of the mask plate can be pressed on the inner wall surface of the cylindrical part by the elastic rubber ring, so that the arc jet ejected by the cathode nozzle with the cylindrical structure further presses the mask plate to be tightly attached to the inner wall of a workpiece to be processed, and patterns on the mask plate are etched on the inner wall of the cylinder or the inner wall of the bushing-shaped part.
As a preferred embodiment, the curvature of the outlet is not more than 180 °.
In order to ensure that the speed and the pressure of the arc jet ejected by the cathode nozzle reach the processing requirement, the arc of the arc liquid outlet of the curved jet electrode formed by the ejection in the embodiment of the application does not exceed 180 degrees, the specific numerical value of the arc liquid outlet can be determined according to the actual situation, the embodiment of the application is not particularly limited, and the aim of the embodiment of the application can be fulfilled.
As a preferred embodiment, the width of the liquid outlet ranges from 0.1mm to 1mm.
It should be noted that, in order to ensure that the speed and pressure of the arc jet ejected from the cathode nozzle reach the processing requirements, and avoid the atomization of the electrolyte caused by too small liquid outlet, the width of the arc liquid outlet may be set in the range of 0.1 mm-1 mm, and specific numerical values thereof may be determined according to practical situations.
As a preferred embodiment, a numerical control stage is further included for controlling the cathode nozzle to perform up-and-down scanning movement or rotation movement.
In order to improve the machining efficiency, the cathode nozzle can be controlled by the numerical control platform, and the machining efficiency is improved by scanning a machining area into a sheet for the jet electrode formed by the spherical cathode nozzle which can move back and forth; the cylindrical cathode nozzle can be rotated, and when the complete circular ring inner curved surface is processed, the cylindrical jet electrode is rotated by a certain angle to process the complete cylindrical inner curved surface, so as to improve the processing efficiency, and refer to fig. 6 specifically.
As a preferred embodiment, the cathode spray head is a spray head made of a metal material, and the mask plate is an insulating mask plate.
Specifically, the cathode spray head of the embodiment of the application can be a metal conductive spray head, at the moment, the negative electrode of the power supply can be connected to the cathode spray head, the mask plate adopts an insulating mask plate, and when arc jet (electrified) sprayed by the cathode spray head contacts with the anode workpiece through the hollowed-out position on the insulating mask plate, a circuit is conducted, so that the anode workpiece is etched.
Of course, the mask plate in the embodiment of the application is also a conductive mask plate, an insulating layer is arranged on one side (the lower surface of the mask plate) of the conductive mask plate, which is contacted with the inner wall to be processed, and the negative electrode of the power supply can be connected to the conductive mask plate, so that when the arc jet ejected by the cathode nozzle is electrified after contacting with the upper surface of the conductive mask plate, the circuit is conducted after contacting with the anode workpiece through the hollowed-out position on the conductive mask plate, and the anode workpiece is etched.
As a preferred embodiment, the insulating mask is a flexible insulating mask.
It should be noted that, in order to improve the laminating degree of mask plate and the inner wall that waits to process, can adopt flexible insulating mask plate, flexible insulating mask plate can be with its generating plane, with pattern scribing on flexible insulating mask plate again with flexible insulating mask plate attached to wait to process on the inner wall, solved the flexible limited of electrically conductive mask plate, be difficult to paste tightly wait to process the problem of clamping between work piece, electrically conductive template and the insulating layer. Meanwhile, the flexible insulating mask plate is adopted, so that the traditional process flow of manufacturing the mask, such as gluing, pre-baking, exposure, post-baking, developing and the like, which is needed when the mask is prepared in a mask preparation mode in the prior art can be saved.
As a preferred embodiment, the cathode spray head is a spray head made of a nonmetallic material, and the mask plate is a conductive mask plate.
Specifically, the cathode spray head of the embodiment of the application can be a metal conductive spray head, and also can be a spray head made of a non-metal material, namely, the cathode spray head in the embodiment of the application is non-conductive, at this time, an insulating layer is required to be arranged on one side (the lower surface of the mask) of the conductive mask, which is contacted with the inner wall to be processed, and the negative electrode of the power supply is connected to the conductive mask, so that when the arc jet sprayed by the cathode spray head is electrified after contacting with the upper surface of the conductive mask, a circuit is conducted after contacting with the anode workpiece through the hollowed-out position on the conductive mask, and the anode workpiece is etched.
The embodiment of the present application is not particularly limited to the specific material used to manufacture the cathode nozzle, and the purpose of the embodiment of the present application can be achieved.
On the basis of the embodiment, the embodiment of the application also provides an inner wall microstructure electrolytic machining device, which comprises the inner wall microstructure electrolytic machining device.
It should be noted that the apparatus for electrochemical machining of an inner wall microstructure provided in the embodiment of the present application has the same beneficial effects as the microstructure machining apparatus provided in the above embodiment. For a specific description of the microstructure processing apparatus according to the embodiment of the present application, reference is made to the above embodiment, and the disclosure is not repeated here.
It should also be noted that in this specification, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. The electrolytic machining device for the microstructure of the inner wall is characterized by comprising a workbench, a clamp, a liquid storage tank, a liquid discharge pipe, a cathode spray head and a mask plate; wherein:
the cathode spray head is provided with a liquid inlet and a liquid outlet, the liquid outlet is of a circular arc line structure, the curvature of the liquid outlet is consistent with the curvature of the inner wall to be processed of the workpiece to be processed, and the plane of the liquid outlet is perpendicular to the curved surface of the inner wall to be processed; the workbench is used for fixing the workpiece to be processed through the clamp; the mask plate is attached to the inner wall to be processed; the liquid storage tank is used for storing electrolyte, the liquid discharge pipe is used for conveying the electrolyte from the liquid storage tank to a liquid inlet of the cathode spray head, a liquid outlet of the cathode spray head is used for spraying the electrolyte, and the formed arc jet is sprayed onto the mask plate so as to process the inner wall to be processed;
the cathode spray head is of a spherical structure or a cylindrical structure, and when the cathode spray head is of the spherical structure, the liquid outlet is positioned at the center of the bottom of the cathode spray head; when the cathode spray head is of a cylindrical structure, the plane of the liquid outlet is perpendicular to the axis of the cathode spray head; the mask plate is fixed on the inner wall to be processed through a U-shaped edging strip or an elastic rubber ring.
2. The apparatus of claim 1, wherein the curvature of the outlet is no greater than 180 °.
3. The apparatus of claim 1, wherein the width of the liquid outlet is in the range of 0.1mm to 1mm.
4. The apparatus of claim 3, further comprising a numerically controlled stage for controlling the cathode nozzle to perform a scanning up and down motion or a rotating motion.
5. The apparatus according to any one of claims 1 to 4, wherein the cathode nozzle is a nozzle made of a metal material, and the mask plate is an insulating mask plate.
6. The apparatus of claim 5, wherein the insulating mask is a flexible insulating mask.
7. The apparatus according to any one of claims 1 to 4, wherein the cathode nozzle is a nozzle made of a nonmetallic material, and the mask plate is a conductive mask plate.
8. An apparatus for electrochemical machining of an inner wall microstructure, comprising the apparatus for electrochemical machining of an inner wall microstructure according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711341310.XA CN107838508B (en) | 2017-12-14 | 2017-12-14 | Electrolytic machining device and equipment for inner wall microstructure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711341310.XA CN107838508B (en) | 2017-12-14 | 2017-12-14 | Electrolytic machining device and equipment for inner wall microstructure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107838508A CN107838508A (en) | 2018-03-27 |
| CN107838508B true CN107838508B (en) | 2023-11-10 |
Family
ID=61663344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711341310.XA Active CN107838508B (en) | 2017-12-14 | 2017-12-14 | Electrolytic machining device and equipment for inner wall microstructure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107838508B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108637411B (en) * | 2018-05-16 | 2021-05-04 | 广东工业大学 | Micro-channel electrolytic machining device |
| CN108746899A (en) * | 2018-08-14 | 2018-11-06 | 苏州科技大学 | A kind of micro- pit array processing unit (plant) in metal surface and method |
| CN112981471B (en) * | 2021-02-08 | 2022-07-12 | 广东工业大学 | High-localization three-dimensional electrodeposition device and method |
| CN113084279B (en) * | 2021-03-12 | 2022-07-12 | 河南航天液压气动技术有限公司 | High-precision micro electrochemical machining device and method for surface of floating shaft sleeve |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006055933A (en) * | 2004-08-19 | 2006-03-02 | Sodick Co Ltd | Electrolytic solution jet machining method |
| CN1919514A (en) * | 2006-09-18 | 2007-02-28 | 南京航空航天大学 | Spraying liquid bunch electrolysis-laser composite processing method and apparatus thereof |
| CN102248308A (en) * | 2011-06-24 | 2011-11-23 | 广东工业大学 | Method for performing microprocessing by utilizing laser cavitation micro jet flow |
| CN204397104U (en) * | 2015-02-02 | 2015-06-17 | 广东工业大学 | Orifice electrode scan-type mask electrolytic machining device |
| CN107052485A (en) * | 2017-06-22 | 2017-08-18 | 广东工业大学 | A kind of cascade shower nozzle processed based on electric jet mask |
| CN207629334U (en) * | 2017-12-14 | 2018-07-20 | 广东工业大学 | A kind of inner wall micro-structure electrolytic machining device and equipment |
-
2017
- 2017-12-14 CN CN201711341310.XA patent/CN107838508B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006055933A (en) * | 2004-08-19 | 2006-03-02 | Sodick Co Ltd | Electrolytic solution jet machining method |
| CN1919514A (en) * | 2006-09-18 | 2007-02-28 | 南京航空航天大学 | Spraying liquid bunch electrolysis-laser composite processing method and apparatus thereof |
| CN102248308A (en) * | 2011-06-24 | 2011-11-23 | 广东工业大学 | Method for performing microprocessing by utilizing laser cavitation micro jet flow |
| CN204397104U (en) * | 2015-02-02 | 2015-06-17 | 广东工业大学 | Orifice electrode scan-type mask electrolytic machining device |
| CN107052485A (en) * | 2017-06-22 | 2017-08-18 | 广东工业大学 | A kind of cascade shower nozzle processed based on electric jet mask |
| CN207629334U (en) * | 2017-12-14 | 2018-07-20 | 广东工业大学 | A kind of inner wall micro-structure electrolytic machining device and equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107838508A (en) | 2018-03-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107838508B (en) | Electrolytic machining device and equipment for inner wall microstructure | |
| CN204397104U (en) | Orifice electrode scan-type mask electrolytic machining device | |
| CN108971676B (en) | Tube electrode for electrolytic punching and cutting integrated machining, device and method | |
| CN106270853A (en) | A kind of processing method of micro structure array | |
| CN113369607B (en) | Electrochemical machining device for synchronously realizing microstructures on inner surface of cylindrical workpiece and outer surface of cylindrical workpiece | |
| Chen et al. | Improvement of dimensional uniformity on micro-dimple arrays generated by electrochemical micro-machining with an auxiliary electrode | |
| Qu et al. | Modified microscale pattern transfer without photolithography of substrates | |
| CN113046803A (en) | Arc-shaped jet cathode moving device and method for improving mask electrolytic machining precision | |
| CN106881507B (en) | A kind of device and electrochemical machining method for Electrolyzed Processing plane complications group's groove | |
| CN106141339A (en) | A kind of multi-electrode fine electric spark forming and machining method and device | |
| Kunar et al. | Investigation on surface structuring generated by electrochemical micromachining | |
| CN207629334U (en) | A kind of inner wall micro-structure electrolytic machining device and equipment | |
| CN105127526B (en) | Disc-type scanning electrode mask micro-electrolysis discharge machining system and machining method | |
| CN108080782B (en) | Side wall insulation method of micro-hole electrolytic machining electrode and application | |
| CN206839345U (en) | Device for Electrolyzed Processing plane complications group's groove | |
| CN110449673B (en) | Device for electrolytically machining micro texture by using belt type movable mask | |
| CN112458507A (en) | Electrodeposition writing system and method for preparing metal micro-nano structure in direct writing mode | |
| CN205085510U (en) | Little electrolytic assisted electro -discharge machining system of dish -type scanning electrode mask | |
| CN106903383B (en) | Device and electrochemical machining method for Electrolyzed Processing plane complications group's groove | |
| CN113369608B (en) | Method for synchronously preparing microtexture and micro-textured micro-pits on metal surface | |
| CN113385756B (en) | Device for processing surface microstructure of cylinder | |
| CN108637411B (en) | Micro-channel electrolytic machining device | |
| Kunar et al. | Effect of various masked patterned tools during micro-electrochemical texturing | |
| CN102259172B (en) | Method for texturing surface of strip-casting crystallization roller | |
| RU2472874C1 (en) | Hand tool - electrode for electrochemical polishing of metals |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |