CN107838508A - A kind of inwall micro-structural electrolytic machining device and equipment - Google Patents
A kind of inwall micro-structural electrolytic machining device and equipment Download PDFInfo
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- CN107838508A CN107838508A CN201711341310.XA CN201711341310A CN107838508A CN 107838508 A CN107838508 A CN 107838508A CN 201711341310 A CN201711341310 A CN 201711341310A CN 107838508 A CN107838508 A CN 107838508A
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- inwall
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- shower nozzle
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- 238000003754 machining Methods 0.000 title claims abstract description 28
- 239000007788 liquid Substances 0.000 claims abstract description 74
- 239000003792 electrolyte Substances 0.000 claims abstract description 38
- 238000007599 discharging Methods 0.000 claims abstract description 11
- 239000007921 spray Substances 0.000 claims abstract description 7
- 238000012545 processing Methods 0.000 claims description 46
- 238000002955 isolation Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000007769 metal material Substances 0.000 claims description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 2
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 12
- 238000011010 flushing procedure Methods 0.000 description 8
- 238000005459 micromachining Methods 0.000 description 8
- 238000009413 insulation Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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- 238000001259 photo etching Methods 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/10—Supply or regeneration of working media
Abstract
The embodiment of the invention discloses a kind of inwall micro-structural electrolytic machining device and equipment, including workbench, fixture, reservoir, discharging tube, negative electrode shower nozzle and mask plate；Wherein, negative electrode shower nozzle is provided with inlet and liquid outlet, and liquid outlet is circular arc cable architecture, and the curvature of liquid outlet is consistent with the curvature of the inwall to be processed of workpiece to be processed, plane where liquid outlet and curved vertical where inwall to be processed；Workbench is used to fix workpiece to be processed by fixture；Mask plate is attached on inwall to be processed；Reservoir is used to store electrolyte, and discharging tube is used for the inlet that electrolyte is delivered to negative electrode shower nozzle from reservoir, and the liquid outlet of negative electrode shower nozzle is used to spray electrolyte, the arcuation jet to be formed is sprayed to mask plate, to be processed to inwall to be processed.The scope of application of the embodiment of the present invention is larger, and flexibility is stronger, and improves the crudy and accuracy of inwall micro-structural in use.
Description
Technical field
The present embodiments relate to micro-structural processing technique field, is filled more particularly to a kind of inwall micro-structural Electrolyzed Processing
Put and equipment.
Background technology
With the development of science and technology, the application of function of surface structure is more and more extensive, be mainly used in machinery, chemical industry, electric power,
The field such as aviation and national defense industry.The texture of surface of friction pair can effectively improve Tribological Properties, such as in automobile
The inboard wall of cylinder liner of engine, rational surface micro-structure can not only produce the effect of hydrodynamic, and can store lubricating oil,
Prevent the phenomenon that gas cylinder piston is abraded and killed from occurring.
Inwall micro-structural be exactly processed on the negative cambers such as similar axle sleeve, piston ring, cylinder body and inner-walls of duct rib groove,
The similar micro-structural such as pit or boss, inwall micro-structural are advantageous to increase the contact area of fluid and inner surface, and play and subtract
The effect of mill drop resistance.For example, inwall has the micro heat pipe of micro- fin structure, its daily collecting efficiency is improved；Inwall has
The copper pipe of very low power structure, the heat power of its single pipe are up to 80W, and heat transfer efficiency is 4 times of light pipe.Based on inwall micro-structural
Possessed advantage, the application of inwall micro-structural are more and more extensive so that the focus for being processed into people's research of interior wall construction.
At present, generally use electrochemical micromachining technology processing inwall micro-structural, electrochemical micromachining technology can be divided into
Without mask electrochemical micromachining and mask electrochemical micromachining, wherein, mask electrochemical micromachining is by means of certain figure
Change means form masking layer in workpiece surface, then optionally dissolve the part of not masked layer protection, finally process institute
The shape needed.
Electrolyte flow field schematic layout pattern such as Fig. 1 in the processing unit (plant) of traditional mask electrochemical micromachining inwall micro-structural
Shown, electrolyte enters in fixture from inlet 11, and then enters to fliud flushing body inside cavity, by runner 12 from fliud flushing body cavity
The liquid outlet of body sidewall 13 is ejected on mask plate, utilizes " anodic solution " principle, realizes the ablation of material, wherein, by adding
Flowed in the runner 14 that electrolyte behind work area is formed by conductive template and fixture again, i.e., from fixture liquid outlet go out after around going out
The rear of liquid mouth, flow to the outside of clamp body.
The processing unit (plant) of traditional mask electrochemical micromachining inwall micro-structural, it is to open an edge in the side wall of fliud flushing cavity
The perps of axis is as liquid outlet, on the one hand, because liquid outlet is a perps on fliud flushing body cavity body sidewall, and song to be processed
Face has certain radian, electrolyte is reached the distance difference of each position in processing district after being gone out by liquid outlet, so as to be difficult to
Ensure the uniformity in processing gap, so as to reduce the machining accuracy of inwall micro-structural；Further, since electrolyte is by feed liquor
Mouth needs first to reach fliud flushing body cavity body after entering, then gets to process by the liquid outlet and mask plate of fliud flushing body cavity body sidewall
Area, so as to cause speed and insufficient pressure when electrolyte reaches processing district, it can not ensure that mask plate is closely attached on workpiece to be processed
Inwall and electrolysate can not be taken away in time, so as to reduce the crudy of inwall micro-structural and accuracy.
In consideration of it, how to provide a kind of inwall micro-structural electrolytic machining device for solving above-mentioned technical problem and equipment turns into
Those skilled in the art's urgent problem to be solved.
The content of the invention
The purpose of the embodiment of the present invention is to provide a kind of inwall micro-structural electrolytic machining device and equipment, the scope of application compared with
Greatly, flexibility is stronger, and improves the crudy and accuracy of inwall micro-structural in use.
In order to solve the above technical problems, the embodiments of the invention provide a kind of inwall micro-structural electrolytic machining device, including
Workbench, fixture, reservoir, discharging tube, negative electrode shower nozzle and mask plate；Wherein：
The negative electrode shower nozzle is provided with inlet and liquid outlet, and the liquid outlet is circular arc cable architecture, the song of the liquid outlet
Rate is consistent with the curvature of the inwall to be processed of workpiece to be processed, plane where the liquid outlet and song where the inwall to be processed
Face is vertical；The workbench is used to fix the workpiece to be processed by the fixture；The mask plate is attached at described to be added
On work inwall；The reservoir is used to store electrolyte, and the discharging tube is used to convey the electrolyte from the reservoir
To the inlet of the negative electrode shower nozzle, the liquid outlet of the negative electrode shower nozzle is used to spray the electrolyte, makes the arcuation to be formed
Jet is sprayed to the mask plate, to be processed to the inwall to be processed.
Optionally, the negative electrode shower nozzle is chondritic, and the liquid outlet is located at the centre bit of the negative electrode head of the nozzle
Put.
Optionally, the negative electrode shower nozzle is cylindrical-shaped structure, plane where the liquid outlet and the axle of the negative electrode shower nozzle
Line is vertical.
Optionally, the curvature of the liquid outlet is not more than 180 °.
Optionally, the width range of the liquid outlet is 0.1mm~1mm.
Optionally, in addition to digital control platform, for controlling the negative electrode nozzle to carry out scanning motion or rotary motion up and down.
Optionally, the negative electrode shower nozzle is the shower nozzle being made based on metal material, and the mask plate is isolation masks
Plate.
Optionally, the isolation masks plate is flexible insulation mask plate.
Optionally, the negative electrode shower nozzle is the shower nozzle being made based on nonmetallic materials, and the mask plate is covered for conduction
Template.
The embodiment of the present invention additionally provides a kind of inwall micro-structural Electrolyzed Processing equipment, including inwall as described above is micro-
Structure electrolysis processing unit (plant).
The embodiments of the invention provide a kind of inwall micro-structural electrolytic machining device and equipment, including workbench, fixture, storage
Liquid bath, discharging tube, negative electrode shower nozzle and mask plate；Wherein, negative electrode shower nozzle is provided with inlet and liquid outlet, and liquid outlet is circular arc knot
Structure, the curvature of liquid outlet is consistent with the curvature of the inwall to be processed of workpiece to be processed, plane where liquid outlet and inwall to be processed
Place curved vertical；Workbench is used to fix workpiece to be processed by fixture；Mask plate is attached on inwall to be processed；Reservoir
For storing electrolyte, discharging tube is used for the inlet that electrolyte is delivered to negative electrode shower nozzle from reservoir, and negative electrode shower nozzle goes out
Liquid mouth is used to spray electrolyte, the arcuation jet to be formed is sprayed to mask plate, to be processed to inwall to be processed.
Can be so that electrolyte is sprayed to form arc by the embodiment of the present invention by the liquid outlet of the circular arc cable architecture on negative electrode shower nozzle
Shape jet, and the curvature due to liquid outlet is consistent with the curvature of inwall to be processed, and plane where liquid outlet with it is to be processed interior
Curved vertical where wall, so making the distance of each position on arcuation jet arrival processing district consistent, and then it may insure to add
The uniformity in gap is processed during work, and the liquid outlet in the negative electrode nozzle in the embodiment of the present invention can be by arcuation jet
Inject directly on the mask plate being attached on inwall to be processed, and electrolyte remains positive punching in process
Liquid, and then speed and pressure when electrolyte reaches processing district are may insure, so that mask plate is close to inwall to be processed, improve
The compactness of mask plate and inwall to be processed, and can take away in time by electrolysate, so, the embodiment of the present invention makes
The crudy and accuracy of inwall micro-structural are improved during.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, below will be to institute in prior art and embodiment
The accompanying drawing needed to use is briefly described, it should be apparent that, drawings in the following description are only some implementations of the present invention
Example, for those of ordinary skill in the art, on the premise of not paying creative work, can also be obtained according to these accompanying drawings
Obtain other accompanying drawings.
Fig. 1 is the electrolyte flow field layout in a kind of existing processing unit (plant) of mask electrochemical micromachining inwall micro-structural
Schematic diagram；
Fig. 2 is the structural representation of another inwall micro-structural electrolytic machining device provided in an embodiment of the present invention；
Fig. 3 is a kind of diagrammatic cross-section of spherical negative electrode shower nozzle provided in an embodiment of the present invention；
Fig. 4 is a kind of diagrammatic cross-section of cylindrical type negative electrode shower nozzle provided in an embodiment of the present invention；
Fig. 5 is the principle signal that a kind of cylindrical type negative electrode shower nozzle provided in an embodiment of the present invention processes inwall micro-structural
Figure；
Fig. 6 is a kind of structural representation of inwall micro-structural electrolytic machining device provided in an embodiment of the present invention.
Embodiment
The embodiments of the invention provide a kind of inwall micro-structural electrolytic machining device and equipment, the scope of application is larger, flexibly
Property is stronger, and improves the crudy and accuracy of inwall micro-structural in use.
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
Part of the embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
Occurred in the electrolytic solution " anodic solution " based on metal it should be noted that electric jet mask Electrolyzed Processing is one kind
Principle, new technology for printing the micro- texture of function of surface, by the powered electrolyte of high speed under the constraint of high-resolution mask,
Array minute yardstick liquid electrode is formed, " photoetching+pattern transfer " technology of electro-hydraulic beam is realized, large area, high-resolution can be carried out
It is prepared by the magnanimity of the surface micro-nano structure of rate.Electric jet mask processing has without machining stress, no tool electrode loss, processing effect
Rate is high, body structure surface is smooth, workpiece surface will not be deformed and heat affected area, material are removed with ion yardstick, therefore non-
The often processing of suitable fine structure simultaneously obtains more and more extensive application in fields such as Aero-Space, automobile, machineries.
Fig. 2 is refer to, Fig. 2 is a kind of structural representation of inwall micro-structural electrolytic machining device provided in an embodiment of the present invention
Figure.
The inwall micro-structural electrolytic machining device provided in the embodiment of the present invention, including workbench 1, fixture 2, reservoir 3,
Discharging tube 4, negative electrode shower nozzle 5 and mask plate 6；Wherein：
Negative electrode shower nozzle 5 is provided with inlet 51 and liquid outlet 52, and liquid outlet 52 is circular arc cable architecture, the curvature of liquid outlet 52 with
The curvature of the inwall to be processed of workpiece to be processed is consistent, the place plane of liquid outlet 52 and curved vertical where inwall to be processed；Work
Make platform 1 to be used to fix workpiece to be processed by fixture 2；Mask plate 6 is attached on inwall to be processed；Reservoir 3 is used to store electricity
Liquid is solved, discharging tube 4 is used for the inlet 51 that electrolyte is delivered to negative electrode shower nozzle 5 from reservoir 3, the liquid outlet of negative electrode shower nozzle 5
52 are used to spray electrolyte, the arcuation jet to be formed is sprayed to mask plate 6, to be processed to inwall to be processed.
It should be noted that the electrolyte in the embodiment of the present invention is stored in reservoir 3, can be incited somebody to action by the driving of pump
Electrolyte in reservoir 3 is delivered to the inlet 51 of negative electrode shower nozzle 5 by discharging tube 4, and liquid outlet 52 is provided with negative electrode shower nozzle 5
One end be curved-surface structure, and the concrete shape of liquid outlet 52 is circular arc linear structure, and the curvature of the liquid outlet 52 can be with
Determined according to the curvature of the inwall to be processed of workpiece to be processed, in order that the electrolyte that liquid outlet 52 sprays reaches processing district
When, it can keep processing the uniformity in gap, so make the curvature of liquid outlet 52 consistent with the curvature of inwall to be processed, so as to
To ensure that liquid outlet 52 ejects uniform, stable and has the arcuation jet consistent with inwall curvature to be processed, an arc formed
Shape jet is jet electrode.
Specifically, after electrolyte is ejected by the liquid outlet 52 of negative electrode shower nozzle 5, the powered electrolyte of high speed is in high-resolution
Mask plate 6 constraint under form minute yardstick array liquid electrode, it is certain by applying between negative electrode shower nozzle 5 and anode workpiece
Machining voltage, and be based on " anodic solution " principle, realize the processing of inwall micro-structural.Electrolyte passes through the moon in process
The liquid outlet 52 of pole shower nozzle 5 is injected directly on mask plate 6, and then the processing district arrived, and remains positive fliud flushing, the application is not
The flow field in Machining of Curved Surface region in inwall to be processed and the uniformity of electric field can only be ensured, and can by positive fliud flushing
Ensure that the flow velocity of the processing district electrolyte inside of inwall curved surface to be processed reaches the requirement of processing, and be advantageous to " compress " mask plate
6, it is close to inwall to be processed, improve the compactness of mask plate 6 and inwall to be processed, higher compactness can make to add
The precision for the inwall micro-structural that work forms improves, and can also improve processing efficiency；In addition, electrolyte has sufficiently large flow velocity can
In time to take away caused processing product and heat in process, processing the residual of product can make the inwall that is process micro-
Short circuit occurs in use for structure, has a strong impact on the quality of product, while the residual of heat can also make processing district electrolyte
Temperature rise, so as to be affected to the quality of product.
It should also be noted that, the negative electrode shower nozzle 5 in the embodiment of the present invention designs simply, and for fixing work to be processed
The fixture 2 of part designs also relatively simple.In addition, go for a variety of workpieces to be processed in the application, will not be to work to be processed
The limited length of part is determined, it is only necessary to according to the corresponding negative electrode shower nozzle 5 of the curvature design of the inwall to be processed of workpiece to be processed,
Use range is wider, and flexibility is larger.
Can be so that electrolyte is sprayed to form arc by the embodiment of the present invention by the liquid outlet of the circular arc cable architecture on negative electrode shower nozzle
Shape jet, and the curvature due to liquid outlet is consistent with the curvature of inwall to be processed, and plane where liquid outlet with it is to be processed interior
Curved vertical where wall, so making the distance of each position on arcuation jet arrival processing district consistent, and then it may insure to add
The uniformity in gap is processed during work, and the liquid outlet in the negative electrode nozzle in the embodiment of the present invention can be by arcuation jet
Inject directly on the mask plate being attached on inwall to be processed, and electrolyte remains positive punching in process
Liquid, and then speed and pressure when electrolyte reaches processing district are may insure, so that mask plate is close to inwall to be processed, improve
The compactness of mask plate and inwall to be processed, and can take away in time by electrolysate, so, the embodiment of the present invention makes
The crudy and accuracy of inwall micro-structural are improved during.
As a kind of preferred embodiment, negative electrode shower nozzle is chondritic, and liquid outlet is located at the center of negative electrode head of the nozzle
Position.
It should be noted that the negative electrode shower nozzle in the embodiment of the present invention can be chondritic, Fig. 3 is specifically refer to, it is cloudy
The upper end of pole shower nozzle is inlet, and lower end is liquid outlet.In order to ensure that arcuation jet has preferable stability and uniformity, and
And ensure that the speed of arcuation jet and pressure reach processing request, liquid outlet is preferably arranged at negative electrode head of the nozzle Surface of Sphere
Center, namely a gap is opened up in the center of Surface of Sphere, the gap is circular arc linear structure, passes through the present invention
The negative electrode shower nozzle provided in embodiment can be used for being processed the inwall micro-structural of bearing shell shape part.
It should also be noted that, when carrying out inwall micro-structural Electrolyzed Processing to bearing shell shape part, U-shaped bound edge can be utilized
Mask plate is fixed in the inner wall surface of bearing shell shape part by bar, so that the arcuation jet that spherical negative electrode nozzle ejects enters one
Step, which compresses mask plate, makes it be closely attached on the inwall of workpiece to be processed.
As a kind of preferred embodiment, negative electrode shower nozzle is cylindrical-shaped structure, plane where liquid outlet and negative electrode shower nozzle
Axis is vertical.
It should be noted that the negative electrode shower nozzle in the embodiment of the present invention can be cylindrical-shaped structure, specifically refer to Fig. 4 and
Fig. 5, the upper end of negative electrode shower nozzle is inlet, and the circular arc gap opened up in the side wall of cylindrical cathode shower nozzle is liquid outlet.For
Guarantee arcuation jet has preferable stability and uniformity, and ensure the speed of arcuation jet and pressure reach processing will
Ask, and it also requires ensureing to be sprayed to mask plate by the arcuation jet that liquid outlet sprays, processing gap is consistent, preferably makes out
Plane where liquid mouth is vertical with the axis of negative electrode shower nozzle, can be used for by the negative electrode shower nozzle provided in the embodiment of the present invention to axle
The inwall micro-structural of the inwall of tiles part or cylindric part is processed.
It should also be noted that, using the negative electrode shower nozzle of cylindrical-shaped structure in bearing shell shape part or the progress of cylindric part
During wall micro-structural Electrolyzed Processing, it can utilize elastic rubber ring that the both ends of mask plate are pressed on to the inner wall surface of cylindric part
On, so that the arcuation jet that the negative electrode shower nozzle of cylindrical-shaped structure ejects further compresses mask plate, to be closely attached on it to be processed
On the inwall of workpiece, so as to by the pattern etch on mask plate on cylinder inner wall, or on the inwall of bearing shell shape part.
As a kind of preferred embodiment, the curvature of liquid outlet is not more than 180 °.
It should be noted that in order to ensure the speed of arcuation jet that negative electrode nozzle ejects and pressure reach processing will
Ask, the radian of the arcuation liquid outlet for the curved surface jet electrode that the injection in the embodiment of the present invention is formed is no more than 180 °, and its is specific
Numerical value can be determined the embodiment of the present invention according to actual conditions and particular determination is not done to this, can realize the embodiment of the present invention
Purpose.
As a kind of preferred embodiment, the width range of liquid outlet is 0.1mm~1mm.
It should be noted that the speed and pressure of the arcuation jet ejected for the purposes of guarantee negative electrode nozzle reach processing
It is required that while avoid causing electrolyte atomizing because liquid outlet is too small, the width of arcuation liquid outlet can be arranged on 0.1mm~
In the range of 1mm, its concrete numerical value can be determined the embodiment of the present invention according to actual conditions and particular determination is not done to this, can be real
The purpose of the existing embodiment of the present invention.
As a kind of preferred embodiment, in addition to digital control platform, for controlling negative electrode nozzle to carry out scanning motion up and down
Or rotary motion.
It should also be noted that, in order to improve processing efficiency, negative electrode nozzle can be controlled by digital control platform, it is right
It can move back and forth the jet electrode to be formed in spherical negative electrode nozzle, by scanning machining region in blocks, improve processing efficiency；It is right
In cylindrical cathode nozzle it can be made to carry out rotating operation, when processing complete circle negative camber, by making columnar jets electric
Pole, which turns an angle, realizes processing to whole cylinder negative camber, to improve processing efficiency, specifically refer to Fig. 6.
As a kind of preferred embodiment, negative electrode shower nozzle is the shower nozzle being made based on metal material, and mask plate is exhausted
Edge mask plate.
Specifically, negative electrode of embodiment of the present invention shower nozzle can be metallic conduction shower nozzle, the negative pole of power supply can now be connect
On the negative electrode shower nozzle, mask plate uses isolation masks plate, when the arcuation jet (powered) ejected by negative electrode shower nozzle is by exhausted
Hollow out position on edge mask plate makes circuit turn-on after being contacted with anode workpiece, so as to be performed etching to anode workpiece.
Certainly, the mask plate in the embodiment of the present invention is also conductive mask plate, and conductive mask plate and inwall to be processed
The side (lower surface of mask plate) of contact is provided with insulating barrier, and the negative pole of power supply can also be connected on conductive mask plate,
So that it is powered after the arcuation jet ejected by negative electrode shower nozzle is the upper surface of conductive mask plate, and pass through conduction
Hollow out position makes circuit turn-on after being contacted with anode workpiece on mask plate, so as to be performed etching to anode workpiece.
As a kind of preferred embodiment, isolation masks plate is flexible insulation mask plate.
It should be noted that in order to improve the compactness of mask plate and inwall to be processed, flexible insulation mask can be used
Plate, flexible insulation mask plate can be transformed into plane, again will be flexible exhausted after pattern is inscribed on flexible insulation mask plate
Edge mask plate is attached on inwall to be processed, and it is limited to solve conductive mask plate flexibility, it is difficult to is adjacent in inwall to be processed and is treated
The problem of being difficult to clamping between workpieces processing, conductive template and insulating barrier.It can also be saved using flexible insulation mask plate simultaneously
Need in the prior art mask prepare by way of prepare mask when need by gluing, front baking, exposure, after dry, development
It is directly few using flexible insulation mask plate link in the application Deng the technological process of traditional fabrication mask, it is easy to implement.
As a kind of preferred embodiment, negative electrode shower nozzle is the shower nozzle being made based on nonmetallic materials, and mask plate is
Conductive mask plate.
Specifically, negative electrode of embodiment of the present invention shower nozzle can be not only metallic conduction shower nozzle, can also be nonmetallic materials
The shower nozzle being made, namely the negative electrode shower nozzle in the embodiment of the present invention are non-conductive, now, conductive mask plate and inwall to be processed
The side (lower surface of mask plate) of contact is needed to be provided with insulating barrier, and the negative pole of power supply is connected on conductive mask plate, from
And make powered after the arcuation jet ejected by negative electrode shower nozzle is the upper surface of conductive mask plate, and covered by conduction
Hollow out position makes circuit turn-on after being contacted with anode workpiece in template, so as to be performed etching to anode workpiece.
It should be noted that specifically which kind of material to make the negative electrode shower nozzle embodiment of the present invention using does not do special limit to this
Fixed, it is the purpose of embodiment that can realize the present invention.
On the basis of above-described embodiment, the embodiment of the present invention additionally provides a kind of inwall micro-structural Electrolyzed Processing equipment,
Including inwall micro-structural electrolytic machining device described above.
It should be noted that the inwall micro-structural Electrolyzed Processing equipment that the embodiment of the present invention is provided has and above-mentioned implementation
Micro-structural processing unit (plant) identical beneficial effect provided in example.Add for micro-structural involved in the embodiment of the present invention
The specific introduction that frock is put refer to above-described embodiment the application and will not be repeated here.
It should also be noted that, in this manual, such as term " comprising ", "comprising" or its any other variant meaning
Covering including for nonexcludability, so that process, method, article or equipment including a series of elements not only include that
A little key elements, but also the other element including being not expressly set out, or also include for this process, method, article or
The intrinsic key element of equipment.In the absence of more restrictions, the key element limited by sentence "including a ...", is not arranged
Except other identical element in the process including the key element, method, article or equipment being also present.
The foregoing description of the disclosed embodiments, professional and technical personnel in the field are enable to realize or using the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one
The most wide scope caused.
Claims (10)
1. a kind of inwall micro-structural electrolytic machining device, it is characterised in that including workbench, fixture, reservoir, discharging tube, the moon
Pole shower nozzle and mask plate；Wherein：
The negative electrode shower nozzle is provided with inlet and liquid outlet, and the liquid outlet is circular arc cable architecture, the curvature of the liquid outlet with
The curvature of the inwall to be processed of workpiece to be processed is consistent, and plane where the liquid outlet is hung down with curved surface where the inwall to be processed
Directly；The workbench is used to fix the workpiece to be processed by the fixture；The mask plate is attached at described to be processed interior
On wall；The reservoir is used to store electrolyte, and the discharging tube is used to the electrolyte being delivered to institute from the reservoir
The inlet of negative electrode shower nozzle is stated, the liquid outlet of the negative electrode shower nozzle is used to spray the electrolyte, makes the arcuation jet to be formed
On injection to the mask plate, to be processed to the inwall to be processed.
2. inwall micro-structural electrolytic machining device according to claim 1, it is characterised in that the negative electrode shower nozzle is spherical
Structure, the liquid outlet are located at the center of the negative electrode head of the nozzle.
3. inwall micro-structural electrolytic machining device according to claim 1, it is characterised in that the negative electrode shower nozzle is cylinder
Shape structure, plane where the liquid outlet are vertical with the axis of the negative electrode shower nozzle.
4. the inwall micro-structural electrolytic machining device according to Claims 2 or 3, it is characterised in that the song of the liquid outlet
Rate is not more than 180 °.
5. inwall micro-structural electrolytic machining device according to claim 4, it is characterised in that the width model of the liquid outlet
Enclose for 0.1mm~1mm.
6. inwall micro-structural electrolytic machining device according to claim 4, it is characterised in that also including digital control platform, use
Scanning motion or rotary motion up and down are carried out in controlling the negative electrode nozzle.
7. the inwall micro-structural electrolytic machining device according to Claims 2 or 3, it is characterised in that the negative electrode shower nozzle is
The shower nozzle being made based on metal material, the mask plate are isolation masks plate.
8. inwall micro-structural electrolytic machining device according to claim 6, it is characterised in that the isolation masks plate is soft
Property isolation masks plate.
9. the inwall micro-structural electrolytic machining device according to Claims 2 or 3, it is characterised in that the negative electrode shower nozzle is
The shower nozzle being made based on nonmetallic materials, the mask plate are conductive mask plate.
10. a kind of inwall micro-structural Electrolyzed Processing equipment, it is characterised in that including as described in claim 1 to 9 any one
Inwall micro-structural electrolytic machining device.
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