CN107838122A - Full-automatic ultrasonic cleaner - Google Patents

Full-automatic ultrasonic cleaner Download PDF

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Publication number
CN107838122A
CN107838122A CN201711368890.1A CN201711368890A CN107838122A CN 107838122 A CN107838122 A CN 107838122A CN 201711368890 A CN201711368890 A CN 201711368890A CN 107838122 A CN107838122 A CN 107838122A
Authority
CN
China
Prior art keywords
cleaning
lifting
full
ultrasonic cleaner
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201711368890.1A
Other languages
Chinese (zh)
Other versions
CN107838122B (en
Inventor
马国强
王先权
梁进
苏相河
翟振卫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huizhou U&t Electronics Co Ltd
Original Assignee
Huizhou U&t Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN201711368890.1A priority Critical patent/CN107838122B/en
Publication of CN107838122A publication Critical patent/CN107838122A/en
Application granted granted Critical
Publication of CN107838122B publication Critical patent/CN107838122B/en
Active legal-status Critical Current
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/045Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/045Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
    • B08B3/047Containers specially adapted therefor

Abstract

A kind of Full-automatic ultrasonic cleaner, including:Cleaning platform, cleaning lifting feeding device, cleaning transfer device and ultrasonic cleaning equipment;Cleaning platform is used to place the cleaning basket equipped with wave filter;Cleaning lifting feeding device is used to carry out crawl feeding to cleaning basket;Cleaning transfer device is used to carry out transfer transmission to cleaning lifting feeding device;Ultrasonic cleaning equipment is used to carry out ultrasonic wave cleaning treatment to cleaning basket.Above-mentioned Full-automatic ultrasonic cleaner is by setting cleaning platform, cleaning lifting feeding device, cleaning transfer device and ultrasonic cleaning equipment, so as to complete to carry out ultrasonic wave cleaning operation to network filter, thus instead of artificial mode of operation, so, operating efficiency can be effectively improved, and the cleaning quality of network filter is higher.

Description

Full-automatic ultrasonic cleaner
Technical field
The present invention relates to network filter cleaning technique field, more particularly to a kind of Full-automatic ultrasonic cleaner.
Background technology
At present, ultrasonic wave is propagated in a liquid, makes liquid and rinse bath in next vibration of ultrasonic frequency, liquid with it is clear Washing trough has oneself intrinsic frequency when vibrating, and this vibration frequency is frequency of sound wave, so people just hear buzz.With cleaning The continuous development of industry, increasing industry and enterprise have applied to supersonic wave cleaning machine.To ultrasonic cleaning machine principle by The high-frequency oscillation signal that supersonic generator is sent, high frequency machinery vibration is converted into by transducer to travel to medium -- it is clear Wash in solvent, the forward directed radiation of ultrasonic wave density interphase in cleaning fluid, flow liquid and produce ten hundreds of a diameter of 50-500 μm of micro-bubble, the micro-bubble being present in liquid vibrate in the presence of sound field.These bubbles are in ultrasonic wave The negative pressuren zone of longitudinal propagation is formed, growth, and in zone of positive pressure, when acoustic pressure reaches certain value, bubble increases rapidly, then suddenly Closure.And shock wave is produced when bubble closes, thousands of individual atmospheric pressure are produced around it, insoluble dirt is destroyed and makes them It is scattered in cleaning fluid, when group's particle is wrapped up in by greasy dirt and when being attached on cleaning parts surface, oil is emulsified, solids and de- From so as to reach the purpose of cleaning part purification.It is this be referred to as " cavitation " effect during, bubble closure can be formed it is several The high temperature of Baidu and the instantaneous pressure more than 1000 air pressure.The advantages of supersonic wave cleaning machine is:Ultrasonic wave cleaning performance is good, behaviour Make simple.The sound that people are heard is frequency 20-20000Hz acoustic signals, and the sound wave higher than 20000Hz is referred to as ultrasound Ripple, the transmission of sound wave produce a large amount of minute bubbles according to sine curve longitudinal propagation.One reason is that locally occur drawing in liquid answering Power and form negative pressure, the reduction of pressure makes to be dissolved in the gas supersaturation of liquid originally, and is escaped from liquid, turns into minute bubbles;Separately One reason is that powerful tension is empty into one liquid " tearing ", referred to as cavitation.
However, existing network filter is typically all to be placed the charging tray equipped with network filter by artificial mode Cleaned in the clear groove of ultrasonic wave, it is to be cleaned after the completion of again by manually carrying out feeding.Artificial mode not only production efficiency Not high and artificial cleaning operation causes the cleannes of network filter not high, so as to influence the cleaning of network filter effect Fruit.
The content of the invention
The purpose of the present invention is to overcome weak point of the prior art, there is provided one kind replaces artificial progress feeding and feeding Operation, and the more preferable Full-automatic ultrasonic cleaner of cleaning performance of network filter.
The purpose of the present invention is achieved through the following technical solutions:
A kind of Full-automatic ultrasonic cleaner, including:
Cleaning platform, the cleaning platform are used to place the cleaning basket equipped with wave filter;
Cleaning lifting feeding device, the cleaning lifting feeding device are used to carry out crawl feeding to the cleaning basket;
Transfer device is cleaned, the cleaning transfer device is used to carry out transfer transmission to the cleaning lifting feeding device;
Ultrasonic cleaning equipment, the ultrasonic cleaning equipment are used to carry out ultrasonic wave cleaning treatment to the cleaning basket.
In one of the embodiments, it is described cleaning lifting feeding device include lifting drive division, lifting mounting plate, Upper flitch and lifting clamping jaw are lifted, the lifting drive division is arranged on the lifting mounting plate, the lifting upper flitch With the lifting drive division drive connection, the lifting clamping jaw is arranged in the lifting upper flitch.
In one of the embodiments, the lifting drive division includes lifting actuator and elevating screw, the lifting silk Bar is rotatably installed on the lifting mounting plate, the lifting actuator and the elevating screw drive connection.
In one of the embodiments, lifting mounting blocks are provided with the lifting upper flitch, the lifting mounting blocks with The elevating screw connection.
In one of the embodiments, lifting lead, the lifting installation are provided with the lifting mounting plate Block is socketed on the lifting lead.
In one of the embodiments, the lifting actuator is lifting motor.
In one of the embodiments, feeding is provided with the cleaning platform and places plate and blanking placement plate, it is described Feeding is placed plate and is separately mounted to blanking placement plate on two sides of the cleaning platform.
In one of the embodiments, it is logical with beginning with multiple filterings on blanking placement plate to place plate for the feeding Hole.
In one of the embodiments, multiple filtering through hole rectangular array distributions.
In one of the embodiments, it is rectangular parallelepiped structure that the feeding, which places plate and places plate with the blanking,.
Compared with prior art, the present invention at least has advantages below:
Above-mentioned Full-automatic ultrasonic cleaner is by setting cleaning platform, cleaning lifting feeding device, cleaning transfer dress Put and ultrasonic cleaning equipment, so as to complete to carry out ultrasonic wave cleaning operation to network filter, thus instead of artificial operation Mode, it so, it is possible effectively to improve operating efficiency, and the cleaning quality of network filter is higher.
Brief description of the drawings
Fig. 1 is the structural representation of the Full-automatic ultrasonic cleaner of one embodiment of the invention;
Fig. 2 is structure of the cleaning lifting feeding device of the Full-automatic ultrasonic cleaner in Fig. 1 with cleaning transfer device Schematic diagram.
Embodiment
For the ease of understanding the present invention, the present invention is described more fully below with reference to relevant drawings.In accompanying drawing Give the better embodiment of the present invention.But the present invention can realize in many different forms, however it is not limited to herein Described embodiment.On the contrary, the purpose for providing these embodiments is to make to understand more the disclosure Add thorough and comprehensive.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element Or there may also be element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ", For illustrative purposes only, it is unique embodiment to be not offered as " right side " and similar statement.
Unless otherwise defined, all of technologies and scientific terms used here by the article is with belonging to technical field of the invention The implication that technical staff is generally understood that is identical.Term used in the description of the invention herein is intended merely to description tool The purpose of the embodiment of body, it is not intended that in the limitation present invention.Term as used herein " and/or " include one or more The arbitrary and all combination of related Listed Items.
In one embodiment, a kind of Full-automatic ultrasonic cleaner, including:Cleaning platform, cleaning lifting feeding device, Clean transfer device and ultrasonic cleaning equipment;The cleaning platform is used to place the cleaning basket equipped with wave filter;It is described clear Lifting feeding device is washed to be used to carry out crawl feeding to the cleaning basket;The cleaning transfer device is used to lift the cleaning Feeding device carries out transfer transmission;The ultrasonic cleaning equipment is used to carry out ultrasonic wave cleaning treatment to the cleaning basket.Institute Stating cleaning lifting feeding device includes lifting drive division, lifting mounting plate, lifting upper flitch and lifting clamping jaw, the lifting Drive division is arranged on the lifting mounting plate, the lifting upper flitch and the lifting drive division drive connection, described Clamping jaw is lifted to be arranged in the lifting upper flitch.The lifting drive division includes lifting actuator and elevating screw, the liter Drop screw mandrel is rotatably installed on the lifting mounting plate, the lifting actuator and the elevating screw drive connection.Institute State and lifting mounting blocks are provided with lifting upper flitch, the lifting mounting blocks are connected with the elevating screw.The lifting installation Lifting lead is provided with fixed plate, the lifting mounting blocks are socketed on the lifting lead.The lifting actuator For lifting motor.Feeding be provided with the cleaning platform place plate and blanking and place plate, the feeding place plate with it is described Blanking is placed plate and is separately mounted on two sides of the cleaning platform.The feeding is placed plate and placed with the blanking on plate Begin with multiple filtering through holes.Multiple filtering through hole rectangular array distributions.The feeding places plate and the blanking It is rectangular parallelepiped structure to place plate.Above-mentioned Full-automatic ultrasonic cleaner is by setting cleaning platform, cleaning lifting feeding to fill Put, clean transfer device and ultrasonic cleaning equipment, so as to complete to carry out ultrasonic wave cleaning operation, thus generation to network filter For artificial mode of operation, so, it is possible effectively to improve operating efficiency, and the cleaning quality of network filter is higher.
In order to preferably be illustrated to above-mentioned Full-automatic ultrasonic cleaner, to more fully understand above-mentioned fully-automatic ultrasonic The design of ripple cleaning machine.Referring to Fig. 1, a kind of Full-automatic ultrasonic cleaner 10, including:Cleaning platform 100, cleaning lifting Feeding device 200, cleaning transfer device 300 and ultrasonic cleaning equipment 400, cleaning platform 100 are used to place equipped with filtering The cleaning basket 500 of device.Cleaning lifting feeding device 200 is used to carry out crawl feeding to cleaning basket 500.Clean transfer device 300 For carrying out transfer transmission to cleaning lifting feeding device 200.Ultrasonic cleaning equipment 400 is used to 500 surpass cleaning basket Sound wave cleaning treatment.
Referring to Fig. 2, cleaning lifting feeding device 200 includes lifting drive division 210, lifting mounting plate 220, lifting Upper flitch 230 and lifting clamping jaw (not shown), lifting drive division 210 are arranged on lifting mounting plate 220, lift upper flitch 230 are arranged in lifting upper flitch 230 with the lifting drive connection of drive division 210, lifting clamping jaw.
Referring to Fig. 2, lifting drive division 210 includes lifting actuator 211 and elevating screw 212, elevating screw 211 It is rotatably installed on lifting mounting plate 220, lifting actuator 211 and the drive connection of elevating screw 212.Lift upper flitch Lifting mounting blocks 231 are provided with 230, lifting mounting blocks 231 are connected with elevating screw 211.Set on lifting mounting plate 220 Lifting lead 221 is equipped with, lifting mounting blocks 231 are socketed on lifting lead 221.In the present embodiment, actuator is lifted 211 be lifting motor.
Referring to Fig. 1, feeding is provided with cleaning platform 100 and places plate 110 and blanking placement plate 120, feeding Plate 110 is placed to be separately mounted on two sides of cleaning platform 100 with blanking placement plate 120.Further, feeding places plate 110 with beginning with multiple filtering through holes 130 on blanking placement plate 120.Multiple filtering through hole 130 rectangular array distributions. In the present embodiment, it is rectangular parallelepiped structure that feeding, which places plate 110 and places plate 120 with blanking,.
It should be noted that the cleaning basket 500 equipped with wave filter is by being manually or mechanically manually placed at cleaning platform 100 Feeding place plate 110 on, then by clean lifting feeding device 200 on lifting clamping jaw to cleaning basket 500 be clamped, Lifting clamping jaw is mechanical grip of the prior art.After cleaning the clamping of basket 500, elevating screw is driven by lifting actuator 211 212 are rotated, so that lifting upper flitch 230 carries out ascending motion, so as to which cleaning basket 500 removed, then pass through cleaning The driving cleaning lifting feeding device 200 of transfer device 300 moves, and so completes feeding and carries operation.
With reference to shown in Fig. 1 and Fig. 2, cleaning transfer device 300 includes:Shift fixed plate 310, transfer drive division 320 and turn Sliding shoe 330 is moved, is offered in the transfer fixed plate 310 and slides locating groove 311, the transfer sliding shoe 330 engaging peace On the slip locating groove 311;The transfer drive division 320 includes transfer motor 321, transfer timing belt 322 With shifting drive lead screw 323, the transfer motor 321 passes through the transfer timing belt 322 and the transfer drive lead screw 323 drive connections, the transfer sliding shoe 330 are connected with the transfer drive lead screw 323, the lifting mounting plate 220 On the transfer sliding shoe 330.
It should be noted that cleaning lifting feeding device 200 will be cleaned after basket 500 carries, it is logical to move motor 321 Cross the driving transfer drive lead screw 323 of transfer timing belt 322 to be rotated, so as to which mobilization sliding shoe 330 is in transfer fixed plate Move on 310, so as to which cleaning basket 500 to be moved to the top of ultrasonic cleaning equipment 400, then risen again by cleaning Drop feeding device 200, which is placed in ultrasonic cleaning equipment 400, carries out cleaning operation.Similarly, it is clear to clean the completion ultrasonic wave of basket 500 After washing operation, by the associated movement for cleaning lifting feeding device 200 with cleaning transfer device 300, cleaning basket 500 is carried and turned Move on to blanking to place on plate 120, then carrying out blanking by artificial or corresponding robotic device carries operation.
Referring to Fig. 1, ultrasonic cleaning equipment 400 includes:First ultrasonic wave cleaning area 410, the second ultrasonic wave are clear Wash area 420 and rinsing area 430, the first ultrasonic wave cleaning area 410, the second ultrasonic wave cleaning area 420 and the rinsing Area 430 is set gradually.The first cleaning standing groove 411, second ultrasonic wave are provided with the first ultrasonic wave cleaning area 410 It is provided with the second cleaning standing groove 421 on cleaning area 420, is provided with rinsing standing groove 431 in the rinsing area 430, described the One cleaning standing groove 411, second cleans in standing groove 421 and rinsing standing groove 431 and is provided with cleaning fluid (not shown).Cleaning Liquid is the cleaning fluid for being used to clean wave filter in the prior art.
It should be noted that the cleaning basket 500 equipped with wave filter is by cleaning lifting feeding device 200 and cleaning transfer dress The motion for putting 300 is placed sequentially in progress in the first cleaning standing groove 411, second cleaning standing groove 421 and rinsing standing groove 431 Cleaning operation, cleaning operation is carried out to the wave filter in cleaning basket 500 by way of ultrasonic wave cleaning, so as to reach wave filter The purpose of cleaning.
It is clear so as to make by placing plate 110 with setting multiple filtering through holes 130 on blanking placement plate 120 in feeding Cleaning fluid in washing basket 500 flows into corresponding recovering mechanism from filtering through hole 130 and reclaimed.
Compared with prior art, the present invention at least has advantages below:
Above-mentioned Full-automatic ultrasonic cleaner 10 is by setting cleaning platform 100, cleaning lifting feeding device 200, clear Transfer device 300 and ultrasonic cleaning equipment 400 are washed, so as to complete to carry out ultrasonic wave cleaning operation to network filter, thus Instead of artificial mode of operation, so, it is possible effectively to improve operating efficiency, and the cleaning quality of network filter is higher.
Embodiment described above only expresses the several embodiments of the present invention, and its description is more specific and detailed, but simultaneously Can not therefore it be construed as limiting the scope of the patent.It should be pointed out that come for one of ordinary skill in the art Say, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention Scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.

Claims (10)

  1. A kind of 1. Full-automatic ultrasonic cleaner, it is characterised in that including:
    Cleaning platform, the cleaning platform are used to place the cleaning basket equipped with wave filter;
    Cleaning lifting feeding device, the cleaning lifting feeding device are used to carry out crawl feeding to the cleaning basket;
    Transfer device is cleaned, the cleaning transfer device is used to carry out transfer transmission to the cleaning lifting feeding device;
    Ultrasonic cleaning equipment, the ultrasonic cleaning equipment are used to carry out ultrasonic wave cleaning treatment to the cleaning basket.
  2. 2. Full-automatic ultrasonic cleaner according to claim 1, it is characterised in that the cleaning lifting feeding device bag Lifting drive division, lifting mounting plate, lifting upper flitch and lifting clamping jaw are included, the lifting drive division is arranged on the lifting On mounting plate, the lifting upper flitch and the lifting drive division drive connection, the lifting clamping jaw are arranged on the liter Drop in upper flitch.
  3. 3. Full-automatic ultrasonic cleaner according to claim 2, it is characterised in that the lifting drive division includes lifting Actuator and elevating screw, the elevating screw be rotatably installed in it is described lifting mounting plate on, it is described lifting actuator with The elevating screw drive connection.
  4. 4. Full-automatic ultrasonic cleaner according to claim 3, it is characterised in that be provided with the lifting upper flitch Mounting blocks are lifted, the lifting mounting blocks are connected with the elevating screw.
  5. 5. Full-automatic ultrasonic cleaner according to claim 4, it is characterised in that set on the lifting mounting plate Lifting lead is equipped with, the lifting mounting blocks are socketed on the lifting lead.
  6. 6. Full-automatic ultrasonic cleaner according to claim 3, it is characterised in that the lifting actuator is lifting electricity Machine.
  7. 7. Full-automatic ultrasonic cleaner according to claim 1, it is characterised in that be provided with the cleaning platform Feeding places plate and places plate with blanking, and the feeding places plate and the blanking places plate and is separately mounted to the cleaning platform Two sides on.
  8. 8. Full-automatic ultrasonic cleaner according to claim 7, it is characterised in that the feeding place plate with it is described under Material is placed and begins with multiple filtering through holes on plate.
  9. 9. Full-automatic ultrasonic cleaner according to claim 8, it is characterised in that multiple filtering through holes are rectangular Array distribution.
  10. 10. Full-automatic ultrasonic cleaner according to claim 9, it is characterised in that the feeding place plate with it is described It is rectangular parallelepiped structure that plate is placed in blanking.
CN201711368890.1A 2017-12-18 2017-12-18 Full-automatic ultrasonic cleaning machine Active CN107838122B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711368890.1A CN107838122B (en) 2017-12-18 2017-12-18 Full-automatic ultrasonic cleaning machine

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CN107838122A true CN107838122A (en) 2018-03-27
CN107838122B CN107838122B (en) 2021-02-19

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108723002A (en) * 2018-05-30 2018-11-02 佛山领新信息科技有限公司 A kind of glass ultrasonic cleaning device
CN108746064A (en) * 2018-07-03 2018-11-06 广西壮族自治区农业科学院甘蔗研究所 A kind of cleaning device for tissue culture flasks
CN109335684A (en) * 2018-09-28 2019-02-15 芜湖华宇彩晶科技有限公司 A kind of screen conveying device of supersonic wave cleaning machine
CN109368249A (en) * 2018-11-07 2019-02-22 天津中环领先材料技术有限公司 A kind of grinding cleaning machine automatic charging device
CN113695308A (en) * 2021-07-20 2021-11-26 田峰 Semiconductor wafer pretreatment system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6684889B2 (en) * 2000-04-20 2004-02-03 Karl Suss France Method and device for treating a substrate
CN203910837U (en) * 2014-06-19 2014-10-29 温州海旭科技有限公司 Full-automatic silicon wafer cleaning machine
CN104226631A (en) * 2014-09-04 2014-12-24 南通北城科技创业管理有限公司 Ultrasonic cleaning machine
CN104941949A (en) * 2015-04-14 2015-09-30 湖南隆源自动化有限公司 Full-automatic one-armed manipulator ultrasonic cleaner and cleaning technology thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6684889B2 (en) * 2000-04-20 2004-02-03 Karl Suss France Method and device for treating a substrate
CN203910837U (en) * 2014-06-19 2014-10-29 温州海旭科技有限公司 Full-automatic silicon wafer cleaning machine
CN104226631A (en) * 2014-09-04 2014-12-24 南通北城科技创业管理有限公司 Ultrasonic cleaning machine
CN104941949A (en) * 2015-04-14 2015-09-30 湖南隆源自动化有限公司 Full-automatic one-armed manipulator ultrasonic cleaner and cleaning technology thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108723002A (en) * 2018-05-30 2018-11-02 佛山领新信息科技有限公司 A kind of glass ultrasonic cleaning device
CN108746064A (en) * 2018-07-03 2018-11-06 广西壮族自治区农业科学院甘蔗研究所 A kind of cleaning device for tissue culture flasks
CN109335684A (en) * 2018-09-28 2019-02-15 芜湖华宇彩晶科技有限公司 A kind of screen conveying device of supersonic wave cleaning machine
CN109368249A (en) * 2018-11-07 2019-02-22 天津中环领先材料技术有限公司 A kind of grinding cleaning machine automatic charging device
CN113695308A (en) * 2021-07-20 2021-11-26 田峰 Semiconductor wafer pretreatment system

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