CN107833853A - A kind of efficient etching machines - Google Patents
A kind of efficient etching machines Download PDFInfo
- Publication number
- CN107833853A CN107833853A CN201711265402.4A CN201711265402A CN107833853A CN 107833853 A CN107833853 A CN 107833853A CN 201711265402 A CN201711265402 A CN 201711265402A CN 107833853 A CN107833853 A CN 107833853A
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- bar
- support bar
- roller
- cross bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 47
- 239000000126 substance Substances 0.000 claims abstract description 20
- 238000005507 spraying Methods 0.000 claims abstract description 10
- 239000007921 spray Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 abstract description 10
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 8
- 238000001914 filtration Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
Abstract
A kind of efficient etching machines, including bottom plate, the chemical spraying device above the bottom plate, the holder device on the left of the chemical spraying device, the electric machine being arranged on the holder device, the support plate device above the bottom plate, rotation panel assembly, the water injector being arranged on the holder device being arranged on the bottom plate.The present invention sufficiently can separately reclaim the chemical liquid after being jetted through and water, and then can reduce the waste of resource, and can prevent from polluting environment, simple to operate, and automaticity is high, easy to use.
Description
Technical field
The present invention relates to etching technique field, more particularly, to a kind of efficient etching machines.
Background technology
Existing etching machine is provided with a nozzle, so as to which chemical liquid is sprayed onto on the material for needing to etch, so as to reach
Etching to material, then material is sprayed water again, to be cleaned up.However, after this kind of mode will be often jetted through
Chemical liquid mixes with water, influences the recovery to chemical liquid, causes the waste of resource.
Therefore, it is necessary to a kind of new technical scheme is provided to overcome drawbacks described above.
The content of the invention
It is an object of the invention to provide a kind of efficient etching machines that can effectively solve above-mentioned technical problem.
To reach the purpose of the present invention, adopt the following technical scheme that：
A kind of efficient etching machines, including bottom plate, the chemical spraying device above the bottom plate, positioned at it is described spray dress
Put left side holder device, be arranged on the holder device electric machine, the support plate device above the bottom plate,
Rotation panel assembly, the water injector being arranged on the holder device being arranged on the bottom plate, the bottom plate are provided with position
In some universal wheels below, the first collection box being positioned above, the first positioning on the right side of first collection box
Block, the second collection box on the left of first collection box, the second locating piece on the left of second collection box, it is described
Chemical spraying device includes first support bar, the first transverse slat above the first support bar, above first transverse slat
Medicine-chest, be arranged on the medicine-chest the first pipeline, be arranged on first pipeline the first water pump, be arranged at described
First shower nozzle of one pipe end, the first fix bar being arranged on first shower nozzle, the holder device include second
Strut, the first cross bar above the second support bar, the first roller being arranged on first cross bar, positioned at described
The first montant above first cross bar, the second cross bar being arranged on first montant, it is arranged at the second cross bar right-hand member
The second roller, the electric machine include the 3rd cross bar, the motor above the 3rd cross bar, be arranged at the motor
On output shaft, be arranged on the output shaft bracing wire, the second fix bar above the motor, be arranged at described
3rd roller of two fix bar upper ends, the support plate device include supporting plate, the framework above the supporting plate, are located at
The 3rd fix bar on the left of the framework, the first spring below the 3rd fix bar, below the supporting plate
Collection center, positioned at it is described collection center below screen pack, positioned at it is described collection center on the right side of connecting rod, positioned at the connecting rod
The pushing block of lower section, the rotation panel assembly include the 3rd support bar, the contiguous block above the 3rd support bar, are located at
Swivel plate above the contiguous block, the second spring on the left of the 3rd support bar, the water injector include the 4th
Support bar, the second transverse slat above the 4th support bar, the water tank above second transverse slat, be arranged at it is described
Second pipe on water tank, the second water pump being arranged on the second pipe, it is arranged at the second of the second pipe end
Shower nozzle, the 4th fix bar being arranged on second shower nozzle.
First collection box is in hollow cuboid, and the lower end of first locating piece is fixedly connected with the bottom plate,
First locating piece is acted against on the right surface of first collection box, and lower end and the bottom plate of second locating piece are consolidated
Fixed connection, second locating piece are acted against on the left surface of second collection box.
The lower end of the first support bar is fixedly connected with the bottom plate, the upper end of the first support bar and described first
Transverse slat is fixedly connected, and one end of first pipeline is connected with the medicine-chest, the other end of first pipeline and described first
Shower nozzle is connected, and the left end of first fix bar is fixedly connected with first shower nozzle, the right-hand member of first fix bar and institute
The first transverse slat is stated to be fixedly connected.
The lower end of the second support bar is fixedly connected with the bottom plate, the upper end of the second support bar and described first
Cross bar is fixedly connected, and the right-hand member of first cross bar is provided with the first groove, and first roller is provided with two, first roller
In cylinder, first roller is contained in first groove and pivotally connected with first cross bar, and described first is perpendicular
The lower end of bar is fixedly connected with first cross bar, and first montant is provided with the first through hole through its left and right surface, institute
The left end for stating the second cross bar is fixedly connected with the right surface of first montant, and the right-hand member of second cross bar is recessed provided with second
Groove, second roller are in cylinder, second roller be contained in second groove and with the second cross bar pivot
Connection.
The right-hand member of 3rd cross bar is fixedly connected with the second support bar, and the motor is fixed with the 3rd cross bar
Connection, the output shaft be in cylinder, one end of the output shaft and the motor connection, the lower end of second fix bar and
The side of the second support bar is fixedly connected, and the upper end of second fix bar is provided with the 3rd groove, and the 3rd roller is in
Cylinder, the 3rd roller are contained in the 3rd groove and pivotally connected with second fix bar, the bracing wire
Lower end is fixedly connected with the output shaft, and the upper end of the bracing wire acts against on the 3rd roller and led to through described first
Hole.
The supporting plate is provided with the second through hole through its upper and lower surface, and the framework is in hollow cuboid, described
The lower surface of framework is fixedly connected with the upper surface of the supporting plate, the right-hand member of the 3rd fix bar and the left-handed watch of the framework
Face is fixedly connected, and the left end of the 3rd fix bar is between first roller and the second roller, the first roller top
On the lower surface for leaning against the 3rd fix bar, second roller is acted against on the upper surface of the 3rd fix bar, described
The upper end of bracing wire is fixedly connected with the left end of the 3rd fix bar, the right-hand member of first spring and the left end of the supporting plate
It is fixedly connected, the left end of first spring is fixedly connected with the right-hand member of first cross bar.
The upper surface of the collection center is fixedly connected with the lower surface of the supporting plate, and the collection center is located at described second
The lower section of through hole, the upper surface of the screen pack with it is described collection center lower surface be fixedly connected, the upper end of the connecting rod with
The lower surface of the supporting plate is fixedly connected, and the lower end of the connecting rod is fixedly connected with the pushing block, the pushing block
Longitudinal section is in a rectangular trapezoid, and the left surface of the pushing block takes the form of inclined plane.
3rd support bar is in vertical shape, and the lower end of the 3rd support bar is fixedly connected with the bottom plate, and described
The upper end of three support bars is provided with the 4th groove, and the contiguous block is fixedly connected with the swivel plate, and the contiguous block is contained in institute
It is interior and pivotally connected with the 3rd support bar to state the 4th groove, the swivel plate is located at the lower section of the screen pack, the rotation
The right-hand member of flap is located at the top of first collection box, and the left end of the swivel plate is located at the top of second collection box,
The lower end of the second spring is fixedly connected with the bottom plate, and the upper end of the second spring is fixedly connected with the swivel plate.
The lower end of 4th support bar is fixedly connected with second cross bar, the upper end of the 4th support bar with it is described
Second transverse slat is fixedly connected, and the water tank is arranged on second transverse slat, and the lower end of the second pipe connects with the water tank
Connect, the other end of the second pipe is connected with second shower nozzle, one end and second shower nozzle of the 4th fix bar
It is fixedly connected, the other end of the 4th fix bar is fixedly connected with second transverse slat.
Compared with prior art, the present invention has the advantages that：Efficient etching machines of the invention will can be jetted through
Chemical liquid and water afterwards separately reclaims, and then can reduce the waste of resource, and can prevent from polluting environment, behaviour
Make simple, automaticity height, easy to use, etching efficiency height.
Brief description of the drawings
Fig. 1 is the structural representation of the efficient etching machines of the present invention.
Embodiment
The efficient etching machines of the present invention are made with clearly complete explanation below in conjunction with accompanying drawing.
As shown in figure 1, the efficient etching machines of the present invention include bottom plate 1, the chemical spraying device 2 above the bottom plate 1,
Holder device 3 positioned at the left side of the chemical spraying device 2, the electric machine 4 being arranged on the holder device 3, positioned at the bottom
The support plate device 5 of the top of plate 1, the rotation panel assembly 6 being arranged on the bottom plate 1, the spray being arranged on the holder device 3
Water installations 7.
As shown in figure 1, the bottom plate 1 is in cuboid, the bottom plate 1 be provided be disposed below some universal wheels 11,
The first collection box 12 for being positioned above, the first locating piece 13 positioned at the right side of the first collection box 12, positioned at described first
Second collection box 14 in the left side of collection box 12, the second locating piece 15 positioned at the left side of the second collection box 14.The universal wheel
11 are provided with four, and the universal wheel 11 is arranged on the lower surface of the bottom plate 1, and the universal wheel 11 can drive the bottom plate
1 movement.First collection box 12 is in hollow cuboid, and the upper end of first collection box 12 causes described provided with opening
The longitudinal section of one collection box 12 is in concave shape, and first collection box 12 is placed on the bottom plate 1.First locating piece 13
In cuboid, the lower end of first locating piece 13 is fixedly connected with the bottom plate 1, and first locating piece 13 acts against described
On the right surface of first collection box 13.Second collection box 14 is in hollow cuboid, the upper end of second collection box 14
Provided with opening so that the longitudinal section of second collection box 14 is in concave shape, second collection box 14 is placed on the bottom plate 1
On.The lower end of second locating piece 15 is fixedly connected with the bottom plate 1, and second locating piece 15 acts against described second time
On the left surface for receiving case 14.
As described in Figure 1, the chemical spraying device 2 includes first support bar 21, the above the first support bar 21
One transverse slat 22, the medicine-chest 23 above first transverse slat 22, the first pipeline 24 being arranged on the medicine-chest 23, it is arranged at
The first water pump 25 on first pipeline 24, be arranged at the first shower nozzle 26 of the end of the first pipeline 24, be arranged at it is described
The first fix bar 27 on first shower nozzle 26.The first support bar 21 is in vertical shape, the lower end of the first support bar 21 with
The bottom plate 1 is fixedly connected, and the upper end of the first support bar 21 is fixedly connected with first transverse slat 22.First transverse slat
22 is horizontal.The medicine-chest 23 is placed on first transverse slat 22, and chemical liquid is placed with the medicine-chest 23.Described
One end of one pipeline 24 is connected with the medicine-chest 23, and the inside of first pipeline 24 communicates with the inside of the medicine-chest 23, makes
The chemical liquid obtained in the medicine-chest 23 can be entered in first pipeline 24, the other end of first pipeline 24 and institute
The first shower nozzle 26 is stated to connect.First water pump 25 and power supply electric connection (not shown), electric energy, first water are provided for it
Pump 25 is provided with switch (not shown), conveniently controls it to open or close, first water pump 25 can be by medicine-chest 23
Chemical liquid is pumped into first pipeline 24.Down, first shower nozzle 26 is common on the market to first shower nozzle 26
Shower nozzle, it is prior art, therefore be will not be repeated here.The left end of first fix bar 27 is fixed with first shower nozzle 26
Connection, the right-hand member of first fix bar 27 are fixedly connected with first transverse slat 22.
As shown in figure 1, the holder device 3 includes second support bar 31, the above the second support bar 31
One cross bar 32, the first roller 33 being arranged on first cross bar 32, the first montant above first cross bar 32
34th, the second cross bar 35 for being arranged on first montant 34, the second roller 36 for being arranged at the right-hand member of the second cross bar 35.Institute
It is in vertical shape to state second support bar 31, and the lower end of the second support bar 31 is fixedly connected with the bottom plate 1, second support
The upper end of bar 31 is fixedly connected with first cross bar 32.First cross bar 32 is in cuboid and horizontal positioned, and described first
The right-hand member of cross bar 32 is provided with the first groove 321, and first groove 321 is square.First roller 33 is described provided with two
First roller 33 is in cylinder, first roller 33 be contained in first groove 321 and with the pivot of the first cross bar 32
Axis connection so that first roller 33 can be in the internal rotation of the first groove 321.First montant 34 in cuboid and
Vertical to place, the lower end of first montant 34 is fixedly connected with first cross bar 32, and first montant 34 is provided with and passed through
The first through hole 341 on its left and right surface is worn, the first through hole 341 is square.Second cross bar 35 is in cuboid and level
Place, the left end of second cross bar 35 is fixedly connected with the right surface of first montant 34, the right side of second cross bar 35
End is provided with the second groove.Second roller 36 is in cylinder, second roller 36 be contained in second groove and with
Second cross bar 35 is pivotally connected so that second roller 36 can be in the second groove internal rotation.
As shown in figure 1, the electric machine 4 include the 3rd cross bar 41, the motor 42 above the 3rd cross bar 41,
The output shaft 43 that is arranged on the motor 42, the bracing wire 46 being arranged on the output shaft 43, above the motor 42
The second fix bar 44, be arranged at the 3rd roller 45 of the upper end of the second fix bar 44.3rd cross bar 41 is horizontal,
The right-hand member of 3rd cross bar 41 is fixedly connected with the second support bar 31.The motor 42 electrically connects with power supply (not shown)
Connect, electric energy is provided for it, the motor 42 is provided with switch (not shown), conveniently controls it to open or close, the motor
42 are fixedly connected with the 3rd cross bar 41.The output shaft 43 is in cylinder, one end of the output shaft 43 and the motor
42 connections so that the motor 42 can drive the output shaft 43 to rotate.Second fix bar 44 is oblique, and described the
The lower end of two fix bars 44 is fixedly connected with the side of the second support bar 31, and the upper end of second fix bar 44 is provided with the
Three grooves.3rd roller 45 is in cylinder, and the 3rd roller 45 is contained in the 3rd groove and with described second
Fix bar 44 is pivotally connected so that the 3rd roller 45 can be in the 3rd groove internal rotation.The lower end of the bracing wire 46
It is fixedly connected with the output shaft 43, the upper end of the bracing wire 46 acts against on the 3rd roller 45 and led to through described first
Hole 341.
As shown in figure 1, the support plate device 5 includes supporting plate 52, the framework 51 above the supporting plate 52, position
In the 3rd fix bar 53 in the left side of framework 51, the first spring 54 below the 3rd fix bar 53, positioned at described
The lower section of supporting plate 52 collects center 55, the screen pack 56 positioned at the lower section of collection center 55, positioned at the right side of collection center 55
Connecting rod 57, the pushing block 58 positioned at the lower section of connecting rod 57.The supporting plate 52 is in cuboid, is set in the supporting plate 52
There is the second through hole 521 through its upper and lower surface, second through hole 521 is rounded.The framework 51 is in hollow cuboid,
The upper and lower surface of the framework 51 is communicated, and the lower surface of the framework 51 is fixedly connected with the upper surface of the supporting plate 52.Institute
It is in cuboid to state the 3rd fix bar 53, and the right-hand member of the 3rd fix bar 53 is fixedly connected with the left surface of the framework 51, institute
The left end for stating the 3rd fix bar 53 is between the roller 36 of the first roller 33 and second, and first roller 33 acts against institute
On the lower surface for stating the 3rd fix bar 53, second roller 36 is acted against on the upper surface of the 3rd fix bar 53, so as to
3rd fix bar 53 is played a supporting role, the left end of the upper end of the bracing wire 46 and the 3rd fix bar 53, which is fixed, to be connected
Connect.The right-hand member of first spring 54 is fixedly connected with the left end of the supporting plate 52, the left end of first spring 54 and institute
The right-hand member for stating the first cross bar 32 is fixedly connected, so as to be played a supporting role to the supporting plate 52.The vertical of collection center 55 cuts
Face is in isosceles trapezoid, and the upper and lower surface of the collection center 55 communicates, the upper surface of the collection center 55 and the supporting plate 52
Lower surface is fixedly connected, and the collection center 55 is located at the lower section of second through hole 521, second through hole 521 and the collection
The inside of center 55 communicates.The screen pack 56 is in cuboid, and the upper surface of the screen pack 56 collects under center 55 with described
Surface is fixedly connected.The connecting rod 57 is in cuboid, and the upper end of the connecting rod 57 and the lower surface of the supporting plate 52 are consolidated
Fixed connection, the lower end of the connecting rod 57 is fixedly connected with the pushing block 58.The longitudinal section of the pushing block 58 is at right angles terraced
Shape, the left surface of the pushing block 58 take the form of inclined plane, and are tilted in lower left upper right side.
As shown in figure 1, the rotation panel assembly 6 includes the 3rd support bar 61, above the 3rd support bar 61
Contiguous block 62, the swivel plate 63 above the contiguous block 62, the second spring 64 positioned at the left side of the 3rd support bar 61.
3rd support bar 61 is in vertical shape, and the lower end of the 3rd support bar 61 is fixedly connected with the bottom plate 1, described 3rd
The upper end of strut 61 is provided with the 4th groove.The contiguous block 62 is fixedly connected with the swivel plate 63, and the contiguous block 62 houses
In in the 4th groove and pivotally connected with the 3rd support bar 61 so that the contiguous block 62 can be recessed the described 4th
Groove internal rotation.The swivel plate 63 is in cuboid, and the swivel plate 63 is located at the lower section of the screen pack 56, the swivel plate 63
Right-hand member be located at the top of first collection box 12, the left end of the swivel plate 63 is located at the upper of second collection box 14
Side.The lower end of the second spring 64 is fixedly connected with the bottom plate 1, the upper end of the second spring 64 and the swivel plate 63
It is fixedly connected, so as to be played a supporting role to the swivel plate 63.The second spring 64 is in the absence of applied forces, described
Swivel plate 63 is oblique, and is tilted in upper left lower right.
As shown in figure 1, the water injector 7 includes the 4th support bar 71, the above the 4th support bar 71
Two transverse slats 72, the water tank 73 above second transverse slat 72, the second pipe 74 being arranged on the water tank 73, it is arranged at
The second water pump 75 on the second pipe 74, be arranged at the second shower nozzle 76 of the end of second pipe 74, be arranged at it is described
The 4th fix bar 77 on second shower nozzle 76.4th support bar 71 is in vertical shape, the lower end of the 4th support bar 71 with
Second cross bar 35 is fixedly connected, and the upper end of the 4th support bar 71 is fixedly connected with second transverse slat 72.Described
Two transverse slats 72 are horizontal.The water tank 73 is arranged on second transverse slat 72, and water is placed with the water tank 73.Described
The lower end of two pipelines 74 is connected with the water tank 73 so that the inside of the second pipe 74 and the inside phase of the water tank 73
Logical, the other end of the second pipe 74 is connected with second shower nozzle 76.Second water pump 75 and power supply electricity (not shown)
Property connection, provides electric energy for it, second water pump 75 is provided with switch (not shown), conveniently controls its opening or closing,
Water in water tank 73 can be pumped into the second pipe 74 by second water pump 75.Second shower nozzle 76 is down to living
The supporting plate 52.4th fix bar 77 is horizontal, one end and second shower nozzle 76 of the 4th fix bar 77
It is fixedly connected, the other end of the 4th fix bar 77 is fixedly connected with second transverse slat 72.
As shown in figure 1, the efficient etching machines of the present invention by the material for needing the moment in use, be placed on institute first
State in supporting plate 52, and in the framework 51.Then the switch of the first water pump 25 is opened so that the chemical drugs in medicine-chest 23
Liquid is entered in first pipeline 24, is then sprayed onto from the first shower nozzle 26 on the material above supporting plate 52, so as to enter to it
Row etching, the chemical liquid of ejection are concentrated in the framework 51, are then flow to by the second through hole 521 in collection center 55,
Then it is flow to after the filtering of screen pack 56 on the swivel plate 63, is then slid over the upper surface of the swivel plate 63 to the right
It flow in first collection box 12.After to be etched, the switch of the first water pump 25 is closed, now opens opening for motor 42
Close so that the output shaft 43 is rotated, and the lower end of the bracing wire 46 is wound on the output shaft 43, and the bracing wire 46 is to Zola
Move the 3rd fix bar 53 so that the 3rd fix bar 53 is moved to the left, and the framework 51 is moved to the left, first bullet
Spring 54 is compressed, and the pushing block 58 is acted against on the right-hand member of the swivel plate 63, because the left surface of pushing block 58 is in inclined-plane
Shape so that the right-hand member of the swivel plate 63 moves up, and the left end of the swivel plate 63 moves down, until the swivel plate 63
Tilted in upper right lower left, now the supporting plate 52 is moved to the lower section of second shower nozzle 76.Then second is opened
The switch of water pump 75, the water in water tank 73 are entered in the second pipe 74, are then gone from the second spray downwards of shower nozzle 76, water spray
Onto the material of the top of supporting plate 52, so as to be cleaned up to material, then the collection is entered by the second through hole 521
In center 55, then it is flow to after the filtering of screen pack 56 on the upper surface of the swivel plate 63, is then slid over the rotation
The upper surface of flap 63 is flow in second collection box 14, convenient that water after cleaning is reclaimed, until clear to material
Wash untill finishing.So far, the efficient etching machines of the present invention are finished using process description.
Claims (9)
1. a kind of efficient etching machines, including bottom plate, the chemical spraying device above the bottom plate, positioned at the chemical spraying device
The holder device in left side, the electric machine being arranged on the holder device, the support plate device above the bottom plate, set
Rotation panel assembly, the water injector being arranged on the holder device being placed on the bottom plate, it is characterised in that：The bottom plate
It is provided with some universal wheels being disposed below, the first collection box being positioned above, on the right side of first collection box
First locating piece, the second collection box on the left of first collection box, second on the left of second collection box are determined
Position block, the chemical spraying device include first support bar, the first transverse slat above the first support bar, positioned at described first
Medicine-chest above transverse slat, the first pipeline being arranged on the medicine-chest, the first water pump being arranged on first pipeline, set
The first shower nozzle in first pipe end, the first fix bar being arranged on first shower nozzle, the holder device bag
Include second support bar, the first cross bar above the second support bar, the first roller being arranged on first cross bar,
The first montant above first cross bar, the second cross bar being arranged on first montant, it is arranged at described second
Second roller of cross bar right-hand member, the electric machine include the 3rd cross bar, the motor above the 3rd cross bar, are arranged at
Output shaft on the motor, the bracing wire being arranged on the output shaft, the second fix bar above the motor, set
The 3rd roller in the second fix bar upper end, the support plate device include supporting plate, above the supporting plate
Framework, the 3rd fix bar on the left of the framework, the first spring below the 3rd fix bar, positioned at the branch
Collect center, the connecting rod positioned at the screen pack collected below center, on the right side of the collection center, positioned at institute below fagging
The pushing block below connecting rod is stated, the rotation panel assembly includes the 3rd support bar, the company above the 3rd support bar
Connect block, the swivel plate above the contiguous block, the second spring on the left of the 3rd support bar, the water injector
Including the 4th support bar, the second transverse slat above the 4th support bar, the water tank above second transverse slat, set
The second pipe that is placed on the water tank, the second water pump being arranged on the second pipe, it is arranged at the second pipe end
Second shower nozzle in portion, the 4th fix bar being arranged on second shower nozzle.
2. efficient etching machines as claimed in claim 1, it is characterised in that：First collection box is in hollow rectangular
Body, the lower end of first locating piece are fixedly connected with the bottom plate, and first locating piece acts against first collection box
Right surface on, the lower end of second locating piece is fixedly connected with the bottom plate, and second locating piece acts against described
On the left surface of two collection boxes.
3. efficient etching machines as claimed in claim 2, it is characterised in that：The lower end of the first support bar and the bottom
Plate is fixedly connected, and the upper end of the first support bar is fixedly connected with first transverse slat, one end of first pipeline and institute
State medicine-chest connection, the other end of first pipeline is connected with first shower nozzle, the left end of first fix bar with it is described
First shower nozzle is fixedly connected, and the right-hand member of first fix bar is fixedly connected with first transverse slat.
4. efficient etching machines as claimed in claim 3, it is characterised in that：The lower end of the second support bar and the bottom
Plate is fixedly connected, and the upper end of the second support bar is fixedly connected with first cross bar, and the right-hand member of first cross bar is provided with
First groove, first roller are provided with two, and first roller is in cylinder, and first roller is contained in described first
In groove and pivotally connected with first cross bar, the lower end of first montant is fixedly connected with first cross bar, described
First montant is provided with the first through hole through its left and right surface, the right table of the left end of second cross bar and first montant
Face is fixedly connected, and the right-hand member of second cross bar is provided with the second groove, and second roller is in cylinder, and second roller is received
It is dissolved in second groove and pivotally connected with second cross bar.
5. efficient etching machines as claimed in claim 4, it is characterised in that：The right-hand member and described second of 3rd cross bar
Support bar is fixedly connected, and the motor is fixedly connected with the 3rd cross bar, and the output shaft is in cylinder, the output shaft
One end and the motor connection, the lower end of second fix bar are fixedly connected with the side of the second support bar, and described the
The upper end of two fix bars is provided with the 3rd groove, and the 3rd roller is in cylinder, and it is recessed that the 3rd roller is contained in the described 3rd
In groove and pivotally connected with second fix bar, the lower end of the bracing wire is fixedly connected with the output shaft, the bracing wire
Upper end acts against on the 3rd roller and passes through the first through hole.
6. efficient etching machines as claimed in claim 5, it is characterised in that：The supporting plate is provided with through following table thereon
Second through hole in face, the framework are in hollow cuboid, and the lower surface of the framework and the upper surface of the supporting plate are fixed
Connection, the right-hand member of the 3rd fix bar are fixedly connected with the left surface of the framework, and the left end of the 3rd fix bar is in
Between first roller and the second roller, first roller is acted against on the lower surface of the 3rd fix bar, and described
Second wheel is acted against on the upper surface of the 3rd fix bar, and the upper end of the bracing wire and the left end of the 3rd fix bar are fixed
Connection, the right-hand member of first spring is fixedly connected with the left end of the supporting plate, the left end of first spring and described the
The right-hand member of one cross bar is fixedly connected.
7. efficient etching machines as claimed in claim 6, it is characterised in that：The upper surface of the collection center and the support
The lower surface of plate is fixedly connected, and the collection center is located at the lower section of second through hole, the upper surface of the screen pack with it is described
The lower surface of collection center is fixedly connected, and the upper end of the connecting rod is fixedly connected with the lower surface of the supporting plate, the connection
The lower end of bar is fixedly connected with the pushing block, and the longitudinal section of the pushing block is in a rectangular trapezoid, the left surface of the pushing block
Take the form of inclined plane.
8. efficient etching machines as claimed in claim 7, it is characterised in that：3rd support bar is in vertical shape, described
The lower end of 3rd support bar is fixedly connected with the bottom plate, and the upper end of the 3rd support bar is provided with the 4th groove, the connection
Block is fixedly connected with the swivel plate, and the contiguous block is contained in the 4th groove and connected with the 3rd support bar pivot
Connect, the swivel plate is located at the lower section of the screen pack, and the right-hand member of the swivel plate is located at the top of first collection box, institute
The left end for stating swivel plate is located at the top of second collection box, and the lower end of the second spring is fixedly connected with the bottom plate,
The upper end of the second spring is fixedly connected with the swivel plate.
9. efficient etching machines as claimed in claim 8, it is characterised in that：The lower end of 4th support bar and described the
Two cross bars are fixedly connected, and the upper end of the 4th support bar is fixedly connected with second transverse slat, and the water tank is arranged at described
On second transverse slat, the lower end of the second pipe is connected with the water tank, the other end of the second pipe and the described second spray
Head connection, one end of the 4th fix bar are fixedly connected with second shower nozzle, the other end of the 4th fix bar and institute
The second transverse slat is stated to be fixedly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711265402.4A CN107833853B (en) | 2017-12-05 | 2017-12-05 | Efficient etching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711265402.4A CN107833853B (en) | 2017-12-05 | 2017-12-05 | Efficient etching equipment |
Publications (2)
| Publication Number | Publication Date |
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| CN107833853A true CN107833853A (en) | 2018-03-23 |
| CN107833853B CN107833853B (en) | 2023-11-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711265402.4A Active CN107833853B (en) | 2017-12-05 | 2017-12-05 | Efficient etching equipment |
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| Country | Link |
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| CN (1) | CN107833853B (en) |
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| CN108811348A (en) * | 2018-06-28 | 2018-11-13 | 深圳市吉瑞达电路科技有限公司 | A kind of electronic circuit board etching positioning device |
| CN109513710A (en) * | 2018-11-14 | 2019-03-26 | 蚌埠高华电子股份有限公司 | A kind of ITO etching solution regulation device |
| CN114566449A (en) * | 2022-02-25 | 2022-05-31 | 江苏韦达半导体有限公司 | Anti-pollution schottky diode manufacturing and etching device convenient for liquid injection |
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| Publication number | Publication date |
|---|---|
| CN107833853B (en) | 2023-11-07 |
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