CN107833853B - Efficient etching equipment - Google Patents
Efficient etching equipment Download PDFInfo
- Publication number
- CN107833853B CN107833853B CN201711265402.4A CN201711265402A CN107833853B CN 107833853 B CN107833853 B CN 107833853B CN 201711265402 A CN201711265402 A CN 201711265402A CN 107833853 B CN107833853 B CN 107833853B
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- China
- Prior art keywords
- rod
- fixed connection
- plate
- bottom plate
- fixedly connected
- Prior art date
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- 238000005530 etching Methods 0.000 title claims abstract description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 50
- 239000003814 drug Substances 0.000 claims abstract description 23
- 238000011084 recovery Methods 0.000 claims description 25
- 239000007921 spray Substances 0.000 claims description 17
- 238000005507 spraying Methods 0.000 claims description 9
- 238000004064 recycling Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 239000000126 substance Substances 0.000 abstract description 10
- 239000007788 liquid Substances 0.000 abstract description 8
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
Abstract
The utility model provides an efficient etching equipment, includes the bottom plate, is located spout medicine device, be located in the bottom plate top spout medicine device left side support device, set up in motor arrangement on the support device, be located the backup pad device of bottom plate top, set up in rotor plate device on the bottom plate, set up in water jet equipment on the support device. The invention can fully separate and recycle the sprayed chemical liquid medicine and water, thereby reducing the waste of resources, preventing the pollution to the environment, and has simple operation, high automation degree and convenient use.
Description
Technical Field
The invention relates to the technical field of etching, in particular to efficient etching equipment.
Background
The existing etching machine is provided with a nozzle so as to spray chemical liquid onto the material to be etched, thereby achieving the purpose of etching the material, and then spraying water on the material so as to clean the material. However, this method often mixes the sprayed chemical solution with water, which affects the recovery of the chemical solution and causes waste of resources.
Therefore, there is a need to provide a new solution to overcome the above-mentioned drawbacks.
Disclosure of Invention
The present invention aims to provide an efficient etching apparatus which can effectively solve the above technical problems.
In order to achieve the purpose of the invention, the following technical scheme is adopted:
the utility model provides a high-efficient etching equipment, includes the bottom plate, is located spout medicine device above the bottom plate, be located spout medicine device left side support device, set up in motor device on the support device, be located the backup pad device of bottom plate top, set up in rotor plate device on the bottom plate, set up in water jet equipment on the support device, be equipped with on the bottom plate and be located a plurality of universal wheels of its below, be located its top first collection box, be located first locating piece on first collection box right side, be located first collection box left side second collection box, be located second locating piece on second collection box left side, spout medicine device including first bracing piece, be located first diaphragm above the first bracing piece, be located the medical kit of first diaphragm top, set up in first pipeline on the medical kit, set up in first water pump on the first pipeline, set up in first shower nozzle on first pipeline tip, set up in first dead lever on the first shower nozzle, the support device comprises a second support rod, a first cross rod arranged above the second support rod, a first roller arranged on the first cross rod, a first vertical rod arranged above the first cross rod, a second cross rod arranged on the first vertical rod, and a second roller arranged at the right end of the second cross rod, the motor device comprises a third cross rod, a motor arranged above the third cross rod, an output shaft arranged on the motor, a stay wire arranged on the output shaft, a second fixed rod arranged above the motor, a third roller arranged at the upper end of the second fixed rod, a support plate arranged above the support plate, a frame arranged above the support plate, a third fixed rod arranged at the left side of the frame, a second roller arranged at the upper end of the second fixed rod, a third roller arranged at the left side of the support plate, a second roller arranged at the right side of the support plate, a third roller arranged at the left side of the frame, a second roller arranged at the left side of the support plate, a third roller, a second roller, a first roller and a second roller, the water spraying device comprises a fourth supporting rod, a second transverse plate arranged above the fourth supporting rod, a water tank arranged above the second transverse plate, a second pipeline arranged on the water tank, a second water pump arranged on the second pipeline, a second spray head arranged at the end part of the second pipeline and a fourth fixing rod arranged on the second spray head.
The first recycling bin is a hollow cuboid, the lower end of the first positioning block is fixedly connected with the bottom plate, the first positioning block is propped against the right surface of the first recycling bin, the lower end of the second positioning block is fixedly connected with the bottom plate, and the second positioning block is propped against the left surface of the second recycling bin.
The lower extreme of first bracing piece with bottom plate fixed connection, the upper end of first bracing piece with first diaphragm fixed connection, the one end of first pipeline with the medical kit is connected, the other end of first pipeline with first shower nozzle is connected, the left end of first dead lever with first shower nozzle fixed connection, the right-hand member of first dead lever with first diaphragm fixed connection.
The lower extreme of second bracing piece with bottom plate fixed connection, the upper end of second bracing piece with first horizontal pole fixed connection, the right-hand member of first horizontal pole is equipped with first recess, first gyro wheel is equipped with two, first gyro wheel is the cylinder, first gyro wheel accept in first recess and with first horizontal pole pivot connection, the lower extreme of first montant with first horizontal pole fixed connection, be equipped with the first through-hole of running through its left and right surfaces on the first montant, the left end of second horizontal pole with the right surface fixed connection of first montant, the right-hand member of second horizontal pole is equipped with the second recess, the second gyro wheel is the cylinder, the second gyro wheel accept in the second recess and with second horizontal pole pivot connection.
The right-hand member of third horizontal pole with second bracing piece fixed connection, the motor with third horizontal pole fixed connection, the output shaft is the cylinder, the one end of output shaft with the motor is connected, the lower extreme of second dead lever with the side fixed connection of second bracing piece, the upper end of second dead lever is equipped with the third recess, the third gyro wheel is the cylinder, the third gyro wheel accept in the third recess and with second dead lever pivot connection, the lower extreme of acting as go-between with output shaft fixed connection, the upper end of acting as go-between is propped and is leaned against on the third gyro wheel and pass first through-hole.
The support plate is provided with a second through hole penetrating through the upper surface and the lower surface of the support plate, the frame body is a hollow cuboid, the lower surface of the frame body is fixedly connected with the upper surface of the support plate, the right end of the third fixing rod is fixedly connected with the left surface of the frame body, the left end of the third fixing rod is positioned between the first roller and the second roller, the first roller is propped against the lower surface of the third fixing rod, the second roller is propped against the upper surface of the third fixing rod, the upper end of the stay wire is fixedly connected with the left end of the third fixing rod, the right end of the first spring is fixedly connected with the left end of the support plate, and the left end of the first spring is fixedly connected with the right end of the first cross rod.
The upper surface of the centralizing frame is fixedly connected with the lower surface of the supporting plate, the centralizing frame is positioned below the second through hole, the upper surface of the filter screen is fixedly connected with the lower surface of the centralizing frame, the upper end of the connecting rod is fixedly connected with the lower surface of the supporting plate, the lower end of the connecting rod is fixedly connected with the pushing block, the longitudinal section of the pushing block is in a right trapezoid shape, and the left surface of the pushing block is in an inclined plane shape.
The third bracing piece is vertical form, the lower extreme of third bracing piece with bottom plate fixed connection, the upper end of third bracing piece is equipped with the fourth recess, the connecting block with rotor plate fixed connection, the connecting block accept in the fourth recess and with third bracing piece pivot connection, the rotor plate is located the below of filter screen, the right-hand member of rotor plate is located the top of first collection box, the left end of rotor plate is located the top of second collection box, the lower extreme of second spring with bottom plate fixed connection, the upper end of second spring with rotor plate fixed connection.
The lower extreme of fourth bracing piece with second horizontal pole fixed connection, the upper end of fourth bracing piece with second diaphragm fixed connection, the water tank set up in on the second diaphragm, the lower extreme of second pipeline with the water tank is connected, the other end of second pipeline with the second shower nozzle is connected, the one end of fourth dead lever with second shower nozzle fixed connection, the other end of fourth dead lever with second diaphragm fixed connection.
Compared with the prior art, the invention has the following beneficial effects: the high-efficiency etching equipment can separate and recycle the sprayed chemical liquid medicine and water, so that the waste of resources can be reduced, the pollution to the environment can be prevented, the operation is simple, the automation degree is high, the use is convenient, and the etching efficiency is high.
Drawings
FIG. 1 is a schematic diagram of an efficient etching apparatus according to the present invention.
Detailed Description
The efficient etching apparatus of the present invention will be described more fully hereinafter with reference to the accompanying drawings.
As shown in fig. 1, the high-efficiency etching apparatus of the present invention comprises a base plate 1, a spraying device 2 above the base plate 1, a bracket device 3 on the left side of the spraying device 2, a motor device 4 arranged on the bracket device 3, a supporting plate device 5 above the base plate 1, a rotating plate device 6 arranged on the base plate 1, and a water spraying device 7 arranged on the bracket device 3.
As shown in fig. 1, the base plate 1 is a cuboid, and the base plate 1 is provided with a plurality of universal wheels 11 positioned below the base plate, a first recovery box 12 positioned above the base plate, a first positioning block 13 positioned on the right side of the first recovery box 12, a second recovery box 14 positioned on the left side of the first recovery box 12, and a second positioning block 15 positioned on the left side of the second recovery box 14. The four universal wheels 11 are arranged, the universal wheels 11 are arranged on the lower surface of the base plate 1, and the universal wheels 11 can drive the base plate 1 to move. The first recovery tank 12 is a hollow cuboid, an opening is formed in the upper end of the first recovery tank 12, the longitudinal section of the first recovery tank 12 is concave, and the first recovery tank 12 is placed on the bottom plate 1. The first positioning block 13 is a cuboid, the lower end of the first positioning block 13 is fixedly connected with the bottom plate 1, and the first positioning block 13 is propped against the right surface of the first recovery tank 13. The second recovery tank 14 is a hollow cuboid, an opening is formed in the upper end of the second recovery tank 14, so that the longitudinal section of the second recovery tank 14 is concave, and the second recovery tank 14 is placed on the bottom plate 1. The lower end of the second positioning block 15 is fixedly connected with the bottom plate 1, and the second positioning block 15 is propped against the left surface of the second recovery tank 14.
As shown in fig. 1, the medicine spraying device 2 includes a first support bar 21, a first transverse plate 22 disposed above the first support bar 21, a medicine box 23 disposed above the first transverse plate 22, a first pipe 24 disposed on the medicine box 23, a first water pump 25 disposed on the first pipe 24, a first spray head 26 disposed at an end of the first pipe 24, and a first fixing rod 27 disposed on the first spray head 26. The first supporting rod 21 is vertical, the lower end of the first supporting rod 21 is fixedly connected with the bottom plate 1, and the upper end of the first supporting rod 21 is fixedly connected with the first transverse plate 22. The first cross plate 22 is horizontal. The medicine box 23 is placed on the first transverse plate 22, and chemical liquid medicine is placed in the medicine box 23. One end of the first pipe 24 is connected to the medicine box 23, the interior of the first pipe 24 is communicated with the interior of the medicine box 23, so that chemical liquid in the medicine box 23 can enter the first pipe 24, and the other end of the first pipe 24 is connected to the first spray head 26. The first water pump 25 is electrically connected with a power supply (not shown) to provide electric energy, a switch (not shown) is arranged on the first water pump 25 to conveniently control the first water pump 25 to be opened or closed, and the first water pump 25 can pump chemical liquid in the medicine chest 23 into the first pipeline 24. The first nozzle 26 faces downward, and the first nozzle 26 is a common nozzle in the market, which is a prior art, and will not be described herein. The left end of the first fixing rod 27 is fixedly connected with the first spray head 26, and the right end of the first fixing rod 27 is fixedly connected with the first transverse plate 22.
As shown in fig. 1, the bracket device 3 includes a second support rod 31, a first cross rod 32 disposed above the second support rod 31, a first roller 33 disposed on the first cross rod 32, a first vertical rod 34 disposed above the first cross rod 32, a second cross rod 35 disposed on the first vertical rod 34, and a second roller 36 disposed on the right end of the second cross rod 35. The second supporting rod 31 is vertical, the lower end of the second supporting rod 31 is fixedly connected with the bottom plate 1, and the upper end of the second supporting rod 31 is fixedly connected with the first cross rod 32. The first cross bar 32 is cuboid and horizontally placed, a first groove 321 is formed in the right end of the first cross bar 32, and the first groove 321 is square. The first rollers 33 are provided with two rollers, the first rollers 33 are cylindrical, and the first rollers 33 are accommodated in the first grooves 321 and are pivotally connected with the first cross bars 32, so that the first rollers 33 can rotate in the first grooves 321. The first vertical rod 34 is cuboid and vertically placed, the lower end of the first vertical rod 34 is fixedly connected with the first cross rod 32, a first through hole 341 penetrating through the left surface and the right surface of the first vertical rod 34 is formed in the first vertical rod 34, and the first through hole 341 is square. The second cross rod 35 is cuboid and horizontally placed, the left end of the second cross rod 35 is fixedly connected with the right surface of the first vertical rod 34, and the right end of the second cross rod 35 is provided with a second groove. The second roller 36 is cylindrical, and the second roller 36 is accommodated in the second groove and is pivotally connected to the second cross bar 35, so that the second roller 36 can rotate in the second groove.
As shown in fig. 1, the motor device 4 includes a third cross bar 41, a motor 42 disposed above the third cross bar 41, an output shaft 43 disposed on the motor 42, a pull wire 46 disposed on the output shaft 43, a second fixing rod 44 disposed above the motor 42, and a third roller 45 disposed at an upper end of the second fixing rod 44. The third cross bar 41 is horizontal, and the right end of the third cross bar 41 is fixedly connected with the second support bar 31. The motor 42 is electrically connected to a power source (not shown), so as to provide electric energy for the motor 42, a switch (not shown) is arranged on the motor 42, so that the motor 42 is conveniently controlled to be opened or closed, and the motor 42 is fixedly connected to the third cross bar 41. The output shaft 43 is a cylinder, and one end of the output shaft 43 is connected with the motor 42, so that the motor 42 can drive the output shaft 43 to rotate. The second fixing rod 44 is inclined, the lower end of the second fixing rod 44 is fixedly connected with the side surface of the second supporting rod 31, and the upper end of the second fixing rod 44 is provided with a third groove. The third roller 45 is a cylinder, and the third roller 45 is accommodated in the third groove and is pivotally connected to the second fixing rod 44, so that the third roller 45 can rotate in the third groove. The lower end of the pull wire 46 is fixedly connected with the output shaft 43, and the upper end of the pull wire 46 abuts against the third roller 45 and passes through the first through hole 341.
As shown in fig. 1, the support plate device 5 includes a support plate 52, a frame 51 above the support plate 52, a third fixing rod 53 at the left side of the frame 51, a first spring 54 below the third fixing rod 53, a collecting frame 55 below the support plate 52, a filter screen 56 below the collecting frame 55, a connecting rod 57 at the right side of the collecting frame 55, and a pushing block 58 below the connecting rod 57. The support plate 52 is rectangular, a second through hole 521 penetrating the upper and lower surfaces of the support plate 52 is provided on the support plate 52, and the second through hole 521 is circular. The frame 51 is a hollow cuboid, the upper surface and the lower surface of the frame 51 are communicated, and the lower surface of the frame 51 is fixedly connected with the upper surface of the supporting plate 52. The third fixing rod 53 is a cuboid, the right end of the third fixing rod 53 is fixedly connected with the left surface of the frame 51, the left end of the third fixing rod 53 is located between the first roller 33 and the second roller 36, the first roller 33 abuts against the lower surface of the third fixing rod 53, the second roller 36 abuts against the upper surface of the third fixing rod 53, so that the third fixing rod 53 is supported, and the upper end of the pull wire 46 is fixedly connected with the left end of the third fixing rod 53. The right end of the first spring 54 is fixedly connected with the left end of the support plate 52, and the left end of the first spring 54 is fixedly connected with the right end of the first cross bar 32, so as to support the support plate 52. The longitudinal section of the collecting frame 55 is in an isosceles trapezoid shape, the upper surface and the lower surface of the collecting frame 55 are communicated, the upper surface of the collecting frame 55 is fixedly connected with the lower surface of the supporting plate 52, the collecting frame 55 is located below the second through hole 521, and the second through hole 521 is communicated with the inside of the collecting frame 55. The filter screen 56 is a cuboid, and the upper surface of the filter screen 56 is fixedly connected with the lower surface of the concentration frame 55. The connecting rod 57 is a cuboid, the upper end of the connecting rod 57 is fixedly connected with the lower surface of the supporting plate 52, and the lower end of the connecting rod 57 is fixedly connected with the pushing block 58. The longitudinal section of the pushing block 58 is in a right trapezoid shape, and the left surface of the pushing block 58 is in an inclined plane shape and is inclined from the lower left to the upper right.
As shown in fig. 1, the rotating plate device 6 includes a third support bar 61, a connection block 62 above the third support bar 61, a rotating plate 63 above the connection block 62, and a second spring 64 on the left side of the third support bar 61. The third support rod 61 is vertical, the lower end of the third support rod 61 is fixedly connected with the bottom plate 1, and a fourth groove is formed in the upper end of the third support rod 61. The connecting block 62 is fixedly connected with the rotating plate 63, and the connecting block 62 is accommodated in the fourth groove and is pivotally connected with the third supporting rod 61, so that the connecting block 62 can rotate in the fourth groove. The rotating plate 63 is a cuboid, the rotating plate 63 is located below the filter screen 56, the right end of the rotating plate 63 is located above the first recovery tank 12, and the left end of the rotating plate 63 is located above the second recovery tank 14. The lower end of the second spring 64 is fixedly connected with the bottom plate 1, and the upper end of the second spring 64 is fixedly connected with the rotating plate 63, so as to support the rotating plate 63. The second spring 64 is inclined in a state where the rotation plate 63 is inclined upward and downward in the left direction without applying a force.
As shown in fig. 1, the water spraying device 7 includes a fourth supporting rod 71, a second cross plate 72 disposed above the fourth supporting rod 71, a water tank 73 disposed above the second cross plate 72, a second pipe 74 disposed on the water tank 73, a second water pump 75 disposed on the second pipe 74, a second spray head 76 disposed at an end of the second pipe 74, and a fourth fixing rod 77 disposed on the second spray head 76. The fourth supporting rod 71 is vertical, the lower end of the fourth supporting rod 71 is fixedly connected with the second cross rod 35, and the upper end of the fourth supporting rod 71 is fixedly connected with the second transverse plate 72. The second cross plate 72 is horizontal. The water tank 73 is disposed on the second transverse plate 72, and water is placed in the water tank 73. The lower end of the second pipe 74 is connected to the water tank 73 such that the inside of the second pipe 74 communicates with the inside of the water tank 73, and the other end of the second pipe 74 is connected to the second nozzle 76. The second water pump 75 is electrically connected to a power source (not shown), and provides electric energy for the second water pump, a switch (not shown) is arranged on the second water pump 75, so that the second water pump 75 can conveniently control the second water pump to be opened or closed, and the second water pump 75 can pump water in the water tank 73 into the second pipeline 74. The second nozzle 76 faces downward toward the support plate 52. The fourth fixing rod 77 is horizontal, one end of the fourth fixing rod 77 is fixedly connected with the second spray head 76, and the other end of the fourth fixing rod 77 is fixedly connected with the second transverse plate 72.
As shown in fig. 1, when the efficient etching apparatus of the present invention is used, firstly, a material at a desired time is placed on the supporting plate 52 and is located in the frame 51. Then, the switch of the first water pump 25 is turned on, so that the chemical liquid in the medicine box 23 enters the first pipeline 24, and then is sprayed onto the material above the supporting plate 52 from the first spray head 26, thereby etching the material, the sprayed chemical liquid is concentrated in the frame 51, flows into the concentration frame 55 through the second through holes 521, flows onto the rotating plate 63 after being filtered by the filter screen 56, and then flows rightward into the first recovery box 12 after sliding across the upper surface of the rotating plate 63. After etching, the switch of the first water pump 25 is turned off, at this time, the switch of the motor 42 is turned on, so that the output shaft 43 rotates, the lower end of the pull wire 46 is wound on the output shaft 43, the pull wire 46 pulls the third fixing rod 53 leftwards, so that the third fixing rod 53 moves leftwards, the frame 51 moves leftwards, the first spring 54 is compressed, the pushing block 58 abuts against the right end of the rotating plate 63, and since the left surface of the pushing block 58 is in a slope shape, the right end of the rotating plate 63 moves upwards, and the left end of the rotating plate 63 moves downwards until the rotating plate 63 is inclined leftwards and downwards in a right upper direction, at this time, the supporting plate 52 moves below the second spray head 76. Then the switch of the second water pump 75 is turned on, the water in the water tank 73 enters the second pipeline 74, then is sprayed downwards from the second spray head 76, and is sprayed onto the material above the supporting plate 52, so that the material can be cleaned, then enters the collecting frame 55 through the second through holes 521, flows onto the upper surface of the rotating plate 63 after being filtered by the filter screen 56, then slides onto the upper surface of the rotating plate 63 and flows into the second recovery tank 14, and the cleaned water is conveniently recovered until the material is cleaned. Thus, the use process of the efficient etching equipment is described.
Claims (9)
1. The utility model provides an efficient etching equipment, includes the bottom plate, is located spout medicine device, be located in the bottom plate top spout medicine device left side support device, set up in motor device on the support device, be located the backup pad device of bottom plate top, set up in rotor plate device on the bottom plate, set up in water jet equipment on the support device, its characterized in that: the bottom plate is provided with a plurality of universal wheels positioned below the bottom plate, a first recovery box positioned above the bottom plate, a first positioning block positioned on the right side of the first recovery box, a second recovery box positioned on the left side of the first recovery box, and a second positioning block positioned on the left side of the second recovery box, the medicine spraying device comprises a first supporting rod, a first transverse plate positioned above the first supporting rod, a medicine box positioned above the first transverse plate, a first pipeline arranged on the medicine box, a first water pump arranged on the first pipeline, a first spray head arranged at the end part of the first pipeline, a first fixing rod arranged on the first spray head, the bracket device comprises a second supporting rod, a first transverse rod positioned above the second supporting rod, a first roller arranged on the first transverse rod, a first vertical rod positioned above the first transverse rod, a second roller arranged on the first transverse rod and a second roller arranged at the right end of the second transverse rod, the motor device comprises a third cross rod, a motor arranged above the third cross rod, an output shaft arranged on the motor, a stay wire arranged on the output shaft, a second fixing rod arranged above the motor, and a third roller arranged at the upper end of the second fixing rod, the support plate device comprises a support plate, a frame body arranged above the support plate, a third fixing rod arranged on the left side of the frame body, a first spring arranged below the third fixing rod, a centralizing frame arranged below the support plate, a filter screen arranged below the centralizing frame, a connecting rod arranged on the right side of the centralizing frame, and a pushing block arranged below the connecting rod, and the rotary plate device comprises a third support rod, a connecting block arranged above the third support rod, the water spraying device comprises a fourth supporting rod, a second transverse plate arranged above the fourth supporting rod, a water tank arranged above the second transverse plate, a second pipeline arranged on the water tank, a second water pump arranged on the second pipeline, a second spray head arranged at the end part of the second pipeline and a fourth fixing rod arranged on the second spray head.
2. The efficient etching apparatus of claim 1, wherein: the first recycling bin is a hollow cuboid, the lower end of the first positioning block is fixedly connected with the bottom plate, the first positioning block is propped against the right surface of the first recycling bin, the lower end of the second positioning block is fixedly connected with the bottom plate, and the second positioning block is propped against the left surface of the second recycling bin.
3. The efficient etching apparatus of claim 2, wherein: the lower extreme of first bracing piece with bottom plate fixed connection, the upper end of first bracing piece with first diaphragm fixed connection, the one end of first pipeline with the medical kit is connected, the other end of first pipeline with first shower nozzle is connected, the left end of first dead lever with first shower nozzle fixed connection, the right-hand member of first dead lever with first diaphragm fixed connection.
4. A high efficiency etching apparatus as defined in claim 3, wherein: the lower extreme of second bracing piece with bottom plate fixed connection, the upper end of second bracing piece with first horizontal pole fixed connection, the right-hand member of first horizontal pole is equipped with first recess, first gyro wheel is equipped with two, first gyro wheel is the cylinder, first gyro wheel accept in first recess and with first horizontal pole pivot connection, the lower extreme of first montant with first horizontal pole fixed connection, be equipped with the first through-hole of running through its left and right surfaces on the first montant, the left end of second horizontal pole with the right surface fixed connection of first montant, the right-hand member of second horizontal pole is equipped with the second recess, the second gyro wheel is the cylinder, the second gyro wheel accept in the second recess and with second horizontal pole pivot connection.
5. The efficient etching apparatus as recited in claim 4, wherein: the right-hand member of third horizontal pole with second bracing piece fixed connection, the motor with third horizontal pole fixed connection, the output shaft is the cylinder, the one end of output shaft with the motor is connected, the lower extreme of second dead lever with the side fixed connection of second bracing piece, the upper end of second dead lever is equipped with the third recess, the third gyro wheel is the cylinder, the third gyro wheel accept in the third recess and with second dead lever pivot connection, the lower extreme of acting as go-between with output shaft fixed connection, the upper end of acting as go-between is propped and is leaned against on the third gyro wheel and pass first through-hole.
6. The efficient etching apparatus as recited in claim 5, wherein: the support plate is provided with a second through hole penetrating through the upper surface and the lower surface of the support plate, the frame body is a hollow cuboid, the lower surface of the frame body is fixedly connected with the upper surface of the support plate, the right end of the third fixing rod is fixedly connected with the left surface of the frame body, the left end of the third fixing rod is positioned between the first roller and the second roller, the first roller is propped against the lower surface of the third fixing rod, the second roller is propped against the upper surface of the third fixing rod, the upper end of the stay wire is fixedly connected with the left end of the third fixing rod, the right end of the first spring is fixedly connected with the left end of the support plate, and the left end of the first spring is fixedly connected with the right end of the first cross rod.
7. The efficient etching apparatus as recited in claim 6, wherein: the upper surface of the centralizing frame is fixedly connected with the lower surface of the supporting plate, the centralizing frame is positioned below the second through hole, the upper surface of the filter screen is fixedly connected with the lower surface of the centralizing frame, the upper end of the connecting rod is fixedly connected with the lower surface of the supporting plate, the lower end of the connecting rod is fixedly connected with the pushing block, the longitudinal section of the pushing block is in a right trapezoid shape, and the left surface of the pushing block is in an inclined plane shape.
8. The efficient etching apparatus of claim 7, wherein: the third bracing piece is vertical form, the lower extreme of third bracing piece with bottom plate fixed connection, the upper end of third bracing piece is equipped with the fourth recess, the connecting block with rotor plate fixed connection, the connecting block accept in the fourth recess and with third bracing piece pivot connection, the rotor plate is located the below of filter screen, the right-hand member of rotor plate is located the top of first collection box, the left end of rotor plate is located the top of second collection box, the lower extreme of second spring with bottom plate fixed connection, the upper end of second spring with rotor plate fixed connection.
9. The efficient etching apparatus of claim 8, wherein: the lower extreme of fourth bracing piece with second horizontal pole fixed connection, the upper end of fourth bracing piece with second diaphragm fixed connection, the water tank set up in on the second diaphragm, the lower extreme of second pipeline with the water tank is connected, the other end of second pipeline with the second shower nozzle is connected, the one end of fourth dead lever with second shower nozzle fixed connection, the other end of fourth dead lever with second diaphragm fixed connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711265402.4A CN107833853B (en) | 2017-12-05 | 2017-12-05 | Efficient etching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711265402.4A CN107833853B (en) | 2017-12-05 | 2017-12-05 | Efficient etching equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107833853A CN107833853A (en) | 2018-03-23 |
| CN107833853B true CN107833853B (en) | 2023-11-07 |
Family
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| CN108811348B (en) * | 2018-06-28 | 2021-03-02 | 深圳市吉瑞达电路科技有限公司 | Positioning device for etching electronic circuit board |
| CN109513710B (en) * | 2018-11-14 | 2021-04-20 | 蚌埠高华电子股份有限公司 | ITO etching solution regulation and control device |
| CN114566449B (en) * | 2022-02-25 | 2022-12-20 | 江苏韦达半导体有限公司 | Anti-pollution schottky diode who is convenient for annotate liquid makes etching device |
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