CN107818814A - A kind of vacuum displacement adjustment device - Google Patents
A kind of vacuum displacement adjustment device Download PDFInfo
- Publication number
- CN107818814A CN107818814A CN201710986895.4A CN201710986895A CN107818814A CN 107818814 A CN107818814 A CN 107818814A CN 201710986895 A CN201710986895 A CN 201710986895A CN 107818814 A CN107818814 A CN 107818814A
- Authority
- CN
- China
- Prior art keywords
- sub
- bar
- stamper
- disk
- bull stick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 30
- 238000007789 sealing Methods 0.000 claims abstract description 43
- 244000309464 bull Species 0.000 claims abstract description 28
- 230000001404 mediated effect Effects 0.000 claims abstract description 6
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 230000033001 locomotion Effects 0.000 description 5
- 239000000523 sample Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
The present invention discloses a kind of vacuum displacement adjustment device, for adjusting the position of part in vacuum chamber, including adjustment bar, stamper, bull stick, sub-disk and the first dynamic sealing；First dynamic sealing is fixed in the side wall of vacuum chamber；Bar is rotatable passes through the first dynamic sealing for adjustment, and its top is provided with driving gear；Stamper is rotatably mounted to adjust on bar；Sub-disk is supported by bull stick, one end connection stamper of bull stick, other end connection sub-disk；Sub-disk is provided with driven gear, and driven gear is mediated with driving gear.The vacuum displacement adjustment device of the present invention, stamper and sub-disk can be rotated individually so that control point can reach any position of presumptive area, meet the needs of different operating modes.
Description
Technical field
The invention belongs to a kind of regulation of part displacement in technical field of vacuum equipment, more particularly to achievable vacuum chamber dress
Put.
Background technology
During using vacuum equipment, its internal component locations is adjusted, it is necessary to solve the problems, such as dynamic sealing from vacuum chamber outside.
Particularly in technical field of semiconductors and mass spectrometer field, intracavitary vacuum is very high, and the movable sealing structure that can be used is seldom,
Cause the regulation of vacuum chamber component locations difficult.In many vacuum machines, in vacuum chamber external control vacuum chamber
Part movement is all highly difficult, determines that the sealing difficulty between moving parts to be realized is very big the characteristics of Sealing Technology, especially
Under conditions of dry seal demand.
Existing displacement adjustment device, turntable rotation is only driven by single pole, adjusted component can only be made to move to one
Any point on fixed-circumference, the position beyond circumference can not reach.Under some conditions, displacement adjustment device can not make by
Regulating member makes it optional position in region.
The content of the invention
In order to solve the above problems, the invention is intended to propose a kind of vacuum displacement adjustment device, stamper and sub-disk can be independent
Rotate so that control point can reach any position of the area of space covered by stamper and sub-disk aggregate motion.
The present invention provides a kind of vacuum displacement adjustment device, and for adjusting the position of part in vacuum chamber, it includes adjustment
Bar, stamper, bull stick, sub-disk and the first dynamic sealing；
First dynamic sealing is fixed in the side wall of the vacuum chamber；The adjustment bar is rotatable to pass through described first
Dynamic sealing, its top are provided with driving gear；The stamper is rotatably mounted on the adjustment bar；
The sub-disk is supported by the bull stick, and one end of the bull stick connects the stamper, and the other end connects the sub-disk；
The sub-disk is provided with driven gear, and the driven gear is mediated with the driving gear.
As the preferred embodiment of the invention, the stamper is provided with bearing hole；Institute is fixed at the center of the sub-disk
Bull stick is stated, the bull stick extends along the sub-disk axis, and the bearing hole of the stamper is rotatably mounted to by clutch shaft bearing
On.
In some embodiments of the invention, the adjustment bar includes female bar and sub bar；
Female bar is tubulose, rotatable to pass through first dynamic sealing provided with sub bar hole, the top of female bar with
The stamper is fixedly connected；
The sub bar is inserted in the sub bar hole of female bar, and top is provided with the driving gear, and the vacuum is extended in bottom
Outside chamber；
The second dynamic sealing is provided between female bar and the sub bar.
Further, the quantity of second dynamic sealing is two.
As the preferred embodiment of the invention, vacuum displacement adjustment device also includes ratchet mechanism and thrust bearing, institute
State the ratchet and pawl that ratchet mechanism includes cooperating；
Centre bore is provided with the center of the stamper, the ratchet is arranged in the centre bore, and the ratchet fixes peace
On the adjustment bar；
The thrust bearing is arranged in the centre bore, between the adjustment bar and stamper.
It is provided with as the preferred embodiment of the invention, in addition to clamping sleeve, at the center of the stamper and compresses sets of holes, institute
Clamping sleeve is stated in the compression sets of holes, the adjustment bar passes through the clamping sleeve；The bottom of the stamper is fixed with positioning
Key, the locating groove coordinated with the positioning key is fixed with the inwall of the vacuum chamber.
In some embodiments of the invention, the bull stick includes vertical portion and rake, and the vertical portion is inclined with described
Inclined portion is fixedly connected；
The bottom of the vertical portion is fixedly connected with stamper, and the sub-disk is rotatably mounted to described by second bearing
On rake.
Further, the angle between the adjustment bar and the rake of the bull stick is 10~60 °.
In some embodiments of the invention, the ratio of the sub-disk diameter and the stamper diameter is 1: 2.
Vacuum displacement adjustment device provided by the invention, passes through the cooperation of stamper and sub-disk so that control point can reach
Optional position in desired target location, rather than be limited on a certain circumference；The relative motion of sub-disk and stamper, is greatly improved
The performance indications of displacement adjustment device；More advantages of the present invention will be embodied in embodiment.
Brief description of the drawings
Fig. 1 is the structural representation of the first embodiment of vacuum displacement adjustment device of the present invention.
Fig. 2 is the second dynamic sealing schematic diagram of the embodiment of the present invention.
Fig. 3 is the structural representation of second of embodiment of vacuum displacement adjustment device of the present invention.
Fig. 4 is the ratchet mechanism structure chart of the embodiment of the present invention.
Fig. 5 is the structural representation of the third embodiment of vacuum displacement adjustment device of the present invention.
Fig. 6 is the structural representation of the 4th kind of embodiment of vacuum displacement adjustment device of the present invention.
Fig. 7 is the schematic diagram that vacuum displacement adjustment device of the present invention sets multiple sub-disks.
Embodiment
Below in conjunction with drawings and examples, the embodiment of the present invention is described in more details, so as to energy
The advantages of enough more fully understanding the solution of the present invention and its various aspects.However, specific embodiments described below and implementation
Example is for illustrative purposes only, rather than limitation of the present invention.
Heretofore described " connection ", unless otherwise clear and definite regulation or limit, should broadly understood, can be direct
It is connected or is connected by intermediary.In the description of the invention, it is to be understood that " on ", " under ", " preceding ",
The orientation or position relationship of the instruction such as " rear ", "left", "right", " top ", " bottom " are based on orientation shown in the drawings or position
Relation, it is for only for ease of and describes the present invention and simplify description, rather than indicates or imply that signified device or element must have
There is specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
As shown in Fig. 1~7, the embodiment of the present invention provides a kind of vacuum displacement adjustment device, for adjusting zero in vacuum chamber
The position of part, part during use in vacuum chamber are fixed at the K of control point.Vacuum displacement adjustment device includes adjustment bar 1, stamper
2nd, bull stick 3, the dynamic sealing 51 of sub-disk 4 and first.Adjustment bar 1 can drive stamper 2 and sub-disk 4 to rotate respectively, and bull stick 3 is used for branch chapelet
Disk 4.The relative motion of stamper 2 and sub-disk 4 so that control point K can reach any position in predeterminated target face.
First dynamic sealing 51 is fixed in the side wall 7 of vacuum chamber, it is ensured that displacement adjustment device passes through the side wall 7 of vacuum chamber
When, gas is not had and enters vacuum chamber, and rubber sleeve may be selected in the first dynamic sealing 51, and other dynamic sealings, such as Wilson's also may be selected
The mode such as sealing and packing seal.
Bar 1 is rotatable passes through the first dynamic sealing 51 for adjustment, and its top is provided with driving gear 13.Stamper 2, can be discoid
Rotation is arranged on adjustment bar 1 so that adjustment bar 1 can drive stamper 2 to rotate.
It should be noted that the top and bottom described in embodiment are determined with the position where the K of control point, such as scheme
In 1, control point K position is top, is bottom outside vacuum chamber.
Bull stick 3 is used for the support of sub-disk 4, and bull stick 3 is elongate rod, and sub-disk 4 is discoid, and the diameter of sub-disk 4 is less than stamper
3, one end connection stamper 2 of bull stick 3, other end connection sub-disk 4.Sub-disk 4 is provided with driven gear 41, driven gear 41 and active
Gear 13 is mediated.Adjustment bar 1 can individually drive stamper 2 to rotate, and also can individually drive sub-disk 4 to rotate so that control point K can reach
To the optional position in goal-selling face, meets the needs of work.Such as a probe is fixed in control point K, pass through stamper 2 and son
The cooperation of disk 4, probe is rotated to desired position, promotes adjustment bar afterwards, you can insert a probe into the target point of operating surface.
Embodiment 1
The scheme of the present embodiment, as shown in figure 1, the first dynamic sealing 51 is fixed in the side wall 7 of vacuum chamber, adjustment bar includes
Female bar 11 and sub bar 12.Female bar 11 is tubulose, and provided with sub bar hole, sub bar 12 is inserted in the sub bar hole of female bar 11, female bar 11 and sub bar
12 be coaxial configuration, can individually be rotated.Female bar 11 is rotatable to pass through the first dynamic sealing 51, top and the stamper 2 of female bar 11
Center is fixedly connected so that female bar 11 can drive stamper 2 to rotate.
The top of sub bar 12 is provided with driving gear 13, and driving gear 13 is mediated with the driven gear 41 in sub-disk so that son
Bar 12 can drive sub-disk 4 to rotate.The bottom of female bar 11 and sub bar 12 is extended outside vacuum chamber, i.e., the bottom of female bar 11 and sub bar 12
End is located at atmospheric environment, can be operated by people.
As shown in Fig. 2 in order to ensure the sealing of structure, vacuum environment is isolated, female bar 11 and sub bar 12 it
Between be provided with the second dynamic sealing 52.The quantity of preferable second dynamic sealing 52 is two, steady when guarantee sub bar 12 rotates, simultaneously
Improve sealing reliability.The structure of second dynamic sealing 52 can be hole fluting movable sealing structure, i.e., sealing is opened up in sub bar hole
Groove, sealing ring is arranged in seal groove.Movement velocity herein between female bar and sub bar is slow, and the work frequency is low, therefore uses this
Structure can obtain preferable sealing effectiveness.
In the present embodiment, stamper 2 and the connected mode of sub-disk 4 are that bearing hole is provided with stamper 2, and bull stick 3 is fixedly connected
At the center of sub-disk 4, bull stick 3 extends along sub-disk axis, and the bearing hole of stamper 2 is rotatably mounted to by clutch shaft bearing 61
On.Bull stick 3 serves supporting role to sub-disk 4, and does not influence the rotation of sub-disk 4.Another embodiment is (not show in figure
Go out), bearing hole is set in sub-disk, bearing is arranged in sub-disk, bull stick is fixedly connected with stamper, also can reach stamper and son
The purpose that disk individually rotates.
Embodiment 2
As shown in figure 3, the first dynamic sealing 51 of this implementation is same as Example 1, the side wall 7 of vacuum chamber is fixedly mounted on
On.It is only one to adjust bar 1, and rotatable to pass through the first dynamic sealing 51, the top of adjustment bar 1 is driving gear 13, such
Sealing structure is simple, is more suitable for the high situation of sealing requirements.
In order to realize the independent rotation of stamper and sub-disk, centre bore 21 is provided with the center of stamper 2, in centre bore 21
It is mounted with ratchet mechanism 8 and thrust bearing 62, thrust bearing 62 is arranged close to driving gear side, stamper 2 in thrust bearing 62
Play a supporting role.
As shown in figure 4, ratchet mechanism 8 includes the ratchet 81 and ratchet 82 to cooperate, can when ratchet 81 rotates forward
Ratchet 82 is driven to rotate together with, when ratchet 81 reversely rotates, it is impossible to drive ratchet 82 to rotate together with.Ratchet 81 is fixedly mounted on
Adjust on bar 1, ratchet 82 is arranged in centre bore 21 so that adjustment bar 1, which rotates forward, can drive stamper 2 to rotate, and reversely rotate
When, it is impossible to drive stamper 2 to rotate.
In the present embodiment, the connected mode of stamper 2, bull stick 3 and sub-disk 4 is same as Example 1, driving gear 13 and driven
The cooperation of gear 41 is same as Example 1.
Thrust bearing 62 is played a supporting role between adjustment bar 1 and stamper 2 to stamper 2.During operation, rotate forward
Bar 1 is adjusted, adjustment bar 1 drives stamper 2 and sub-disk 4 to rotate together with, and reversely rotates adjustment bar 1,1 drive sub-disk of adjustment bar afterwards
4 rotations, are so achieved that the independent rotation of stamper 2 and sub-disk 4 so that control point K reaches any position in predeterminated target face
Put.
Embodiment 3
As shown in figure 5, the present embodiment and the difference of embodiment 2 are, it is provided with the center of stamper 2 and compresses sets of holes 22,
Clamping sleeve 23 is set compressing, adjustment bar 1 passes through clamping sleeve 23, instead of ratchet mechanism using clamping sleeve 23 and pushes away in sets of holes 22
Power bearing, pass through the i.e. sustainable stamper 2 of the power of friction 4 of clamping sleeve 23.
Positioning key 91 is fixed with the bottom of stamper 2, the locator card coordinated with positioning key is fixed with the inwall of vacuum chamber
Groove 92.When needing the rotation of stamper 2, positioning key 91 separates with neck 92, and adjustment bar 1 can drive stamper 2 to be rotated together with sub-disk 4,
Positioning key 91 is caught in neck 92 when not needing the rotation of stamper 2, and adjustment bar 1 then can only drive sub-disk 4 to rotate.
Embodiment 4
As shown in fig. 6, first dynamic sealing 51 of the present embodiment is fixed in the side wall 7 of vacuum chamber, adjustment bar includes female bar
11 and sub bar 12.Female bar 11 is tubulose, and provided with sub bar hole, sub bar 12 is inserted in the sub bar hole of female bar 11, and female bar 11 and sub bar 12 are
Coaxial configuration, can individually it rotate.Female bar 11 is rotatable to pass through the first dynamic sealing 51, the top of female bar 11 and the center of stamper 2
It is fixedly connected so that female bar 11 can drive stamper 2 to rotate.
The top of sub bar 12 is provided with driving gear 13, and driving gear 13 is mediated with the driven gear 41 in sub-disk so that son
Bar 12 can drive sub-disk 4 to rotate.Extend outside vacuum chamber the bottom of female bar 11 and sub bar 12.
Bull stick 3 includes vertical portion 31 and rake 32, and one end of vertical portion 31 is fixedly connected with one end of rake 32.It is perpendicular
The bottom in straight portion 31 is fixedly connected with stamper 2, and sub-disk 4 is rotatably mounted on rake 32 by second bearing 63.Due to
Sub-disk 4 is obliquely installed, and driving gear 13 and driven gear 41 select bevel gear.
The vacuum displacement adjustment device of the present embodiment, suitable for the operating mode that target face is inclined-plane or sphere.Bar is adjusted with turning
Angle between the rake 32 of bar is preferably 10~60 °, and staff can select the inclination of rake 32 according to the actual requirements
Angle.
The vacuum displacement adjustment device of the present invention, passes through the cooperation of stamper and sub-disk so that control point can reach predetermined
Optional position in target area.Preferably, the ratio of the diameter of sub-disk 4 and the diameter of stamper 2 is 1: 2, and control point K is on the side of sub-disk
Edge, it is exactly the scope that stamper is covered that control point K, which reaches target zone,.
Control point K can also be multiple, and the quantity of increase control position can be achieved in the quantity by increasing sub-disk.It is different
Sub-disk can be rotated by same driving gear, also can drive different sub-disks by setting multiple driving gears.Such as Fig. 7 institutes
The embodiment shown, the difference of itself and embodiment 1 is, multiple sub-disks, including the first sub-disk 4A and second are mounted with stamper
Control point K1 and K2 are respectively provided with sub-disk 4B, the first sub-disk 4A and the second sub-disk 4B.Wherein, the second driven gear 41B with
Second sub-disk 4B slightly has a segment distance so that sub bar 12 can drive the first driven gear 41A and the second driven gear 41B to revolve respectively
Turn, that is, realize the first sub-disk 4A and the second sub-disk 4B independent rotation.Arrow in Fig. 7, represent that sub bar 12 can move up and down,
When sub bar 12 moves down, the first sub-disk 4A rotations are driven, when sub bar 12 moves up, drive the second sub-disk 4B rotations.
Multiple driving gears drive the driven gear and driving gear that the scheme of different sub-disks can be two sub-disks
Coordinate, used the opposite ratchet of both direction respectively.
It should be noted that each embodiment above by reference to described by accompanying drawing only limits this to illustrate rather than
The scope of invention, it will be understood by those within the art that, it is right under the premise without departing from the spirit and scope of the present invention
The modification or equivalent substitution that the present invention is carried out, all should cover within the scope of the present invention.It is in addition, signified unless the context
Outside, the word occurred in the singular includes plural form, and vice versa.In addition, unless stated otherwise, then any embodiment
All or part of can combine any other embodiment all or part of use.
Claims (8)
- A kind of 1. vacuum displacement adjustment device, for adjusting the position of part in vacuum chamber, it is characterised in that including adjustment bar, Stamper, bull stick, sub-disk and the first dynamic sealing；First dynamic sealing is fixed in the side wall of the vacuum chamber；Bar is rotatable passes through first dynamic sealing for the adjustment, and its top is provided with driving gear；The stamper is rotatably mounted on the adjustment bar；The sub-disk is supported by the bull stick, and one end of the bull stick connects the stamper, and the other end connects the sub-disk；The sub-disk is provided with driven gear, and the driven gear is mediated with the driving gear.
- 2. vacuum displacement adjustment device according to claim 1, it is characterised in that the stamper is provided with bearing hole；Institute State and the bull stick is fixed at the center of sub-disk, the bull stick extends along the sub-disk axis, passes through the rotatable peace of clutch shaft bearing On the bearing hole of the stamper.
- 3. vacuum displacement adjustment device according to claim 2, it is characterised in that the adjustment bar includes female bar and son Bar；Female bar is tubulose, rotatable to pass through first dynamic sealing provided with sub bar hole, the top of female bar with it is described Stamper is fixedly connected；The sub bar is inserted in the sub bar hole of female bar, and top is provided with the driving gear, and bottom is extended outside the vacuum chamber；The second dynamic sealing is provided between female bar and the sub bar.
- 4. vacuum displacement adjustment device according to claim 3, it is characterised in that the quantity of second dynamic sealing is two It is individual.
- 5. vacuum displacement adjustment device according to claim 2, it is characterised in that also including ratchet mechanism and thrust axis Hold, the ratchet mechanism includes the ratchet and pawl to cooperate；Centre bore is provided with the center of the stamper, the ratchet is arranged in the centre bore, and the ratchet is fixedly mounted on On the adjustment bar；The thrust bearing is arranged in the centre bore, between the adjustment bar and stamper.
- 6. vacuum displacement adjustment device according to claim 2, it is characterised in that also including clamping sleeve, the stamper It is provided with center and compresses sets of holes, for the clamping sleeve in the compression sets of holes, the adjustment bar passes through the clamping sleeve；The bottom of the stamper is fixed with positioning key, and the positioning coordinated with the positioning key is fixed with the inwall of the vacuum chamber Neck.
- 7. vacuum displacement adjustment device according to claim 1, it is characterised in that the bull stick includes vertical portion and inclination Portion, the vertical portion are fixedly connected with the rake；The bottom of the vertical portion is fixedly connected with stamper, and the sub-disk is rotatably mounted to the inclination by second bearing In portion.
- 8. vacuum displacement adjustment device according to claim 7, it is characterised in that the adjustment bar inclines with the bull stick Angle between inclined portion is 10~60 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710986895.4A CN107818814A (en) | 2017-10-20 | 2017-10-20 | A kind of vacuum displacement adjustment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710986895.4A CN107818814A (en) | 2017-10-20 | 2017-10-20 | A kind of vacuum displacement adjustment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107818814A true CN107818814A (en) | 2018-03-20 |
Family
ID=61608631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710986895.4A Pending CN107818814A (en) | 2017-10-20 | 2017-10-20 | A kind of vacuum displacement adjustment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107818814A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6333608A (en) * | 1986-07-29 | 1988-02-13 | Hitachi Maxell Ltd | Radius measuring apparatus |
| JPS6393538A (en) * | 1986-10-07 | 1988-04-23 | Mitsubishi Metal Corp | Adhesion of wafer |
| JPH08250577A (en) * | 1995-03-10 | 1996-09-27 | Aneruba Kk | Planetary type wafer holder |
| JPH11247957A (en) * | 1998-02-27 | 1999-09-14 | Anelva Corp | Rack and pinion drive mechanism in vacuum processing device |
| JP2005286001A (en) * | 2004-03-29 | 2005-10-13 | Shibaura Mechatronics Corp | Transport device for substrate |
| CN102759489A (en) * | 2011-04-27 | 2012-10-31 | 中国人民解放军装甲兵工程学院 | Multifunctional vacuum friction and wear testing machine |
| CN207441249U (en) * | 2017-10-20 | 2018-06-01 | 北京雪迪龙科技股份有限公司 | A kind of vacuum displacement adjustment device |
-
2017
- 2017-10-20 CN CN201710986895.4A patent/CN107818814A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6333608A (en) * | 1986-07-29 | 1988-02-13 | Hitachi Maxell Ltd | Radius measuring apparatus |
| JPS6393538A (en) * | 1986-10-07 | 1988-04-23 | Mitsubishi Metal Corp | Adhesion of wafer |
| JPH08250577A (en) * | 1995-03-10 | 1996-09-27 | Aneruba Kk | Planetary type wafer holder |
| JPH11247957A (en) * | 1998-02-27 | 1999-09-14 | Anelva Corp | Rack and pinion drive mechanism in vacuum processing device |
| JP2005286001A (en) * | 2004-03-29 | 2005-10-13 | Shibaura Mechatronics Corp | Transport device for substrate |
| CN102759489A (en) * | 2011-04-27 | 2012-10-31 | 中国人民解放军装甲兵工程学院 | Multifunctional vacuum friction and wear testing machine |
| CN207441249U (en) * | 2017-10-20 | 2018-06-01 | 北京雪迪龙科技股份有限公司 | A kind of vacuum displacement adjustment device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104536243B (en) | Rocker-arm specialty fixes and shoots and camera chain | |
| CN107830342A (en) | The computer screen bindiny mechanism being easily installed | |
| CN107386970B (en) | A kind of magnetic drive formula guide drilling tool guiding execution system and its implementation | |
| CN205418039U (en) | Many connecting rod sliding block formula cycloid propeller | |
| CN104932608B (en) | A kind of hinge engaging structure and laptop | |
| CN102709214A (en) | Multihead rotary chip bonder | |
| CN207441249U (en) | A kind of vacuum displacement adjustment device | |
| CN105799894B (en) | Pendulum guide rod type cycloid thruster with enlarger | |
| CN107818814A (en) | A kind of vacuum displacement adjustment device | |
| CN101871420B (en) | Two freedom degree spherical hydraulic motor with fixed rudder blade shaft | |
| CN105890447B (en) | It is remotely controlled rifle sighting angle controlling organization and angle regulator | |
| CN207155815U (en) | Abnormal curved surface boring and riveting machine device people | |
| CN204406017U (en) | Rocker-arm specialty fixes and takes and camera chain | |
| TW201532380A (en) | Tilt type sun tracking device | |
| CN208996627U (en) | Drilling equipment is used in a kind of coal mining explosion punching | |
| CN204216395U (en) | Optical cavity adjusting mechanism under a kind of vacuum environment | |
| WO2022161508A1 (en) | Air outlet structure for air conditioner, and air conditioner | |
| CN205738027U (en) | Pendulum guide rod type cycloid thruster with enlarger | |
| CN104319601B (en) | Optical cavity adjustment mechanism under vacuum environment | |
| CN209724903U (en) | A kind of compensation hovering mechanism | |
| CN209728308U (en) | A kind of large size heliostat pitch angle driving structure | |
| CN114615611A (en) | Head and shoulder structure with rotation function | |
| CN204250463U (en) | Open the cam mechanism of carton mechanism | |
| CN105234956B (en) | Steering mechanism for bionic snake-shaped robot | |
| CN206364948U (en) | A kind of space positioning apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |