CN107796761B - Ultrafast laser fixed point irradiation device - Google Patents
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Abstract
The invention provides an ultrafast laser fixed point irradiation device, which comprises an ultrafast laser, a third reflector and a rotary table, wherein the third reflector is arranged on the ultrafast laser; the third reflector is arranged on a laser light path of the ultrafast laser; the revolving stage can be followed a rotation axis and rotated, be fixed with speculum group and concave surface reflecting mirror on the revolving stage, the distance of concave surface reflecting mirror centre-to-centre spacing axis of rotation does concave surface reflecting mirror curvature radius's half, speculum group is used for transmitting the reflection laser of third speculum to concave surface reflecting mirror, and the reflection laser beam that speculum group transmitted to concave surface reflecting mirror is the paraxial light beam that is on a parallel with concave surface reflecting mirror optical axis, and the reflection laser that speculum group transmitted assembles after concave surface reflecting mirror reflects to the axis of rotation. The plane reflector group and the concave reflector are fixed on a rotary table according to rules, so that the position of a laser irradiation point passing through the plane reflector group and the concave reflector is unchanged and the laser direction is changeable as long as the angle of laser entering the rotary table is unchanged during the rotation of the rotary table.
Description
Technical Field
The invention relates to the technical field of ultrafast lasers, in particular to an ultrafast laser fixed-point irradiation device.
Background
In the field of scientific research, laser is an important excitation light source, and key characteristic information or a map reflecting the performance change of a sample material is detected and obtained by gradually changing the direction of laser irradiation or sample excitation, so that the laser becomes an important method for disclosing a new scientific phenomenon. Especially in the research of ultrafast time resolution, the precise time delay synchronous control between different pulses is also important.
The ultrafast pulse laser has an extremely short pulse width and a high peak power, and thus has important application in scientific research and industrial fields. In the field of micromachining, when ultrafast laser interacts with a substance, the action time is extremely short, the heat effect is very small, the heat damage of the processed material is reduced, the processing precision is greatly improved, and the laser is adjusted to irradiate a sample in different directions and different angles, so that the three-dimensional machining of the material can be realized. For example: in X-ray detection which has important application in the fields of biochemistry, life science, new materials and the like, ultrafast pulse laser is required to collide with a high-energy electron beam group to generate femtosecond X-ray pulses, and the X-ray pulses can be used for analyzing the structure dynamic change process on the atomic scale. Since the X-ray pulse width is largely determined by the transit time of the ultra-short pulse laser through the electron beam, varying the angle of collision of the laser pulse and the high-energy electron beam cloud can produce X-rays of different pulse widths.
In the laser three-dimensional processing device in the prior art, although the adjustment of the laser direction can be realized, the characteristic of keeping the fixed-point irradiation of the laser in the adjustment process cannot be realized, the fixed-point calibration is often required after the adjustment of the laser direction, and the laser pulse optical path is changed after the adjustment of the laser direction.
Disclosure of Invention
The invention provides a variable-direction ultrafast laser fixed point irradiation device which overcomes or at least partially solves the problems, and overcomes the defects that the laser direction cannot be changed randomly and the pulse optical path of laser is easy to change in the prior laser fixed point irradiation device.
According to an aspect of the present invention, there is provided a laser spot irradiation apparatus including an ultrafast laser, a third reflecting mirror, and a turn table; the third reflector is arranged on a laser light path of the ultrafast laser; the revolving stage can be followed a rotation axis and rotated, be fixed with speculum group and concave surface reflecting mirror on the revolving stage, the distance of concave surface reflecting mirror centre-to-centre spacing axis of rotation does concave surface reflecting mirror curvature radius's half, speculum group is used for transmitting the reflection laser of third speculum to concave surface reflecting mirror, and the reflection laser beam that speculum group transmitted to concave surface reflecting mirror is the paraxial light beam that is on a parallel with concave surface reflecting mirror optical axis, and the reflection laser that speculum group transmitted assembles after concave surface reflecting mirror reflects to the axis of rotation.
Preferably, the third reflector is arranged on a translation stage, and the translation stage can move along the laser light path; the reflecting mirror group comprises a fourth reflecting mirror and a sub-reflecting mirror group arranged behind a reflecting light path of the fourth reflecting mirror, the fourth reflecting mirror is arranged on a rotating table, the rotating table can rotate on the rotating table, the reflecting center of the fourth reflecting mirror serves as the rotating axis of the rotating table, and the fourth reflecting mirror is used for receiving the reflecting laser of the third reflecting mirror and enabling the reflecting laser to be incident to the sub-reflecting mirror group at a fixed angle through rotation.
Preferably, the sub-reflecting mirror group comprises a fifth reflecting mirror, a sixth reflecting mirror and a seventh reflecting mirror; the fifth reflector is arranged on a reflection light path of the fourth reflector, the sixth reflector is arranged on a reflection light path of the fifth reflector, the seventh reflector is arranged on a reflection light path of the sixth reflector, and the concave reflector is arranged in the reflection direction of the seventh reflector.
Preferably, the reflection centers of the fourth mirror, the fifth mirror and the sixth mirror form three vertexes of a square with a side length of 2a, the center of the square is at the rotation axis of the turntable, the seventh mirror is located on one side of the square, and the distance between the reflection centers of the seventh mirror and the sixth mirror is smaller than a.
Preferably, the fourth reflector is a wide-angle total reflection mirror, the fifth reflector, the sixth reflector and the seventh reflector are all 45-degree total reflection mirrors, and the included angles of the fifth reflector, the sixth reflector and the seventh reflector, which correspond to the square, are all 45 degrees.
Preferably, the concave mirror is located on a central line of the square.
Preferably, the device further comprises a first reflector, a second reflector and a time delay device; the first reflector is arranged on a transmission light path of the ultrafast laser, the time delay device is used for receiving the reflected light of the first reflector and transmitting the reflected light to the second reflector, and the second reflector is used for receiving the laser reflected by the time delay device and reflecting the laser to the third reflector; the time delay device can move along the reflection light path of the first reflector.
Preferably, the time delay device includes a ninth reflecting mirror and a tenth reflecting mirror, the ninth reflecting mirror is disposed on the reflection light path of the first reflecting mirror, the tenth reflecting mirror is disposed on the reflection light path of the ninth reflecting mirror, and the second reflecting mirror is disposed on the reflection light path of the tenth reflecting mirror.
Preferably, the optical system further comprises a controller, wherein the controller is used for controlling the rotation angle of the rotary table according to the rotation angle of the rotary table, controlling the displacement distance of the third reflector according to the rotation angle of the rotary table and the side length value of the square, and enabling the reflected light of the third reflector to be emitted to the reflection center of the fourth reflector at a fixed point; the controller is also used for controlling the delay device to move according to the rotating angle of the rotary table and the length value of the square edge, so that the laser pulse optical path difference is not changed.
Preferably, the controller controls the rotation of the turntable to be θ/2 when the rotation angle of the turntable is θ, so that the reflected light from the fourth mirror enters the fifth mirror at an angle of 45 °.
The application provides an ultrafast laser fixed point irradiation apparatus of variable direction, fix on a revolving stage through with plane mirror group and concave surface mirror speculum according to the rule, make the revolving stage at the rotation in-process, as long as it is unchangeable to go into the laser angle who jets into the revolving stage, then the laser irradiation point position behind plane mirror group and concave surface mirror is unchangeable, through with laser reflection's mode with laser irradiation income plane mirror group, make the laser direction variable, and simultaneously, still be equipped with delay unit on laser light path, the direction that can realize ultrafast laser is adjustable and the optical path is unchangeable.
Drawings
FIG. 1 is a schematic structural diagram of an ultrafast laser spot irradiation apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a delay device according to an embodiment of the invention.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
As shown in fig. 1, there is shown a variable direction ultrafast laser fixed point irradiation apparatus, which comprises an ultrafast laser 100, a delay device 111, a translation stage 112 and a turntable 113, wherein ultrafast laser emitted from the ultrafast laser 100 passes through the delay device 111, the translation stage 112 and the turntable 113, and is fixedly irradiated to a specific point; specifically, in the present embodiment, the above is mainly implemented by the translation stage 112 and the turntable 113; translation platform 112 includes third speculum 103, and translation platform 112 can be followed laser direction and removed, and third speculum 103 is used for inciting into translation platform 112 laser reflection to revolving stage 113, and revolving stage 113 changes along a rotation axis O and rotates, revolving stage 113 includes speculum group and concave mirror 108, and the distance of concave mirror 108 center-to-axis does the radius of curvature of concave mirror 108 is half, and speculum group and concave mirror 108 are fixed on revolving stage 113, can rotate along with revolving stage 113, and mutual position is unchangeable, and speculum group is used for transmitting the reflection laser of third speculum 103 to concave mirror 108, and the reflection laser beam that the speculum transmitted to concave mirror 108 is on a parallel with the paraxial light beam of concave mirror 108 optical axis for the reflection laser light that the speculum group transmitted passes through after concave mirror 108 reflects axis O.
Specifically, the third reflecting mirror 103 is disposed on a translation stage 112, and the translation stage 112 can move along the laser optical path; the reflector group comprises a fourth reflector 104 and a sub-reflector group formed by the fourth reflector 104 after reflecting a light path, the fourth reflector 104 is arranged on a rotary table 114, the rotary table 114 can rotate on a rotary table 113, and a rotating shaft of the rotary table is positioned at a reflecting center of the fourth reflector 104; the fourth reflecting mirror 104 is configured to receive the reflected laser beam from the third reflecting mirror 103, and make the reflected laser beam enter the sub-reflecting mirror group at a fixed angle by rotation, and control an incident light angle entering the sub-reflecting mirror group by the fourth reflecting mirror 104, so that the incident and reflected light angles of the laser beam in the sub-reflecting mirror group are always kept unchanged, that is, the angle of the laser beam entering the concave reflecting mirror 108 is unchanged, and meanwhile, because the distance between the center of the concave reflecting mirror 108 and the rotating axis is half of the curvature radius of the concave reflecting mirror 108, and the reflected laser beam transmitted by the reflecting mirror group to the concave reflecting mirror 108 is a paraxial beam of the concave reflecting mirror 108, the reflected laser beam transmitted by the reflecting mirror group is converged to the rotating axis after being reflected by the concave reflecting mirror 108.
Example 1
In this embodiment, specifically, the sub-mirror group includes a fifth mirror 105, a sixth mirror 106 and a seventh mirror 107, the fifth mirror 105 is disposed on the reflection light path of the fourth mirror 104, the sixth mirror 106 is disposed on the reflection light path of the fifth mirror 105, the seventh mirror 107 is disposed on the reflection light path of the sixth mirror 106, and the concave mirror 108 is disposed at the reflection direction of the seventh mirror 107.
In this embodiment, the third reflector 103, the fourth reflector 104, the fifth reflector 105, the sixth reflector 106, and the seventh reflector 107 are all plane reflectors, specifically, the fourth reflector 104 is a wide-angle total reflector, and the fifth reflector 105, the sixth reflector 106, and the seventh reflector 107 are all 45 ° total reflectors; in a specific arrangement, the reflection centers of the fourth mirror 104, the fifth mirror 105, and the sixth mirror 106 constitute three fixed points of a square, the side length of the square is 2a, and the fifth mirror 105, the sixth mirror 106, and the seventh mirror 107 are all 45 ° total reflection mirrors, so that the arrangement of the fifth mirror 105, the sixth mirror 106, and the seventh mirror 107 has specific requirements, in this embodiment, an included angle between the fifth mirror 105 and two sides of the corresponding square is 45 °, an included angle between the sixth mirror 106 and two sides of the corresponding square is 45 °, the seventh mirror 107 is disposed on one side of the square, and the distance between the seventh mirror 107 and the reflection center of the sixth mirror 106 is slightly smaller than a.
In this embodiment, in order to make the reflected laser beam of the seventh mirror 107 and the paraxial beam of the optical axis of the concave mirror 108 form an angle of 45 ° with the paraxial beam of the optical axis of the concave mirror 108, the seventh mirror needs to be disposed.
In this embodiment, if the laser beam can be incident on the fourth mirror 104 in a constant direction, when the turntable 113 rotates, the angle of the fourth mirror 104 in the corresponding turntable 113 changes, which results in a change in the laser beam reflected by the fourth mirror 104 to the fifth mirror 105, and the laser beam cannot be transmitted to the concave mirror 108 normally, so that the laser beam reflected by the fourth mirror 104 to the fifth mirror 105 is maintained at an angle of 45 ° by adjusting the rotation of the turntable 114, even if the laser beam reflected by the fourth mirror 104 enters the fifth mirror 105 along one side of a square, the optical path of the laser beam between the fifth mirror 105, the sixth mirror 106, the seventh mirror 107, and the concave mirror 108 is always kept constant. At this time, the attribute of the concave mirror 108 is only required to be controlled, so that the reflected laser always passes through a fixed point when the concave mirror 108 rotates, and the purpose of the application is further achieved.
Specifically, in this embodiment, the concave reflecting mirror 108 is disposed on the central line of the square, the distance from the center of the concave reflecting mirror 108 to the rotation axis O is half of the curvature radius of the concave reflecting mirror 108, and the reflected light beam of the seventh reflecting mirror 107 is a paraxial light beam parallel to the optical axis of the concave reflecting mirror 108, so that the reflected laser light transmitted by the reflecting mirror group is reflected by the concave reflecting mirror 108 and then converged by the rotation axis O.
In this embodiment, the device further comprises a first reflector 101, a second reflector 102 and a time delay device 111; the first reflecting mirror 101 is arranged on a transmitting light path of the ultrafast laser 100, the time delay device 111 is used for receiving the reflected light of the first reflecting mirror 101 and transmitting the reflected light to the second reflecting mirror 102, and the second reflecting mirror 102 is used for receiving the laser reflected by the time delay device 111 and reflecting the laser to the third reflecting mirror 103; the delay device 111 is movable along the reflected light path of the first mirror 101.
In this embodiment, the time delay device 111 includes a ninth mirror 109 and a tenth mirror 110, the ninth mirror 109 is disposed on the reflection light path of the first mirror 101, the tenth mirror 110 is disposed on the reflection light path of the ninth mirror 109, and the second mirror 102 is disposed on the reflection light path of the tenth mirror 110.
Specifically, the first reflector 101, the second reflector 102, the ninth reflector 109 and the tenth reflector 110 are all 45 ° total reflectors, and the first reflector 101, the second reflector 102, the ninth reflector 109 and the tenth reflector 110 are all plane reflectors.
In a specific implementation process, the first reflecting mirror 101 is disposed at an angle of 45 ° with respect to a reflection light path of the ultrafast laser, the ninth reflecting mirror 109 is disposed at an angle of 45 ° with respect to the reflection light path of the first reflecting mirror 101, the tenth reflecting mirror 110 is disposed at an angle of 45 ° with respect to the reflection light path of the ninth reflecting mirror 109, and the second reflecting mirror 102 is disposed at an angle of 45 ° with respect to the reflection light path of the tenth reflecting mirror 110, so that an emission direction of the ultrafast laser is kept unchanged and an optical path length is adjusted.
In this embodiment, the third reflector 103 is a plane reflector and is a 45 ° total reflector, and the third reflector 103 is parallel to the first reflector 101, so that the ultrafast laser can enter the third reflector 103 at an angle of 45 ° after passing through the first reflector 101, the ninth reflector 109, the tenth reflector 110, and the second reflector 102, and then is reflected to the fourth reflector 104 by the third reflector 103.
In this embodiment, the apparatus further comprises a controller, wherein the controller is configured to control a rotation angle of the rotating platform 114 according to a rotation angle of the rotating platform 113, and control a displacement distance of the third reflecting mirror 103 according to the rotation angle of the rotating platform 113 and a side length of a square, so that a reflected light beam of the third reflecting mirror 103 is incident on a reflection center of the fourth reflecting mirror 104 at a fixed point; the controller is further configured to control the delay device 111 to move according to the rotation angle of the turntable 113 and the length of the square edge, so that the laser pulse optical path difference is not changed. The controller is implemented by software of the computer 115, as shown in fig. 1, and as shown in fig. 1, when the turntable 113 rotates by an angle θ around the rotation axis O, that is, the fourth mirror 104 rotates to the position 204 in the figure, the fifth mirror 105 rotates to the position 205 in the figure, the sixth mirror 106 rotates to the position 206 in the figure, the seventh mirror 107 rotates to the position 207 in the figure, and the concave mirror 108 rotates to the position 208 in the figure.
The angle between the normal 1 of the fourth mirror 104 and the normal 2 after rotation (204) is set to δ. When the turntable 113 rotates by the angle θ, in order to ensure that the converging focus of the ultrafast laser beam 100 is still the point O after passing through the delay device 111, the plane mirror 101, 107, and the concave mirror 108, the first mirror 104 needs to rotate by an angle δ from the turntable 114, where δ and θ satisfy the following functional relationship: delta is theta/2.
In this embodiment, in order to enable the reflected laser beam of the third reflecting mirror 103 to enter the fourth reflecting mirror 104 in the original direction when the turntable 113 rotates, the third reflecting mirror 103 needs to be translated according to the rotation of the turntable 113, specifically, the third reflecting mirror 103 is disposed on a translation stage 112, the translation stage 112 can translate along the laser optical path of the ultrafast laser 100, when the turntable 113 rotates by an angle θ, in order to ensure that the focus of the ultrafast laser 100 after passing through the delay device 111, the plane reflecting mirror 101 and the concave reflecting mirror 108 is still at the point O, the third reflecting mirror 103 needs to move backward by a certain distance CD, and the reflected laser beam of the second reflecting mirror 102 always keeps the fixed point reflection in the original direction to the fourth reflecting mirror 104, and the movement is completed by the high-precision translation stage 112, and the functional relationship between CD, θ and a satisfies the following functional relationship:
when the turntable 113 rotates by an angle θ, the laser beam irradiated to the point O generates an optical path difference Δ, and the following functional relationship is satisfied between Δ and θ and a:
Δ＝2a(1-cosθ)
the delay device 111 is used for controlling the delay of the optical path, so as to ensure that the optical path of the laser pulse reaching the point O is unchanged, and the optical path difference delta can be offset by the vertical movement of the delay device 111. As shown in fig. 2, the time delay device 111 includes a plane mirror 109 and a plane mirror 110. When the turntable 113 is rotated by an angle θ, the delay device 111 must be moved upward by a distance d to ensure that the generated optical path difference Δ is 0. d and theta and a satisfy the following functional relation:
example 2
In this embodiment, an improvement is made according to embodiment 1, in which the fifth mirror 105 and the sixth mirror 106 in embodiment 1 are removed, the seventh mirror 107 and the concave mirror 108 are rotated 180 ° around the rotation axis as a central rotation axis, and the relative position of the seventh mirror 107 and the concave mirror 108 is unchanged, and the relative position is moved to the other side of the square where the response is parallel and is close to the fourth mirror 104, at this time, the reflection action of the fifth mirror 105 and the sixth mirror 106 is not needed, and the reflected light is directly transmitted to the concave mirror 108 through the seventh mirror 107. Other features in this embodiment are the same as those in embodiment 1, and therefore are not described in detail.
Example 3
This embodiment is another alternative of embodiment 1, and only the sixth reflecting mirror 106 is removed, and the seventh reflecting mirror 107 and the concave reflecting mirror 108 in embodiment 1 are rotated 90 degrees counterclockwise around the rotation axis as the center, that is, the seventh reflecting mirror 107 is moved to a position corresponding to a square near the fifth reflecting mirror 105, and the relative positions of the seventh reflecting mirror 107 and the concave reflecting mirror 108 are not changed. Other features in this embodiment are the same as those in embodiment 1, and therefore are not described in detail.
Example 4
This embodiment is another solution of embodiment 1, and based on embodiment 1, the seventh reflecting mirror 107 and the concave reflecting mirror 108 are rotated clockwise by 90 degrees around the rotation axis, the relative position of the seventh reflecting mirror 107 and the concave reflecting mirror 108 is not changed, and the eleventh reflecting mirror is disposed at the remaining vertex of the square, and the eleventh reflecting mirror is disposed in parallel with the fifth reflecting mirror 105. Other features in this embodiment are the same as those in embodiment 1, and therefore are not described in detail.
In summary, the present application provides a direction-variable ultrafast laser fixed-point irradiation device, in which a planar mirror group and a concave mirror are fixed on a turntable according to rules, so that the position of a laser irradiation point after passing through the planar mirror group and the concave mirror is unchanged as long as the angle of laser entering the turntable is unchanged during rotation of the turntable, and the laser is irradiated into the planar mirror group in a laser reflection manner, so that the direction of the laser is variable, and meanwhile, a time delay device is further disposed on a laser light path, so that the direction of ultrafast laser is adjustable and the optical path is unchanged.
Finally, the method of the present application is only a preferred embodiment and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A laser fixed-point irradiation device is characterized by comprising an ultrafast laser, a third reflector and a rotary table;
the third reflector is arranged on a laser light path of the ultrafast laser; the revolving stage can be followed a rotation axis and rotated, be fixed with speculum group and concave surface reflecting mirror on the revolving stage, the distance of concave surface reflecting mirror centre-to-centre spacing axis of rotation does concave surface reflecting mirror curvature radius's half, speculum group is used for transmitting the reflection laser of third speculum to concave surface reflecting mirror, and the reflection laser beam that speculum group transmitted to concave surface reflecting mirror is the paraxial light beam that is on a parallel with concave surface reflecting mirror optical axis, and the reflection laser that speculum group transmitted assembles after concave surface reflecting mirror reflects to the axis of rotation.
2. The laser spot irradiation apparatus according to claim 1, wherein the third reflecting mirror is disposed on a translation stage, and the translation stage is movable along the laser path; the reflecting mirror group comprises a fourth reflecting mirror and a sub-reflecting mirror group arranged behind a reflecting light path of the fourth reflecting mirror, the fourth reflecting mirror is arranged on a rotating table, the rotating table can rotate on the rotating table, the reflecting center of the fourth reflecting mirror serves as the rotating axis of the rotating table, and the fourth reflecting mirror is used for receiving the reflecting laser of the third reflecting mirror and enabling the reflecting laser to be incident to the sub-reflecting mirror group at a fixed angle through rotation.
3. The laser pointing device according to claim 2, wherein the sub-mirror group includes a fifth mirror, a sixth mirror, and a seventh mirror; the fifth reflector is arranged on a reflection light path of the fourth reflector, the sixth reflector is arranged on a reflection light path of the fifth reflector, the seventh reflector is arranged on a reflection light path of the sixth reflector, and the concave reflector is arranged in the reflection direction of the seventh reflector.
4. The laser spot irradiation apparatus according to claim 3, wherein the reflection centers of the fourth, fifth and sixth mirrors form three vertices of a square with a side length of 2a, the center of the square is at the rotation axis of the turntable, the seventh mirror is located on one side of the square, and the distance between the reflection centers of the seventh and sixth mirrors is less than a.
5. The laser fixed point irradiation device according to claim 4, wherein the fourth reflector is a wide-angle total reflector, the fifth reflector, the sixth reflector and the seventh reflector are all 45 ° total reflectors, and the included angles between the fifth reflector, the sixth reflector and the seventh reflector and the corresponding sides of the square are all 45 °.
6. The laser spot irradiation apparatus according to claim 4, wherein the concave mirror is located on a center line of the square.
7. The laser spot irradiation apparatus according to claim 4, further comprising a first mirror, a second mirror, and a delay device; the first reflector is arranged on a transmission light path of the ultrafast laser, the time delay device is used for receiving the reflected light of the first reflector and transmitting the reflected light to the second reflector, and the second reflector is used for receiving the laser reflected by the time delay device and reflecting the laser to the third reflector; the time delay device can move along the reflection light path of the first reflector.
8. The apparatus according to claim 7, wherein the time delay device comprises a ninth reflector and a tenth reflector, the ninth reflector is disposed on the reflected light path of the first reflector, the tenth reflector is disposed on the reflected light path of the ninth reflector, and the second reflector is disposed on the reflected light path of the tenth reflector.
9. The laser fixed point irradiation device according to claim 7, further comprising a controller, wherein the controller is configured to control the rotation angle of the rotary table according to the rotation angle of the rotary table, and control the displacement distance of the third reflector according to the rotation angle of the rotary table and the side length of the square, so that the reflected light from the third reflector is fixed point-irradiated onto the reflection center of the fourth reflector; the controller is also used for controlling the delay device to move according to the rotating angle of the rotary table and the length value of the square edge, so that the laser pulse optical path difference is not changed.
10. The laser spot irradiation apparatus according to claim 9, wherein the controller is configured to control the rotation of the turntable by θ/2 so that the reflected light from the fourth mirror enters the fifth mirror at an angle of 45 ° when the rotation angle of the turntable is θ.
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| CN109326949B (en) * | 2018-12-12 | 2019-10-15 | 中国科学院理化技术研究所 | Large-cavity-mode-size ultrafast laser feedback amplifier |
| CN112630879B (en) * | 2020-12-25 | 2022-09-30 | 中国工程物理研究院激光聚变研究中心 | Phase delay element and phase delay device |
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| CN106768893A (en) * | 2016-12-29 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | Concave grating diffraction efficiency tester |
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