CN112630879B - Phase delay element and phase delay device - Google Patents
Phase delay element and phase delay device Download PDFInfo
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- CN112630879B CN112630879B CN202011566667.XA CN202011566667A CN112630879B CN 112630879 B CN112630879 B CN 112630879B CN 202011566667 A CN202011566667 A CN 202011566667A CN 112630879 B CN112630879 B CN 112630879B
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- phase delay
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
Abstract
The invention discloses a phase delay element, which comprises a substrate and an optical medium layer, wherein the optical medium layer is formed on the surface of the substrate and is used for reflecting incident light and causing differential quantity by phase offset of two polarization state components which are mutually orthogonal to the incident light after passing through the optical medium layer. Compared with the existing wave plate made of crystals, the phase delay element is made of an optical medium layer, can bear higher laser power, and can improve the damage resistance to laser. The invention also discloses a phase delay device.
Description
Technical Field
The present invention relates to the field of optical devices, and more particularly to a phase delay device. The invention also relates to a phase delay device.
Background
Polarization characteristics are an important characteristic parameter for describing laser, and the polarization characteristics of a light beam directly influence the output power of a high-power laser, damage to optical elements, far-field beam quality and the like. In some application fields, such as laser particle acceleration experiments, carbon dioxide laser cutting processes, chemical laser optical path design, etc., the polarization characteristics of laser beams need to be precisely controlled to ensure that a good application effect is obtained.
At present, the precise regulation and control of the polarization characteristic of the laser beam are mainly realized by wave plate devices, and the principle of the precise regulation and control is to utilize the birefringence characteristic of a uniaxial or biaxial crystal. When a linearly polarized light beam vertically enters the surface of the crystal with anisotropy, the linearly polarized light beam is decomposed into two sub-beams which are transmitted along the original direction and have mutually perpendicular vibration directions, and because the transmission speeds of the two sub-beams in the crystal are different, when the two sub-beams pass through the crystal with a certain thickness, a corresponding phase difference is generated between the two sub-beams, so that after the two sub-beams pass through the crystal, the two sub-beams which have mutually perpendicular vibration directions and have a certain phase difference are superposed again. According to the difference of the phase differences, the polarization state of the emergent light beam is converted into different forms such as a circular polarization state, an elliptical polarization state or a linear polarization state from a linear polarization state when the emergent light beam is incident.
The crystal with birefringence characteristic is made into a phase retardation plate, referred to as a wave plate for short, mainly comprising a mica wave plate and a quartz wave plate according to a specific thickness. In order to control the polarization characteristics of the output beam in a low-power gas or solid laser, a wave plate type polarization control element is adopted in a cavity. But the laser damage threshold of the crystal made into the wave plate is low, so that the crystal is difficult to apply to a high-power laser.
Disclosure of Invention
Accordingly, it is an object of the present invention to provide a phase delay element capable of improving the resistance to laser damage. The invention also provides a phase delay device.
In order to achieve the purpose, the invention provides the following technical scheme:
a phase delay element comprises a substrate and an optical medium layer, wherein the optical medium layer is formed on the surface of the substrate and is used for reflecting incident light and causing difference due to phase offset of two polarization state components which are mutually orthogonal to the incident light after passing through the optical medium layer.
Preferably, the optical medium layer includes at least two material layers having different refractive indexes stacked.
Preferably, the material layer comprises a hafnium oxide layer, a zirconium dioxide layer, a tantalum pentoxide layer, a gadolinium dioxide layer, a scandium dioxide layer or a silicon dioxide layer.
Preferably, the incident angle of the incident light irradiated to the optical medium layer may be changed.
The utility model provides a phase delay device, includes cavity and phase delay component, the phase delay component is in the cavity, the cavity is used for keeping apart external light, and the incident light passes through the light-in entrance entering of cavity the cavity and inciting phase delay component, the emergent light of formation passes through the light-out mouth of cavity is launched, the phase delay component be more than.
Preferably, the optical module further comprises a first control device and a second control device, the first control device is configured to control the phase retardation element to rotate around the optical axis of the incident light, and the second control device is configured to control the phase retardation element to rotate around the axis perpendicular to the optical axis of the incident light.
Preferably, the optical element comprises a first phase delay element and a second phase delay element which are oppositely arranged, wherein the first phase delay element is used for reflecting incident light to the second phase delay element.
Preferably, the light source device comprises a first phase delay element, a second phase delay element, a third phase delay element and a fourth phase delay element, and incident light is reflected by the first phase delay element, the second phase delay element, the third phase delay element and the fourth phase delay element in sequence and emitted out, so that the incident direction of the incident light is consistent with the emitting direction of the emitted light.
Preferably, the optical fiber coupler further comprises a coarse adjustment control device, a first fine adjustment control device and a second fine adjustment control device, the coarse adjustment control device is configured to synchronously control the first phase delay element, the second phase delay element, the third phase delay element and the fourth phase delay element to rotate around an incident light optical axis, the first fine adjustment control device is configured to synchronously control the first phase delay element and the second phase delay element to rotate around an axis perpendicular to the incident light optical axis, and the second fine adjustment control device is configured to synchronously control the third phase delay element and the fourth phase delay element to rotate around an axis perpendicular to the incident light optical axis.
Preferably, a light absorbing layer is disposed on an inner surface of the cavity.
According to the above technical solution, the phase delay element provided by the present invention includes a substrate and an optical medium layer, the optical medium layer is formed on a surface of the substrate, the optical medium layer can reflect incident light and cause a difference in phase offset when two polarization components orthogonal to each other of the incident light pass through the optical medium layer, the incident light irradiates the optical medium layer to be reflected, the phase offset generated by one polarization component orthogonal to each other of the incident light after passing through the optical medium layer is different from the phase offset generated by the other polarization component, thereby causing a difference in phase offset, and thus the polarization state of the emergent light is changed compared with the incident light. Compared with the existing wave plate made of crystals, the phase delay element is made of the optical medium layer, can bear higher laser power, and can improve the damage resistance to laser.
The phase delay device provided by the invention can achieve the beneficial effects.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic diagram of a phase delay element according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an optical medium layer of a phase retardation device according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the phase delay element generating phase delay as it rotates according to an embodiment of the present invention;
fig. 4 is a schematic diagram of a phase delay apparatus according to an embodiment of the present invention;
fig. 5(a) is a front perspective view of a phase delay apparatus according to another embodiment of the present invention;
FIG. 5(b) is a rear perspective view of the phase delay device shown in FIG. 5 (a);
FIG. 6 is a diagram illustrating the variation of the retardation amount generated by the retardation apparatus with the incident angle of light according to an embodiment.
Detailed Description
In order to make those skilled in the art better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a phase delay element, which comprises a substrate and an optical medium layer, wherein the optical medium layer is formed on the surface of the substrate, and the optical medium layer is used for reflecting incident light and causing differential quantity due to phase offset of two polarization state components which are mutually orthogonal to the incident light after passing through the optical medium layer.
The optical medium layer can reflect incident light, two polarization state components which are orthogonal to each other of the incident light generate phase offset respectively after the incident light passes through the optical medium layer, wherein the phase offset generated by one polarization state component which is orthogonal to each other is different from the phase offset generated by the other polarization state component, so that differential is caused, and the polarization state of the emergent light is changed compared with that of the incident light. Compared with the existing wave plate made of crystals, the phase delay element is made of the optical medium layer, can bear higher laser power, and can improve the damage resistance to laser.
The phase delay element will be described in detail with reference to the accompanying drawings and the following detailed description. Referring to fig. 1, fig. 1 is a schematic diagram of a phase retardation device according to the present embodiment, and as can be seen from the figure, the phase retardation device includes a substrate 10 and an optical medium layer 11, where the optical medium layer 11 is formed on a surface of the substrate 10. Alternatively, the substrate 10 may be, but is not limited to, a fused silica material.
The optical medium layer 11 can reflect incident light and cause dispersion due to phase shift of two polarization components orthogonal to each other after passing through the optical medium layer 11. Specifically, the optical medium layer 11 may include at least two stacked material layers having different refractive indexes, and be formed by stacking at least two material layers having different refractive indexes.
Referring to fig. 3, incident light is irradiated onto an interface of two medium layers with different refractive indexes in the optical medium layer at a certain incident angle, and is refracted and reflected at the interface, and the incident light can be decomposed into s-polarization component perpendicular to the incident plane and p-polarization component in the incident plane according to the vibration direction. Because the equivalent admittances of the s-polarization component and the p-polarization component of the incident light are different, not only the reflectivity and the transmissivity of the s-polarization component and the p-polarization component are different, but also the phase offset of the s-polarization component and the p-polarization component is different, so that the s-polarization component and the p-polarization component generate phase delay, and the emergent light is changed relative to the polarization state of the incident light.
In practical applications, the optical medium layer 11 may include two material layers with different refractive indexes, or the optical medium layer 11 may be formed by stacking three or other material layers with different refractive indexes. Referring to fig. 2, fig. 2 is a schematic diagram of an optical medium layer of a phase delay element according to an embodiment, in which the optical medium layer 11 includes first material layers 110 and second material layers 111 with different refractive indexes, and the first material layers 110 and the second material layers 111 are alternately stacked.
The type of the material layer included in the optical medium layer 11, the number of the stacked material layers, or the thickness of each material layer can be designed according to the application requirements. By optically designing the optical medium layer 11, a desired phase can be realized in a desired single-segment spectral region or multi-segment spectral regionBit delay. Alternatively, the material layer of the optical medium layer 11 may be, but is not limited to, hafnium oxide (HfO) having a high refractive index 2 ) Layer, zirconium dioxide (ZrO) 2 ) Layer, tantalum pentoxide (Ta) 2 O 5 ) Layer, gadolinium oxide (GdO) 2 ) Layer or scandium dioxide (ScO) 2 ) Layer, or silicon dioxide (SiO) with a lower refractive index 2 ) And (3) a layer.
Preferably, in practical applications, the incident angle of the incident light on the optical medium layer 11 may be changed, and by changing the incident angle of the incident light on the optical medium layer 11, the phase retardation generated by the two polarization components orthogonal to each other of the emergent light can be controlled to achieve the required phase retardation. Specifically, assuming that the direction of incident light is fixed, the incident light can be divided into two equal polarization components orthogonal to each other by controlling the phase delay element to rotate around the optical axis of the incident light, and the phase delay amount between the two polarization components can be controlled by controlling the phase delay element to rotate around the axis perpendicular to the optical axis of the incident light.
The phase retardation element of the embodiment utilizes the polarization effect of the optical film to realize the phase retardation of light, can bear the irradiation of high-power laser, and can be applied to a high-power laser device. In addition, the high-power laser device is limited by a processing process because large-size optical elements are not adopted, the crystal wave plate device is difficult to be manufactured in a large size, the phase delay element can adopt the existing mature film deposition equipment and film deposition process, the low-cost and high-efficiency production of the large-size device can be realized, the manufacturing difficulty and the manufacturing cost of the wave plate optical elements in the large-size high-power laser device can be effectively reduced, and the high-power laser device has a higher application value.
Correspondingly, the embodiment of the invention also provides a phase delay device, which comprises a cavity and a phase delay element, wherein the phase delay element is arranged in the cavity, the cavity is used for isolating external light, incident light enters the cavity through a light inlet of the cavity and enters the phase delay element, formed emergent light is emitted through a light outlet of the cavity, and the phase delay element is the phase delay element.
The phase delay element is arranged in the cavity, and external light is isolated through the cavity, so that interference caused by the external light is avoided. The incident light enters the cavity through the light inlet of the cavity and enters the phase delay element, the phase delay element reflects the light out, the formed emergent light is emitted through the light outlet of the cavity, and the polarization state of the emergent light is changed relative to the incident light. Compared with the existing wave plate made of crystals, the phase delay device of the embodiment comprises the phase delay element made of the optical medium layer, can bear higher laser power, and can improve the damage resistance to laser.
The phase delay device of the embodiment can change the incident angle of the incident light irradiating the optical medium layer 11 by rotating the phase delay element, and control the phase delay generated by the two polarization state components orthogonal to each other of the emergent light by changing the incident angle of the incident light irradiating the optical medium layer 11, so as to achieve the required phase delay amount.
Preferably, the phase delay device further includes a first control device and a second control device, the first control device is configured to control the phase delay element to rotate around an optical axis of incident light, and the second control device is configured to control the phase delay element to rotate around an axis perpendicular to the optical axis of the incident light. In practical application, the direction of the incident light can be fixed, and the phase delay element is rotated by the first control device and the second control device to control the incident angle of the incident light irradiating the optical medium layer to change.
Optionally, in a specific implementation, the phase delay apparatus of this embodiment may include a first phase delay element and a second phase delay element that are oppositely disposed, where the first phase delay element is configured to reflect incident light to the second phase delay element. Referring to fig. 4, fig. 4 is a schematic diagram of a phase delay apparatus provided in this embodiment, as can be seen from the figure, the phase delay apparatus includes a cavity 20, a first phase delay element 21 and a second phase delay element 22, the first phase delay element 21 and the second phase delay element 22 are arranged oppositely, in the phase delay apparatus shown in fig. 4, incident light enters the cavity 20 through a light inlet 23 of the cavity and is incident on the first phase delay element 21, the first phase delay element 21 reflects the light to the second phase delay element 22, the second phase delay element 22 reflects the light, and the light is emitted through a light outlet 24.
The polarization state of light can be controlled by changing the difference between the phase shift amounts of the two polarization state components orthogonal to each other of the outgoing light by changing the incident angle of light on the first phase delay element 21 or the incident angle of light on the second phase delay element 22.
In addition, by arranging the angles of the first phase retardation element 21 and the second phase retardation element 22, the emission direction of the outgoing light can be made to coincide with the incident direction of the incident light. Thus, the phase delay device can be applied to an optical system such as a laser system, and can be applied to an optical path requiring no change in the light transmission direction.
Optionally, the phase delay device may specifically include a first phase delay element, a second phase delay element, a third phase delay element, and a fourth phase delay element, where the incident light is reflected by the first phase delay element, the second phase delay element, the third phase delay element, and the fourth phase delay element in sequence and emitted, so that the incident direction of the incident light is the same as the emitting direction of the emitting light. Referring to fig. 5(a) and 5(b), fig. 5(a) is a front perspective view of a phase delay device according to still another embodiment, and fig. 5(b) is a rear perspective view of the phase delay device shown in fig. 5(a), it can be seen that the phase delay device includes a cavity 30, a first phase delay element 31, a second phase delay element 32, a third phase delay element 33 and a fourth phase delay element 34, the first phase delay element 31 and the second phase delay element 32 are oppositely arranged, the second phase delay element 32 and the third phase delay element 33 are oppositely arranged, the third phase delay element 33 and the fourth phase delay element 34 are oppositely arranged, incident light enters the cavity 30 through a light inlet 35 of the cavity 30 to be incident on the first phase delay element 31, and the incident light sequentially passes through the first phase delay element 31, the second phase delay element 32, the second phase delay element 33, and the fourth phase delay element 34, The third phase delay element 33 and the fourth phase delay element 34 are reflected and emitted such that the incident direction of the incident light coincides with the exit direction of the exit light. The outgoing light is emitted through the light exit 36.
Preferably, the phase delay apparatus of this embodiment further includes a coarse adjustment control device 37, a first fine adjustment control device 38, and a second fine adjustment control device 39, where the coarse adjustment control device 37 is configured to synchronously control the first phase delay element 31, the second phase delay element 32, the third phase delay element 33, and the fourth phase delay element 34 to rotate around an incident light optical axis, the first fine adjustment control device 38 is configured to synchronously control the first phase delay element 31 and the second phase delay element 32 to rotate around an axis perpendicular to the incident light optical axis, and the second fine adjustment control device 39 is configured to synchronously control the third phase delay element 33 and the fourth phase delay element 34 to rotate around an axis perpendicular to the incident light optical axis.
Referring to fig. 6, fig. 6 is a schematic diagram illustrating a variation of a retardation amount generated by a retardation apparatus according to an embodiment of the invention with an incident angle of light.
Preferably, a light absorbing layer is disposed on an inner surface of the cavity, and stray light is absorbed by the light absorbing layer to avoid interference of the stray light. Preferably, a light-transmitting sheet may be disposed at the light inlet or the light outlet of the cavity to protect the cavity from contamination. The light transmissive sheet may be, but is not limited to, a fused silica sheet. The cavity is used for carrying and supporting the phase delay element, and an aluminum cavity can be adopted but is not limited.
The phase delay element and the phase delay device provided by the present invention are described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (2)
1. A phase delay device is characterized by comprising a cavity and a phase delay element, wherein the phase delay element is positioned in the cavity, the cavity is used for isolating external light, incident light enters the cavity through a light inlet of the cavity and enters the phase delay element, and formed emergent light is emitted through a light outlet of the cavity;
the phase delay element comprises a substrate and an optical medium layer, wherein the optical medium layer is formed on the surface of the substrate and is used for reflecting incident light and causing differential quantity by phase offset of two polarization state components which are mutually orthogonal to the incident light after passing through the optical medium layer;
the phase delay device comprises a first phase delay element, a second phase delay element, a third phase delay element and a fourth phase delay element, and incident light is reflected by the first phase delay element, the second phase delay element, the third phase delay element and the fourth phase delay element in sequence and emitted out, so that the incident direction of the incident light is consistent with the emergent direction of the emergent light;
the device also comprises a coarse adjustment control device, a first fine adjustment control device and a second fine adjustment control device, wherein the coarse adjustment control device is used for synchronously controlling the first phase delay element, the second phase delay element, the third phase delay element and the fourth phase delay element to rotate by taking an incident light optical axis as a rotating shaft, the first fine adjustment control device is used for synchronously controlling the first phase delay element and the second phase delay element to rotate by taking an axis perpendicular to the incident light optical axis as a rotating shaft, and the second fine adjustment control device is used for synchronously controlling the third phase delay element and the fourth phase delay element to rotate by taking an axis perpendicular to the incident light optical axis as a rotating shaft.
2. The phase delay device of claim 1, wherein a light absorbing layer is disposed on an inner surface of the cavity.
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