CN107782921A - Array probe guides educational system and its method automatically - Google Patents
Array probe guides educational system and its method automatically Download PDFInfo
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- CN107782921A CN107782921A CN201610738230.7A CN201610738230A CN107782921A CN 107782921 A CN107782921 A CN 107782921A CN 201610738230 A CN201610738230 A CN 201610738230A CN 107782921 A CN107782921 A CN 107782921A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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Abstract
The invention discloses a kind of array probe to guide educational system and its method automatically, and the system includes：One polyaxial displacement module；One probe module, it is located at the polyaxial displacement module, and the probe module has multiple probes；One supervises vision module, and it is located at the polyaxial displacement module, and a control module, and it is electrically connected with the polyaxial displacement module, the supervision vision module and the probe module.The control module is according to a first level coordinate value and one second horizontal coordinate value seat, to calculate the offset of the first level coordinate value and the second horizontal coordinate value seat, if there is offset generation, then adjust the horizontal level of the probe module, so that after the horizontal level of the probe module meets the horizontal level of the detected part of a determinand, then vertically move the probe module；When the plurality of probe has horizontal sliding, then judge whether the probe has contacted the plurality of detected part, so as to draw vertical coordinate value of first coordinate system with respect to second coordinate system.
Description
Technical field
The present invention relates to a kind of array probe to guide educational system and its method automatically, and is automated more particularly to one kind
Adjust probe and the devices and methods therefor of detected part.
Background technology
Panel is widely used in kinds of displays, handheld communication device or all kinds of intelligent devices, also, panel in
Needed in manufacturing process by detecting at least once, to confirm whether panel has damage.
Existing panel detection mode for array probe alignment to be intended to the transistor of test panel manually, then
Electric crystal is contacted with probe, detected with counter plate.
Panel detection mode as described above is still with the presence of shortcoming, and due to the area very little of transistor, staff will be with
The relative position of ultramicroscopic observation probe and both transistors, and judge whether the two has appropriate contact, and adjust in good time
Probe relative to transistor position.
Summary, existing panel detection mode need to use the position between manual type adjustment probe and transistor
Put, finished so needing cost longer time to adjust, therefore, if detected to a large amount of panels, and panel kind
When class is very more, man-hour virtually increases with artificial consumption, and for manufacturer, cost also virtually increases, therefore how to improve
Existing panel detection mode is the big problem that those skilled in the art need to solve with reducing cost.
The content of the invention
The invention provides a kind of array probe to guide educational system and its method automatically, its automatic detection detected part
With the position of probe, and the position of detected part and both probes is adjusted, to shorten man-hour, reaching reduces cost and precisely detection
Effect.
Array probe proposed by the present invention guides educational system to include automatically：
One polyaxial displacement module；
One probe module, it is located at the polyaxial displacement module, and the probe module has multiple probes；
One supervises vision module, and it is located at the polyaxial displacement module, and
One control module, it is electrically connected with the polyaxial displacement module, the supervision vision module and the probe module；
Wherein, the polyaxial displacement module controls the probe module to be moved to the top of a determinand, and the determinand has
Multiple detected parts；The supervision vision module captures the probe image information of the plurality of probe, so that the control module calculates
The first level coordinate value of first coordinate system；The supervision vision module captures the image information to be measured of the plurality of detected part, with
The control module is set to calculate the second horizontal coordinate value of the second mark system；The control module is according to the first level coordinate value with being somebody's turn to do
Second horizontal coordinate value seat, to calculate the offset of the first level coordinate value and the second horizontal coordinate value seat, if there is this
Offset produces, then the horizontal level of the probe module is adjusted, so that the horizontal level of the probe module meets the detected part
Horizontal level after, then vertically move the probe module, and by supervision vision module monitored over time；When the plurality of probe has level
During sliding, the probe module stops movement, and judges whether the probe has contacted the plurality of detected part, so as to draw this first
Vertical coordinate value of the coordinate system with respect to second coordinate system.
In an embodiment, in addition to an angle adjustment module, the angle adjustment module is located at the probe module and the multiaxis
To between displacement module, the angle adjustment module is electrically connected with the control module, and the angle adjustment module controls the probe module
An angle movement is carried out, the polyaxial displacement module is located at a gantry.
In an embodiment, the polyaxial displacement module has one first axial unit, one second axial unit and one the 3rd
Axial unit, second axial unit are located at first axial unit, and three axial unit is located at second axial unit, the spy
Pin module is located at the 3rd axial unit, and the polyaxial displacement module is located at a gantry.
In an embodiment, in addition at least one positioning vision module, the positioning vision module are located at the polyaxial displacement mould
Between block and the probe module, the positioning vision module is electrically connected with the control module；The supervision visual unit has a vision
Unit and a displacement unit, the displacement unit are located at the polyaxial displacement module, and the visual unit is located at the displacement unit, and this is more
Axial displacement module is located at a gantry.
The present invention also proposes that a kind of array probe guides educational method automatically, comprises the steps of：
One first coordinate system and one second coordinate system are obtained, a probe module is moved to the top of a determinand, the probe
Module has multiple probes, and the determinand has multiple detected parts；One supervises the probe that vision module captures the plurality of probe
Image information a, so that control module calculates the first level coordinate value of the first coordinate system；The supervision vision module captures should
The image information to be measured of multiple detected parts, so that the control module calculates the second horizontal coordinate value of the second coordinate system；With
And
Judge the position whether probe module needs adjustment relative to the determinand, the control module is according to first seat
Mark the second horizontal coordinate value of first level coordinate value and second coordinate system of system, with calculate the first level coordinate value with
The offset of second horizontal coordinate value, if there is offset generation, the position of the probe module is adjusted, so that the probe mould
The horizontal level of block meets the horizontal level of the detected part；
Vertical coordinate value of first coordinate system with respect to second coordinate system is obtained, vertically moves the probe module, and by
Vision module monitored over time is supervised, when the plurality of probe has horizontal sliding, the probe module stops movement, and judges the probe
Whether the plurality of detected part has been contacted, so as to draw vertical coordinate value of first coordinate system with respect to second coordinate system.
In an embodiment, in addition to the step of one determinand of positioning：One positioning vision module captures the shadow of the determinand
As information and send the control module to, so that the control module carries out a positioning step, after the completion for the treatment of the positioning step, then enter
The step of row coordinate system of acquirement one first and second coordinate system.
In an embodiment, in the step of coordinate system of acquirement one first and second coordinate system, the plurality of probe is the
For one probe to N probes, N is a constant, mobile supervision vision module, to capture the first needle point of the needle point of first probe
Image information；Mobile supervision vision module, to capture the N needle point image informations of the needle point of N probes, according to first pin
Sharp image information and the N needle point image informations, so as to calculate the horizontal coordinate value of a probe coordinate system, the probe coordinate is
The first level coordinate value of first coordinate system；
The plurality of detected part be the first detected part to N detected parts, the supervision vision module avoid this first visit
The needle point of pin, to capture the first of first detected part the image information to be measured, and the supervision vision module avoids N probes
Needle point, it is to be measured according to first image information to be measured and the N to capture the N image informations to be measured of the N detected parts
Image information, so as to calculate the horizontal coordinate value of a detected part coordinate system, the point coordinates to be measured is second coordinate system
Second horizontal coordinate value；
In the step of vertical coordinate value of the acquirement first coordinate system with respect to second coordinate system, the probe module hangs down
When translation is moved, the supervision vision module monitored over time, when the needle point for monitoring the probe has horizontal sliding, the probe is judged
Needle point has touched the detected part, should so as to draw vertical direction coordinate value of the needle point of the probe relative to the detected part
Direction coordinate value is vertical coordinate value of first coordinate system with respect to second coordinate system.
The present invention also proposes that another array probe guides educational system automatically, and it is included：
One angle adjustment module；
One probe module, it is located at the angle adjustment module, and the probe module has multiple probes；
One supervises vision module, and it is adjacent to the probe module；And
One control module, it is electrically connected with the angle adjustment module, the supervision vision module and the probe module；
Wherein, the probe module is located at the top of a determinand, and the determinand has multiple detected parts；The supervision vision
Module captures the probe image information of the plurality of probe, so that the control module calculates the first level coordinate of the first coordinate system
Value；The supervision vision module captures the image information to be measured of the plurality of detected part, so that the control module calculates the second seat
Mark the second horizontal coordinate value of system；The control module is according to the first level coordinate value and second horizontal coordinate value, to calculate
Go out the offset of the first level coordinate value and second horizontal coordinate value, if there is offset generation, adjust the probe mould
The horizontal level of block, so that the horizontal level of the probe module meets the horizontal level of the detected part, the angle adjustment module
The probe module is controlled to carry out an angle movement.
Based on above-mentioned, the present invention carries out the position correction of probe module in an automated manner, thus can save it is a large amount of artificial,
And shorten man-hour, to reduce cost payout and precisely detection.
Brief description of the drawings
Fig. 1 is the schematic diagram that a kind of array probe provided by the invention guides educational system automatically；
Fig. 2 is the partial schematic diagram that a kind of array probe provided by the invention guides educational system automatically；
Fig. 3 is multiple probes and the schematic diagram of multiple detected parts；
Fig. 4 is multiple probes and the another schematic diagram of multiple detected parts；
Fig. 5 is the flow chart that a kind of array probe provided by the invention guides educational method automatically.
Description of reference numerals：10- base stations；11- gantry；12- determinands；120- detected parts；The polyaxial displacement moulds of 13-
Block；The axial units of 130- first；The axial units of 131- second；The axial units of 132- the 3rd；14- probe modules；140- probes；
15- supervises vision module；150- visual units；151- displacement units；16- angle adjustment modules；17- positions vision module；18-
Control module；S1~S4- steps.
Embodiment
Illustrate embodiments of the present invention below by way of particular specific embodiment, those skilled in the art can be by this explanation
Book disclosure, other advantages and effect of the present invention are understood easily.
As shown in figure 1, the invention discloses a kind of array probe to guide educational system automatically, its include a base station 10,
One gantry 11, at least one polyaxial displacement module 13, at least a probe module 14, at least one supervise vision module 15, at least one
Angle adjustment module 16, at least one positioning control module 18 of vision module 17 and one.
The top carrier of base station 10 has a determinand 12.As shown in figure 3, determinand 12 has multiple detected parts 120.Lift
For example, determinand 12 can be one side plate.Detected part 120 can be a transistor.
Gantry 11 is located at the side of base station 10, and gantry 11 can carry out an axial movement relative to base station 10.Or base station
10 can carry out an axial movement relative to gantry 11.
Polyaxial displacement module 13 is located at gantry 11, and each polyaxial displacement module 13 is to be equidistantly located at gantry 11.It is polyaxial
Displacement module 13 has one first axial unit 130, one second axial unit 131 and one the 3rd axial unit 132.First axially
Unit 130 is located at gantry 11, with the axial movement of control one first.Second axial unit 131 is located at the first axial unit 130, the
The axial movement of two axial units 131 control one second.3rd axial unit 132 is located at the second axial unit 131, and the 3rd is axially single
The axial movement of the control of member 132 one the 3rd.
Each angle adjustment module 16 is located at each 3rd axial unit 132.Angle adjustment module 16 is used to control angle to move.
Each vision module 15 that supervises is located at each polyaxial displacement module 13.Each visual unit 15 that supervises has a visual unit
150 and a displacement unit 151.Displacement unit 151 is located at the first axial unit 130.Visual unit 150 is located at displacement unit 151.
Each probe module 14 is located at each angle adjustment module 16.As shown in Fig. 2 each probe module 14 has multiple probes
140。
Position vision module 17 and be located at the polyaxial displacement module 13 positioned at the both ends at gantry 11.If further discussing,
Positioning vision module 17 is located at the first axial module 130.
Control module 18 is electrically connected with polyaxial displacement module 13, probe module 14, supervises vision module 15, angle adjustment
Module 16 and positioning vision module 17.
As shown in figure 4, the invention also discloses a kind of array probe module to guide educational method automatically, it includes following step
Suddenly：
As shown in Figures 1 and 2.Step S1, position a determinand 12.At least one positioning vision module 17 captures determinand 12
Image information, and send control module 18 to so that control module 18 carries out a positioning step, after the completion of step to be positioned,
Again to step S2.For example, in the present embodiment, the positioning vision module 17 positioned at the both ends of gantry 11 captures determinand 12
Image information, and send control module 18 to, so that control module 18 carries out a positioning step, so that determinand 12 enters vision
The field range of unit 150.When actual test, at least one positioning vision module 17 captures the image information of determinand 12, i.e.,
Can be positioned control module 18.
Step S2, obtain one first coordinate system and one second coordinate system.Image information of the control module 18 according to step S1,
To control polyaxial displacement module 13, so that probe module 14 is moved to the top of determinand 12.For example, first axially
The axial movement of the control of unit 130 first, the axial movement of the second axial unit 131 control second, the 3rd axial unit 132 control the
Three axial movements.First, which moves axially to the 3rd axial movement system, makes probe module 14 close to the detected part 120 of determinand 12.
In actual conditions, the first axial movement, the second axial movement and the 3rd axial movement alternative are carried out, rather than first axially moves
Moving to the 3rd axial movement needs to carry out.For example, first axial movement can be that X axis moves.Second axial movement
Can be that Y-axis moves.3rd axial movement can be Z axis to movement or vertically move.
If illustrating further, as shown in figure 3, the probe image information that vision module 15 captures probe 140 is supervised, and will
Probe image information sends control module 18 to, so that control module 18 calculates the first level coordinate value of the first coordinate system；
Supervise vision module 15 and capture the image information to be measured of the plurality of detected part 120, and send image information to be measured to control
Module 18, so that control module 18 calculates the second horizontal coordinate value of the second coordinate system.
For example, visual unit 150 captures probe image information or image information to be measured, and control module 18 is according to probe
Image information or image information to be measured, to decide whether to adjust the position of visual unit 150, if desired adjust visual unit 150
Position, then the command displacement unit 151 of control module 18, so that displacement unit 151 adjusts the position of visual unit 150.
Because probe 140 is multiple, for the ease of discussing, the plurality of probe 140 is named as the first probe 140 to N spies
Pin 140, N are a constant, moving-vision module 150, to capture the first needle point image information of the needle point of first probe 140.
Moving-vision unit 150, to capture the N needle point image informations of the needle point of N probes 140.Believe according to the first needle point image
Breath and the N needle point image informations, and coordinate control module 18 to control the position of polyaxial displacement module 13, so as to calculate one
The horizontal coordinate value of probe coordinate system, the probe coordinate are the first level coordinate value of first coordinate system.
Similarly, the plurality of detected part 120 is the first detected part 120 to N detected parts 120, supervises vision module
15 avoid the needle point of first probe 140.Polyaxial displacement module 13 makes probe module 14 leave regarding for supervision vision module 15
Wild scope, to capture the first of first detected part 120 the image information to be measured, and supervise vision module 15 and avoid N spies
The needle point of pin 140, to capture the N image informations to be measured of the N detected parts 120, according to first image information to be measured with
The N image informations to be measured, and coordinate control module 18 to control the position of polyaxial displacement module 13, so that control module 18
The horizontal coordinate value of a detected part coordinate system is calculated, the detected part coordinate is the second horizontal coordinate of second coordinate system
Value.
Step S3, judge the position whether probe module 14 needs adjustment relative to the determinand 12.Control module 18
According to the second horizontal coordinate value of the first level coordinate value and second coordinate system of first coordinate system, to calculate the first water
The offset of flat coordinate value and the second horizontal coordinate value, if the amount of offsetting produces, the position of probe module 14 is adjusted, so as to visit
The horizontal level of pin module 14 meets the horizontal level of detected part 120.
For example, if the amount of offsetting produces, the offset is angular deviation, then angle adjustment module 16 controls angle to move
It is dynamic, even if probe module 14 rotates an angle.If offset is horizontal-shift, i.e., the skew of the first axial direction or the second axial direction, then
The polyaxial axial movement of the control of displacement module 13 first or the second axial movement, so that probe module 14 moves, and make
Probe 140 is located at the top of detected part 120.
As shown in figure 4, step S4, obtains vertical coordinate value of first coordinate system with respect to second coordinate system.It is vertical to move
Dynamic probe module 14, and by the monitored over time of supervision vision module 15, when probe 140 has horizontal sliding, probe module 14 stops
It is mobile, and judge the contact measured position 120 of probe 14, so as to draw vertical coordinate of first coordinate system with respect to the second coordinate system
Value.
For example, polyaxial displacement module 13 vertically moves probe module 14, supervises vision module 15 and supervises probe
140, when control module 18 realizes that the probe image information middle probe 140 that supervision vision module 15 is captured has generation horizontal sliding
When, control module 18 makes polyaxial displacement module 13 stop movement, and then probe module 14 is stopped movement, should now can determine whether
The contact measured position 120 of probe 14.The distance vertically moved that control module 18 is carried out by probe module 14, to calculate
Vertical coordinate value of first coordinate system with respect to the second coordinate system.
As described above, the present invention using supervise vision module 15 capture probe image information, detected part image information with
Probe 140 has the image information for producing horizontal sliding, so that control module 18 calculates first level coordinate value, the second horizontal seat
Scale value, offset and vertical coordinate value, and then adjust the probe 140 of probe module 14 and the relative position of both detected parts 120
Put, and can ensure that the contact measured position 120 of probe 140, so that probe 140 can carry out a detecting step to detected part 120.
Because the present invention carries out the position correction of probe module 14 in an automated manner, therefore can save largely manually, and contract
During casual labourer, to reduce cost payout and precisely detection.
In summary, although the present invention is disclosed above with embodiment, so it is not limited to the present invention, any affiliated
Have usually intellectual in technical field, without departing from the spirit and scope of the present invention, when a little change and retouching can be made,
Therefore protection scope of the present invention ought be defined depending on this case right and is defined.
Claims (10)
1. a kind of array probe guides educational system automatically, it is characterised in that includes：
One polyaxial displacement module；
One probe module, it is located at the polyaxial displacement module, and the probe module has multiple probes；
One supervises vision module, and it is located at the polyaxial displacement module, and
One control module, it is electrically connected with the polyaxial displacement module, the supervision vision module and the probe module；
Wherein, the polyaxial displacement module controls the probe module to be moved to the top of a determinand, and the determinand has multiple
Detected part；The supervision vision module captures the probe image information of the plurality of probe, so that the control module calculates first
The first level coordinate value of coordinate system；The supervision vision module captures the image information to be measured of the plurality of detected part, so that should
Control module calculates the second horizontal coordinate value of the second mark system；The control module according to the first level coordinate value and this second
Horizontal coordinate value seat, to calculate the offset of the first level coordinate value and the second horizontal coordinate value seat, if there is the skew
Amount produces, then the horizontal level of the probe module is adjusted, so that the horizontal level of the probe module meets the water of the detected part
Prosposition postpones, then vertically moves the probe module, and by supervision vision module monitored over time；When the plurality of probe has horizontal sliding
When, the probe module stops movement, and judges whether the probe has contacted the plurality of detected part, so as to draw first coordinate
The vertical coordinate value of relative second coordinate system of system.
2. array probe according to claim 1 guides educational system automatically, it is characterised in that also including an angle adjustment
Module, the angle adjustment module are located between the probe module and the polyaxial displacement module, and the angle adjustment module electrically connects
The control module is connect, the angle adjustment module controls the probe module to carry out an angle movement, and the polyaxial displacement module is located at
One gantry.
3. array probe according to claim 1 guides educational system automatically, it is characterised in that the polyaxial displacement module
The first axle is located at one first axial unit, one second axial unit and one the 3rd axial unit, second axial unit
To unit, three axial unit is located at second axial unit, and the probe module is located at the 3rd axial unit, the polyaxial position
Shifting formwork block is located at a gantry.
4. array probe according to claim 1 guides educational system automatically, it is characterised in that also including at least one positioning
Vision module, the positioning vision module are located between the polyaxial displacement module and the probe module, positioning vision module electricity
Property connects the control module；The supervision visual unit has a visual unit and a displacement unit, and it is more that the displacement unit is located at this
Axial displacement module, the visual unit are located at the displacement unit, and the polyaxial displacement module is located at a gantry.
5. a kind of array probe module guides educational method automatically, it is characterised in that comprises the steps of：
One first coordinate system and one second coordinate system are obtained, a probe module is moved to the top of a determinand, the probe module
With multiple probes, the determinand has multiple detected parts；One supervises the probe image that vision module captures the plurality of probe
Information a, so that control module calculates the first level coordinate value of the first coordinate system；The supervision vision module captures the plurality of
The image information to be measured of detected part, so that the control module calculates the second horizontal coordinate value of the second coordinate system；And
Judge the position whether probe module needs adjustment relative to the determinand, the control module is according to first coordinate system
First level coordinate value and second coordinate system the second horizontal coordinate value, with calculate the first level coordinate value with this
The offset of two horizontal coordinate values, if there is offset generation, the horizontal level of the probe module is adjusted, so that the probe mould
The horizontal level of block meets the horizontal level of the detected part；And
Vertical coordinate value of first coordinate system with respect to second coordinate system is obtained, vertically moves the probe module, and by supervising
Vision module monitored over time, when the plurality of probe has horizontal sliding, the probe module stops movement, and whether judges the probe
The plurality of detected part is contacted, so as to draw vertical coordinate value of first coordinate system with respect to second coordinate system.
6. array probe module according to claim 5 guides educational method automatically, it is characterised in that also including a positioning
The step of one determinand：One positioning vision module captures the image information of the determinand and sends the control module to, so that should
Control module carries out a positioning step, after the completion for the treatment of the positioning step, then carries out the coordinate system of acquirement one first and one second and sits
The step of mark system.
7. array probe module according to claim 5 guides educational method automatically, it is characterised in that in the acquirement 1
In the step of one coordinate system and second coordinate system, the plurality of probe be the first probe to N probes, N be a constant, it is mobile this
Vision module is supervised to capture the first needle point image information of the needle point of first probe；The supervision vision module is moved to capture
The N needle point image informations of the needle point of N probes, according to the first needle point image information and the N needle point image informations, so that
The horizontal coordinate value of a probe coordinate system is calculated, the probe coordinate is the first level coordinate value of first coordinate system；
The plurality of detected part is that the first detected part to N detected parts, supervision vision module avoids first probe
Needle point, to capture the first of first detected part the image information to be measured, and the supervision vision module avoids the pin of N probes
Point, to capture the N image informations to be measured of the N detected parts, according to first image information to be measured and the N images to be measured
Information, so as to calculate the horizontal coordinate value of a detected part coordinate system, the point coordinates to be measured is the second of second coordinate system
Horizontal coordinate value；
In the step of vertical coordinate value of the acquirement first coordinate system with respect to second coordinate system, the probe module vertically moves
When dynamic, the supervision vision module monitored over time, when the needle point for monitoring the probe has horizontal sliding, the needle point of the probe is judged
The detected part is touched, so as to draw vertical direction coordinate value of the needle point of the probe relative to the detected part, the direction
Coordinate value is vertical coordinate value of first coordinate system with respect to second coordinate system.
8. a kind of array probe guides educational system automatically, it is characterised in that includes：
One angle adjustment module；
One probe module, it is located at the angle adjustment module, and the probe module has multiple probes；
One supervises vision module, and it is adjacent to the probe module；And
One control module, it is electrically connected with the angle adjustment module, the supervision vision module and the probe module；
Wherein, the probe module is located at the top of a determinand, and the determinand has multiple detected parts；The supervision vision module
The probe image information of the plurality of probe is captured, so that the control module calculates the first level coordinate value of the first coordinate system；
The supervision vision module captures the image information to be measured of the plurality of detected part, so that the control module calculates the second coordinate system
The second horizontal coordinate value；The control module is according to the first level coordinate value and second horizontal coordinate value, to calculate this
First level coordinate value and the offset of second horizontal coordinate value, if there is offset generation, adjust the probe module
Horizontal level, so that the horizontal level of the probe module meets the horizontal level of the detected part, angle adjustment module control
The probe module carries out an angle movement.
9. array probe according to claim 8 guides educational system automatically, it is characterised in that also including a polyaxial position
Shifting formwork block, the polyaxial displacement module are electrically connected with the control module, the polyaxial displacement module have one first axial unit,
One second axial unit and one the 3rd axial unit, second axial unit are located at first axial unit, three axial unit
Located at second axial unit, the probe module is located at the 3rd axial unit, and the polyaxial displacement module is located at a gantry.
10. array probe according to claim 8 guides educational system automatically, it is characterised in that also includes at least certain
Position vision module, the positioning vision module are located at the polyaxial displacement module, and the positioning vision module is electrically connected with the control mould
Block；The supervision visual unit has a visual unit and a displacement unit, and the displacement unit is located at the polyaxial displacement module, should
Visual unit is located at the displacement unit, and the polyaxial displacement module is located at a gantry.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110736860A (en) * | 2018-07-18 | 2020-01-31 | 均豪精密工业股份有限公司 | Method for correcting position of mechanism after probe card replacement and measuring device thereof |
| CN113740700A (en) * | 2020-05-27 | 2021-12-03 | 泰科电子(上海)有限公司 | Circuit board test system |
| CN117388906A (en) * | 2023-10-12 | 2024-01-12 | 北京富通康影科技有限公司 | Crystal detection device and platform of high-pixel-density radiation detector based on elastic needle array |
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| CN117388906A (en) * | 2023-10-12 | 2024-01-12 | 北京富通康影科技有限公司 | Crystal detection device and platform of high-pixel-density radiation detector based on elastic needle array |
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