CN107779828A - The manufacture method of molybdenum target blank structure and the manufacture method of molybdenum target material component - Google Patents
The manufacture method of molybdenum target blank structure and the manufacture method of molybdenum target material component Download PDFInfo
- Publication number
- CN107779828A CN107779828A CN201610721194.3A CN201610721194A CN107779828A CN 107779828 A CN107779828 A CN 107779828A CN 201610721194 A CN201610721194 A CN 201610721194A CN 107779828 A CN107779828 A CN 107779828A
- Authority
- CN
- China
- Prior art keywords
- molybdenum target
- manufacture method
- solder side
- blank structure
- backboard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Abstract
The present invention, which provides a kind of manufacture method of molybdenum target blank structure and the manufacture method of molybdenum target material component, the manufacture method of the molybdenum target blank structure, to be included：Molybdenum target base is provided, the molybdenum target base has solder side；Using chemical plating process, nickel coating is formed on the molybdenum target base solder side.The present invention uses chemical plating process, nickel coating is formed on the solder side of molybdenum target base, due to having good wellability between nickel coating material and conventional solder, therefore formed nickel coating is utilized to be effectively improved the welding performance of molybdenum target base and other materials, such as, the adhesion between molybdenum target base and backboard can be improved so that molybdenum target base realizes reliable connection with backboard, meets the needs that molybdenum target material component uses steadily in the long term.
Description
Technical field
The present invention relates to field of semiconductor manufacture, more particularly to the manufacture method of molybdenum target blank structure and molybdenum target material component
Manufacture method.
Background technology
Magnetron sputtering is that one kind utilizes charged particle bombardment target, target atom is being served as a contrast from surface effusion and uniform deposition
Substrate coating technique on bottom.Magnetron sputtering is so that its sputtering raste is high, substrate temperature rise is low, film-base junction is made a concerted effort, excellent metal-plated
The advantages such as the uniformity and controllability of film be strong become most excellent substrate coating technique, thus are widely used in integrated circuit
Manufacturing process.
In the manufacturing process of semiconductor devices, the target material assembly is by meeting the target of sputtering performance and the target
The backboard that material is combined is formed.Backboard can be assembled in sputtering machine table in the target material assembly and play a supporting role, and have
The effect of conducting heat.Target material assembly need to make it both can be with reliability by the way that target and backboard are welded together to form
Ground is arranged on sputtering machine table, while can effectively control sputtering under magnetic field, electric field action again.
Mo is widely used in integrated circuit plated film industry, wide market.Wherein, molybdenum target base is in target blankss
One kind, it can be used for making target material assembly.
But the adhesion between prior art molybdenum target base and backboard has much room for improvement, the stability of molybdenum target material component is poor.
The content of the invention
The present invention solves the problems, such as a kind of manufacturer for the manufacture method and molybdenum target material component for being to provide molybdenum target blank structure
Method, the welding performance between molybdenum target base and other materials is improved, for example, improving the adhesion between molybdenum target base and backboard.
To solve the above problems, the present invention provides a kind of manufacture method of molybdenum target blank structure, including：Molybdenum target base, institute are provided
Stating molybdenum target base has solder side；Using chemical plating process, nickel coating is formed on the molybdenum target base solder side.
Optionally, in the plating process, the temperature of chemical plating fluid is 86 DEG C to 90 DEG C.
Optionally, in the plating process, the temperature fluctuation range of chemical plating fluid is in ± 2 DEG C.
Optionally, in the plating process, the pH value of chemical plating fluid is 4.4 to 4.8.
Optionally, in the plating process, by adding ammoniacal liquor into chemical plating fluid, the chemical plating is adjusted
The pH value of liquid.
Optionally, in the plating process, also the chemical plating fluid is stirred, and mixing time
For 2min to 3min.
Optionally, in the plating process, the useful load of chemical plating fluid is 0.5dm2/ L to 1.5dm2/L。
Optionally, the material of the nickel coating is nickel, wherein, the mass percent of nickel is 86% to 94%.
Optionally, the process time of the chemical plating process is 20min to 30min.
Optionally, the thickness of the nickel coating is 8 μm to 10 μm.
Optionally, before the nickel coating is formed, the manufacture method also includes：Surface spray is carried out to the solder side
Sand processing, increase the roughness of the solder side.
Optionally, after the surface sand-blasting process, the solder side forms the rough layer that mean depth is 6 μm to 10 μm.
Optionally, the technological parameter of the surface sand-blasting process includes：The sand grains used is No. 46 white fused aluminas, the gas of use
Pressure scope is 0.3Mpa to 0.35Mpa.
Optionally, the step of surface sand-blasting process includes：Sand is sprayed to the solder side using the nozzle of sand-blasting gun
Grain；In the step of surface sand-blasting process, the distance between the nozzle and the solder side are 10cm to 15cm；The table
In the step of face blasting treatment, the angle that the nozzle is sprayed between the direction of sand grains and the solder side normal is more than 0 degree
And less than 90 degree.
Optionally, the angle that the nozzle is sprayed between the direction of sand grains and the solder side normal is 30 degree to 60 degree.
Optionally, in the molybdenum target base crest line position, the distance between the nozzle and the solder side are 15cm.
Optionally, after carrying out the surface sand-blasting process, the manufacture method also includes：Using giant to described
Solder side is cleaned；The solder side is cleaned using pure water or deionized water.
Optionally, in the step of being cleaned using giant to the solder side, the solder side is cleaned
Scavenging period be 1min to 2min.
Optionally, after carrying out the surface sand-blasting process, the manufacture method also includes, and the molybdenum target base is placed in into work
Change in liquid, activation process is carried out to the solder side of the molybdenum target base.
Optionally, the activating solution is salpeter solution, and the volume percent content of nitric acid is 15% in the salpeter solution
To 25%, soak time is 50s to 60s.
Optionally, there is provided after the molybdenum target base, before carrying out the surface sand-blasting process to the solder side, the manufacture
Method also includes, and polishing processing is carried out to the solder side of the molybdenum target base.
Accordingly, the present invention also provides a kind of manufacture method of molybdenum target material component, including：Molybdenum target blank structure is provided, it is described
Molybdenum target blank structure is fabricated using previous building methods；Backboard is provided, the backboard has surface to be welded；By the molybdenum target base knot
Nickel coating in structure is oppositely arranged and is bonded with the surface to be welded of the backboard, by welding procedure, using the nickel coating by institute
State molybdenum target blank structure to be soldered on the backboard, form molybdenum target material component.
Optionally, the backboard is copper backboard, aluminium backboard or albronze backboard.
Optionally, the nickel coating in the molybdenum target blank structure is being oppositely arranged with the surface to be welded of the backboard and is being bonded it
Before, the manufacture method also includes：The coated with solder layer on the surface to be welded of the backboard.
Optionally, the material of the solder layer is the one or more in In, Ni, Sn, Al or SnAgCu.
Compared with prior art, technical scheme has advantages below：
The present invention uses chemical plating process, and nickel coating is formed on the solder side of molybdenum target base, due to nickel coating material and often
With having good wellability between solder, therefore formed nickel coating is utilized to be effectively improved molybdenum target base and other materials
Welding performance, for example, the adhesion between molybdenum target base and backboard can be improved so that molybdenum target base and backboard realize reliable knot
Close, meet the needs that molybdenum target material component uses steadily in the long term.
In alternative, before chemical plating process is carried out, surface sand-blasting process also is carried out to the solder side of molybdenum target base, carried
The roughness of high solder side so that the nickel coating that chemical plating process is formed is discontinuous coating, so as to reduce nickel coating surface
Power, the adhesion between nickel coating and molybdenum target base is improved, therefore the nickel coating formed is not easy to come off from molybdenum target base.
In alternative, before chemical plating process is carried out, activation process also is carried out to the solder side of the molybdenum target base, increased
Add the activation energy of the molybdenum target base solder side so that the reactivity enhancing of molybdenum target base solder side, increase on the solder side
The speed of chemical plating nickel coating, improve the adhesion between nickel coating and molybdenum target base solder side.
In the manufacture method of molybdenum target material component provided by the invention, there is provided molybdenum target base, and there is nickel on molybdenum target base solder side
Coating；Backboard is provided, the solder side of the surface to be welded of the backboard and molybdenum target base is oppositely arranged and welded, to form molybdenum
Target material assembly.In welding process, there is good wellability between nickel coating and the backboard, so that molybdenum target base and the back of the body
The reliability combined between plate is high, meets the needs that molybdenum target material component uses steadily in the long term.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the embodiment of manufacture method one of molybdenum target blank structure of the present invention；
Fig. 2 to Fig. 6 is the structural representation of each step in embodiment illustrated in fig. 1；
Fig. 7 to Fig. 9 be molybdenum target material component of the present invention the embodiment of manufacture method one in each step counter structure schematic diagram.
Embodiment
From background technology, the adhesion between molybdenum target base and backboard has much room for improvement, and the stability of molybdenum target material component is poor.
With reference to molybdenum target material component manufacture method the step of analyze its reason and be：
In the manufacturing process of molybdenum target material component, the mode of generally use solder welding, molybdenum target base is set to be combined with backboard.
But due to Mo and conventional solder (such as：In, SnAgCu or Sn etc.) between wellability it is poor, by molybdenum target
When base welds to form molybdenum target material component with backboard, the adhesion between molybdenum target base and backboard is poor, so as to cause formed molybdenum
The less stable of target material assembly.Therefore, when welding to form molybdenum target material component molybdenum target base and backboard, it is difficult to only with solder
Realize the good combination of the molybdenum target base and backboard.
In order to solve the above problems, the present invention provides a kind of manufacture method of molybdenum target blank structure, including：Molybdenum target base is provided,
The molybdenum target base has solder side；Using chemical plating process, nickel coating is formed on the molybdenum target base solder side.
The present invention uses chemical plating process, and nickel coating is formed on the solder side of molybdenum target base, due to nickel coating material and often
With having good wellability between solder, therefore formed nickel coating is utilized to be effectively improved molybdenum target base and other materials
Welding performance, for example, the adhesion between molybdenum target base and backboard can be improved so that molybdenum target base and backboard realize reliable knot
Close, meet the needs that molybdenum target material component uses steadily in the long term.
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
With reference to figure 1, Fig. 1 shows the schematic flow sheet of the embodiment of manufacture method one of molybdenum target blank structure of the present invention.This reality
Applying a manufacture method for molybdenum target blank structure includes following basic step：
Step S1：Molybdenum target base is provided, the molybdenum target base has solder side；
Step S2：Surface sand-blasting process is carried out to the solder side, increases the roughness of the solder side；
Step S3：The molybdenum target base is placed in activating solution, activation process is carried out to the solder side of the molybdenum target base；
Step S4：Using chemical plating process, nickel coating is formed on the molybdenum target base solder side.
The manufacture method of the molybdenum target blank structure provided below with reference to accompanying drawing the present embodiment is described in detail.Fig. 2 is extremely
The structural representation of each step in the manufacture method for the molybdenum target blank structure that Fig. 6 provides for the present embodiment.
With reference to figure 2, step S1 is performed, there is provided molybdenum target base 101, the molybdenum target base 101 have solder side 110.
Along parallel on the direction of the solder side 110, the shape of cross section of the molybdenum target base 101 can be according to application environment
And sputtering requires rounded, rectangle, annular, cone or other any regular shapes or irregular shape.In the present embodiment,
The shape of cross section of the molybdenum target base 101 is rectangle, and accordingly, the solder side 110 is shaped as rectangle.
In the present embodiment, there is provided after the molybdenum target base 101, the manufacture method can also include：To the molybdenum target base 101
Solder side 110 carry out polishing processing；After polishing processing, the molybdenum target base 101 is cleaned and dried.Wherein, the mill
Light processing can use the machining process such as polishing, lathe or turning.
Wherein, handled by the polishing, to reach the surfacing effect of the solder side 110 of molybdenum target base 101.
With reference to reference to figure 3, it is necessary to explanation be to provide the molybdenum target base 101 after, the manufacture method also includes：Perform
Step S2, surface sand-blasting process is carried out to the solder side 110, increases the roughness of the solder side 110.
In the present embodiment, the surface sand-blasting process can increase the surface roughness of the solder side 110 so that follow-up
The nickel coating formed on the solder side 110 is discontinuous coating, so as to reduce the surface tension of the nickel coating, and may be used also
To improve the adhesion between the nickel coating and the molybdenum target base 101 so that nickel coating is not easy to take off from the molybdenum target base 101
Fall.
By the surface sand-blasting process, make to form pit on the solder side 110, so as on the solder side 110
Rough layer is formed, the pit is shown in the form of stain in figure.
The depth of the rough layer should not be excessively shallow, also unsuitable too deep.If the depth of the rough layer is excessively shallow, the weldering
The roughness of junction 110 is still relatively low, so as to cause subsequently to be formed on the solder side 110 surface tension of nickel coating compared with
Greatly, and then cause the adhesion between the nickel coating and the molybdenum target base 101 poor；If the depth mistake of the rough layer
It is deep, then subsequently form that the continuity of nickel coating is excessively poor on the solder side 110, easily cause the nickel coating thickness of some regions
Spend thin or even be difficult to form nickel coating.Therefore, in the present embodiment, after the surface sand-blasting process, the solder side 110 is formed
Mean depth is 6 μm to 10 μm of rough layer.Wherein, the depth of the rough layer refers to pit on the solder side 110
Depth, accordingly, the mean depth of the pit is 6 μm to 10 μm.
Specifically, carrying out surface sand-blasting process to the solder side 110 using sand-blasting machine, the nozzle of the sand-blasting machine passes through
Air pressure sprays sand grains to solder side 110, by controlling sand grains size and the air pressure size solder side 110
Surface quality reaches sets requirement.
In the present embodiment, because the hardness of molybdenum target base 101 is larger, therefore the sand grains used is No. 46 white fused alumina.And sandblasting
Air pressure is unsuitable excessive used by machine, also unsuitable too small.The quality of molybdenum target base 101 is more crisp, if the air pressure used is excessive,
The power of sandblasting is excessive, easily causes and occurs collapsing angle phenomenon at the crest line of molybdenum target base 101, influences product appearance and integrality；
If the air pressure used is too small, sandblasting is short of power so that the rough layer formed on the solder side 110 of molybdenum target base 101
Mean depth is too small, influences subsequently to form the adhesion of nickel coating and the solder side 110 of molybdenum target base 101.Therefore, this implementation
In example, the technological parameter of the surface sand-blasting process includes：The sand grains used for No. 46 white fused aluminas, the air pressure range used for
0.3Mpa to 0.35Mpa.
Wherein, No. 46 in No. 46 white fused aluminas are the labels according to GB2477083, specifically, referring to 97% mass ratio
The granularity of white fused alumina above is 250 μm to 600 μm.
In the present embodiment, sand grains is sprayed to the solder side 110 using the nozzle of sand-blasting gun, to carry out the surface sand-blasting
Processing.In the step of surface sand-blasting process, the distance between the nozzle and the solder side 110 are 10cm to 15cm；
The angle that the nozzle is sprayed between the direction of sand grains and the solder side 110 is non-perpendicular angled relationships, that is to say, that described
The angle that nozzle sprays between the direction of sand grains and the normal of the solder side 110 is more than 0 degree and less than 90 degree.
Specifically, the angle that the nozzle is sprayed between the direction of sand grains and the normal of the solder side 110 is 30 degree to 60
Degree, so that the uniformity that nozzle sprays sand grains is higher, and the coverage of sprayed sand grains is more guaranteed.
It should be noted that when the solder side 110 to the crest line position of molybdenum target base 101 carries out surface sand-blasting process, institute
It is 15cm to state the distance between nozzle and the solder side 110, and nozzle sprays the direction of sand grains and the method for solder side 110
Angle between line is 30 degree to 60 degree, so as to effectively prevent from occurring collapsing angle phenomenon at the crest line of molybdenum target base 101.
In the present embodiment, after completing the surface sand-blasting process, the manufacture method also includes：To the molybdenum target base
101 solder side 110 carries out cleaning treatment.The cleaning treatment includes：The solder side 110 is carried out clearly using giant
Wash；Then the solder side 110 is cleaned using pure water or deionized water.
Wherein, the cleaning treatment can remove the powdered adhesion layer adhered in the pit of solder side 110, such as sand
The surface attachments such as grain, the follow-up quality for forming nickel coating is improved, can also improve and subsequently form molybdenum target blank structure and the back of the body
The welding effect of plate.
In the present embodiment, the solder side 110 is cleaned using giant, made using the water impact of high pressure
With so that powdered adhesion layer departs from from the solder side 110, so as to reach the effect for effectively removing adhesion layer.
It should be noted that the pressure that the giant uses when being cleaned to the solder side 110 is unsuitable too small,
Also it is unsuitable excessive.If the pressure is too small, powdered adhesion layer is difficult to effectively be washed off, and causes subsequently in solder side
Adhesion between the nickel coating and the solder side 110 that are formed on 110 is poor；If the pressure is excessive, the high pressure
Cleaning of the hydraulic giant on solder side 110 can influence established rough layer, and then it is uniform to influence the follow-up thickness for forming nickel coating
Property.Therefore, in the present embodiment, the pressure that the giant uses when being cleaned to solder side 110 is 3Mpa to 5Mpa.
Wherein, in order to avoid being cleaned using giant to the solder side 110 the step of, is to the pattern of solder side 110
Impact, in the present embodiment, the cleaning treatment uses giant without whole, can also be：Using giant
After being cleaned to the solder side 110, the solder side 110 is cleaned using pure water or deionized water, so as to
Reduce the duration that giant is cleaned to solder side 110.
In the present embodiment, in order to while the powdered adhesion layer is effectively removed, avoid that the pattern of solder side 110 is made
Into influence, and in order to improve cleaning efficiency, in the step of being cleaned using giant to the solder side 110, control is clear
The time is washed in the range of 1min to 2min.
With reference to reference to figure 4, it is necessary to explanation, to the solder side 110 carry out surface sand-blasting process after, the manufacturer
Method also includes：Step S3 is performed, the molybdenum target base 101 is placed in activating solution, the solder side 110 of the molybdenum target base 101 is entered
Row activation process 103.
By the activation process 103, the activation energy of the solder side 110 of molybdenum target base 101 can be increased, make the welding
The reactivity enhancing in face 110, increases the speed of the chemical nickel plating coating subsequently on the solder side 110, avoids formed nickel
The problem of coating is combined loosely with the solder side 110, improve the adhesion between nickel coating and the solder side 110.
It should be noted that the selection of the activating solution is relevant with the material of the target blankss, as long as can increase the molybdenum
The activation energy of the solder side 110 of target blankss 101 so that the reactivity enhancing of the solder side 110.
In the present embodiment, the activating solution is salpeter solution, and the temperature of the activating solution is 20 DEG C to 30 DEG C；And will
The molybdenum target base 101 and activating solution are placed in constant temperature in thermostat water bath 102, thereby may be ensured that the temperature of the activating solution is steady
It is qualitative.
It should be noted that the volume percent content of nitric acid is unsuitable too small in the salpeter solution, it is also unsuitable excessive.Such as
Fruit volume degree is too small, easily causes the activation unobvious of the activating solution, so as to cause to increase the welding
The DeGrain of the activation energy of face 110；If volume percent content is excessive, easily cause priming reaction excessively violent, so as to
Cause the nickel coating thickness that is subsequently formed blocked up and more coarse, i.e., easily cause formed nickel coating Quality Down.For
This, in the present embodiment, the volume percent content of nitric acid is 15% to 25% in the salpeter solution.
It should be noted that the soak time is unsuitable too short, it is also unsuitable long.If the soak time is too short, hold
Being easily caused increases the DeGrain of the activation energy of solder side 110；If the soak time is long, when easily causing technique
Between waste, cause manufacture efficiency to decline.Therefore, in the present embodiment, soak time is 50s to 60s.
It should also be noted that, after the activation process 103 is carried out, using pure water or deionized water to described
Molybdenum target base 101 is cleaned, to remove the residual activating solution on the surface of molybdenum target base 101.
With reference to reference to figure 5 and Fig. 6, step S4 is performed, using chemical plating (Chemical Plating) technique, in the molybdenum
Nickel coating 105 (as shown in Figure 6) is formed on the solder side 110 of target blankss 101.
Specifically, the molybdenum target base 101 and chemical plating fluid are placed in reaction vessel 104, to carry out chemical plating process
Form the nickel coating 105；Wherein, nickel ion is included in the chemical plating fluid.
It should be noted that chemical plating process is using strong reductant in the chemical plating fluid containing metal ion, by gold
Category ion reduction is deposited on the method that various material surfaces form close coatings into metal.In the present embodiment, the reducing agent
In contain sodium hypophosphite, therefore in the plating process, can also form phosphorous reaction product, phosphonium ion analysis
Go out and be deposited on the solder side 110；That is, contain phosphonium ion in the nickel coating 105 formed.
The temperature of the chemical plating fluid can influence to form the plating speed of nickel coating 105, the stability of chemical plating fluid and nickel plating
The formation quality of layer 105.The plating speed is speeded as chemical plating fluid temperature raises, but if the temperature of chemical plating fluid is too high,
Easily cause chemical plating fluid unstable, selfdecomposition easily occurs for the chemical plating fluid.
In the present embodiment, chemical plating process is carried out using acid chemical plating liquid.As temperature increases, acid
Property chemical plating fluid plating speed improve it is more obvious.In the present embodiment, in the plating process,
The temperature of the chemical plating fluid is 86 DEG C to 90 DEG C.
It should be noted that the temperature of chemical plating fluid can also influence the quality of formed nickel coating 105；The temperature of chemical plating fluid
Degree rise, plate speed and accordingly accelerate, and phosphorus content declines in nickel coating 105, stress and the porosity increase of nickel coating 105, and institute
Stating the corrosion resisting property of nickel coating 105 reduces；If in addition, the temperature fluctuation of the chemical plating fluid is excessive, sheet plating can be formed
Layer, so as to easily cause the second-rate of formed nickel coating 105, and influence the internal bond strength of the nickel coating 105.
Therefore, it is necessary to control the temperature fluctuation of the chemical plating fluid in the plating process.The present embodiment
In, in the plating process, the temperature fluctuation range of chemical plating fluid is in ± 2 DEG C.
In the present embodiment, the chemical plating process is carried out using acid chemical plating liquid.The pH value of the chemical plating fluid is to institute
Having a great influence for chemical plating fluid, chemical plating process and the mass of nickel coating 105 is stated, therefore the pH value of the chemical plating fluid is described
The important parameter that must be strictly controlled in chemical plating process parameter.The pH value of the chemical plating fluid is to plating speed and nickel coating 105
In phosphorus content there is significant impact.Rising with the pH value of chemical plating fluid, the plating speed of nickel is accelerated, while in nickel coating 105
Phosphorus content declines；In addition, the pH value change of chemical plating fluid can also influence the stress distribution in the nickel coating 105, pH value is high
The phosphorus content of nickel coating 105 that chemical plating fluid is correspondingly formed is low, shows as tension；Conversely, the corresponding shape of chemical plating fluid that pH value is low
Into the phosphorus content of nickel coating 105 it is high, show as compression.Therefore, in the present embodiment, in order to form the nickel coating of better quality
105, in the plating process, the pH value of chemical plating fluid is 4.4 to 4.8.
In the present embodiment, the material of the nickel coating 105 is nickel, and also contains phosphorus in the nickel coating 105, wherein, nickel
Mass percent be 86% to 94%, therefore can ensure that the phosphorus content in the nickel coating 105 is smaller, and then cause described
The speed of reduced nickel is moderate in chemical plating process, and the stress that the nickel coating 105 is shown is moderate.
It should be noted that in plating process, with deposition of the nickel-phosphor on the solder side 110, chemistry
H+ in plating solution is continuously generated so that the pH value of chemical plating fluid constantly declines, therefore in the plating process, need to adjust in time
The pH value of the whole chemical plating fluid, maintain the stability of the chemical plating fluid pH value.Specifically, in the plating process
In, by adding alkali lye into the chemical plating fluid, to adjust the pH value of the chemical plating fluid.Wherein, adjusted using different alkali lye
During the pH value of whole chemical plating fluid, the influence to chemical plating fluid is also different.
In the present embodiment, by adding ammoniacal liquor into chemical plating fluid, reach the purpose for adjusting the chemical plating fluid pH value.Adopt
When adjusting chemical plating fluid pH value with ammoniacal liquor, in addition to neutralizing the chemical plating fluid H+, amino molecule and change in the chemical plating fluid
Learn the Ni in plating solution2+ and complexing agent can also generate Compound complex, so as to reduce in chemical plating fluid dissociate Ni2+ concentration,
Effectively suppress the precipitation of phosphorous acid nickel, improve the stability of the chemical plating fluid.
In the present embodiment, the ammoniacal liquor added is weak ammonia, and the volumetric concentration of the weak ammonia is 50%.
Meanwhile in the plating process, appropriate stir process is carried out to chemical plating fluid, to improve chemical plating
The quality of the stability of liquid and formed nickel coating 105.On the one hand, stir process can prevent chemical plating fluid hot-spot, prevent
Part excessive concentration when only supplementing chemical plating fluid, and chemical plating fluid local ph acute variation is prevented, so as to be advantageous to improve institute
State the stability of chemical plating fluid；On the other hand, stir process may also speed up the speed that reaction product leaves the solder side 110
Degree, be advantageous to improve plating speed, ensure the formation quality of nickel coating 105, prevent the surface of nickel coating 105 from the defects of stomata occur.
But excessive agitation easily causes the 110 local plating leakage of solder side, and make the wall of reaction vessel 104 and bottom
Upper deposition nickel, even chemical plating fluid is caused to decompose when serious.In addition, agitating mode and stirring intensity can also influence nickel coating 105
In phosphorus content.
In the present embodiment, in the step of being stirred to the chemical plating fluid, stirred uniformly and slowly using plastic tube
Mix, mixing time is 2min to 3min.
In the present embodiment, in chemical plating process, the useful load of chemical plating fluid has an impact to chemical plating fluid stability, its
In, useful load refers to the ratio between the chemical plating area of solder side 110 and used chemical plating fluid volume.
Allow the size of useful load relevant with chemical plating condition and chemical plating fluid composition.Every kind of chemical plating fluid was being developed
All regulation has optimal useful load in journey, should launch molybdenum target base 101 and in time supplement chemistry by regulation in plating process
Plating solution, to obtain optimal chemical plating effect.
It should be noted that the useful load is unsuitable too small, it is also unsuitable excessive.If the useful load is too small, chemical plating
Small impurity particle just easily becomes catalytic activation center and triggers deposition in liquid, easily causes chemical plating fluid to decompose；If
The useful load is excessive, i.e., catalytic surface is excessive, and electroless plating reaction is violent, phosphorous acid nickel precipitation is easily generated, so as to influence chemistry
The stability and the performance of nickel coating 105 of plating solution.Therefore, in the present embodiment, in the plating process, chemical plating fluid
Useful load is 0.5dm2/ L to 1.5dm2/L。
It should also be noted that, the duration of the chemical plating affects the nickel coating 105 on the surface of molybdenum target base 101
Thickness, the duration of chemical plating is longer, and the nickel coating 105 being correspondingly formed is thicker.In the present embodiment, the chemical plating process
Process time is 20min to 30min, is 8 μm to 10 μm so as to form thickness on the solder side 110 of the molybdenum target base 101
Nickel coating 105.
In the present embodiment, by controlling each technological parameter in chemical plating process, the nickel of outward appearance and excellent performance is obtained
Coating 105, be advantageous to improve follow-up welding effect.
Due to before forming nickel coating 105 on the solder side 110 of the molybdenum target base 101, being carried out to the solder side 110
Surface sand-blasting process so that the solder side 110 has certain roughness, therefore the present embodiment is existed using chemical plating process
The nickel coating 105 formed on the solder side 110 is discontinuous coating so that the surface tension of the nickel coating 105 is small, therefore
The nickel coating 105 is not easy to come off from the molybdenum target base 101, so as to improve the knot between nickel coating 105 and molybdenum target base 101
With joint efforts.Wherein, discontinuous coating is it is to be understood that the nickel coating 105 on the solder side 110 in pit plates with the nickel outside pit
Layer 105 mutually staggers；Or the top of nickel coating 105 on the solder side 110 in pit is less than the nickel coating 105 outside pit
Top.
In the present embodiment, using chemical plating process, nickel coating 105 is formed on the solder side 110 of molybdenum target base 101, it is described
Wellability between nickel coating 105 and conventional back veneer material or conventional solder is good, therefore can using the nickel coating 105
To be effectively improved the welding performance of molybdenum target base 101 and other materials, for example, molybdenum target base 101 can be improved subsequently between backboard
Adhesion so that molybdenum target base 101 and backboard realize reliable connection, meet the needs that molybdenum target material component uses steadily in the long term.
Accordingly, the present invention also provides a kind of manufacture method of molybdenum target material component, including：Molybdenum target blank structure is provided, it is described
Molybdenum target blank structure is fabricated using previous building methods；Backboard is provided, the backboard has surface to be welded；By the molybdenum target base knot
Nickel coating in structure is oppositely arranged and is bonded with the surface to be welded of the backboard, by welding procedure, using the nickel coating by institute
State molybdenum target blank structure to be soldered on the backboard, form molybdenum target material component.
The manufacture method of molybdenum target material component provided by the invention is described in detail below with reference to accompanying drawing.Fig. 7 to Fig. 9
The structural representation of each step in the manufacture method of the molybdenum target material component provided for the present embodiment.
With reference to reference to figure 6, there is provided molybdenum target blank structure (is not indicated), and the molybdenum target blank structure is manufactured using previous building methods
Form.
In the present embodiment, the description about the molybdenum target blank structure refers to the corresponding description of previous embodiment, herein not
Repeat again.
With reference to figure 7, there is provided backboard 201, the backboard 201 have surface to be welded 210.
The backboard 201 is played a supporting role in follow-up formed in molybdenum target material component, has good conduction heat
Effect, and the solder layer with subsequently being formed has good effect of impregnation.In the present embodiment, the backboard 201 is copper backboard.
In other embodiments, the backboard can also be aluminium backboard or albronze backboard.
In the present embodiment, along parallel on the direction of the surface to be welded 210 of backboard 201, the size of the backboard 201 is more than
The size of the molybdenum target base 101 (as shown in Figure 6).In other embodiments, the size of the backboard can also be equal to the molybdenum
The size of target blankss.
Along parallel on the direction of the surface to be welded 210 of backboard 201, the shape of cross section of the backboard 201 can be according to institute
The shape of cross section for stating molybdenum target base 101 is configured, for example, the shape of cross section of the backboard 201 can with rounded, rectangle,
Cone or other any regular shapes or irregular shape.In the present embodiment, the shape of cross section of the molybdenum target base 101 is
Rectangle, accordingly, the shape of cross section of the backboard 201 is also rectangle.
With reference to reference to figure 8, it is necessary to explanation be to provide the backboard 201 after, the manufacture method also includes：Described
Coated with solder layer 202 on the surface to be welded 210 of backboard 201.
The material of the solder layer 202 can be the one or more in In, Ni, Sn, Al or SnAgCu.The present embodiment
In, the material of the solder layer 202 is In, and In fusing point and hardness is relatively low, can avoid in follow-up welding process, the molybdenum
Target blankss 101 (as shown in Figure 6) and backboard 201 deform；In addition, the infiltration fusion faculty of In and copper is strong so that the solder
Layer 202 has good wellability with backboard 201, and the solder layer 202 is also (as shown in Figure 6) with good with nickel coating 105
Good wellability, so as to improve the adhesion of follow-up the molybdenum target base 101 and backboard 201, and then can further it improve
The follow-up yield and performance for forming molybdenum target material component.
It should be noted that in the present embodiment, the solder layer 202 is only coated on part surface to be welded 210, is avoided described
Solder layer 202 overflows into the sputter face of the molybdenum target base 101, prevents the solder layer 202 from being made to the sputter face of the molybdenum target base 101
Into pollution, wherein, the sputter face of the molybdenum target base 101 is the face relative with the solder side 110.
It should also be noted that, in the present embodiment, the coated with solder layer 202 only on the surface to be welded 210 of the backboard 201.
In other embodiments, can also on the nickel coating coated with solder layer.
With reference to figure 9, the surface to be welded 210 of the nickel coating 105 in the molybdenum target blank structure and the backboard 201 is oppositely arranged
And be bonded, by welding procedure, the molybdenum target blank structure is soldered on the backboard 201 using the nickel coating 105, formed
Molybdenum target material component (does not indicate).
In the present embodiment, solder layer 202 is coated with the surface to be welded 210 of the backboard 201, accordingly, by the molybdenum target
In the step of nickel coating 105 in blank structure and the surface to be welded 210 of the backboard 201 are oppositely arranged and be bonded, by the molybdenum target
Nickel coating 105 in blank structure is oppositely arranged and is bonded with the solder layer 202.
Specifically, the molybdenum target base 101 and backboard 201 are heated so that the nickel coating 105 and solder layer
202 melt and mutually infiltrate, to form the molybdenum target material component.
It should be noted that in other embodiments, the nickel coating directly can also be in contact with the surface to be welded of backboard,
In welding procedure, the nickel coating mutually infiltrates with the backboard, so as to realize the reliable of the molybdenum target base and backboard
Welding.
In the present embodiment, the molybdenum target base 101 is soldered in the technique of backboard 201, using being formed at the molybdenum target base
Nickel coating 105 on 101 solders side 110 (with reference to figure 6) realizes welding, has between the nickel coating 105 and backboard 201 fine
Mutual wetting property, and also there is good mutual wetting property between the nickel coating 105 and solder layer 202, so as to
Effectively to improve the welding performance between the molybdenum target base 101 and backboard 201 so that the molybdenum target base 101 and the backboard
201 realize reliable connection, meet the needs of molybdenum target material component uses steadily in the long term.
Although of the invention, oneself discloses as above, and the present invention is not limited to this.Any those skilled in the art, do not departing from
In the spirit and scope of the present invention, it can make various changes or modifications, therefore protection scope of the present invention should be with claim
Limited range is defined.
Claims (25)
- A kind of 1. manufacture method of molybdenum target blank structure, it is characterised in that including：Molybdenum target base is provided, the molybdenum target base has solder side；Using chemical plating process, nickel coating is formed on the molybdenum target base solder side.
- 2. the manufacture method of molybdenum target blank structure as claimed in claim 1, it is characterised in that in the plating process In, the temperature of chemical plating fluid is 86 DEG C to 90 DEG C.
- 3. the manufacture method of molybdenum target blank structure as claimed in claim 2, it is characterised in that in the plating process In, the temperature fluctuation range of chemical plating fluid is in ± 2 DEG C.
- 4. the manufacture method of molybdenum target blank structure as claimed in claim 1, it is characterised in that in the plating process In, the pH value of chemical plating fluid is 4.4 to 4.8.
- 5. the manufacture method of molybdenum target blank structure as claimed in claim 4, it is characterised in that in the plating process In, by adding ammoniacal liquor into chemical plating fluid, adjust the pH value of the chemical plating fluid.
- 6. the manufacture method of molybdenum target blank structure as claimed in claim 1, it is characterised in that in the plating process In, also the chemical plating fluid is stirred, and mixing time is 2min to 3min.
- 7. the manufacture method of molybdenum target blank structure as claimed in claim 1, it is characterised in that in the plating process In, the useful load of chemical plating fluid is 0.5dm2/ L to 1.5dm2/L。
- 8. the manufacture method of molybdenum target blank structure as claimed in claim 1, it is characterised in that the material of the nickel coating is nickel, Wherein, the mass percent of nickel is 86% to 94%.
- 9. the manufacture method of molybdenum target blank structure as claimed in claim 1, it is characterised in that during the technique of the chemical plating process Between be 20min to 30min.
- 10. the manufacture method of molybdenum target blank structure as claimed in claim 1, it is characterised in that the thickness of the nickel coating is 8 μm To 10 μm.
- 11. the manufacture method of molybdenum target blank structure as claimed in claim 1, it is characterised in that before the nickel coating is formed, The manufacture method also includes：Surface sand-blasting process is carried out to the solder side, increases the roughness of the solder side.
- 12. the manufacture method of molybdenum target blank structure as claimed in claim 11, it is characterised in that after the surface sand-blasting process, The solder side forms the rough layer that mean depth is 6 μm to 10 μm.
- 13. the manufacture method of molybdenum target blank structure as claimed in claim 11, it is characterised in that the work of the surface sand-blasting process Skill parameter includes：The sand grains used is No. 46 white fused alumina, and the air pressure range used is 0.3Mpa to 0.35Mpa.
- 14. the manufacture method of molybdenum target blank structure as claimed in claim 11, it is characterised in that the step of the surface sand-blasting process Suddenly include：Sand grains is sprayed to the solder side using the nozzle of sand-blasting gun；In the step of surface sand-blasting process, the distance between the nozzle and the solder side are 10cm to 15cm；In the step of surface sand-blasting process, the nozzle sprays the angle between the direction of sand grains and the solder side normal For more than 0 degree and less than 90 degree.
- 15. the manufacture method of molybdenum target blank structure as claimed in claim 14, it is characterised in that the nozzle sprays the side of sand grains It it is 30 degree to 60 degree to the angle between the solder side normal.
- 16. the manufacture method of molybdenum target blank structure as claimed in claim 14, it is characterised in that in the molybdenum target base crest line position Put, the distance between the nozzle and the solder side are 15cm.
- 17. the manufacture method of molybdenum target blank structure as claimed in claim 11, it is characterised in that carry out the surface sand-blasting process Afterwards, the manufacture method also includes：The solder side is cleaned using giant；The solder side is cleaned using pure water or deionized water.
- 18. the manufacture method of molybdenum target blank structure as claimed in claim 17, it is characterised in that using giant to the weldering In the step of junction is cleaned, the scavenging period cleaned to the solder side is 1min to 2min.
- 19. the manufacture method of molybdenum target blank structure as claimed in claim 11, it is characterised in that carry out the surface sand-blasting process Afterwards, the manufacture method also includes, and the molybdenum target base is placed in activating solution, and the solder side of the molybdenum target base is activated Processing.
- 20. the manufacture method of molybdenum target blank structure as claimed in claim 19, it is characterised in that the activating solution is that nitric acid is molten Liquid, the volume percent content of nitric acid is 15% to 25% in the salpeter solution, and soak time is 50s to 60s.
- 21. the manufacture method of molybdenum target blank structure as claimed in claim 11, it is characterised in that right after the molybdenum target base is provided Before the solder side carries out the surface sand-blasting process, the manufacture method also includes, and the solder side of the molybdenum target base is entered Row polishing is handled.
- A kind of 22. manufacture method of molybdenum target material component, it is characterised in that including：Molybdenum target blank structure is provided, the molybdenum target blank structure is using the manufacture method manufacture as described in any one of claim 1~21 Form；Backboard is provided, the backboard has surface to be welded；Nickel coating in the molybdenum target blank structure is oppositely arranged and is bonded with the surface to be welded of the backboard, by welding procedure, The molybdenum target blank structure is soldered on the backboard using the nickel coating, forms molybdenum target material component.
- 23. the manufacture method of molybdenum target material component as claimed in claim 22, it is characterised in that the backboard is copper backboard, aluminium Backboard or albronze backboard.
- 24. the manufacture method of molybdenum target material component as claimed in claim 22, it is characterised in that by the molybdenum target blank structure Nickel coating and the surface to be welded of the backboard be oppositely arranged and be bonded before, the manufacture method also includes：In the backboard Coated with solder layer on surface to be welded.
- 25. the manufacture method of molybdenum target material component as claimed in claim 24, it is characterised in that the material of the solder layer is One or more in In, Ni, Sn, Al or SnAgCu.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610721194.3A CN107779828A (en) | 2016-08-24 | 2016-08-24 | The manufacture method of molybdenum target blank structure and the manufacture method of molybdenum target material component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610721194.3A CN107779828A (en) | 2016-08-24 | 2016-08-24 | The manufacture method of molybdenum target blank structure and the manufacture method of molybdenum target material component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107779828A true CN107779828A (en) | 2018-03-09 |
Family
ID=61388982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610721194.3A Pending CN107779828A (en) | 2016-08-24 | 2016-08-24 | The manufacture method of molybdenum target blank structure and the manufacture method of molybdenum target material component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107779828A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101956168A (en) * | 2010-10-29 | 2011-01-26 | 宁波江丰电子材料有限公司 | Method for manufacturing tungsten titanium alloy target structure |
| CN102586743A (en) * | 2011-11-30 | 2012-07-18 | 余姚康富特电子材料有限公司 | Manufacture method of target structure |
| CN102586742A (en) * | 2011-11-30 | 2012-07-18 | 余姚康富特电子材料有限公司 | Manufacture method of target material structure |
| CN102605331A (en) * | 2011-12-16 | 2012-07-25 | 余姚康富特电子材料有限公司 | Method for manufacturing target component |
| CN103343321A (en) * | 2012-03-12 | 2013-10-09 | 有研亿金新材料股份有限公司 | Method of manufacturing sputtering target |
-
2016
- 2016-08-24 CN CN201610721194.3A patent/CN107779828A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101956168A (en) * | 2010-10-29 | 2011-01-26 | 宁波江丰电子材料有限公司 | Method for manufacturing tungsten titanium alloy target structure |
| CN102586743A (en) * | 2011-11-30 | 2012-07-18 | 余姚康富特电子材料有限公司 | Manufacture method of target structure |
| CN102586742A (en) * | 2011-11-30 | 2012-07-18 | 余姚康富特电子材料有限公司 | Manufacture method of target material structure |
| CN102605331A (en) * | 2011-12-16 | 2012-07-25 | 余姚康富特电子材料有限公司 | Method for manufacturing target component |
| CN103343321A (en) * | 2012-03-12 | 2013-10-09 | 有研亿金新材料股份有限公司 | Method of manufacturing sputtering target |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101956168B (en) | Method for manufacturing tungsten titanium alloy target structure | |
| CN101956167B (en) | Method for preparing target structure | |
| CN103273156B (en) | A kind of method improving Welding intensity | |
| CN102586742B (en) | Manufacture method of target material structure | |
| CN108149203A (en) | The manufacturing method of target material assembly | |
| CN107283058B (en) | A kind of welding method promoting aluminium, steel weldment welding effect | |
| CN102605331A (en) | Method for manufacturing target component | |
| CN103451606B (en) | The making method of cobalt target material assembly | |
| CN105296943A (en) | Manufacturing method of target assembly | |
| CN107779827A (en) | The manufacture method of tungsten target blank structure and the manufacture method of tungsten target material component | |
| TWI480421B (en) | Method for electroless plating of tin and tin alloys | |
| CN106180696B (en) | A kind of preparation method of the high-temp solder based on Ni@Sn nucleocapsid structures | |
| CN109385608A (en) | Target material assembly and its manufacturing method | |
| CN111168179A (en) | Brazing method for tungsten titanium target and copper back plate | |
| CN102534517A (en) | Making method for target assembly | |
| JP6752179B2 (en) | Coating material and cold spray method | |
| TWI641441B (en) | Solder connection structure and film forming method | |
| US4613069A (en) | Method for soldering aluminum and magnesium | |
| US3953624A (en) | Method of electrolessly depositing nickel-phosphorus alloys | |
| CN107779828A (en) | The manufacture method of molybdenum target blank structure and the manufacture method of molybdenum target material component | |
| CN105803405A (en) | Method for manufacturing target material structure | |
| JPH11106904A (en) | Production of sputtering target | |
| CN105331938A (en) | Manufacturing method for target material assembly | |
| CN107447194A (en) | Tantalum target component and its manufacture method | |
| CN106521431A (en) | Preparation method of nickel-plated Mo/Ti target |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180309 |
|
| RJ01 | Rejection of invention patent application after publication |