CN107779826B - 电弧离子镀膜设备 - Google Patents
电弧离子镀膜设备 Download PDFInfo
- Publication number
- CN107779826B CN107779826B CN201710999598.3A CN201710999598A CN107779826B CN 107779826 B CN107779826 B CN 107779826B CN 201710999598 A CN201710999598 A CN 201710999598A CN 107779826 B CN107779826 B CN 107779826B
- Authority
- CN
- China
- Prior art keywords
- section
- vacuum
- ion plating
- arc ion
- changeover portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000007733 ion plating Methods 0.000 title claims abstract description 65
- 230000005540 biological transmission Effects 0.000 claims abstract description 68
- 238000012545 processing Methods 0.000 claims abstract description 56
- 230000007704 transition Effects 0.000 claims abstract description 48
- 238000010849 ion bombardment Methods 0.000 claims abstract description 18
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 239000011248 coating agent Substances 0.000 claims abstract description 13
- 238000007789 sealing Methods 0.000 claims description 28
- 239000011553 magnetic fluid Substances 0.000 claims description 22
- 238000009413 insulation Methods 0.000 claims description 13
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000001427 coherent effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 22
- 238000000034 method Methods 0.000 description 9
- 238000005086 pumping Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000006641 stabilisation Effects 0.000 description 3
- 238000011105 stabilization Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710999598.3A CN107779826B (zh) | 2017-10-20 | 2017-10-20 | 电弧离子镀膜设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710999598.3A CN107779826B (zh) | 2017-10-20 | 2017-10-20 | 电弧离子镀膜设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107779826A CN107779826A (zh) | 2018-03-09 |
CN107779826B true CN107779826B (zh) | 2019-06-21 |
Family
ID=61434836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710999598.3A Active CN107779826B (zh) | 2017-10-20 | 2017-10-20 | 电弧离子镀膜设备 |
Country Status (1)
Country | Link |
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CN (1) | CN107779826B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112430801A (zh) * | 2020-10-27 | 2021-03-02 | 中国石油天然气集团有限公司 | 一种用于钢管内壁的磁控溅射装置和溅射方法 |
CN112962078B (zh) * | 2021-02-01 | 2023-07-18 | 肇庆宏旺金属实业有限公司 | 一种镀膜生产线及镀膜工艺 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05239645A (ja) * | 1992-02-28 | 1993-09-17 | Nkk Corp | 金属帯板に対する連続イオンプレーティング方法及び装置 |
US7780821B2 (en) * | 2004-08-02 | 2010-08-24 | Seagate Technology Llc | Multi-chamber processing with simultaneous workpiece transport and gas delivery |
CN101165205A (zh) * | 2006-10-18 | 2008-04-23 | 甘国工 | 在晶体硅太阳能电池片上镀抗反射钝化膜的方法及设备 |
CN101294270B (zh) * | 2008-06-06 | 2011-02-16 | 东北大学 | 真空电弧离子镀制备镍铬复合镀层的设备及方法 |
CN102337510A (zh) * | 2010-07-23 | 2012-02-01 | 鸿富锦精密工业(深圳)有限公司 | 连续真空镀膜方法 |
CN205907350U (zh) * | 2016-07-22 | 2017-01-25 | 河源圣飞斯科技有限公司 | 一种旋转磁控多弧靶 |
-
2017
- 2017-10-20 CN CN201710999598.3A patent/CN107779826B/zh active Active
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Publication number | Publication date |
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CN107779826A (zh) | 2018-03-09 |
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Legal Events
Date | Code | Title | Description |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 528400 Room 403, four floor, government side economic and trade building, 25 of ban Fu town, 25 of ban Fu Road, Zhongshan, Guangdong. Applicant after: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Address before: 518000 first floor, south of B5 building, industrial park, Longtian community, Keng Zi, Shenzhen, Guangdong. Applicant before: SHENZHEN SMEE OPTOELECTRONIC TECHNOLOGY CO.,LTD. |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Arc ion plating device Effective date of registration: 20191023 Granted publication date: 20190621 Pledgee: Science and Technology Branch of Torch Development Zone of Zhongshan Rural Commercial Bank Co.,Ltd. Pledgor: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Registration number: Y2019980000293 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220124 Granted publication date: 20190621 Pledgee: Science and Technology Branch of Torch Development Zone of Zhongshan Rural Commercial Bank Co.,Ltd. Pledgor: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Registration number: Y2019980000293 |
|
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: Building 4, Haiyin Technology Industrial Park, No.1 Industrial Avenue, Banfu Community, Banfu Town, Zhongshan City, Guangdong Province, 528400 Patentee after: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Address before: 528400 Room 403, four floor, government side economic and trade building, 25 of ban Fu town, 25 of ban Fu Road, Zhongshan, Guangdong. Patentee before: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. |