CN107778480A - A kind of flexible electronic skin sensor and preparation method thereof - Google Patents
A kind of flexible electronic skin sensor and preparation method thereof Download PDFInfo
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Abstract
A kind of flexible electronic skin sensor and preparation method thereof, wherein, flexible electronic skin sensor includes some pressure sensitive units；Pressure sensitive unit is flexible by two panels and telescopic ultra-thin PDMS films, two plate electrodes that are attached at respectively between the ultra-thin PDMS films of two panels, and the composite pressure sensing membrane composition being arranged between two plate electrodes；Composite pressure sensing membrane is made up of some polyaniline hollow nanospheres and the multi-walled carbon nanotube for connecting adjacent polyaniline hollow nanospheres；Each pressure sensitive unit utilizes plasma processor, and electrode pixel processing is used to form the sensor array in setting area, the present invention uses the composite pressure sensing membrane of hollow structure, with prominent elasticity capacity and ultralow modulus of elasticity, so that pressure sensitive unit can carry out effectively amplifying and changing to various environmental stimulis, pressure sensitive is high, and temperature resolution is high；In addition, single pressure sensitive unit can easily integrated sensors array, there are good sensing capabilities.
Description
Technical field
The present invention relates to skin tactile sensor technology field, and in particular to a kind of flexible electronic skin sensor and its system
Preparation Method.
Background technology
Tactile is important sensory function when people directly contacts with external environment, and flexible touch sensation sensor is to realize electronics skin
The key technology of skin technology, the purpose is to simulate the perception of the mankind, possess the development prospect of brilliance.
At present, with the development of microelectric technique and the appearance of various organic materials, it has been proposed that diversified soft
The research and development proposal of property touch sensor, but laboratory stage is belonged to greatly at present, reach the few of commercialization.And part has reached
Although material can bear high stress used by the flexible touch sensation sensor of commercialization, sensitivity is low, and detectability is limited,
It can not be advantageously applied in real life, such as using flexible touch sensation sensor monitoring human body signal, check respiratory disorder.
Therefore, using the electronic material of novel Microstructure with realize high performance touch sensor be at present it is very intentional
Justice, and problem urgently to be resolved hurrily.
The content of the invention
The present invention is in order to solve above mentioned problem existing for prior art, there is provided a kind of flexible electronic skin sensor and its
Preparation method, detectability be limited the problem of low to solve existing flexible touch sensation sensor sensitivity.
To achieve the above object, the invention provides a kind of flexible electronic skin sensor, including some pressure sensing lists
Member；The pressure sensitive unit is flexible by two panels and telescopic ultra-thin PDMS films, is attached at the ultra-thin PDMS of the two panels respectively
Two plate electrodes between film, and the composite pressure sensing membrane composition being arranged between two plate electrode；The composite pressure
Sensing membrane is made up of some polyaniline hollow nanospheres and the multi-walled carbon nanotube for connecting adjacent polyaniline hollow nanospheres；
Each pressure sensitive unit utilizes plasma processor, and uses electrode pixel processing to form the sensor array in setting area
Row.
As present invention further optimization technical scheme, the thickness of the ultra-thin PDMS films is 30um.
As present invention further optimization technical scheme, the electrode be gold material gold electrode, the gold electrode
Thickness be 50um.
Present invention also offers a kind of preparation method of flexible electronic skin sensor, comprise the following steps：
Step S1, prepare polyaniline hollow nanospheres；
Step S2, polyaniline hollow nanospheres are distributed to dimethyl methyl by preset quality with multi-walled carbon nanotube than mixing
To obtain the first mixture in amide solution, dry and remove the dimethylformamide in the first mixture in the step S2
The second mixture is obtained, the second mixture described in spin coating is to form composite pressure sensing membrane；
Step S3, composite pressure sensing membrane is located between two plate electrodes to be assembled into pressure sensitive unit；
Step S4, several pressure sensitive units as made from step S3 are utilized into plasma processor, and using electricity
Pole processes pixel with formed be in setting area sensor array.
As present invention further optimization technical scheme, the specific of polyaniline hollow nanospheres is prepared in the step S1
Step includes：
Step S11, prepare sulfonated polystyrene nanosphere powder；
Step S12, aniline monomer is adsorbed onto on sulfonated polystyrene nanosphere powder so that the first mixed solution is made；
Step S13, the first mixed solution handle to obtain the second mixed solution, second mixing through hydrochloric acid and ammonium persulfate
Solution uses ice bath and centrifugal treating to obtain the polystyrene nanospheres powder of bottle green polyaniline-coated.
Step S14, use tetrahydrofuran to dissolve the polystyrene nanospheres powder to remove polystyrene core, and pass through
Centrifugal treating is to obtain polyaniline hollow nanospheres.
As present invention further optimization technical scheme, the preset quality ratio in the step S2 is 5: 1.
As present invention further optimization technical scheme, it has been additionally added in the first mixture in the step S2 poly- inclined
PVF mixed solution, so that the film that must be used to prepare composite pressure sensing membrane has good filming performance.
Flexible electronic skin sensor of the present invention and preparation method thereof can reach following beneficial effect：
The flexible electronic skin sensor of the present invention, by including some pressure sensitive units；The pressure sensitive unit
Flexible by two panels and telescopic ultra-thin PDMS films, two plate electrodes being attached at respectively between the ultra-thin PDMS films of the two panels, with
And it is arranged at the composite pressure sensing membrane composition between two plate electrode；The composite pressure sensing membrane is by some polyanilines
Empty nanosphere and the multi-walled carbon nanotube for connecting adjacent polyaniline hollow nanospheres form；Each pressure sensitive unit utilizes
Gas ions processor, and use electrode pixel processing to form the sensor array in setting area so that during the present invention uses
The composite pressure sensing membrane of hollow structure, there is prominent elasticity capacity and the modulus of elasticity of ultralow (0.213MPa), so that pressure
Sensing unit can be carried out effectively amplifying and changing to various environmental stimulis, and 31.6kPa-1, and temperature point are up to pressure sensitive
Resolution is up to 0.08 DEG C -1；In addition, single pressure sensitive unit can easily integrated sensors array, there is good sensing
Performance, to cause flexible electronic skin sensor to can be used for monitoring human body signal, check respiratory disorder and carry out speech recognition etc.
Beneficial effect.
The preparation method of the flexible electronic skin sensor of the present invention, by including step：Step S1, is prepared in polyaniline
Empty nanosphere；Step S2, polyaniline hollow nanospheres are distributed to dimethyl by preset quality with multi-walled carbon nanotube than mixing
To obtain the first mixture in formamide solution, dry and remove the dimethyl formyl in the first mixture in the step S2
Amine obtains the second mixture, and the second mixture described in spin coating is to form composite pressure sensing membrane；Step S3, composite pressure is sensed
Film is located between two plate electrodes to be assembled into pressure sensitive unit；Step S4, several pressure as made from step S3 are passed
Sense unit utilizes plasma processor, and uses electrode pixel processing to form the sensor array in setting area so that
The present invention uses the composite pressure sensing membrane of hollow structure, has prominent elasticity capacity and the springform of ultralow (0.213MPa)
Amount, so that pressure sensitive unit can carry out effectively amplifying and changing to various environmental stimulis, pressure sensitive is up to
31.6kPa-1, and temperature resolution is up to 0.08 DEG C -1；In addition, single pressure sensitive unit can easily integrated sensor
Array, there are good sensing capabilities, to cause flexible electronic skin sensor to can be used for monitoring human body signal, check breathing disease
The beneficial effect such as disease and progress speech recognition.
Brief description of the drawings
The present invention is further detailed explanation with reference to the accompanying drawings and detailed description.
Fig. 1 is the structural representation for the example that flexible electronic skin sensor of the present invention provides；
Fig. 2 is the method flow diagram for the example that the preparation method of flexible electronic skin sensor of the present invention provides.
In figure：1st, ultra-thin PDMS films, 2, electrode, 3, composite pressure sensing membrane, 31, polyaniline hollow nanospheres, 32, more walls
CNT.
The object of the invention is realized, functional characteristics and advantage will be described further referring to the drawings in conjunction with the embodiments.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is described further.Drawn in preferred embodiment
Such as " on ", " under ", "left", "right", " centre " and " one " term, only understanding for ease of narration, and be not used to limit
The enforceable scope of the present invention, its relativeness are altered or modified, in the case where changing technology contents without essence, when being also considered as this hair
Bright enforceable category.
Fig. 1 is the structural representation for the example that flexible electronic skin sensor of the present invention provides, as shown in figure 1, flexible
Electronic skin sensor includes some pressure sensitive units；The pressure sensitive unit is flexible by two panels and telescopic ultra-thin
PDMS films 1, two plate electrodes 2 being attached at respectively between the ultra-thin PDMS films 1 of the two panels, and be arranged at two plate electrode it
Between composite pressure sensing membrane 3 form；The composite pressure sensing membrane 3 is by some polyaniline hollow nanospheres 31 and for connecting
The multi-walled carbon nanotube 32 of adjacent polyaniline hollow nanospheres 31 forms；Each pressure sensitive unit utilizes plasma processor,
And electrode pixel processing is used to form the sensor array in setting area.
In specific implementation, the thickness of the ultra-thin PDMS films 1 is 30um, and certainly, it can be used according to design real needs
Other specific thickness values.The electrode 2 is the gold electrode of gold material, and the thickness of the gold electrode is 50um, similarly, the gold
The thickness of electrode can also use other specific thickness values according to design real needs.
The method flow diagram for the example that Fig. 2 provides for the preparation method of flexible electronic skin sensor of the present invention, such as Fig. 2
Shown, the preparation method of flexible electronic skin sensor comprises the following steps：
Step S1, prepare polyaniline hollow nanospheres 31；
Step S2, polyaniline hollow nanospheres 31 are distributed to diformazan by preset quality with multi-walled carbon nanotube 32 than mixing
To obtain the first mixture in base formamide solution, dry and remove the dimethyl methyl in the first mixture in the step S2
Acid amides obtains the second mixture, and the second mixture described in spin coating is to form composite pressure sensing membrane 3；
Step S3, composite pressure sensing membrane 3 is located between two plate electrodes 2 to be assembled into pressure sensitive unit；
Step S4, several pressure sensitive units as made from step S3 are utilized into plasma processor, and using electricity
Pole processes pixel with formed be in setting area sensor array.
In specific implementation, the specific steps of polyaniline hollow nanospheres 31 are prepared in the step S1 to be included：
Step S11, prepare sulfonated polystyrene nanosphere powder；
In step S11, first, by polystyrene nanospheres (the accounting 2.5wt% of polystyrene nanospheres in solution)
2 milliliters of suspension, centrifuged 6 minutes under 9000rpm rotating speeds, and supernatant is removed with pipette.
Then, it is added dropwise to 2 milliliters of the concentrated sulfuric acid in the centrifuge tube of above-mentioned polystyrene/nano ball, using ultrasonic disperse
After 1h, it is had good dispersion effect, and the centrifuge tube is stored in silicone oil, heated under 40 DEG C of environment, stirring 6 is small
When.
Secondly, the centrifuge tube after above-mentioned heating and stirring is centrifuged with centrifugal process under 10000rpm rotating speed again
5 minutes, lower clear liquid is removed using suction pipe and obtains the sediment of sulfonated polystyrene nanosphere；
Finally, the sediment after 3 milliliters of alcohol flushings 3 times with obtaining sulfonated polystyrene nanosphere powder.
Step S12, aniline monomer is adsorbed onto on sulfonated polystyrene nanosphere powder so that the first mixed solution is made；
In step S12, first, 50 milligrams of sulfonated polystyrene nanosphere powder are scattered in 3 ml deionized waters.
Then, 0.4 milliliter of aniline monomer is added into above-mentioned deionized water, to be adsorbed in sulfonated polystyrene nanosphere powder
The surface at end, wherein, the content that above-mentioned aniline monomer accounts for ethanol is 0.22 mol/L.
Step S13, the first mixed solution handle to obtain the second mixed solution, second mixing through hydrochloric acid and ammonium persulfate
Solution uses ice bath and centrifugal treating to obtain the polystyrene nanospheres powder of bottle green polyaniline-coated.
In step S13, first, it is added to using 0.4 milliliter of hydrochloric acid solution in above-mentioned first mixed solution, and in frozen water
Middle stirring 6 hours, wherein, the content that the hydrochloric acid solution accounts for ionized water is 2 mol/Ls；
Then, 0.5 milliliter of ammonium persulfate solution is added in above-mentioned first mixed solution, and 24h is reacted using ice bath, its
In, the content that ammonium persulfate solution accounts for ionized water is 0.18mol/L；
Finally, in 3 milliliters of hydrochloric acid solutions, (content that the hydrochloric acid solution accounts for ionized water is above-mentioned first mixed solution
Centrifuged 5 minutes with 9000rpm under 1mol/L), and after washing 3 times, pass through the polyphenyl that polymerisation obtains bottle green polyaniline-coated
Ethene nanosphere powder.
Step S14, use tetrahydrofuran to dissolve the polystyrene nanospheres powder to remove polystyrene core, and pass through
Centrifugal treating is to obtain polyaniline hollow nanospheres 31.
In step S14, first, it is small to dissolve above-mentioned polyaniline hollow nanospheres 3112 using 5 milliliters of tetrahydrofurans (THF)
When, to remove PS cores；
Then, then centrifuged 5 minutes in 6000rpm using 3 milliliters of tetrahydrofurans and can obtain polyaniline hollow nanospheres 31.
In specific implementation, the preset quality ratio in the step S2 is 5: 1.
In specific implementation, Kynoar mixed solution has been additionally added in the first mixture in the step S2, so that
The film that composite pressure sensing membrane 3 must be used to prepare has good filming performance, and the first mixture mixes in addition Kynoar
Solution is closed, the first mixture is stirred at room temperature 12h, and the drying process at 80 DEG C, removes dimethylformamide and obtains the
Two mixtures, the second mixture can be prepared into composite pressure sensing membrane 3 using spin-coating method.
In order to allow those skilled in the art to more fully understand and realize technical scheme, this implementation is explained in detail below
The architectural characteristic of example.
1st, more several sensors
Sensitivity to flexible electronic skin sensor is tested, the results showed that, surface is more coarse, and contact point more has
Effect.Hollow ball can deform this feature and provide substantial amounts of electrical path for sensor, and be connected with link position more
Wall carbon nano tube 32 so that the sensitivity in the case where there is external force stimulation of flexible electronic skin sensor is higher.Prepared flexible electronic
Skin sensor sensitivity in very wide pressure limit is all higher than traditional resistance sensor.
2nd, sensitivity test
Detect small object, such as a piece of paper, the influence of the pressure of a feather and rice to transducer sensitivity, wisp
It is placed on the surface that flexible electronic skin sensor is made by polyaniline hollow nanospheres 31, the results showed that even in one very
The lower sensor of small external force effect also has hypersensitivity and quick response time, shows the flexible electronic skin of the present invention
Skin sensor has extremely low detection range.
3rd, stability test
In the case where pressure is respectively 100,500 and 1000Pa, the continuous cubic response of sensor/recovery test.As a result
Show that the sensitivity of sensor is close, without being decreased obviously, show that the flexible electronic skin sensor has good stability.
4th, the test of temperature detection
When temperature is from when being down to 25 DEG C for 100 DEG C, the electric current of flexible electronic skin sensor is observed, as judging to temperature inspection
The foundation of survey, the results showed that have a good linear normalization curent change temperature relation, the sensitivity of temperature detection 0.08 DEG C-
1, better than traditional temperature sensor.
The polyaniline hollow nanospheres 31 of the present invention have hollow structure, and hollow structure is a kind of typical structure sheaf
Secondary, it is substantially brittle nano structural material, is had a wide range of applications on energy field.
Polyaniline hollow nanospheres 31 are active component, and composite pressure sensing membrane 3 has relatively low springform made of it
Amount, possess high sensitivity, and respond the features such as fast, Monitoring lower-cut is low.In addition, in addition to pressure-responsive, the composite pressure sensing membrane 3
Also there is good response to temperature change.
These excellent sensing capabilities cause flexible electronic skin sensor to can apply to monitor human body signal, check and exhale
Inhale disease and carry out speech recognition etc..
Although the foregoing describing the embodiment of the present invention, those skilled in the art should be appreciated that this
Be merely illustrative of, various changes or modifications can be made to present embodiment, without departing from the present invention principle and essence,
Protection scope of the present invention is only limited by the claims that follow.
Claims (7)
1. a kind of flexible electronic skin sensor, it is characterised in that including some pressure sensitive units；The pressure sensitive unit
Flexible by two panels and telescopic ultra-thin PDMS films, two plate electrodes being attached at respectively between the ultra-thin PDMS films of the two panels, with
And it is arranged at the composite pressure sensing membrane composition between two plate electrode；The composite pressure sensing membrane is by some polyanilines
Empty nanosphere and the multi-walled carbon nanotube for connecting adjacent polyaniline hollow nanospheres form；Each pressure sensitive unit utilizes
Gas ions processor, and use electrode pixel processing to form the sensor array in setting area.
2. flexible electronic skin sensor according to claim 1, it is characterised in that the thickness of the ultra-thin PDMS films is
30um。
3. flexible electronic skin sensor according to claim 1 or 2, it is characterised in that the electrode is gold material
Gold electrode, the thickness of the gold electrode is 50um.
A kind of 4. preparation method of any one of claims 1 to 3 flexible electronic skin sensor, it is characterised in that including
Following steps：
Step S1, prepare polyaniline hollow nanospheres；
Step S2, polyaniline hollow nanospheres are distributed to dimethylformamide by preset quality with multi-walled carbon nanotube than mixing
To obtain the first mixture in solution, the dimethylformamide dried and removed in the first mixture in the step S2 obtains
Second mixture, the second mixture described in spin coating is to form composite pressure sensing membrane；
Step S3, composite pressure sensing membrane is located between two plate electrodes to be assembled into pressure sensitive unit；
Step S4, several pressure sensitive units as made from step S3 are utilized into plasma processor, and use electrode picture
It is in the sensor array for setting area that element, which is handled to be formed,.
5. preparation method according to claim 4, it is characterised in that prepare polyaniline hollow nanospheres in the step S1
Specific steps include：
Step S11, prepare sulfonated polystyrene nanosphere powder；
Step S12, aniline monomer is adsorbed onto on sulfonated polystyrene nanosphere powder so that the first mixed solution is made；
Step S13, the first mixed solution handle to obtain the second mixed solution, second mixed solution through hydrochloric acid and ammonium persulfate
Ice bath and centrifugal treating are used to obtain the polystyrene nanospheres powder of bottle green polyaniline-coated.
Step S14, use tetrahydrofuran to dissolve the polystyrene nanospheres powder to remove polystyrene core, and pass through centrifugation
Handle to obtain polyaniline hollow nanospheres.
6. preparation method according to claim 5, it is characterised in that the preset quality ratio in the step S2 is 5:1.
7. according to the preparation method described in any one of claim 4 to 6, it is characterised in that the first mixing in the step S2
Kynoar mixed solution is additionally added in thing, so that the film that must be used to prepare composite pressure sensing membrane has good film forming
Performance.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN112212898A (en) * | 2020-09-09 | 2021-01-12 | 山东科技大学 | Intelligent skin based on small-size distributed optical fiber sensing array |
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