CN107757495B - Blue mirror for automobile rearview mirror and preparation method thereof - Google Patents
Blue mirror for automobile rearview mirror and preparation method thereof Download PDFInfo
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Abstract
The invention belongs to the technical field of glass, and particularly relates to a blue mirror for an automobile rearview mirror and a preparation method thereof. The blue mirror for the automobile rearview mirror has the advantages that the convex surface of the hot bending glass substrate is inwards, the film surface of the composite film is inwards, the environmental durability is improved, meanwhile, the convex surface is blue-green, the light rays are soft, the interference of strong light on the sight of a driver can be effectively reduced, and an effective anti-dazzling effect is achieved; and the heat bending glass substrate has double curvatures, so that a large visual field effect can be obtained, the function is good, and the appearance is more attractive.
Description
Technical Field
The invention belongs to the technical field of glass, and particularly relates to a blue mirror for an automobile rearview mirror and a preparation method thereof.
Background
With the progress of society, the automobile keeping amount is continuously increased, and the running safety problem is outstanding. During driving, the vision of the driver is life-related. The accident caused by the instantaneous loss of the sight of the driver of the front car due to the high beam of the rear vehicle during night driving is one of the main accident reasons. Therefore, it is necessary to develop an anti-dazzle automobile rearview mirror to effectively reduce driving accidents caused by improper light and improve the safety of driving process.
Disclosure of Invention
The invention aims to provide a blue mirror for an automobile rearview mirror and a preparation method thereof, and aims to solve the technical problem that the automobile rearview mirror in the prior art cannot effectively realize anti-glare.
In order to achieve the above purpose, the invention adopts the following technical scheme: the utility model provides a blue mirror for automobile rearview mirror, includes the curved glass substrate of heat, curved glass substrate of heat is including concave surface and the convex surface that sets up relatively, the last preface stromatolite of concave surface is provided with first high refractive index rete, first low refractive index rete, second high refractive index rete, second low refractive index rete and the metal rete that forms the complex film, the convex surface is blue green.
Preferably, the first high refractive index film layer is a niobium pentoxide film layer or a titanium dioxide film layer, and the thickness of the first high refractive index film layer is 25 nm-45 nm.
Preferably, the first low refractive index film layer is a silicon dioxide film layer, and the thickness of the first low refractive index film layer is 45 nm-65 nm.
Preferably, the second high refractive index film layer is a silicon dioxide film layer, and the thickness of the second high refractive index film layer is 40 nm-60 nm.
Preferably, the second low refractive index film layer is a silicon dioxide film layer, and the thickness of the second low refractive index film layer is 30 nm-50 nm.
Preferably, the metal film layer is a metal chromium film layer or a metal aluminum film layer, and the thickness of the metal film layer is 10 nm-30 nm.
Preferably, the refractive index n (632 nm) of the first high refractive index film layer and the second high refractive index film layer is 2.1 to 2.5; the refractive index n (632 nm) of the first low refractive index film layer and the second low refractive index film layer is 1.3-1.5; the refractive index n (632 nm) of the metal film layer is 4.2-4.5.
Preferably, the ratio of transmission to reflection of the composite film in the visible wavelength range is (45% -55%): (55% -45%), the color coordinates of the reflection of the composite film are l=75-78, a=10 to-15, b=10 to-20.
The invention has the beneficial effects that: the blue mirror for the automobile rearview mirror is formed by plating the composite film formed by the first high-refractive-index film layer, the first low-refractive-index film layer, the second high-refractive-index film layer and the second low-refractive-index film layer with the metal film layer on the concave surface of the hot-bending glass substrate, and has the advantages that the convex surface of the hot-bending glass substrate is inwards, the film surface of the composite film is inwards, the environmental durability is improved, meanwhile, the convex surface is blue-green, the light is soft, the interference of strong light on the sight of a driver can be effectively reduced, and the anti-dazzling effect is effectively achieved; and the heat bending glass substrate has double curvatures, so that a large visual field effect can be obtained, the function is good, and the appearance is more attractive.
The invention adopts another technical scheme that: a preparation method of a blue mirror for an automobile rearview mirror comprises the following steps:
s1: obtaining a required hot-bent glass substrate, wherein the hot-bent glass substrate comprises a concave surface and a convex surface which are oppositely arranged;
s2: plating a first high refractive index film layer on the concave surface of the hot-bent glass substrate;
s3: plating a first low refractive index film layer on the first high refractive index film layer;
s4: plating a second high refractive index film layer on the first low refractive index film layer;
s5: plating a second low refractive index film layer on the second high refractive index film layer;
s6: plating a metal film layer on the second low refractive index film layer.
Preferably, step S1 is specifically: cutting an electronic float glass raw sheet with a required thickness into a required size, and performing hot bending and cleaning to obtain a hot-bending glass substrate required by coating, wherein the hot-bending glass substrate comprises a concave surface and a convex surface which are oppositely arranged;
the step S2 specifically comprises the following steps: placing the hot-bent glass substrate on a transmission trolley, setting the travelling speed of the transmission trolley, enabling the transmission trolley to enter a vacuum coating machine and to enter a niobium pentoxide target or a titanium dioxide target after being heated to 50-150 ℃ by a heating section of a cavity of the vacuum coating machine, setting Ar gas quantity to be 150-200 sccm, and setting O 2 The gas flow is 50 sccm-100 sccm, and the sputtering pressure is 1.5X10 -3 ～4×10 -3 The target material is a twin target, a niobium pentoxide film layer or a titanium dioxide film layer is formed on the hot-bent glass substrate by plating through medium-frequency alternating-current magnetron sputtering, and the thickness of the first high-refractive-index film layer is 25-45 nm;
the step S3 specifically comprises the following steps: after plating the first high refractive index film layer, entering a silicon target position, setting Ar gas quantity to be 150-200 sccm, and O 2 The air quantity control adopts PID control, the control voltage is 350V-500V, and the sputtering air pressure is 1.5X10 -3 ～4×10 -3 The target material is a twin target, a silicon dioxide film layer is plated on the first high refractive index film layer by adopting medium-frequency alternating current magnetron sputtering to serve as the first low refractive index film layer, and the thickness of the first low refractive index film layer is 45-65 nm;
the step S4 specifically comprises the following steps: after plating the first low refractive index film layer, entering a niobium pentoxide target or a titanium dioxide target, setting Ar gas quantity to be 150-200 sccm, and O 2 The gas flow is 50 sccm-100 sccm, and the sputtering pressure is 1.5X10 -3 ～4×10 -3 The target material is a twin target, a niobium pentoxide film layer or a titanium dioxide film layer is plated on the first low refractive index film layer by adopting medium-frequency alternating current magnetron sputtering to serve as a second high refractive index film layer, and the thickness of the second high refractive index film layer is 40-60 nm.
The step S5 specifically comprises the following steps: after plating the second high refractive index film layer, entering a silicon target position, setting Ar gas quantity to be 150-200 sccm, and O 2 The air quantity control adopts PID control, the control voltage is 350V-500V, and the sputtering air pressure is 1.5X10 -3 ～4×10 -3 The target material is a twin target, a silicon dioxide film layer is plated on the second high refractive index film layer by adopting medium-frequency alternating current magnetron sputtering to serve as a second low refractive index film layer, and the thickness of the second low refractive index film layer is 30-50 nm.
The step S6 specifically comprises the following steps: after the second low refractive index film layer is plated, the film enters a chromium target position or an aluminum target position, the Ar gas quantity is set to be 150-200 sccm, and the sputtering air pressure is 1.5 multiplied by 10 -3 ～4×10 -3 The target material is a metal roundAnd the target column is formed by plating a metal chromium film layer or a metal aluminum film layer on the second low-refractive-index film layer by adopting medium-frequency alternating-current magnetron sputtering, wherein the thickness of the metal film layer is 10-30 nm.
The blue mirror for the automobile rearview mirror, which is prepared by the preparation method of the blue mirror for the automobile rearview mirror, has the advantages that the convex surface of the hot bending glass substrate is inwards, the film surface of the composite film is inwards, the environmental durability is improved, meanwhile, the convex surface is blue-green, the light is soft, the interference of strong light on the sight of a driver can be effectively reduced, and an effective anti-dazzling effect is achieved; and the heat bending glass substrate has double curvatures, so that a large visual field effect can be obtained, the function is good, and the appearance is more attractive.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a structural cross-sectional view of a spectroscopic silvery glass according to an embodiment of the present invention.
Wherein, each reference sign in the figure:
10-Hot bent glass substrate 11-concave 12-convex
20-composite film 21-first high refractive index film layer 22-first low refractive index film layer
23-second high refractive index film 24-second low refractive index film 25-metal film.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiment described below by referring to fig. 1 is intended to be illustrative of the present invention and is not to be construed as limiting the invention.
As shown in fig. 1, an embodiment of the present invention provides a blue mirror for an automobile rearview mirror, which includes a hot-bending glass substrate 10, wherein the hot-bending glass substrate 10 includes a concave surface 11 and a convex surface 12 that are oppositely disposed, a first high refractive index film layer 21, a first low refractive index film layer 22, a second high refractive index film layer 23, a second low refractive index film layer 24 and a metal film layer 25 that form a composite film 20 are sequentially laminated on the concave surface 11, and the convex surface 12 is blue-green. Specifically, the blue mirror for the automobile rearview mirror of the embodiment of the invention is formed by plating a composite film 20 formed by a first high refractive index film layer 21, a first low refractive index film layer 22, a second high refractive index film layer 23 and a second low refractive index film layer 24 and a metal film layer 25 on a concave surface 11 of a hot-bending glass substrate, and has the advantages that the convex surface 12 of the hot-bending glass substrate 10 faces inwards, the film surface of the composite film 20 faces inwards, the environmental durability is improved, meanwhile, the convex surface 12 is blue-green, the light is soft, the interference of strong light on the sight of a driver can be effectively reduced, and an anti-dazzling effect is effectively achieved; and the thermally bent glass substrate 10 has double curvatures, so that a large visual field effect can be obtained, and the glass substrate has good functions and more attractive appearance.
The blue mirror glass for the automobile rearview mirror has the advantages of precise structural design, outstanding optical function, good film durability and high added value of products.
In this embodiment, the first high refractive index film layer 21 is preferably a niobium pentoxide film layer or a titanium dioxide film layer, and the thickness of the first high refractive index film layer 21 is preferably 25nm to 45nm. Specifically, the thickness of the first high refractive index film layer 21 may be 25nm, 30nm, 35nm, 40nm, or 45nm.
In this embodiment, the first low refractive index film layer 22 is preferably a silicon dioxide film layer, and the thickness of the first low refractive index film layer 22 is preferably 45nm to 65nm. Specifically, the thickness of the first low refractive index film layer 22 may be 45nm, 50nm, 55nm, 60nm, or 65nm.
In this embodiment, the second high refractive index film layer 23 is preferably a silicon dioxide film layer, and the thickness of the second high refractive index film layer 23 is preferably 40nm to 60nm. Specifically, the thickness of the second high refractive index film layer 23 may be 40nm, 45nm, 50nm, 55nm, or 60nm.
In this embodiment, the second low refractive index film 24 is preferably a silicon dioxide film, and the thickness of the second low refractive index film 24 is preferably 30nm to 50nm. Specifically, the second low refractive index film layer 24 may have a thickness of 30nm, 35nm, 40nm, 45nm, or 50nm.
In this embodiment, preferably, the metal film layer 25 is a metal chromium film layer or a metal aluminum film layer, and the thickness of the metal film layer 25 is 10nm to 30nm. Specifically, the thickness of the third high refractive index film layer may be 10nm, 15nm, 20nm, 25nm, or 30nm.
In this embodiment, preferably, the refractive index n (632 nm) of the first high refractive index film layer 21 and the second high refractive index film layer 23 is 2.1 to 2.5; specifically, the refractive index n (632 nm) of the first, second, and third high refractive index film layers 21, 23, and 2.5 may be 2.1, 2.2, 2.3, 2.4, or 2.3. The refractive index n (632 nm) of the first low refractive index film layer 22 and the second low refractive index film layer 24 is 1.3 to 1.5; specifically, the refractive index n (632 nm) of the first and second low refractive index film layers 22 and 2424 may be 1.3, 1.4 or 1.5. The refractive index n (632 nm) of the metal film layer 25 is 4.2-4.5; specifically, the refractive index n (632 nm) of the metal film layer 25 may be 4.2, 4.3, 4.4, or 4.5..
More specifically, the niobium pentoxide (Nb 2 O 5 ) The refractive index n (632 nm) of the film layer is 2.1-2.4, for example, 2.1, 2.2, 2.3 or 2.4; the refractive index n (632 nm) of the titanium dioxide (TiO 2) film layer is 2.2-2.5, for example, can be 2.2, 2.3, 2.4 or 2.5; the refractive index n (632 nm) of the silicon dioxide (SiO 2) film layer is 1.3-1.5, for example, 1.3, 1.4 or 1.5. The refractive index n (632 nm) of the metallic chromium film layer and the metallic aluminum film layer is 4.2 to 4.5, and may be, for example, 4.2, 4.3, 4.4 or 4.5.
In this embodiment, the ratio of transmission to reflection of the composite film 20 in the visible wavelength range is (45% -55%): (55% -45%), preferably, the ratio of transmission to reflection of the composite film 20 in the visible wavelength range is 50%:50%.
In this embodiment, the color coordinates of the reflection of the composite film 20 are l=75 to 78, a=10 to-15, b=10 to-20.
The embodiment of the invention also provides a preparation method of the blue mirror for the automobile rearview mirror, which comprises the following steps:
s1: obtaining a desired heat-bent glass substrate 10, said heat-bent glass substrate 10 comprising a concave surface 11 and a convex surface 12 arranged opposite to each other;
s2: plating a first high refractive index film layer 21 on the concave surface 11 of the hot bent glass substrate 10;
s3: plating a first low refractive index film layer 22 on the first high refractive index film layer 21;
s4: plating a second high refractive index film layer 23 on the first low refractive index film layer 22;
s5: plating a second low refractive index film 24 on the second high refractive index film 23;
s6: a metal film layer 25 is plated on the second low refractive index film layer 24.
Specifically, the blue mirror for the automobile rearview mirror prepared by the preparation method of the blue mirror for the automobile rearview mirror provided by the embodiment of the invention has the advantages that the convex surface 12 of the hot bending glass substrate 10 is inwards, the film surface of the composite film 20 is inwards, the environmental durability is improved, meanwhile, the convex surface 12 is blue-green, the light is soft, the interference of strong light on the sight of a driver can be effectively reduced, and an effective anti-dazzling effect is achieved; and the thermally bent glass substrate 10 has double curvatures, so that a large visual field effect can be obtained, and the glass substrate has good functions and more attractive appearance.
Further, the step S1 specifically includes: cutting an electronic float glass raw sheet with a required thickness into a required size, and performing hot bending and cleaning to obtain a hot-bending glass substrate 10 required by coating, wherein the hot-bending glass substrate 10 comprises a concave surface 11 and a convex surface 12 which are oppositely arranged;
the step S2 specifically comprises the following steps: placing the hot-bent glass substrate 10 on a transmission trolley, and setting the traveling speed of the transmission trolley so that the transmission trolley enters vacuum platingThe film forming machine is heated to 50-150 ℃ through a heating section of a cavity of the vacuum film forming machine to enter a niobium pentoxide target or a titanium dioxide target, ar gas quantity is set to be 150-200 sccm, O is set to be the same as that of the titanium dioxide target 2 The gas flow is 50 sccm-100 sccm, and the sputtering pressure is 1.5X10 -3 ～4×10 -3 The target material is a twin target, a niobium pentoxide film layer or a titanium dioxide film layer is formed on the hot-bending glass substrate 10 by plating by adopting medium-frequency alternating-current magnetron sputtering and is used as a first high-refractive-index film layer 21, and the thickness of the first high-refractive-index film layer 21 is 25-45 nm;
the step S3 specifically comprises the following steps: after plating the first high refractive index film layer 21, entering a silicon target position, setting Ar gas quantity to be 150-200 sccm, and O 2 The air quantity control adopts PID control, the control voltage is 350V-500V, and the sputtering air pressure is 1.5X10 -3 ～4×10 -3 The target material is a twin target, a silicon dioxide film layer is plated on the first high refractive index film layer 21 by adopting medium-frequency alternating current magnetron sputtering to serve as the first low refractive index film layer 22, and the thickness of the first low refractive index film layer 22 is 45-65 nm;
the step S4 specifically comprises the following steps: after plating the first low refractive index film layer 22, entering a niobium pentoxide target or a titanium dioxide target, setting Ar gas quantity to be 150-200 sccm, and O 2 The gas flow is 50 sccm-100 sccm, and the sputtering pressure is 1.5X10 -3 ～4×10 -3 The target material is a twin target, a niobium pentoxide film layer or a titanium dioxide film layer is plated on the first low refractive index film layer 22 by adopting medium-frequency alternating current magnetron sputtering as a second high refractive index film layer 23, and the thickness of the second high refractive index film layer 23 is 40-60 nm.
The step S5 specifically comprises the following steps: after plating the second high refractive index film layer 23, entering a silicon target position, setting Ar gas quantity to be 150-200 sccm, and O 2 The air quantity control adopts PID control, the control voltage is 350V-500V, and the sputtering air pressure is 1.5X10 -3 ～4×10 -3 The target material is a twin target, a silicon dioxide film layer is plated on the second high refractive index film layer 23 by adopting medium frequency alternating current magnetron sputtering as a second low refractive index film layer 24, and the thickness of the second low refractive index film layer 24 is 30 nm-50nm。
The step S6 specifically comprises the following steps: after the second low refractive index film 24 is plated, the film enters a chromium target or an aluminum target, the Ar gas quantity is set to be 150-200 sccm, and the sputtering air pressure is 1.5X10 -3 ～4×10 -3 The target material is a metal round target column, a medium-frequency alternating-current magnetron sputtering is adopted to plate a metal chromium film layer or a metal aluminum film layer on the second low-refractive-index film layer 24 as a metal film layer 25, and the thickness of the metal film layer 25 is 10 nm-30 nm.
The following is a specific embodiment of a method for manufacturing a blue mirror for an automobile rearview mirror according to an embodiment of the present invention:
a1.85 mm plain float glass is used as a hot-bent glass substrate 10, and a magnetron sputtering coating machine is used. Adopting medium-frequency alternating-current magnetron sputtering to plate a niobium pentoxide film layer, wherein Ar gas quantity is 200sccm, and O 2 The gas flow is 100sccm, and the sputtering gas pressure is ensured to be 2.5X10 -3 The niobium target is a twin target, and a niobium pentoxide film layer is plated on the hot-bent glass substrate 10 by adopting medium-frequency alternating-current magnetron sputtering, and the thickness of the film plated by the process is about 32nm. Then plating a 60nm silicon dioxide film layer on the niobium pentoxide film layer, wherein the preferable Ar gas quantity is 200sccm, O 2 The air quantity control adopts PID control, the control voltage is 380V, and the preferred sputtering air pressure is 2.5X10 -3 The target material is a twin target. Then plating 45nm thick niobium pentoxide film layer on the silicon dioxide film layer by adopting an intermediate frequency alternating current magnetron sputtering method, wherein Ar gas quantity is 200sccm, O 2 The gas flow is 100sccm, and the sputtering gas pressure is ensured to be 2.5X10-3. The intermediate frequency alternating current magnetron sputtering is adopted to plate the silicon dioxide film layer on the niobium pentoxide film layer, preferably the Ar gas quantity is 200sccm, O 2 The air quantity control adopts PID control, the control voltage is 380V, and the preferred sputtering air pressure is 2.5X10 -3 The film thickness was controlled to about 40 nm. Finally, a medium-frequency alternating-current magnetron sputtering method is adopted to plate a 15nm metal chromium film layer on the silicon dioxide film layer, the Ar gas quantity is 200sccm, and the sputtering air pressure is ensured to be 2.5 multiplied by 10 < -3 >.
The blue mirror for the automobile rearview mirror manufactured and formed in the way has the advantages that the convex surface 12 of the hot bending glass substrate 10 faces inwards, the film surface of the composite film 20 faces inwards, the environmental durability is improved, meanwhile, the convex surface 12 is blue-green, the light rays are soft, the interference of strong light on the sight of a driver can be effectively reduced, and an effective anti-dazzling effect is achieved; and the thermally bent glass substrate 10 has double curvatures, so that a large visual field effect can be obtained, and the glass substrate has good functions and more attractive appearance.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (8)
1. The utility model provides a blue mirror for automobile rearview mirror which characterized in that: the glass comprises a hot bending glass substrate, wherein the hot bending glass substrate comprises a concave surface and a convex surface which are oppositely arranged, a first high refractive index film layer, a first low refractive index film layer, a second high refractive index film layer, a second low refractive index film layer and a metal film layer which form a composite film are sequentially laminated on the concave surface, and the convex surface is blue-green; the refractive index n of the first high refractive index film layer and the second high refractive index film layer is 2.1-2.5 under the wavelength of 632 nm; the refractive index n of the first low refractive index film layer and the second low refractive index film layer is 1.3-1.5; the refractive index n of the metal film layer is 4.2-4.5; the ratio of transmission to reflection of the composite film in the visible wavelength range is (45% -55%): (55% -45%), the color coordinates of the reflection of the composite film are L=75-78, a=10-/15, b=10-/20.
2. The blue mirror for an automobile rearview mirror according to claim 1, wherein: the first high-refractive-index film layer is a niobium pentoxide film layer or a titanium dioxide film layer, and the thickness of the first high-refractive-index film layer is 25 nm-45 nm.
3. The blue mirror for an automobile rearview mirror according to claim 1, wherein: the first low-refractive-index film layer is a silicon dioxide film layer, and the thickness of the first low-refractive-index film layer is 45 nm-65 nm.
4. The blue mirror for an automobile rearview mirror according to claim 1, wherein: the second high-refractive-index film layer is a silicon dioxide film layer, and the thickness of the second high-refractive-index film layer is 40 nm-60 nm.
5. The blue mirror for an automobile rearview mirror according to claim 1, wherein: the second low-refractive-index film layer is a silicon dioxide film layer, and the thickness of the second low-refractive-index film layer is 30 nm-50 nm.
6. The blue mirror for an automobile rearview mirror according to claim 1, wherein: the metal film layer is a metal chromium film layer or a metal aluminum film layer, and the thickness of the metal film layer is 10 nm-30 nm.
7. A method for producing a blue mirror for an automobile rearview mirror, which is used for producing the blue mirror for an automobile rearview mirror according to any one of claims 1 to 6, characterized in that: the method comprises the following steps:
s1: obtaining a required hot-bent glass substrate, wherein the hot-bent glass substrate comprises a concave surface and a convex surface which are oppositely arranged;
s2: plating a first high refractive index film layer on the concave surface of the hot-bent glass substrate;
s3: plating a first low refractive index film layer on the first high refractive index film layer;
s4: plating a second high refractive index film layer on the first low refractive index film layer;
s5: plating a second low refractive index film layer on the second high refractive index film layer;
s6: plating a metal film layer on the second low refractive index film layer.
8. The method for producing a blue mirror for an automobile rearview mirror according to claim 7, wherein:
the step S1 specifically comprises the following steps: cutting an electronic float glass raw sheet with a required thickness into a required size, and performing hot bending and cleaning to obtain a hot-bending glass substrate required by coating, wherein the hot-bending glass substrate comprises a concave surface and a convex surface which are oppositely arranged;
step S2 is specifically: placing the hot-bent glass substrate on a transmission trolley, setting the travelling speed of the transmission trolley, enabling the transmission trolley to enter a vacuum coating machine, heating the transmission trolley to 50-150 ℃ through a heating section of a cavity of the vacuum coating machine, entering a niobium pentoxide target or a titanium dioxide target, and setting Ar gas quantity to be 150-200 sccm and O 2 The gas amount is 50sccm to 100sccm, and the sputtering gas pressure is 1.5X10 -3 ~4×10 -3 The target material is a twin target, a niobium pentoxide film layer or a titanium dioxide film layer is formed on the hot-bent glass substrate by plating through medium-frequency alternating-current magnetron sputtering, and the thickness of the first high-refractive-index film layer is 25-45 nm;
the step S3 specifically comprises the following steps: after plating the first high refractive index film layer, entering a silicon target position, setting Ar gas quantity to 150-200 sccm, and O 2 The air quantity control adopts PID control, the control voltage is 350V-500V, and the sputtering air pressure is 1.5X10 -3 ~4×10 -3 The target material is a twin target, a silicon dioxide film layer is plated on the first high refractive index film layer by adopting medium-frequency alternating current magnetron sputtering to serve as the first low refractive index film layer, and the thickness of the first low refractive index film layer is 45-65 nm;
the step S4 specifically comprises the following steps: after plating the first low refractive index film layer, entering a niobium pentoxide target or a titanium dioxide target, setting Ar gas quantity to be 150-200 sccm, and O 2 The gas amount is 50sccm to 100sccm, and the sputtering gas pressure is 1.5X10 -3 ~4×10 -3 The target material is a twin target, a niobium pentoxide film layer or a titanium dioxide film layer is plated on the first low refractive index film layer by adopting medium-frequency alternating current magnetron sputtering to serve as a second high refractive index film layer, and the thickness of the second high refractive index film layer is 40-60 nm;
the step S5 specifically comprises the following steps: after plating the second high refractive index film layer, entering a silicon target position, setting Ar gas quantity to 150-200 sccm, and O 2 The air quantity control adopts PID control, the control voltage is 350V-500V, and the sputtering air pressure is 1.5X10 -3 ~4×10 -3 The target material is a twin target, and a silicon dioxide film layer is plated on the second high refractive index film layer by adopting medium-frequency alternating current magnetron sputtering as a secondThe thickness of the second low-refractive-index film layer is 30 nm-50 nm;
the step S6 specifically comprises the following steps: after the second low refractive index film layer is plated, the film enters a chromium target position or an aluminum target position, ar gas quantity is set to be 150 sccm-200 sccm, and sputtering air pressure is set to be 1.5X10 -3 ~4×10 -3 The target material is a metal round target column, a medium-frequency alternating-current magnetron sputtering is adopted to plate a metal chromium film layer or a metal aluminum film layer on the second low-refractive-index film layer to serve as a metal film layer, and the thickness of the metal film layer is 10-30 nm.
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| CN108706889A (en) * | 2018-05-08 | 2018-10-26 | 北京汉能光伏投资有限公司 | A kind of film-coated plate and preparation method thereof and a kind of solar components |
| CN108642447A (en) * | 2018-05-08 | 2018-10-12 | 北京汉能光伏投资有限公司 | A kind of curved surface film-coated plate and preparation method thereof and include its solar components |
| WO2022205114A1 (en) * | 2021-03-31 | 2022-10-06 | 京东方科技集团股份有限公司 | Display module and display device |
| CN114879284A (en) * | 2022-05-05 | 2022-08-09 | 广东轻工职业技术学院 | Anti-dazzle light reflecting mirror plated by sputtering method |
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| CN107757495A (en) | 2018-03-06 |
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