CN107738036A - 一种利用飞秒激光制备均匀、可控微透镜结构的方法 - Google Patents
一种利用飞秒激光制备均匀、可控微透镜结构的方法 Download PDFInfo
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- CN107738036A CN107738036A CN201711088851.6A CN201711088851A CN107738036A CN 107738036 A CN107738036 A CN 107738036A CN 201711088851 A CN201711088851 A CN 201711088851A CN 107738036 A CN107738036 A CN 107738036A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0025—Machining, e.g. grinding, polishing, diamond turning, manufacturing of mould parts
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
Abstract
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Priority Applications (1)
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CN201711088851.6A CN107738036B (zh) | 2017-11-08 | 2017-11-08 | 一种利用飞秒激光制备均匀、可控微透镜结构的方法 |
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CN201711088851.6A CN107738036B (zh) | 2017-11-08 | 2017-11-08 | 一种利用飞秒激光制备均匀、可控微透镜结构的方法 |
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CN107738036A true CN107738036A (zh) | 2018-02-27 |
CN107738036B CN107738036B (zh) | 2019-03-12 |
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CN201711088851.6A Active CN107738036B (zh) | 2017-11-08 | 2017-11-08 | 一种利用飞秒激光制备均匀、可控微透镜结构的方法 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109633795A (zh) * | 2018-12-11 | 2019-04-16 | 西安交通大学 | 一种利用皮秒激光快速制备均匀可控微透镜阵列的方法 |
CN110202265A (zh) * | 2019-05-14 | 2019-09-06 | 中国电子科技集团公司第三十八研究所 | 一种金刚石高精度微槽表面的加工方法 |
CN110405354A (zh) * | 2019-07-24 | 2019-11-05 | 西安交通大学 | 一种光纤透镜的飞秒激光加工方法 |
CN111885364A (zh) * | 2020-06-24 | 2020-11-03 | 歌尔微电子有限公司 | 微投影设备及电子设备 |
Citations (6)
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CN1269018A (zh) * | 1998-05-11 | 2000-10-04 | 精工爱普生株式会社 | 微透镜阵列基片及其制造方法和显示器 |
CN1428615A (zh) * | 2001-12-24 | 2003-07-09 | 中国科学院光电技术研究所 | 一种毫米量级微透镜列阵的制作方法 |
CN1611320A (zh) * | 2003-10-31 | 2005-05-04 | 精工爱普生株式会社 | 基板的加工方法、微透镜片的制造方法、透射型屏幕 |
DE102006042484A1 (de) * | 2006-09-07 | 2007-10-18 | Siemens Ag | Strahlungsdetektor |
CN101329508A (zh) * | 2008-07-25 | 2008-12-24 | 西安交通大学 | 一种利用飞秒激光制备微纳压印模版的方法 |
CN102785025A (zh) * | 2012-06-21 | 2012-11-21 | 西安交通大学 | 利用飞秒激光增强化学刻蚀制备大规模微透镜阵列的方法 |
-
2017
- 2017-11-08 CN CN201711088851.6A patent/CN107738036B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1269018A (zh) * | 1998-05-11 | 2000-10-04 | 精工爱普生株式会社 | 微透镜阵列基片及其制造方法和显示器 |
CN1428615A (zh) * | 2001-12-24 | 2003-07-09 | 中国科学院光电技术研究所 | 一种毫米量级微透镜列阵的制作方法 |
CN1611320A (zh) * | 2003-10-31 | 2005-05-04 | 精工爱普生株式会社 | 基板的加工方法、微透镜片的制造方法、透射型屏幕 |
DE102006042484A1 (de) * | 2006-09-07 | 2007-10-18 | Siemens Ag | Strahlungsdetektor |
CN101329508A (zh) * | 2008-07-25 | 2008-12-24 | 西安交通大学 | 一种利用飞秒激光制备微纳压印模版的方法 |
CN102785025A (zh) * | 2012-06-21 | 2012-11-21 | 西安交通大学 | 利用飞秒激光增强化学刻蚀制备大规模微透镜阵列的方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109633795A (zh) * | 2018-12-11 | 2019-04-16 | 西安交通大学 | 一种利用皮秒激光快速制备均匀可控微透镜阵列的方法 |
CN110202265A (zh) * | 2019-05-14 | 2019-09-06 | 中国电子科技集团公司第三十八研究所 | 一种金刚石高精度微槽表面的加工方法 |
CN110405354A (zh) * | 2019-07-24 | 2019-11-05 | 西安交通大学 | 一种光纤透镜的飞秒激光加工方法 |
CN111885364A (zh) * | 2020-06-24 | 2020-11-03 | 歌尔微电子有限公司 | 微投影设备及电子设备 |
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CN107738036B (zh) | 2019-03-12 |
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Effective date of registration: 20210426 Address after: No.085, 1st building, jiaodayi village, Beilin District, Xi'an City, Shaanxi Province, 710000 Patentee after: Mei Xuesong Address before: Beilin District Xianning West Road 710049, Shaanxi city of Xi'an province No. 28 Patentee before: XI'AN JIAOTONG University |
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Effective date of registration: 20210601 Address after: Room 1807, building 3, 311 Yanxin Road, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Patentee after: Wuxi Chaotong Intelligent Manufacturing Technology Research Institute Co.,Ltd. Address before: No.085, 1st building, jiaodayi village, Beilin District, Xi'an City, Shaanxi Province, 710000 Patentee before: Mei Xuesong |
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