CN107679706A - Wafer unfilled corner statistical query method and based on website lookup method the problem of its - Google Patents
Wafer unfilled corner statistical query method and based on website lookup method the problem of its Download PDFInfo
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- CN107679706A CN107679706A CN201710812402.5A CN201710812402A CN107679706A CN 107679706 A CN107679706 A CN 107679706A CN 201710812402 A CN201710812402 A CN 201710812402A CN 107679706 A CN107679706 A CN 107679706A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q10/063—Operations research, analysis or management
- G06Q10/0631—Resource planning, allocation, distributing or scheduling for enterprises or organisations
- G06Q10/06313—Resource planning in a project environment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Abstract
The present invention provides a kind of wafer unfilled corner statistical query method and based on website lookup method the problem of its, including step：In defining unfilled corner angle on wafer, and define 0 ° of position for running cargo aircraft platform plummer；Cargo aircraft platform will be run to be arranged according to preset order；Statistics runs the unfilled corner direction of wafer in the batch goods that cargo aircraft platform is run, if unfilled corner direction does not turn, is recorded as a race cargo aircraft platform and runs unfilled corner direction after the completion of goods；If unfilled corner direction rotates, unfilled corner direction after rotating is recorded as；The number in the different unfilled corner directions occurred is counted, obtains the wafer unfilled corner information of wafer or batch goods.Pass through such scheme, pass through the statistics to board silicon chip unfilled corner direction, silicon chip can be inquired about in the unfilled corner direction of each processing procedure website, utilize the difference of wafer unfilled corner, in the analysis of defect and yield loss, shorten the seeking scope of problem site, for the special board in part by sending goods its front and rear shipments unfilled corner direction run difference is occurred, and by adding inspection to shorten problem site.
Description
Technical field
The present invention relates to a kind of semiconductor processes analysis technical field, more particularly to a kind of wafer unfilled corner statistical query side
Method and based on website lookup method the problem of its.
Background technology
At present, in semiconductor defect and yield analysis, often occur different in same crowd of lot (batch goods)
There is quite similar but direction notable difference special map (collection of illustrative plates) in wafer (wafer) or different crowdes of lot wafer, such as：Together
It is because having one in processing procedure that different wafer, which have this phenomenon in different notch (wafer unfilled corner) directions, in a collection of lot
The website inspected by random samples a bit, these websites only detect to certain a piece of or several wafer, so these wafer being screened to are just
Phenomenon of the notch directions different from other pieces is likely to occur, these websites typically can all follow fixed sampling observation mode；Difference batch
Lot wafer exist the different this phenomenons in notch directions be because the board of two batches lot institutes run goods (race goods) is different, or
Person's processing procedure has significant difference, some boards of the more run or few run of meeting and website in itself.
The presence of above-mentioned phenomenon is primarily due to, and extension set platform can side of the specification institute run silicon chips in board in the middle part of processing procedure
To the unfilled corner (notch) of i.e. silicon chip can uniformly go to some specific direction.Board pin during run goods is summarized below
Several settings to notch：1) board will not do the action in any specification silicon chip direction in itself, i.e. notch does not do any turn
Dynamic, any change, such as the board of boiler tube and tank will not be occurred by passing in and out the direction of board；2) plummer that board passes through silicon chip
(stage) rotation, the direction of specification institute run silicon chips is come, and run goods terminates rear stage and returns to original position, causes disengaging machine
Any change will not occur for the silicon chip unfilled corner direction of platform, but inconsistent with the direction of silicon chip disengaging when actual run goods,
Such as part detection board；3) board specification silicon chip direction, the silicon chip unfilled corner direction for causing to pass in and out board can change, this
Situation can be divided into two kinds of situations again：1. board uniformly sets the direction of silicon chip unfilled corner；2. board can be according to different formulas
(recipe) different notch directions are set.
However, at present actual the defects of and in yield analysis, the phenomenon that is had differences for above-mentioned notch directions,
The querying method of systematization is not formed, does not make full use of notch difference yet, and progress reasonably sends goods, so as to allow machine
The extremely caused continuous influence of platform, can determine associated stations rapidly, What is more, can also by the notch differences between lot
Increase unified wafer notch website in processing procedure, ignore that this species diversity may bring it is new the defects of and yield analysis side
Method, it is tantamount to draw a snake and add feet to it, keeps the glittering casket and gives back the pearls to the seller.
Therefore, how a kind of statistical query method of wafer unfilled corner is provided, and is run using the unfilled corner difference between wafer
The method that problem site is searched during goods is necessary.
The content of the invention
In view of the above the shortcomings that prior art, it is an object of the invention to provide a kind of wafer unfilled corner statistical query side
Method and based on website lookup method the problem of its, for solving, problem site seeking scope is big in the prior art, atlas analysis is multiple
The problems such as miscellaneous.
In order to achieve the above objects and other related objects, the present invention provides a kind of wafer unfilled corner statistical query method, including
Following steps：
1) in defining several unfilled corner angles on wafer, to represent the unfilled corner direction of the wafer, and the wafer is defined
Race cargo aircraft platform plummer 0 ° of position and the unfilled corner angle in 0 ° of position correspondence；
2) all race cargo aircraft platforms of each batch goods are arranged according to preset order, to carry out the batch goods
The statistics in the unfilled corner direction of middle wafer；
3) the unfilled corner direction per wafer in each batch goods for running cargo aircraft platform and being run is counted, wherein,
If the unfilled corner direction of the wafer does not rotate, the unfilled corner direction be recorded as into upper one run cargo aircraft platform running institute after the completion of goods
State unfilled corner angle corresponding to unfilled corner direction；If the unfilled corner direction of the wafer rotates, the unfilled corner direction is recorded as
Unfilled corner angle corresponding to the unfilled corner direction after rotation；
4) count it is each it is described run each wafer in the batch goods that is run of cargo aircraft platform occur it is different described scarce
The number of angular direction, to obtain the wafer unfilled corner information of wafer or batch goods in each race cargo aircraft platform.
As a preferred embodiment of the present invention, in step 3), if the batch goods or the wafer are running goods process
Described in unfilled corner direction rotate, and run goods after the completion of again rotate back into run goods before position, then to the batch goods or institute
State the unfilled corner direction of the wafer during goods is run to show in the lump, and statistics is the different unfilled corner side in step 4)
To.
As a preferred embodiment of the present invention, in step 3), for the wafer inspected by random samples, recording the unfilled corner direction is
The unfilled corner direction put back to after running cargo aircraft platform is completed in sampling observation.
As a preferred embodiment of the present invention, in step 1), the unfilled corner angle of definition is 8, by side clockwise
To including successively：0 °, 45 °, 90 °, 135 °, 180 °, 225 °, 270 °, 315 °, and wafer is defined corresponding to the side above wafer cassette
To for 0 ° of direction.
As a preferred embodiment of the present invention, in step 2), the preset order is the race goods station of the batch goods
Dot sequency.
As a preferred embodiment of the present invention, after step 4), different batch goods can be selected to carry out wafer and lacked
Angle information is inquired about, or any wafer carries out wafer unfilled corner information inquiry in selection batch goods, and can inquire about the batch
The wafer unfilled corner information of all race goods station points of goods or the wafer
The present invention also provides the problem of one kind is based on wafer unfilled corner direction website lookup method, comprises the following steps：
1) offer corresponds to the wafer in different unfilled corner directions with identical preset map and the preset map；
2) using as described in above-mentioned either a program statistical query method acquisition it is each as described in wafer wafer unfilled corner information, with
The race goods station point that the unfilled corner direction of the wafer changes is determined, and is defined as targeted sites；
3) information inquired about according to step 2), the race goods station point undergone between the two neighboring targeted sites is determined
For problem site, to shorten the seeking scope of problem site.
As a preferred embodiment of the present invention, in step 1), the preset map includes defect collection of illustrative plates, yield collection of illustrative plates.
As a preferred embodiment of the present invention, in addition to step 4), the default race goods inventory for running cargo aircraft platform is swept
Inquiry is retouched, and the goods run to it carries out plus inspection, further to shorten problem site, wherein, the default race cargo aircraft platform is
Run cargo aircraft platform corresponding to the described problem website determined in step 3), and the default race cargo aircraft platform is can be according to not existing together
Manage the race cargo aircraft platform that formula sets different wafer unfilled corner directions.
As a preferred embodiment of the present invention, the specific steps of step 4) include：
4-1) according to the prefixed time interval scanning default race goods inventory for running cargo aircraft platform, to determine the race goods inventory
Interior processing formula；
If 4-2) the processing formula run in goods inventory is empty, attonity；If
There is the same processing formula in the race goods inventory, then control sends goods system to enter the default race cargo aircraft platform
Row sends goods, so as to have the processing formula in different unfilled corner directions in the default race cargo aircraft platform；If
There is different processing formulas in the race goods inventory, then judge whether the different processing formula has difference
Unfilled corner direction, if having, attonity, if not having, control send goods system to it is described it is default run cargo aircraft platform carry out sending goods,
So as to there is the processing formula in different unfilled corner directions in the default race cargo aircraft platform；
4-3) the batch goods after the processing formula processing with different unfilled corner directions is carried out plus examined, is judged described pre-
If whether collection of illustrative plates accordingly changes according to the unfilled corner direction, to judge to run whether goods station point is to ask corresponding to the default race cargo aircraft platform
Inscribe website.
As a preferred embodiment of the present invention, the time interval is 8 hours, and defines three scanning moment, in institute
State the scanning moment is scanned to the race goods inventory of the first eight hour of the race cargo aircraft platform.
As a preferred embodiment of the present invention, step 4-2) in, the priority scheduling for sending goods system according to batch goods
Level carries out sending goods.
As described above, the present invention wafer unfilled corner statistical query method and based on website lookup method the problem of its, have
Following beneficial effect：
1) after the present invention to each race cargo aircraft platform work by neutralizing work, the statistics in silicon chip unfilled corner direction (notch) can
To inquire about every silicon chip in the unfilled corner direction of each processing procedure website；
2) present invention by using the wafer unfilled corner counted difference, so as to special map the defects of and
In the analysis of yield loss, assistant analysis, shorten the seeking scope of problem site；
3) for the special board in part, (the different job-program mode of these boards can set different silicon chip unfilled corners to the present invention
Direction), the system can make these board institutes run front and rear batch of unfilled corner direction difference occur, so as to have in analysis by sending goods
During having the defects of special map and yield loss, by these lots' plus inspection, the defects of to determine them or dose rate
Whether distribution also occurs identical difference, plays a part of shortening problem site and fast verification problem site.
Brief description of the drawings
Fig. 1 is shown as the schematic diagram provided by the invention for defining wafer unfilled corner angle.
Fig. 2 is shown as wafer unfilled corner recording method form in wafer unfilled corner statistical method step 3) provided by the invention.
Fig. 3 is shown as the wafer unfilled corner statistic record form of the offer of the embodiment of the present invention one.
Fig. 4 is shown as the wafer that step 1) provides in the problem of embodiment of the present invention two provides website lookup method.
Fig. 5 is shown as the flowage structure signal of step 4) in the problem of embodiment of the present invention two provides website lookup method
Figure.
Fig. 6 is shown as each flow chart of steps of wafer unfilled corner statistical method provided by the invention.
Component label instructions
11 wafers
0 ° of position of 111 unfilled corner angles
12 wafer cassettes
31,32 have the wafer of the collection of illustrative plates in different unfilled corner directions
S1~S4 steps
Embodiment
Illustrate embodiments of the present invention below by way of specific instantiation, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through specific realities different in addition
The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Fig. 1 is referred to Fig. 6.It should be noted that the diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of invention, though only showing the component relevant with the present invention in diagram rather than according to package count during actual implement
Mesh, shape and size are drawn, and form, quantity and the ratio of each component can be a kind of random change during its actual implementation, and its
Assembly layout form may also be increasingly complex.
Embodiment one：
The present invention provides a kind of wafer unfilled corner statistical query method, comprises the following steps：
1) in defining several unfilled corner angles on wafer, to represent the unfilled corner direction of the wafer, and the wafer is defined
Race cargo aircraft platform plummer 0 ° of position and the unfilled corner angle in 0 ° of position correspondence；
2) all race cargo aircraft platforms of each batch goods are arranged according to the race goods station dot sequency of the batch goods,
To carry out the statistics in the unfilled corner direction of wafer in the batch goods；
3) the unfilled corner direction per wafer in each batch goods for running cargo aircraft platform and being run is counted, wherein,
If the unfilled corner direction of the wafer does not rotate, the unfilled corner direction be recorded as into upper one run cargo aircraft platform running institute after the completion of goods
State unfilled corner angle corresponding to unfilled corner direction；If the unfilled corner direction of the wafer rotates, the unfilled corner direction is recorded as
Unfilled corner angle corresponding to the unfilled corner direction after rotation；
4) count it is each it is described run each wafer in the batch goods that is run of cargo aircraft platform occur it is different described scarce
The number of angular direction, to obtain the wafer unfilled corner information of wafer or batch goods in each race cargo aircraft platform.
The method that wafer unfilled corner statistical query provided by the invention is illustrated below in conjunction with accompanying drawing.
As shown in Fig. 1 and Fig. 6 S1, step 1) is carried out first, in defining several unfilled corner angles on wafer, to represent
The unfilled corner direction of wafer is stated, and defines 0 ° of position of the race cargo aircraft platform plummer of the wafer and 0 ° of position in the unfilled corner angle
Put correspondingly；
As an example, in step 1), the unfilled corner angle of definition is 8, is included successively in the direction of the clock：0 °,
45 °, 90 °, 135 °, 180 °, 225 °, 270 °, 315 °, and it is 0 ° of direction to define wafer corresponding to the direction above wafer cassette.
Specifically, during specific statistical query, the unfilled corner direction of wafer is defined first, is defined notch and is existed
The describing mode in direction in cassette (wafer cassette)：As shown in figure 1, as viewed from wafer fronts, cassette the tops are
0 °, and wafer is defined into unfilled corner direction during board race goods, directions of the wafer during run goods is then with above-mentioned wafer
It is reference in the direction that the notch of wafer cassette is defined, i.e. wafer 0 ° of position correspondence board plummer in cassette
(stage) place is defined as 0 °, such as：Notch directions of the wafer in cassette is 180 °, into board run goods mistakes
Cheng Zhong, stage rotate to notch its top, then now notch direction is 0 ° during run goods.
It should be noted that in practical application, eight directions described above are the positions that notch most often occurs；It is other because
It is the method by defect distribution or yield loss equal distribution to analyze for the application, because the distributed areas of particular image may
Larger, so should reduce the notch directions of some low-angles as far as possible, i.e., the number of described unfilled corner angle can not be too many, in order to avoid
Covered by distributed areas, cause that the phenomenon that notch directions difference be present can not be recognized whether；If certain optional notch directions
It is less, in actual applications, it may appear that many section processing procedures have the notch difference conditions of acquaintance, are unfavorable for excluding and analyze, i.e.,
The number of the unfilled corner angle can not very little, for example, in extreme situation, if there was only a kind of direction in fab, then equivalent to
Lose a kind of analysis gimmick.
As shown in Fig. 6 S2, step 2) is carried out, all race cargo aircraft platforms of each batch goods are carried out according to preset order
Arrangement, to carry out the statistics in the unfilled corner direction of wafer in the batch goods；
As an example, in step 2), the preset order is the race goods station dot sequency of the batch goods.
Specifically, in the present embodiment, define a kind of order of wafer unfilled corner directional statistics, with by it to wafer unfilled corner side
To being counted, so as to aspect searching and managing, certainly, in other embodiments, other statistics orders can also be taken, herein
And it is not particularly limited.
As shown in Fig. 2 and Fig. 3 and Fig. 6 S3, step 3), each batch run cargo aircraft platform and run of statistics are carried out
Unfilled corner direction in goods per wafer, wherein, if the unfilled corner direction of the wafer does not rotate, by the unfilled corner side
To being recorded as upper one and run cargo aircraft platform to run unfilled corner angle corresponding to the unfilled corner direction after the completion of goods；If the unfilled corner direction of the wafer
Rotate, then the unfilled corner direction is recorded as unfilled corner angle corresponding to the unfilled corner direction after rotating；
Specifically, according to the order of step 2), as shown in Figures 2 and 3, the wafer unfilled corner of each race cargo aircraft platform is united
Meter, wherein, if during the race cargo aircraft platform runs goods, the unfilled corner direction of wafer does not rotate, then records upper one and run cargo aircraft
Unfilled corner angle after the completion of platform race goods is the angle during its race goods, if after the completion of the race cargo aircraft platform runs goods, wafer
Unfilled corner direction does not rotate, then the unfilled corner angle after the completion of the upper race cargo aircraft platform race goods of record runs the angle after the completion of goods is crossed for it
Degree, such as Fig. 2 No.1 boards, further, rotate if running unfilled corner direction during goods, do not turn after the completion of race goods, then will rotate
Angle corresponding record, such as Fig. 2 No.2 boards.According to above-mentioned rule, by each all batch goods for running cargo aircraft platform and running goods
The wafer unfilled corner of every wafer in thing records one by one.
As an example, in step 3), if the batch goods or the wafer unfilled corner direction hair during goods is run
Position that is raw to rotate, and being rotated back into again before running goods after the completion of race goods, then running goods process to the batch goods or the wafer
In the unfilled corner direction show that and statistics is the different unfilled corner direction in the step 4) in the lump.
Specifically, the mode of that display in the lump can be to be recorded in the bracket for going back to the unfilled corner angle before running goods,
So as in analyzing will not drain message, the #1 wafers run such as the No.1 boards in Fig. 3.
As an example, in step 3), for the wafer inspected by random samples, record its described unfilled corner direction and put back to race for sampling observation completion
Unfilled corner direction after cargo aircraft platform.
Specifically, for inspecting wafer by random samples, the situation of its angular turn is also recorded, certainly, if other situations make crystalline substance
Discount vibram outlet angle angle changes, and to record one by one.
As shown in Fig. 3 and Fig. 6 S4, step 4), each batch goods for running cargo aircraft platform and being run of statistics are carried out
In the number in the different unfilled corner directions that occurs of each wafer, to obtain each described running wafer or batch goods in cargo aircraft platform
The wafer unfilled corner information of thing.
Specifically, need to count of possessed wafer unfilled corner angle in the batch goods run on each race cargo aircraft platform
Number, as shown in No.2 boards in Fig. 3, when the 3rd that it is the batch goods runs goods station point, its #1 wafers and #10 wafers
The change that once occurred of angle, be all once to turn over 180 °, then in its different unfilled corner direction counted on last column
Number is 2, is once analogized, as shown in No.1 boards in Fig. 3, when it is the 2nd or the 4th race goods station point of the batch goods
When, the unfilled corner direction of all wafers does not change, then the number in its different unfilled corner direction is 1.
As an example, after step 4), different batch goods can be selected to carry out wafer unfilled corner information inquiry, Huo Zhexuan
Select any wafer in batch goods and carry out wafer unfilled corner information inquiry, and the institute of the batch goods or the wafer can be inquired about
There is the wafer unfilled corner information for running goods station point.
It should be noted that the lot and wafer of the race cargo aircraft platform to each processing procedure website wafer lack according to the method described above
After angle is counted, detailed form data is depicted as, can be for being used during follow-up progress problem site lookup, certainly, form
Form and other relevant informations, can be set with actual demand.
Embodiment two：
The present embodiment two provides a kind of the problem of being based on wafer unfilled corner direction website lookup method, wherein, described problem station
The wafer unfilled corner statistical method that the lookup mode of point is provided based on embodiment one, comprises the following steps：
1) offer corresponds to the wafer in different unfilled corner directions with identical preset map and the preset map；
2) using as described in embodiment one statistical query method obtain it is each as described in wafer wafer unfilled corner information, with determination
The race goods station point that the unfilled corner direction of the wafer changes, and it is defined as targeted sites；
3) information inquired about according to step 2), the race goods station point undergone between the two neighboring targeted sites is determined
For problem site, to shorten the seeking scope of problem site.
As an example, as shown in figure 4, in step 1), the preset map includes defect collection of illustrative plates, yield collection of illustrative plates.
Specifically, the present embodiment two provides a kind of method that problem site is searched, it is intended to the difference using wafer unfilled corner
It is different, with reference to existing collection of illustrative plates, to find out the problem of producing collection of illustrative plates defect website.For example, as shown in Figure 4, there is provided one with identical
Collection of illustrative plates, but the collection of illustrative plates has the wafer of different directions, substantially 90 degree of the difference, and defect type of two wafer 31,32
It is identical, it is possible to judge that the defect on this two panels silicon chip comes from same website, it is assumed that can from defect analyses
To say that problem site is stuck in this 26 websites of website A to website Z, and it is total to by the invention it is possible to see in website B to website E
Four websites between website, namely targeted sites, that is to say, that this two wafer starts to have different after A websites
Unfilled corner direction, 90 ° of differences in example, has rotated back into identical unfilled corner direction, namely this two panels wafer exists after F websites
B to the differential seat angle during E board website run goods in board be all 90 degree, it is possible to take this decision problem and possibly be present at this
Four websites, just shorten seeking scope.
As an example, also including step 4), inquiry is scanned to the default race goods inventory for running cargo aircraft platform, and it is run
Goods carry out plus inspection, further to shorten problem site, wherein, it is described it is default run cargo aircraft platform be determined in step 3) it is described
Cargo aircraft platform is run corresponding to problem site, and the default race cargo aircraft platform is that according to different disposal formula different wafers can be set to lack
The race cargo aircraft platform of angular direction.
Specifically, the purpose of the step be it is different for that can be set according to different processing formula (recipe)
The board in notch directions, it is desirable to Special display, can show that it has the function, and the run of the board can be linked to
Sheet (runs goods inventory), and different recipe institutes run lot notch directions are can directly be seen that by the inventory, is so lacking
In sunken or yield analysis, these lot can be examined by adding, to determine whether that the defects of corresponding or yield distribution also occur accordingly
Change, so as to further shorten the scope of problem site.
As an example, the specific operating procedure during goods is sent to be as shown in figure 5, controlling：
4-1) according to the prefixed time interval scanning default race goods inventory for running cargo aircraft platform, to determine the race goods inventory
Interior processing formula；
As an example, the time interval is 8 hours, and defines three scanning moment, at the scanning moment to described
The race goods inventory for running the first eight hour of cargo aircraft platform is scanned.
Specifically, system runs the recipe information in cargo aircraft platform in run sheet, example according to the time interval scanning of regulation
Such as, it can specify that scanning in (24 hours) daily three times, time interval is 8 hours, then regulation 8:30、16:30 and 0:30 3
The individual scanning moment is scanned, then and 8:30 scannings 0:30~8:Race goods inventory between 30.
If 4-2) the processing formula run in goods inventory is empty, attonity；If
There is the same processing formula in the race goods inventory, then control sends goods system to enter the default race cargo aircraft platform
Row sends goods, so as to have the processing formula in different unfilled corner directions in the default race cargo aircraft platform；If
There is different processing formulas in the race goods inventory, then judge whether the different processing formula has difference
Unfilled corner direction, if having, attonity, if not having, control send goods system to it is described it is default run cargo aircraft platform carry out sending goods,
So as to there is the processing formula in different unfilled corner directions in the default race cargo aircraft platform；
Specifically, in this step, processing formula be present to having to run in goods inventory, that is, the board that process occurred enters
Row selectivity sends goods to handle, wherein, for there is the board of processing formula, to see whether it is same processing formula, if only
One processing formula, then its lot unfilled corner direction was necessarily without occurring change, then system can be selected in goods system is sent with being somebody's turn to do
There is recipe the lot of different wafer unfilled corners to carry out sending goods, so as to be processing goods that the board possesses different unfilled corner directions.
Equally, for there is different disposal formula (such as recipe1 and recipe2) board, then pair in recipe and notch directions is passed through
According to table, judge whether recipe1 and recipe2 corresponds to different notch directions, certainly, recipe1 and recipe2 processing
Technique, if it is different, then no longer sending goods, if identical, can be carried out sending goods in the manner described above with identical or different.
As an example, step 4-2) in, it is described to send goods system to carry out sending goods according to the priority level of batch goods.
Specifically, when sending goods send cargo interests formula can be with actual conditions depending on, such as according to priority level set in advance or
Stand-by period etc. carries out sending goods, and purpose is that the goods for handling the board has different unfilled corner directions here.
4-3) the batch goods after the processing formula processing with different unfilled corner directions is carried out plus examined, is judged described pre-
If whether collection of illustrative plates accordingly changes according to the unfilled corner direction, to judge to run whether goods station point is to ask corresponding to the default race cargo aircraft platform
Inscribe website.
Specifically, after if processing formula is handled the wafer in different unfilled corner directions, this crowd of lot is carried out plus examined, if
Angle corresponding to its defect is consistent after handling twice, i.e. defect respective change, then proves that the defect together rotates, the defect
Generation send cargo aircraft platform unrelated with this.
In summary, the present invention provides a kind of wafer unfilled corner statistical query method and based on website lookup side the problem of its
Method, comprise the following steps：In defining several unfilled corner angles on wafer, to represent the unfilled corner direction of the wafer, and institute is defined
State 0 ° of position of the race cargo aircraft platform plummer of wafer and 0 ° of position correspondence in the unfilled corner angle；By the institute of each batch goods
There is race cargo aircraft platform to be arranged according to the race goods station dot sequency of the batch goods, to carry out the statistics in the unfilled corner direction of wafer；
The unfilled corner direction per wafer in each batch goods for running cargo aircraft platform and being run is counted, wherein, if wafer lacks
Angular direction does not rotate, then it is corresponding the unfilled corner direction to be recorded as into the unfilled corner direction after the completion of upper race cargo aircraft platform runs goods
Unfilled corner angle；If the unfilled corner direction of wafer rotates, the unfilled corner direction is recorded as the unfilled corner direction after rotating
Corresponding unfilled corner angle；Count it is each it is described run each wafer in the batch goods that is run of cargo aircraft platform occur it is different described scarce
The number of angular direction, to obtain the wafer unfilled corner information of wafer or batch goods in each race cargo aircraft platform.Pass through above-mentioned side
Case, after the present invention to each race cargo aircraft platform work by neutralizing work, the statistics in silicon chip unfilled corner direction (notch), it can inquire about
Every silicon chip is in the unfilled corner direction of each processing procedure website；Difference of the invention by using the wafer unfilled corner counted, so as to
With with special map the defects of and in the analysis of yield loss, assistant analysis, shorten the seeking scope of problem site；This hair
Bright to be directed to the special board in part (the different job-program mode of these boards set different silicon chip unfilled corner directions), the system can
By sending goods, to make these board institutes run front and rear batch of unfilled corner direction difference occur, so as to the lacking with special map in analysis
Fall into and yield loss during, by these lots' plus inspection, playing and shortening problem site and fast verification problem site
Effect.So the present invention effectively overcomes various shortcoming of the prior art and has high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (12)
1. a kind of wafer unfilled corner statistical query method, it is characterised in that comprise the following steps：
1) in defining several unfilled corner angles on wafer, to represent the unfilled corner direction of the wafer, and the race of the wafer is defined
0 ° of position of cargo aircraft platform plummer and 0 ° of position correspondence in the unfilled corner angle；
2) all race cargo aircraft platforms of each batch goods are arranged according to preset order, it is brilliant in the batch goods to carry out
The statistics in round unfilled corner direction；
3) the unfilled corner direction per wafer in each batch goods for running cargo aircraft platform and being run is counted, wherein, if institute
The unfilled corner direction for stating wafer does not rotate, then the unfilled corner direction is recorded as into upper one and runs cargo aircraft platform running described after the completion of goods lack
Unfilled corner angle corresponding to angular direction；If the unfilled corner direction of the wafer rotates, the unfilled corner direction is recorded as rotating
Unfilled corner angle corresponding to the unfilled corner direction afterwards；
4) the different unfilled corner sides that each wafer occurs in each batch goods for running cargo aircraft platform and being run are counted
To number, with obtain it is each it is described race cargo aircraft platform in the wafer unfilled corner information of wafer or batch goods.
2. wafer unfilled corner statistical query method according to claim 1, it is characterised in that in step 3), if the batch
Goods or the wafer unfilled corner direction during goods is run rotate, and the position rotated back into again before running goods after the completion of race goods
Put, then the unfilled corner direction of the batch goods or the wafer during goods is run is shown in the lump, and in step 4)
Count as the different unfilled corner directions.
3. wafer unfilled corner statistical query method according to claim 1, it is characterised in that in step 3), for being inspected by random samples
Wafer, record the unfilled corner direction for sampling observation complete put back to run cargo aircraft platform after unfilled corner direction.
4. wafer unfilled corner statistical query method according to claim 1, it is characterised in that in step 1), definition it is described
Unfilled corner angle is 8, is included successively in the direction of the clock：0 °, 45 °, 90 °, 135 °, 180 °, 225 °, 270 °, 315 °, and define
The direction that wafer corresponds to above wafer cassette is 0 ° of direction.
5. wafer unfilled corner statistical query method according to claim 1, it is characterised in that described default suitable in step 2)
Sequence is the race goods station dot sequency of the batch goods.
6. wafer unfilled corner statistical query method according to claim 1, it is characterised in that after step 4), can select
Different batch goods carries out any wafer in wafer unfilled corner information inquiry, or selection batch goods and carries out wafer unfilled corner information
Inquiry, and the wafer unfilled corner information of all race goods station points of the batch goods or the wafer can be inquired about.
7. the problem of one kind is based on wafer unfilled corner direction website lookup method, it is characterised in that comprise the following steps：
1) offer corresponds to the wafer in different unfilled corner directions with identical preset map and the preset map；
2) using as described in claim 1~6 statistical query method obtain it is each as described in wafer wafer unfilled corner information, with determination
The race goods station point that the unfilled corner direction of the wafer changes, and it is defined as targeted sites；
3) information inquired about according to step 2), the race goods station point for determining to be undergone between the two neighboring targeted sites are to ask
Website is inscribed, to shorten the seeking scope of problem site.
8. the problem of being based on wafer unfilled corner direction website lookup method according to claim 7, it is characterised in that step 1)
In, the preset map includes defect collection of illustrative plates, yield collection of illustrative plates.
9. the problem of being based on wafer unfilled corner direction website lookup method according to claim 7, it is characterised in that also include
Step 4), inquiry is scanned to the default race goods inventory for running cargo aircraft platform, and the goods run to it carries out plus inspection, with further
Shorten problem site, wherein, the default cargo aircraft platform that runs is that cargo aircraft platform is run corresponding to the described problem website determined in step 3),
And the default cargo aircraft platform that runs is the race cargo aircraft platform that different wafer unfilled corner directions can be set according to different disposal formula.
10. the problem of being based on wafer unfilled corner direction website lookup method according to claim 9, it is characterised in that step
4) specific steps include：
4-1) according to the prefixed time interval scanning default race goods inventory for running cargo aircraft platform, to determine in the race goods inventory
Handle formula；
If 4-2) the processing formula run in goods inventory is empty, attonity；If
There is the same processing formula in the race goods inventory, then control sends goods system to send the default race cargo aircraft platform
Goods, so as to have the processing formula in different unfilled corner directions in the default race cargo aircraft platform；If
There is different processing formulas in the race goods inventory, then judge whether the different processing formula has different lack
Angular direction, if having, attonity, if not having, control sends goods system to carry out sending goods to the default race cargo aircraft platform, so that
There is the processing formula in different unfilled corner directions in the default race cargo aircraft platform；
4-3) the batch goods after the processing formula processing with different unfilled corner directions is carried out plus examined, judges the default figure
Whether spectrum accordingly changes according to the unfilled corner direction, to judge to run whether goods station point is problem stations corresponding to the default race cargo aircraft platform
Point.
11. the problem of being based on wafer unfilled corner direction website lookup method according to claim 10, it is characterised in that described
Time interval is 8 hours, and defines three scanning moment, at the scanning moment to the first eight hour for running cargo aircraft platform
The race goods inventory is scanned.
12. the problem of being based on wafer unfilled corner direction website lookup method according to claim 10, it is characterised in that step
It is described to send goods system to carry out sending goods according to the priority level of batch goods in 4-2).
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| CN112527586A (en) * | 2020-11-03 | 2021-03-19 | 特劢丝软件科技(上海)有限公司 | Silicon wafer production control method, electronic device, and computer-readable storage medium |
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