CN107678327A - One kind pronunciation accessory system - Google Patents
One kind pronunciation accessory system Download PDFInfo
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- CN107678327A CN107678327A CN201710770418.4A CN201710770418A CN107678327A CN 107678327 A CN107678327 A CN 107678327A CN 201710770418 A CN201710770418 A CN 201710770418A CN 107678327 A CN107678327 A CN 107678327A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L1/00—Arrangements for detecting or preventing errors in the information received
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- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10L—SPEECH ANALYSIS OR SYNTHESIS; SPEECH RECOGNITION; SPEECH OR VOICE PROCESSING; SPEECH OR AUDIO CODING OR DECODING
- G10L15/00—Speech recognition
- G10L15/24—Speech recognition using non-acoustical features
- G10L15/25—Speech recognition using non-acoustical features using position of the lips, movement of the lips or face analysis
Abstract
The invention provides one kind pronunciation accessory system.Including constant pressure unit, collecting unit, single-chip microcomputer and phonation unit.Constant pressure unit provides the weak voltage signals of 0.1 0.5V, sampling unit collection laryngograph signal to the sampling unit, and is converted into electric signal, and single-chip microcomputer exports by acoustic impluse corresponding to electric signal output, and by the phonation unit.The sampling unit includes the fexible film of two panels interlocking, and fexible film surface has micro-pillar array, and the microtrabeculae face of two panels film is mutually chimeric to form interlocking structure.The pronunciation accessory system has the advantages of preparing simply, cost is cheap, and repeatability is high.In addition, the pronunciation accessory system has flexible and high sensitivity concurrently, human body skin can be adhered well to, and without any stimulation, it is significant for being applied to the auxiliary pronunciation of wearable flexible intelligent future.
Description
Technical field
The present invention relates to fields such as graphene sensor, signal processing technology and Internet of Things, especially a kind of pronunciation is auxiliary
Auxiliary system, belong to intelligent control and Internet of Things field.
Background technology
With the application of new material, new technology and new technology, development of new functional material and sensor, make the property of sensor
Can be more perfect, the advantages that miniaturized structure, miniaturization and multifunction.The research ten of flexible sensor wearable in recent years
Divide hot topic, flexible force sensitive sensor combines flexible substrates and highly sensitive electrical-conductive nanometer material with micro nano structure,
Human body items physical signs is detected by change in electric caused by slight pressure or tactile using conductive material, so as to realize people
The real-time monitoring of body health status.Had broad application prospects in diseases monitoring, medical imaging and medical diagnosis on disease etc..Can
Accurately to detect pressure, humidity and temperature, new artificial limb is made for patients with amputation；It can also be provided for robot and mankind's skin
The similar artificial skin of skin is used for carrying out various tests；By drawing skin elasticity distribution map, health and damaged tissues are established
Quantitative data data, doctor can be helped preferably to assess disease of skin, such as dermatitis and cutaneum carcinoma；Also it is implantable into the human body
Portion is used for monitoring blood vessel and other soft tissue injuries or dysfunction.
Considerable hurdle has been exchanged between current deaf-mute and normal person, has caused deaf-mute to live and links up inconvenience.Sign language
Although solving this problem, limitation is very big.Because most of normal person can not understand the sign language of deaf-mute, and work as
With sign language and voice equally one meaning of expression, the expression effect of sign language is more very different than language, and efficiency is very low.Now
Speech recognition technology, all it is each time chart picture that lip vibrates when being spoken with video camera shooting, then with the side of image procossing
Method and the recognizer for writing complexity, the characteristic quantity of image is extracted to carry out the identification of voice.This method not only realizes difficulty
Greatly, complex operation, it is complex for operation step, it has not been convenient to carry, required equipment is more, and needs to use the high cost such as video camera to set
It is standby, it is unfavorable for large-scale industrialization.Further, since the limitation of hardware, also causes traditional speech recognition technology poor practicability,
Application prospect is undesirable.
The content of the invention
The problem of existing for prior art, the present invention provide a kind of pronunciation accessory system.
The purpose of the present invention is achieved through the following technical solutions：One kind pronunciation accessory system, including：Constant pressure unit,
Collecting unit, single-chip microcomputer and phonation unit.Constant pressure unit provides the weak voltage signals of 0.1-0.5V, sampling to the sampling unit
Unit gathers laryngograph signal, and is converted into electric signal, single-chip microcomputer by acoustic impluse corresponding to electric signal output, and
Exported by the phonation unit.The sampling unit includes the fexible film of two panels interlocking, and fexible film surface has microtrabeculae
Array, the microtrabeculae face of two panels film is mutually chimeric to form interlocking structure, and the fexible film is prepared by following steps：
(1) PDMS substrate of the structure with micro- cylindrical-array, the height of micro- cylinder are 20 μm, draw ratio is 1~
2.5。
(2) PDMS with microarray is placed in plasma etching instrument, 10-15min is handled with plasma oxygen, with
PDMS is soaked in 30-60min in the PDDA solution (polydiallyldimethyl ammonium chloride solution) that mass concentration is 5wt% afterwards, so
After be washed with deionized, then be placed in 40 DEG C of baking ovens dry.
(3) drop coating 0.3mg/ml graphene solution, the amount of drop coating is 200-467 μ l/cm2, dry under 40 DEG C of environment, obtain
To the graphene-based film of flexible micro-pillar array.
Further, the ratio of the spacing of micro- cylinder and diameter is 0.8~2.5.
Further, the PDMS substrates with micro- cylindrical-array are obtained by following steps：
(1.1) with sulfuric acid and hydrogen peroxide by volume 3:1 handles the silicon template with microarray under 90 DEG C of water bath conditions
1h, cleaned and dried with deionized water afterwards.
(1.2) silicon template is placed in 93wt% normal heptanes, 2wt% octadecyl trimethoxysilanes and 5wt% acetic acid second
1h is soaked in ester mixed solution, silicon template is rinsed with normal heptane afterwards, silicon template is finally placed in 100 DEG C~120 DEG C
Baking oven in dry 1h.
(1.3) it is 10 according to mass ratio:1 amount weighs dimethyl siloxane and is placed in crosslinking agent in beaker, stirs
20min, vacuum degassing bubble, is inverted in the template with microarray, and vacuum degassing again is steeped, and is subsequently placed at 80 DEG C of air blast
90min solidifies PDMS in drying box, and PDMS is peeled off from silicon template afterwards, obtains the PDMS substrates with micro- cylindrical-array.
Further, the Flexible graphene micro-pillar array film of the two panels interlocking is pasted at neck vocal cord vibration, is adopted
Collect vocal cord vibration waveform corresponding to different sounding.
Further, single-chip microcomputer model MSP430 used.
The present invention has advantages below：The present invention with highly sensitive sampling unit by carrying out laryngograph signal
Using realization aids in sounding, for sampling unit, increases specific surface area by micro- cylindrical-array, while pass through wrinkle graphene
Lamella forms micro-nano structure, increases the roughness of graphene contact surface and increases contact area, improves the flexibility of double-deck interlocking
The electric conductivity of graphene micro-pillar array thin film sensor and sensitivity.When drop coating graphene amount is very few, the graphene film of wrinkle
Layer is not easy to form micro-nano structure, and therefore, the roughness of graphene is inadequate on array, under small pressure distortion, the contact of graphene
Area change unobvious；When drop coating graphene amount is excessive, the graphene of wrinkle too stacks, and causes graphene film to become flat
Whole, wrinkle structure disappears, and have impact on the formation of graphene micro-nano structure, although the electric conductivity increase of sensor, in pressure
Under deformation, the contact area change of graphene is small, and sensitivity is low.Meanwhile PDMS has flexibility, as the substrate of electronic skin,
Adapt to the change of human body bending strain.The high sensor is applied and auxiliary pronunciation field, not only recognition accuracy
Greatly promote, it is cumbersome to also overcome traditional lip reading identification technology, the shortcomings that algorithm complexity.In addition, the pronunciation accessory system carries
Convenient, equipment is simple, and cost is cheap, small volume, and real-time is good, and is beneficial to industrialization, has good application prospect.Together
When, can solve well easily it is affected by noise, disturb the shortcomings of strong.
Brief description of the drawings
Fig. 1 is the SEM of Flexible graphene micro-pillar array film of the present invention；
Fig. 2 is the different pronunciation laryngograph signal waveforms of present invention pronunciation accessory system collection；
Fig. 3 is graphene and PDMS Raman spectrogram；
Fig. 4 is the sensing sensitivity of different graphene drop coating amounts；
Fig. 5 is the sensing sensitivity of different micro- cylindrical-array spacing.
Embodiment
One kind pronunciation accessory system, including：Constant pressure unit, collecting unit, single-chip microcomputer and phonation unit.Constant pressure unit is given
The sampling unit provides the weak voltage signals of 0.1-0.5V, in use, signal gathering unit is adhered into neck with medical adhesive tape
At vocal cord vibration, laryngograph signal is gathered, and is converted into electric signal, single-chip microcomputer is obtained by the built-in table of Keithley 2400
The electric signal of sampling unit is taken, the probe of the table of Keithley 2400 connects a fexible film respectively；Then according to electric signal output
Corresponding acoustic impluse, and exported by the phonation unit.The sampling unit includes the fexible film of two panels interlocking, flexible
Film surface has micro-pillar array, and the microtrabeculae face of two panels film is mutually chimeric to form interlocking structure.Flexible thin film sensor passes through
Following methods are prepared：
(1) with sulfuric acid and hydrogen peroxide by volume 3:1 handles the silicon mould with micro- cylindrical-array under 90 DEG C of water bath conditions
Plate (1.5cm*1cm) 1h, is cleaned and is dried with deionized water afterwards.
(2) by the silicon template cleaned up be placed in 93wt% normal heptanes, 2wt% octadecyl trimethoxysilanes and
1h is soaked in 5wt% ethyl acetate mixtures, and the moisture in isolation air is sealed with sealed membrane, prevents octadecyl front three
TMOS long-chain is hydrolyzed into silica, blocks micro- column-form, and silicon template is rinsed with normal heptane afterwards, goes to remove water
Micro silica of the solution in micro- cylindrical-array, finally silicon template is placed in 100 DEG C~120 DEG C of baking oven and dries 1h.
(3) it is 10 according to mass ratio:1 amount weighs dimethyl siloxane and is placed in crosslinking agent in beaker, stirs 20min,
Vacuum degassing is steeped, and is inverted in the template with microarray, again bubble removing under vacuum, and makes liquid PDMS fast
Speed is injected into micro- cylindrical-array, is subsequently placed in 80 DEG C of air dry ovens 90min and is solidified PDMS, afterwards by PDMS from silicon template
Upper stripping.
(4) PDMS with microarray is placed in plasma etching instrument, first adjusts Folding-Screen poles 125, adjust anode 70, adjusted
Section accelerates 160, and then adjusting negative electrode to line table just has registration, then is transferred to 250 through Folding-Screen poles, regulation negative electrode to 13.5 so that beam
It is about 26 to flow registration, and baffle plate is removed after it is stable, and the PDMS10-15min with micro array structure is handled with plasma oxygen,
Strengthen the hydrophily on the micro- cylindrical-array surfaces of PDMS；PDMS is then soaked in the PDDA solution (poly- two that mass concentration is 5wt%
Alkene dimethylammonium chloride ammonium salt solution) in 30-60min, further improve the hydrophily on PDMS micro- cylindrical-array surfaces, then spend from
Sub- water washing, then be placed in 40 DEG C of baking ovens and dry.
(5) drop coating 0.3mg/ml graphene solution 333-667 μ l, make it uniformly spread over micro- cylindrical-array
PDMS surfaces, dry under 40 DEG C of environment, obtain flexible micro-pillar array graphene film.
The flexible sensor is nontoxic to human body, harmless, non-stimulated, can experience human body fortune well and contact human skin
Dynamic change.
Fig. 1 is the SEM of graphene micro-pillar array film.Wherein, the figure of left side two be the micro- column-forms of PDMS SEM (a,
C), it can be seen that PDMS micro-post surfaces are smooth, and without any impurity；The figure of right side two is the SEM (b, d) after drop coating graphene,
It can be seen that graphene is the lamellar structure of wrinkle, and uniformly it is attached to the PDMS surfaces with micro-pillar array.
Fig. 2 is the vocal cord vibration waveform signal when present invention gathers different pronunciations." hello " is from left to right followed successively by,
" graphene ", the laryngograph signal waveform that " nanomaterials " correspond to, it can be seen that：Different pronunciations, throat's flesh
Meat motion is differentiated, so as to cause the contact area of two panels interlocking graphene array film to change, is then caused
Change in electric；Different people is read during same word (tester1~tester3), and electric signal waveform caused by vocal cord vibration changes
Substantially identical, also just illustrate that intelligent larynx auxiliary articulatory system prepared by the present invention has general applicability.
In addition, single-chip microcomputer only needs, by simply training, the matching database of acoustic impluse-electric signal to be built, with defeated
Go out corresponding acoustic impluse, control phonation unit sounding, the available model MSP430 of single-chip microcomputer.
Invention is described further with reference to embodiment.
Embodiment 1
(1) with sulfuric acid and hydrogen peroxide by volume 3:1 handles the silicon template with microarray under 90 DEG C of water bath conditions
(1.5cm*1cm) 1h, is cleaned and is dried with deionized water afterwards.
(2) by the silicon template cleaned up be placed in 93wt% normal heptanes, 2wt% octadecyl trimethoxysilanes and
1h is soaked in 5wt% ethyl acetate mixtures, and the moisture in isolation air is sealed with sealed membrane, prevents octadecyl front three
TMOS long-chain is hydrolyzed into silica, blocks micro- column-form, and silicon template is rinsed with normal heptane afterwards, goes to remove water
Micro silica of the solution in micro- cylindrical-array, finally silicon template is placed in 100 DEG C~120 DEG C of baking oven and dries 1h.
(3) it is 10 according to mass ratio:1 amount weighs dimethyl siloxane and is placed in crosslinking agent in beaker, stirs 20min,
Vacuum degassing is steeped, and is inverted in the template with microarray, again bubble removing under vacuum, and makes liquid PDMS fast
Speed is injected into micro- cylindrical-array, is subsequently placed in 80 DEG C of air dry ovens 90min and is solidified PDMS, afterwards by PDMS from silicon template
Upper stripping.
Then Flexible graphene micro-pillar array film is prepared in accordance with the following methods respectively：
Method 1
Flexible graphene micro-pillar array film is prepared using immersion method：Micro-pillar array PDMS film is immersed in 0.3mg/ml
In graphene solution, 40 DEG C of dryings, until moisture evaporation is complete；
Method 2
Flexible graphene micro-pillar array film is prepared using common drop-coating：The direct drop coating on micro-pillar array PDMS film
The μ l of 0.3mg/ml graphene solutions 500,40 DEG C of dryings；
Method 3
Flexible graphene micro-pillar array film is prepared using the inventive method：PDMS with microarray is placed in plasma
In body etching instrument, Folding-Screen poles 125 are first adjusted, adjust anode 70, regulation accelerates 160, and then adjust negative electrode just has registration to line table,
250 are transferred to through Folding-Screen poles again, regulation negative electrode to 13.5 so that line registration is about 26, removes baffle plate after it is stable, uses plasma
The hydrophily on the micro- cylindrical-array surfaces of the body oxygen processing PDMS15min with micro array structure, enhancing PDMS；Then PDMS is soaked
The 30-60min in the PDDA solution (polydiallyldimethyl ammonium chloride solution) that mass concentration is 5wt% is steeped, is further improved
The hydrophily on the micro- cylindrical-array surfaces of PDMS, is then washed with deionized, then is placed in 40 DEG C of baking ovens and dries.Then drop coating
0.3mg/ml graphene solution, the amount of drop coating is 500 μ l, is dried under 40 DEG C of environment, it is thin to obtain Flexible graphene micro-pillar array
Film.
The product obtained by confocal laser microscope and the table of Keithley 2400 to above-mentioned three kinds of methods characterizes, knot
Fruit shows that the graphene microtrabeculae forming thin film prepared by immersion method is uneven, and surface has substantial amounts of crackle, and microtrabeculae side is not
It is fully wrapped around by graphene film, poorly conductive, and the amount for being adsorbed onto the graphene in PDMS faces is uncontrollable, can not quantitatively be divided
Analysis；Also uneven by common drop-coating preparation Flexible graphene microtrabeculae forming thin film, heap easily occurs for the graphene on PDMS surfaces
It is folded, cause part microtrabeculae to be completely covered by graphene, or even micro-column structure is covered, but part PDMS microtrabeculaes expose, and have impact on
The electric conductivity of film；The Flexible graphene micro-pillar array forming thin film being prepared by the method for the present invention is uniform, the side of microtrabeculae
It can be adsorbed by graphene film, be modified because PDMS surfaces etch through plasma oxygen completely, enhance the parent on PDMS surfaces
It is water-based, increase contact angle, be advantageous to sprawling for moisture, then PDMS is immersed in PDDA solution again so that PDMS is repaiied on surface
The ammonium of positively charged on decorations, drop coating graphene attracted electronegative graphene later, so that graphene film forming is uniform, and stone
Black alkene firmly adsorbs on PDMS surfaces through Van der Waals force again, is come off so as to which graphene film is not easy to peel off from PDMS.Fig. 3 is side
The Raman spectrogram for the fexible film that method 3 obtains.Wherein, PDMS raman characteristic peak is 1259cm-1And 1410cm-1, drop coating stone
The raman characteristic peak measured after black alkene solution is 1340cm-1And 1580cm-1, belong to the raman characteristic peak of graphene.Fig. 1 is side
The SEM figures for the fexible film that method 3 obtains.Wherein, the figure of left side two is the SEM of the micro- column-forms of PDMS, it can be seen that PDMS is micro-
Post surface is smooth, and without any impurity；The figure of right side two is the SEM after drop coating graphene, it can be seen that graphene is wrinkle
Lamellar structure, and uniformly it is attached to the PDMS surfaces with micro-pillar array.
Embodiment 2
The present embodiment is intended to study influence of the different plasma oxygen etch period for film performance.
(1) with sulfuric acid and hydrogen peroxide by volume 3:1 handles the silicon mould with micro- cylindrical-array under 90 DEG C of water bath conditions
Plate (1.5cm*1cm) 1h, is cleaned and is dried with deionized water afterwards.
(2) by the silicon template cleaned up be placed in 93wt% normal heptanes, 2wt% octadecyl trimethoxysilanes and
1h is soaked in 5wt% ethyl acetate mixtures, and the moisture in isolation air is sealed with sealed membrane, prevents octadecyl front three
TMOS long-chain is hydrolyzed into silica, blocks micro- column-form, and silicon template is rinsed with normal heptane afterwards, goes to remove water
Micro silica of the solution in micro- cylindrical-array, finally silicon template is placed in 100 DEG C~120 DEG C of baking oven and dries 1h.
(3) it is 10 according to mass ratio:1 amount weighs dimethyl siloxane and is placed in crosslinking agent in beaker, stirs 20min,
Vacuum degassing is steeped, and is inverted in the template with microarray, again bubble removing under vacuum, and makes liquid PDMS fast
Speed is injected into micro- cylindrical-array, is subsequently placed in 80 DEG C of air dry ovens 90min and is solidified PDMS, afterwards by PDMS from silicon template
Upper stripping.Micro- cylinder size：16 μm of diameter, 20 μm of height, 30 μm of spacing.
(4) PDMS with microarray is placed in plasma etching instrument, first adjusts Folding-Screen poles 125, adjust anode 70, adjusted
Section accelerates 160, and then adjusting negative electrode to line table just has registration, then is transferred to 250 through Folding-Screen poles, regulation negative electrode to 13.5 so that beam
It is about 26 to flow registration, and baffle plate is removed after it is stable, handles 3-21min with plasma oxygen, as shown in table 1；Then by PDMS
It is soaked in 30min in the PDDA solution (polydiallyldimethyl ammonium chloride solution) that mass concentration is 5wt%.
(5) the drop coating 0.3mg/ml μ l of graphene solution 333, make it uniformly spread over the PDMS tables with micro- cylindrical-array
Face, dry under 40 DEG C of environment, finally obtain Flexible graphene micro-pillar array film.
The product obtained under different plasma oxygen etch period is as shown in table 1.
Table 1：Different plasma oxygen etch period
As it can be seen from table 1 when there is the PDMS surfaces of micro-pillar array with plasma oxygen etching, when etch period is less than
During 10min, PDMS surface hydrophilicities are poor, can not uniformly sprawl during later stage drop coating graphene solution, and graphene can occur after drying
Reunite and crack；When etch period is higher than 18min, the micro-pillar array on PDMS surfaces can collapse because long-time etches
Collapse, so as to be unfavorable for the formation of microtrabeculae film, be also easy to produce crackle, influence the performance of graphene film；Only when etch period is
During 10-15min, PDMS surfaces not only have a hydrophily, and graphene can uniformly spread over PDMS surfaces with microtrabeculae and
Side, obtain electric conductivity and the preferable graphene film of pressure drag performance.
Embodiment 3
The present embodiment is intended to study influence of the different graphene drop coating amounts for film performance.
(1) with sulfuric acid and hydrogen peroxide by volume 3:1 handles the silicon mould with micro- cylindrical-array under 90 DEG C of water bath conditions
Plate (1.5cm*1cm) 1h, is cleaned and is dried with deionized water afterwards.
(2) by the silicon template cleaned up be placed in 93wt% normal heptanes, 2wt% octadecyl trimethoxysilanes and
1h is soaked in 5wt% ethyl acetate mixtures, and the moisture in isolation air is sealed with sealed membrane, prevents octadecyl front three
TMOS long-chain is hydrolyzed into silica, blocks micro- column-form, and silicon template is rinsed with normal heptane afterwards, goes to remove water
Micro silica of the solution in micro- cylindrical-array, finally silicon template is placed in 100 DEG C~120 DEG C of baking oven and dries 1h.
(3) it is 10 according to mass ratio:1 amount weighs dimethyl siloxane and is placed in crosslinking agent in beaker, stirs 20min,
Vacuum degassing is steeped, and is inverted in the template with microarray, again bubble removing under vacuum, and makes liquid PDMS fast
Speed is injected into micro- cylindrical-array, is subsequently placed in 80 DEG C of air dry ovens 90min and is solidified PDMS, afterwards by PDMS from silicon template
Upper stripping.Micro- cylinder size：16 μm of diameter, 20 μm of height, 30 μm of spacing.
(4) PDMS with microarray is placed in plasma etching instrument, first adjusts Folding-Screen poles 125, adjust anode 70, adjusted
Section accelerates 160, and then adjusting negative electrode to line table just has registration, then is transferred to 250 through Folding-Screen poles, regulation negative electrode to 13.5 so that beam
It is about 26 to flow registration, and baffle plate is removed after it is stable, and 15min is handled with plasma oxygen；It is dense that PDMS is then soaked in quality
Spend 60min in the PDDA solution (polydiallyldimethyl ammonium chloride solution) for 5wt%.
(5) drop coating 0.3mg/ml graphene solution, as shown in table 2, it is made uniformly to spread over micro- cylindrical-array
PDMS surfaces, dry under 40 DEG C of environment, finally obtain Flexible graphene micro-pillar array film.
The product obtained under different drop coating amounts is as shown in table 2.
Table 2：Different graphene drop coating amounts
From table 2 it can be seen that when the drop coating amount of 0.3mg/ml graphenes is less than 333 μ l, because the amount of graphene is few, nothing
PDMS surfaces are completely covered in method, and face crack is more, poorly conductive；When the drop coating amount of graphene is higher than 333 μ l, graphene film energy
In microtrabeculae PDMS surfaces homogeneous film formation, but as the increase of graphene amount, the wrinkle of graphene film itself will be paved, graphene
Film is thickening, influences the height of microtrabeculae in itself, so as to weaken the pressure drag performance of graphene.
Further, drop coating amount is 333 μ l, 500 μ l, the pressure drag row of the micro-pillar array that 667 μ l are obtained at various pressures
To be as shown in Figure 4, it can be seen that under the conditions of the amount of drop coating is 200-467 μ l/cm2, sensitivity is preferable.And graphene drop coating amount is
500 μ l have higher sensitivity.
Embodiment 4
The present embodiment is intended to study influence of the different micro-pillar array spacing for film performance.
(1) with sulfuric acid and hydrogen peroxide by volume 3:1 handles the silicon mould with micro- cylindrical-array under 90 DEG C of water bath conditions
Plate (1.5cm*1cm) 1h, is cleaned and is dried with deionized water afterwards.
(2) by the silicon template cleaned up be placed in 93wt% normal heptanes, 2wt% octadecyl trimethoxysilanes and
1h is soaked in 5wt% ethyl acetate mixtures, and the moisture in isolation air is sealed with sealed membrane, prevents octadecyl front three
TMOS long-chain is hydrolyzed into silica, blocks micro- column-form, and silicon template is rinsed with normal heptane afterwards, goes to remove water
Micro silica of the solution in micro- cylindrical-array, finally silicon template is placed in 100 DEG C~120 DEG C of baking oven and dries 1h.
(3) it is 10 according to mass ratio:1 amount weighs dimethyl siloxane and is placed in crosslinking agent in beaker, stirs 20min,
Vacuum degassing is steeped, and is inverted in the template with microarray, again bubble removing under vacuum, and makes liquid PDMS fast
Speed is injected into micro- cylindrical-array, is subsequently placed in 80 DEG C of air dry ovens 90min and is solidified PDMS, afterwards by PDMS from silicon template
Upper stripping.Micro- cylinder size：16 μm of diameter, 20 μm of height.
(4) PDMS with microarray is placed in plasma etching instrument, first adjusts Folding-Screen poles 125, adjust anode 70, adjusted
Section accelerates 160, and then adjusting negative electrode to line table just has registration, then is transferred to 250 through Folding-Screen poles, regulation negative electrode to 13.5 so that beam
It is about 26 to flow registration, and baffle plate is removed after it is stable, and 15min is handled with plasma oxygen；It is dense that PDMS is then soaked in quality
Spend 60min in the PDDA solution (polydiallyldimethyl ammonium chloride solution) for 5wt%.
(5) the drop coating 0.3mg/ml μ l of graphene solution 500, make it uniformly spread over the PDMS tables with micro- cylindrical-array
Face, dry under 40 DEG C of environment, finally obtain Flexible graphene micro-pillar array film.
The product obtained under different drop coating amounts is as shown in table 3.
Table 3：Different micro- cylinder spacing
It can not be sprawled when micro-pillar array spacing is 10 μm as can be seen from Table 3, during drop coating graphene solution, cause graphene
PDMS micro-pillar arrays surface can not be adsorbed onto；Spacing is that 12.8 μm, 20 μm, 30 μm or 40 μm of micro-pillar array can cause graphene
Uniformly sprawl, but the pressing diagram of 20 μm and 40 μm spacing films is 30 μm not as good as microtrabeculae spacing.Spacing is 20 μm, 30 μ
M, the Piezoresistance behavior of 40 μm of micro-pillar array in the case where detecting different pressures is as shown in figure 5, the film that microtrabeculae spacing is 30 μm has
Higher sensitivity.
Examples detailed above is used for illustrating the present invention, but and the non-limiting present invention.Will in the spirit and right of the present invention
In the protection domain asked, to any modifications and changes of the invention made, protection scope of the present invention is both fallen within.
Claims (5)
1. one kind pronunciation accessory system, it is characterised in that including：Constant pressure unit, collecting unit, single-chip microcomputer and phonation unit.
Constant pressure unit to the sampling unit provide the weak voltage signals of 0.1-0.5V, sampling unit collection laryngograph signal, and by its
Electric signal is converted to, single-chip microcomputer exports by acoustic impluse corresponding to electric signal output, and by the phonation unit.It is described to adopt
Sample unit includes the fexible film of two panels interlocking, and fexible film surface has a micro-pillar array, and the microtrabeculae face of two panels film is mutually embedding
Conjunction forms interlocking structure, and the fexible film is prepared by following steps：
(1) PDMS substrate of the structure with micro- cylindrical-array, the height of micro- cylinder is 20 μm, and draw ratio is 1~2.5.
(2) PDMS with microarray is placed in plasma etching instrument, handles 10-15min with plasma oxygen, then will
PDMS is soaked in 30-60min, Ran Houyong in the PDDA solution (polydiallyldimethyl ammonium chloride solution) that mass concentration is 5wt%
Deionized water is washed, then is placed in 40 DEG C of baking ovens and is dried.
(3) drop coating 0.3mg/ml graphene solution, the amount of drop coating is 200-467 μ l/cm2, dry under 40 DEG C of environment, obtain soft
The property graphene-based film of micro-pillar array.
2. system according to claim 1, it is characterised in that the spacing of micro- cylinder and the ratio of diameter is 0.8~
2.5。
3. system according to claim 1, it is characterised in that the PDMS substrates with micro- cylindrical-array pass through following
Step obtains：
(1.1) with sulfuric acid and hydrogen peroxide by volume 3:1 handles the silicon template 1h with microarray under 90 DEG C of water bath conditions, it
Cleaned and dried with deionized water afterwards.
(1.2) silicon template is placed in into 93wt% normal heptanes, 2wt% octadecyl trimethoxysilanes and 5wt% ethyl acetate to mix
Close in solution and soak 1h, silicon template is rinsed with normal heptane afterwards, silicon template is finally placed in 100 DEG C~120 DEG C of baking
1h is dried in case.
(1.3) it is 10 according to mass ratio:1 amount weighs dimethyl siloxane and is placed in crosslinking agent in beaker, stirs 20min, very
Empty bubble removing, it is inverted in the template with microarray, vacuum degassing again is steeped, and is subsequently placed in 80 DEG C of air dry ovens
90min solidifies PDMS, and PDMS is peeled off from silicon template afterwards, obtains the PDMS substrates with micro- cylindrical-array.
4. system according to claim 1, it is characterised in that the Flexible graphene micro-pillar array film of the two panels interlocking
It is pasted at neck vocal cord vibration, gathers vocal cord vibration waveform corresponding to different sounding.
5. system according to claim 1, it is characterised in that single-chip microcomputer model MSP430 used.
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