CN107663625A - Lacing film feed device and optical coating apparatus - Google Patents
Lacing film feed device and optical coating apparatus Download PDFInfo
- Publication number
- CN107663625A CN107663625A CN201710996947.6A CN201710996947A CN107663625A CN 107663625 A CN107663625 A CN 107663625A CN 201710996947 A CN201710996947 A CN 201710996947A CN 107663625 A CN107663625 A CN 107663625A
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- Prior art keywords
- lacing film
- hanger
- feed device
- film feed
- substrate frame
- Prior art date
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- 239000011248 coating agent Substances 0.000 title claims abstract description 21
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 230000003287 optical effect Effects 0.000 title claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000005192 partition Methods 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chain Conveyers (AREA)
Abstract
The invention belongs to technical field of optical coating, more particularly to a kind of lacing film feed device and optical coating apparatus, wherein, lacing film feed device includes substrate frame, positioned at coating machine left side and the delivery chamber with sending piece mouth to connect, connected with delivery chamber and be located at the medial compartment below delivery chamber and for substrate frame to be lifted to delivery chamber from medial compartment and from sending piece mouth to be delivered to middle rotating disk so that substrate frame hanging support is in the vertical delivery mechanism of middle rotating disk, substrate frame includes pedestal base and the overhead kick being connected on the right side of pedestal base, vertical delivery mechanism includes intermediate connecting component, it is connected with intermediate connecting component and the hanger for the substrate frame that is used to taking, for driving the vertical drive component of intermediate connecting component up and down motion and driving the horizontal drive component of intermediate connecting component side-to-side movement.Based on the structure of the present invention, lacing film operation is simplified, improves lacing film efficiency.
Description
Technical field
The invention belongs to technical field of optical coating, more particularly to a kind of lacing film feed device and optical coating apparatus.
Background technology
, it is necessary to be hung substrate to coating machine carry using lacing film feed device in optical coating apparatus, wherein, at present, will
The process that substrate is hung to coating machine carry is complex, causes lacing film less efficient.
The content of the invention
It is an object of the invention to overcome above-mentioned the deficiencies in the prior art, there is provided a kind of lacing film feed device, it is intended to
Solve the problems, such as that extension screening efficiency is low.
What the present invention was realized in：A kind of lacing film feed device, for substrate to be sent into coating machine, the plated film equipment
Piece mouth and middle rotating disk are sent, the lacing film feed device includes the substrate frame for substrate adhesion, positioned at the plated film
On the left of machine and with the delivery chamber for sending piece mouth to connect, the medial compartment for connecting and being located at below the delivery chamber with the delivery chamber
And for the substrate frame to be lifted to the delivery chamber from the medial compartment and send piece mouth to be delivered to the centre from described
Rotating disk is so that the substrate frame hanging support includes pedestal base and company in the vertical delivery mechanism of the middle rotating disk, the substrate frame
The overhead kick being connected on the right side of the pedestal base, the vertical delivery mechanism include intermediate connecting component and the intermediate connecting component
Connect and the hanger for the substrate frame that is used to taking, the vertical drive component for driving the intermediate connecting component to move up and down
And the horizontal drive component of the driving intermediate connecting component side-to-side movement.
Alternatively, the intermediate connecting component includes self-locking mechanism, by vertical drive Component driver up and down motion
Support base and it is slidably matched and is connected with the hanger and by the horizontal drive component in left and right directions with the support base
The body frame seat of side-to-side movement is driven, the horizontal drive component moves up and down in the lump with the body frame seat, the self-locking mechanism bag
Include the first stopper, the second stopper being connected with the body frame seat and drive described in the presence of its elastic restoring force
One stopper is moved to second stopper so that first stopper and second stopper are engaged by clamping so as to limit
The first elastic component that the support base and the body frame seat horizontally slip is made, first elastic component is sent in the hanger with described
Outlet for lantern slide is when the same horizontal position by the external force for overcoming its elastic restoring force.
Alternatively, the support base opens up the guide hole of above-below direction insertion, and first stopper is provided with latch upward,
Second stopper is provided with the neck being engaged by clamping with the latch；
The self-locking mechanism includes through the guide hole and slips the guide rod coordinated with the guide hole and be connected to described
The locating part of rod end on guide rod, described first elastic component one end contradict with locating part elasticity, the other end and the support base
Elasticity contradicts, the locating part the hanger with it is described send outlet for lantern slide in the same horizontal position when contradict and pushed up in the delivery chamber
Face.
Alternatively, the hanging support that the hanger includes hanger body and is connected with the hanger body and formed towards right extension
Bar, the substrate frame offer the hanging hole that left and right directions insertion sets and inserted for the hanging support bar.
Alternatively, the hanger includes connection to be formed with the hanging support bar free end and upwardly extending and described for limiting
Substrate frame departs from the spacing hook of the hanging support bar.
Alternatively, the intermediate connecting component includes being connected with the hanger and slided with the body frame seat in left and right directions
The connecting seat of connection, one end are connected and the other end and the connecting seat and in the presence of its elastic restoring force with the body frame seat
The hanger is driven to there is the second elastic component of the trend moved right and for driving extension of the connecting seat to left movement
Frame auxiliary body.
Alternatively, the hanger auxiliary body includes the connection assist being connected with the connecting seat and for driving
State the auxiliary actuator of connection assist side-to-side movement.
Alternatively, the lacing film feed device includes being placed on front side of the medial compartment entering piece room, positioned at the medial compartment
The slice room of rear side, for by the substrate frame from it is described enter piece room deliver to the medial compartment and from the medial compartment deliver to
The carrier loader of the slice room, the carrier loader is at least provided with one.
Alternatively, the lacing film feed device include being used for separating it is described enter piece room and the medial compartment the first cut-off
Part, for by it is described enter piece room vacuumize the first vavuum pump, for separate the second of the slice room and the medial compartment every
Broken piece and the second vavuum pump for the slice room to be vacuumized.
The present invention also provides a kind of optical coating apparatus, including above-mentioned lacing film feed device.
Based on the structure design of the present invention, during lacing film, first, connected using among vertical drive Component driver
Component moves downward, wherein, hanger moves downward in the lump with intermediate connecting component, until hanger reaches medial compartment, secondly, with
Indoor, hanger, which is taken, to be stained with the substrate frame of substrate, then, recycles vertical delivery mechanism to carry substrate frame from medial compartment
Rise to delivery chamber and from sending piece mouth to be delivered to middle rotating disk.It follows that the substrate frame for being stained with substrate need to be only prevented in
Lacing film operation can be achieved in indoor taken for hanger, simplifies lacing film operation, improves lacing film efficiency.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, it will use below required in embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for ability
For the those of ordinary skill of domain, on the premise of not paying creative work, it can also be obtained according to these accompanying drawings other attached
Figure.
Fig. 1 is the overall structure diagram under a kind of state of lacing film feed device provided in an embodiment of the present invention, wherein,
Substrate frame is in medial compartment；
Fig. 2 is the structural representation under Fig. 1 another kind states, wherein, substrate frame is in delivery chamber；
Fig. 3 is the structural representation under Fig. 1 another state, wherein, substrate frame is hung on middle rotating disk；
Fig. 4 is Fig. 1 mplifying structure schematic diagram；
Fig. 5 is the mplifying structure schematic diagram of substrate frame provided in an embodiment of the present invention；
Fig. 6 is the mplifying structure schematic diagram of hanger provided in an embodiment of the present invention；
Fig. 7 is the part-structure schematic diagram of lacing film feed device provided in an embodiment of the present invention.
Drawing reference numeral explanation：
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, not
For limiting the present invention.
Fig. 1 to Fig. 3 is referred to, the embodiment of the present invention provides a kind of lacing film feed device 100, for substrate to be sent into plated film
Machine 200, coating machine 200, which has, send piece mouth 201 and middle rotating disk 210, wherein, substrate can be the sheet material made of glass,
It can be used as the screen of mobile phone or the screen of tablet personal computer etc..
Refer to Fig. 1 to Fig. 5, the lacing film feed device 100 include substrate frame 110, delivery chamber 120, medial compartment 130 and
Vertical delivery mechanism 140.Substrate frame 110 for substrate adhere to, so, avoid subsequent job workpiece directly clamping or grasping substrate and
Substrate is caused situation about damaging occur；Substrate frame 110 includes pedestal base and the overhead kick being connected on the right side of pedestal base, wherein, fall
Hook for lodge in middle rotating disk 210.Delivery chamber 120 is located at the left side of coating machine 200 and with sending piece mouth 201 to connect, medial compartment 130
Connected with delivery chamber 120 and positioned at the lower section of delivery chamber 120, wherein, delivery chamber 120 and medial compartment 130 can be by stainless steel materials
Enclose to be formed.Vertical delivery mechanism 140 is used to from medial compartment 130 lift substrate frame 110 to delivery chamber 120 and from sending piece mouth
201 are delivered to middle rotating disk 210 so that the hanging support of substrate frame 110 is in middle rotating disk 210, and including intermediate connecting component 141, with
Between connection component 141 connect and for take substrate frame 110 hanger 142, for driving intermediate connecting component 141 to move up and down
Vertical drive component 143 and drive the side-to-side movement of intermediate connecting component 141 horizontal drive component 144.
Based on said structure design, during lacing film, first, middle connection is driven using vertical drive component 143
Component 141 moves downward, wherein, hanger 142 moves downward in the lump with intermediate connecting component 141, until hanger 142 reaches centre
Room 130, secondly, in medial compartment 130, hanger 142, which is taken, to be stained with the substrate frame 110 of substrate, and then, recycling is vertically passed
Mechanism 140 is sent to lift substrate frame 110 to delivery chamber 120 from medial compartment 130 and from sending piece mouth 201 to be delivered to middle rotating disk 210.
It can be achieved to hang it follows that need to only prevent from the substrate frame 110 for being stained with substrate taking for hanger 142 in medial compartment 130
Piece operation, lacing film operation is simplified, improve lacing film efficiency.
In addition, during piece is taken, reverse operating lacing film operation process.
Referring to Fig. 4, intermediate connecting component 141 includes self-locking mechanism 1411, drives fortune up and down by vertical drive component 143
Dynamic support base 1412 and it is slidably matched and is connected with hanger 142 and by horizontal drive group in left and right directions with support base 1412
Part 144 drives the body frame seat 1413 of side-to-side movement, and horizontal drive component 144 moves up and down in the lump with body frame seat 1413, from lock machine
Structure 1411 includes the first stopper 14111, the second stopper 14112 being connected with body frame seat 1413 and in its elastic restoring force
In the presence of drive the first stopper 14111 to be moved to the second stopper 14112 so that the first stopper 14111 and the second locking
Part 14112 is engaged by clamping so as to limit the first elastic component 14113 that support base 1412 and body frame seat 1413 horizontally slip, the first bullet
Property part 14113 hanger 142 and when sending piece mouth 201 be in the same horizontal position by for overcome its elastic restoring force outside
Power.Based on this structure design, when hanger 142 is not yet with sending piece mouth 201 to be in the same horizontal position, support base can be avoided
1412 and body frame seat 1413 slided in left and right directions.Specifically, when vertical drive component 143 drives support base 1412 downward
Motion or hanger 142 still with when sending the piece mouth 201 to be in the same horizontal position, the first elastic component 14113 is in its elastic restoring force
In the presence of drive the first stopper 14111 to be moved to the second stopper 14112 so that the first stopper 14111 and the second locking
Part 14112 is engaged by clamping to horizontally slip so as to limit support base 1412 and body frame seat 1413, now, the locking branch of self-locking mechanism 1411
The displacement of left and right directions between seat 1412 and body frame seat 1413 is supportted, and when hanger 142 and send piece mouth 201 to be in the same horizontal position
When, the first elastic component 14113 now, is relieved the lock of self-locking mechanism 1411 by the external force for overcoming its elastic restoring force
It is fixed.
In above-mentioned, it is slidably matched between support base 1412 and body frame seat 1413 by guide rail structure.In the embodiment of the present invention
In, support base 1412 is provided with the first straight line guide rail of left and right arrangement, and body frame seat 1413, which is provided with to slip with first straight line guide rail, to be coordinated
The first sliding block.
Referring to Fig. 4, support base 1412 opens up the guide hole of above-below direction insertion, the first stopper 14111 is provided with upward
Latch, the second stopper 14112 are provided with the neck being engaged by clamping with latch；Self-locking mechanism 1411 also includes through guide hole and with leading
The sliding guide rod 14114 coordinated in hole and the locating part 14115 for being connected to rod end on guide rod 14114, the first elastic component 14,113 1
End contradicts with the elasticity of locating part 14115, and the other end contradicts with the elasticity of support base 1412, and locating part 14115 is in hanger 142 and send piece
Mouth 201 contradicts top surface in delivery chamber 120 when being in the same horizontal position.So, without setting other structures part to overcome to produce
The external force of the elastic restoring force of first elastic component 14113.
Referring to Fig. 6, hanger 142 includes hanger body 1421 and is connected with hanger body 1421 and is formed towards right extension
Hanging support bar 1422, substrate frame 110 offers the hanging hole that left and right directions insertion sets and inserted for hanging support bar 1422.So, hang
Frame 142 can using hook take by the way of take substrate frame 110, be advantageous to simplify the structure of hanger 142.Based on this structure, hang
During piece, taken in hanger 142 to before substrate frame 110, after hanger 142 enters medial compartment 130, first make way for hanger
142 are located at the left side of substrate frame 110, then drive hanger 142 to move right by hanger auxiliary body 147 again, make hanging support bar
1422 insert hanging hole.
Further, referring to Fig. 6, hanger 142 include connection to be formed with the free end of hanging support bar 1422 and upwardly extending and
Depart from the spacing hook 1423 of hanging support bar 1422 for limiting substrate frame 110.So, by the setting of spacing hook 1423, be advantageous to
Avoid coming off from hanging support bar 1422 because rocking during mobile substrate frame 110.
Referring to Fig. 4, intermediate connecting component 141 includes being connected with hanger 142 and slided with body frame seat 1413 in left and right directions
Connecting seat 145, one end and the body frame seat 1413 of dynamic connection connect and the other end with connecting seat 145 and in the work of its elastic restoring force
There is the second elastic component 146 of trend for moving right with lower driving hanger 142 and for drive connection seat 145 to left movement
Hanger auxiliary body 147.Based on this structure design, when needing to drive hanger 142 to move right, hanging support bar 1422 is set to insert extension
Kong Shi, it can be completed to drive with hanger auxiliary body 147, be driven without horizontal drive component 144.
Specifically, hanger auxiliary body 147 includes the connection assist being connected with connecting seat 145 and aided in for driving
The auxiliary actuator of connector side-to-side movement.
Referring to Fig. 7, lacing film feed device 100, which includes being placed on front side of medial compartment 130, enters piece room 150, positioned at medial compartment
The slice room 160 of 130 rear sides, for delivering to medial compartment 130 and being delivered from medial compartment 130 substrate frame 110 from entering piece room 150
To the carrier loader 170 of slice room 160, carrier loader 170 is at least provided with one.
Further, lacing film feed device 100 include be used for separate into the first partitions of piece room 150 and medial compartment 130,
For will enter the first vavuum pump that piece room 150 vacuumizes, for separate the second partitions of slice room 160 and medial compartment 130 with
And the second vavuum pump for slice room 160 to be vacuumized.Because medial compartment 130 and delivery chamber 120 need vacuum environment, because
This, during lacing film, the first partitions was separated into piece room 150 and medial compartment 130 before this, and then the base that will be stained with substrate
Horse 110 is put into piece room 150, is then recycled the first vavuum pump to enter piece room 150 and is vacuumized, finally cancels the first partitions
To entering the cut-off between piece room 150 and medial compartment 130, and during bottom sheet, the second partitions separated the He of slice room 160 before this
Medial compartment 130, secondly slice room 160 is vacuumized using the second vavuum pump, then cancels the second partitions to the He of slice room 160
Cut-off between medial compartment 130.The substrate frame 110 for being stained with substrate is put into slice room 160 again, the second last partitions is to going out
Separated between piece room 160 and medial compartment 130, slice room 160 expose air take out substrate frame 110, complete substrate frame 110 from
Enter piece and the overall process for taking piece is arrived to vacuum coating, again.
The present invention also proposes a kind of optical coating apparatus, and the optical coating apparatus includes lacing film feed device 100, the lacing film
The concrete structure of feed device 100 is with reference to above-described embodiment, because this optical coating apparatus employs above-mentioned all embodiments
Whole technical schemes, therefore all beneficial effects caused by the same technical scheme with above-described embodiment, it is not another herein
One repeats.
These are only presently preferred embodiments of the present invention, be not intended to limit the invention, it is all the present invention spirit and
Any modification, equivalent substitution or improvement for being made within principle etc., should be included in the scope of the protection.
Claims (10)
1. a kind of lacing film feed device, for substrate to be sent into coating machine, the coating machine, which has, send piece mouth and middle rotating disk,
Characterized in that, the lacing film feed device include the substrate frame for substrate adhesion, on the left of the coating machine and with
The delivery chamber for sending piece mouth to connect, the medial compartment that connects and be located at below the delivery chamber with the delivery chamber and for general
The substrate frame lifts to the delivery chamber from the medial compartment and send piece mouth to be delivered to the middle rotating disk so that institute from described
Substrate frame hanging support is stated in the vertical delivery mechanism of the middle rotating disk, the substrate frame includes pedestal base and is connected to the base
Overhead kick on the right side of stand, the vertical delivery mechanism include intermediate connecting component, are connected and are used for the intermediate connecting component
The hanger for the substrate frame of taking, the vertical drive component for driving the intermediate connecting component up and down motion and driving institute
State the horizontal drive component of intermediate connecting component side-to-side movement.
2. lacing film feed device as claimed in claim 1, it is characterised in that the intermediate connecting component include self-locking mechanism,
By the vertical drive Component driver move up and down support base and with the support base left and right directions be slidably matched and with
The hanger connects and by the body frame seat of the horizontal drive Component driver side-to-side movement, and the horizontal drive component is with the master
Stand moves up and down in the lump, the self-locking mechanism include the first stopper, the second stopper for being connected with the body frame seat and
First stopper is driven to be moved to second stopper in the presence of its elastic restoring force so that first locking
Part and second stopper are engaged by clamping so as to limit the first elastic component that the support base and the body frame seat horizontally slip,
First elastic component the hanger with it is described send outlet for lantern slide in the same horizontal position when by for overcome its elasticity recover
The external force of power.
3. lacing film feed device as claimed in claim 2, it is characterised in that the support base opens up leading for above-below direction insertion
Hole, first stopper are provided with latch upward, and second stopper is provided with the neck being engaged by clamping with the latch；
The self-locking mechanism includes through the guide hole and slips the guide rod coordinated with the guide hole and be connected to the guide rod
The locating part of upper rod end, described first elastic component one end contradict with locating part elasticity, the other end and support base elasticity
Contradict, the locating part the hanger with it is described send outlet for lantern slide in the same horizontal position when contradict top surface in the delivery chamber.
4. lacing film feed device as claimed in claim 2, it is characterised in that the hanger include hanger body and with it is described
The hanging support bar that hanger body is connected and formed towards right extension, the substrate frame offer left and right directions insertion and set and supply the extension
Hold the hanging hole that bar is inserted.
5. lacing film feed device as claimed in claim 4, it is characterised in that the hanger includes connection and the hanging support bar certainly
By holding and upwardly extending the spacing hook for being formed and departing from the hanging support bar for limiting the substrate frame.
6. lacing film feed device as claimed in claim 4, it is characterised in that the intermediate connecting component includes and the hanger
Connect and the connecting seat that is slidably connected with the body frame seat in left and right directions, one end are connected and the other end and institute with the body frame seat
State connecting seat and driven in the presence of its elastic restoring force the hanger have the second elastic component of trend for moving right with
And for driving hanger auxiliary body of the connecting seat to left movement.
7. lacing film feed device as claimed in claim 6, it is characterised in that the hanger auxiliary body includes and the connection
The connection assist of seat connection and the auxiliary actuator for driving the connection assist side-to-side movement.
8. the lacing film feed device as any one of claim 1 to 7, it is characterised in that the lacing film feed device bag
Include be placed on front side of the medial compartment enter piece room, the slice room on rear side of the medial compartment, for by the substrate frame from institute
State and deliver to the medial compartment into piece room and delivered from the medial compartment to the carrier loader of the slice room, the carrier loader
At least provided with one.
9. lacing film feed device as claimed in claim 8, it is characterised in that the lacing film feed device includes being used to separate institute
State into the first partitions of piece room and the medial compartment, for by it is described enter piece room vacuumize the first vavuum pump, for separating
The second partitions and the second vavuum pump for the slice room to be vacuumized of the slice room and the medial compartment.
10. a kind of optical coating apparatus, it is characterised in that filled including lacing film feeding as claimed in any one of claims 1-9 wherein
Put.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710996947.6A CN107663625A (en) | 2017-10-20 | 2017-10-20 | Lacing film feed device and optical coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710996947.6A CN107663625A (en) | 2017-10-20 | 2017-10-20 | Lacing film feed device and optical coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107663625A true CN107663625A (en) | 2018-02-06 |
Family
ID=61098505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710996947.6A Pending CN107663625A (en) | 2017-10-20 | 2017-10-20 | Lacing film feed device and optical coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107663625A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108866504A (en) * | 2018-07-31 | 2018-11-23 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum coating equipment substrate frame conveyer system |
| CN110616407A (en) * | 2018-11-29 | 2019-12-27 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Loading and unloading device and magnetron sputtering coating equipment |
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| US3939056A (en) * | 1973-10-19 | 1976-02-17 | Sony Corporation | Coated plating rack |
| CN101243203A (en) * | 2005-07-12 | 2008-08-13 | 普莱克斯S.T.技术有限公司 | Fixture for use in a coating operation |
| CN202968687U (en) * | 2012-11-29 | 2013-06-05 | 肇庆市科润真空设备有限公司 | Sheet assembling and disassembling mechanism for rotary type continuous film-coating device |
| CN205774780U (en) * | 2016-06-30 | 2016-12-07 | 光驰科技(上海)有限公司 | Stacking-type Sputting film-plating apparatus |
| CN206328460U (en) * | 2016-12-27 | 2017-07-14 | 光驰科技(上海)有限公司 | A kind of charging crane of film plating substrate |
| CN207608618U (en) * | 2017-10-20 | 2018-07-13 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Lacing film feed device and optical coating apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3939056A (en) * | 1973-10-19 | 1976-02-17 | Sony Corporation | Coated plating rack |
| CN101243203A (en) * | 2005-07-12 | 2008-08-13 | 普莱克斯S.T.技术有限公司 | Fixture for use in a coating operation |
| CN202968687U (en) * | 2012-11-29 | 2013-06-05 | 肇庆市科润真空设备有限公司 | Sheet assembling and disassembling mechanism for rotary type continuous film-coating device |
| CN205774780U (en) * | 2016-06-30 | 2016-12-07 | 光驰科技(上海)有限公司 | Stacking-type Sputting film-plating apparatus |
| CN206328460U (en) * | 2016-12-27 | 2017-07-14 | 光驰科技(上海)有限公司 | A kind of charging crane of film plating substrate |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108866504A (en) * | 2018-07-31 | 2018-11-23 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum coating equipment substrate frame conveyer system |
| CN108866504B (en) * | 2018-07-31 | 2024-01-30 | 湖南玉丰真空科学技术有限公司 | Substrate frame conveying system of vacuum coating machine |
| CN110616407A (en) * | 2018-11-29 | 2019-12-27 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Loading and unloading device and magnetron sputtering coating equipment |
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