CN107658254A - 硅片烘干炉的硅片传送装置 - Google Patents

硅片烘干炉的硅片传送装置 Download PDF

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CN107658254A
CN107658254A CN201711088753.2A CN201711088753A CN107658254A CN 107658254 A CN107658254 A CN 107658254A CN 201711088753 A CN201711088753 A CN 201711088753A CN 107658254 A CN107658254 A CN 107658254A
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罗贤良
苏金财
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Dongguan Folungwin Automatic Equipment Co Ltd
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

本发明涉及太阳能电池硅片生产技术领域,尤其是涉及硅片烘干炉的硅片传送装置,该硅片传送装置基于链条传动构建,具有链条、链轮及组装在链条上并跟随链条移动的载具,载具上设有实现硅片侧立置放的U形槽,载具满足硅片的正面和背面受热烘干;链轮啮合链条,链轮安装在转动轴上。本发明实现硅片侧立输送,减少硅片与传送装置的接触面,传送到炉体的硅片输送烘干空间中,由炉体内的上加热装置和下加热装置同时对硅片的正面与背面加热烘干,缩短工艺时间,满足HIT太阳能光伏电池硅片生产,提升烘干效果及成品率。结构简单,组装使用简便,传送平稳、准确,有助于提升烘干效果,且上下料方便。

Description

硅片烘干炉的硅片传送装置
技术领域
本发明涉及太阳能电池硅片生产技术领域,尤其是涉及用于印刷导电浆的硅片烘干固化设备。
背景技术
HIT太阳能光伏电池是以光照射侧的p/i型a-Si膜和背面侧的i/n型a-Si膜夹住单结晶硅片来构成的。HIT太阳能光伏电池基板以硅基板为主,在硅基板上沉积高能隙的硅纳米薄膜,表层再沉积透明导电膜,背面设有背表面电场。通过优化硅的表面结构,可以降低透明导电氧化层和a-Si层的光学吸收损耗。
HIT太阳能光伏电池制备时,硅片表面印刷完导电浆后需要进行烘干,而传统烘干设备采用硅片平躺传送,以致硅片下侧面与传送带接触部分不易烘干,导致工艺时间长,烘干效果不佳,成品率低。
发明内容
本发明的目的在于克服现有技术缺陷,提供一种硅片烘干炉的硅片传送装置,实现硅片侧立置放传送,满足HIT太阳能光伏电池硅片生产,提升烘干效果及成品率。
为达到上述目的,本发明采用如下技术方案:
硅片烘干炉的硅片传送装置,该硅片传送装置基于链条传动构建,具有链条、链轮及组装在链条上并跟随链条移动的载具,载具上设有实现硅片侧立置放的U形槽,载具满足硅片的正面和背面受热烘干;链轮啮合链条,链轮安装在转动轴上。
上述方案进一步是:所述载具具有支撑立杆,该支撑立杆的下端固定在链条上;支撑立杆的上端支起底座,底座的上侧设有上凸的护杆,护杆与底座一起构造U形槽,底座具有镂空孔。
上述方案进一步是:所述链条上依节距分布载具,链条的传动节上设有安装平台,支撑立杆固定在安装平台上,支撑立杆与底座构成T形。
上述方案进一步是:所述链条的左右侧设有导轮。
上述方案进一步是:所述底座构成U形槽内底的上侧面相对水平方向做倾斜设计,倾斜角为锐角。
上述方案进一步是:所述转动轴上并列安装多个链轮,每个链轮啮合一条链条,致使硅片传送装置具有多条链条同步载料传送,且每条链条上的载具独立载料。
采用上述方案,本发明实现硅片侧立输送,减少硅片与传送装置mi的接触面,传送到炉体的硅片输送烘干空间中,由炉体内的上加热装置和下加热装置同时对硅片的正面与背面加热烘干,缩短工艺时间,满足HIT太阳能光伏电池硅片生产,提升烘干效果及成品率。
本发明再一优点是结构简单,组装使用简便,传送平稳、准确,有助于提升烘干效果,且上下料方便。
附图说明:
附图1为本发明的其一实施例结构示意图;
附图2为图1实施例的侧视图;
附图3为图1实施例的俯视图;
附图4为图1实施例的局部结构放大示意图;
附图5为图1实施例组装到硅片烘干炉的示意图。
具体实施方式:
以下将结合附图对本发明的构思、具体结构及产生的技术效果作进一步说明,以充分地了解本发明的目的、特征和效果。
参阅图1、2、3、4所示,为本发明较佳实施例示意图,本发明有关一种硅片烘干炉的硅片传送装置,该硅片传送装置基于链条传动构建,具有链条1、链轮2及组装在链条1上并跟随链条移动的载具3,载具3上设有实现硅片侧立置放的U形槽34,载具3满足硅片的正面和背面受热烘干;链轮2啮合链条1,链轮2安装在转动轴4上。使用时,硅片侧立置放在载具3的U形槽34中,转动轴4带动链轮2转动,链轮2则啮合带动链条1,载具3承载硅片跟随链条1移动,传送到炉体的硅片输送烘干空间中,由炉体内的上加热装置和下加热装置同时对硅片的正面与背面加热烘干。本发明实现硅片侧立输送,减少硅片与传送装置的接触面,缩短工艺时间,满足HIT太阳能光伏电池硅片生产,提升烘干效果及成品率。
图1、2、3、4所示,本实施例中,所述载具3具有支撑立杆31,该支撑立杆31的下端固定在链条1上;支撑立杆31的上端支起底座32,底座32的上侧设有上凸的护杆33,护杆33与底座32一起构造U形槽34,底座32具有镂空孔321。该结构实现U形槽34距离链条1一定高度,以便架起硅片,方便多角度加热硅片,底座32上设有镂空孔321,该镂空孔321有助于热量穿过辐射到硅片上,同时降低底座32重量,确保链条1传送平稳性,避免振动破坏硅片。图中实施例的护杆33呈篱笆桩设计,不同护杆33间隔设置,满足硅片倚靠及限位,护杆33的高度依据硅片大小及侧立角度设计。U形槽34方便硅片侧立置放,同时也方便硅片上下料操作,实现自动上下料,由此提升硅片烘干炉的可操作性及运行效率。
图1、2、3、4所示,本实施例中,所述链条1上依节距分布载具3,链条1的传动节上设有安装平台11,安装平台11通过链条传动节的一侧内折构成,保证链条1与链轮啮合传动,同时提供安装位。支撑立杆31固定在安装平台11上,支撑立杆31与底座32构成T形。该结构有效保证链条传动的重心,使链条1传送平稳、准确,使用寿命长,底座32横设在链条1上,且支撑立杆31居中支起,结构简单,确保平稳传送时,有助于多角度加热硅片,提升烘干效果及成品率。为进一步地提升工作效果,本实施例的链条1的左右侧设有导轮12,导轮12配合炉体相应的导槽移动,增加链条1传动平稳性及准确性,减少振动,有助于保护硅片传送。导轮12可为自转式滚轮或者圆柱体,在此不再一一作图。所述底座32构成U形槽34内底的上侧面相对水平方向做倾斜设计,倾斜角为锐角,底座32的上侧面倾斜,有助于硅片侧立,使硅片传送稳定,不会产生跳动,同时加大镂空孔321的广角,有助于热量穿过镂空孔321辐射到硅片上,提升烘干效果、效率及成品率。
图5所示,本实施例中,所述转动轴4上并列安装多个链轮2,每个链轮2啮合一条链条1,致使硅片传送装置具有多条链条1同步载料传送,且每条链条1上的载具3独立载料。将本发明组装到硅片烘干炉5上,链条1在炉体内部的硅片输送烘干空间中往复移动,而链条1两端回转部设为上下料,硅片输送烘干空间的上下侧分别设有上加热装置51和下加热装置52,上加热装置和下加热装置满足覆盖多条链条1同步载料传送要求。上加热装置具有向下辐射热量的上加热体及上风箱,上风箱循环向下吹风。下加热装置具有向上辐射热量的下加热体及下风箱,下风箱循环向上吹风。上加热体卧设在硅片上方且与硅片输送方向纵向垂直交叉设置;下加热体卧设在硅片下方且与上加热体非垂直交叉设置,下加热体31与上加热体21上下加热,同时对硅片6的正面与背面加热烘干,这样实现多条链条1同步载料传送,提升工作效率,且每条链条1上的载具3独立载料,载料平稳,提升烘干效果及成品率。
当然,以上虽然结合附图描述了本发明的较佳具体实施例,但本发明不应被限制于与以上的描述和附图完全相同的结构和操作,对本技术领域的技术人员来说,在不超出本发明构思和范围的情况下通过逻辑分析、推理或者有限的实验还可对上述实施例作出许多等效改进和变化,但这些改进和变化都应属于本发明要求保护的范围。

Claims (6)

1.硅片烘干炉的硅片传送装置,其特征在于:该硅片传送装置基于链条传动构建,具有链条(1)、链轮(2)及组装在链条(1)上并跟随链条移动的载具(3),载具(3)上设有实现硅片侧立置放的U形槽(34),载具(3)满足硅片的正面和背面受热烘干;链轮(2)啮合链条(1),链轮(2)安装在转动轴(4)上。
2.根据权利要求1所述的硅片烘干炉的硅片传送装置,其特征在于:所述载具(3)具有支撑立杆(31),该支撑立杆(31)的下端固定在链条(1)上;支撑立杆(31)的上端支起底座(32),底座(32)的上侧设有上凸的护杆(33),护杆(33)与底座(32)一起构造U形槽(34),底座(32)具有镂空孔(321)。
3.根据权利要求2所述的硅片烘干炉的硅片传送装置,其特征在于:所述链条(1)上依节距分布载具(3),链条(1)的传动节上设有安装平台(11),支撑立杆(31)固定在安装平台(11)上,支撑立杆(31)与底座(32)构成T形。
4.根据权利要求1或2或3所述的硅片烘干炉的硅片传送装置,其特征在于:所述链条(1)的左右侧设有导轮(12)。
5.根据权利要求2或3所述的硅片烘干炉的硅片传送装置,其特征在于:所述底座(32)构成U形槽(34)内底的上侧面相对水平方向做倾斜设计,倾斜角为锐角。
6.根据权利要求1所述的硅片烘干炉的硅片传送装置,其特征在于:所述转动轴(4)上并列安装多个链轮(2),每个链轮(2)啮合一条链条(1),致使硅片传送装置具有多条链条(1)同步载料传送,且每条链条(1)上的载具(3)独立载料。
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