CN107576285B - Laser mixes micro angle measurement system and measurement method certainly - Google Patents
Laser mixes micro angle measurement system and measurement method certainly Download PDFInfo
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- CN107576285B CN107576285B CN201710948553.3A CN201710948553A CN107576285B CN 107576285 B CN107576285 B CN 107576285B CN 201710948553 A CN201710948553 A CN 201710948553A CN 107576285 B CN107576285 B CN 107576285B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The present invention relates to optical profile type technical field of angle detection, more particularly to a kind of laser mixes micro angle measurement system and measurement method certainly, the measuring system includes the first turntable, second turntable, T-type transmission bracket, first intersecting plane mirror, second intersecting plane mirror, orthogonal reflecting mirror, third reflecting mirror, reflecting mirror transmission bracket, laser, beam splitter, photodetector and computer, the first intersecting plane mirror, it is orthogonal plane mirror with the second intersecting plane mirror, the measuring system passes through the first intersecting plane mirror, first reflecting mirror, second reflecting mirror, the reflector element that second intersecting plane mirror and third reflecting mirror are constituted, extend external cavity path of the laser from mixed signal, the reflector element that the reflector element or right-angle prism constituted compared to conventional planar mirror is constituted, under same rotational angle, rotation front and back, laser is certainly The optical path difference of mixed signal becomes larger, to improve the measurement range and Measurement Resolution of system.
Description
Technical field
The present invention relates to optical profile type technical field of angle detection more particularly to a kind of laser based on intersection mirror are micro- from mixing
Angle measurement system and measurement method.
Background technique
Important component of the angle measurement technique as measurement technology, with the continuous development of science and technology, angle are surveyed
Amount technology has been widely used in the technical fields such as optical, mechanical and electronic integration, aerospace, military and national defense.
In angle measurement technique, three classes are broadly divided into according to measuring principle: mechanical angle measuring technique, electromagnetic type angle
Measuring technique and optical profile type angle measurement technique are spent, wherein mechanical angle measuring technique and the research of electromagnetic type angle measurement technique
Earliest, mechanical angle measuring technique is using end tooth indexing as representative, and electromagnetic type angle measurement technique is then to justify magnetic grid survey for starting
Angle technology and inductosyn angle measurement technique are representative.Either mechanical angle measuring technique or electromagnetic type angle measurement skill
Art, which exists, needs manual operations and contact measurement, is unfavorable for the shortcomings that realizing angle measurement automation.It is surveyed with mechanical angle
Amount technology is compared with electromagnetic type angle measurement technique, optical profile type angle measurement technique then have non-cpntact measurement, measurement accuracy it is high,
The advantages that Measurement Resolution is high.
Current optical profile type angle measurement technique both domestic and external, is broadly divided into according to the difference of its measuring principle: Circular gratings method,
Loop laser method, optical internal-reflection method, autocollimation method, laser interferance method etc..
Optical internal-reflection method is passed through using the relationship under the conditions of full transmitting between incidence angle variation and reflective light intensity variation
Measurement reflective light intensity changes to measure the variation of incidence angle；Autocollimation method is using optical autocollimating principle, by testee
Upper launch environment rotation angle is transformed into the variation of the line amount on autocollimator receiver, is measured indirectly by measurement line amount variation
The variation of reflecting surface minute angle, both methods are all based on angle change and cause the testing principle for receiving light intensity variation, easily
It is limited by detector receiving surface size and electronic fine-grained digit, not can guarantee higher resolution ratio and biggish angle measurement
Range.
Laser interferance method is to cause phase change using angle change, then carry out angle measurement by phase-detection mechanism,
Typical laser interferance method is the basic principle based on Michelson's interferometer, indicates angle by the variation of dual-beam optical path difference
Variable quantity, eventually by observation interference fringe, obtain angle to be measured.Although the angle measurement side based on double light beam laser interference
Compared with the angle measurement method based on measurement light intensity variation, measurement accuracy and measurement range improve to some extent method,
But its measuring device structure is relatively complicated, increases the volume and cost of system, while being also difficult to reality in actual measurement
Existing optical path auto-collimation.
In recent years, angle measurement technique is increasingly becoming from the laser interference angle measurement technique of mixing principle based on laser
Research hotspot.Relative to traditional double laser beams interferometry angle measurement technique, surveyed based on laser from the angle of mixing principle
Amount technology because its single light path design, auto-collimation, the advantages that be increasingly becoming the important research direction of laser interference angle measurement technique.
Domestic and international multiple research groups have designed and have attempted a variety of micro angle measurement schemes based on laser from mixing principle, and obtain
Obtained preliminary experimental result.2008, clock Buddha's warrior attendant of Ji'nan University et al. utilized the method design studies of rotating mirror
One micro angle measurement system, plane mirror can generate the variation of angle during rotating with turntable, and then exocoel length is caused to change
Become, the angle of rotation of turntable can be obtained by the laser self-mixing interference signal combination Fringe-counting method that measurement feedback light is formed
Degree, measurable angle range are ± 2.41 '.
From the studies above scheme can be seen that it is existing at present based on laser from the angle measurement unit of mixing principle still
It rests on simply using plane mirror, there is stringent limitation to laser beam incoming position, while in rotary course, feedback light
Intensity also generates fluctuation with angle change, further affects the signal-to-noise ratio of measured signal, significantly reduces the measurement model of system
It encloses and resolution ratio.There are also the technical solutions disclosed in some documents using single reflecting prism, although its not stimulated light incidence position
The limitation set, but measurement range is still limited by rotation angle, when rotation angle is spent it is big when cause light that can not be detected, while still
So there is a problem of that resolution ratio is lower.
Summary of the invention
For the problems of the prior art, the present invention provide it is a kind of effectively overcome it is existing based on laser from mixing principle
The problems of angle measurement method, can be realized under conditions of high-resolution polarizers of big angle scope measurement based on intersection mirror
Laser from mixing micro angle measurement system and measurement method.
To realize the above technical purpose, the first technical solution of the invention is:
A kind of laser mixing micro angle measurement system, including the first turntable, the second turntable, T-type transmission bracket, the first phase certainly
Hand over plane mirror, the second intersecting plane mirror, orthogonal reflecting mirror, third reflecting mirror, reflecting mirror transmission bracket, laser, beam splitter, light
Electric explorer and computer；
First turntable and the second turntable are rotated synchronously by T-type transmission bracket；
The T-type transmission bracket includes horizontally disposed and orthogonal first drive rod and support rod, and described first passes
Lever both ends are connected separately with the first connecting column and the second connecting column, the first connection column bottom and the second connection column bottom point
Not Tong Guo bearing be set to the first turntable and the second turntable on, first drive rod is parallel to the first turntable center of circle and the second turntable
The connecting line in the center of circle is connected on the second connecting column in the middle part of the support rod；
The first intersecting plane mirror includes the first plane mirror and the second plane mirror, the side of first plane mirror and the
The side of two plane mirrors is connected and the angle of the first plane mirror mirror surface and the second plane mirror mirror surface is 90 °；
The second intersecting plane mirror includes third plane mirror and fourth plane mirror, the side of the third plane mirror and the
The side of four plane mirrors is connected and the angle of third plane mirror mirror surface and fourth plane mirror mirror surface is 90 °；
The connection on the connection side and the third plane mirror and fourth plane mirror of first plane mirror and the second plane mirror
Side is connected with the both ends lower half of support rod respectively, and the angle of the angle of the first plane mirror mirror surface and the second plane mirror mirror surface is flat
Separated time and third plane mirror mirror surface and the angular bisector of the angle of fourth plane mirror mirror surface are vertical with support rod, and described first is flat
Face mirror, the second plane mirror, third plane mirror and fourth plane mirror mirror surface deviate from the first drive rod；
The orthogonal reflecting mirror includes the first reflecting mirror and the second reflecting mirror, and the side of first reflecting mirror is anti-with second
The side for penetrating mirror is connected and the angle of the first mirror mirror and the second mirror mirror is 90 °, the orthogonal reflecting mirror angle
Angular bisector be located along the same line with the first drive rod；
The reflecting mirror transmission bracket includes symmetrically arranged second drive rod and third drive rod, second drive rod
One end bottom be connected to support rod one end upper half, one end bottom of the third drive rod is connected on the support rod other end
The other end of half portion, second drive rod is connected with the other end of third drive rod and the bottom of the two junction is connected to
The top of one reflecting mirror and the second reflecting mirror junction；
The third reflecting mirror is set in front of fourth plane mirror and the angle of the two mirror surface is 45 °；
On the laser emitting laser beam to the first plane mirror and the angle of laser beam and the first plane mirror mirror surface
It is 45 °；
The beam splitter is set between laser and the first plane mirror, is used for laser beam beam splitting to photodetector
On；
The photodetector is sent to computer after converting electric signal for the laser signal received；
The computer carries out processing analysis to the electric signal received, obtains the rotational angle of the first tested turntable.
Micro angle measurement method based on above-mentioned measuring system, step include:
A. the setting based on T-type transmission bracket enables the first turntable and the second turntable to rotate synchronously, when any one
When turntable rotates, T-type transmission bracket drives another turntable to rotate synchronously, and then drives the first intersecting plane mirror and the second phase
Plane mirror is handed over to move horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. laser emitting laser beam and the first plane mirror is incident on 45° angle, is reflected into first through the second plane mirror
Reflecting mirror；
B. laser beam is reflected into after the second reflecting mirror and is reflected into third plane mirror by the second reflecting mirror by the first reflecting mirror,
Be incident on third plane mirror laser beam direction is identical as laser emitting laser beam direction and folder with third plane mirror
Angle is 45 °；
C. laser beam is incident on after orthogonal third plane mirror and fourth plane mirror successively reflect with 90 ° of angles
Three reflecting mirrors, the laser beam direction for being incident on third reflecting mirror are contrary with laser emitting laser beam；
D. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber
It is interior, laser is formed from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable using laser self-mixing interference principle and rotates
The external cavity path of front and back laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle
Obtain the rotational angle of turntable.
From the above, it can be seen that the measuring system and its measurement method have following advantages: (1) laser beam is incident
When to the first intersecting plane mirror, it is first incident on first plane mirror in outside, i.e., using outer incident form, with traditional difference interference
System is compared, and system structure is simpler；(2) pass through the first intersecting plane mirror, the first reflecting mirror, the second reflecting mirror, the second phase
The reflector element for handing over plane mirror and third reflecting mirror to constitute, not only realize laser from the auto-collimation of mixed signal and also compared to
The reflector element that the reflector element or right-angle prism that conventional planar mirror is constituted are constituted, under same rotational angle, rotation front and back,
Laser becomes larger from the optical path difference of mixed signal, to improve the Measurement Resolution and measurement range of system.
To realize the above technical purpose, second of technical solution of the invention is:
A kind of laser mixing micro angle measurement system, including the first turntable, the second turntable, T-type transmission bracket, the first phase certainly
Hand over plane mirror, the second intersecting plane mirror, the first reflecting mirror, the second reflecting mirror, third reflecting mirror, the second drive rod, third transmission
Bar, laser, beam splitter, photodetector and computer；
First turntable and the second turntable are rotated synchronously by T-type transmission bracket；
The T-type transmission bracket includes horizontally disposed and orthogonal first drive rod and support rod, and described first passes
Lever both ends are connected separately with the first connecting column and the second connecting column, the first connection column bottom and the second connection column bottom point
Not Tong Guo bearing be set to the first turntable and the second turntable on, first drive rod is parallel to the first turntable center of circle and the second turntable
The connecting line in the center of circle is connected on the second connecting column in the middle part of the support rod；
The first intersecting plane mirror includes the first plane mirror and the second plane mirror, the side of first plane mirror and the
The side of two plane mirrors is connected and the angle of the first plane mirror mirror surface and the second plane mirror mirror surface is 90 °；
The second intersecting plane mirror includes third plane mirror and fourth plane mirror, the side of the third plane mirror and the
The side of four plane mirrors is connected and the angle of third plane mirror mirror surface and fourth plane mirror mirror surface is 90 °；
The connection on the connection side and the third plane mirror and fourth plane mirror of first plane mirror and the second plane mirror
Side is connected with the both ends of support rod respectively, the angular bisector of the angle of the first plane mirror mirror surface and the second plane mirror mirror surface and
Third plane mirror mirror surface and the angular bisector of the angle of fourth plane mirror mirror surface are vertical with support rod, first plane mirror,
The mirror surface of second plane mirror, third plane mirror and fourth plane mirror deviates from the first drive rod；
First reflecting mirror is set in front of the first plane mirror and the angle of the two mirror surface is 90 °, first reflecting mirror
It is fixedly connected by the second drive rod with the first plane mirror；
Second reflecting mirror is set in front of fourth plane mirror and the angle of the two mirror surface is 90 °, second reflecting mirror
It is fixedly connected by third drive rod with fourth plane mirror；
The third reflecting mirror is set in front of third plane mirror and the angle of the two mirror surface is 45 °；
On the laser emitting laser beam to the second plane mirror and the angle of laser beam and the second plane mirror mirror surface
It is 45 °；
The beam splitter is set between laser and the second plane mirror, is used for laser beam beam splitting to photodetector
On；
The photodetector converts electric signal for the laser signal received and is sent to computer；
The computer carries out the rotational angle that processing analysis obtains the first tested turntable to the electric signal received.
Micro angle measurement method based on above-mentioned measuring system, step include:
A. the setting based on T-type transmission bracket enables the first turntable and the second turntable to rotate synchronously, when any one
When turntable rotates, T-type transmission bracket drives another turntable to rotate synchronously, and then drives the first intersecting plane mirror and the second phase
Plane mirror is handed over to move horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. laser emitting laser beam and the second plane mirror is incident on 45° angle, is reflected into first through the first plane mirror
Reflecting mirror；
B. laser beam is reflected into after the second reflecting mirror and is reflected into fourth plane mirror by the second reflecting mirror by the first reflecting mirror,
Be incident on fourth plane mirror laser beam direction is identical as laser emitting laser beam direction and folder with fourth plane mirror
Angle is 45 °；
C. laser beam is incident on after orthogonal fourth plane mirror and third plane mirror successively reflect with 90 ° of angles
Three reflecting mirrors, the laser beam direction for being incident on third reflecting mirror are contrary with laser emitting laser beam；
D. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber
It is interior, laser is formed from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable using laser self-mixing interference principle and rotates
The external cavity path of front and back laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle
Obtain the rotational angle of turntable.
From the above, it can be seen that the measuring system and its measurement method have following advantages: (1) laser beam is incident
When to the first intersecting plane mirror, it is first incident on the second plane mirror of inside, i.e., using interior incident form, so that measuring system is whole
It is compact-sized；(2) pass through the first orthogonal plane mirror, the first reflecting mirror, the second reflecting mirror, the second orthogonal plane mirror and third reflection
It is from the auto-collimation of mixed signal but also anti-compared to what conventional planar mirror was constituted not only to realize laser for the reflector element that mirror is constituted
The reflector element that unit or right-angle prism are constituted is penetrated, under same rotational angle, rotation front and back, light of the laser from mixed signal
Path difference becomes larger, to improve the Measurement Resolution and measurement range of system；(3) measuring system linkage is simple, is easy to real
It is existing；Two external mirrors separately link and can be controlled separately, and not only reduce machining error, and optical path is made to be easier to collimate.
To realize the above technical purpose, the third technical solution of the invention is:
A kind of laser is from mixing micro angle measurement system, it is characterised in that: including the first turntable, the second turntable, drive rod,
Intersecting plane mirror, reflecting mirror, laser, beam splitter, photodetector and computer；First turntable and the second turntable pass through
Drive rod rotates synchronously；Drive rod both ends end is connected separately with the first connecting column and the second connecting column, and described first connects
It connects column bottom and the second connection column bottom and passes through bearing respectively on the first turntable and the second turntable, the drive rod is parallel to
The connecting line in the first turntable center of circle and the second turntable center of circle；The intersecting plane mirror includes the first opposite plane mirror of mirror surface and the
The side of two plane mirrors, first plane mirror is connected with the side of the second plane mirror and the connection side of the two is connected to the second company
It connects on column, the mirror surface of first plane mirror and the second plane mirror deviates from drive rod, the first plane mirror mirror surface and second
The angular bisector of the angle of plane mirror mirror surface is located along the same line with drive rod, the first plane mirror mirror surface and the second plane
The angle of mirror mirror surface is denoted as α, the value range of α are as follows: 0 ° < α < 180 °；The reflecting mirror is set on the outside of the second plane mirror and mirror surface
It is equal to the angle of the first plane mirror mirror surfaceOn the laser emitting laser beam to the second plane mirror, laser emitting
Laser beam with by the second plane mirror reflection after laser beam formed angle be equal to α, laser emitting laser beam with
The angle of mirror mirror is equal toThe beam splitter is set between laser and the second plane mirror, is used for laser light
In beam beam splitting to photodetector；The photodetector converts electric signal for the laser signal received and is sent to calculating
Machine；The computer carries out the rotational angle that processing analysis obtains the first tested turntable to the electric signal received.
Micro angle measurement method based on above-mentioned measuring system, step include:
A. the setting based on drive rod enables the first turntable and the second turntable to rotate synchronously, when any one turntable turns
When dynamic, drive rod drives another turntable to rotate synchronously, and then intersecting plane mirror is driven to move horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. it on laser emitting laser beam to the second plane mirror, is then reflected on the first plane mirror, is re-reflected into anti-
It penetrates on mirror；
B. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber
It is interior, laser is formed from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable using laser self-mixing interference principle and rotates
The external cavity path of front and back laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle
Obtain the rotational angle of turntable.
From the above, it can be seen that the measuring system and its measurement method have following advantages: (1) laser beam is incident
When to intersecting plane mirror, it is first incident on the second plane mirror of inside, i.e., using interior incident form, so that measuring system overall structure
It is compact；(2) reflector element being made up of intersecting plane mirror and reflecting mirror, not only realizes auto-collimation of the laser from mixed signal
And compared to the conventional planar mirror reflector element constituted or the reflector element of right-angle prism composition, in same rotational angle
Under, rotation front and back, laser becomes larger from the optical path difference of mixed signal, to improve the Measurement Resolution and measurement range of system；
(3) measuring system overall structure simply easily realizes that machine error is small, and the included angle of the first plane mirror and the second plane mirror can
It adjusts, different angle corresponds to different systematic survey resolution ratio, can select included angle according to actual needs.
As an improvement, further including driving belt, the driving belt is socketed on the first turntable and the second turntable；Utilize biography
Dynamic belt is further ensured that the synchronization of the first turntable and the second turntable.
As an improvement, being additionally provided with optical attenuator between the laser and beam splitter；Laser is adjusted using optical attenuator
Received feedback light light intensity prevents feedback light too strong or more than laser damaging thresholding.
Preferably, the laser is semiconductor laser, He-Ne laser, micro-slice laser or optical-fiber laser
Device.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment of the present invention 1；
Fig. 2 is the structural schematic diagram of the embodiment of the present invention 1；
Fig. 3 is single orthogonal plane mirror light channel structure schematic diagram in the embodiment of the present invention 1；
Fig. 4 is two orthogonal planes mirror light channel structure schematic diagram in the embodiment of the present invention 1；
Fig. 5 is three mirror cavity model schematic；
Fig. 6 is the structural schematic diagram of the embodiment of the present invention 2；
Fig. 7 is the structural schematic diagram of the embodiment of the present invention 2；
Fig. 8 is single orthogonal plane mirror light channel structure schematic diagram in the embodiment of the present invention 2；
Fig. 9 is two orthogonal planes mirror light channel structure schematic diagram in the embodiment of the present invention 2；
Figure 10 is the structural schematic diagram of the embodiment of the present invention 3；
Figure 11 is the structural schematic diagram of the embodiment of the present invention 3；
Figure 12 is any angle intersecting plane mirror light channel structure schematic diagram of the embodiment of the present invention 3.
Specific embodiment
In conjunction with Fig. 1 to Fig. 5, the embodiment 1 that the present invention will be described in detail, but any limit is not done to claim of the invention
It is fixed.
As shown in Figure 1, a kind of laser is from mixing micro angle measurement system, including arranged side by side the first turntable 101 and the
Two turntables 102, T-type transmission bracket 103, the first intersecting plane mirror 104, the second intersecting plane mirror 105, orthogonal reflecting mirror 106,
Third reflecting mirror 107, reflecting mirror transmission bracket 108, laser 109, beam splitter 110, photodetector 111 and computer 112；
First turntable 101 and the second turntable 102 are rotated synchronously by T-type transmission bracket 103；T-type transmission bracket 103 includes
Horizontally disposed and orthogonal first drive rod 1031 and support rod 1032,1031 both ends of the first drive rod are connected separately with
First connecting column 113 and the second connecting column 114,113 bottom of the first connecting column and 114 bottom of the second connecting column pass through bearing respectively
On the first turntable 101 and the second turntable 102, the first drive rod 1031 is parallel to 101 center of circle of the first turntable and the second turntable
The connecting line in 102 centers of circle, the middle part of support rod 1032 are connected on the second connecting column 114；First intersecting plane mirror 104 includes
First plane mirror 1041 and the second plane mirror 1042, the side of the first plane mirror 1041 are connected with the side of the second plane mirror 1042
And the angle of 1041 mirror surface of 1041 mirror surface of the first plane mirror and the second plane mirror is 90 °；Second intersecting plane mirror 105 includes the
The side of three plane mirrors 1051 and fourth plane mirror 1052, third plane mirror 1051 be connected with the side of fourth plane mirror 1052 and
The angle of 1051 mirror surface of third plane mirror and 1052 mirror surface of fourth plane mirror is 90 °；First plane mirror 1041 and the second plane mirror
1042 connection while and third plane mirror 1051 and fourth plane mirror 1052 connection while respectively and under the both ends of support rod 1032
Half portion is connected, the angular bisector and third plane mirror of 1042 mirror surface angle of 1041 mirror surface of the first plane mirror and the second plane mirror
1051 mirror surfaces and the angular bisector of the angle of 1052 mirror surface of fourth plane mirror are vertical with support rod 1032, the first plane mirror
1041, the mirror surface of the second plane mirror 1042, third plane mirror 1051 and fourth plane mirror 1052 deviates from the first drive rod
1031；Orthogonal reflecting mirror 106 include the first reflecting mirror 1061 and the second reflecting mirror 1062, the side of the first reflecting mirror 1061 with
The side of second reflecting mirror 62 is connected and the angle of 1062 mirror surface of 1061 mirror surface of the first reflecting mirror and the second reflecting mirror is 90 °, should
The angular bisector of angle is located along the same line with the first drive rod 1031；Reflecting mirror transmission bracket 108 includes symmetrically arranged
Second drive rod 1081 and third drive rod 1082, one end bottom of the second drive rod 1081 are connected on 1032 one end of support rod
Half portion, one end bottom of third drive rod 1082 are connected to 1032 other end upper half of support rod, the second drive rod 1081 it is another
One end is connected with the other end of third drive rod 1082 and the bottom of the two junction is connected to the first reflecting mirror 1061 and second
The top of 1062 junction of reflecting mirror；Third reflecting mirror 107 is set to 1052 front of fourth plane mirror and the angle of the two mirror surface is
45°；On 109 outgoing laser beams of laser to the first plane mirror 1041 and the folder of 1041 mirror surface of laser beam and the first plane mirror
Angle is 45 °；Beam splitter 110 is set between laser 109 and the first plane mirror 1041, is used for laser beam beam splitting to photoelectricity
On detector 111；Photodetector 111 converts electric signal for the laser signal received and is sent to computer 112；It calculates
Machine 112 carries out the rotational angle that processing analysis obtains the first tested turntable to the electric signal received.
Micro angle measurement method based on above-mentioned measuring system, step include:
A. the setting based on T-type transmission bracket enables the first turntable and the second turntable to rotate synchronously, when any one
When turntable rotates, T-type transmission bracket drives another turntable to rotate synchronously, and then drives the first intersecting plane mirror and the second phase
Plane mirror is handed over to move horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. laser emitting laser beam and the first plane mirror is incident on 45° angle, is reflected into first through the second plane mirror
Reflecting mirror；
B. laser beam is reflected into after the second reflecting mirror and is reflected into third plane mirror by the second reflecting mirror by the first reflecting mirror,
Be incident on third plane mirror laser beam direction is identical as laser emitting laser beam direction and folder with third plane mirror
Angle is 45 °；
C. laser beam is incident on after orthogonal third plane mirror and fourth plane mirror successively reflect with 90 ° of angles
Three reflecting mirrors, the laser beam direction for being incident on third reflecting mirror are contrary with laser emitting laser beam；
D. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber
It is interior, laser is formed from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable using laser self-mixing interference principle and rotates
The external cavity path of front and back laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle
Obtain the rotational angle of turntable.
Wherein, the theory that analytic process foundation is handled in step E is as follows:
As shown in Fig. 2, initial position P1P2(the first intersecting plane vertex point P1With the second intersecting plane vertex point P2Company
Line) it is parallel with y-axis, when the first turntable rotation angle is θSecond turntable 2 will rotate equal angular, T
Type transmission bracket is parallel with x-axis always to guarantee that the first intersecting plane mirror and the second intersecting plane mirror do not occur partially in vertical direction
It moves, translation is only generated in the face xy.After rotation, the first plane mirror and the second plane mirror and third plane mirror and fourth plane mirror are equal
It keeps mutually orthogonal, and shifts, laser 1 issues laser by A point, and in entire rotary course, and 1 position of laser is begun
It is maintained at A point eventually, light is from H point along backtracking after multiple plane mirror and reflecting mirror reflection, wherein the first turntable and the
The radius of two turntables is R.Wherein the first intersecting plane mirror and the second intersecting plane mirror be since angle is 90 degree, therefore is orthogonal
Plane mirror.
It is its change in optical path length of theoretical calculation based on the above micro angle measurement system with two orthogonal planes mirror, simplifies real
Experiment device establishes the structure chart of single orthogonal plane mirror as shown in Figure 3.
As shown in figure 3, orthogonal plane vertex point V1V is reached after rotation2, original optical path AB1C1D1Become AB2C2D2, pass through geometry
It is as follows that relationship can derive optical path difference:
Optical path difference caused by angle change may be expressed as:
It therefore, can as shown in Fig. 4 for the micro angle measurement system described in the present embodiment with two orthogonal planes mirror
Calculate its optical path difference are as follows:
When feedback light light path one wavelength of every change, laser changes a striped from hybrid waveform, can obtain:
Δ L=4R (2cos θ -2sin θ -1)=N λ (4)
In formula (3), N is fringe number.
In conjunction with laser from application of mixture theory, as shown in figure 5, n0It is effective folding in signal light-wave strong point laser works substance
Penetrate rate, r1And r2It is two end face M of laser1And M2Electric field amplitude reflection coefficient, feed back object end face M3Electric field amplitude it is anti-
Penetrating coefficient is r3, d represents cavity length, LextFor external cavity length, thus, the initial electric field E in laser cavity0(t) by round-trip
Electric field E (t) after primary can be indicated are as follows:
V is the frequency of light wave, R in formula (5)2Indicate laser rear end face M2Reflectivity, wherein R2=| r2|2, r2
For reflection coefficient, c is the light velocity in vacuum, and g indicates linear gain of the gain media of the unit length of laser to signal light, and γ is
The total losses of unit distance signal light in laser cavity.The output of laser can be further obtained according to steady laser oscillating condition
Power is as follows with the expression formula of angle change:
In formula (6), ζ is the index of modulation, and λ is optical maser wavelength, P0The output intensity of laser, L when being unglazed feedback0Table
Show initial external cavity length.
It can be seen that compared with conventional laser is from mixing angle measurement method, described in the present embodiment from above-mentioned derivation process
The outer incident type laser of two orthogonal planes mirror it is unrestricted from mixing micro angle measurement system and measurement method, angle measurement range
And systemic resolution is higher.
From the above, it can be seen that the present embodiment has following advantages: (1) laser beam is incident on the first intersecting plane
When mirror, it is first incident on first plane mirror in outside, i.e., using outer incident form, compared with traditional Heterodyne Interferometer System Based, system
Structure is simpler；(2) pass through the first intersecting plane mirror, the first reflecting mirror, the second reflecting mirror, the second intersecting plane mirror and third
The reflector element that reflecting mirror is constituted not only realizes laser and constitutes from the auto-collimation of mixed signal but also compared to conventional planar mirror
Reflector element or the reflector element that constitutes of right-angle prism, under same rotational angle, rotation front and back, laser is from mixed signal
Optical path difference become larger, to improve the Measurement Resolution and measurement range of system.
Measuring system described in the present embodiment can also do following improvement:
(1) measuring system further includes driving belt 115, and driving belt is socketed in the first turntable and second and walks around on disk, from
And the synchronization degree of the first turntable and the second turntable is further increased, improve the accuracy of measurement result.
(2) optical attenuator 116 is had additional between laser and beam splitter, is adjusted laser using optical attenuator 116 and is connect
The feedback light light intensity of receipts, prevent feedback light too strong or be more than laser damaging thresholding, to be further ensured that the standard of measurement result
True property, optical attenuator can be using the optical attenuators of the types such as displacement type attenuator, decaying flap attenuator.
(3) laser type in this system is not limited, and can be swashed for semiconductor laser, He-Ne laser, microplate
The multiple types such as light device or optical fiber laser can voluntarily be selected according to application demand.
In conjunction with Fig. 5 to Fig. 9, the embodiment 2 that the present invention will be described in detail, but any limit is not done to claim of the invention
It is fixed.
As shown in fig. 6, a kind of laser mixing micro angle measurement system, including the first turntable 201, the second turntable 202, T certainly
Type transmission bracket 203, the first intersecting plane mirror 204, the second intersecting plane mirror 205, the first reflecting mirror 206, the second reflecting mirror
207, third reflecting mirror 208, the second drive rod 209, third drive rod 210, laser 211, beam splitter 212, photodetector
213 and computer 214；
First turntable 201 and the second turntable 202 are rotated synchronously by T-type transmission bracket 203；T-type transmission bracket 203 includes
Horizontally disposed and orthogonal first drive rod 2031 and support rod 2032,2031 both ends of drive rod are connected separately with first
Connecting column 215 and the second connecting column 216,216 bottom of the first connecting column and 216 bottom of the second connecting column are set to by bearing respectively
On first turntable 201 and the second turntable 202, the first drive rod 2031 is parallel to 201 center of circle of the first turntable and the second turntable 202
The connecting line in the center of circle, the middle part of support rod 2032 are connected on the second connecting column 216；First intersecting plane mirror 204 includes first
Plane mirror 2041 and the second plane mirror 2042, the side of the first plane mirror 2041 are connected and with the side of the second plane mirror 2042
The angle of one plane mirror mirror, 2041 face and 2042 mirror surface of the second plane mirror is 90 °；Second intersecting plane mirror 205 includes third plane
The side of mirror 2051 and fourth plane mirror 2052, third plane mirror 2051 is connected with the side of fourth plane mirror 2052 and third
The angle of 2051 mirror surface of plane mirror and 2052 mirror surface of fourth plane mirror is 90 °；First plane mirror 2041 and the second plane mirror 2042
Connection while and the third plane mirror 2051 and fourth plane mirror 2052 connection while respectively with the both ends phase of support rod 2032
Even, the angular bisector and 2051 mirror surface of third plane mirror of 2042 mirror surface angle of 2041 mirror surface of the first plane mirror and the second plane mirror and
The angular bisector of the angle of 2052 mirror surface of fourth plane mirror is vertical with support rod 2032, the first plane mirror 2041, the second plane
The mirror surface of mirror 2042, third plane mirror 2051 and fourth plane mirror 2052 deviates from the first drive rod 2031；First reflecting mirror
206 angle set on 2041 front of the first plane mirror and the two mirror surface is 90 °, and the first reflecting mirror 206 passes through the second drive rod
209 are fixedly connected with the first plane mirror 2041；Second reflecting mirror 207 is set to the folder of 2052 front of fourth plane mirror and the two mirror surface
Angle is 90 °, and the second reflecting mirror 207 is fixedly connected by third drive rod 210 with fourth plane mirror 2052；Third reflecting mirror 208
Angle set on 2051 front of third plane mirror and the two mirror surface is 45 °；211 outgoing laser beams of laser are to the second plane mirror
On 2042 and the angle of 2042 mirror surface of laser beam and the second plane mirror is 45 °；Beam splitter 212 is set to laser 211 and second
Between plane mirror 2042, it is used for laser beam beam splitting to photodetector 213；Photodetector 213 swashs what is received
Optical signal is converted into electric signal and is sent to computer 214；Computer 214 carries out processing analysis to the electric signal received and obtains
The rotational angle of the first tested turntable.
Micro angle measurement method based on above-mentioned measuring system, step include:
A. the setting based on T-type transmission bracket enables the first turntable and the second turntable to rotate synchronously, when any one
When turntable rotates, T-type transmission bracket drives another turntable to rotate synchronously, and then drives the first intersecting plane mirror and the second phase
Plane mirror is handed over to move horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. laser emitting laser beam and the second plane mirror is incident on 45° angle, is reflected into first through the first plane mirror
Reflecting mirror；
B. laser beam is reflected into after the second reflecting mirror and is reflected into fourth plane mirror by the second reflecting mirror by the first reflecting mirror,
Be incident on fourth plane mirror laser beam direction is identical as laser emitting laser beam direction and folder with fourth plane mirror
Angle is 45 °；
C. laser beam is incident on after orthogonal fourth plane mirror and third plane mirror successively reflect with 90 ° of angles
Three reflecting mirrors, the laser beam direction for being incident on third reflecting mirror are contrary with laser emitting laser beam；
D. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber
It is interior, laser is formed from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable using laser self-mixing interference principle and rotates
The external cavity path of front and back laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle
Obtain the rotational angle of turntable.
Wherein, the theory that analytic process foundation is handled in step E is as follows:
As shown in fig. 7, initial position P1P2(4 vertex P of the first orthogonal plane mirror1With 5 vertex P of the second orthogonal plane mirror2's
Line) it is parallel with y-axis, when the first turntable 1 rotation angle is θSecond turntable 2 will rotate equal angular,
T-type transmission bracket 3 is parallel with x-axis always to guarantee that the first orthogonal plane mirror 4 and the second orthogonal plane mirror 5 are not sent out in vertical direction
Raw offset, only generates translation in the face xy.After rotation, the first plane mirror 41 and the second plane mirror 42 and third plane mirror 51 and
Four plane mirrors 52 keep mutually orthogonal, and shift, and laser 1 issues laser by A point, and in entire rotary course,
1 position of laser remains at A point, and light is from H point along backtracking after multiple plane mirror and reflecting mirror reflection, wherein
The radius of first turntable and the second turntable is R.Wherein the first intersecting plane mirror and the second intersecting plane mirror are since angle is 90
Degree, therefore be orthogonal plane mirror.
It is its change in optical path length of theoretical calculation based on the above micro angle measurement system with two orthogonal planes mirror, simplifies real
Experiment device establishes the structure chart of single orthogonal plane mirror as shown in Figure 8.
As shown in figure 8, orthogonal plane vertex point V1V is reached after rotation2, original optical path AB1C1D1Become AB2C2D2, light can be derived
Path difference is as follows:
Δ l=2 (AB1C1D1-AB2C2D2) (7)
Through geometry derivation, optical path difference caused by angle change be may be expressed as:
Δ l=-4R sin θ (8)
It therefore, can as shown in Fig. 9 for the micro angle measurement system described in the present embodiment with two orthogonal planes mirror
Calculate its optical path difference are as follows:
When feedback light light path one wavelength of every change, laser changes a striped from hybrid waveform, can obtain:
Δ L=4R (2cos θ -2sin θ -1)=N λ (10)
In formula (10), N is fringe number.
In conjunction with laser from application of mixture theory, as shown in figure 5, n0It is effective folding in signal light-wave strong point laser works substance
Penetrate rate, r1And r2It is two end face M of laser1And M2Electric field amplitude reflection coefficient, feed back object end face M3Electric field amplitude it is anti-
Penetrating coefficient is r3, d represents cavity length, LextFor external cavity length, thus, the initial electric field E in laser cavity0(t) by round-trip
Electric field E (t) after primary can be indicated are as follows:
In formula (11), v is the frequency of light wave, R2Indicate laser rear end face M2Reflectivity, wherein R2=| r2|2,
r2For reflection coefficient, c is the light velocity in vacuum, and g indicates linear gain of the gain media of the unit length of laser to signal light, γ
It is the total losses of unit distance signal light in laser cavity.The defeated of laser further can be obtained according to steady laser oscillating condition
Power is as follows with the approximate expression of angle change out:
In formula (12), ζ is the index of modulation, and λ is optical maser wavelength, P0The output intensity of laser, L when being unglazed feedback0Table
Show initial external cavity length.
It can be seen that compared with conventional laser is from mixing angle measurement method, described in the present embodiment from above-mentioned derivation process
Two orthogonal planes mirror in incident type laser from mixing micro angle measurement system and measurement method, angle measurement range it is unrestricted
And systemic resolution is higher.
From the above, it can be seen that the present embodiment has following advantages: (1) laser beam is incident on the first intersecting plane
When mirror, it is first incident on the second plane mirror of inside, i.e., using interior incident form, so that measuring system compact overall structure；(2) lead to
Cross the reflection list that the first orthogonal plane mirror, the first reflecting mirror, the second reflecting mirror, the second orthogonal plane mirror and third reflecting mirror are constituted
Member not only realizes laser from the auto-collimation of mixed signal but also compared to the reflector element or right-angled edge of conventional planar mirror composition
The reflector element that mirror is constituted, under same rotational angle, rotation front and back, laser becomes larger from the optical path difference of mixed signal, thus
Improve the Measurement Resolution and measurement range of system；(3) measuring system linkage is simple, it is easy to accomplish；Two external reflections
Mirror separately links and can be controlled separately, and not only reduces machining error, and optical path is made to be easier to collimate.
Measuring system described in the present embodiment can also do following improvement:
(1) measuring system further includes driving belt 217, and driving belt is socketed in the first turntable and second and walks around on disk, from
And the synchronization degree of the first turntable and the second turntable is further increased, improve the accuracy of measurement result.
(2) optical attenuator 218 is had additional between laser and beam splitter, is adjusted laser using optical attenuator 218 and is connect
The feedback light light intensity of receipts, prevent feedback light too strong or be more than laser damaging thresholding, to be further ensured that the standard of measurement result
True property, optical attenuator can be using the optical attenuators of the types such as displacement type attenuator, decaying flap attenuator.
(3) laser type in this system is not limited, and can be swashed for semiconductor laser, He-Ne laser, microplate
The multiple types such as light device or optical fiber laser can voluntarily be selected according to application demand.
In conjunction with Fig. 5, Figure 10 to Figure 12, the embodiment 3 that the present invention will be described in detail, but claim of the invention is not appointed
What is limited.
As shown in Figure 10, a kind of laser from mixing micro angle measurement system, including the first turntable 301, the second turntable 302,
Drive rod 303, intersecting plane mirror 304, reflecting mirror 305, laser 306, beam splitter 307, photodetector 308 and computer
309；First turntable 301 and the second turntable 302 are rotated synchronously by drive rod 303；303 both ends end of drive rod is connected separately with
First connecting column 310 and the second connecting column 311,310 bottom of the first connecting column and 311 bottom of the second connecting column pass through bearing respectively
On the first turntable 301 and the second turntable 302, drive rod 303 is parallel to 301 center of circle of the first turntable and the second turntable 302 circle
The connecting line of the heart；Intersecting plane mirror 304 includes opposite the first plane mirror 3041 and the second plane mirror 3042 of mirror surface, the first plane
The side of mirror 3041 is connected with the side of the second plane mirror 3042 and the connection side of the two is connected on the second connecting column 311, the
The mirror surface of one plane mirror 3041 and the second plane mirror 3042 deviates from drive rod 303,3041 mirror surface of the first plane mirror and second flat
The angular bisector of 3042 mirror surface angle of face mirror is located along the same line with drive rod 303；First plane mirror, 3041 mirror surface and second
The angle of 3042 mirror surface of plane mirror is denoted as α, the value range of α are as follows: 0 ° < α < 180 °；Reflecting mirror 305 is set to the second plane mirror 3042
The angle of outside and mirror surface and 3041 mirror surface of the first plane mirror is equal to306 laser emitting laser beams to the second plane mirror
On 3042, the angle etc. of 306 outgoing laser beams of laser and the laser beam formation after the reflection of the second plane mirror 3042
In α, 306 outgoing laser beams of laser and the angle of 305 mirror surface of reflecting mirror are equal toBeam splitter 307 is set to laser
306 and second between plane mirror 3042, for by laser beam beam splitting to photodetector 308；Photodetector 308 will connect
The laser signal received is converted into electric signal and is sent to computer 309；Computer 309 to the electric signal received at
Reason analysis obtains the rotational angle of the first tested turntable.
Micro angle measurement method based on above-mentioned measuring system, step include:
A. the setting based on drive rod enables the first turntable and the second turntable to rotate synchronously, when any one turntable turns
When dynamic, drive rod drives another turntable to rotate synchronously, and then intersecting plane mirror is driven to move horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. it on laser emitting laser beam to the second plane mirror, is then reflected on the first plane mirror, is re-reflected into anti-
It penetrates on mirror；
B. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber
It is interior, laser is formed from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable using laser self-mixing interference principle and rotates
The external cavity path of front and back laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle
Obtain the rotational angle of turntable.
Wherein, the theory that analytic process foundation is handled in step E is as follows:
As shown in figure 11, initial position O2V (the second turntable center of circle O2With the line of intersecting plane mirror fixed point V) it is flat with y-axis
Row, when the first turntable 1 rotation angle is θSecond turntable 2 will rotate equal angular, drive rod always with
X-axis only generates translation in parallel to guarantee that intersecting plane mirror does not shift in vertical direction in the face xy.After rotation, first is flat
Face mirror and the second plane mirror keep intersecting, and shift, and laser 1 issues laser by A point, and in entire rotary course
In, 1 position of laser remains at A point, after multiple plane mirror and reflecting mirror reflection light from D point along backtracking,
In, the radius of the first turntable and the second turntable is R.
Based on the above micro angle measurement system with blow-up plane mirror, it is its change in optical path length of theoretical calculation, establishes such as
Single any angle intersecting plane mirror structure chart, intersecting plane vertex point V shown in Figure 121V is reached after rotation2, original optical path
AB1C1D1Become AB2C2D2, it is as follows optical path difference can be derived:
Wherein,Through geometry derivation
:
Optical path difference caused by angle change may be expressed as:
When feedback light light path one wavelength of every change, laser changes a striped from hybrid waveform, can obtain:
Δ L=N λ (16)
In formula (16), N is fringe number.
In conjunction with formula (15) it is found that optical path difference is related to two mirror surface angle αs, turntable rotation angle, θ, used for reduced equation
Special mirror surface angle abbreviation is as follows:
(1) when two mirror surface angle αs be 90 °, i.e., when two mirror surfaces are vertical, optical path difference can be obtained:
Δ L=-4R sin θ (17)
Can be obtained by formula (16), when Δ L is equal to wavelength, that is, take N=1, then can obtain it is minimum can angle measurement:
By taking He-Ne laser as an example, when R=3cm, the resolution ratio of angle measurement is up to 2.64 × 10-6rad。
(2) when mirror surface angle α be 60 °, optical path difference can be obtained:
Can be obtained by formula (16), when Δ L is equal to wavelength, that is, take N=1, then can obtain it is minimum can angle measurement:
By taking He-Ne laser as an example, when R=3cm, the resolution ratio of angle measurement is up to 5.90 × 10-6rad。
From the above special angle calculated result combination optical path difference relational graph, can obtain the corresponding optical path difference of identical rotation angle with
The increase of mirror surface angle α and be in increase tendency, i.e., when mirror surface angle is gradually increased, the resolution ratio of angle measurement is become larger.
In conjunction with laser from application of mixture theory, as shown in figure 5, n0It is effective folding in signal light-wave strong point laser works substance
Penetrate rate, r1And r2It is two end face M of laser1And M2Electric field amplitude reflection coefficient, feed back object end face M3Electric field amplitude it is anti-
Penetrating coefficient is r3, d represents cavity length, LextFor external cavity length, thus, the initial electric field E in laser cavity0(t) by round-trip
Electric field E (t) after primary can be indicated are as follows:
V is the frequency of light wave, R in formula (21)2Indicate laser rear end face M2Reflectivity, wherein R2=| r2|2,
r2For reflection coefficient, c is the light velocity in vacuum, and g indicates linear gain of the gain media of the unit length of laser to signal light, γ
It is the total losses of unit distance signal light in laser cavity.The defeated of laser further can be obtained according to steady laser oscillating condition
Power is as follows with the approximate expression of angle change out:
In formula (22), ζ is the index of modulation, and λ is optical maser wavelength, P0The output intensity of laser, L when being unglazed feedback0Table
Show initial external cavity length.
It can be seen that compared with conventional laser is from mixing angle measurement method, described in the present embodiment from above-mentioned derivation process
Single any angle intersecting plane mirror in incident type from mixing micro angle measurement system and measurement method, angle measurement range is not
It is restricted and systemic resolution is higher.
From the above, it can be seen that the present embodiment has following advantages: (1) laser beam is incident on intersecting plane mirror
When, it is first incident on the second plane mirror of inside, i.e., using interior incident form, so that measuring system compact overall structure；(2) pass through
The reflector element that intersecting plane mirror and reflecting mirror are constituted, not only realizes laser from the auto-collimation of mixed signal but also compared to biography
The reflector element for the reflector element that plane mirror is constituted or the right-angle prism composition of uniting, under same rotational angle, rotation front and back is swashed
Light becomes larger from the optical path difference of mixed signal, to improve the Measurement Resolution and measurement range of system；(3) measuring system is whole
Structure is simple and easy to implement, and machine error is small, and the included angle of the first plane mirror and the second plane mirror is adjustable, and different angle corresponds to
Different systematic survey resolution ratio, can select included angle according to actual needs.
Measuring system described in the present embodiment can also do following improvement:
(1) measuring system further includes driving belt 312, and driving belt is socketed in the first turntable and second and walks around on disk, from
And the synchronization degree of the first turntable and the second turntable is further increased, improve the accuracy of measurement result.
(2) optical attenuator 313 is had additional between laser and beam splitter, is adjusted laser using optical attenuator 313 and is connect
The feedback light light intensity of receipts, prevent feedback light too strong or be more than laser damaging thresholding, to be further ensured that the standard of measurement result
True property, optical attenuator can be using the optical attenuators of the types such as displacement type attenuator, decaying flap attenuator.
(3) laser type in this system is not limited, and can be swashed for semiconductor laser, He-Ne laser, microplate
The multiple types such as light device or optical fiber laser can voluntarily be selected according to application demand.
It is understood that being merely to illustrate the present invention above with respect to specific descriptions of the invention and being not limited to this
Technical solution described in inventive embodiments.Those skilled in the art should understand that still can be carried out to the present invention
Modification or equivalent replacement, to reach identical technical effect；As long as meet use needs, all protection scope of the present invention it
It is interior.
Claims (10)
1. a kind of laser mixes micro angle measurement system certainly, it is characterised in that: including the first turntable, the second turntable, T-type transmission branch
Frame, the first intersecting plane mirror, the second intersecting plane mirror, orthogonal reflecting mirror, third reflecting mirror, reflecting mirror transmission bracket, laser,
Beam splitter, photodetector and computer；
First turntable and the second turntable are rotated synchronously by T-type transmission bracket；
The T-type transmission bracket includes horizontally disposed and orthogonal first drive rod and support rod, first drive rod
Both ends are connected separately with the first connecting column and the second connecting column, and the first connection column bottom and the second connection column bottom lead to respectively
Bearing is crossed on the first turntable and the second turntable, first drive rod is parallel to the first turntable center of circle and the second turntable center of circle
Connecting line, be connected on the second connecting column in the middle part of the support rod；
The first intersecting plane mirror includes the first plane mirror and the second plane mirror, the side of first plane mirror and second flat
The side of face mirror is connected and the angle of the first plane mirror mirror surface and the second plane mirror mirror surface is 90 °；
The second intersecting plane mirror includes third plane mirror and fourth plane mirror, the side and Siping City of the third plane mirror
The side of face mirror is connected and the angle of third plane mirror mirror surface and fourth plane mirror mirror surface is 90 °；
The connection of first plane mirror and the second plane mirror while and the third plane mirror and fourth plane mirror connection while divide
It is not connected with the both ends lower half of support rod, the angular bisector of the angle of the first plane mirror mirror surface and the second plane mirror mirror surface
It is vertical with support rod with third plane mirror mirror surface and the angular bisector of the angle of fourth plane mirror mirror surface, first plane
Mirror, the second plane mirror, third plane mirror and fourth plane mirror mirror surface deviate from the first drive rod；
The orthogonal reflecting mirror includes the first reflecting mirror and the second reflecting mirror, side and the second reflecting mirror of first reflecting mirror
Side be connected and the angle of the first mirror mirror and the second mirror mirror be 90 °, the angle of the orthogonal reflecting mirror angle
Bisector is located along the same line with the first drive rod；
The reflecting mirror transmission bracket includes symmetrically arranged second drive rod and third drive rod, and the one of second drive rod
End bottom is connected to support rod one end upper half, and one end bottom of the third drive rod is connected to support rod other end upper half
The other end in portion, second drive rod is connected with the other end of third drive rod and the bottom of the two junction is connected to first
The top of reflecting mirror and the second reflecting mirror junction；
The third reflecting mirror is set in front of fourth plane mirror and the angle of the two mirror surface is 45 °；
On the laser emitting laser beam to the first plane mirror and the angle of laser beam and the first plane mirror mirror surface is
45°；
The beam splitter is set between laser and the first plane mirror, is used for laser beam beam splitting to photodetector；
The photodetector is sent to computer after converting electric signal for the laser signal received；
The computer carries out processing analysis to the electric signal received, obtains the rotational angle of the first tested turntable.
2. a kind of laser mixes micro angle measurement system certainly, it is characterised in that: including the first turntable, the second turntable, T-type transmission branch
Frame, the first intersecting plane mirror, the second intersecting plane mirror, the first reflecting mirror, the second reflecting mirror, third reflecting mirror, the second drive rod,
Third drive rod, laser, beam splitter, photodetector and computer；
First turntable and the second turntable are rotated synchronously by T-type transmission bracket；
The T-type transmission bracket includes horizontally disposed and orthogonal first drive rod and support rod, first drive rod
Both ends are connected separately with the first connecting column and the second connecting column, and the first connection column bottom and the second connection column bottom lead to respectively
Bearing is crossed on the first turntable and the second turntable, first drive rod is parallel to the first turntable center of circle and the second turntable center of circle
Connecting line, be connected on the second connecting column in the middle part of the support rod；
The first intersecting plane mirror includes the first plane mirror and the second plane mirror, the side of first plane mirror and second flat
The side of face mirror is connected and the angle of the first plane mirror mirror surface and the second plane mirror mirror surface is 90 °；
The second intersecting plane mirror includes third plane mirror and fourth plane mirror, the side and Siping City of the third plane mirror
The side of face mirror is connected and the angle of third plane mirror mirror surface and fourth plane mirror mirror surface is 90 °；
The connection of first plane mirror and the second plane mirror while and the third plane mirror and fourth plane mirror connection while divide
It is not connected with the both ends of support rod, the angular bisector and third of the angle of the first plane mirror mirror surface and the second plane mirror mirror surface
Plane mirror mirror surface and the angular bisector of the angle of fourth plane mirror mirror surface are vertical with support rod, first plane mirror, second
The mirror surface of plane mirror, third plane mirror and fourth plane mirror deviates from the first drive rod；
First reflecting mirror is set in front of the first plane mirror and the angle of the two mirror surface is 90 °, and first reflecting mirror passes through
Second drive rod is fixedly connected with the first plane mirror；
Second reflecting mirror is set in front of fourth plane mirror and the angle of the two mirror surface is 90 °, and second reflecting mirror passes through
Third drive rod is fixedly connected with fourth plane mirror；
The third reflecting mirror is set in front of third plane mirror and the angle of the two mirror surface is 45 °；
On the laser emitting laser beam to the second plane mirror and the angle of laser beam and the second plane mirror mirror surface is
45°；
The beam splitter is set between laser and the second plane mirror, is used for laser beam beam splitting to photodetector；
The photodetector converts electric signal for the laser signal received and is sent to computer；
The computer carries out the rotational angle that processing analysis obtains the first tested turntable to the electric signal received.
3. a kind of laser mixes micro angle measurement system certainly, it is characterised in that: including the first turntable, the second turntable, drive rod, phase
Hand over plane mirror, reflecting mirror, laser, beam splitter, photodetector and computer；
First turntable and the second turntable are rotated synchronously by drive rod；
Drive rod both ends end is connected separately with the first connecting column and the second connecting column, the first connection column bottom and the
Two connection column bottoms pass through bearing on the first turntable and the second turntable respectively, and the drive rod is parallel to the first turntable center of circle
With the connecting line in the second turntable center of circle；
The intersecting plane mirror includes opposite the first plane mirror and the second plane mirror of mirror surface, the side of first plane mirror with
The side of second plane mirror is connected and the connection side of the two is connected on the second connecting column, first plane mirror and the second plane
The mirror surface of mirror deviates from drive rod, the angular bisector of the angle of the first plane mirror mirror surface and the second plane mirror mirror surface and transmission
Bar is located along the same line, and the angle of the first plane mirror mirror surface and the second plane mirror mirror surface is denoted as α, the value range of α are as follows:
0°<α<180°；
The reflecting mirror is set on the outside of the second plane mirror and the angle of mirror surface and the first plane mirror mirror surface is equal to
On the laser emitting laser beam to the second plane mirror, laser emitting laser beam and the second plane mirror of process are anti-
The angle that laser beam after penetrating is formed is equal to α, and the angle of laser emitting laser beam and mirror mirror is equal to
The beam splitter is set between laser and the second plane mirror, is used for laser beam beam splitting to photodetector；
The photodetector converts electric signal for the laser signal received and is sent to computer；
The computer carries out the rotational angle that processing analysis obtains the first tested turntable to the electric signal received.
4. laser according to claim 1,2 or 3 mixes micro angle measurement system certainly, it is characterised in that: further include transmission
Belt, the driving belt are socketed on the first turntable and the second turntable.
5. laser according to claim 1,2 or 3 mixes micro angle measurement system certainly, it is characterised in that: the laser
Optical attenuator is additionally provided between beam splitter.
6. laser according to claim 1,2 or 3 mixes micro angle measurement system certainly, it is characterised in that: the laser
For semiconductor laser, He-Ne laser, micro-slice laser or optical fiber laser.
7. mixing the micro angle measurement method of micro angle measurement system, step packet certainly based on laser as described in claim 1
It includes:
A. the setting based on T-type transmission bracket enables the first turntable and the second turntable to rotate synchronously, when any one turntable
When rotation, T-type transmission bracket drives another turntable to rotate synchronously, and then drives the first intersecting plane mirror and the second intersection flat
Face mirror moves horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. laser emitting laser beam and the first plane mirror is incident on 45° angle, is reflected into the first reflection through the second plane mirror
Mirror；
B. laser beam is reflected into after the second reflecting mirror and is reflected into third plane mirror by the second reflecting mirror by the first reflecting mirror, incident
It is identical as laser emitting laser beam direction to the laser beam direction of third plane mirror and with the angle of third plane mirror be
45°；
C. it is anti-to be incident on third after orthogonal third plane mirror and fourth plane mirror successively reflect with 90 ° of angles for laser beam
Mirror is penetrated, the laser beam direction for being incident on third reflecting mirror is contrary with laser emitting laser beam；
D. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber, shape
At laser from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable rotation front and back using laser self-mixing interference principle
The external cavity path of laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle, can be obtained
The rotational angle of turntable.
8. mixing the micro angle measurement method of micro angle measurement system, step packet certainly based on laser as claimed in claim 2
It includes:
A. the setting based on T-type transmission bracket enables the first turntable and the second turntable to rotate synchronously, when any one turntable
When rotation, T-type transmission bracket drives another turntable to rotate synchronously, and then drives the first intersecting plane mirror and the second intersection flat
Face mirror moves horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. laser emitting laser beam and the second plane mirror is incident on 45° angle, is reflected into the first reflection through the first plane mirror
Mirror；
B. laser beam is reflected into after the second reflecting mirror and is reflected into fourth plane mirror by the second reflecting mirror by the first reflecting mirror, incident
It is identical as laser emitting laser beam direction to the laser beam direction of fourth plane mirror and with the angle of fourth plane mirror be
45°；
C. it is anti-to be incident on third after orthogonal fourth plane mirror and third plane mirror successively reflect with 90 ° of angles for laser beam
Mirror is penetrated, the laser beam direction for being incident on third reflecting mirror is contrary with laser emitting laser beam；
D. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber, shape
At laser from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable rotation front and back using laser self-mixing interference principle
The external cavity path of laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle, can be obtained
The rotational angle of turntable.
9. mixing the micro angle measurement method of micro angle measurement system, step packet certainly based on laser as claimed in claim 3
It includes:
A. the setting based on drive rod enables the first turntable and the second turntable to rotate synchronously, when any one turntable rotates
When, drive rod drives another turntable to rotate synchronously, and then intersecting plane mirror is driven to move horizontally；
B. laser emitting laser beam in turntable rotation process, the traveling optical path of laser beam are as follows:
A. it on laser emitting laser beam to the second plane mirror, is then reflected on the first plane mirror, is re-reflected into reflecting mirror
On；
B. third reflecting mirror reflects incident laser beam, and the laser beam after reflection is along backtracking laser chamber, shape
At laser from mixed signal；
C. laser is fed back from mixed signal to photodetector by beam splitter；
D. photodetector converts electric signal for the laser signal received and is sent to computer；
E. computer carries out processing analysis to the signal received, obtains turntable rotation front and back using laser self-mixing interference principle
The external cavity path of laser from mixed signal is poor, recycles the relationship between external cavity path difference and turntable rotational angle, can be obtained
The rotational angle of turntable.
10. special based on laser described in claim 7,8 or 9 from the micro angle measurement method for mixing micro angle measurement system
Sign is: being additionally provided with optical attenuator between laser and laser emitting laser beam plane mirror incident for the first time, utilizes
Optical attenuator adjusts the received feedback light light intensity of laser, prevents feedback light too strong or more than laser damaging thresholding.
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| CN108534986B (en) * | 2018-04-12 | 2020-03-31 | 安徽大学 | Multi-longitudinal-mode laser resonant cavity FSR measuring device and measuring method |
| CN110631512B (en) * | 2018-05-18 | 2021-08-06 | 安徽大学 | External incident type angle sensing measuring device and method for bi-orthogonal plane mirror based on multi-longitudinal-mode self-mixing effect |
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