CN107574414B - A kind of tubulose component end plane metal chemical industry dress - Google Patents
A kind of tubulose component end plane metal chemical industry dress Download PDFInfo
- Publication number
- CN107574414B CN107574414B CN201710688343.5A CN201710688343A CN107574414B CN 107574414 B CN107574414 B CN 107574414B CN 201710688343 A CN201710688343 A CN 201710688343A CN 107574414 B CN107574414 B CN 107574414B
- Authority
- CN
- China
- Prior art keywords
- component
- tubulose
- tooling
- bolster stake
- molded part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The present invention discloses a kind of tubulose component end plane metal chemical industry dress, including burying tooling and evaporation tooling, burying tooling includes bearing base, molded part, component bolster stake and stamping quality block, and molded part can be formed with bearing base to be cooperated, and molded part center is equipped with molding hole；Component bolster stake can be formed with molding hole to be cooperated, and component bolster stake top surface is for placing tubulose component, and after component bolster stake is put into molding hole, component bolster stake top surface and molding hole form the forming media chamber for filling NaCl；Wafer sheet is fixed in the wafer sheet constituted by burying frock making NaCl and tubulose component, evaporation tooling, then passing through evaporation technology is to realize the metallization of tubulose component end face；NaCl is cheap, and is easy that wafer sheet is made with tubulose component, need to only dissolve NaCl after metallization, that is, can be taken off tubulose component；The present invention can in large quantity metallize to tubulose component, improve efficiency.
Description
Technical field
The present invention relates to solid state powers to receive and dispatch integrated device preparation technical field, and in particular to the gold of tubulose component end face
Categoryization.
Background technique
Small-sized tube champion device (≤150 μm) is the key that member in the tube core preparation of solid state power transmitting-receiving integrated device
Device, it is the key that many products indispensabilities and core devices.In recent years, the development work of a large amount of systems has been carried out.By grinding
Demand processed is traction, carries out the development of tube core, device, integrated functionality unit and integrated device, breaks through tube core and single-chip integration electricity
Road technology of preparing and solid-state power amplifier, manufacturing technology etc. push the great-leap-forward development of technical application and equipment.Achieve core
The important breakthrough of heart product, key technology, be promote China's technology and associated equipment realize it is fast-developing and application must be by it
Road.
The end plane metal of small-sized tube champion device is the core key of element preparation.Evaporation technology is commonly to hold
Face method for metallising, but currently, there are no methods, and metallization is realized by evaporation technology for small-sized tube champion device.
Summary of the invention
The purpose of the present invention is to provide a kind of tubulose component end plane metal chemical industry dress, can be realized pair by the tooling
Small-sized tube champion device reaches end plane metal by evaporation technology.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of tubulose component end plane metal chemical industry dress, comprising:
A, tooling is buried,
Burying tooling includes that bearing base, molded part, component bolster stake and stamping quality block, bearing base are respectively equipped with
The lateral bearing slot and longitudinal load-bearing slot of intersection, the depth of lateral bearing slot are greater than the depth of longitudinal load-bearing slot；The molded part
For cuboid, molded part can be formed by longitudinal load-bearing slot and bearing base to be cooperated, and molded part center is equipped with molding hole；First device
Part bolster stake can be formed with molding hole to be cooperated, and component bolster stake top surface is for placing tubulose component, component bolster stake
After being put into molding hole, component bolster stake top surface and molding hole form the forming media chamber for filling NaCl；Stamping quality block
It is formed and is cooperated with forming media chamber, for transmitting press machine pressure；After press machine punching press, the intracavitary formation NaCl of forming media with
The wafer sheet that tubulose component is constituted；
B, tooling is evaporated,
Evaporating tooling includes upper metal splint and lower metal splint, and the plate face of upper metal splint is equipped with one group of upper installing hole,
The plate face of lower metal splint is equipped with mounting hole under one group, and upper installing hole and lower mounting hole correspond, and the aperture of upper installing hole is small
In the aperture of lower mounting hole；Lower mounting hole is used to that wafer sheet made from burial tooling to be fixed, upper metal splint and lower metal
It is fixed between clamping plate by the fixation hole of corresponding setting.
The beneficial effects of the present invention are: the wafer sheet constituted by burying frock making NaCl and tubulose component, evaporator man
Wafer sheet is fixed in dress, then is the metallization of realization tubulose component end face by evaporation technology；Upper and lower double layer of metal clamping plate
Structure, make metallization when wafer sheet it is not easily to fall off；NaCl is cheap, and is easy that wafer sheet is made with tubulose component, metallizes
After only NaCl need to be dissolved, that is, can be taken off tubulose component；Each wafer sheet may include multiple tubulose components, and evaporator man
Dress can accommodate multiple wafer sheet again, so as to metallize in large quantity to tubulose component, improve efficiency.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples:
Fig. 1 is the structural schematic diagram that the present invention buries tooling；
Fig. 2 is the perspective view of the explosion of Fig. 1；
Fig. 3 is to utilize the schematic diagram for burying frock making wafer sheet；
Fig. 4 is the cross-sectional view of Fig. 3；
Fig. 5 is the schematic diagram of wafer sheet；
Fig. 6 is the cross-sectional view of wafer sheet；
Fig. 7 is the upper metal splint schematic diagram of present invention evaporation tooling；
Fig. 8 is that evaporator man of the present invention holds metal splint schematic diagram；
Fig. 9 is the assembly partial enlargement diagram of upper metal splint Yu lower metal splint, omits tubulose component.
Specific embodiment
The present invention provides a kind of tubulose component end plane metal chemical industry dress, comprising:
A, tooling is buried,
In conjunction with shown in Fig. 1 and Fig. 2, burying tooling includes bearing base 1, molded part 2, component bolster stake 3 and punching press matter
Gauge block 4, bearing base 1 are respectively equipped with the lateral bearing slot 1a and longitudinal load-bearing slot 1b of intersection, and the depth of lateral bearing slot 1a is big
In the depth of longitudinal load-bearing slot 1b；The molded part 2 is cuboid, and 2 center of molded part is equipped with molding hole 2a；Molded part 2 can
It is formed and is assembled by lateral bearing slot 1a and bearing base 1, can also matched by longitudinal load-bearing slot 1b and the formation of bearing base 1
It closes；In conjunction with shown in Fig. 3 and Fig. 4, when not in use, molded part 2 can be enabled to be assemblied in lateral bearing slot 1a, it when in use, will be at
Type part 2, which lifts to be rotated by 90 ° to be formed with longitudinal load-bearing slot 1b, to be cooperated, and forms gap between molded part 2 and lateral bearing slot 4a at this time；
Component bolster stake 3 can be formed with molding hole 2a to be cooperated, and 3 top surface of component bolster stake is for placing tubulose component 6, first device
After part bolster stake 3 is put into molding hole, 3 top surface of component bolster stake and molding hole 2a form the forming media chamber for filling NaCl
5；Stamping quality block 4 and forming media chamber 5, which are formed, to be cooperated, for transmitting press machine pressure；In conjunction with shown in Fig. 5 and Fig. 6, press machine
After punching press, the wafer sheet 7 that NaCl and tubulose component 6 are constituted is formed in forming media chamber 5.The end face of tubulose component 6 is exposed,
Rest part is filled up completely in wafer sheet 7 by NaCl.
B, tooling is evaporated,
In conjunction with shown in Fig. 7~9, evaporation tooling includes upper metal splint 8 and lower metal splint 9, the plate face of upper metal splint 8
Equipped with one group of upper installing hole 8a, the plate face of lower metal splint 9 is equipped with mounting hole 9a under one group, and upper installing hole and lower mounting hole are one by one
Corresponding, the aperture of upper installing hole 8a is less than the aperture of lower mounting hole 9a；Lower mounting hole 9a is used for wafer sheet 7 made from burial tooling
It is fixed, is carried out between upper metal splint and lower metal splint by the upper fixation hole 8b of corresponding setting and lower fixed hole 9b
It is fixed.
It has fixed after wafer sheet, has made tubulose component end plane metal using evaporation technology, specifically: close evaporation cavity
Room is pumped to high vacuum environment, is heated up by heater strip to substrate；It is first steamed using electron-beam evaporation mode on wafer sheet surface
Send out one layer of adhesion layer Cr；The mode of reusable heat resistance evaporation evaporates required metal layer A u；It is cooled under vacuum conditions after the completion
Room temperature takes out wafer sheet, completes the technical process of tubulose component end plane metalization preparation.
The above described is only a preferred embodiment of the present invention, being not intended to limit the present invention in any form；Appoint
What those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the side of the disclosure above
Method and technology contents make many possible changes and modifications to technical solution of the present invention, or are revised as the equivalent reality of equivalent variations
Apply example.Therefore, anything that does not depart from the technical scheme of the invention according to the technical essence of the invention do above embodiments
Any simple modification, equivalent replacement, equivalence changes and modification, all of which are still within the scope of protection of the technical scheme of the invention.
Claims (1)
1. a kind of tubulose component end plane metal chemical industry dress characterized by comprising
A, tooling is buried,
Burying tooling includes bearing base, molded part, component bolster stake and stamping quality block, and bearing base is respectively equipped with intersection
Lateral bearing slot and longitudinal load-bearing slot, the depth of lateral bearing slot is greater than the depth of longitudinal load-bearing slot；The molded part is length
Cube, molded part can be formed by longitudinal load-bearing slot and bearing base to be cooperated, and molded part center is equipped with molding hole；Component is held
It carries column and can be formed with molding hole and cooperated, for placing tubulose component, component bolster stake is put into for component bolster stake top surface
After molding hole, component bolster stake top surface and molding hole form the forming media chamber for filling NaCl；Stamping quality block and Jie
Matter forming cavity forms cooperation, for transmitting press machine pressure；After press machine punching press, in the intracavitary formation NaCl of forming media and tubulose
The wafer sheet that component is constituted；
B, tooling is evaporated,
Evaporating tooling includes upper metal splint and lower metal splint, and the plate face of upper metal splint is equipped with one group of upper installing hole, lower gold
The plate face for belonging to clamping plate is equipped with mounting hole under one group, and upper installing hole and lower mounting hole correspond, under the aperture of upper installing hole is less than
The aperture of mounting hole；Lower mounting hole is used to that wafer sheet made from burial tooling to be fixed, upper metal splint and lower metal splint
Between be fixed by the fixation hole of corresponding setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710688343.5A CN107574414B (en) | 2017-08-12 | 2017-08-12 | A kind of tubulose component end plane metal chemical industry dress |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710688343.5A CN107574414B (en) | 2017-08-12 | 2017-08-12 | A kind of tubulose component end plane metal chemical industry dress |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107574414A CN107574414A (en) | 2018-01-12 |
| CN107574414B true CN107574414B (en) | 2019-05-07 |
Family
ID=61034960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710688343.5A Active CN107574414B (en) | 2017-08-12 | 2017-08-12 | A kind of tubulose component end plane metal chemical industry dress |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107574414B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3280233A (en) * | 1964-12-18 | 1966-10-18 | Dow Chemical Co | Manufacturing coated plastic film tube |
| CN102137750A (en) * | 2008-07-02 | 2011-07-27 | 巴斯夫欧洲公司 | Method for producing a ring-shaped oxidic molded body |
| CN204167283U (en) * | 2014-09-29 | 2015-02-18 | 西安卫光科技有限公司 | A kind of superhigh pressure diode multi-chip bonded dice frock clamp |
| CN104894521A (en) * | 2015-05-12 | 2015-09-09 | 锦州七七七微电子有限责任公司 | Method of metalizing reverse side of single pipe core |
| CN206033871U (en) * | 2016-10-17 | 2017-03-22 | 哈尔滨理工大学 | Vacuum coating machine tool device |
| CN107012429A (en) * | 2017-04-20 | 2017-08-04 | 盐城市同齐电气制造有限公司 | The pre- whole frock of metallized film processing |
| CN107012427A (en) * | 2017-04-21 | 2017-08-04 | 盐城市同齐电气制造有限公司 | A kind of aluminium pond frock of metallized capacitance diaphragm processing |
-
2017
- 2017-08-12 CN CN201710688343.5A patent/CN107574414B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3280233A (en) * | 1964-12-18 | 1966-10-18 | Dow Chemical Co | Manufacturing coated plastic film tube |
| CN102137750A (en) * | 2008-07-02 | 2011-07-27 | 巴斯夫欧洲公司 | Method for producing a ring-shaped oxidic molded body |
| CN204167283U (en) * | 2014-09-29 | 2015-02-18 | 西安卫光科技有限公司 | A kind of superhigh pressure diode multi-chip bonded dice frock clamp |
| CN104894521A (en) * | 2015-05-12 | 2015-09-09 | 锦州七七七微电子有限责任公司 | Method of metalizing reverse side of single pipe core |
| CN206033871U (en) * | 2016-10-17 | 2017-03-22 | 哈尔滨理工大学 | Vacuum coating machine tool device |
| CN107012429A (en) * | 2017-04-20 | 2017-08-04 | 盐城市同齐电气制造有限公司 | The pre- whole frock of metallized film processing |
| CN107012427A (en) * | 2017-04-21 | 2017-08-04 | 盐城市同齐电气制造有限公司 | A kind of aluminium pond frock of metallized capacitance diaphragm processing |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107574414A (en) | 2018-01-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11789505B2 (en) | Loop heat pipe | |
| US20200149820A1 (en) | Conformal thermal ground planes | |
| TW200710363A (en) | Heat pipe and method for manufacturing same | |
| CN105849055A (en) | Apparatus for molding glass substrate | |
| CN103975514B (en) | The manufacture device and its manufacture method of field pole magnet | |
| CN103071987A (en) | Production method for material for uniform temperature board and uniform temperature board | |
| CN107289800A (en) | Equalizing plate structure and its manufacture method | |
| CN107574414B (en) | A kind of tubulose component end plane metal chemical industry dress | |
| CN103975513A (en) | Manufacturing device for magnet for field pole and method for manufacturing same | |
| CN109411431A (en) | A kind of heat exchange structure and preparation method thereof | |
| CN105895591A (en) | Heat sink component and mounting method for positioning and mounting chips | |
| DE19527674A1 (en) | Cooling device | |
| CN207480521U (en) | A kind of magnetism high-precision cold set hammer | |
| CN207547322U (en) | A kind of handware pressing and bending device | |
| CN103506806A (en) | Manufacturing method of metal laminated gaskets | |
| CN202037206U (en) | Flattening device of thin-wall parts | |
| JP2011189367A5 (en) | Die for forging pin out processing, forging pin out processing method and metal plate | |
| CN210952459U (en) | Temperature equalizing plate | |
| CN207589402U (en) | A kind of radiator and RF receiving and transmission module for RF receiving and transmission module | |
| CN103286216A (en) | Mold capable of improving quality of main fin of cooling fin | |
| CN106313440A (en) | Positioning device in mold | |
| CN202348676U (en) | Roots blower rotor | |
| CN215792014U (en) | Clutch shell | |
| CN203297858U (en) | Support of screw arraying machine | |
| TWM561191U (en) | Heat dissipation apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233030 Patentee after: Anhui North Microelectronics Research Institute Group Co.,Ltd. Address before: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233030 Patentee before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |