CN107544121A - A kind of phase panel assembly for transmission electron microscope imaging - Google Patents
A kind of phase panel assembly for transmission electron microscope imaging Download PDFInfo
- Publication number
- CN107544121A CN107544121A CN201710866614.1A CN201710866614A CN107544121A CN 107544121 A CN107544121 A CN 107544121A CN 201710866614 A CN201710866614 A CN 201710866614A CN 107544121 A CN107544121 A CN 107544121A
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- phase
- electron microscope
- transmission electron
- vacuum
- panel assembly
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 49
- 238000003384 imaging method Methods 0.000 title claims abstract description 35
- 238000010438 heat treatment Methods 0.000 claims description 27
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000013519 translation Methods 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 4
- 241000764238 Isis Species 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 238000011065 in-situ storage Methods 0.000 description 5
- 239000000523 sample Substances 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000012620 biological material Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000012520 frozen sample Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a kind of phase panel assembly for transmission electron microscope imaging, including vacuum storehouse, three-dimensional regulation platform and support bar, vacuum storehouse side to be connected with the lens barrel of transmission electron microscope；The three-dimensional regulation platform is arranged on inside the vacuum storehouse；The one end of the support bar away from the lens barrel is connected with the three-dimensional regulation platform, it is connected close to one end of the lens barrel with phase board mount, the support bar carries out position adjustment by the three-dimensional regulation platform, and the phase-plate for making to be arranged on the phase board mount carries out position adjustment in the lens barrel.The high precision position that three dimensions can be spatially carried out by phase panel assembly provided by the invention is adjusted, and substantially increases giving full play to for the stability of phase-plate, position adjustments flexibility and Function Extension.
Description
Technical field
The present invention relates to experimental provision field, more particularly to a kind of phase panel assembly for transmission electron microscope imaging.
Background technology
Freeze electron microscopic imaging technique (Cryo electron microscopy, CryoEM), be structure biology and
The important technical of cell biology structure elucidation and Morphological Characterization.Two kinds of conventional technologies are respectively individual particle three-dimensionalreconstruction
Technology and electron tomography scanning Three Dimensional Reconfiguration.The high-resolution structure elucidation target that scientist pursues always.However, by
The freezing hydrated biological material of light element composition is highly prone to the irradiation damage of electron beam, and low into image contrast.Wherein, low dose
The big of amount pattern owes burnt amount to be imaged to be the imaging method mainly used at present.But still contrast is not high enough for the image obtained, noise
Than difference, especially for below 300kD small size albumen.Which greatly limits the resolution ratio of structure elucidation, meanwhile, also limit
The type and quantity of albumen are parsed with Electronic Speculum.
Phase plate technique is current international study hotspot, achieved in high-resolution imaging it is many it is breakthrough enter
Exhibition, has also parsed some high-resolution protein structures.However, current phase panel assembly relies primarily on former transmission electron microscope object lens light
Late system upgrade forms, therefore degree of regulation and stroke are very limited, and this necessarily affects the performance of phase-plate function.
The content of the invention
For in place of above-mentioned the shortcomings of the prior art, the invention provides a kind of phase for transmission electron microscope imaging
Panel assembly.
In order to achieve the above object, the technical solution adopted in the present invention is：
A kind of phase panel assembly for transmission electron microscope imaging, including,
Vacuum storehouse, its side are connected with the lens barrel of transmission electron microscope；
Three-dimensional regulation platform, it is arranged on inside the vacuum storehouse；
Support bar, its one end away from the lens barrel are connected with the three-dimensional regulation platform, close to one end of the lens barrel
It is connected with phase board mount, the support bar carries out position adjustment by the three-dimensional regulation platform, makes to be arranged on the phase
Phase-plate on board mount carries out position adjustment in the lens barrel.
Further, the side in the vacuum storehouse is connected by vacuum flange with the lens barrel of the transmission electron microscope.
Further, the three-dimensional regulation platform includes one end and the lifting platform, the Yi Jiyu that are connected inside the vacuum storehouse
The translation stage that the lifting platform other end is connected, the translation stage are connected with the support bar.
Further, multiple phase-plate standing grooves, phase-plate and/or the object lens light are provided with the phase board mount
Door screen is fixed in the phase-plate standing groove by " C " shape spring.
Further, in addition to controller, the controller are electrically connected by vacuum electric connector and the three-dimensional regulation platform
Connect, for controlling the position adjustment of the three-dimensional regulation platform in the X, Y, Z direction.
Further, the vacuum storehouse includes vacuum warehouse and the vacuum door being arranged on the vacuum warehouse, institute
State three-dimensional regulation platform by regulating platform base with the vacuum door or vacuum warehouse to be connected, the vacuum electric connector is set
On the vacuum door above the regulating platform base.
Further, the support bar include the connecting rod that is connected with the three-dimensional regulation platform of one end and by every
The heating rod that the ceramic connecting piece of heat is connected with the connecting rod other end, the heating rod are connected with the phase board mount
Connect.
Further, the heating rod is internally provided with heating core, and the heating core passes through the vacuum electric connector
It is connected with the controller, the controller controls the heating-up temperature of the heating core.
Further, the heating rod and the phase board mount are made by the good conductor of heat.
Further, temperature sensor is provided with the heating rod, the temperature sensor is electrically connected by the vacuum
Device is connect with temperature indicator to be connected.
A kind of phase panel assembly for transmission electron microscope imaging provided by the invention has the following advantages that：
1st, by three-dimensional regulation platform and the built-in structure of support bar, make whole device structure more stable, and can also
Reduce influence of the external environment to device stability to greatest extent；
2nd, it can ensure that phase-plate is adjusted to greatest extent in the lens barrel of transmission electron microscope by three-dimensional regulation platform, and
And it can also make the height of phase-plate can not only be at the object lens back focal plane of transmission electron microscope, for phase-plate phase imaging；
Can be at the object lens object plane of elevated height to transmission electron microscope, making phase-plate carry out Electronic Speculum imaging as sample, so can be with
The quality of quick detection in situ and monitoring phase-plate, the further research to phase-plate provide hardware guarantee；Can also be phase
Position plate moves away from the position of objective pole shoe and other fearness high-temperature components, in-situ high temperature regeneration is carried out, to improve the phase-plate longevity
Life.
3rd, the phase panel assembly is not only easy to operate, and compatible Ze Nikeshi phase-plates, voltaic gesture phase-plate and electrostatic
Various forms of phase-plates such as phase-plate.The compatibility and applicability of different operating mode phase-plate are improved, and is contributed to
The further research and development of phase-plate, it is suitable for the electron microscopic imaging of transmission electron microscopy imaging, particularly frozen samples
Field popularization and application.
Brief description of the drawings
Fig. 1 is a kind of structural representation of phase panel assembly for transmission electron microscope imaging of exemplary embodiment of the present
Figure；
Fig. 2 is inside a kind of vacuum storehouse of phase panel assembly for transmission electron microscope imaging of exemplary embodiment of the present
Structural representation；
Fig. 3 is after a kind of phase panel assembly for transmission electron microscope imaging of exemplary embodiment of the present is connected with lens barrel
Structural representation；
Fig. 4 is the partial enlargement and internal structure schematic diagram of the support bar of exemplary embodiment of the present；
Fig. 5 is the structural representation of the partial enlargement of the phase board mount of exemplary embodiment of the present.
In figure：1- vacuum storehouse, 2- three-dimensional regulation platforms, 3- support bars, 4- lens barrels, 5- phase board mounts, 6- phase-plates, 7- are true
Empty flange, 8- fastening bolts, 9- sealing rings, 10- " C " shape spring, 11- vacuum electric connectors, 12- regulating platform bases；
101- vacuum warehouses, 102- vacuum doors；
201- lifting platforms, 202- translation stages；
301- connecting rods, 302- ceramic connecting pieces, 303- heating rods, 304- heating cores；
401- object lens back focal planes, 402- object lens object planes, pole shoe on 403- object lens, pole shoe under 404- object lens；
501- phase-plate standing grooves.
Embodiment
The present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings.
As shown in Figures 1 to 3, a kind of phase panel assembly for transmission electron microscope imaging, including vacuum storehouse 1, three-dimensional regulation platform 2
With support bar 3；The side in vacuum storehouse 1 is connected with the lens barrel 4 of transmission electron microscope, and three-dimensional regulation platform 2 is arranged on inside vacuum storehouse 1,
The one end of support bar 3 away from lens barrel 4 is connected with three-dimensional regulation platform 2, and support bar 3 is close to one end of lens barrel 4 and phase board mount 5
It is connected, support bar 3 carries out position adjustment by three-dimensional regulation platform 2, and the phase-plate 6 for making to be arranged on phase board mount 5 is in mirror
Position adjustment is carried out in cylinder 4.Three-dimensional regulation platform 2 and support bar 3 are arranged on inside vacuum storehouse 1, make whole device structure more
It is stable, and influence of the external environment to device stability can also be reduced to greatest extent；And can by three-dimensional regulation platform 2
To ensure that phase-plate 6 is adjusted to greatest extent in the lens barrel 4 of transmission electron microscope, phase-plate 6 can also be made close
The object lens back focal plane 401 of transmission electron microscope, can also be the elevated height of phase-plate 6 to transmission to be used for the phase imaging of phase-plate 6
At the object lens object plane 402 of Electronic Speculum, phase-plate 6 is set to carry out Electronic Speculum imaging as sample, so can quick detection in situ and prison
The quality of phase-plate 6 is controlled, and the further research to phase-plate 6 provides hardware guarantee.
Wherein, the side in vacuum storehouse 1 is connected by vacuum flange 7 with the lens barrel 4 of transmission electron microscope, in the present embodiment, very
Empty flange 7 is connected by four fastening bolts 8 with the lens barrel 4 of transmission electron microscope, wherein, the outer upper of vacuum storehouse 1 is provided with two
Individual fastening bolt 8, the lower inside of vacuum storehouse 1 are provided with the fastening bolt 8 that another two is sealed by " O " shape sealing ring 9, and root
Different according to the type of lens barrel 4 of transmission electron microscope, vacuum flange 7 carries out different selections according to its own shape and structure.
Three-dimensional regulation platform 2 includes one end and the lifting platform 201 that is connected inside vacuum storehouse 1 and another with lifting platform 201
The translation stage 202 being connected is held, translation stage 202 is connected with support bar 3.Three-dimensional regulation platform 2 passes through lifting platform 201 and translation stage
202 improve the Space adjustment flexibility of phase-plate 6 and the accuracy of positioning precision, can meet phase-plate 6 saturating to greatest extent
The needs of position adjustments in the lens barrel 4 of radio mirror, and according to the different achievable working positions in position in the lens barrel 4 of transmission electron microscope
(close to the object lens back focal plane 401 of transmission electron microscope, the position for the phase imaging of phase-plate 6), test position are put (close to transmission electricity
The object lens object plane 402 of mirror, the position for the quality testing of phase-plate 6 and analysis) and reproduction position (remote transmission electron microscope
Object lens on pole shoe 404, the position for regenerating it for being heated at high temperature phase-plate 6 on pole shoe 403 and object lens) etc. regulation need
Ask.
Multiple phase-plate standing grooves 501, phase-plate 6 and/or lens isis are provided with phase board mount 5 and passes through " C " shape
Spring 10 is fixed in phase-plate standing groove 501.
A kind of phase panel assembly for transmission electron microscope imaging also includes controller, and controller passes through vacuum electric connector 11
Electrically connected with three-dimensional regulation platform 2, for controlling the position adjustment of three-dimensional regulation platform 2 in the X, Y, Z direction.
Vacuum storehouse 1 includes vacuum warehouse 101 and the vacuum door 102 being arranged on vacuum warehouse 101, three-dimensional regulation
Platform 2 is connected by regulating platform base 12 with vacuum door 102 or vacuum warehouse 101, and vacuum electric connector 11 is arranged on regulation
On the vacuum door 102 of the top of platform base 12.
As shown in Figures 4 and 5, the connecting rod 301 and pass through pottery that support bar 3 is connected including one end with three-dimensional regulation platform 2
The heating rod 303 that porcelain connector 302 is connected with the other end of connecting rod 301, heating rod 303 are connected with phase board mount 5, added
Hot pin 303 is internally provided with heating core 304, and heating core 304 is connected by vacuum electric connector 11 with controller, controller
The heating-up temperature of heating core 304, heating rod 303 and phase board mount 5 is controlled to be made by the good conductor of heat.Heating rod 303 is used
Heated in phase-plate 6, play antipollution effect, ceramic connecting piece 302, which is connected, plays a part of electric insulation and heat insulation.
Temperature sensor is provided with heating rod 303, temperature sensor passes through vacuum electric connector 11 and temperature indicator
It is connected.
A kind of application method of phase panel assembly for transmission electron microscope imaging provided by the invention is as follows：
1st, the side in vacuum storehouse is installed at transmission electron microscope original lens isis vacuum interface, phase-plate is initially mounted on
On phase board mount, then by phase board mount on the heating rod of support bar, door together with three-dimensional regulation platform, phase-plate
Support bar, phase-plate are attached on vacuum storehouse, screw on fastening screw, are vacuumized.After vacuum is taken out, to phase-plate heating (generally
200 DEG C or so of heating-up temperature)；
2nd, after the completion of the regulation for treating transmission electron microscope, adjusted by controller and record the position coordinates of phase-plate, adjusted simultaneously
At the height of whole phase-plate to the object lens back focal plane of transmission electron microscope, sample to be observed is put into, realizes phase-plate phase imaging.
Wherein, in situ detection phase-plate is such as needed, then removes sample, regulation lifting platform rises to phase-plate the thing of transmission electron microscope
Imaging plane position, focusing is mixed up, carrying out the analysis such as phase structure and composition to phase-plate by transmission electron microscope detects；Such as need height
Warm regenerating phase plate, then by controlling three-dimensional regulation platform, phase-plate is moved to pole on the object lens of the remote transmission electron microscope preset
The position of pole shoe and other fearness high-temperature components under boots, object lens, carries out in-situ high temperature regeneration, you can extends the phase-plate life-span.
The present invention is only illustrated with above-described embodiment, and structure, set location and its connection of each part are all to have
Changed, on the basis of technical solution of the present invention, all improvement carried out according to the principle of the invention to individual part and equivalent
Conversion, should not be excluded outside protection scope of the present invention.
Claims (10)
- A kind of 1. phase panel assembly for transmission electron microscope imaging, it is characterised in that including,Vacuum storehouse (1), its side are connected with the lens barrel (4) of transmission electron microscope；Three-dimensional regulation platform (2), it is internal that it is arranged on the vacuum storehouse (1)；Support bar (3), its one end away from the lens barrel (4) are connected with the three-dimensional regulation platform (2), close to the lens barrel (4) one end is connected with phase board mount (5), and the support bar (3) carries out position tune by the three-dimensional regulation platform (2) Whole, the phase-plate (6) for making to be arranged on the phase board mount (5) carries out position adjustment in the lens barrel (4).
- A kind of 2. phase panel assembly for transmission electron microscope imaging according to claim 1, it is characterised in that the vacuum The side in storehouse (1) is connected by vacuum flange (7) with the lens barrel (4) of the transmission electron microscope.
- A kind of 3. phase panel assembly for transmission electron microscope imaging according to claim 1, it is characterised in that the three-dimensional Regulating platform (2) include the lifting platform (201) that one end and the vacuum storehouse (1) inside is connected and with the lifting platform (201) The translation stage (202) that the other end is connected, the translation stage (202) are connected with the support bar (3).
- A kind of 4. phase panel assembly for transmission electron microscope imaging according to claim 1, it is characterised in that the phase Multiple phase-plate standing grooves (501) are provided with board mount (5), the phase-plate (6) and/or lens isis pass through " C " shape bullet Spring (10) is fixed in the phase-plate standing groove (501).
- 5. a kind of phase panel assembly for transmission electron microscope imaging according to any one of Claims 1-4, its feature exist In, in addition to controller, the controller electrically connected with the three-dimensional regulation platform (2) by vacuum electric connector (11), be used for Control the position adjustment of the three-dimensional regulation platform (2) in the X, Y, Z direction.
- A kind of 6. phase panel assembly for transmission electron microscope imaging according to claim 5, it is characterised in that the vacuum Storehouse (1) includes vacuum warehouse (101) and the vacuum door (102) being arranged on the vacuum warehouse (101), the three-dimensional Regulating platform (2) is connected by regulating platform base (12) with the vacuum door (102) or vacuum warehouse (101), the vacuum Electric connector (11) is arranged on the vacuum door (102) above the regulating platform base (12).
- A kind of 7. phase panel assembly for transmission electron microscope imaging according to claim 5, it is characterised in that the support Bar (3) includes the connecting rod (301) that is connected with the three-dimensional regulation platform (2) of one end and by heat-insulated ceramic connecting piece (302) heating rod (303) being connected with the connecting rod (301) other end, the heating rod (303) and the phase-plate branch Frame (5) is connected.
- A kind of 8. phase panel assembly for transmission electron microscope imaging according to claim 7, it is characterised in that the heating Rod (303) is internally provided with heating core (304), the heating core (304) by the vacuum electric connector (11) with it is described Controller is connected, and the controller controls the heating-up temperature of the heating core (304).
- A kind of 9. phase panel assembly for transmission electron microscope imaging according to claim 8, it is characterised in that the heating Rod (303) and the phase board mount (5) are made by the good conductor of heat.
- 10. a kind of phase panel assembly for transmission electron microscope imaging according to claim 8, it is characterised in that described to add Temperature sensor is provided with hot pin (303), the temperature sensor passes through the vacuum electric connector (11) and temperature display Device is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710866614.1A CN107544121B (en) | 2017-09-22 | 2017-09-22 | Phase plate device for transmission electron microscope imaging |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710866614.1A CN107544121B (en) | 2017-09-22 | 2017-09-22 | Phase plate device for transmission electron microscope imaging |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107544121A true CN107544121A (en) | 2018-01-05 |
| CN107544121B CN107544121B (en) | 2024-05-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710866614.1A Active CN107544121B (en) | 2017-09-22 | 2017-09-22 | Phase plate device for transmission electron microscope imaging |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0291690A2 (en) * | 1987-05-16 | 1988-11-23 | Leybold Aktiengesellschaft | Device for loading work pieces to and from a coating chamber |
| EP0650301A2 (en) * | 1993-10-26 | 1995-04-26 | Matsushita Electric Industrial Co., Ltd. | Three-dimensional picture image display apparatus |
| KR20110077083A (en) * | 2009-12-30 | 2011-07-07 | 한국기초과학지원연구원 | A phase plate with improved heating mechanism for tem |
| US20110174971A1 (en) * | 2010-01-19 | 2011-07-21 | Marek Malac | Phase contrast imaging and preparing a tem therefor |
| US20110220791A1 (en) * | 2009-09-11 | 2011-09-15 | Reed Bryan W | Ponderomotive Phase Plate For Transmission Electron Microscopes |
| TW201216316A (en) * | 2010-10-06 | 2012-04-16 | Academia Sinica | TEM phase plate loading system |
| CN103197411A (en) * | 2013-03-20 | 2013-07-10 | 中国科学院苏州生物医学工程技术研究所 | Phase plate assembly and microscope system with field depth changeable |
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| CN105474101A (en) * | 2013-08-26 | 2016-04-06 | Asml荷兰有限公司 | Radiation source and lithographic apparatus |
| CN206038989U (en) * | 2016-08-17 | 2017-03-22 | 湖州欣天精密光学仪器有限公司 | Rotation regulation clamping formula grating |
| CN207366811U (en) * | 2017-09-22 | 2018-05-15 | 中国科学院生物物理研究所 | A kind of phase panel assembly for transmission electron microscope imaging |
-
2017
- 2017-09-22 CN CN201710866614.1A patent/CN107544121B/en active Active
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|---|---|---|---|---|
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| CN107544121B (en) | 2024-05-24 |
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