CN108826961A - A kind of interior rotation high temp sintering device for tubular target preparation - Google Patents
A kind of interior rotation high temp sintering device for tubular target preparation Download PDFInfo
- Publication number
- CN108826961A CN108826961A CN201810466187.2A CN201810466187A CN108826961A CN 108826961 A CN108826961 A CN 108826961A CN 201810466187 A CN201810466187 A CN 201810466187A CN 108826961 A CN108826961 A CN 108826961A
- Authority
- CN
- China
- Prior art keywords
- burner hearth
- tubular target
- high temp
- interior rotation
- ontology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/08—Arrangements of linings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/04—Casings; Linings; Walls; Roofs characterised by the form, e.g. shape of the bricks or blocks used
- F27D1/06—Composite bricks or blocks, e.g. panels, modules
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D2001/0059—Construction elements of a furnace
- F27D2001/0066—Movable or removable parts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
- F27D2099/0081—Joint
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27M—INDEXING SCHEME RELATING TO ASPECTS OF THE CHARGES OR FURNACES, KILNS, OVENS OR RETORTS
- F27M2003/00—Type of treatment of the charge
- F27M2003/04—Sintering
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacture And Refinement Of Metals (AREA)
Abstract
The invention discloses a kind of interior rotation high temp sintering devices for tubular target preparation, which includes sintering equipment ontology, which includes burner hearth upper cover, burner hearth ontology and burner hearth lower cover；Burning platform is held, is arranged under burner hearth on lid, for placing tubular target；Rotary components hold burning platform for rotating, which can be magnetic rotation component.Interior rotation rotation of the high temp sintering device by tubular target, realize the uniformity of heating temperature in tubular target sintering process, reduce large scale tubular target during heating uneven heating the problem of, can prepare contraction uniformly, sintering not deformation, indehiscent large scale tubular target.
Description
Technical field
The invention belongs to target sintering equipment technical fields, and in particular to a kind of interior rotation for tubular target preparation is high
Warm sintering equipment.
Background technique
Target is sputtered under appropriate process conditions by magnetron sputtering, multi-arc ion coating or other kinds of coating system
The sputtering source of various function films is formed on substrate.Target is mainly used in photovoltaic cell, flat-panel monitor, large-scale integrated
The industries such as circuit, microelectronic component and decorative coveringn are a kind of functional materials of high added value, with China's electronics and information industry
Rapid development, China has become one of maximum country of sputtering target material demand in the world.Plated film is carried out using planar targets,
The disadvantage is that film deposition thickness uniformity is not easily controlled, target utilization is low, and etching target uniformity is poor.And compare flat target
Material rises to 80% or more of rotary target from the 30%-50% of flat target using the utilization rate of tubular rotary target.Due to pipe
Shape rotary target material has the characteristics that utilization rate is high, and extensive attention is commercially available.But the sintering of target is to the sensitivity of temperature
Property require it is very high, since the uneven heating of tubular target during the sintering process is even, sintered products be easy to appear target contraction
Problem of non-uniform.In addition, there are many hidden danger for the design and the selection of material of usually chamber structure, it often will cause burner hearth and open
Phenomena such as splitting, sink, deforming is not able to satisfy the normal sintering of product.
Summary of the invention
In order at least solve one of above-mentioned technical problem of the existing technology, the embodiment of the invention discloses one
Interior rotation high temp sintering device of the kind for tubular target preparation, the sintering equipment include：
Sintering equipment ontology, which includes burner hearth upper cover, burner hearth ontology and burner hearth lower cover, wherein on burner hearth
It covers and is fastenedly connected with the top of burner hearth ontology, the movable connection in lower part of burner hearth lower cover and burner hearth ontology；
Burning platform is held, is arranged under burner hearth on lid, for placing tubular target；
Rotary components hold burning platform for rotating.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, rotary components packet
Include magnetic rotation component.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, burner hearth upper cover,
Burner hearth ontology and burner hearth lower cover are spliced by fire resisting material fiber plate by the wedge structure fissure of displacement.
Further, the disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, it is resistance to
Corundum support column is provided in fiery material fiber plate.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, burner hearth lower cover with
Pass through the movable connection of step sealing means between burner hearth ontology.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, burner hearth sheet are external
Layer uses nanometer scale ceramics fiberboard.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, sintering equipment
Outside is provided with sealed shell of tank, which is Double water-cooled structure.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, is additionally provided with use
In the furnace body frame of fixed sintering equipment.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, furnace body frame packet
Cylindrical sleeve is included, which is arranged outside sintering equipment.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, the sintering equipment
It further include lifting assembly, for driving the lifting of burner hearth lower cover.
The disclosed interior rotation high temp sintering device for tubular target preparation of some embodiments of the invention, the sintering equipment
It further include guidance set, for the lifting guiding of lifting assembly and positioning.
The present invention discloses the interior rotation high temp sintering device for tubular target preparation of embodiment offer, passes through tubular target
The rotation of material realizes the uniformity of heating temperature in tubular target sintering process, reduces large scale tubular target and is heating
In the process the problem of uneven heating, it can prepare and shrink uniform, sintering not deformation, indehiscent large scale tubular target.
Detailed description of the invention
High temp sintering device composition schematic diagram is rotated in Fig. 1 embodiment 1
Magnetic rotation component diagram in rotation high temp sintering device in Fig. 2 embodiment 2
3 fire resisting material fiber plate splicing structure schematic diagram of Fig. 3 embodiment
4 fiberboard seaming assembly schematic diagram of Fig. 4 embodiment
5 burner hearth lower cover of Fig. 5 embodiment and burner hearth ontology are tightly connected schematic diagram
High temp sintering device furnace body frame schematic diagram is rotated in Fig. 6 embodiment 6
Appended drawing reference
10, burner hearth upper cover 11, burner hearth ontology
12, burner hearth lower cover 13, hold burning platform
14 hearth bases 2, decelerating motor
3, magnetic rotation component 31, interior magnet rotor
32, outer magnet rotor 33, separation sleeve
41, furnace body frame 42, lifting assembly
43, furnace body frame pedestal 111, fixation kit
112, sealed step 51, the first fire resisting material fiber plate
52, the second fire resisting material fiber plate 53, third fire resisting material fiber plate
512, the first wedge-shaped connecting sewing of wedge-shaped connecting sewing 523, second
612, third wedge shape connecting sewing
Specific embodiment
Dedicated word " embodiment " herein, should not necessarily be construed as being better than as any embodiment illustrated by " exemplary " or
It is better than other embodiments.Testing performance index in this law embodiment, unless stated otherwise, using this field conventional methods.
It should be understood that it is to describe special embodiment that heretofore described term, which is only, it is not intended to limit disclosed by the invention
Content.
Unless otherwise stated, technical and scientific terms used herein has the common of the technical field of the invention
The normally understood identical meanings of technical staff.As other not specifically specified raw material, the reagent, test method in the present invention
The usually used raw material and reagent of those skilled in the art, and the experiment side generallyd use are referred both to technological means
Method and technological means；The present invention discloses the movable connection addressed, and typically referring to burner hearth lower cover can be close with burner hearth ontology lower end
Envelope connection, can separate both when needing, convenient for placing tubular target green body into burner hearth ontology, for example, can will be under burner hearth
Gai Yucheng burns platform and moves down certain distance, is then placed on to hold tubular target green body and burn on platform, moves burner hearth then up
Lower cover connect and seals with burner hearth ontology.
The embodiment of the invention discloses a kind of interior rotation high temp sintering device for tubular target preparation, the sintering equipments
Including sintering equipment ontology, which includes burner hearth upper cover, burner hearth ontology and burner hearth lower cover；Burning platform is held, burning platform is held
It is arranged under the burner hearth of device noumenon on lid, for placing tubular target；Rotary components hold burning platform for rotating.
In some embodiments, burner hearth ontology is spliced using fire resisting material fiber plate, in general, first by refractory material fibre
Plate to be tieed up to be connected with each other by wedge structure, the fire resisting material fiber board group part being completely embedded, the component can be horizontally disposed with,
Same fire resisting material fiber board group part can be successively arranged from below to up in vertical direction, neighbouring fire resisting material fiber
When connecting between board group part, the connecting sewing of wedge structure is staggered, i.e., the connecting sewing of each wedge structure not with other connections
Seam is connected, and reduces burner hearth heat loss, improves burner hearth internal temperature homogeneity.In two fire resistings of vertical direction direct neighbor
It between material fiber board group part, is connected by seaming erection method, it is ensured that closely connect between the two and meet burner hearth ontology institute
The mechanical strength needed.Under normal conditions, burner hearth body interior forms cylindrical cavity.In some embodiments, in fire proofed wood
It is provided with alundum tube support construction in material fiberboard, effectively overcomes resistance to material sinking, cracking, deformation etc. in equipment use process
Phenomenon.In some embodiments, fire resisting material fiber plate is high purity aluminium oxide fiberboard, for example, aluminium oxide in the fiberboard
Content > 95%, high purity aluminium oxide fiberboard are sintered before assembly by 1600 DEG C of high temperature again, ensure that refractory material
Using effect and service life.In some embodiments, burner hearth outer layer is additionally provided with nano ceramic fibers plate, for burner hearth
The heat preservation of ontology.
In some embodiments, burner hearth upper cover is spliced using fire resisting material fiber plate, in general, first leading to refractory material
Cross wedge structure interconnection, the fire resisting material fiber board group part being completely embedded, adjacent fire resisting material fiber board group part
Between when connecting, the connecting sewing of wedge structure is staggered, i.e., the connecting sewing of each wedge structure is not connected with other connecting sewings
It connects.In some embodiments, burner hearth ontology, burner hearth upper cover fire resisting material fiber board group part in be provided with corundum support column.
In some embodiments, burner hearth lower cover is spliced using fire resisting material fiber plate, in general, first by refractory material
It is connected with each other by wedge structure, the fire resisting material fiber board group part being completely embedded, adjacent fire resisting material fiber board group
When connecting between part, the seam of wedge structure is staggered, i.e., the connecting sewing of each wedge structure is not connected with other seams.
In some embodiments, it is provided with corundum support column in the fire resisting material fiber board group part of burner hearth lower cover, it can be by receiving
Power is transferred on the support frame of furnace bottom, and protection refractory material is not damaged.In some embodiments, burner hearth lower cover and burner hearth sheet
Body is connected sealing using step-like structure, i.e., in the position that burner hearth lower cover is in contact with burner hearth ontology, burner hearth lower cover and burner hearth
It is respectively arranged with the step being mutually adapted on ontology, sealing material, such as 1800 fiber type cottons are provided between step, assembles
When, step is mutually adapted and is able to achieve excellent sealing, and connection can will be fully sealed between burner hearth lower cover and burner hearth ontology.
In some embodiments, it uses U-shaped Si-Mo rod for heating element, is arranged using circumference heating method in cylindrical shape
In burner hearth, and fix the heating element with fibre fixture, can integral installation, replacement, avoid artificial damage；Thermometric heat
It is even that armouring B is selected to index thermocouple, it is vertically mounted on roof of the furnace center.
As optional embodiment, rotary components include magnetic rotation component, and burner hearth lower cover is connected with the rotary components；Rotation
Turning component includes magnetic shaft coupling, and magnetic shaft coupling includes outer magnet rotor, interior magnet rotor, separation sleeve, inside and outside yoke；Working condition
In, it is rotated by magneton outside motor drive, and then interior magnet rotor rotation is driven by magneticaction by outer magnet rotor, and then pass through
Interior magnet rotor drives holding on lid under burner hearth to burn platform rotation, and then is placed on the tubular target held burn on platform relative to burner hearth ontology
Rotation.It holds burning platform to make rotating motion by magnetic force rotary components relative to burner hearth ontology, drives sintering tubular target in burner hearth sheet
Rotation, sintering equipment ontology remain stationary state in vivo, effectively reduce large scale tubular target and are heated during heating not
Equal problem, and it is able to maintain the good sealing property in burner hearth, it is ensured that the good control to sintering atmosphere.As some implementations
Mode, the rotation speed of rotary components are set as being no more than 15 revs/min, are usually arranged as rotating counterclockwise, further, rotation
Speed can frequency control within this range.
In some embodiments, the outside of high temp sintering device may be provided for fixing the high temp sintering device
Furnace body frame, furnace body frame can be cylindrical sleeve, be arranged outside sintering equipment, for fixing entire sintering equipment.?
In some embodiments, burner hearth ontology can be mutually permanently connected with furnace body frame, according to required height in furnace body frame
In be additionally provided with lifting assembly, hearth base is fixed on lifting assembly, burner hearth lower cover is realized by control lifting assembly
Rise or fall.Usual hearth base is arranged in burner hearth ontology in the following, for carrying burner hearth ontology.
In some embodiments, furnace body frame main body basic structure is the cylindrical type being arranged in outside sintering equipment
Sleeve is all welded using national standard A3 fashioned iron and plate, and surface carries out rust preventive paint processing, prevents high temperature to operator
Caused by unexpected injury.
As optional embodiment, the lifting assembly of burner hearth lower cover includes elevating chain, which drives under burner hearth
Lid moves up and down, while driving to hold and burning platform movement, while being assembled with travel switch in the whole story position of lifting assembly stroke, can
To realize duplicate protection；It further include guidance set, for the lifting guiding of lifting assembly and positioning.
As optional embodiment, two groups of guide posts can be set on the column of furnace body two sides as guidance set, protected
It is stable to demonstrate,prove burner hearth lower cover.
As optional embodiment, sintering equipment ontology can be set to sealed construction.
As optional embodiment, provide vacuum using big pumping speed rotary-vane vaccum pump, can in a relatively short period of time by
Gas is extracted out in burner hearth, accelerates the displacement of oven cavity atmosphere, meets the atmosphere requirements of product sintering.
As optional embodiment, sintering equipment is further equipped with safety valve, digital display manometer and digital display vacuum meter, sintering dress
It sets ontology bottom of furnace body and is disposed with atmosphere interface all the way, gas is passed through furnace from burner hearth bottom centre after refractory material preheats
In thorax, roof of the furnace has Waste gas outlet, and exhaust valve is housed.
The sinterable length for preparing tubular target of interior rotation high temp sintering device disclosed by the embodiments of the present invention is reachable
480mm, outer diameter are up to 360mm.
Technical detail disclosed by the invention is described further with reference to embodiments.
Fig. 1 is that the disclosed interior rotation high temp sintering device for tubular target preparation of the embodiment of the present invention 1 forms signal
Figure, which includes burner hearth ontology 11, which is cylindrical shape, internal formation cylindrical cavity, and
Burner hearth ontology 11 is along its axially vertical setting；Burner hearth upper cover 10 is arranged on 11 top of burner hearth ontology, and connects with burner hearth ontology 11
It is connected in one；For the setting of burner hearth lower cover 12 in 11 lower part of burner hearth ontology, 12 shape of burner hearth lower cover is disc, disc burner hearth lower cover
12 edge is set as multi-stage stairs, and stepped portions and 11 phase of burner hearth ontology of burner hearth lower cover 12 are tightly connected；Burner hearth lower cover 12
Above, it is provided with to hold and burns platform 13；Magnetic rotation component 3 is provided below in burner hearth lower cover 12, and magnetic rotation component 3 is fastened with burning platform 13 is held
Connection for holding the rotation for burning platform 13, and then drives the rotation of tubular target；Decelerating motor 2 is connected with magnetic rotation component 3,
For driving magnetic rotation component 3.
Fig. 2 is magnetic rotation component diagram in interior rotation high temp sintering device disclosed in embodiment 2.Magnetic rotation group in Fig. 2
Part includes interior magnet rotor 31 and outer magnet rotor 32, is provided with separation sleeve 33 between interior magnet rotor 31 and outer magnet rotor 32；Outer magnetic turns
Son 32 is connected with decelerating motor 2, is provided with to hold on burner hearth lower cover 12 and burns platform 13, holds burning platform 13 and turns magneton 31 and pass through to connect with interior
Axis is fixedly connected；Decelerating motor 2 drives outer magnet rotor 32 to rotate, and drives interior magnetic when outer magnet rotor 32 rotates under magnetic induction effect
Rotor 31 rotates, and then drives to hold and burn the rotation of platform 13；33 upper end of separation sleeve is fixed with burner hearth lower cover 12 and is tightly connected.
Fig. 3 is fire resisting material fiber plate splicing structure schematic diagram disclosed in embodiment 3.In Fig. 3, in upper figure (a), fire proofed wood
Expect that fiberboard includes multiple first fire resisting material fiber plates 51, multiple second fire resisting material fiber plates 52 and multiple third fire proofed woods
Expect fiberboard 53, wherein the right side of the first fire resisting material fiber plate 51 is provided with sunk structure, the second fire resisting material fiber plate
52 left and right sides is respectively arranged with bulge-structure, and the left and right sides of third fire resisting material fiber plate 53 is respectively arranged with recess knot
Structure；The left hand projection structure of second fire resisting material fiber plate 52 and the right side sunk structure of the first fire resisting material fiber plate 51 are mutually fitted
Match, forms the first wedge-shaped connecting sewing 512 when being bolted together between the two, form wedge-shaped connection structure；Second refractory material is fine
The right side bulge-structure of dimension plate 52 is adapted with the left side sunk structure of third fire resisting material fiber plate 53, two when being bolted together
The second wedge-shaped connecting sewing 523 is formed between person, forms wedge-shaped connection structure；Multiple fire resistings with bulge-structure and sunk structure
Material fiber plate is successively assembled in the horizontal direction, and fire resisting material fiber board group part can be obtained；Usual first fire resisting material fiber
The both ends of fire resisting material fiber board group part are arranged in plate, and the second fire resisting material fiber plate and third fire resisting material fiber plate are staggeredly set
It sets in the middle part of fire resisting material fiber board group part；Multiple fire resisting material fiber board group parts are successively assembled in vertical direction, available
The present invention discloses the refractory material of middle burner hearth, exemplified by Fig. 3 (b) schematic diagram, wherein including multiple first flame-retardant fibre boards 51,
Multiple second fire resisting material fiber plates 52 and multiple third fire resisting material fiber plates 53, between fire resisting material fiber board group part mutually
When connection, the wedge-shaped connecting sewing of formation is shifted to install mutually, that is, as shown in the figure, the adjacent each other first wedge-shaped connecting sewing
512, the second wedge-shaped connecting sewing 523, third wedge shape connecting sewing 612 position intermesh, each splayed joint is mutually disconnected, i.e.,
Refractory material is spliced by fire resisting material fiber plate by wedge structure connection, fissure of displacement set-up mode.
Fig. 4 is fiberboard seaming assembly schematic diagram disclosed in embodiment 4.The side fiberboard A is provided with step in Fig. 4, fine
The side of dimension plate B is provided with step, and when interconnection, the step being arranged on the step and fiberboard B that are arranged on fiberboard A is mutual
Adaptation, forms the structure being brought into tight contact with each other, engaged.
Fig. 5 is that burner hearth lower cover disclosed in embodiment 5 and burner hearth ontology are tightly connected schematic diagram.Burner hearth lower cover 12 in figure
Two steps that radius is gradually reduced, furnace are disposed in its vertical direction in the marginal position of burner hearth lower cover for disc
The lower end of thorax ontology 11 is provided with step structure compatible with the step structure of burner hearth lower cover marginal position setting, burner hearth sheet
Body 11 and burner hearth lower cover form step connecting sewing, i.e. sealed step 112 when fitting together between the two, in sealed step
1800 fiber type cottons are provided on 112, when burner hearth ontology 11 and burner hearth lower cover 12 assemble, the cellucotton between step structure occurs
Certain deformation, it is ensured that sealed step 112 strictly seals.
Fig. 6 is interior rotation high temp sintering device furnace body frame schematic diagram disclosed in embodiment 6.Furnace body frame 41 in Fig. 6
It for cylindrical sleeve, is vertically arranged, bottom is provided with frame base 43, and furnace body frame 41 is fixed at frame base
On 43, burner hearth ontology is arranged inside furnace body frame 41, and burner hearth ontology passes through connecting component 111 and the fixed company of 41 phase of furnace body frame
It connects；Hearth base 14 is arranged in burner hearth lower cover in the following, for carrying burner hearth lower cover, lifting assembly 42 is arranged in furnace body frame 41
Side, and be fixed on frame base 43, the top of lifting assembly 42 is fixedly connected with 14 phase of hearth base, and lifting assembly 42 is along vertical
When histogram moves up and down, moving up and down for burner hearth lower cover can be driven, convenient for assembling or separating with burner hearth ontology.
The present invention discloses the interior rotation high temp sintering device for tubular target preparation of embodiment offer, passes through tubular target
The rotation of material realizes the uniformity of heating temperature in tubular target sintering process, reduces large scale tubular target and is heating
In the process the problem of uneven heating, it can prepare and shrink uniform, sintering not deformation, indehiscent large scale tubular target.
Technical detail disclosed in technical solution and embodiment disclosed by the invention, is merely illustrative structure of the invention
Think, and does not constitute a limitation of the invention, it is all not have a creative change to what technical detail disclosed by the invention was made, it is right
Presently disclosed techniques scheme is applied in combination, all with present invention inventive concept having the same, all in the claims in the present invention
Protection scope within.
Claims (10)
1. a kind of interior rotation high temp sintering device for tubular target preparation, which is characterized in that the sintering equipment includes：
Sintering equipment ontology, the sintering equipment ontology includes burner hearth upper cover, burner hearth ontology and burner hearth lower cover, wherein the burner hearth
Upper cover and the top of the burner hearth ontology are fastenedly connected, the movable connection in lower part of the burner hearth lower cover and the burner hearth ontology；
Burning platform is held, is arranged under the burner hearth on lid, for placing tubular target；
Rotary components described hold burning platform for rotating.
2. the interior rotation high temp sintering device for tubular target preparation according to claim 1, which is characterized in that the rotation
Turning component is magnetic rotation component.
3. the interior rotation high temp sintering device for tubular target preparation according to claim 1, which is characterized in that the furnace
Thorax upper cover, the burner hearth ontology and the burner hearth lower cover are spliced by fire resisting material fiber plate by the wedge structure fissure of displacement.
4. the interior rotation high temp sintering device for tubular target preparation according to claim 1, which is characterized in that the furnace
Pass through the movable connection of step sealing means between thorax lower cover and the burner hearth ontology.
5. the interior rotation high temp sintering device for tubular target preparation according to claim 3, which is characterized in that described resistance to
Corundum support column is provided in fiery material fiber plate.
6. the interior rotation high temp sintering device for tubular target preparation according to claim 1, which is characterized in that the furnace
This volume surrounding of thorax uses nanometer scale ceramics fiberboard.
7. the interior rotation high temp sintering device for tubular target preparation according to claim 1, which is characterized in that also set up
There is the furnace body frame for fixing the sintering equipment.
8. the interior rotation high temp sintering device for tubular target preparation according to claim 7, which is characterized in that the furnace
Body frame includes cylindrical sleeve, and the outside of the sintering equipment is arranged in the cylindrical sleeve.
9. the interior rotation high temp sintering device for tubular target preparation according to claim 1, which is characterized in that the burning
Tying device further includes lifting assembly, for driving the lifting of the burner hearth lower cover.
10. the interior rotation high temp sintering device for tubular target preparation according to claim 9, which is characterized in that described
Sintering equipment further includes guidance set, for the lifting guiding of the lifting assembly and positioning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810466187.2A CN108826961A (en) | 2018-05-16 | 2018-05-16 | A kind of interior rotation high temp sintering device for tubular target preparation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810466187.2A CN108826961A (en) | 2018-05-16 | 2018-05-16 | A kind of interior rotation high temp sintering device for tubular target preparation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108826961A true CN108826961A (en) | 2018-11-16 |
Family
ID=64148948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810466187.2A Pending CN108826961A (en) | 2018-05-16 | 2018-05-16 | A kind of interior rotation high temp sintering device for tubular target preparation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108826961A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110514016A (en) * | 2019-09-09 | 2019-11-29 | 湖南金铠新材料科技有限公司 | A kind of equipment for being sintered anode material of lithium battery specific complex layer saggar |
| CN113465363A (en) * | 2021-06-15 | 2021-10-01 | 西安交通大学 | Magnetic rotary deposition device and high-temperature high-pressure sintering furnace based on same |
| CN113532116A (en) * | 2021-06-15 | 2021-10-22 | 西安交通大学 | High-temperature rotary material platform air pressure furnace |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2671101Y (en) * | 2003-12-05 | 2005-01-12 | 广东风华高新科技集团有限公司 | Rotary sintering table |
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN204268872U (en) * | 2014-06-27 | 2015-04-15 | 长沙矿冶研究院有限责任公司 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
| CN104567365A (en) * | 2014-12-16 | 2015-04-29 | 广东风华高新科技股份有限公司 | Bell furnace and burning bearing platform thereof |
| CN204574799U (en) * | 2015-03-05 | 2015-08-19 | 阿尔赛(苏州)无机材料有限公司 | Rich oxygen content target atmosphere sintering furnace |
| CN107305099A (en) * | 2016-04-18 | 2017-10-31 | 嘉峪关索通炭材料有限公司 | A kind of can-type calcine furnace body of heater heat-insulation and heat-preservation and sealing structure |
| CN206772020U (en) * | 2017-03-20 | 2017-12-19 | 深圳恒泰克科技有限公司 | The pressure sintering apparatus of high-density niobium oxide Nb2O5 rotary target materials |
-
2018
- 2018-05-16 CN CN201810466187.2A patent/CN108826961A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2671101Y (en) * | 2003-12-05 | 2005-01-12 | 广东风华高新科技集团有限公司 | Rotary sintering table |
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN204268872U (en) * | 2014-06-27 | 2015-04-15 | 长沙矿冶研究院有限责任公司 | Can be used for the atmosphere clock hood type furnace of ITO target sintering |
| CN104567365A (en) * | 2014-12-16 | 2015-04-29 | 广东风华高新科技股份有限公司 | Bell furnace and burning bearing platform thereof |
| CN204574799U (en) * | 2015-03-05 | 2015-08-19 | 阿尔赛(苏州)无机材料有限公司 | Rich oxygen content target atmosphere sintering furnace |
| CN107305099A (en) * | 2016-04-18 | 2017-10-31 | 嘉峪关索通炭材料有限公司 | A kind of can-type calcine furnace body of heater heat-insulation and heat-preservation and sealing structure |
| CN206772020U (en) * | 2017-03-20 | 2017-12-19 | 深圳恒泰克科技有限公司 | The pressure sintering apparatus of high-density niobium oxide Nb2O5 rotary target materials |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110514016A (en) * | 2019-09-09 | 2019-11-29 | 湖南金铠新材料科技有限公司 | A kind of equipment for being sintered anode material of lithium battery specific complex layer saggar |
| CN110514016B (en) * | 2019-09-09 | 2021-01-08 | 湖南金铠新材料科技有限公司 | Equipment for sintering composite layer saggar special for lithium battery anode material |
| CN113465363A (en) * | 2021-06-15 | 2021-10-01 | 西安交通大学 | Magnetic rotary deposition device and high-temperature high-pressure sintering furnace based on same |
| CN113532116A (en) * | 2021-06-15 | 2021-10-22 | 西安交通大学 | High-temperature rotary material platform air pressure furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108826961A (en) | A kind of interior rotation high temp sintering device for tubular target preparation | |
| US10433374B2 (en) | Electric induction melting assembly | |
| CN108726850A (en) | Pressure controls glass melting device and method | |
| US9139438B2 (en) | Graphitization furnace and method for producing graphite | |
| CN108516820B (en) | A kind of short route sintering process of tin indium oxide target material | |
| CN102531600B (en) | Sintering synthesis method for negative expansion ceramic (ZrMgMo3O12) | |
| CN209371770U (en) | A kind of High Temperature Rotating sintering furnace | |
| CN1327143A (en) | Metal smelting equipment | |
| CN101551194B (en) | device for sintering transparent ceramics by induction heating method | |
| JP6198363B1 (en) | Cylindrical sputtering target material firing apparatus and firing method | |
| CN103510050B (en) | Reaction chamber and film deposition equipment | |
| CN108895828A (en) | It is a kind of for tubular target preparation Microwave Hybrid Heating in rotate sintering equipment | |
| CN213266616U (en) | Heat treatment furnace | |
| CN211739861U (en) | Sintering furnace structure of refractory brick | |
| CN207163211U (en) | Elevator electrical furnace top plate and elevator electrical furnace | |
| CN209010572U (en) | A kind of horizontal magnetic furnace of novel vertical lifting | |
| CN216869131U (en) | Blade is fired and is used vacuum furnace | |
| CN219756999U (en) | Sector fireproof burning-bearing plate | |
| CN110671926B (en) | Sintering method of refractory brick sintering furnace | |
| CN220393992U (en) | Single crystal furnace | |
| KR20210015269A (en) | Cover apparatus for a melt metallurgic furnace | |
| CN214469851U (en) | Drying device is used in electroceramics production | |
| CN220224307U (en) | Sputtering equipment | |
| CN219526784U (en) | Vacuum coating process chamber and vacuum coating device | |
| CN117490398A (en) | Rotary furnace vacuum smelting furnace for special alloy |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181116 |
|
| RJ01 | Rejection of invention patent application after publication |