CN107543665B - Lossless atmosphere is depressured vacuum gas switching device - Google Patents

Lossless atmosphere is depressured vacuum gas switching device Download PDF

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Publication number
CN107543665B
CN107543665B CN201610965434.4A CN201610965434A CN107543665B CN 107543665 B CN107543665 B CN 107543665B CN 201610965434 A CN201610965434 A CN 201610965434A CN 107543665 B CN107543665 B CN 107543665B
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gas
sample
standard gases
aperture
valve
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CN107543665A (en
Inventor
窦仁超
师立侠
孙立臣
洪晓鹏
刘兴悦
周雪茜
钟亮
韩琰
窦威
杨定魁
任国华
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Beijing Institute of Spacecraft Environment Engineering
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Beijing Institute of Spacecraft Environment Engineering
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Abstract

The invention discloses a kind of lossless atmosphere to be depressured vacuum gas switching device, it mainly include calibrating gas circulation line, sample gas circulation line and gas switching valve device, gas switching valve device includes Standard Gases solenoid valve and sample pneumoelectric magnet valve, and it is connected to the current limliting aperture on Standard Gases solenoid valve and sample pneumoelectric magnet valve the same end, current limliting aperture is connected by wavy metal pipeline with the leak detection mouth of integral leakage tester, and the aperture of current limliting aperture and the inlet pressure of leak detector are adapted.The present invention solves tested gas dirt and shortens the integral leakage test equipment service life, and solve sample gas causes gas component ratio to be lacked of proper care farther out, solves test gas pressure from an atmospheric pressure or positive pressure and drops quickly to vacuum state;It solves the problems, such as that mixed deposit occurs between gas with various in fast handover procedures between gas.

Description

Lossless atmosphere is depressured vacuum gas switching device
Technical field
The invention belongs to spacecraft leak detection technology fields, in particular it relates to which spacecraft is surveyed in integral leakage Gas with various switches into vacuum mass spectrum chamber during examination, for guaranteeing that sample introduction gas is quickly down to high vacuum environment from atmospheric pressure, And sample introduction gas component ratio is lossless.
Background technique
Spacecraft needs to carry out during general assembly multiple integral leakage test job, needs according to existing integral leakage test method Introduce Standard Gases and gas to be measured (and referred to as sample gas).The pressure of Standard Gases and gas to be measured is a normal pressure (about standard Atmospheric pressure) or positive pressure, and the operating pressure of integral leakage test equipment is that vacuum environment is generally 10-6Pa~10-1Pa, therefore, always Leak rate tester can not directly test standard gas and sample gas.Simultaneously as standard gas source and gas source to be measured apart from integral leakage tester compared with Far, when the concentration of gas source changes, needing in time will be in the reflection to integral leakage tester of concentration change information.In order to Spacecraft total leak rate tester, which can not work, to be detected in positive pressure environment and timely responds to gas source concentration variation issue, and the present invention provides A kind of invention device is provided, above the problem of encountering in test is can solve, meets the needs of spacecraft leak detection.
Summary of the invention
Object of the present invention is under test gas different during solving spacecraft total leak rate test to enter integral leakage tester mass spectrum Indoor problem.The gas switching device of design can be by different under test gas from an atmospheric pressure state reduction of blood pressure in high-speed to vacuum State, so that leak detection mouth pressure and mass spectrum chamber pressure can satisfy integral leakage tester job requirement.
Spacecraft total leak rate needs exchange-column shift testing standard gas and sample gas during testing, since tested gas pressure is far high In integral leakage tester job requirement, it is therefore desirable to be depressured to Standard Gases and sample gas;Standard Gases and sample autogenous cutting are required simultaneously Change that the time is short, but the pumping speed of integral leakage tester is limited, in meeting in gas handoff procedure so that having between Standard Gases and sample gas mixed It deposits, i.e., after pipeline shifts to sample gaseity (or by switching to Standard Gases state under sample gaseity) by standard gaseity incision, pipeline The sample gas that the Standard Gases of middle retention can and newly enter mixes, and seriously affects the authenticity and reliability of test result.
To achieve the goals above, present invention employs following technical solutions:
Lossless atmosphere is depressured vacuum gas switching device, mainly includes calibrating gas circulation line, sample gas circulation line and Gas switching valve device, wherein gas switching valve device includes two Standard Gases solenoid valves in parallel and sample pneumoelectric magnet valve, And it is connected to the current limliting aperture on Standard Gases solenoid valve and sample pneumoelectric magnet valve the same end, current limliting aperture passes through wavy metal pipeline It is connected with the leak detection mouth of integral leakage tester, when testing standard gas, opens Standard Gases solenoid valve, close sample pneumoelectric magnet valve, Enter leak detector by current limliting aperture, when test specimens gas, opens sample pneumoelectric magnet valve, standard of closure pneumoelectric magnet valve passes through current limliting Aperture enters leak detector, and the aperture of current limliting aperture and the inlet pressure of leak detector are adapted.
Wherein, gas switching valve device mainly includes Standard Gases solenoid valve, sample pneumoelectric magnet valve, sampling pipe, fluoroplastics Sealing ring, metering hole piece and hole piece clamping screw, sampling system both ends pass through Standard Gases solenoid valve and sample pneumoelectric magnet valve respectively Switch control Standard Gases and sample gas enter sampling pipe, the center setting restricted orifice pipeline of sampling pipe, to select gas Into metering hole pipeline, fluoroplastic seal ring is set between the metering hole pipeline other end and heavy in section metering hole piece clamping screw So that the selective gas of current limliting aperture that clamping screw center of top is arranged in passes through the leak detection of integral leakage tester Interface.
Wherein, in a space, screw thread is arranged so that hole piece compresses spiral shell in space side for the endface of the sampling pipe other end Bar screws in screw thread, and water conservancy diversion aperture is arranged in center of top, setting fluoroplastic seal ring and through hole piece compression around water conservancy diversion aperture Screw-pressing on the end face of sampling pipe makes that gas is selected only to pass through from current limliting aperture.
Wherein, Standard Gases solenoid valve, sample pneumoelectric magnet valve are separately positioned on Standard Gases circulation line and sample gas circulating line On to select gas.
When Standard Gases solenoid valve is closed, Standard Gases only carry out gas ringing, do not enter in integral leakage tester;When When calibrating gas solenoid valve is opened, most of gas is still carried out circulation industrial by the metering function of metering hole by Standard Gases Make, only micro Standard Gases are by metering hole, into integral leakage tester.Gas during the closing and unlatching of sample pneumoelectric magnet valve Gas working method is similar during working principle is closed and opened with Standard Gases electromagnetism.
The present invention utilizes the vacuum gas switching of the Technology designs such as gas circulator, filter, metering hole and the switching of valve position Device, the technology can effectively solve tested gas dirt and shorten the integral leakage test equipment service life, solve sample gas compared with long-range guided missile Gas component ratio imbalance is caused, test gas pressure is solved from an atmospheric pressure or positive pressure and drops quickly to vacuum state;It solves Mixed the problem of depositing occurs between gas with various in fast handover procedures between gas, mainly includes the following aspects:
1) integral leakage tester can be allowed to work under normal pressure or a certain range of positive pressure environment;
2) dead volume of switching valve is small, and in gas with various switching, switching time is fast, the quick quilt of gas before switching Take away, will not pollute newly under test gas so that the response of integral leakage tester signal is fast, signal stabilization is fast;
3) concentration of the inlet of source gas concentration to be measured and gas component ratio with integral leakage tester and gas at Divide and be able to maintain unanimously, will not there is loss or difference;
4) filter of gas pipeline access port can effectively prevent the finely ground particles in gas, can protect total leakage Rate tester is not polluted and is injured by fifth wheel;
Detailed description of the invention
Fig. 1 is the structural schematic diagram of vacuum gas switching device of the invention.
Wherein, 1, filter;2, Standard Gases circulating pump;3, Standard Gases solenoid valve;4, sample pneumoelectric magnet valve;5, sample gas recycles Pump;6, current limliting aperture;7, wavy metal pipeline;8, integral leakage tester;9, gas switching valve (including 3,4,6).
Fig. 2 a is the top view of vacuum gas switching valve device in vacuum gas switching device of the invention;
Fig. 2 b is the front view of vacuum gas switching valve device in vacuum gas switching device of the invention.
Wherein, 10, Standard Gases gas flow;11, sample gas gas flow;12, tubule is sampled;13, metering hole pipeline;14, Fluoroplastic seal ring;15, metering hole piece clamping screw;16, KF25 interface.
Specific embodiment
Embodiments of the present invention are further described below in conjunction with attached drawing.
Referring to Fig.1, Fig. 1 is the structural schematic diagram of vacuum gas switching device of the invention.Wherein, vacuum gas switching dress Set mainly by filter 1, Standard Gases circulating pump, Standard Gases solenoid valve 3, sample pneumoelectric magnet valve 4, sample gas circulating pump 5, current limliting aperture 6, Vacuum ripple pipeline 7 and gas switching valve 9 are constituted.The stainless steel pipes of filter, Standard Gases circulating pump and connection constitute mark Standard Gases can be evacuated at gas switching valve from gas source, and extra gas band is back to Standard Gases by the quasi- gas circulatory system At source.The stainless steel pipes of filter, sample gas circulating pump and connection constitute the sample gas circulatory system, the same calibrating gas of working method Cycle operation mode is consistent.Gas switching valve is mainly by sample introduction tubule 12, metering hole pipeline 13, fluoroplastic seal ring 14, limit Discharge orifice piece pressing devices 15 etc. are constituted, and are vacuum in vacuum gas switching device of the invention for example, see Fig. 2 a, Fig. 2 b, Fig. 2 a The top view of gas switching valve device;Fig. 2 b be in vacuum gas switching device of the invention vacuum gas switching valve fill 3, Sample pneumoelectric magnet valve 4, sampling pipe 12, fluoroplastic seal ring 14, metering hole piece clamping screw 15, sampling system both ends pass through respectively The switch control Standard Gases and sample gas of Standard Gases solenoid valve 3 and sample pneumoelectric magnet valve 4 enter sampling pipe 12, in sampling pipe 12 Centre setting restricted orifice pipeline 13, to select gas to enter metering hole pipeline 13,13 other end of metering hole pipeline and big section Metering hole piece clamping screw 15 between setting fluoroplastic seal ring 14 so that the limit of 15 center of top of clamping screw is arranged in The stream selective gas of aperture 6 passes through the leak detection interface such as KF25 interface 16 of integral leakage tester.
Wherein, after Standard Gases solenoid valve, which makes a call to 3, to be opened, the Standard Gases under normal pressure enter metering hole pipeline by probe tube 12, It is lowered by by pressure after current limliting aperture 6 to vacuum state (10-6Pa~10-1Pa), pressure decline degree depends on metering hole Size.Metering hole piece can be replaced by turning clamping screw 15, and then obtain different vacuum pressures.When sample pneumoelectric magnetic After valve 4 is opened, sample gas under normal pressure enters metering hole pipeline by sample feeding pipe 12, by pressure after current limliting aperture 6 be lowered by Vacuum state (10-6Pa~10-1Pa), sample atmospheric pressure control mode is consistent with Standard Gases pressure controling mode.After decompression Standard Gases or sample gas be delivered at integral leakage tester by vacuum ripple pipeline.
Although a specific embodiment of the invention is described in detail and is illustrated above, it should be noted that Those skilled in the art can spirit according to the present invention various equivalent changes and modification, institute are carried out to above embodiment The function of generation, should all be within protection scope of the present invention in the spirit covered without departing from specification and attached drawing.

Claims (4)

  1. It mainly include calibrating gas circulation line 1. lossless atmosphere is depressured vacuum gas switching device, sample gas circulation line is gentle Body switching valve device, wherein the stainless steel pipes of filter, Standard Gases circulating pump and connection constitute the Standard Gases circulatory system, Standard Gases are evacuated at gas switching valve from gas source, and extra gas band is back at Standard Gases source;Filter, sample gas follow Ring pump and the stainless steel pipes of connection constitute the sample gas circulatory system, and working method is recycled with calibrating gas, gas switching valve Device includes two Standard Gases solenoid valves in parallel and sample pneumoelectric magnet valve, and is connected to Standard Gases solenoid valve and sample pneumoelectric magnet valve Current limliting aperture on the same end, current limliting aperture are connected by wavy metal pipeline with the leak detection mouth of integral leakage tester, and survey is worked as When trying Standard Gases, Standard Gases solenoid valve is opened, sample pneumoelectric magnet valve is closed, leak detector is entered by current limliting aperture, when test specimens gas When, sample pneumoelectric magnet valve is opened, standard of closure pneumoelectric magnet valve enters leak detector, the aperture of current limliting aperture and inspection by current limliting aperture The inlet pressure for leaking instrument is adapted.
  2. 2. lossless atmosphere as described in claim 1 is depressured vacuum gas switching device, wherein gas switching valve device, it is main To include Standard Gases solenoid valve, sample pneumoelectric magnet valve, sampling pipe, fluoroplastic seal ring, metering hole piece and hole piece clamping screw, take Sample system both ends pass through the switch control Standard Gases of Standard Gases solenoid valve and sample pneumoelectric magnet valve respectively and sample gas enters sampling pipe, The center setting restricted orifice pipeline of sampling pipe, to select gas to enter metering hole pipeline, the metering hole pipeline other end with Fluoroplastic seal ring is set between heavy in section metering hole piece clamping screw so that the limit of clamping screw center of top is arranged in The stream selective gas of aperture passes through the leak detection interface of integral leakage tester.
  3. 3. lossless atmosphere as claimed in claim 2 is depressured vacuum gas switching device, wherein the end face of the sampling pipe other end It being in a space, screw thread is arranged so that hole piece clamping screw screws in screw thread in space side, and water conservancy diversion aperture is arranged in center of top, Fluoroplastic seal ring is set around water conservancy diversion aperture and through hole piece clamping screw is pressed on the end face of sampling pipe, makes to select gas Body only passes through from current limliting aperture.
  4. 4. lossless atmosphere as described in any one of claims 1-3 is depressured vacuum gas switching device, wherein Standard Gases electromagnetism Valve, sample pneumoelectric magnet valve be separately positioned on Standard Gases circulation line and sample gas circulating line on to select gas.
CN201610965434.4A 2016-11-04 2016-11-04 Lossless atmosphere is depressured vacuum gas switching device Active CN107543665B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102818679A (en) * 2012-07-23 2012-12-12 北京卫星环境工程研究所 Sampling device used in satellite total leak rate testing leak detector
CN102980730A (en) * 2012-11-28 2013-03-20 北京卫星环境工程研究所 Gas sampling test method of trail-free phenomenon in multichannel gas spectrum analysis
JP5419082B2 (en) * 2009-08-28 2014-02-19 独立行政法人産業技術総合研究所 Calibration method and calibration device for standard mixed gas leak micropore filter

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4277351B2 (en) * 1999-03-31 2009-06-10 ヤマハ株式会社 Leak inspection apparatus and leak inspection apparatus calibration method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5419082B2 (en) * 2009-08-28 2014-02-19 独立行政法人産業技術総合研究所 Calibration method and calibration device for standard mixed gas leak micropore filter
CN102818679A (en) * 2012-07-23 2012-12-12 北京卫星环境工程研究所 Sampling device used in satellite total leak rate testing leak detector
CN102980730A (en) * 2012-11-28 2013-03-20 北京卫星环境工程研究所 Gas sampling test method of trail-free phenomenon in multichannel gas spectrum analysis

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