CN107478180A - A kind of flexible base board detecting system and method - Google Patents
A kind of flexible base board detecting system and method Download PDFInfo
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- CN107478180A CN107478180A CN201710592709.9A CN201710592709A CN107478180A CN 107478180 A CN107478180 A CN 107478180A CN 201710592709 A CN201710592709 A CN 201710592709A CN 107478180 A CN107478180 A CN 107478180A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
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Abstract
The present invention provides a kind of flexible base board detecting system and method, based on the confocal principle of surface scan, the light for simultaneously being sent LASER Light Source using the first lens and the second lens converges in the edge of polyimide flex substrate to be detected, and the surface of the glass substrate of edge periphery respectively.Two beam reflected lights respectively enter two groups of optical-electrical converters along backtracking and through two semi-transparent semi-reflecting spectroscope refractions respectively.The change of the surface height difference of polyimide flex substrate to be detected shows as electric signal delay or variable quantity in advance.Two lens are driven the simple harmonic oscillation for doing above-below direction by vibrating device vibration simultaneously, luminous point after lens converge can overlap with the surface of flexible base board to be detected and the surface of bearing substrate in a certain position respectively, the quality at flexible base board edge and the stability of the coating curing process of monitoring flexible base board can be directly observed using time difference method, considerably increases the efficiency of detection.
Description
Technical field
The present invention relates to screen display technology field, more particularly to a kind of flexible base board detection means and method.
Background technology
In the design and manufacture of flexible display screen, the quality requirement of flexible base board is very harsh.In current system
Cheng Zhong, generally use coating-solidification obtain resistant to elevated temperatures polyimides on the glass substrate（polymide）Film is as carrying
Substrate.During coating and solidification, necessarily need to measure polyimide flex substrate surface micro-structural and edge contour, film
Face and film while the characteristic parameters such as roughness, film surface and intact condition during film.In common measurement, there is contact, such as
The edge contour of polyimides is measured with surface profiler, judges the uniformity on film side.But the probe of surface profiler can not
Friction is produced between polyimide surface with avoiding, causes to deform and wears, it is also extremely low to measure efficiency.Also it is useful in addition non-to connect
Touch, such as with ellipsometer test and frequency spectrum reflectometer come the uniformity of measuring surface inner region.But above two instrument is to small
Vernier focusing is usually required when figure is measured, adds the complexity of measurement equipment, while the repetition of single-point measures increase
Time that detection expends.
The content of the invention
The technical problems to be solved by the invention are, there is provided a kind of flexible base board detecting system and method, to improve inspection
Survey the efficiency of flexible base board surface smoothness.
In order to solve the above-mentioned technical problem, the present invention provides a kind of flexible base board detecting system, including：
LASER Light Source；
Vibrating device；
The first lens and the second lens being fixedly connected on the vibrating device；
The first semi-transparent semi-reflecting spectroscope being arranged on below first lens, and second be arranged on below second lens
Semi-transparent semi-reflecting spectroscope；
First electrooptical device and the second electrooptical device；And
The detection unit electrically connected with first electrooptical device and second electrooptical device；
Wherein, the vibrating device is used to drive first lens and second lens with fixed frequency and amplitude to make
Lower vibration；
First lens are used to converge the first light beam that the LASER Light Source is sent through the described first semi-transparent semi-reflecting spectroscope
In flexible base board edge to be detected upper surface, second lens are used for described in the second light beam warp for sending the LASER Light Source
Second semi-transparent semi-reflecting spectroscope converges at the bearing substrate upper surface of flexible base board adjacent edges to be detected；
First electrooptical device is used to obtain first light beam described by the described first semi-transparent semi-reflecting spectroscope
The reflected light of flexible base board edge to be detected upper surface is simultaneously converted into the first electric signal, and second electrooptical device is used
In the reflected light of the bearing substrate upper surface and incited somebody to action in by the described second semi-transparent semi-reflecting spectroscope acquisition second light beam
It is converted to the second electric signal；
The detection unit is used for basis first electric signal in same detection cycle and reaches peak value and second telecommunications
Number reach the time difference of peak value, obtain the flexible base board profile pattern information to be detected.
Wherein, the set location of first lens and second lens is satisfied by making the LASER Light Source and converged light
Spot is in the conjugate position of imaging.
Wherein, the vibrating device is vibration tuning fork, including upper and lower two yokes, first lens and described second saturating
Mirror is fixedly connected on the upper yoke of the vibration tuning fork and is in the same horizontal position, and the 3rd lens and the 4th lens are fixedly connected
The vibration tuning fork lower yoke and be in the same horizontal position, first lens and the 3rd lens be arranged above and below and
Coaxial, second lens and the 4th lens are arranged above and below and coaxial.
Wherein, the described first semi-transparent semi-reflecting spectroscope and the second semi-transparent semi-reflecting spectroscope are cubic type beam splitting
Mirror.
Wherein, the frequency of the vibrating device and amplitude, which are set, meets following condition：
A certain position in the amplitude range be present, first light beam and second light beam is focused on described treat respectively
Detect flexible base board edge upper surface and the bearing substrate upper surface.
Wherein, when first light beam focuses on the flexible base board edge upper surface to be detected, first electric signal
Reach peak value, when second light beam focuses on the bearing substrate upper surface, second electric signal reaches peak value.
Wherein, the detection unit is specifically used for judging whether the time difference is in preset threshold range, and according to sentencing
Disconnected result obtains the flexible base board profile pattern information to be detected, if the time difference is in preset threshold range,
Flexible base board edge to be detected upper surface uniform ground, if the time difference be less than preset threshold range lower limit,
Depression be present in the flexible base board edge to be detected upper surface, if the time difference is more than the upper limit of preset threshold range,
The flexible base board edge to be detected upper surface exists raised.
The present invention also provides a kind of flexible base board detection method, including：
LASER Light Source, vibrating device, the first lens being fixedly connected on the vibrating device and the second lens are provided, are arranged on
The first semi-transparent semi-reflecting spectroscope below first lens and be arranged on below second lens second semi-transparent semi-reflecting point
Light microscopic, the first electrooptical device and the second electrooptical device；And with first electrooptical device and described second
The detection unit of electrooptical device electrical connection；
The vibrating device is set to drive first lens and second lens to make up-down vibration with fixed frequency and amplitude；
The first light beam that the LASER Light Source is sent is converged at and treated by first lens through the described first semi-transparent semi-reflecting spectroscope
Flexible base board edge upper surface is detected, the second light beam that second lens send the LASER Light Source is semi-transparent through described second
Half anti-spectroscope converges at the bearing substrate upper surface of flexible base board adjacent edges to be detected；
First electrooptical device obtains first light beam described to be checked by the described first semi-transparent semi-reflecting spectroscope
Survey the reflected light of flexible base board edge upper surface and be converted into the first electric signal, second electrooptical device passes through institute
The second semi-transparent semi-reflecting spectroscope is stated to obtain second light beam in the reflected light of the bearing substrate upper surface and be converted into
Second electric signal；
Detection unit is according to first electric signal reaches peak value in same detection cycle and second electric signal reaches peak
The time difference of value, obtain the flexible base board profile pattern information to be detected.
Wherein, the frequency of the vibrating device and amplitude, which are set, meets following condition：
A certain position in the amplitude range be present, first light beam and second light beam is focused on described treat respectively
Detect flexible base board edge upper surface and the bearing substrate upper surface；
Wherein, when first light beam focuses on the flexible base board edge upper surface to be detected, first electric signal reaches
Peak value, when second light beam focuses on the bearing substrate upper surface, second electric signal reaches peak value.
Wherein, the detection unit according in same detection cycle first electric signal reach peak value and described second
Electric signal reaches the time difference of peak value, obtains the flexible base board profile pattern information to be detected, specifically includes：
Detection unit judges whether the time difference is in preset threshold range, and described to be detected soft according to judged result acquisition
Property substrate surface planarization information, if the time difference be in preset threshold range, the flexible base board edge to be detected
Upper surface uniform ground, if the time difference is less than the lower limit of preset threshold range, the flexible base board edge to be detected
There is depression in upper surface, if the time difference is more than the upper limit of preset threshold range, the flexible base board edge to be detected
Upper surface exists raised.
The beneficial effect of the embodiment of the present invention is：The present invention is double saturating by introducing based on the confocal principle of surface scan
The method of mirror surface cofocus scanning, the planarization parameter to be measured at the surface profile of flexible base board especially flexible base board edge is turned
The output of electric signal is changed to, the quality at flexible base board edge can be directly observed using time difference method and monitor flexible base board
The stability of coating-curing process, considerably increase the efficiency of detection.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is flexible polyimide film substrate schematic diagram.
Fig. 2 is a kind of structural representation of flexible base board detecting system of the embodiment of the present invention one.
Fig. 3 is corresponding to the output signal schematic diagram of flexible base board structure shown in Fig. 2.
Fig. 4 is that there is detection during depression to illustrate polyimide flex substrate edges somewhere in the embodiment of the present invention one
Figure.
Fig. 5 is corresponding to Fig. 4 output signal schematic diagram.
Fig. 6 is detection signal when having raised to polyimide flex substrate edges somewhere in the embodiment of the present invention one
Figure.
Fig. 7 is corresponding to Fig. 6 output signal schematic diagram.
Fig. 8 is the processing procedure schematic diagram that display device is imported on the flexible base board to be met the specification in flatness after testing.
Embodiment
The explanation of following embodiment is refer to the attached drawing, can be to the specific embodiment implemented to the example present invention.
The flexible base board detection of the present invention, by taking the rim detection of polyimide flex substrate as an example, Fig. 1 show polyamides Asia
The schematic diagram of amine flexible base board, polyimide substrate 110 is coated and cured on the glass substrate 100 as carrying to be obtained,
In final flexible display screen, this strata acid imide flexible base board 110 is the flexible carrying of flexible display panels.Fig. 1
In magnification region be polyimide flex substrate 110 edge schematic diagram, including most common face inner region 111 and marginal zone
112, A-A ' line is face inner region 111 and the line of demarcation of marginal zone.The face inner region 111 of polyimide flex substrate 110 is very flat
Whole, actual display device is just prepared on face inner region 111, therefore, for the edge of face inner region 111, i.e. marginal zone 112
Planarization detection just becomes most important.
Refer to shown in Fig. 2, the embodiment of the present invention one provides a kind of flexible base board detecting system, including：
LASER Light Source 200；
Vibrating device 201；
The first lens 202 and the second lens 203 being fixedly connected on vibrating device 201；
The first semi-transparent semi-reflecting spectroscope 204 of the lower section of the first lens 202 is arranged on, and is arranged on the of the lower section of the second lens 203
Two semi-transparent semi-reflecting spectroscopes 205；
First electrooptical device 206 and the second electrooptical device 207；And
The detection unit electrically connected with the first electrooptical device 206 and the second electrooptical device 207；
Wherein, the vibrating device 201 is used to drive the first lens 202 and the second lens 203 with fixed frequency and amplitude to make
Up-down vibration；
First lens 202 are used to converge the first light beam that LASER Light Source 200 is sent through the first semi-transparent semi-reflecting spectroscope 204
In flexible base board edge to be detected upper surface, second lens 203 are used for the second light beam that LASER Light Source 200 is sent through the
Two semi-transparent semi-reflecting spectroscopes 205 converge at the bearing substrate upper surface of flexible base board adjacent edges to be detected；
First electrooptical device 206 is used to obtain first light beam by the described first semi-transparent semi-reflecting spectroscope 204
The edge upper surface of flexible base board 110 to be detected reflected light and be converted into the first electric signal, second photoelectricity
Switching device 207 is used to obtain second light beam in the bearing substrate 100 by the described second semi-transparent semi-reflecting spectroscope 205
The reflected light of upper surface is simultaneously converted into the second electric signal；
The detection unit is used for basis and receives the first electrical signal peak and the second electrical signal peak in a detection cycle
Time difference, obtain flexible base board profile pattern information to be detected.
The light that the present embodiment is simultaneously sent LASER Light Source 200 using the first lens 202 and the second lens 203 converges respectively
At the edge of polyimide flex substrate 110 to be detected, and the surface of the glass substrate 100 of edge periphery.Two beam reflected lights
Respectively two groups of optical-electrical converters are respectively enterd along backtracking and through two semi-transparent semi-reflecting spectroscope refractions.Polyimides to be detected
The change of the surface height difference of flexible base board 110 shows as electric signal delay（Or in advance）Variable quantity.Two lens are simultaneously
Vibrated by vibration tuning fork device 201 and drive the simple harmonic oscillation for doing above-below direction, coarse adjustment is that may be such that the vibration model in lens
In enclosing, the surface with flexible base board to be detected and the surface of bearing substrate can be in a certain positions respectively for the luminous point after lens converge
Coincidence is put, so as to remove accurate focus movement from, saves and measures the time.
First lens 202 and the second lens 203 are fixedly connected on vibrating device 201, and are in the same horizontal position,
So that there is identical vibration frequency and amplitude when the vibration of vibrating device 201 drives and does the simple harmonic oscillation of above-below direction.First is saturating
The light that LASER Light Source 200 is sent is converged at the edge upper surface of polyimide substrate 110 to be detected, light source and converged light by mirror 202
Spot is in the conjugate position of imaging；Meanwhile second the another light beam that sends LASER Light Source 200 of lens 203 converge at it is to be detected
The upper surface of glass substrate 100 of the adjacent edges of polyimide substrate 110, light source and convergence hot spot are similarly in the conjugation position of imaging
Put.Further, the vibrating device 201 of the present embodiment is vibration tuning fork, including upper and lower two yokes, the first lens 202 and the
Two lens 203 are fixedly connected on the upper yoke of vibration tuning fork or lower yoke；In addition to this it is possible to each increase a lens shaped
Into the first lens group and the second lens group（Structure i.e. shown in Fig. 2）, wherein, the first lens 202 are fixedly connected with the second lens 203
In the upper yoke of vibration tuning fork, newly-increased two lens are fixedly connected on the lower yoke of vibration tuning fork and are in same level position
Put, i.e. the first lens group includes being arranged above and below and the first coaxial lens 202 and the 3rd lens, and the second lens group includes row up and down
Row and the second coaxial lens 203 and the 4th lens.Similarly, the light beam that the first lens group sends LASER Light Source 200
The edge upper surface of polyimide flex substrate 110 to be detected is converged at through the first semi-transparent semi-reflecting spectroscope 204, the second lens group will
The second beam light that LASER Light Source 200 is sent converges at polyimide flex substrate to be detected through the second semi-transparent semi-reflecting spectroscope 205
The upper surface of glass substrate 100 of 110 adjacent edges.
First semi-transparent semi-reflecting 204 and second semi-transparent semi-reflecting spectroscope 205 of spectroscope can allow light beam from top to bottom through point
It is clipped to and reaches the edge upper surface of polyimide flex substrate 110 and the upper surface of glass substrate 100, can also makes from polyimide flex base
The light beam of the edge upper surface of plate 110 and the reflection of the upper surface of glass substrate 100 reflexes to the first electrooptical device 206 respectively
With the second electrooptical device 207.Therefore any spectroscope that can play such semi-transparent semi-reflecting effect may be applicable to this implementation
Example, as a kind of example, semi-transparent semi-reflecting spectroscope can be cubic type beam splitter.
Vibrating device 201 is shaken with fixed frequency and amplitude, and a certain position can be found in whole amplitude range,
So that the first light beam and the second light beam through the first lens 202 and the second lens 203 focus on polyimide flex substrate respectively
110 edge upper surface and the upper surface of glass substrate 100 and reflect, now reflected light passes through the first spectroscope respectively
204 and second spectroscope 205 converge at the first electrooptical device 206 and the second electrooptical device 207, optical signal now
Most by force, the other positions vibrated in vibrating device 201, due to not focusing on polyimide flex substrate 110 and glass just
The upper surface of substrate 100, the first electrooptical device 206 and second is converged at through the first spectroscope 204 and the second spectroscope 205
The optical signal of electrooptical device 207 is not always most strong.
Incorporated by reference to shown in Fig. 3, to be detected to flexible base board structure shown in Fig. 2 and in the range of a detection cycle
Output signal schematic diagram.Wherein, curve 300 represents that vibration tuning fork 201 does the waveform of upper and lower simple harmonic oscillation, the expression pair of curve 301
The detection electric signal of glass substrate upper surface；Curve 302 represents the detection telecommunications to polyimide flex substrate edges upper surface
Number；304 represent the vibration position of the corresponding vibration tuning fork 201 when the second light beam focuses on 100 upper surface of glass substrate；305
Represent the corresponding vibration tuning fork 201 when the first light beam focuses on 110 edge upper surface of polyimide flex substrate to be detected
Vibration position.It is understood that be that may be implemented in a vibration period of vibration tuning fork 201 by coarse focus, total energy
Find two fixed vibration positions（I.e. in figure shown in 304 and 305）So that by the second lens 203 and the light of the first lens 202
Beam, the upper surface of glass substrate 100 and polyimide flex substrate 110 is just focused on respectively.Now, two optical-electrical converters
The light intensity signal that part 207 and 206 receives is most strong, corresponds to the peak value of detection electric signal 301 and 302 respectively.It is understood that
Detection electric signal 301 and 302 can be the curve or electric current that voltage changes over time or other electrical properties anaplasia at any time
The curve of change, therefore corresponding peak value can be magnitude of voltage, current value or other electrical properties values.When the surface of glass substrate 100
On the premise of planarization is guaranteed, if the upper surface at the edge of polyimide flex substrate 110 to be detected is also uniformly flat all the time
Whole, then the interval between two groups of detection electric signals 301 and 302 peak value is the time difference t of signal1It is certain.
Referring to shown in Fig. 4, Fig. 5, wherein Fig. 4 is when having depression to polyimide flex substrate edges somewhere
Detects schematic diagram, Fig. 5 are corresponding output signal schematic diagram, wherein, curve 300 represents that vibration tuning fork 201 does simple harmonic quantity up and down and shaken
Dynamic waveform, curve 301 represent the detection electric signal to glass substrate upper surface；Curve 302 is represented to polyimide flex base
The detection electric signal of edges of boards edge upper surface；304 represent the corresponding vibration when the second light beam focuses on 100 upper surface of glass substrate
The vibration position of tuning fork 201；305 represent when the first light beam focuses on the edge upper surface of polyimide flex substrate 110 to be detected
The vibration position of vibration tuning fork 201 corresponding to recess.When polyimides flexible base board edge somewhere has in whole detection range
There is depression（As shown in 113 in figure）When, the signal of corresponding output also occurs to change accordingly.It can be seen that when poly-
When acid imide flexible base board edge somewhere 113 has depression, the focus of the first light beam is vibrating each week of the vibration of tuning fork 201
In phase, the time point of upper surface for focusing on depression 113 twice, to be compared with the second light beam be no longer identical：Specifically such as Fig. 5 institutes
Show, in second half of the cycle, the focal point of the first light beam is in the edge upper surface of polyimide flex substrate 110（Because there is depression
113）Time point can compared with without depression 113 time point（Reference picture 3）It can shift to an earlier date, i.e., the peak value of two detection electric signals can lean on
Closely, thus detection unit receive two detection electrical signal peaks time differences can be by normal t1It is reduced to t2。
Referring to shown in Fig. 6, Fig. 7, wherein Fig. 6 is when having raised to polyimide flex substrate edges somewhere
Detects schematic diagram, Fig. 7 are corresponding output signal schematic diagram, wherein, curve 300 represents that vibration tuning fork 201 does simple harmonic quantity up and down and shaken
Dynamic waveform, curve 301 represent the detection electric signal to glass substrate upper surface；Curve 302 is represented to polyimide flex base
The detection electric signal of edges of boards edge upper surface；304 represent the corresponding vibration when the second light beam focuses on 100 upper surface of glass substrate
The vibration position of tuning fork 201；305 represent when the first light beam focuses on the edge upper surface of polyimide flex substrate 110 to be detected
The vibration position of vibration tuning fork 201 corresponding to high spot.When polyimides flexible base board edge somewhere has in whole detection range
There is projection（As shown in 114 in figure）When, the signal of corresponding output also occurs to change accordingly.It can be seen that when poly-
When projection occurs for acid imide flexible base board edge somewhere 114, the focus of the first light beam is vibrating each week of the vibration of tuning fork 201
In phase, the time point of upper surface for focusing on projection 114 twice, to be compared with the second light beam be no longer identical：Specifically such as Fig. 7 institutes
Show, in second half of the cycle, the focal point of the first light beam is in the edge upper surface of polyimide flex substrate 110（Because there is projection
114）Time point can compared with without projection 114 time point（Reference picture 3）It can shift to an earlier date, i.e., the peak value of two detection electric signals can lean on
Closely, thus detection unit receive two detection electrical signal peaks time differences can be by normal t1It is reduced to t3。
By detection unit to the above-mentioned time t for reaching peak value1、t2、t3Contrast, obtain its time difference, you can directly perceived fast
The profile pattern situation of polyimide flex substrate is judged fastly.Specifically, detection unit judges whether the time difference is located
The flexible base board profile pattern information to be detected is obtained in preset threshold range, and according to judged result, if when described
Between difference be in preset threshold range, then flexible base board edge to be detected upper surface uniform ground, otherwise described to be detected soft
Out-of-flatness situation be present in property substrate edges upper surface.Further, if the time difference is less than the lower limit of preset threshold range,
Then there is depression in the flexible base board edge to be detected upper surface, if the time difference is more than the upper limit of preset threshold range,
Then the flexible base board edge to be detected upper surface exists raised.
As shown in figure 8, if the time difference represents that the flatness of substrate edges meets the specification, and enters one in preset threshold range
Step ground imports the processing procedure of display device layer 400 on flexible substrates.
It is understood that though the detection of foregoing soft substrate is not limited thereto by taking polyimide flex substrate as an example.
For the other film layers or pattern of display device, such as metal, semiconductor, inorganic and organic insulation layer pattern structure, surface shape
The fine metal shade of looks and OLED evaporations（FMM）Integrality can apply aforementioned inspection systems implement.
Corresponding to the embodiment of the present invention one, the embodiment of the present invention two provides a kind of flexible base board detection method, including：
LASER Light Source, vibrating device, the first lens being fixedly connected on the vibrating device and the second lens are provided, are arranged on
The first semi-transparent semi-reflecting spectroscope below first lens and be arranged on below second lens second semi-transparent semi-reflecting point
Light microscopic, the first electrooptical device and the second electrooptical device；And with first electrooptical device and described second
The detection unit of electrooptical device electrical connection；
The vibrating device is set to drive first lens and second lens to make up-down vibration with fixed frequency and amplitude；
The first light beam that the LASER Light Source is sent is converged at and treated by first lens through the described first semi-transparent semi-reflecting spectroscope
Flexible base board edge upper surface is detected, the second light beam that second lens send the LASER Light Source is semi-transparent through described second
Half anti-spectroscope converges at the bearing substrate upper surface of flexible base board adjacent edges to be detected；
First electrooptical device obtains first light beam described to be checked by the described first semi-transparent semi-reflecting spectroscope
Survey the reflected light of flexible base board edge upper surface and be converted into the first electric signal, second electrooptical device passes through institute
The second semi-transparent semi-reflecting spectroscope is stated to obtain second light beam in the reflected light of the bearing substrate upper surface and be converted into
Second electric signal；
Detection unit is according to first electric signal reaches peak value in same detection cycle and second electric signal reaches peak
The time difference of value, obtain the flexible base board profile pattern information to be detected.
Wherein, the frequency of the vibrating device and amplitude, which are set, meets following condition：
A certain position in the amplitude range be present, first light beam and second light beam is focused on described treat respectively
Detect flexible base board edge upper surface and the bearing substrate upper surface.
Wherein, when first light beam focuses on the flexible base board edge upper surface to be detected, first electric signal
Reach peak value, when second light beam focuses on the bearing substrate upper surface, second electric signal reaches peak value；Wherein,
The detection unit is according to first electric signal reaches peak value in same detection cycle and second electric signal reaches peak
The time difference of value, the flexible base board profile pattern information to be detected is obtained, is specifically included：
Detection unit judges whether the time difference is in preset threshold range, and described to be detected soft according to judged result acquisition
Property substrate surface planarization information, if the time difference be in preset threshold range, the flexible base board edge to be detected
Upper surface uniform ground, otherwise the flexible base board edge to be detected upper surface out-of-flatness situation be present：Specifically, it is if described
Time difference is less than the lower limit of preset threshold range, then the flexible base board edge to be detected upper surface has depression, if described
Time difference is more than the upper limit of preset threshold range, then the flexible base board edge to be detected upper surface exists raised.
In the present embodiment, the set location of the first lens and the second lens is satisfied by being in LASER Light Source and convergence hot spot
The conjugate position of imaging.First semi-transparent semi-reflecting spectroscope and the second semi-transparent semi-reflecting spectroscope are cubic type beam splitter.
By described above, the beneficial effect of the embodiment of the present invention is：The present invention is confocal based on surface scan
Principle, the method by introducing double lens surface cofocus scanning, by the surface profile of flexible base board especially flexible base board edge
Planarization parameter transform to be measured be electric signal output, the quality at flexible base board edge can be directly observed using time difference method
And the stability of coating-curing process of flexible base board is monitored, considerably increase the efficiency of detection.
Above disclosure is only preferred embodiment of present invention, can not limit the right model of the present invention with this certainly
Enclose, therefore the equivalent variations made according to the claims in the present invention, still belong to the scope that the present invention is covered.
Claims (10)
- A kind of 1. flexible base board detecting system, it is characterised in that including：LASER Light Source；Vibrating device；The first lens and the second lens being fixedly connected on the vibrating device；The first semi-transparent semi-reflecting spectroscope being arranged on below first lens, and second be arranged on below second lens Semi-transparent semi-reflecting spectroscope；First electrooptical device and the second electrooptical device；AndThe detection unit electrically connected with first electrooptical device and second electrooptical device；Wherein, the vibrating device is used to drive first lens and second lens with fixed frequency and amplitude to make Lower vibration；First lens are used to converge the first light beam that the LASER Light Source is sent through the described first semi-transparent semi-reflecting spectroscope In flexible base board edge to be detected upper surface, second lens are used for described in the second light beam warp for sending the LASER Light Source Second semi-transparent semi-reflecting spectroscope converges at the bearing substrate upper surface of flexible base board adjacent edges to be detected；First electrooptical device is used to obtain first light beam described by the described first semi-transparent semi-reflecting spectroscope The reflected light of flexible base board edge to be detected upper surface is simultaneously converted into the first electric signal, and second electrooptical device is used In the reflected light of the bearing substrate upper surface and incited somebody to action in by the described second semi-transparent semi-reflecting spectroscope acquisition second light beam It is converted to the second electric signal；The detection unit is used for basis first electric signal in same detection cycle and reaches peak value and second telecommunications Number reach the time difference of peak value, obtain the flexible base board profile pattern information to be detected.
- 2. flexible base board detecting system according to claim 1, it is characterised in that first lens and described second saturating The set location of mirror is satisfied by making the LASER Light Source and converges the conjugate position that hot spot is in imaging.
- 3. flexible base board detecting system according to claim 1, it is characterised in that the vibrating device is vibration tuning fork, Including upper and lower two yokes, first lens and second lens are fixedly connected on the upper yoke of the vibration tuning fork and located In the same horizontal position, the 3rd lens and the 4th lens are fixedly connected on the lower yoke of the vibration tuning fork and are in same level Position, first lens and the 3rd lens are arranged above and below and coaxial, above and below second lens and the 4th lens Arrange and coaxial.
- 4. flexible base board detecting system according to claim 1, it is characterised in that the first semi-transparent semi-reflecting spectroscope and The second semi-transparent semi-reflecting spectroscope is cubic type beam splitter.
- 5. flexible base board detecting system according to claim 1, it is characterised in that the frequency and amplitude of the vibrating device Setting meets following condition：A certain position in the amplitude range be present, first light beam and second light beam is focused on described treat respectively Detect flexible base board edge upper surface and the bearing substrate upper surface.
- 6. flexible base board detecting system according to claim 5, it is characterised in that first light beam focuses on described treat When detecting flexible base board edge upper surface, first electric signal reaches peak value, and second light beam focuses on the carrying base During plate upper surface, second electric signal reaches peak value.
- 7. flexible base board detecting system according to claim 1, it is characterised in that the detection unit is specifically used for judging Whether the time difference is in preset threshold range, and obtains the flexible base board profile pattern to be detected according to judged result Information, if the time difference be in preset threshold range, flexible base board edge to be detected upper surface uniform ground, such as Time difference described in fruit is less than the lower limit of preset threshold range, then the flexible base board edge to be detected upper surface has depression, such as Time difference described in fruit is more than the upper limit of preset threshold range, then the flexible base board edge to be detected upper surface exists raised.
- A kind of 8. flexible base board detection method, it is characterised in that including：LASER Light Source, vibrating device, the first lens being fixedly connected on the vibrating device and the second lens are provided, are arranged on The first semi-transparent semi-reflecting spectroscope below first lens and be arranged on below second lens second semi-transparent semi-reflecting point Light microscopic, the first electrooptical device and the second electrooptical device；And with first electrooptical device and described second The detection unit of electrooptical device electrical connection；The vibrating device is set to drive first lens and second lens to make up-down vibration with fixed frequency and amplitude；The first light beam that the LASER Light Source is sent is converged at and treated by first lens through the described first semi-transparent semi-reflecting spectroscope Flexible base board edge upper surface is detected, the second light beam that second lens send the LASER Light Source is semi-transparent through described second Half anti-spectroscope converges at the bearing substrate upper surface of flexible base board adjacent edges to be detected；First electrooptical device obtains first light beam described to be checked by the described first semi-transparent semi-reflecting spectroscope Survey the reflected light of flexible base board edge upper surface and be converted into the first electric signal, second electrooptical device passes through institute The second semi-transparent semi-reflecting spectroscope is stated to obtain second light beam in the reflected light of the bearing substrate upper surface and be converted into Second electric signal；Detection unit is according to first electric signal reaches peak value in same detection cycle and second electric signal reaches peak The time difference of value, obtain the flexible base board profile pattern information to be detected.
- 9. flexible base board detection method according to claim 8, it is characterised in that the frequency and amplitude of the vibrating device Setting meets following condition：A certain position in the amplitude range be present, first light beam and second light beam is focused on described treat respectively Detect flexible base board edge upper surface and the bearing substrate upper surface；Wherein, when first light beam focuses on the flexible base board edge upper surface to be detected, first electric signal reaches Peak value, when second light beam focuses on the bearing substrate upper surface, second electric signal reaches peak value.
- 10. flexible base board detection method according to claim 8, it is characterised in that the detection unit is according to same First electric signal reaches peak value in detection cycle and second electric signal reaches the time difference of peak value, obtains described to be checked Flexible base board profile pattern information is surveyed, is specifically included：Detection unit judges whether the time difference is in preset threshold range, and described to be detected soft according to judged result acquisition Property substrate surface planarization information, if the time difference be in preset threshold range, the flexible base board edge to be detected Upper surface uniform ground, if the time difference is less than the lower limit of preset threshold range, the flexible base board edge to be detected There is depression in upper surface, if the time difference is more than the upper limit of preset threshold range, the flexible base board edge to be detected Upper surface exists raised.
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