CN107452586A - A kind of fixture suitable in Quanta200 SEM - Google Patents
A kind of fixture suitable in Quanta200 SEM Download PDFInfo
- Publication number
- CN107452586A CN107452586A CN201710633811.9A CN201710633811A CN107452586A CN 107452586 A CN107452586 A CN 107452586A CN 201710633811 A CN201710633811 A CN 201710633811A CN 107452586 A CN107452586 A CN 107452586A
- Authority
- CN
- China
- Prior art keywords
- fixture
- blade
- quanta200
- sem
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Clamps And Clips (AREA)
Abstract
The invention discloses a kind of fixture suitable in Quanta200 SEM, it is mainly characterized by having spring original paper on the bolt through fixture, the bolt on alignment jig relevant position is only needed to fix tested blade when laying blade to be measured, can be substantially reduced compared with conventional Scanning Electron microscope fixture on blade to be measured smear binding agent the step of, reduce the pollution to blade face to be measured, blade rake face and rear knife face diverse location can be observed again simultaneously, realize multipurpose.There is stabilization compared with prior art, clamping performance is good, removes and installs the advantages of facilitating.
Description
Technical field
Patent of the present invention is related to a kind of fixture suitable in Quanta200 SEM.
Background technology
The effect of fixture is to be used for during machine-building fixing processing object, is allowed to occupy correct position, to receive
Construction or the device of detection.The fixture of common SEM can only fix tested blade by binding agent, and fixed
Need to smear more binding agents in blade face during larger blade, so can be in blade table to meet fixed requirement
Left a trace on face, while can also increase workload.Therefore a kind of new fixture is needed, can realizes and enter in different positions
Luggage presss from both sides, and realizes the utilization ratio in space.And can is realized and as few as possible can be processed on clip blade is treated, reduces processing
Step, the surface breakdown for treating folder workpiece is reduced, so as to improve operating efficiency.
The content of the invention
This patent provides a kind of novel clamp, and the one kind being mainly placed in SEM is applied to
Fixture in Quanta200 SEM.There are four holes symmetrically arranged on clamping fixture table, blade can be realized
Quick-clamping, procedure of processing is reduced, and realize the multiple use of fixture.
Above-mentioned purpose is realized by following technology：
A kind of described fixture suitable in Quanta200 SEM includes：1- blades fixing end, 2- lead to
Hole, 3- bolts, 4- holder walls, 5- spring elements, 6- pads, 7- fixture fixing ends.
A kind of described fixture suitable in Quanta200 SEM, its length, width and height be respectively 40mm,
30mm, 30mm, the height of fixture fixing end is 4mm, it is characterized in that described one kind is applied to Quanta200 scanning electron microscopies
Through hole of the fixture in holder wall on mirror is processed according to a certain distance, between two holes point-blank away from
From being all 20mm, the radius of its mesopore is 1mm.
Described a kind of fixture suitable in Quanta200 SEM, it is characterized in that can inside fixture
To fix blade, realization is reduced to fix the step of blade smears binding agent, and realizes multiduty function.
Described a kind of fixture suitable in Quanta200 SEM, it is characterized in that being set in clamp top
4 blade fixing ends are equipped with, are act as when being measured to blade rake face, only need to be by blade sleeve in fixing end.
Described a kind of fixture suitable in Quanta200 SEM, it is characterized in that having in clamp base
One fixing end, fixture and the quick-clamping of SEM can be achieved, and it is very firm.
Beneficial effect：
The present invention can avoid smearing binding agent on blade, avoid binding agent to measurement result compared with conventional art
Influence, while and can of the present invention enough reduces the adjustment in measurement process to blade position, in addition, when need to after knife face
When being detected, without being dismantled to blade, rotating blade is only needed；When needing to detect rake face, only need
By blade sleeve in blade fixing end.The present apparatus cooperates with Quanta200 SEM, can improve inspection
Survey efficiency.
Brief description of the drawings：
Fig. 1 is the fixture stereogram of the present invention,
Fig. 2 is the fixture front view of the present invention,
Fig. 3 is the fixture left view of the present invention,
Fig. 4 is the fixture top view of the present invention.
Embodiment
Embodiment 1：A kind of fixture suitable in Quanta200 SEM, its application method are：Work as measurement
Afterwards during knife face, bolt is disassembled from fixture first, blade is placed in fixture, then bolt passes through the hole of blade center
And bolt is tightened, and blade is withstood on inwall using the elastic acting force band mobile gasket of spring element, fixes blade, it is then right
Blade measures, and when knife face measures after needing to same blade difference, only needs rotating blade.When to rake face
When being detected, only need to by blade sleeve in blade fixing end it is i.e. measurable.
Claims (5)
1. a kind of fixture suitable in Quanta200 SEM, composition includes fixture fixing end, blade is fixed for it
End, spring element, pad, bolt, holder wall, it is characterized in that have four symmetrical through holes on fixture two side, wherein
One side is screwed hole, it is characterized in that laying stable, the stable performance of fixturing blade.
2. a kind of fixture suitable in Quanta200 SEM according to claim 1, its length and width high score
Not Wei 40mm, 30mm, 30mm, the height of fixture fixing end is 4mm, it is characterized in that described one kind is swept suitable for Quanta200
Retouch through hole of the fixture on electron microscope in holder wall to be processed according to a certain distance, point-blank two
The distance between hole is all 20mm, and the radius of its mesopore is 1mm.
3. a kind of fixture suitable in Quanta200 SEM according to claim 1, it is characterized in that
Blade can be fixed inside fixture, realization is reduced to fix the step of blade smears binding agent.
4. a kind of fixture suitable in Quanta200 SEM according to claim 1, it is characterized in that
Clamp top is provided with 4 blade fixing ends, act as when being measured to blade rake face, only need to be by blade sleeve in fixation
On end.
5. according to a kind of fixture suitable in Quanta200 SEM described in claim 1, it is characterized in that
There is a fixing end in clamp base, fixture and the quick-clamping of SEM can be achieved, and it is very firm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710633811.9A CN107452586A (en) | 2017-07-29 | 2017-07-29 | A kind of fixture suitable in Quanta200 SEM |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710633811.9A CN107452586A (en) | 2017-07-29 | 2017-07-29 | A kind of fixture suitable in Quanta200 SEM |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107452586A true CN107452586A (en) | 2017-12-08 |
Family
ID=60490311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710633811.9A Pending CN107452586A (en) | 2017-07-29 | 2017-07-29 | A kind of fixture suitable in Quanta200 SEM |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107452586A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108705469A (en) * | 2018-06-13 | 2018-10-26 | 哈尔滨理工大学 | A kind of more diameters suitable for scanning electron microscope have hole blade to detect fixture |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3220702A1 (en) * | 1982-06-02 | 1983-12-08 | Manfred 7101 Eberstadt Fink | Clamping device for samples to be examined microscopically, with background neutralisation |
| JPH0360142A (en) * | 1989-07-28 | 1991-03-15 | Nec Corp | Semiconductor measuring equipment |
| CN201256139Y (en) * | 2008-08-01 | 2009-06-10 | 攀钢集团研究院有限公司 | Special fixture for scanning electronic microscope |
| EP1782435A4 (en) * | 2004-07-28 | 2010-06-16 | Omniprobe Inc | Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope |
| CN103344794A (en) * | 2013-06-24 | 2013-10-09 | 上海华力微电子有限公司 | Multifunctional semiconductor sample fixture |
| CN103403835A (en) * | 2011-03-02 | 2013-11-20 | 加登有限公司 | Microtome utilizing a movable knife in a retardation field scanning electron microscope and a retardation field scanning electron microscope including the same |
| CN204289362U (en) * | 2014-11-19 | 2015-04-22 | 云南电网公司电力科学研究院 | A kind of scanning electron microscopy sample clamping device |
-
2017
- 2017-07-29 CN CN201710633811.9A patent/CN107452586A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3220702A1 (en) * | 1982-06-02 | 1983-12-08 | Manfred 7101 Eberstadt Fink | Clamping device for samples to be examined microscopically, with background neutralisation |
| JPH0360142A (en) * | 1989-07-28 | 1991-03-15 | Nec Corp | Semiconductor measuring equipment |
| EP1782435A4 (en) * | 2004-07-28 | 2010-06-16 | Omniprobe Inc | Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope |
| CN201256139Y (en) * | 2008-08-01 | 2009-06-10 | 攀钢集团研究院有限公司 | Special fixture for scanning electronic microscope |
| CN103403835A (en) * | 2011-03-02 | 2013-11-20 | 加登有限公司 | Microtome utilizing a movable knife in a retardation field scanning electron microscope and a retardation field scanning electron microscope including the same |
| CN103344794A (en) * | 2013-06-24 | 2013-10-09 | 上海华力微电子有限公司 | Multifunctional semiconductor sample fixture |
| CN204289362U (en) * | 2014-11-19 | 2015-04-22 | 云南电网公司电力科学研究院 | A kind of scanning electron microscopy sample clamping device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108705469A (en) * | 2018-06-13 | 2018-10-26 | 哈尔滨理工大学 | A kind of more diameters suitable for scanning electron microscope have hole blade to detect fixture |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20171208 |
|
| WD01 | Invention patent application deemed withdrawn after publication |