DE3220702A1 - Clamping device for samples to be examined microscopically, with background neutralisation - Google Patents

Clamping device for samples to be examined microscopically, with background neutralisation

Info

Publication number
DE3220702A1
DE3220702A1 DE19823220702 DE3220702A DE3220702A1 DE 3220702 A1 DE3220702 A1 DE 3220702A1 DE 19823220702 DE19823220702 DE 19823220702 DE 3220702 A DE3220702 A DE 3220702A DE 3220702 A1 DE3220702 A1 DE 3220702A1
Authority
DE
Germany
Prior art keywords
clamping device
sample
clamping
background
aim
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19823220702
Other languages
German (de)
Inventor
Manfred 7101 Eberstadt Fink
Lutz-Achim Dipl.-Ing. 7000 Stuttgart Gäng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GAENG LUTZ ACHIM DIPL ING
Original Assignee
GAENG LUTZ ACHIM DIPL ING
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GAENG LUTZ ACHIM DIPL ING filed Critical GAENG LUTZ ACHIM DIPL ING
Priority to DE19823220702 priority Critical patent/DE3220702A1/en
Publication of DE3220702A1 publication Critical patent/DE3220702A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/34—Microscope slides, e.g. mounting specimens on microscope slides

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention relates to a miniature clamping device for sample fixing, which can be used in microscopes, in particular in scanning electron microscopes. The aim of the clamping device is to fix releasably, without problems, without damage and rapidly as many samples as possible, which differ in their geometrical shape, in construction and in material. It also has the aim of neutralising disturbing background phenomena in scanning electron-microscopic sample images. The aim is achieved by miniaturisation of a modified vice which is fastened on lockable spherical joints and between the jaws of which the sample is held with adjustable force. The clamping force, which is applied by a pretensionable helical spring, can be both finely adjusted and varied within a large range. The clamping jaw attachments are removable and can be exchanged for other or sample-specific special models. The lockable spherical joints allow positioning of the clamped sample in the respectively most favourable observation position. The background neutralisation is carried out by an exchangeable and movable potential plate.

Description

SPANNVORRICHTUNG FOR CLAMPING DEVICE FOR

MIKROSKOPISCH ZU UNTERSUCHENDE PROBEN MIT HINTERGRUNDNEUTRALISIERUNG-Die Erfindung betrifft eine Spannvorrichtung zur Fixierung von Proben1 die mikroskopisch - insbesondere mit Hilfe von Rasterelektronenmikroskopen - zu untersuchen sind. SAMPLES TO BE EXAMINED MICROSCOPICALLY WITH BACKGROUND NEUTRALIZATION-Die The invention relates to a clamping device for fixing samples1 microscopically - in particular with the aid of scanning electron microscopes - are to be examined.

Bei mikroskopischen Untersuchungen von Proben besteht zum einen die Notwendigkeit, die Proben im Strahlengang der Mikroskope zu fixieren. Zum anderen wirkt sich der Hintergrund vor allem bei hohen Vergrößerungen störend aus, weshalb eine Hintergrundneutralisierung zu qualitativ hochwertigeren Abbildungen führt.In the case of microscopic examinations of samples, there is on the one hand the Necessity to fix the samples in the microscope's beam path. On the other hand the background is particularly disturbing at high magnifications, which is why background neutralization leads to images of higher quality.

Oblicherweise werden mikroskopisch zu untersuchende Objekte auf Objektträger bzw. auf Probenteller unlösbar mittels Klebstoff fixiert.Objects to be examined microscopically are usually placed on microscope slides or permanently fixed on the sample plate by means of adhesive.

Diese Probenbefestigungsart kann aber ein Verändern bzw. ein Zerstören der Probentopologie hervorrufen und erlaubt im allgemeinen kein nachträgliches Korrigieren der Probenposition.However, this type of specimen attachment can change or destroy the sample topology and generally does not allow any subsequent correction the sample position.

Desweiteren werden - insbesondere im Bereich der Rasterelektronenmikroskopie - spezielle Probenhalterungen entsprechend der geometrischen Gestalt der Objekte angefertigt, was in der Regel sehr zeit- und kostenintensiv ist.Furthermore - especially in the area of scanning electron microscopy - special specimen holders according to the geometric shape of the objects made, which is usually very time-consuming and costly.

Oberschüssiger Klebstoff sowie Bearbeitungsspuren auf der Oberfläche der Probenhalterung führen häufig zu Bildartefakten.Excess glue and traces of processing on the surface the specimen holder often lead to image artifacts.

Der Erfindung liegt die Aufgabe zugrunde, möglichst viele sich in der geometrischen Gestalt, im Aufbau und im Material unterscheidende Proben schnell, unproblematisch und zerstörungsfrei lösbar zu fixieren. Sie hat weiterhin die Aufgabe, störende Hintergrunderscheinungen zu neutralisieren.The invention is based on the object as many as possible in the geometric shape, structure and material differing samples quickly, Can be fixed easily and non-destructively in a detachable manner. She still has the task to neutralize disturbing background phenomena.

Die Aufgabe wird gelöst durch die Miniaturisierung eines auf arretierbaren Kugelgelenken befestigten, modifizierten Schraubstocks, zwischen dessen Backen die Probe mit einer einstellbaren Kraft gehalten wird.The task is solved by the miniaturization of a lockable Ball joints fixed, modified vices, between whose jaws the Sample is held with an adjustable force.

Die mit der Erfindung erzielten Vorteile bestehen darin, daß für eine Vielzahl unterschiedlicher Proben ein und dieselbe Spannvorrichtung verwendet werden kann. Desweiteren lassen sich die Proben durch einfachen Tastendruck auswechseln bzw. umpositionieren. Die einstellbare Spann kraft gewährleistet ein zerstörungsfreies Spannen der Probe.The advantages achieved by the invention are that for a A large number of different specimens can be used with the same jig can. Furthermore, the samples can be exchanged by simply pressing a button or reposition. The adjustable clamping force ensures a non-destructive Clamping the sample.

Die arretierbaren Kugelgelenke, auf denen die Probenklemmvorrichtung ruht, ermöglichen ein einfaches Verdrehen oder Kippen der fixierten Probe in die jeweils beobachtungsgünstigste Position.The lockable ball joints on which the specimen clamping device rests, allow the fixed sample to be easily twisted or tilted into the the most favorable position in each case.

Ein Ausführungsbeispiel der Erfindung ist zeichnerisch dargestellt und wird im folgenden näher beschrieben: Fig. 1 zeigt die Vorderansicht der Spannvorrichtung. Ein Betätigen der Hebelchen (a und d) bewirkt das Aufheben der Arretierungen der Kugelgelenke (b und c). Dadurch läßt sich die Spannvorrichtung drehen und kippen. Mit dem Loslassen der Hebelchen werden die Gelenkmechanismen in der eingestellten Position arretiert, wobei die Haltekraft der Klemmung durch jeweils drei symmetrisch angeordnete Tellerfederpakete aufgebracht wird und mittels krafteinleitender Schrauben einstellbar ist.An embodiment of the invention is shown in the drawing and is described in more detail below: Fig. 1 shows the front view of the tensioning device. Pressing the lever (a and d) releases the locks of the Ball joints (b and c). This allows the clamping device to be rotated and tilted. When you let go of the lever, the joint mechanisms are in the set Locked position, the holding force of the clamp by three symmetrical arranged disc spring assemblies is applied and by means of force-introducing screws is adjustable.

Die Spannkraft der Schraubstockbacken (g und h) ist sowohl fein einstellbar durch Rändelmutter (e) und Schlüssel (1) als auch durch das Verwenden unterschiedlicher Federn (f) in großem Bereich variierbar.The clamping force of the vice jaws (g and h) is both finely adjustable by knurled nut (s) and key (1) as well as by using different ones Springs (f) can be varied over a wide range.

Die Spannbackenaufsätze (g und h) sind abziehbar und lassen sich durch proben spezifische Sonderanfertigungen (wie z.B. (i)) ersetzen.The jaw attachments (g and h) are removable and let through Replace samples-specific custom-made products (such as (i)).

Die Hintergrundneutralisierung ist in diesem Ausführungsbeispiel durch eine austauschbare, bewegliche Platte (k) realisiert, die an der Unterseite der beweglichen Spannbacke befestigt ist.The background neutralization is through in this exemplary embodiment an exchangeable, movable plate (k) is realized, which is attached to the underside of the movable jaw is attached.

Fig. 2 zeigt die Draufsicht auf die Spannvorrichtung ohne Schirm und ohne Spannbackenaufsätze.Fig. 2 shows the top view of the clamping device without a screen and without jaw attachments.

Claims (5)

Patentansprüche: Spannvorrichtung für mikroskopisch zu untersuchende Proben, dadurch gekennzeichnet, daß die Spannkraft der Spannbacken definiert einstellbar ist. Claims: Clamping device for microscopic examination Samples, characterized in that the clamping force of the clamping jaws can be set in a defined manner is. 2. Spannvorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß die Spannbackenaufsätze austauschbar sind. 2. Clamping device according to claim 1, characterized in that the jaw attachments are interchangeable. 3. Spannvorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß der Spannkopf mittels arretierbarer Gelenke in seiner Position geändert werden kann. 3. Clamping device according to claim 1, characterized in that the position of the clamping head can be changed by means of lockable joints. 4. Spannvorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß mittels einer an der Spannvorrichtung verstellbar befestigten Platte (oder mit Hilfe eines Schirms) der Hintergrund beeinflußt bzw. neutralisiert werden kann.4. Clamping device according to claim 1, characterized in that means a plate adjustably attached to the clamping device (or with the help of a Screen) the background can be influenced or neutralized. 5. Spannvorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß die in Anspruch 4 beschriebene Platte an ein elektrisches Potential gelegt werden kann.5. Clamping device according to claim 1, characterized in that the The plate described in claim 4 can be applied to an electrical potential.
DE19823220702 1982-06-02 1982-06-02 Clamping device for samples to be examined microscopically, with background neutralisation Withdrawn DE3220702A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19823220702 DE3220702A1 (en) 1982-06-02 1982-06-02 Clamping device for samples to be examined microscopically, with background neutralisation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19823220702 DE3220702A1 (en) 1982-06-02 1982-06-02 Clamping device for samples to be examined microscopically, with background neutralisation

Publications (1)

Publication Number Publication Date
DE3220702A1 true DE3220702A1 (en) 1983-12-08

Family

ID=6165064

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19823220702 Withdrawn DE3220702A1 (en) 1982-06-02 1982-06-02 Clamping device for samples to be examined microscopically, with background neutralisation

Country Status (1)

Country Link
DE (1) DE3220702A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1161702A1 (en) * 1999-02-17 2001-12-12 Lucid, Inc. Tissue specimen holder
CN107452586A (en) * 2017-07-29 2017-12-08 哈尔滨理工大学 A kind of fixture suitable in Quanta200 SEM

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1161702A1 (en) * 1999-02-17 2001-12-12 Lucid, Inc. Tissue specimen holder
JP2002537579A (en) * 1999-02-17 2002-11-05 ルーシド インコーポレーテッド Tissue specimen holder
EP1161702A4 (en) * 1999-02-17 2007-10-24 Lucid Inc Tissue specimen holder
US9128024B2 (en) 1999-02-17 2015-09-08 Caliber Imaging & Diagnostics, Inc. Tissue specimen holder
CN107452586A (en) * 2017-07-29 2017-12-08 哈尔滨理工大学 A kind of fixture suitable in Quanta200 SEM

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