CN107396269A - A kind of MEMS condenser microphone and acoustic equipment - Google Patents
A kind of MEMS condenser microphone and acoustic equipment Download PDFInfo
- Publication number
- CN107396269A CN107396269A CN201710828743.1A CN201710828743A CN107396269A CN 107396269 A CN107396269 A CN 107396269A CN 201710828743 A CN201710828743 A CN 201710828743A CN 107396269 A CN107396269 A CN 107396269A
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- CN
- China
- Prior art keywords
- phonocatheter
- directional reception
- condenser microphone
- mems condenser
- microphone
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Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
- H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
- H04R1/34—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by using a single transducer with sound reflecting, diffracting, directing or guiding means
- H04R1/345—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by using a single transducer with sound reflecting, diffracting, directing or guiding means for loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
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- Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The invention discloses a kind of MEMS condenser microphone, including microphone body, phonocatheter and the directional reception shell with cambered surface, phonocatheter to be connected with microphone body, and the mouth of pipe of phonocatheter is located at the central area of the concave side of directional reception shell.Pass through the directional reception shell directional reception voice signal of cambered surface, the characteristic reflected using cambered surface, by cambered surface scope inner region is converged to the voice signal in direction, the corresponding pickup unit for again being introduced the voice signal for converging at the mouth of pipe in microphone body by phonocatheter, complete complete pickup process, directional reception acoustical signal is realized with this, the acoustical behavior of general omnidirectional can be changed into directional reception by the design by carrying out simple structural modification to MEMS condenser microphone, the uniformity of product range of receiving can either be ensured on the premise of directional reception, being not required to multiple microphones cooperations again causes cost too high.The invention also discloses a kind of acoustic equipment.
Description
Technical field
The present invention relates to acoustic applications technical field, more specifically to a kind of MEMS condenser microphone, further relates to
A kind of acoustic equipment.
Background technology
MEMS condenser microphone abbreviation MEMS microphone, it is the Mike based on the manufacture of MEMS (Micro Electro Mechanical System) technology
Wind, briefly exactly a capacitor is integrated on micro- silicon wafer, can be manufactured, can be born very using Surface Mount technique
High Reflow Soldering temperature, is easily integrated with CMOS technology and other voicefrequency circuits, and with improved noise removing performance with
Good RF and EMI rejection abilities, are widely used in mobile communication terminal device.
The technology of directional reception acoustical signal can solve：Acoustical signal, environmental noise in the one non-reception scope of refusal etc. are entered
Enter microphone；Two can strengthen the performance that audiphone class acoustic equipment receives acoustical signal.But directional reception technology microphone,
Also there is blind area in the application technology especially in MEMS microphone, specifically：
The first kind designs, and product structure design is complicated, and using unidirectional electret-type microphone, such microphone coordinates production
, it is necessary to which structure design has the pressure hole at rear portion during product structure, and the scope uniformity that orientating products receive is poor；It is another kind of to set
Meter needs to use at least two microphones to coordinate, and complex software algorithm design corresponding to needs, its implementation cost are higher.
In summary, how to efficiently solve and be difficult to the technology of directional reception acoustical signal being applied to MEMS Mike
The technical problem of wind etc., it is current those skilled in the art's urgent problem.
The content of the invention
In view of this, first purpose of the invention is to provide a kind of MEMS condenser microphone, the MEMS
The structure design of microphone, which can efficiently solve, to be difficult to the technology of directional reception acoustical signal being applied to MEMS Mike
The technical problem of wind etc., the present invention also provide a kind of acoustic equipment for including above-mentioned MEMS condenser microphone.
In order to reach above-mentioned first purpose, the present invention provides following technical scheme：
A kind of MEMS condenser microphone, including microphone body, phonocatheter and the directional reception shell with cambered surface, institute
The mouth of pipe for stating phonocatheter connects with the sound hole of the microphone body, and the mouth of pipe of the phonocatheter is located at the directional reception shell
Concave side central area.
Preferably, in above-mentioned MEMS condenser microphone, the directional reception shell has paraboloidal housing, institute
State phonocatheter and insert the directional reception shell, its mouth of pipe is fixed on paraboloidal focal position.
Preferably, in above-mentioned MEMS condenser microphone, the sound hole of the microphone body and the phonocatheter are direct
Connection.
Preferably, in above-mentioned MEMS condenser microphone, the microphone body is coated with gum cover, and the gum cover wraps institute
State the link position between sound hole and the phonocatheter.
Preferably, in above-mentioned MEMS condenser microphone, the periphery of the phonocatheter is Nian Jie with the directional reception shell solid
Fixed one, the two bonding location are provided with silica gel sealing layer.
Preferably, in above-mentioned MEMS condenser microphone, the microphone body deviates from the bottom surface of the phonocatheter side
Silica gel sealing layer is also equipped with gum cover edge link position.
Preferably, in above-mentioned MEMS condenser microphone, the concave surface side surface of the directional reception shell is reflected with enhancing
Film.
MEMS condenser microphone provided by the invention, including microphone body, phonocatheter and the orientation with cambered surface
Shell is received, the mouth of pipe of the phonocatheter connects with the sound hole of the microphone body, and the mouth of pipe of the phonocatheter is positioned at described
The central area of the concave side of directional reception shell.The directional reception shell directional reception that this MEMS condenser microphone passes through cambered surface
Voice signal, the characteristic reflected by cambered surface, by the cambered surface concave surface the voice signal in direction is converged in the range of cambered surface
Central area, then the corresponding pickup list for being introduced the voice signal for converging at the mouth of pipe in microphone body by the phonocatheter of setting
Member, completes complete pickup process, realizes directional reception acoustical signal with this, the design to MEMS condenser microphone by entering
The acoustical behavior of general omnidirectional can be changed into directional reception by the simple structural modification of row, can either be in the premise of directional reception
The lower uniformity for ensureing product range of receiving, multiple microphones cooperations are not required to again and cause cost too high, effectively solves and is difficult to
The technology of directional reception acoustical signal is applied to the technical problem of MEMS condenser microphone etc..
In order to reach above-mentioned second purpose, present invention also offers a kind of acoustic equipment, the acoustic equipment includes above-mentioned
Any MEMS condenser microphone.Because above-mentioned MEMS condenser microphone has above-mentioned technique effect, there is the microcomputer
The acoustic equipment of electric system microphone should also have corresponding technique effect.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the structural representation of MEMS condenser microphone provided in an embodiment of the present invention.
Marked in accompanying drawing as follows：
Microphone body 1, phonocatheter 2, directional reception shell 3, gum cover 4.
Embodiment
The embodiment of the invention discloses a kind of MEMS condenser microphone, to solve to be difficult to the skill of directional reception acoustical signal
Art is applied to the technical problem of MEMS condenser microphone etc..
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
Referring to Fig. 1, Fig. 1 is the structural representation of MEMS condenser microphone provided in an embodiment of the present invention.In accompanying drawing
The arrow straight line sign acoustic signals of non-index wire, sign acoustic signals pass through the reflection case during present apparatus.
The MEMS condenser microphone that embodiments of the invention provide, including microphone body 1, phonocatheter 2 and have
The directional reception shell 3 of cambered surface, the mouth of pipe of the phonocatheter 2 connect with the sound hole of the microphone body 1, the phonocatheter 2
The mouth of pipe be located at the directional reception shell 3 concave side central area.
Wherein it should be noted that microphone body refers to the basic pickup unit of microphone apparatus, including outside
Clamshell and the electronics pick-up element of inside；In addition, the concept of directional reception shell cambered surface, in technical solution of the present invention, place is only
Refer to the curved surface with single radian direction；
Central area refers to the depression side positioned at the cambered surface, and when reflect naturally by cambered surface, reflects line reflection remittance
Poly- region, preferable design are that the structure of sealing is set in each link position, are lost in ensureing that acoustic energy is reduced.
This MEMS condenser microphone is passed through by the directional reception shell directional reception voice signal of cambered surface in this implementation
The characteristic of cambered surface reflection, by the cambered surface concave surface the central area that is converged to the voice signal in direction in the range of cambered surface, then lead to
The corresponding pickup unit that the phonocatheter set introduces the voice signal for converging at the mouth of pipe in microphone body is crossed, is completed complete
Pickup process, directional reception acoustical signal is realized with this, the design to MEMS condenser microphone by carrying out simple structure
The acoustical behavior of general omnidirectional can be changed into directional reception by repacking, can either ensure that product connects on the premise of directional reception
The uniformity of scope is received, multiple microphones cooperations is not required to again and causes cost too high, effectively solve and be difficult to directional reception sound
The technology of signal is applied to the technical problem of MEMS condenser microphone etc..
For further optimization above-mentioned technical proposal, preferable on the basis of above-described embodiment, above-mentioned MEMS wheat
In gram wind, the directional reception shell 3 has paraboloidal housing, and the phonocatheter 2 inserts the directional reception shell 3,
Its mouth of pipe is fixed on paraboloidal focal position.
In the technical scheme that the present embodiment provides, the design of cambered surface housing is further optimized, it uses parabolic concave surface, by
This has more preferable aggregate capabilities, can be by sound reflection to its focal position, therefore by phonocatheter due to paraboloidal characteristic
The mouth of pipe be arranged at focal position, greatly improve receive shell reception.
It is preferable on the basis of above-described embodiment for further optimization above-mentioned technical proposal, above-mentioned MEMS Mike
In wind, the sound hole of the microphone body 1 directly connects with the phonocatheter 2.
In the technical scheme that the present embodiment provides, microphone body and the connected mode of phonocatheter are further optimized, directly
Connect and another end opening of phonocatheter is plugged in sound hole, the connected mode stabilized structure is more durable to be not easy connection fracture.
It is preferable on the basis of above-described embodiment for further optimization above-mentioned technical proposal, above-mentioned MEMS Mike
In wind, the microphone body 1 is coated with gum cover 4, and the gum cover 4 wraps the company between the sound hole and the phonocatheter 2
Connect position.
In the technical scheme that the present embodiment provides, the structure of gum cover can make sound convergence reduce transmitting procedure loss, and
Noise can be avoided to be ingested, or dust enters electric elements inside；Phonocatheter and gum cover can be further wholely set, point
Body formula structure preferably increases rubber cushion class formation between.
It is preferable on the basis of above-described embodiment for further optimization above-mentioned technical proposal, above-mentioned MEMS Mike
In wind, the periphery of the phonocatheter 2 and the directional reception shell 3 are adhesively fixed one, and it is close that the two bonding location is provided with silica gel
Sealing.
In the technical scheme that the present embodiment provides, phonocatheter and directional reception shell are connected by way of bonding, this design
Phonocatheter is needed to be formed for rigid, the design structure is simple, need to only make phonocatheter penetrate and receive shell outer wall suitable distance i.e.
Can, by setting the seamless seal of silica gel sealing layer guarantee therebetween.
It is preferable on the basis of above-described embodiment for further optimization above-mentioned technical proposal, above-mentioned MEMS Mike
In wind, the microphone body 1 is also equipped with away from the bottom surface of the side of phonocatheter 2 with the edge link position of gum cover 4
Silica gel sealing layer.Similarly silica gel sealing layer is set between gum cover edge and the bottom surface of microphone body with above-described embodiment, together
Sample ensures the aggregate capabilities of acoustical signal for lift-off seal.
For further optimization above-mentioned technical proposal, on the basis of above-described embodiment, further optimization is proposed, makes device
The acoustic form that enters set more reasonable, make the mouth of pipe of the sound hole of microphone, the via on gum cover 4 and phonocatheter 2 with always
On line, this design simplify the structure design of device, and the conduction of sound wave and energy is realized by linear structure, reduced
The loss of acoustic energy, improves pickup effect.
It is preferable on the basis of above-described embodiment for further optimization above-mentioned technical proposal, above-mentioned MEMS Mike
In wind, the concave surface side surface of the directional reception shell 3 is with enhancing reflectance coating.In directional reception by way of pad pasting or plated film
The surface of shell sets enhancing reflectance coating, reflection of the enhancing parabola to acoustical signal, reduces the energy loss of voice signal, makes pickup
Effect is more preferable.
Based in the MEMS condenser microphone provided in above-described embodiment, present invention also offers a kind of acoustic equipment,
The acoustic equipment includes any MEMS condenser microphone in above-described embodiment.Because the acoustic equipment employs above-mentioned implementation
In MEMS condenser microphone in example, so the beneficial effect of the acoustic equipment refer to above-described embodiment.
Wherein the acoustic equipment may include audiphone, various verbal systems etc..The product designed by the technology of the present invention,
It can be achieved omnidirectional microphone " change " as directional microphone；Available for the equipment on conference system, receive specific spokesman's
Speech, " rejection " receives the speech of people around, available for the receiving terminal of audiphone, by the directional reception shell direction of microphone on device
Want the direction of people listened, user can be helped preferably to filter out the noise in addition to listening to direction.It is fixed to apply also for
To sound pick-up outfit, and have above the equipment of directional reception acoustic signals demand.
By taking the use of audiphone as an example, it is assumed that the personnel for wearing the technology of the present invention equipment are A, and talker is B therewith, works as B
When being talked to A, the sent acoustic signals of B speeches, transmitted via air medium to the reception shell of the technology of the present invention, sound wave quilt
Phonocatheter oral area (i.e. focal position) is further transmitted to, then microphone unit, completion sound letter are entered by the sound hole of microphone
Number the conversion of analog signal is arrived, and then transmitted to the hardware circuit part of the equipment processing of signal (pass through), most passed afterwards through wire
Loudspeaker unit device is transported to, loudspeaker, which send acoustic signals, to be transmitted to A ear-drum, whole process and thus complete.
Compared with electret-type microphone, the MEMS condenser microphone that above example provides has the advantage that：System
Making technique has repeatability and uniformity well, so as to ensure that every silicon microphone has the outstanding performance of identical.Sound pressure level
Height, and chip internal typically has pre-amplification circuit, therefore sensitivity is very high.Hz-KHz is wide：100~10KHZ.Distortion is small：THD
<1% (@1KHZ) (Total Harmonic Distortion, total harmonic distortion).Current drain is low.Excellent anti-EMI filter and RFI
Characteristic.Moisture resistance wet environment and temperature shock.High temperature resistant, wave-soldering can be used.Can through it is vibrated, fall, the machinery such as hit
Power and temperature shock.
Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
The foregoing description of the disclosed embodiments, professional and technical personnel in the field are enable to realize or using the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one
The most wide scope caused.
Claims (8)
1. a kind of MEMS condenser microphone, it is characterised in that including microphone body, phonocatheter and the orientation with cambered surface
Shell is received, the mouth of pipe of the phonocatheter connects with the sound hole of the microphone body, and the mouth of pipe of the phonocatheter is positioned at described
The central area of the concave side of directional reception shell.
2. MEMS condenser microphone according to claim 1, it is characterised in that the directional reception shell has
Paraboloidal housing, the phonocatheter insert the directional reception shell, and its mouth of pipe is fixed on paraboloidal focal position.
3. MEMS condenser microphone according to claim 2, it is characterised in that the sound hole of the microphone body with
The phonocatheter directly connects.
4. MEMS condenser microphone according to claim 3, it is characterised in that the microphone body is coated with glue
Set, the gum cover wrap the link position between the sound hole and the phonocatheter.
5. MEMS condenser microphone according to claim 4, it is characterised in that the periphery of the phonocatheter with it is described fixed
It is adhesively fixed one to shell is received, the two bonding location is provided with silica gel sealing layer.
6. MEMS condenser microphone according to claim 5, it is characterised in that the microphone body is led away from described
The bottom surface of sound pipe side is also equipped with silica gel sealing layer with gum cover edge link position.
7. MEMS condenser microphone according to claim 6, it is characterised in that the concave side table of the directional reception shell
Face is with enhancing reflectance coating.
8. a kind of acoustic equipment, it is characterised in that including the MEMS condenser microphone as described in any one of claim 1 to 7.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710828743.1A CN107396269A (en) | 2017-09-14 | 2017-09-14 | A kind of MEMS condenser microphone and acoustic equipment |
| PCT/CN2017/108578 WO2019051952A1 (en) | 2017-09-14 | 2017-10-31 | Microelectromechanical system microphone and acoustic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710828743.1A CN107396269A (en) | 2017-09-14 | 2017-09-14 | A kind of MEMS condenser microphone and acoustic equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107396269A true CN107396269A (en) | 2017-11-24 |
Family
ID=60351843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710828743.1A Pending CN107396269A (en) | 2017-09-14 | 2017-09-14 | A kind of MEMS condenser microphone and acoustic equipment |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN107396269A (en) |
| WO (1) | WO2019051952A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11432066B2 (en) * | 2019-02-14 | 2022-08-30 | Dean Robert Gary Anderson | Audio systems, devices, MEMS microphones, and methods thereof |
| US11558690B2 (en) | 2021-01-14 | 2023-01-17 | Dean Robert Gary Anderson | Audio systems, devices, and methods |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103475983A (en) * | 2013-09-13 | 2013-12-25 | 山东共达电声股份有限公司 | Mems microphone and electronic equipment |
| CN203446028U (en) * | 2013-09-13 | 2014-02-19 | 山东共达电声股份有限公司 | Micro-electromechanical system (MEMS) microphone and electronic apparatus |
| CN205726411U (en) * | 2016-06-28 | 2016-11-23 | 北京第七九七音响股份有限公司 | Highly sensitive microphone |
| CN207124767U (en) * | 2017-09-14 | 2018-03-20 | 歌尔科技有限公司 | A kind of MEMS condenser microphone and acoustic equipment |
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|---|---|---|---|---|
| CN2577524Y (en) * | 2002-10-20 | 2003-10-01 | 罗富强 | Parabolic focusing acoustic wave signal pick-up |
| US9143870B2 (en) * | 2012-11-09 | 2015-09-22 | Invensense, Inc. | Microphone system with mechanically-coupled diaphragms |
| US9212046B2 (en) * | 2013-10-15 | 2015-12-15 | Robert Bosch Gmbh | MEMS microphone with membrane antennas |
| CN103813248B (en) * | 2014-03-10 | 2018-03-13 | 金如利 | A kind of sound focusing sound pick up equipment |
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2017
- 2017-09-14 CN CN201710828743.1A patent/CN107396269A/en active Pending
- 2017-10-31 WO PCT/CN2017/108578 patent/WO2019051952A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103475983A (en) * | 2013-09-13 | 2013-12-25 | 山东共达电声股份有限公司 | Mems microphone and electronic equipment |
| CN203446028U (en) * | 2013-09-13 | 2014-02-19 | 山东共达电声股份有限公司 | Micro-electromechanical system (MEMS) microphone and electronic apparatus |
| CN205726411U (en) * | 2016-06-28 | 2016-11-23 | 北京第七九七音响股份有限公司 | Highly sensitive microphone |
| CN207124767U (en) * | 2017-09-14 | 2018-03-20 | 歌尔科技有限公司 | A kind of MEMS condenser microphone and acoustic equipment |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11432066B2 (en) * | 2019-02-14 | 2022-08-30 | Dean Robert Gary Anderson | Audio systems, devices, MEMS microphones, and methods thereof |
| US20220408179A1 (en) * | 2019-02-14 | 2022-12-22 | Dean Robert Gary Anderson | Audio systems, devices, mems microphones, and methods thereof |
| US11743635B2 (en) * | 2019-02-14 | 2023-08-29 | Dean Robert Gary Anderson | Audio systems, devices, MEMS microphones, and methods thereof |
| US20230403501A1 (en) * | 2019-02-14 | 2023-12-14 | Dean Robert Gary Anderson | Audio systems, devices, mems microphones, and methods thereof |
| US11558690B2 (en) | 2021-01-14 | 2023-01-17 | Dean Robert Gary Anderson | Audio systems, devices, and methods |
| US11997450B2 (en) | 2021-01-14 | 2024-05-28 | Dean Robert Gary Anderson | Audio systems, devices, and methods |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019051952A1 (en) | 2019-03-21 |
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Application publication date: 20171124 |