CN107390449A - Lighting device and check device - Google Patents
Lighting device and check device Download PDFInfo
- Publication number
- CN107390449A CN107390449A CN201710348546.XA CN201710348546A CN107390449A CN 107390449 A CN107390449 A CN 107390449A CN 201710348546 A CN201710348546 A CN 201710348546A CN 107390449 A CN107390449 A CN 107390449A
- Authority
- CN
- China
- Prior art keywords
- light
- projector
- lighting device
- reference object
- illumination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
- G03B15/02—Illuminating scene
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
Abstract
The present invention makes lighting device possess illumination functions and graphic pattern projection function with easy apparatus structure.The lighting device (30) being illuminated to the reference object (O) of filming apparatus (20) is set to following structures, has：Projector (35), its irradiation light；And optical splitter (37), it guides the light from projector to reference object, and the light of projector is switched into the projected light of projection pattern and illumination light without projection pattern.Projected light is produced by using projector, thus, it is possible to be shot to the projection pattern projected to reference object, illumination light is produced by using projector, thus, it is possible to be shot in the state of being illuminated using illumination light to reference object.
Description
Technical field
The present invention relates to the lighting device being illuminated to reference object and check device.
Background technology
Currently, the lighting device being illuminated as the reference object to shooting camera, it is known that from surface to shooting
The lighting device that object is illuminated (for example, referring to patent document 1).In the lighting device that patent document 1 is recorded, for
The semi-transparent semi-reflecting lens of the underface of camera are shot, by the light source of surface-emitting type and irradiation light from horizontal direction.From light source
Light direction from semi-transparent semi-reflecting lens to underface reflect, thus from shoot camera optical axis identical direction to shooting
Object is illuminated.Moreover, the light of subject reflection is directed to shooting camera through semi-transparent semi-reflecting lens, so as to
The surface of reference object is shot by shooting camera using coaxially falling to penetrate illumination.
Patent document 1：Japanese Unexamined Patent Publication 2014-134525 publications
In recent years, as described above in the illumination of reference object, it is desirable to used the pattern of projector to project.For
Projected by lighting device realizing pattern, it is necessary to coaxially falling configuring projector in the light source identical light path penetrated,
But it is difficult to these light sources being configured to projector mutually non-interference.Therefore, it has to be set to prepare coaxial-illuminating respectively
Filming apparatus and the filming apparatus of pattern projection, or substitute for lighting device and coaxially to fall the light source penetrated and the throwing that changes the outfit
Shadow device, the problem of apparatus structure that filming apparatus be present becomes complexity.
The content of the invention
The present invention in view of the problem and propose, its object is to provide a kind of lighting device and check device, its
Possess illumination functions and graphic pattern projection function with easy apparatus structure.
The lighting device of the present invention, its reference object to filming apparatus are illuminated, and the feature of the lighting device exists
In having：Projector, its irradiation light；And optical system, it guides the light from the projector to the shooting pair
As the light of the projector can be switched to the projected light of projection pattern and the illumination light without projection pattern.
According to the structure, by there is the projected light of projection pattern from projector irradiation, so as to by optical system
And project to the projection pattern of reference object and shot.In addition, by irradiating the illumination light without projection pattern from projector,
So as to be shot in the state of being illuminated by optical system using illumination light to reference object.As above institute
State, used by regarding projector as lighting source, so as to make lighting device possess illumination work(with easy structure
Energy and graphic pattern projection function.
In above-mentioned lighting device, the optical system by the light from the projector from the filming apparatus
The direction of light shaft coaxle guide to the reference object.According to the structure, lighting device can be made to possess with easy structure
Coaxially fall to penetrate illumination functions and graphic pattern projection function.
In above-mentioned lighting device, the projector project the calibration of the filming apparatus by the use of test chart and as
Projection pattern.According to the structure, calibrated using projection pattern, therefore do not need specific purpose tool, and can be reduced into
This.In addition, the change of test chart is also easy.
In above-mentioned lighting device, the projector is DLP (Digital Light Processing) projector, profit
Uniformly reflect the light from light source with whole DMD (Digital Micromirror Device) element, irradiate no projection
The illumination light of pattern.According to the structure, by being controlled to DMD elements, so as to produce the illumination of no projection pattern
Light, reference object is illuminated.
The check device of the present invention, it is characterised in that have：Above-mentioned lighting device；Filming apparatus, it is to utilizing institute
The reference object for stating lighting device lighting is shot；And control device, it is based on being shot using the filming apparatus
Shooting image, reference object is checked., can be by with illumination functions and graphic pattern projection function according to the structure
Lighting device and check device is set to easy apparatus structure.
The effect of invention
According to the present invention, by using projector to thering is the projected light of projection pattern and illumination light without projection pattern to enter
Row switches and is irradiated, so as to make lighting device possess illumination functions and graphic pattern projection function with easy structure.
Brief description of the drawings
Fig. 1 is the oblique view of the check device of present embodiment.
Fig. 2 is the schematic diagram of the lighting device of comparative example.
Fig. 3 is the oblique view of the shooting head of present embodiment.
Fig. 4 is the schematic diagram of the lighting device of present embodiment.
Fig. 5 is the calibration actions of present embodiment and the explanation figure of inspection action.
The explanation of label
1 check device
15 shooting heads
20 filming apparatus
30 lighting devices
35 projectors
37 optical splitters (optical system)
41 light sources
43 DMD elements
44 DMD controllers
50 control devices
Embodiment
Below, referring to the drawings, the check device of embodiments of the present invention is illustrated.Fig. 1 is present embodiment
The oblique view of check device.In addition, the check device of a present embodiment only example, can suitably be changed.
(do not scheme in printing equipment (not shown) or erecting device as shown in figure 1, check device 1 configures in production line
Show) downstream, the check device 1 is configured to, to the shooting image real-time image processings photographed by shooting first 15, to substrate W
On the printing state of solder, the installment state of part checked.Check device 1 can be only fitted to any position of production line
Put, but be set to the installation to the printing state, part of the solder after the reflow process for substrate W in the following description
Check device that state is checked and illustrate.The base of conveying substrate W in the X-axis direction is configured with check device 1
Plate conveying device 10, position is checked be positioned at substrate W by base board delivery device 10.
Base board delivery device 10 is using a pair of the conveyer belts 11 conveyed to substrate W and along each conveyer belt 11 to substrate W
The conveying guide portion 12 that guides of conveying and form transport path.A pair of conveyer belts 11 are arranged on a pair of conveying guide portions
12 relative medial surface, each guide portion 12 that conveys are supported from below by multiple foots 13.Conveyer belt 11 is from X-direction
One end laterally check that substrate W is moved into position, the substrate W after inspection is taken out of to the another side of X-direction.In addition, a pair
The top of guide portion 12 is conveyed towards medially bending, is made by elevating mechanism (not shown) via conveyer belt 11 above and below substrate W
It is mobile, pressed by substrate W by the bending part, position is checked so as to which substrate W is positioned in.
Shooting first 15 is positioned at the top being positioned on the substrate W for checking position by travel mechanism (not shown),
Using lighting device 30 in the state of being illuminated as the substrate W of reference object by filming apparatus 20 to substrate W
Check surface shot.The travel mechanism of shooting first 15 is configured to make shooting first 15 horizontal in X-direction and Y direction
It is mobile, for example, being made up of the drive mechanism of ball screw type or the drive mechanism of pinion and-rack.Shooting first 15 is by such as CCD
(Charge Coupled Device) sensor, CMOS (Complementary Metal Oxide Semiconductor)
The optical system such as the capturing elements such as sensor and lens is formed.
Lighting device 30 can be illuminated from the optical axis identical direction with filming apparatus 20 to substrate W, and can
The incline direction intersected from the optical axis with filming apparatus 20 is illuminated to substrate W.In this case, set in lighting device 30
Dome-type light shielding part 34 is equipped with, is provided with the inner side of light shielding part 34 different relative to the irradiating angle of substrate W check surface
3 species illumination 39a-39c (reference picture 4).Shooting first 15 in, by the solder of the check point with substrate W,
Part accordingly, to the illumination direction realized by lighting device 30 suitably switch or combine, thus, it is possible to utilize bat
Take the photograph device 20 and obtain the clear and definite shooting image of contrast.
The control device 50 that Comprehensive Control is carried out to each portion of device is provided with check device 1.Control device 50 is by holding
The processors of the various processing of row, memory etc. are formed.Memory correspond to purposes and by ROM (Read Only Memory),
One or more storage mediums such as RAM (Random Access Memory) are formed.In addition, pin is stored with memory
Program of calibration (lens correction) of inspection program, the filming apparatus 20 described below to substrate W etc..As described above
Check device 1 in, the shooting image from filming apparatus 20 is inputted to control device 50, utilize control device 50 implement figure
The various image procossings such as case matching, are thus checked substrate W.
In addition, for lighting device 30, test chart, the 3D measurements of calibration are required as function in addition to illumination
The function in addition to illumination such as candy strip.As shown in Fig. 2 comparative example, in the illumination of common coaxial-illuminating
In device 61, optical splitter 63 is configured with the underface of filming apparatus 62, be configured with the side of optical splitter 63 diffuser plate 64 and
Illuminating board 65.In lighting device 61, the light irradiated from horizontal direction from illuminating board 65 spread by diffuser plate 64 and
Injected to optical splitter 63, light be split device 63 to the reflection of the optical axis identical direction of filming apparatus 62, from surface to shooting
Object O is illuminated.
In order that the lighting device 61 of comparative example possesses graphic pattern projection function, it is necessary in lighting device 61 with process and photograph
The mode of the bright same optical path of substrate 65 installs projector 66, but projector 66 can not be configured in the light path of illuminating board 65.Cause
This, it is contemplated that following structures, i.e. formed and be open in illuminating board 65, projector 66 is installed in the rear side of illuminating board 65,
Make opening of the projected light from projector 66 Jing Guo illuminating board 65 and be incident upon optical splitter 63.But if in illumination base
Plate 65 then can not equably be illuminated for reference object O formed with opening, the problem of uneven luminance occurs be present.
Therefore, in the lighting device 30 of present embodiment, by the light of projector 35 in the projected light that has projection pattern and
Switch between illumination light without projection pattern, not only project the light source 41 (reference picture 4) of projector 35 as pattern,
Also serve as and coaxially fall to penetrate illuminating light source.Thus, there is the projected light of projection pattern by irradiation, so as to use calibration
Test chart, the measuring candy strips of 3D are projected.In addition, without setting illuminating board 65 in lighting device 30, expanding
Fall apart 64, reference object O equably can coaxially be fallen to penetrate illumination using the illumination light without projection pattern.
Below, reference picture 3 and Fig. 4, the lighting device of present embodiment is described in detail.Fig. 3 is this embodiment party
The oblique view of the shooting head of formula.Fig. 4 is the schematic diagram of the lighting device of present embodiment.In addition, Fig. 3 and Fig. 4 shooting head and
A lighting device only example, can suitably be changed.
As shown in figure 3, shooting first 15 is on the surface for the movable platen 17 for being movably arranged at travel mechanism (not shown)
Filming apparatus 20 and lighting device 30 are installed and formed.The device case of lighting device 30 is by saturating with filming apparatus 20
The hollow tubular shell 31 and house optical splitter 37 (reference picture 4) in the lower section of tubular shell 31 that mirror shell body 21 abuts
What the optical splitter housing 32 of box was formed.The lens housing 36 of projector 35 is abutted in the one side of optical splitter housing 32, is being divided
The lower section of light device housing 32, dome-type light shielding part 34 is installed via a pair of brackets 33 on the surface of movable platen 17.
As shown in figure 4, lighting device 30 using the light irradiated from projector 35 pass through as optical system optical splitter 37 and
Guided to reference object O, reference object O is illuminated.Projector 35 is so-called DLP (Digital Light
Processing) projector, the light from light source 41 is subjected to optically focused using collector lens 42, by multiple DMD (Digital
Micromirror Device) element 43 reflects, produce projected light, illumination light.It is provided with projector 35 to multiple DMD members
The DMD controllers 44 that the driving of part 43 is controlled, with inputting the picture pattern to DMD controllers 44 accordingly to DMD members
The driving of part 43 is controlled.
By the way that picture pattern is read in DMD controllers 44, so as to be formed using multiple DMD elements 43 and picture pattern
Corresponding projection pattern.Specifically, if controlled DMD elements 43 for ON by DMD controllers 44, from light source
41 light is reflected towards projecting lens 45.In addition, if controlled DMD elements 43 for OFF by DMD controllers 44,
Then the light from light source 41 is reflected towards the light absorbs plate (not shown) deviateed from projecting lens 45.By making the DMD elements
43 ON/OFF switch speed is partly variable and produces the deep or light of light, so as to form projection pattern.
If for example, will there is pattern image to input to DMD controllers 44 as picture pattern, by by multiple DMD
The ON/OFF of element 43 is respectively controlled, so as to projected light of the light formed with projection pattern according to light source 41.In addition, such as
Fruit is read in DMD controllers 44 as picture pattern and by pattern-free image (no graph image), then by making whole DMD members
The ON/OFF of part 43 timing is consistent and is simultaneously controlled, so as to form the photograph without projection pattern according to the light of light source 41
Mingguang City.Now, by the way that ON/OFF switch speed is adjusted, thus, it is possible to be adjusted to brightness (light quantity).
In addition, projector 35 is provided with the slot 46 of the exterior storage mediums such as USB storage, SD card.In projector
35 slot 46 equips exterior storage medium, and the picture pattern in exterior storage medium is read in DMD controllers 44, to DMD
Element 43 is controlled.In addition, picture pattern is not limited to the structure read in from exterior storage medium, can also be ready for
The internal storage of DMD controllers 44, it can also be inputted by radio communication or wire communication from external device (ED).In addition,
Can be by making the light from light source 41 pass through colour wheel, so as to form colored projected light, illumination light.
Optical splitter 37 is contained in optical splitter housing 32, the light of the horizontal direction from projector 35 is utilized into light splitting
Device 37 is reflected towards reference object O, and the reflected light from reference object O is filled towards shooting using optical splitter 37
Put 20 transmissions.In addition, optical splitter 37 is exemplified as optical system in the present embodiment, but as long as being by from projection
The structure that the light of device 35 guides to reference object O.For example, semi-transparent semi-reflecting lens or rib can also be used as optical system
The beam splitters such as mirror and substitute optical splitter 37, other optics such as lens, speculum can also be used on the basis of beam splitter
Part.
The upper strata illumination 39a obliquely irradiated relative to reference object O, middle level are provided with the inner side of light shielding part 34
Illuminate 39b, lower floor illumination 39c.Upper strata illumination 39a, middle level illumination 39b, lower floor illumination 39c light angle are each different, lead to
The illumination that coaxially falls to penetrate crossed to these illuminations 39a- illumination 39c and realized by projector 35 is suitably selected or combined,
So as to obtain the clear and definite shooting image of contrast.Lighting device 30 and filming apparatus 20 are connected with control device 50, except
Outside calibration to having used pattern projection etc. is controlled, also to having used the inspection processing for coaxially falling to penetrate illumination to control
System.
In the lighting device 30 formed as described above, the light of the light source 41 from projector 35 is by collector lens 42
Optically focused and expose to multiple DMD elements 43, by multiple DMD elements 43 towards the reflected light of projecting lens 45 and shape
Into projected light, illumination light.Now, in the case where there is pattern image to be read into DMD controllers 44, to each DMD elements
43 are respectively controlled, and the projected light for having projection pattern is projected from projecting lens 45.In addition, it is read into pattern-free image
To DMD controllers 44, whole DMD elements 43 are uniformly controlled, by the illumination light without projection pattern from throwing
Shadow lens 45 project.
In addition, the projected light, illumination light through projecting lens 45 are split, device 37 is to the light shaft coaxle with filming apparatus 20
Direction reflection, relative to reference object O from surface inject.Projected light, illumination light subject O reflections, reflected light are saturating
Cross optical splitter 37 and be incident upon filming apparatus 20, thus reference object O is shot.As described above, by using projection
Device 35 has the projected light of projection pattern and the illumination light without projection pattern, so that lighting device 30 is coaxial except possessing
Fall to penetrate outside illumination functions, while be also equipped with graphic pattern projection function.In addition, pattern project when projected light and coaxially fall to penetrate photograph
Illumination light when bright passes through same light path, therefore can be set to easy apparatus structure.
Then, reference picture 5, calibration actions and inspection action are illustrated.Fig. 5 is the calibration actions of present embodiment
And the explanation figure of inspection action.In addition, calibration actions as shown below and inspection action represent an example, can suitably become
More.In addition, being illustrated herein to the calibration for having used projection pattern, but it can also use projection pattern and carry out 3D surveys
Amount.
As shown in Figure 5A, in the calibration of filming apparatus 20, reference object is used as in the coverage of filming apparatus 20
O and load planless plate P, and test chart image is read in DMD controllers 44.Correspond in DMD controllers 44 and survey
Attempt image and be respectively controlled the ON/OFF of DMD elements 43.Moreover, the light of the light source 41 from projector 35 passes through
Collector lens 42 and expose to DMD elements 43, by the light reflected from DMD elements 43 towards projecting lens 45, formed to school
The projected light that mutatis mutandis test chart is projected.
The projected light projected from the projecting lens 45 of projector 35 the device 37 that is split reflects, so as to as reference object
Plate P surface mirror test chart.If the test chart on the surface by the taking panel P of filming apparatus 20, the shooting of test chart
Image is input to control device 50.The shooting image based on test chart implements the school of filming apparatus 20 in control device 50
Standard, the distortion to the lens peculiarity of filming apparatus 20 etc. are corrected.Thus, calibrated using projection pattern, therefore not
Specific purpose tool is needed, and cost can be reduced.In addition, by being switched over to picture pattern, so as to the change of test chart
Easily.
As shown in Figure 5 B, in substrate W inspection, positioned in the coverage of filming apparatus 20 and be used as reference object O
Substrate W inspection position, and the white image of pattern-free is read in DMD controllers 44.It is right in DMD controllers 44
The ON/OFF of DMD elements 43 should be uniformly controlled in white image.Moreover, the light source 41 from projector 35
Light exposes to DMD elements 43 by collector lens 42, passes through the light shape reflected from DMD elements 43 towards projecting lens 45
Into the illumination light for not showing projection pattern.In addition it is also possible to DMD elements 43 are controlled to be always in order to improve brightness
ON。
The illumination light projected from the projecting lens 45 of projector 35 the device 37 that is split reflects, so as to from surface to conduct
Reference object O substrate W inspection position is illuminated.If shooting substrate W inspection position by filming apparatus 20,
Substrate W shooting image is input to control device 50.Pattern is implemented to substrate W shooting image in control device 50
With etc. various image procossings, the installment state of printing state, part to the solder on substrate W check.Thus, without
Lighting source is separately set, illumination light can be produced by projector 35, using coaxially falling to penetrate inspection position of the illumination to substrate W
Put and shot.
As described above, in projector 35 in addition to the test chart of calibration, additionally it is possible to the measuring bar graphs of 3D
Case is projected.In the case of use, shoot and fill in installations such as the inner sides of light shielding part 34 in 3D measurements by projector 35
Put so that the projection pattern from incline direction mapping for reference object O is shot.In addition, projector 35 is not limited to
Calibration, 3D measurements, additionally it is possible to for other purposes.
As previously discussed, the lighting device 30 of present embodiment is by irradiating the projection for having projection pattern from projector 35
Light, so as to projecting to plate P projection pattern and shooting by optical splitter 37.In addition, by being shone from projector 35
The illumination light of no projection pattern is penetrated, so as to by optical splitter 37 and to base in the state of being illuminated using illumination light
Plate W inspection position is shot.As described above, used by regarding projector 35 as lighting source, so as to letter
Easy structure and lighting device 30 is possessed illumination functions and graphic pattern projection function.
In addition, the present invention is not limited to above-mentioned embodiment, various changes can be carried out and implemented.In above-mentioned implementation
In mode, on size, the shape etc. illustrated in the accompanying drawings, this is not limited to, in the scope for the effect for playing the present invention
It is interior suitably to be changed.In addition, without departing from the scope of the purpose of the present invention, then it can suitably change and implement.
For example, in the present embodiment, it is set to check device 1 and possesses the structure for having lighting device 30, but be not limited to
The structure.Lighting device 30 can also be arranged at the processing unit (plant) for implementing shooting processing, can also be in such as erecting device, print
Possess in other processing unit (plant)s such as brush device.
In addition, in the present embodiment, it is same from being carried out with the optical axis identical direction of filming apparatus 20 to be set to projector 35
Axle falls to penetrate the structure of illumination, but is not limited to the structure.Projector 35 can also be set to hand over from the optical axis of filming apparatus 20
The structure that the incline direction of fork is illuminated.
In addition, in the present embodiment, projector 35 is illustrated for the structure of DLP projectors, but does not limit
In the structure.As long as projector 35 can also be formed in addition to projected light illumination light projector can or for example
LCD (Liquid Crystal Display) projector, LCOS (Liquid Crystal On Silicon) projector.
In addition, in the present embodiment, as long as substrate W can carry the component of various parts, it is not limited to
Printed base plate or the flexible base board being positioned on tool substrate.
Industrial applicibility
As described above, the present invention has can possess illumination functions and pattern projection with easy apparatus structure
The effect of function, particularly, to the printing state of solder, the installment state of part inspection used in lighting device
And check device is effective.
Claims (5)
1. a kind of lighting device, its reference object to filming apparatus is illuminated,
The lighting device is characterised by having：
Projector, its irradiation light；And
Optical system, it guides the light from the projector to the reference object,
The light of the projector can be switched to the projected light of projection pattern and the illumination light without projection pattern.
2. lighting device according to claim 1, it is characterised in that
The optical system guides the light from the projector to institute from the direction of the light shaft coaxle with the filming apparatus
State reference object.
3. lighting device according to claim 1, it is characterised in that
The projector project the calibration of the filming apparatus by the use of test chart and be used as projection pattern.
4. lighting device according to claim 1, it is characterised in that
The projector is DLP projectors,
Uniformly reflect the light from light source using whole DMD elements, irradiate the illumination light of no projection pattern.
5. a kind of check device, it is characterised in that have：
Lighting device any one of claim 1 to claim 4；
Filming apparatus, it shoots to the reference object using the lighting device lighting；And
Control device, it is checked reference object based on the shooting image shot using the filming apparatus.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016098718A JP2017207329A (en) | 2016-05-17 | 2016-05-17 | Illumination device and inspection device |
| JP2016-098718 | 2016-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107390449A true CN107390449A (en) | 2017-11-24 |
Family
ID=60338985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710348546.XA Withdrawn CN107390449A (en) | 2016-05-17 | 2017-05-17 | Lighting device and check device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2017207329A (en) |
| CN (1) | CN107390449A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111562714A (en) * | 2020-05-22 | 2020-08-21 | 复旦大学 | Multispectral modulation imaging device based on multi-wavelength LED light source |
| CN114136975A (en) * | 2021-11-04 | 2022-03-04 | 上海精密计量测试研究所 | Intelligent detection system and method for surface defects of microwave bare chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020153741A1 (en) * | 2019-01-24 | 2020-07-30 | 주식회사 고영테크놀러지 | Jig for test device, test device, test set, and object testing method using same |
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| US20100274392A1 (en) * | 2009-04-25 | 2010-10-28 | National Institute Of Advanced Industrial Science And Technology | Illumination apparatus and method for obtaining illuminance with high uniformity |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111562714A (en) * | 2020-05-22 | 2020-08-21 | 复旦大学 | Multispectral modulation imaging device based on multi-wavelength LED light source |
| CN114136975A (en) * | 2021-11-04 | 2022-03-04 | 上海精密计量测试研究所 | Intelligent detection system and method for surface defects of microwave bare chip |
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| JP2017207329A (en) | 2017-11-24 |
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