CN107377280A - A kind of spray caesium device applied to anion source - Google Patents
A kind of spray caesium device applied to anion source Download PDFInfo
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- CN107377280A CN107377280A CN201710662526.XA CN201710662526A CN107377280A CN 107377280 A CN107377280 A CN 107377280A CN 201710662526 A CN201710662526 A CN 201710662526A CN 107377280 A CN107377280 A CN 107377280A
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- caesium
- unit
- spray
- pipe
- storage
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/165—Electrospray ionisation
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a kind of spray caesium device applied to anion source, including spray caesium apparatus main body unit, spray caesium apparatus main body unit includes：Caesium unit, the first conduction unit, the second conduction unit are stored up, storage caesium unit is arranged at the downside of the first conduction unit, storage and evaporation for caesium；First conduction unit and the second conduction unit are used to realize the transmission of caesium；Spray caesium device also includes smashing unit；Smashing unit includes the first CF flanges, the first expansion corrugated pipe, drive rod, smashes head and support frame；Drive rod constantly moves in the presence of external force along close to the direction of ampoule bottle, causes the first expansion corrugated pipe constantly to compress in same direction so that smashes head and constantly extrudes and finally break close to ampoule bottle and discharges caesium.Unit is smashed due to being additionally arranged at storage caesium ttom of pipe end in the present invention, coordinates drive to smash head using drive rod and the first expansion corrugated pipe and smashes ampoule bottle, storage caesium pipe will not deform upon, and can reuse, caesium leakage reduces.
Description
Technical field
The invention belongs to anion source field, more particularly, to a kind of spray caesium device applied to anion source.
Background technology
Existing spray caesium device, generally deforms storage caesium pipe using external force, and indirect extrusion fills the ampoule bottle of caesium, makes it broken
Split and discharge caesium.There is defect to be for this kind of device：Mode is smashed with external force extruding storage caesium pipe, because storage caesium pipe deforms,
Cause it to reuse to cause to waste；Storage caesium pipe need satisfaction to be easy to deformation, its material will have with caesium reaction, compared with
High plasticity and the storage smaller feature of caesium thickness of pipe wall, this can cause difficulty of processing height；Because storage caesium thickness of pipe wall is smaller and needs to extrude
Deformation, increase the risk of its damaged caesium leakage.
The content of the invention
The defects of for prior art, it is an object of the invention to a kind of spray caesium device applied to anion source, it is intended to
Solve ampoule bottle in the prior art and smash mode unreasonable caused storage caesium pipe not reproducible utilization, difficulty of processing height and caesium leakage
Problem.
The invention provides a kind of spray caesium device applied to anion source, including spray caesium apparatus main body unit, spray caesium dress
Putting main unit includes：Caesium unit, the first conduction unit, the second conduction unit are stored up, storage caesium unit is arranged at the first conduction unit
Downside, storage and evaporation for caesium；First conduction unit and the second conduction unit are joined directly together, and are used to realize the biography of caesium
It is defeated；Spray caesium device also includes：Be arranged on storage caesium unit bottom smashes unit；Unit is smashed to discharge for smashing ampoule bottle
Caesium.
Further, smashing unit includes：First CF flanges, the first expansion corrugated pipe, drive rod, smash head and support
Frame；First CF flanges are disposed in proximity to store up caesium bottom of the tube position, for realizing that the sealing of storage caesium pipe and the first expansion corrugated pipe connects
Connect, one end of the first expansion corrugated pipe is connected with storage caesium pipe, and smashing head for drive rod drive smashes ampoule bottle, the first flexible ripple
The other end of line pipe is fixedly connected with drive rod, and for coordinating drive rod to move, sensing is provided with outside the first expansion corrugated pipe
Heating coil, for being heated to it, the first CF flange surfaces and the first expansion corrugated pipe end are provided with TEMP
Device, for carrying out temperature detection to the first expansion corrugated pipe, one end of drive rod is fixedly connected with head is smashed, drive rod it is another
End is connected with support frame, and smashing head for drive rod drive smashes ampoule bottle, and support frame is arranged on the first CF flanges, for protecting
Card drive rod moves along fixed-direction, the end that head is arranged at drive rod is smashed, for extruding and smashing the ampoule bottle；Work
When, drive rod constantly moves in the presence of external force along the direction close to ampoule bottle, drives the first expansion corrugated pipe along phase Tongfang
To continuous compression so that smash head and constantly extrude and finally break close to ampoule bottle and discharge caesium.
Further, storage caesium unit includes：Ampoule bottle, storage caesium pipe and the 2nd CF flanges, ampoule bottle are arranged on the storage
The bottom of caesium pipe, for storing caesium, storage caesium pipe is lower thin and upper thick structure, connection is matched with the first conduction unit, for ampoule
The caesium discharged during bottle breakage is stored and evaporated, and the 2nd CF flanges are used to connect storage caesium pipe and the first conduction unit, and work as
Caesium in ampoule bottle runs out of easy to disassemble when need to change；First conduction unit includes：Blind plate, the first all-metal pipe valve, first
Conducting tube and the second all-metal pipe valve, blind plate are connected by the first all-metal pipe valve and the first conducting tube, and blind plate is used to initially take out
Vacuum spare interface, the first all-metal pipe valve are used to control the break-make vacuumized, and the first conducting tube is carefully tied for middle thick and both sides
Structure, the first conducting tube and the second conduction unit are connected by the second all-metal pipe valve, and the second all-metal pipe valve is used to control caesium to steam
The break-make of hair；Second conduction unit includes：3rd CF flanges, the second conducting tube and nozzle, the 3rd CF flanges are arranged at the second biography
The centre position of conduit, for realizing the connection of spray caesium device and anion chamber, one end of the second conducting tube and the first conduction
Unit connects, and the other end of the second conducting tube is passed through anion chamber, and for realizing the transmission of caesium, the nozzle is arranged at described
The end of second conducting tube, the ejiction opening as caesium steam.
Further, spray caesium device also includes：Vacuum unit, it is arranged at blind plate, for spraying caesium apparatus main body
Unit carries out initial evacuation.
Further, vacuum unit includes：Vavuum pump, vacuum measuring gauge and connecting conduit；Vavuum pump passes through connection
Conduit and the connection of the first conduction unit, for the initial evacuation to spraying caesium apparatus main body unit, vacuum measuring gauge is used to measure
The vacuum of pipeline is to coordinate the vavuum pump to be extracted into target vacuum；During work, open successively the first all-metal pipe valve and
Vavuum pump is vacuumized, and after reaching target vacuum, is closed the first all-metal pipe valve and vavuum pump successively, is completed to whole
The initial evacuation of individual spray caesium device.
Further, spray caesium device also includes：Mobile platform unit and anion chamber unit；Anion chamber unit
Including：Second expansion corrugated pipe, the 4th CF flanges, anion chamber and grid board；One end of second expansion corrugated pipe and spray caesium
Apparatus main body unit is connected, and the other end of the second expansion corrugated pipe is connected by the 4th CF flanges with anion chamber, anion
Chamber is used for the undertaking to particles such as caesiums, and the grid board is arranged at the anion chamber away from the nozzle side, for caesium
Heavy cover；The mobile platform unit is used to coordinate the second expansion corrugated pipe movement spray caesium apparatus main body unit, together
When also to it is described spray caesium apparatus main body unit play a supporting role；When the mobile platform unit drives the spray caesium apparatus main body
When unit moves, second expansion corrugated pipe is stretched or contracted in same direction, so as to change the nozzle and the grid board
Distance.
Further, mobile platform unit includes：First adiabatic link, the second adiabatic link, movable block, fixation
Platform, motor, mobile bar and graduated scale；The first adiabatic link and the second adiabatic link are respectively arranged at institute
The both sides of the first conducting tube are stated, for being connected to the support for spraying caesium apparatus main body unit, the movable block is arranged at the fixation
One end above platform, the spray caesium apparatus main body unit is driven during for moving, the motor is arranged on the fixed station
Side is relative to the other end of the moving mass, and for driving the mobile bar to move, described mobile bar one end is fixed on the fortune
On motion block, the other end is connected with the motor, and for driving the moving mass to move, the graduated scale is arranged at described solid
Determine platform close to the position of the mobile bar, and keep it parallel with the mobile bar, for measure mobile bar movement away from
From.
By the contemplated above technical scheme of the present invention, hit compared with prior art by being additionally arranged at storage caesium ttom of pipe end
Broken unit, coordinate drive to smash head using drive rod and the first expansion corrugated pipe and smash ampoule bottle, because storage caesium pipe is without deformation,
The repeatable utilization of storage caesium pipe, the beneficial effect that difficulty of processing reduces and caesium leakage reduces can be obtained.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the spray caesium device provided in an embodiment of the present invention applied to anion source；
Fig. 2 is the structural representation that unit is smashed in the spray caesium device provided in an embodiment of the present invention applied to anion source
Figure；
Fig. 3 is the structural representation of the spray caesium apparatus main body unit provided in an embodiment of the present invention applied to anion source；
Fig. 4 is the structural representation of the spray caesium device vacuum unit provided in an embodiment of the present invention applied to anion source
Figure；
Fig. 5 is mobile platform cell schematics in the spray caesium device provided in an embodiment of the present invention applied to anion source；
Fig. 6 is that anion chamber unit is illustrated in the spray caesium device provided in an embodiment of the present invention applied to anion source
Figure.
100 is smash unit in figure, and 101 be the first CF flanges, and 102 be to smash head, and 103 be the first expansion corrugated pipe, and 104
It is support frame for drive rod, 105,200 be spray caesium apparatus main body unit, and 210 be storage caesium unit, and 211 be storage caesium pipe, and 212 be peace
Small jar bottle, 213 be the 2nd CF flanges, and 220 be the first conduction unit, and 221 be blind plate, and 222 be the first all-metal pipe valve, and 223 be
One conducting tube, 224 be the second all-metal pipe valve, and 230 be the second conduction unit, and 231 be the 3rd CF flanges, and 232 be the second conduction
Pipe, 233 be nozzle, and 300 be vacuum unit, and 301 be vavuum pump, and 302 be vacuum measuring gauge, and 303 be connecting conduit, and 400 are
Mobile unit, 401 be the first adiabatic link, and 402 be the second adiabatic link, and 403 be movable block, and 404 be fixed station, 405
It is mobile bar for motor, 406,407 be graduated scale, and 500 be anion chamber unit, and 501 be the second expansion corrugated pipe,
502 be the 4th CF flanges, and 503 be anion chamber, and 504 be grid board.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Fig. 1 shows that the embodiment of the present invention provides a kind of spray caesium apparatus structure applied to anion source.The present invention is implemented
A kind of spray caesium apparatus structure applied to anion source that example provides, including smash unit 100, spray caesium apparatus main body unit 200.
Unit 100 is smashed positioned at the bottom of storage caesium pipe 211, caesium is discharged for smashing ampoule bottle 212.
Fig. 2 shows the structure provided in an embodiment of the present invention for smashing unit 100；For convenience of description, illustrate only with
The related part of the embodiment of the present invention, details are as follows：
Smashing unit 100 includes：First CF flanges 201, the first expansion corrugated pipe 103, drive rod 104, smash first 102 and
Support frame 105, the first CF flanges 101 are disposed in proximity to store up the bottom position of caesium pipe 211, for realizing that storage caesium pipe 211 and first is stretched
The sealed connection of contracting bellows 103, one end of the first expansion corrugated pipe 103 are connected with storage caesium pipe 211, the first expansion corrugated pipe
103 other end is fixedly connected with drive rod 104, for coordinating drive rod 104 to move, one end of drive rod 104 and smashes head
102 connections, the other end of drive rod 104 are connected with support frame 105, and smashing first 102 for the drive of drive rod 104 smashes ampoule bottle
212, support frame 105 is arranged on the first CF flanges 101, for ensureing that drive rod 104 moves along fixed-direction, smashes first 102
The end of drive rod 104 is arranged at, for smashing ampoule bottle 212.
Smash unit 100 in use, drive rod 104 in the presence of external force along the direction not offset close to ampoule bottle 212
It is dynamic, drive the constantly compression in same direction of the first expansion corrugated pipe 103 so that smash first 102 constantly close to ampoule bottles 212 and most
Break eventually and discharge caesium, such a mode that smashes is relatively simple, makes to repeat due to being not required to extruding storage caesium pipe deformation, therefore storing up caesium pipe
Use, while also reduce the difficulty of processing of storage caesium pipe and the possibility of caesium leakage.
As one embodiment of the present of invention, aciculiform or zigzag can be used by smashing first 102, in order to be easier to smash
The ampoule bottle 212 of glass material；Drive rod can be that manpower drives, and ampoule bottle is glass material, and manpower driving is enough to smash, taken
With low.
In embodiments of the present invention, load coil is provided with outside the first expansion corrugated pipe 103, for being carried out to it
Heating, the surface of the first CF flanges 101 and the end of the first expansion corrugated pipe 103 are provided with temperature sensor, for being stretched to first
Contracting bellows 103 carries out temperature detection.
Fig. 3 shows the structure of spray caesium apparatus main body unit 200 provided in an embodiment of the present invention, for convenience of description, only
The part related to the embodiment of the present invention is shown, details are as follows：
Spray caesium apparatus main body unit 200 includes：Store up caesium unit 210, the first conduction unit 220, the second conduction unit 230.
Storage caesium unit 210 is arranged at the downside of the first conduction unit 220, for the storage and evaporation of caesium, the first conduction unit 220 and the
Two conduction units 230 are joined directly together, the transmission for caesium.Storage caesium unit 210 includes：Ampoule bottle 212, storage caesium pipe 211 and second
CF flanges 213, ampoule bottle 212 are arranged on the bottom of storage caesium pipe 211, and for the storage of caesium, storage caesium pipe 211 is lower thin and upper thick knot
Structure, connection is matched with the first conduction unit 220, for the evaporation of caesium, the 2nd CF flanges 213 are used to connecting storage caesium pipe 212 and the
One conduction unit 220.First conduction unit 220 includes：Blind plate 221, the first all-metal pipe valve 222, the first conducting tube 223 and
Two all-metal pipe valves 224, blind plate 221 are connected by the first all-metal pipe valve 222 with the first conducting tube 223, the first conducting tube 223
Connected for middle thick and both sides fine texture, the first conducting tube 223 and the second conduction unit 220 by the second all-metal pipe valve 224,
Transmission for caesium.Second conduction unit 230 includes：3rd CF flanges 231, the second conducting tube 232 and nozzle 233, the 3rd CF
Flange 231 is arranged at the end of remote nozzle 233 of the second conducting tube 232, for being tightly connected with the first expansion corrugated pipe 301, the
One end of two conducting tubes 232 is connected with the first conduction unit 220, and the other end of the second conducting tube 220 is passed through anion chamber
303, nozzle 233 is arranged at the end of the second conducting tube 232, the ejiction opening as caesium steam.
In embodiments of the present invention, caesium unit 210, the first conduction unit 220 and second conduction unit 230 these three lists are stored up
First surface is provided with resistance wire and temperature sensor, is respectively used to heating and temperature detection.
During work, by controlling storage caesium unit 210, the first conduction unit 220 and the three of the second conduction unit 230 respectively
Ohmic heating electric current, three is set to reach respective target temperature, to reach the target of caesium eruption speed.
In embodiments of the present invention, spray caesium device also includes：Vacuum unit 300, be arranged at blind plate 221, for pair
Spray caesium apparatus main body unit 200 and carry out initial evacuation.Fig. 4 shows vacuum unit 300 provided in an embodiment of the present invention
Structure；For convenience of description, the part related to the embodiment of the present invention is illustrate only, details are as follows：
Vacuum unit 300 includes：Vavuum pump 301, vacuum measuring gauge 302 and connecting conduit 303, vavuum pump 301 pass through
Connecting conduit 303 is connected with the first conduction unit 220, for being vacuumized to spray caesium apparatus main body unit 200, vacuum measuring gauge
302 are used to measure the vacuum of pipeline to coordinate vavuum pump 301 to complete pipeline initial evacuation.
In use, opening the first all-metal pipe valve 222, vavuum pump 301 starts to vacuumize, and vacuum measuring gauge 302 reaches mesh
When marking vacuum, the first all-metal pipe valve 222 and vavuum pump 301 are closed successively, and initial this completes spray caesium device is taken out
Vacuum.When taking out mouthful size due to such a mode and be much larger than the jet size vacuumized at nozzle 233, therefore reaching target vacuum
Between it is shorter, better.
In embodiments of the present invention, vavuum pump 301 can use dry pump, more convenient to be rapidly achieved required vacuum；
First all-metal pipe valve 222 can be manual corrugated stainless steel tubing valve, and on the one hand its sealing is preferable, and on the other hand it connects with caesium
Contact portion part does not enable pipe valve long-term use of with caesium reaction.
In embodiments of the present invention, spray caesium device also includes：Mobile platform unit 400 and anion chamber unit 500.
As shown in fig. 6, anion chamber unit 500 includes：Second expansion corrugated pipe 501, the 4th CF flanges 502, bear from
Sub-chamber 503 and grid board 504；One end of second expansion corrugated pipe 501 is connected with spray caesium apparatus main body unit 200, and second stretches
The other end of contracting bellows 501 is connected by the 4th CF flanges 502 with anion chamber 503；Anion chamber 503 is used for caesium
Deng the undertaking of particle, grid board 504 is arranged at anion chamber 503 away from the side of nozzle 233, and heavy for caesium covers.Mobile platform
Unit 400 is arranged on the downside of the first conduction unit 220, for coordinating the second expansion corrugated pipe 501 to spraying caesium apparatus main body unit
200 are moved, while also spray caesium apparatus main body unit 200 is played a supporting role.
In embodiments of the present invention, the heating of the second expansion corrugated pipe 501 is by being wrapped on the second conducting tube 232
Load coil is carried out, and temperature sensor is equipped with the 3rd CF flanges 231 and the 4th CF flanges 502, for being stretched to second
The temperature detection of contracting bellows 501.
As shown in figure 5, mobile platform unit 400 includes：First adiabatic link 401, the second adiabatic link 402, move
Motion block 403, fixed station 404, motor 405, mobile bar 406 and graduated scale 407, the first adiabatic link 401 and second are exhausted
Thermally coupled frame 402 is arranged at the both sides of the first conducting tube 223, mobile for being connected to the support for spraying caesium apparatus main body unit 200
Block 403 is arranged at described top one end of fixed station 404, and spray caesium apparatus main body unit 200, motor are driven during for moving
405 are arranged at the other end of the top of fixed station 404 relative to moving mass 403, for driving mobile bar 406 to move, mobile bar 406
One end is fixed on moving mass 403, and the other end is connected with motor 405, and graduated scale 407 is arranged at fixed station 404 close to shifting
The position of lever 406, and keep it parallel with mobile bar 406, for measuring the distance of the movement of mobile bar 406, so as to survey indirectly
Measure the distance of the movement of nozzle 233.
Mobile platform unit 400 coordinates the second expansion corrugated pipe 501 to realize the adjustable of the distance of nozzle 233.It is specific to drive
Dynamic motor 405 drives movable block 403 to move by mobile bar 406, and movable block 403 passes through the first adiabatic link 401 and second
Adiabatic link 402 drives spray caesium apparatus main body unit 200 to be moved to equidirectional, and this causes the edge of the second expansion corrugated pipe 501
Equidirectional stretches, so as to reach nozzle 233 and grid board 504 apart from adjustable purpose.The distance of nozzle 233 can so be obtained
The relation of the parameters such as negative ion concentration is drawn with grid board 504, the running parameter of another dimension is provided for anion operation.
As one embodiment of the present of invention, anion chamber 503 can use square, and square build is more convenient to be fixed
Arranged with detection means；Grid board 504 can use molybdenum plate, and molybdenum is low work function material, is advantageous to the extraction of anion；Scale
Chi 407 can use slide measure, and its precision meets to require, cost performance is higher；Temperature sensor can use K-type thermoelectricity occasionally
PT100 RTDs, both are satisfied by measurement request；
The outstanding advantages of the present invention are to coordinate drive to smash head by using drive rod and the first expansion corrugated pipe to smash peace
Small jar bottle, storage caesium pipe deformed damaged is avoided, reduce its repeatable utilization, difficulty of processing reduction and caesium leakage.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (7)
1. a kind of spray caesium device applied to anion source, including spray caesium apparatus main body unit (200), the spray caesium apparatus main body
Unit (200) includes：Store up caesium unit (210), the first conduction unit (220), the second conduction unit (230), the storage caesium unit
(210) downside of first conduction unit (220), storage and evaporation for caesium are arranged at；First conduction unit
(220) it is joined directly together with the second conduction unit (230), is used to realize the transmission of caesium；Characterized in that, the spray caesium device is also
Including：Be arranged on storage caesium unit (210) bottom smashes unit (100)；The unit (100) that smashes is used to smash ampoule bottle
(212) caesium is discharged.
2. spray caesium device as claimed in claim 1, it is characterised in that the unit (100) that smashes includes：First CF flanges
(101), the first expansion corrugated pipe (103), drive rod (104), smash head (102) and support frame (105)；
The first CF flanges (101) are disposed in proximity to store up caesium pipe (211) bottom position, for realizing the storage caesium pipe (211)
With the sealed connection of first expansion corrugated pipe (103), one end of first expansion corrugated pipe (103) and the storage caesium pipe
(211) connect, for the drive rod (104) drive described in smash head (102) and smash the ampoule bottle (212), described first
The other end of expansion corrugated pipe (103) is fixedly connected with the drive rod (104), for coordinating the drive rod (104) to move,
One end of the drive rod (104) is fixedly connected with the head (102) that smashes, the other end of the drive rod (104) with it is described
Support frame (105) is connected, and the ampoule bottle (212), institute are smashed for smashing head (102) described in the drive rod (104) drive
Support frame (105) is stated to be arranged on the first CF flanges (101), for ensureing that the drive rod (104) moves along fixed-direction, institute
State and smash the end that head (102) is arranged at the drive rod (104), for extruding and smashing the ampoule bottle (212)；
During work, the drive rod (104) is constantly moved in the presence of external force along the direction close to the ampoule bottle (212),
Drive first expansion corrugated pipe (103) constantly compression in same direction so that described to smash head (102) constantly close to described
Ampoule bottle (212), which is extruded and finally broken, discharges caesium.
3. the spray caesium device as described in any one of claim 1 or 2, it is characterised in that the storage caesium unit (210) includes：Peace
Small jar bottle (212), storage caesium pipe (211) and the 2nd CF flanges (213), the ampoule bottle (212) are arranged on the storage caesium pipe (211)
Bottom, for storing caesium, the storage caesium pipe (211) is lower thin and upper thick structure, with the first conduction unit (220) company of matching
Connect, the caesium discharged during for being ruptured to the ampoule bottle (212) is stored and evaporated, and the 2nd CF flanges (213) are used
In the connection storage caesium pipe (212) and first conduction unit (220), and the caesium in the ampoule bottle (212) runs out of
It is easy to disassemble when need to change；
First conduction unit (220) includes：Blind plate (221), the first all-metal pipe valve (222), the first conducting tube (223) and
Second all-metal pipe valve (224), the blind plate (221) pass through the first all-metal pipe valve (222) and first conducting tube
(223) connect, the blind plate (221) is used for initial evacuation spare interface, and the first all-metal pipe valve (222) is used to control
The break-make vacuumized, first conducting tube (223) are middle thick and both sides fine texture, first conducting tube (223) and institute
State the second conduction unit (230) to connect by the second all-metal pipe valve (222), the second all-metal pipe valve (224) is used to control
The break-make of caesium evaporation processed；
Second conduction unit (230) includes：3rd CF flanges (231), the second conducting tube (232) and nozzle (233), it is described
3rd CF flanges (231) are arranged at the centre position of second conducting tube (232), for realizing spray caesium device and anion chamber
The connection of room, one end of second conducting tube (232) are connected with first conduction unit (220), second conducting tube
(232) the other end is passed through anion chamber, and for realizing the transmission of caesium, the nozzle (233) is arranged at second conduction
Manage the end of (232), the ejiction opening as caesium steam.
4. the spray caesium device as described in claim any one of 1-3, it is characterised in that the spray caesium device also includes：Vacuumize
Unit (300), the blind plate (211) place is arranged on, for carrying out initial take out very to the spray caesium apparatus main body unit (200)
It is empty.
5. spray caesium device as claimed in claim 4, it is characterised in that the vacuum unit (300) includes：Vavuum pump
(301), vacuum measuring gauge (302) and connecting conduit (303)；
The vavuum pump (301) is connected by the connecting conduit (303) and first conduction unit (220), for spray
The initial evacuation of caesium apparatus main body unit (200), the vacuum measuring gauge (302) are used to measure the vacuum of pipeline to coordinate
The vavuum pump (301) is extracted into target vacuum；
During work, the first all-metal pipe valve (222) is opened successively and the vavuum pump (301) is vacuumized, reaches mesh
After marking vacuum, the first all-metal pipe valve (222) and the vavuum pump (301) are closed successively, are completed to whole spray caesium dress
The initial evacuation put.
6. the spray caesium device as described in claim any one of 1-5, it is characterised in that the spray caesium device also includes：It is mobile flat
Platform unit (400) and anion chamber unit (500)；
The anion chamber unit (500) includes：Second expansion corrugated pipe (501), the 4th CF flanges (502), anion chamber
Room (503) and grid board (504)；One end of second expansion corrugated pipe (501) and the spray caesium apparatus main body unit (200)
It is connected, the other end of second expansion corrugated pipe (501) passes through the 4th CF flanges (502) and the anion chamber
(503) it is connected, the anion chamber (503) is used for the undertaking to particles such as caesiums, and the grid board (504) is arranged at described negative
Away from the nozzle (233) side, heavy for caesium covers ion chamber (503)；
The mobile platform unit (400) is used to coordinate the mobile spray caesium apparatus main body of second expansion corrugated pipe (501)
Unit (200), while also the spray caesium apparatus main body unit (200) is played a supporting role；
When the mobile platform unit (400) drives the spray caesium apparatus main body unit (200) mobile, the described second flexible ripple
Line pipe (501) is stretched or contracted in same direction, so as to change the distance of the nozzle (233) and the grid board (504).
7. spray caesium device as claimed in claim 6, it is characterised in that the mobile platform unit (400) includes：First is adiabatic
Link (401), the second adiabatic link (402), movable block (403), fixed station (404), motor (405), mobile bar
And graduated scale (407) (406)；
The first adiabatic link (401) and the second adiabatic link (402) are respectively arranged at first conducting tube
(223) both sides, connected for the support to the spray caesium apparatus main body unit (200), the movable block (403) is arranged at institute
One end above fixed station (404) being stated, driving the spray caesium apparatus main body unit (200), the motor during for moving
(405) it is arranged at relative to the other end of the moving mass (403) above the fixed station (404), for driving the movement
Bar (406) is moved, and described mobile bar (406) one end is fixed on the moving mass (403), the other end and the motor
(405) it is connected, for driving the moving mass (403) to move, the graduated scale (407) is arranged at the fixed station (404) and leaned on
The position of the nearly mobile bar (406), and keep it parallel with the mobile bar (406), for measuring the mobile bar (406)
Mobile distance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710662526.XA CN107377280B (en) | 2017-08-04 | 2017-08-04 | Be applied to negative ion source spout cesium device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| GB798400A (en) * | 1955-07-02 | 1958-07-23 | Csf | Improvements in or relating to photosensitive storage tube arrangements |
| JPH05275039A (en) * | 1992-03-25 | 1993-10-22 | Hitachi Ltd | Cesium liquid metal source, operation method and handing method thereof, secondary ion mass analyzing device using cesium liquid metal ion source, and focusing ion beam device |
| US20040202779A1 (en) * | 2001-05-23 | 2004-10-14 | Shiffler Donald A. | Method of making a field emission cold cathode |
| CN1699058A (en) * | 2004-05-21 | 2005-11-23 | 株式会社半导体能源研究所 | Manufacturing apparatus of semiconductor device and pattern-forming method |
| CN1916622A (en) * | 2005-08-19 | 2007-02-21 | 北京大学 | Mass spectrum equipment of accelerator, and method for measuring mass spectrum 14C of accelerator |
| CN207343062U (en) * | 2017-08-04 | 2018-05-11 | 华中科技大学 | A kind of spray caesium device applied to anion source |
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2017
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB798400A (en) * | 1955-07-02 | 1958-07-23 | Csf | Improvements in or relating to photosensitive storage tube arrangements |
| JPH05275039A (en) * | 1992-03-25 | 1993-10-22 | Hitachi Ltd | Cesium liquid metal source, operation method and handing method thereof, secondary ion mass analyzing device using cesium liquid metal ion source, and focusing ion beam device |
| US20040202779A1 (en) * | 2001-05-23 | 2004-10-14 | Shiffler Donald A. | Method of making a field emission cold cathode |
| CN1699058A (en) * | 2004-05-21 | 2005-11-23 | 株式会社半导体能源研究所 | Manufacturing apparatus of semiconductor device and pattern-forming method |
| CN1916622A (en) * | 2005-08-19 | 2007-02-21 | 北京大学 | Mass spectrum equipment of accelerator, and method for measuring mass spectrum 14C of accelerator |
| CN207343062U (en) * | 2017-08-04 | 2018-05-11 | 华中科技大学 | A kind of spray caesium device applied to anion source |
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