CN107362661B - A kind of gas cleaning plant and its application - Google Patents
A kind of gas cleaning plant and its application Download PDFInfo
- Publication number
- CN107362661B CN107362661B CN201710827383.3A CN201710827383A CN107362661B CN 107362661 B CN107362661 B CN 107362661B CN 201710827383 A CN201710827383 A CN 201710827383A CN 107362661 B CN107362661 B CN 107362661B
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- gas
- room
- deoxidizing
- deoxidation
- deoxidizing purification
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/261—Drying gases or vapours by adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/28—Selection of materials for use as drying agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/30—Controlling by gas-analysis apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/75—Multi-step processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/81—Solid phase processes
- B01D53/82—Solid phase processes with stationary reactants
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/104—Oxygen
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Gas Separation By Absorption (AREA)
Abstract
The invention discloses a kind of gas cleaning plant and its applications, and including dehumidifying clean room, the first deoxidizing purification room, the second deoxidizing purification room and the third deoxidizing purification room connected by placed in series, the entrance for the clean room that dehumidifies and the gas cylinder of protective gas are connected；Dehumidifying is filled with silica gel dehumidizer inside clean room, first deoxidizing purification chamber interior loads one of copper simple substance or acid bronze alloy and is used as deoxidation purificant, second deoxidizing purification chamber interior loads one of molybdenum simple substance or molybdenum-base alloy and is used as deoxidation purificant, and third deoxidizing purification chamber interior loads one of titanium simple substance, titanium sponge or titanium-base alloy and is used as deoxidation purificant；First deoxidizing purification room, the second deoxidizing purification room and third deoxidizing purification room are respectively equipped with heating unit.The present invention can in gas vapor and oxygen carry out adsorbing and removing, can satisfy the requirements in experiment and production for atmosphere, and have the characteristics that easy to operate, purification speed fastly, it is cleanser long service life, at low cost.
Description
Technical field
The present invention relates to a kind of gas cleaning plant and its applications, belong to chemical reaction purification gas technical field.
Background technique
Protect gas preparation aspect, particularly in super large-scale integration, laser material, optical fiber and aerospace material
The boat such as material domain, it is desirable that production process carries out in super-clean environment system, such as semiconductor fabrication process is required the oxygen in gas
It is reduced to 10-6Ppm or even 10-15~10-23Ppm, this requires use suitable deoxidier by oxygen removal to reach requirement.
Therefore, in the process of producing product of factory or in the experimentation in laboratory, more process needs in gas
It just can be carried out after atmosphere protection.The measurement standard of protective atmosphere mainly includes the humidity of atmosphere and the oxygen content of atmosphere.For example,
In the production process of steel, while the presence of oxygen element reduces the hot-short performance of steel, the surface of molten steel is significantly reduced
Power.Also oxygen content has been turned out to have a significant impact for the quality of steel product.For another example, in the production process of electronic product, gas
It's the problems such as conference causes access, electric leakage, breakdown and material aging pasts body humidity.Therefore, the humidity and oxygen content pair of atmosphere are controlled
In the production important in inhibiting of various products.And so far, this gas cleaning plant is also fewer.
A kind of depth device for deoxidizing and its application, gas are disclosed in the Chinese patent document of Publication No. CN104694705A
Body reaches deoxidation purpose by three kinds of copper, magnesium, titanium deoxidiers after heating devices heat to certain temperature, can be under normal pressure
Deoxidation treatment is carried out, precision can achieve 10-21ppm.However, this device not can control the humidity of gas, can not realize
Gas is contacted with different deoxidiers at different temperatures, therefore also just affects the deoxidation effectiveness and deoxidation matter of this device
Amount.In addition, presence of the device due to magnesium deoxidier, cannot complete nitrogen N2Depth deoxidation work.
It is net that a kind of industrial production sour gas filtering is disclosed in the Chinese patent document of Publication No. CN205700091U
Makeup is set, and using active carbon filtering in such a way that lye sprinkling deacidification combines, improves the efficiency that sour gas crosses filter, and
It, can be with the discharge of intelligent control Essence using pH after electric control drainage system.Purification efficiency with higher.But this
Patent can only purify sour gas, cannot effectively handle neutral or alkaline gas.
In conclusion the smaller scope of application of existing gas purification, device for deoxidizing, precision and efficiency are lower, and can not
Humidity and oxygen content after real-time monitoring gas purification.However, being protected for accurate experimental facilities for difference in equipment is entered
The comprehensive decontamination of gas is very necessary.
Summary of the invention
Technical problem solved by the present invention is low for existing gas purifying equipment purification efficiency, the gas scope of application is small,
It is difficult to remove gas internal water, and the problems such as without the humidity and partial pressure of oxygen of real-time watch device outlet, provides a kind of purification
The method of gas, the preparation for low oxygen content protective gas in factory and laboratory.
The present invention adopts the following technical scheme that realization:
A kind of gas cleaning plant, including connected by placed in series dehumidifying clean room 2, the first deoxidizing purification room 31,
Second deoxidizing purification room 32 and third deoxidizing purification room 33, the entrance of the dehumidifying clean room 2 and the gas cylinder 1 of protective gas connect
It connects；
It is filled with silica gel dehumidizer inside the dehumidifying clean room 2, loads copper list inside first deoxidizing purification room 31
One of matter or acid bronze alloy are used as deoxidation purificant, and molybdenum simple substance is loaded inside second deoxidizing purification room 32 or molybdenum base is closed
One of gold is used as deoxidation purificant, loads titanium simple substance, titanium sponge or titanium-base alloy inside third deoxidizing purification room 33
One of be used as deoxidation purificant；
It is single that first deoxidizing purification room 31, the second deoxidizing purification room 32 and third deoxidizing purification room 33 are respectively equipped with heating
Member.
Further, the silica gel dehumidizer and deoxidation purificant account for the 50%- of corresponding clean room's internal volume respectively
80%.
Further, first deoxidizing purification room 31, the second deoxidizing purification room 32 and third deoxidizing purification room 33 are distinguished
It is arranged in three independent heating furnaces, respectively the deoxidation purificant of three deoxidizing purification chamber interiors is heated to aoxidizing accordingly
Temperature.
Further, three independent heating furnaces are respectively equipped with independent PID/feedback control thermometric instrument.
In a kind of gas cleaning plant of the invention, the outlet conduit of third deoxidizing purification room 33 contains equipped with oxygen
Measure probe header 5.
Further, hygrometer 6 is additionally provided on the outlet conduit of third deoxidizing purification room 33.
A kind of gas of gas cleaning plant of the invention for purifying is argon gas, in hydrogen, nitrogen, hydrogen sulfide gas
One or more mixed gas.
The invention also discloses a kind of applications of above-mentioned gas purification device, which is used for protective gas
Preparation, specifically comprise the following steps:
The first step configures initial gas, and one or more of argon gas, hydrogen, nitrogen, hydrogen sulfide are mixed into experiment institute
Protective gas is needed, and is packed into gas cylinder 1；
Configured protective gas is passed through the dehumidifying clean room 2 equipped with silica gel dehumidizer by second step, gas dry,
During gas passes through silica gel dehumidizer, the moisture in protective gas is removed, achievees the purpose that gas dry；
Third step, gas deoxidation open three groups of heating furnaces, and keeping three groups of indoor temperature of deoxidizing purification is the deoxidation of setting
Agent target deoxidation temperature, protective gas pass sequentially through copper simple substance or acid bronze alloy, the second deoxidation in the first deoxidizing purification room 31
Titanium simple substance, titanium sponge or the titanium-base alloy in molybdenum simple substance or molybdenum-base alloy, third deoxidizing purification room 33 in clean room 32, protection
Oxygen in gas can occur oxidation reaction with deoxidation purificant under the high temperature conditions and reach deoxidation purpose；
4th step measures oxygen content and humidity, the oxygen content test probe 5 and hygrometer 6 of opening device end, to purification
The oxygen content of protective gas and appropriateness measure afterwards, reach required value and can be passed through in required equipment and are tested.
Further, the gas flow for being passed through the gas cleaning plant is 100-300mL/min.
Further, the temperature range of first heating furnace 41 is 500-700 DEG C, the temperature of second heating furnace 42
Range is 350-550 DEG C, and the temperature of the third heating furnace 43 is 50-200 DEG C.
The invention has the following advantages:
1) gas purification is thorough, not only can control and detection gas inside oxygen content, while can also to gas into
Row drying reduces gas humidity, improves the depuration quality of gas.
2) deoxidizing capacity and deoxidation effectiveness are improved, the present invention is using three heating furnaces respectively to different deoxidizing purification rooms
Inner space heated, make the indoor deoxidier of each deoxidizing purification that can work under optimal environment, i.e.,
Deoxidizing capacity is improved, while also improving deoxidation effectiveness.
3) range for being applicable in depleted gas is expanded, the one or more of the gases such as argon gas, nitrogen, hydrogen, hydrogen sulfide are mixed
Closing gas can be purified in the apparatus, and purified gas oxygen content can be reduced to 10-26ATM。
4) cleanser can be recycled, and reduce the cost of gas purification.
From the above mentioned, the present invention can satisfy the requirements in experiment and production for atmosphere, and have behaviour
Make simple, purification speed is fast, cleanser long service life, it is at low cost the features such as.
Below in conjunction with the drawings and specific embodiments, the invention will be further described.
Detailed description of the invention
Fig. 1 is the attachment structure schematic diagram of the gas cleaning plant in embodiment.
Figure label: 1- gas cylinder, 2- dehumidifying clean room, the first deoxidizing purification of 31- room, the second deoxidizing purification of 32- room, 33-
Third deoxidizing purification room, the first heating furnace of 41-, the second heating furnace of 42-, 43- third heating furnace, 5- oxygen content test probe, 6-
Hygrometer.
Specific embodiment
Embodiment
Referring to Fig. 1, one of diagram gas cleaning plant is preferred embodiment of the invention, specifically includes gas cylinder 1, dehumidifying
Clean room 2, the first deoxidizing purification room 31, the second deoxidizing purification room 32, third deoxidizing purification room 33, the first heating furnace 41, second
Heating furnace 42, third heating furnace 43, oxygen content test probe 5 and hygrometer 6.Gas cylinder 1 and dehumidifying clean room 2, the first deoxidation are net
Change room 31, the second deoxidizing purification room 32, third deoxidizing purification room 33 by placed in series connection, respectively to the gas in gas cylinder into
Row dehumidifying and three times deoxidizing purification.
Gas cylinder 1 is connected on the input end pipeline for the clean room 2 that dehumidifies for storing gas to be clean, can be by independent one
The import of the gas cylinder and purification device of kind gas connects, and can also be connected in parallel the gas cylinder of several gas with various, realizes a variety of mixed
Close the purification of gas.
The interior cleanser loaded in clean room 2 that dehumidifies is silica gel, and main function is for absorbing through the moisture in gas.
Load the metallic deoxidizer for being easy to oxidation reaction respectively in three groups of deoxidizing purification rooms, wherein net in the first deoxidation
Changing the deoxidation purificant loaded in room 31 is one of copper simple substance or acid bronze alloy, is absorbed in air by the oxidation reaction of copper
Oxygen, the deoxidation purificant loaded in the second deoxidizing purification room 32 is one of molybdenum simple substance or molybdenum-base alloy, passes through molybdenum
Oxidation reaction absorbs the oxygen in air, the deoxidation purificant loaded in third deoxidizing purification room 33 be titanium simple substance, titanium sponge or
One of titanium-base alloy, under the oxidizing temperature of setting, three kinds of deoxidation purificants can be sloughed through the oxygen in gas, drop
Low gas oxygen content.
In order to guarantee that gas is purifying the indoor contacting efficiency by efficiency and with cleanser (dehumidizer), dehumidifying is net
Change the deoxidation purificant loaded in the silica gel dehumidizer loaded in room 2 and deoxidizing purification room and accounts for corresponding clean room's inner bulk respectively
Long-pending 50%-80%.
In order to guarantee the best deoxidation effect of deoxidation purificant, first heating furnace 41 of the present embodiment, the second heating furnace 42,
Heating of the third heating furnace 43 respectively as the first deoxidizing purification room 31, the second deoxidizing purification room 32, third deoxidizing purification room 33
Unit, the first deoxidizing purification room 31, the second deoxidizing purification room 32, third deoxidizing purification room 33 be separately positioned on three it is independent plus
In hot stove, three heating furnaces are controlled thermometric instrument control by independent PID/feedback respectively, and highest can be heated to 700 DEG C and keep
Constant temperature.
Oxygen content test probe 5 and hygrometer are respectively equipped on the pipeline that the outlet end of third deoxidizing purification room 33 connects
6, oxygen probe 7 can measure gas oxygen content of the gas after purification device, into experimental facilities, and hygrometer 10 can measure
Gas is after purification device, into the humidity of the gas of experimental facilities.
The gas cleaning plant of the present embodiment can be used for one in the inert gases such as purification of argon, hydrogen, nitrogen, hydrogen sulfide
Kind of gas or the mixed gas formed by a certain percentage, it is net that gas to be clean passes sequentially through dehumidifying clean room 2, the first deoxidation
Change room 31, the second deoxidizing purification room 32, third deoxidizing purification room 33, realizes the purification removing of vapor and oxygen in gas.
Therefore, the gas cleaning plant of the present embodiment can be used for the preparation in laboratory or the protective gas in production, specifically
Include the following steps:
The invention also discloses a kind of application methods of gas cleaning plant, include the following steps:
The first step configures initial gas, and one or more of argon gas, hydrogen, nitrogen, hydrogen sulfide are mixed into experiment institute
Protective gas is needed, and is packed into gas cylinder 1.
Configured protective gas is passed through the dehumidifying clean room 2 equipped with silica gel dehumidizer by second step, gas dry,
During gas passes through silica gel dehumidizer, the moisture in protective gas is removed, achievees the purpose that gas dry, the gas being passed through
Flow is 100-300mL/min, further preferably in 150mL/min.
Third step, gas deoxidation open three groups of heating furnaces, and keeping three groups of indoor temperature of deoxidizing purification is the deoxidation of setting
Agent target deoxidation temperature, protective gas pass sequentially through copper simple substance or acid bronze alloy, the second deoxidation in the first deoxidizing purification room 31
Titanium simple substance, titanium sponge or the titanium-base alloy in molybdenum simple substance or molybdenum-base alloy, third deoxidizing purification room 33 in clean room 32, protection
Oxygen in gas can occur oxidation reaction with deoxidation purificant under the high temperature conditions and reach deoxidation purpose.In this step, first
The temperature range of heating furnace 41 is controlled at 500-700 DEG C, and preferably 600 DEG C, the temperature range of the second heating furnace 42 is controlled in 350-
550 DEG C, preferably 450 DEG C, the temperature range of third heating furnace 43 are controlled at 50-200 DEG C, and preferably 100 DEG C.
4th step measures oxygen content and humidity, the oxygen content test probe 5 and hygrometer 6 of opening device end, to purification
The oxygen content of protective gas and appropriateness measure afterwards, reach required value and can be passed through in required equipment and are tested.
It is provided for the embodiments of the invention technical solution above to be described in detail, specific case used herein
The principle and embodiment of the embodiment of the present invention are expounded, the explanation of above embodiments is only applicable to help to understand this
The principle of inventive embodiments；At the same time, for those skilled in the art, according to an embodiment of the present invention, in specific embodiment party
There will be changes in formula and application range, and to sum up, the contents of this specification are not to be construed as limiting the invention.
Claims (8)
1. a kind of gas cleaning plant, it is characterised in that: including the dehumidifying clean room (2), first de- connected by placed in series
Oxygen clean room (31), the second deoxidizing purification room (32) and third deoxidizing purification room (33), it is described dehumidifying clean room (2) entrance with
The gas cylinder (1) of protective gas connects；
It is filled with silica gel dehumidizer inside the dehumidifying clean room (2), loads copper list inside first deoxidizing purification room (31)
One of matter or acid bronze alloy are used as deoxidation purificant, load molybdenum simple substance or molybdenum base inside second deoxidizing purification room (32)
One of alloy is used as deoxidation purificant, loads titanium simple substance, titanium sponge or titanium-based inside third deoxidizing purification room (33)
One of alloy is used as deoxidation purificant；
First deoxidizing purification room (31), the second deoxidizing purification room (32) and third deoxidizing purification room (33) are separately positioned on three
In a independent heating furnace, corresponding oxidizing temperature, institute are heated to the deoxidation purificant of three deoxidizing purification chamber interiors respectively
The first heating furnace (41) heating temperature range for stating the first deoxidizing purification room (31) is 500-700 DEG C, second deoxidizing purification
The second heating furnace (42) heating temperature range of room (32) is 350-550 DEG C, and the third of third deoxidizing purification room (33) adds
Hot stove (43) heating temperature is 50-200 DEG C.
2. a kind of gas cleaning plant according to claim 1, the silica gel dehumidizer and deoxidation purificant account for pair respectively
Answer the 50%-80% of clean room's internal volume.
3. a kind of gas cleaning plant according to claim 1, three independent heating furnaces are respectively equipped with independent
PID/feedback controls thermometric instrument.
4. a kind of gas cleaning plant according to any one of claim 1-3, third deoxidizing purification room (33)
Outlet conduit is equipped with oxygen content test probe (5).
5. a kind of gas cleaning plant according to claim 4, on the outlet conduit of third deoxidizing purification room (33)
It is additionally provided with hygrometer (6).
6. a kind of gas cleaning plant according to claim 1, the gas of purification is argon gas, hydrogen, nitrogen, stink damp
One of body or various mixed gases.
7. a kind of application of gas cleaning plant described in claim 5, it is characterised in that: the gas cleaning plant is for protecting
The preparation of gas, specifically comprises the following steps:
The first step configures initial gas, and one or more of argon gas, hydrogen, nitrogen, hydrogen sulfide are mixed into needed for experiment and protected
Gas is protected, and is packed into gas cylinder (1)；
Configured protective gas is passed through the dehumidifying clean room (2) equipped with silica gel dehumidizer, in gas by second step, gas dry
During body passes through silica gel dehumidizer, the moisture in protective gas is removed, achievees the purpose that gas dry；
Third step, gas deoxidation open three groups of heating furnaces, and keeping three groups of indoor temperature of deoxidizing purification is the deoxidier mesh of setting
Mark deoxidation temperature, it is net that protective gas passes sequentially through copper simple substance in the first deoxidizing purification room (31) or acid bronze alloy, the second deoxidation
Change titanium simple substance, titanium sponge or the titanium-base alloy in the molybdenum simple substance or molybdenum-base alloy, third deoxidizing purification room (33) in room (32), protects
Oxygen in shield gas can occur oxidation reaction with deoxidation purificant under the high temperature conditions and reach deoxidation purpose；
4th step measures oxygen content and humidity, the oxygen content test probe (5) and hygrometer (6) of opening device end, to purification
The oxygen content of protective gas and appropriateness measure afterwards, reach required value and can be passed through in required equipment and are tested.
8. a kind of application of gas cleaning plant according to claim 7, is passed through the gas flow of the gas cleaning plant
For 100-300mL/min.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710827383.3A CN107362661B (en) | 2017-09-14 | 2017-09-14 | A kind of gas cleaning plant and its application |
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| CN201710827383.3A CN107362661B (en) | 2017-09-14 | 2017-09-14 | A kind of gas cleaning plant and its application |
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| CN107362661A CN107362661A (en) | 2017-11-21 |
| CN107362661B true CN107362661B (en) | 2019-09-10 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110479069A (en) * | 2019-09-23 | 2019-11-22 | 重庆理工大学 | A kind of efficient exhuast gas desulfurization method of denitration and its system |
| CN112246078A (en) * | 2020-10-29 | 2021-01-22 | 南京国重新金属材料研究院有限公司 | Gas deoxidation device |
| CN113155252B (en) * | 2021-04-25 | 2022-09-30 | 上海海事大学 | Weighing system with deoxidization function and capable of achieving cyclic dehumidification simultaneously |
| CN115430283B (en) * | 2022-09-23 | 2023-03-28 | 全椒科利德电子材料有限公司 | Method for purifying nitrous oxide |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4441797A1 (en) * | 1994-11-24 | 1996-05-30 | Binker Materialschutz Gmbh | Removing oxygen@ from a circulating gas stream used in a disinfestation process |
| WO2003037484A1 (en) * | 2001-10-31 | 2003-05-08 | Matheson Tri-Gas, Inc. | Materials and methods for the purification of inert, nonreactive, and reactive gases |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1031746C (en) * | 1993-12-24 | 1996-05-08 | 华东理工大学 | Preparation of effective Mo-family deoxidiser |
| CN104694705B (en) * | 2015-02-06 | 2016-08-31 | 中南大学 | A kind of degree of depth device for deoxidizing and application thereof |
-
2017
- 2017-09-14 CN CN201710827383.3A patent/CN107362661B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4441797A1 (en) * | 1994-11-24 | 1996-05-30 | Binker Materialschutz Gmbh | Removing oxygen@ from a circulating gas stream used in a disinfestation process |
| WO2003037484A1 (en) * | 2001-10-31 | 2003-05-08 | Matheson Tri-Gas, Inc. | Materials and methods for the purification of inert, nonreactive, and reactive gases |
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