CN107357132A - A kind of nano marking press position-limit mechanism - Google Patents
A kind of nano marking press position-limit mechanism Download PDFInfo
- Publication number
- CN107357132A CN107357132A CN201710755747.1A CN201710755747A CN107357132A CN 107357132 A CN107357132 A CN 107357132A CN 201710755747 A CN201710755747 A CN 201710755747A CN 107357132 A CN107357132 A CN 107357132A
- Authority
- CN
- China
- Prior art keywords
- opening
- limiting
- platform
- limit mechanism
- marking press
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Shaping Metal By Deep-Drawing, Or The Like (AREA)
- Press Drives And Press Lines (AREA)
Abstract
The invention discloses a kind of nano marking press position-limit mechanism, including support platform, lower flattening bench, model pressure head and hydraulic lifting cylinder, limiting platform is fixedly installed in the support platform, the limiting platform is hollow-core construction, the first horizontal opening and the second opening of longitudinal direction are respectively arranged with the limiting platform, telescope motor is provided with the limiting platform, the telescope motor possesses four telescopic shafts, the both ends of first opening and the second opening are provided with limiting plate, four limiting plates are connected on four telescopic shafts by connection strap through the first opening and the second opening.The spacing fixation that the present invention can be refined to the position of the product to be imprinted in support platform, so as to greatly improve position precision of the product in support platform, therefore the position precision of impressing is greatly improved, the impressing quality of product is improved and ensured.
Description
Technical field
The invention belongs to nanometer embossing field, and in particular to a kind of nano marking press position-limit mechanism.
Background technology
Existing nano marking press mainly carries out imprinting moulding by model pressure head to product, but due to the rule of product
Lattice and not of uniform size, product, which is positioned in support platform, is, position has certain error, so results in model pressure head and production
There is error in the contact position of product, so that impressing is ineffective, product quality is poor.
The content of the invention
Goal of the invention：In order to overcome the deficiencies in the prior art, there is provided one kind being capable of automatic and accurateization adjustment product
The nano marking press position-limit mechanism of position.
Technical scheme：To achieve the above object, the present invention provides a kind of nano marking press position-limit mechanism, including support is put down
Platform, lower flattening bench, model pressure head and hydraulic lifting cylinder, limiting platform is fixedly installed in the support platform, it is described spacing flat
Platform is hollow-core construction, and the first horizontal opening and the second opening of longitudinal direction are respectively arranged with the limiting platform, described spacing
Telescope motor is provided with platform, the telescope motor possesses four telescopic shafts, the both ends of first opening and the second opening
Limiting plate is provided with, four limiting plates are connected to four and stretched by connection strap through the first opening and the second opening
On contracting axle.
Further, the length of first opening and the second opening is respectively equal to the length and width of limiting platform, this
Sample causes the scope of activities of telescopic shaft to reach maximization.
Further, the overlapping region of first opening and the second opening is located at the center of limiting platform.
Further, the connection strap is connected to the center of limiting plate bottom.
Further, the model pressure head is located at the center of lower flattening bench lower end.
Beneficial effect：The present invention compared with prior art, by the location parameter of four telescopic shafts in telescope motor
Set respectively, the position of four limiting plates can be adjusted, enabling the position of the product to be imprinted in support platform is entered
The spacing fixation of row precision, so as to greatly improve position precision of the product in support platform, therefore is greatly improved
The position precision of impressing, the impressing quality of product are improved and ensured.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the top view of limiting platform.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the present invention is furture elucidated, it should be understood that these embodiments are merely to illustrate
The present invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are each to the present invention's
The modification of the kind equivalent form of value falls within the application appended claims limited range.
As shown in figure 1, the present invention provides a kind of nano marking press position-limit mechanism, including support platform 1, lower flattening bench 3, mould
Type pressure head 4 and hydraulic lifting cylinder 9, limiting platform 2 are fixedly installed in the support platform 1, the limiting platform 2 is hollow knot
Structure, the first horizontal opening 21 and the second opening 22 of longitudinal direction, the limiting platform 2 are respectively arranged with the limiting platform 2
Inside it is provided with telescope motor 7, the telescope motor 7 possesses four telescopic shafts 8, and the two of the opening 22 of the first opening 21 and second
End is provided with limiting plate 6, and four limiting plates 6 are connected respectively by connection strap 61 through the first opening 21 and the second opening 22
It is connected on four telescopic shafts 8, the length of the opening 22 of the first opening 21 and second is respectively equal to the length and width of limiting platform 2
Degree, the overlapping region of the opening 22 of the first opening 21 and second are located at the center of limiting platform 2, and the connection strap 61 connects
The center of the bottom of limiting plate 6 is connected on, the model pressure head 4 is located at the center of the lower lower end of flattening bench 3.
Claims (5)
1. a kind of nano marking press position-limit mechanism, including support platform (1), lower flattening bench (3), model pressure head (4) and hydraulic pressure liter
Cylinder (9) drops, it is characterised in that：Limiting platform (2) is fixedly installed on the support platform (1), the limiting platform (2) is sky
Core structure, second that the first horizontal opening (21) and longitudinal direction are respectively arranged with the limiting platform (2) is open (22), described
Telescope motor (7) is provided with limiting platform (2), the telescope motor (7) possesses four telescopic shafts (8), first opening
(21) and the second both ends for being open (22) are provided with limiting plate (6), and four limiting plates (6) are passed through by connection strap (61)
First opening (21) and the second opening (22) are connected on four telescopic shafts (8).
A kind of 2. nano marking press position-limit mechanism according to claim 1, it is characterised in that：It is described first opening (21) and
The length of second opening (22) is respectively equal to the length and width of limiting platform (2).
A kind of 3. nano marking press position-limit mechanism according to claim 1 or 2, it is characterised in that：First opening
(21) and the second overlapping region for being open (22) is located at the center of limiting platform (2).
A kind of 4. nano marking press position-limit mechanism according to claim 1, it is characterised in that：Connection strap (61) connection
In the center of limiting plate (6) bottom.
A kind of 5. nano marking press position-limit mechanism according to claim 1, it is characterised in that：Model pressure head (4) position
In the center of lower flattening bench (3) lower end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710755747.1A CN107357132A (en) | 2017-08-29 | 2017-08-29 | A kind of nano marking press position-limit mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710755747.1A CN107357132A (en) | 2017-08-29 | 2017-08-29 | A kind of nano marking press position-limit mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107357132A true CN107357132A (en) | 2017-11-17 |
Family
ID=60289614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710755747.1A Pending CN107357132A (en) | 2017-08-29 | 2017-08-29 | A kind of nano marking press position-limit mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107357132A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107918252A (en) * | 2017-11-20 | 2018-04-17 | 张家港奇点光电科技有限公司 | A kind of follow-on exposure machine |
| CN108637120A (en) * | 2018-04-27 | 2018-10-12 | 浙江老铁匠实业有限公司 | A kind of forcing press material fixing device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101710229A (en) * | 2009-12-07 | 2010-05-19 | 天津大学 | Two-translation and one-rotation precision positioning workbench for nanoimprint lithography system |
| CN101776851A (en) * | 2010-01-15 | 2010-07-14 | 天津大学 | Three DOF micro-positioning workbench for nano-imprint lithography system |
| CN101840879A (en) * | 2009-03-18 | 2010-09-22 | 住友重机械工业株式会社 | Xy stage device, semiconductor checking device and semiconductor exposure device |
| CN202200759U (en) * | 2011-09-02 | 2012-04-25 | 巨庭机械股份有限公司 | Quickly replaceable work table of engraving machine |
| CN102707588A (en) * | 2011-06-28 | 2012-10-03 | 清华大学 | Positioning alignment apparatus of double-side driving workpiece platform without being connected by cross beam |
| CN106274211A (en) * | 2016-11-04 | 2017-01-04 | 苏州亨达尔工业材料有限公司 | A kind of anti-bits type engraving machine positioner |
| CN106547175A (en) * | 2017-01-22 | 2017-03-29 | 青岛德微光纳科技有限公司 | A kind of fine registration formula nano-imprinting apparatus |
| CN206186647U (en) * | 2016-11-04 | 2017-05-24 | 苏州亨达尔工业材料有限公司 | Engraver positioner |
-
2017
- 2017-08-29 CN CN201710755747.1A patent/CN107357132A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101840879A (en) * | 2009-03-18 | 2010-09-22 | 住友重机械工业株式会社 | Xy stage device, semiconductor checking device and semiconductor exposure device |
| CN101710229A (en) * | 2009-12-07 | 2010-05-19 | 天津大学 | Two-translation and one-rotation precision positioning workbench for nanoimprint lithography system |
| CN101776851A (en) * | 2010-01-15 | 2010-07-14 | 天津大学 | Three DOF micro-positioning workbench for nano-imprint lithography system |
| CN102707588A (en) * | 2011-06-28 | 2012-10-03 | 清华大学 | Positioning alignment apparatus of double-side driving workpiece platform without being connected by cross beam |
| CN202200759U (en) * | 2011-09-02 | 2012-04-25 | 巨庭机械股份有限公司 | Quickly replaceable work table of engraving machine |
| CN106274211A (en) * | 2016-11-04 | 2017-01-04 | 苏州亨达尔工业材料有限公司 | A kind of anti-bits type engraving machine positioner |
| CN206186647U (en) * | 2016-11-04 | 2017-05-24 | 苏州亨达尔工业材料有限公司 | Engraver positioner |
| CN106547175A (en) * | 2017-01-22 | 2017-03-29 | 青岛德微光纳科技有限公司 | A kind of fine registration formula nano-imprinting apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107918252A (en) * | 2017-11-20 | 2018-04-17 | 张家港奇点光电科技有限公司 | A kind of follow-on exposure machine |
| CN108637120A (en) * | 2018-04-27 | 2018-10-12 | 浙江老铁匠实业有限公司 | A kind of forcing press material fixing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171117 |
|
| RJ01 | Rejection of invention patent application after publication |