CN107337211B - 一种多晶硅冷氢化法中四氯化硅的汽化方法及汽化装置 - Google Patents
一种多晶硅冷氢化法中四氯化硅的汽化方法及汽化装置 Download PDFInfo
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- CN107337211B CN107337211B CN201610284721.9A CN201610284721A CN107337211B CN 107337211 B CN107337211 B CN 107337211B CN 201610284721 A CN201610284721 A CN 201610284721A CN 107337211 B CN107337211 B CN 107337211B
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- silicon tetrachloride
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- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
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CN110540206B (zh) * | 2018-05-29 | 2021-05-11 | 新特能源股份有限公司 | 流化床反应器的在线排渣装置及在线排渣的方法 |
CN110422847A (zh) * | 2019-08-30 | 2019-11-08 | 中石化南京工程有限公司 | 一种四氯化硅汽化及热量回收系统及方法 |
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CN203451229U (zh) * | 2013-09-23 | 2014-02-26 | 华陆工程科技有限责任公司 | 一种新型的四氯化硅汽化装置 |
CN103896280A (zh) * | 2014-03-27 | 2014-07-02 | 洛阳利尔中晶光伏材料有限公司 | 一种多晶硅冷氢化的运行方法 |
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CN203451229U (zh) * | 2013-09-23 | 2014-02-26 | 华陆工程科技有限责任公司 | 一种新型的四氯化硅汽化装置 |
CN103896280A (zh) * | 2014-03-27 | 2014-07-02 | 洛阳利尔中晶光伏材料有限公司 | 一种多晶硅冷氢化的运行方法 |
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Application publication date: 20171110 Assignee: Inner Mongolia Xinte silicon material Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000326 Denomination of invention: A vaporization method and vaporization device of silicon tetrachloride in polysilicon cold hydrogenation process Granted publication date: 20200616 License type: Common License Record date: 20220627 Application publication date: 20171110 Assignee: Xinte silicon based new materials Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000325 Denomination of invention: A vaporization method and vaporization device of silicon tetrachloride in polysilicon cold hydrogenation process Granted publication date: 20200616 License type: Common License Record date: 20220627 |
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