CN107331796B - Packaging method of laser scanning sealed glass packaging body - Google Patents
Packaging method of laser scanning sealed glass packaging body Download PDFInfo
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- CN107331796B CN107331796B CN201610285756.4A CN201610285756A CN107331796B CN 107331796 B CN107331796 B CN 107331796B CN 201610285756 A CN201610285756 A CN 201610285756A CN 107331796 B CN107331796 B CN 107331796B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H—ELECTRICITY
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- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
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Abstract
The invention discloses a packaging method of a laser scanning sealed glass packaging body, which comprises the steps of taking a sealing line formed by glass material of the glass packaging body as a scanning direction, enabling the geometric center of a laser spot to deviate a certain equal distance along the two sides of the symmetrical center line of the scanning direction of the sealing line, enabling the laser spot to be projected on the glass material to scan to form a first period and a second period; and setting the first period and the second period as a cycle period, and scanning the cycle period at least once to melt the glass material so that the upper substrate glass and the lower substrate glass of the glass packaging body are connected together to form the hermetically sealed package. The invention can solve the problem of non-uniform temperature distribution of the glass material of the glass packaging body in the non-scanning direction, and is beneficial to improving the packaging quality of the glass packaging body.
Description
Technical Field
The invention relates to a packaging method of a laser scanning sealing glass packaging body.
Background
The quasi-synchronous laser scanning mode is applied to glass frit packaging, and has the advantages of wide process interval, high yield, good temperature distribution uniformity along the scanning direction and the like. Among them, an Organic Light-Emitting Diode (OLED) display is a typical glass package. The glass packaging body comprises upper and lower substrate glasses, frit positioned between the upper and lower substrate glasses, an OLED layer and electrodes, wherein the frit is generally arranged into a sealing line in a rounded rectangular shape. In recent years, a sealing method using frit-assisted laser heating is applied to the sealing of OLED displays. Wherein the frit is doped with a material having a high absorption rate for a specific wavelength of light, and has a low melting point characteristic. A hermetic seal is formed between the upper substrate glass with the frit thereon and the lower substrate glass with the OLED thereon by heating and softening the frit using a high energy laser. The laser outputs controllable laser energy to irradiate the sealing line coated with the glass frit in sequence, so that the glass frit is heated and softened successively to form airtight sealing. However, in practical applications, due to the characteristic constraints of the circular shape and the uniformity (10% -20%) of the laser spot focused on the frit layer, the spot dose obtained by each point of the frit along the non-scanning direction during the encapsulation process is not uniform, and the dose distribution from the middle symmetrical point to the two sides is from high to low, thereby further causing the temperature distribution of the frit along the non-scanning direction to be non-uniform. The non-uniformity of the temperature field has a deteriorating effect on the process window, and the phenomena of overburning at the center of the packaging glass material caused by overhigh temperature, white hole phenomenon and unqualified bonding ratio at the edge of the glass material caused by overlow temperature are more easily caused.
One way to solve the above problem provided in the prior art is to scan the frit using a laser spot of a specific energy distribution, such as an M-shaped distribution, to obtain a relatively uniform package temperature field. However, this method requires an additional spot shaping device in the laser packaging system, and is less suitable for frit packaging with different line widths.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects and provide a packaging method of a laser scanning sealed glass packaging body, so as to solve the problem that the temperature distribution of the glass material of the glass packaging body in the non-scanning direction is not uniform, and the packaging quality of the glass packaging body is favorably improved.
In order to solve the technical problems, the technical scheme of the invention is as follows: a packaging method of a laser scanning sealing glass packaging body comprises the following steps:
step S1, using a sealing line formed by the glass material of the glass packaging body as a scanning direction, and enabling the geometric center of the laser spot to deviate a certain distance along any side of a symmetrical center line of the scanning direction of the sealing line so as to enable the laser spot to be projected on the glass material to scan to form a first period;
step S2, using a sealing line formed by the glass material of the glass packaging body as a scanning direction, and enabling the geometric center of the laser spot to deviate a certain distance along the other side of the symmetrical center line of the scanning direction of the sealing line so as to enable the laser spot to be projected on the glass material to scan to form a second period;
and step S3, setting the first period and the second period as a cycle period, and scanning the cycle period at least once to melt the glass material so as to connect the upper substrate glass and the lower substrate glass of the glass packaging body together to form the hermetically sealed package.
Further, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, the first period and the second period are formed in a single one-time scanning mode, and the laser spots of the first period and the laser spots of the second period do not have transition regions.
Further, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, the first period and the second period are formed in a one-time scanning mode; wherein a transition region exists between the laser spot of the first period and the laser spot of the second period.
Further, in the packaging method of the laser scanning sealing glass packaging body provided by the invention, in the transition region, the laser spot of the first period and the laser spot of the second period are transited in a cross-type path switching mode.
Further, in the packaging method of the laser scanning sealing glass packaging body provided by the invention, in the transition region, the laser spot of the first period and the laser spot of the second period are transited in an overlapped path switching manner.
Further, in the method for packaging a laser scanning sealed glass package body provided by the present invention, during the scanning of the first period and the scanning of the second period, the offset distance between the geometric center of the laser spot and the symmetric center line of the sealing line formed by the frit is equal, and the offset distance δ should satisfy: r + delta < La; wherein, R is the radius of the laser facula, and La is the distance between the symmetrical central line of the glass material along the scanning direction and the active area.
Further, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, the radius of the laser spot satisfies the following conditions: w/2< R < La; wherein, W is the line width of the glass material, and La is the distance between the symmetrical central line of the glass material along the scanning direction and the active region.
Further, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, the shape of the laser spot is circular, and the radius of the laser spot is the radius of the circle.
Further, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, the shape of the laser spot is a regular polygon, and the radius of the laser spot is the radius of a circumscribed circle of the regular polygon.
Further, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, the relationship between the radius of the laser spot and the offset distance should satisfy: δ < R, W/2< R- δ < La-2 δ; wherein, W is the line width of the glass material, R is the radius of the laser spot, La is the distance between the symmetrical central line of the glass material along the scanning direction and the active area, and delta is the offset distance between the geometric center of the laser spot and the symmetrical central line of the sealing line formed by the glass material.
Further, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, the any side and the other side refer to the inner side or the outer side of a symmetric center line of the scanning direction of the laser spot and the sealing line, and the any side and the other side are in a complementary mode.
Furthermore, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, the inner side of the symmetrical center line of the scanning direction of the laser spot and the sealing line refers to the direction of the sealed area of the pattern of the sealing line formed by the glass material; the outer side of the symmetric center line of the scanning direction of the laser spot and the sealing line refers to the opening area direction of the sealing line pattern formed by the glass frit.
Furthermore, the method for packaging the laser scanning sealing glass packaging body provided by the invention is characterized in that the transition region is arranged in a straight line region of the sealing line, and the transition region and a turning region of the sealing line are arranged at a certain distance.
Furthermore, the packaging method of the laser scanning sealing glass packaging body provided by the invention sets the transition area to be one in a single scanning cycle.
Further, the packaging method of the laser scanning sealing glass packaging body provided by the invention sets one or more transition areas when the cycle period is scanned for multiple times.
Further, according to the packaging method of the laser scanning sealed glass packaging body provided by the invention, the movement locus of the laser spot in the transition region has an intersection region, and on the movement locus line in the same offset direction, the distance S between the starting point and the end point of the laser spot is satisfied as follows: s < 2R; wherein R is the radius of the laser spot.
Further, in the method for packaging a laser scanning sealed glass package body provided by the present invention, when the sealing line is a single straight line, in the step S1, the method further includes a step of starting scanning from a first end of the single straight line to a second end of the single straight line as an end point, so that a laser spot is projected onto the frit to form a first period; in step S2, the method further includes a step of jumping from the end point of the first period to the start point of the second period, and starting scanning from one end of the single straight line as the start point to the other end of the single straight line as the end point, so that the laser spot is projected onto the frit to form the second period;
furthermore, the packaging method of the laser scanning sealed glass packaging body provided by the invention comprises the step of jumping from the end point of the second period to the start point of the first period in a blank way when the cycle period is scanned for multiple times; and when the starting point of the current first period and the starting point or the end point of the previous first period are positioned at the same end of the single straight line, setting a step distance between the starting point of the current first period and the starting point or the end point of the previous first period.
Furthermore, the packaging method of the laser scanning sealed glass packaging body provided by the invention is characterized in that when the cycle period is scanned for multiple times, the step of jumping from the end point of the first period to the start point of the second period is carried out; and when the starting point of the current second period and the starting point or the end point of the previous second period are positioned at the same end of the single straight line, setting a step distance between the starting point of the current second period and the starting point or the end point of the previous second period.
Further, in the method for encapsulating a laser scanning sealing glass encapsulation body provided by the present invention, the step distance is L2, and it should satisfy: l2 ═ L/M; wherein, M is the number of cycles, and L is the length of a single section of straight line.
Further, according to the packaging method of the laser scanning sealing glass packaging body provided by the invention, when the cycle period is scanned for multiple times, the energy of the laser spot is kept unchanged or is changed.
Furthermore, in the packaging method of the laser scanning sealed glass packaging body provided by the invention, in the airtight sealed packaging process of the glass packaging body, the energy of the laser spot is set to be variable, and the scanning is carried out in a manner that the energy intensity of the laser spot in the linear area of the sealing line formed by the glass material of the glass packaging body is greater than the energy intensity of the laser spot in the bending area of the sealing line formed by the glass material of the glass packaging body.
Furthermore, in the packaging method of the laser scanning sealed glass packaging body provided by the invention, in the airtight sealed packaging process of the glass packaging body, the energy of the laser spot is set to be variable, and the scanning is carried out in a manner that the energy intensity of the laser spot in the linear area of the sealing line formed by the glass material of the glass packaging body is greater than the energy intensity of the laser spot in the electrode area of the glass packaging body.
The invention provides a packaging method of a laser scanning sealing glass packaging body, which takes a sealing line formed by glass material as a scanning direction, and leads a laser spot to be projected on the glass material to scan to form a first period and a second period in a mode of leading the geometric center of the laser spot to deviate from the symmetrical center line of the sealing line for a certain distance. The first period and the second period are distributed on two sides of a symmetrical center line of the sealing line, and the glass material is melted through one or more scanning circulation periods, so that the upper substrate glass and the lower substrate glass of the glass packaging body are connected together through the glass material, and the airtight sealing packaging body structure is formed. The scanning distribution of the laser facula of the invention is at the two sides of the symmetrical center line of the sealing line formed by the glass material, and the scanning area of the glass material in the non-scanning direction in the vertical direction is homogenized, thereby improving the temperature distribution of the glass material in the non-scanning direction, and improving the sealing quality of the glass packaging body. In addition, according to the actual manufacturing requirement, the offset distance between the geometric center of the laser spot and the symmetric center line of the sealing line formed by the glass material can be set, and a laser scanning area with a proper width is formed, so that the temperature distribution of the glass material in the non-scanning direction is improved. Compared with the scanning at the position of the symmetrical center line of the sealing line in the prior art, the invention overcomes the problems of uneven temperature distribution caused by the frit in the non-scanning direction and the temperature distribution of the frit which is higher in the middle and lower at two sides in the non-scanning direction. According to the invention, the laser spots are distributed on two sides of the symmetrical center line of the sealing line of the glass material for scanning, so that the influence of the round shape and the uniformity of 10-20% on the non-uniform temperature distribution of the glass material in the non-scanning direction is avoided. And the influence of the non-uniformity of the glass frit in non-scanning temperature distribution on the deterioration of a process window can be avoided, and the phenomena of overburning and white holes caused by overhigh temperature of the symmetrical center of the packaging glass frit and the phenomenon of substandard bonding ratio caused by overlow temperature of the edge of the glass frit can be avoided.
Drawings
FIG. 1 is a schematic diagram of a laser scanning packaging system;
FIG. 2 is a schematic top view of a glass package;
FIG. 3 is a schematic diagram of a laser spot offset configuration;
FIG. 4 is a schematic diagram of a laser spot scanning trajectory according to an embodiment;
5-6 are schematic diagrams of transition regions of the laser spot scanning track;
FIG. 7 is a schematic illustration of a laser spot scanning trajectory according to another embodiment;
FIG. 8 is a schematic view of a scanning trajectory for an improved quasi-synchronous scanning scheme;
FIG. 9 is a graph of the temperature profile of the frit in the non-scanning direction during scanning of the laser spot;
fig. 10 is a flowchart of a packaging method of a laser scanning glass package.
Detailed Description
The invention is described in detail below with reference to the attached drawing figures:
FIG. 1 is a schematic diagram of a laser scanning packaging system; fig. 2 is a schematic top view of the glass package. Referring to fig. 1-2, the present embodiment provides a method for encapsulating a laser scanning sealing glass package, which is used to form a hermetic seal for an OLED display 120 by using a glass frit, wherein the OLED display 120 is a typical glass package, and the main structure of the OLED display 120 includes an upper substrate glass 121, a glass frit 122, a lower substrate glass 123, an OLED layer 125, and an electrode 124. Wherein the frit 122 is located on the lower substrate glass 123 of the OLED display 120. The frit 122 is pre-cured on the lower substrate glass 123 through a screen printing, pre-sintering step to form a rounded rectangular sealing line having a certain thickness. The OLED layer 125 on the lower substrate glass 123 is located inside the sealing line of the frit 122, while the electrodes 124 connecting the inside and the outside of the OLED display 120 are present on the lower substrate glass 123.
Referring to fig. 1, the system for laser scanning and sealing a glass package in the present embodiment includes: the laser scanning system comprises a controller module 110, a laser scanning module 111 and a laser module 112, wherein the controller module 110 is respectively connected with the laser module 112 and the laser scanning module 111 and is used for controlling the laser module 112 and the laser scanning module 111, the laser module 112 is connected with the laser scanning module 111, the laser module 112 is used for generating laser and sending the laser to the laser scanning module 111 at a preset power, and the laser scanning module 111 is used for changing the laser transmission direction and motion characteristics; the system further comprises a computer 114, said computer 114 being connected to said controller module 110 for data exchange with said controller module 110. Alternatively, the system for laser scanning and sealing the glass package in this embodiment may also be a system with a temperature measurement control module 113. The temperature measurement control module 113 is connected to the controller module 110, and is configured to measure a real-time temperature of the laser spot 117 irradiated on the surface of the frit 122 by the laser, and feed back the real-time temperature of the laser spot 117 to the controller module 110. The temperature measurement control module 113 can measure the temperature of the frit 122 at the position of the laser spot 117 in a non-contact and real-time manner, and feed the temperature back to the controller module 110, and is characterized in that when the laser spot 117 moves at a high speed, the temperature measurement control module 113 can still have sufficient time/spatial resolution to measure the temperature of the frit 122 at the position of the laser spot 117. The controller module 110 can collect and process the temperature signal fed back by the temperature measurement control module 113, and forms a closed-loop control loop with the laser module 112 through the control signal. The closed loop control loop has a control resolution that matches or is higher than the laser scanning module.
FIG. 4 is a schematic diagram of a laser spot scanning trajectory according to an embodiment; FIG. 7 is a schematic illustration of a laser spot scanning trajectory according to another embodiment; fig. 10 is a flowchart of a packaging method of a laser scanning glass package. Referring to fig. 4, 7 and 10, the method for packaging a laser scanning sealing glass package provided in the present embodiment includes the following steps:
step S1, taking a sealing line formed by the frit 122 of the glass package as a scanning direction, and projecting the laser spot 117 onto the frit 122 to scan for a first period in a manner that a geometric center of the laser spot 117 is shifted by a certain distance δ along any one side of a symmetric center line 122a of the scanning direction of the sealing line; that is, the first cycle may be formed by scanning first along the inner side of the symmetric center line 122a in the scanning direction of the seal line, or the first cycle may be formed by scanning first along the outer side of the symmetric center line 122a in the scanning direction of the seal line;
step S2, taking a sealing line formed by the frit 122 of the glass package as a scanning direction, and projecting the laser spot 117 onto the frit 122 to scan for a second period in a manner that the geometric center of the laser spot 117 is shifted by a certain distance δ along the other side of the symmetric center line 122a of the scanning direction of the sealing line; that is, the first cycle may be formed by scanning first along the outside of the symmetric center line 122a in the scanning direction of the seal line, or the first cycle may be formed by scanning first along the inside of the symmetric center line 122a in the scanning direction of the seal line;
step S3, setting the first period and the second period as a cycle period, and scanning the cycle period at least once to melt the frit 122, so that the upper substrate glass 121 and the lower substrate glass 123 of the glass package are connected together to form the hermetically sealed package.
Wherein, the arbitrary side and the other side refer to the inner side or the outer side of the symmetric center line 122a of the scanning direction of the laser spot 117 and the sealing line, wherein, the inner side refers to the closed region direction of the pattern of the sealing line formed by the frit 122, i.e. the direction in the closed region of the sealing line; the outer side means the direction of the open area of the pattern of the seal line formed by the frit 122, i.e., the direction other than the closed area of the seal line. Wherein, the first period and the second period are in a complementary mode, which means that when the first period is the inner side, the second period is the outer side; when the first period is the outer side, the second period is the inner side.
During the scan cycle, the controller module 110 controls the laser scanning module 111 and the laser module 112 to match the laser power to the scanning position/velocity, and to vary linearly or non-linearly at a predetermined position in a particular manner. The linear or non-linear variation control may be a feedforward control, or a temperature feedback closed-loop control using the temperature measurement control module 113.
The packaging method of the laser scanning sealing glass packaging body provided by the invention takes a sealing line formed by the glass material 122 as a scanning direction, and leads the laser spot 117 to be projected on the glass material 122 to scan to form a first period and a second period in a mode of enabling the geometric center of the laser spot 117 to deviate from a symmetrical center line 122a of the sealing line by a certain distance delta. That is, the first period and the second period are distributed on both sides of the center line of symmetry 122a of the seal line, and the frit 122 is melted by one or more scanning cycle periods, so that the upper substrate glass 121 and the lower substrate glass 123 of the frit 122 package are connected together by the frit 122, thereby forming a hermetically sealed package structure. The scanning distribution of the laser spots 117 of the invention is at two sides of the symmetrical center line 122a of the sealing line formed by the glass frit 122, and the scanning area of the glass frit 122 in the non-scanning direction in the vertical direction is homogenized, so that the temperature distribution of the glass frit 122 in the non-scanning direction is improved, and the sealing quality of the glass packaging body can be improved. In addition, according to the actual manufacturing requirement, the offset distance δ between the geometric center of the laser spot 117 and the symmetric center line 122a of the sealing line formed by the frit 122 is set to form a laser scanning region with a suitable width, thereby improving the temperature distribution of the frit 122 in the non-scanning direction. Compared with the scanning at the position of the symmetrical center line 122a of the sealing line in the prior art, the problems of uneven temperature distribution of the frit 122 in the non-scanning direction and temperature distribution of the frit 122 in the non-scanning direction which is higher in the middle and lower in two sides are solved. According to the invention, the laser spots 117 are distributed on two sides of the symmetrical center line 122a of the sealing line of the glass frit 122 for scanning, so that the adverse effect of the circular shape and the uniformity of 10% -20% on the non-uniform temperature distribution of the glass frit 122 in the non-scanning direction is avoided; the influence of the nonuniformity of the temperature field of the glass frit 122 on the deterioration of the process window is avoided, and the phenomena of overburning and white hole caused by overhigh temperature of the symmetric center 122a of the packaging glass frit and the phenomenon that the bonding ratio of the edge of the glass frit is not up to standard caused by overlow temperature can be avoided.
Referring to fig. 7, in the method for packaging a laser scanning sealing glass package provided by the present invention, the first period and the second period are both formed in a single scanning manner, and there is no transition region between the laser spot 117 of the first period and the laser spot 117 of the second period. I.e. the scans of the first cycle and the first cycle are both separate scans, without interleaving. In this way, repeated scanning of the laser at the intersection point is avoided, and the defect that the laser energy at the intersection point is high, which results in a short lifetime of the OLED display 120 is avoided.
Fig. 5-6 are schematic diagrams of transition regions of the laser spot scanning track. Referring to fig. 4 to 6, in the method for packaging a laser scanning sealing glass package according to the present invention, the first period and the second period are formed by a one-time scanning method; wherein a transition region O exists between the first period of laser spots 117 and the second period of laser spots 117. In such a way, one or more cycle periods are formed at one time, and when a plurality of cycle periods are scanned, the scanning can be finished continuously at one time, so that the method has the advantages of rapidness, high efficiency and simplicity and convenience in operation; and the trouble of repeatedly turning on and off the laser for many times in a non-crossing mode can be avoided, so that the frit 122 is rapidly melted in the process of continuously being irradiated by the laser spot 117, and a sealed packaging body is formed by the frit and the upper and lower substrate glasses. Referring to fig. 5, in the transition region O, the laser spot 117 of the first period and the laser spot 117 of the second period transition in a cross-type path switching manner. The glass packaging body is point superposition, and has the advantages of reducing the superposition area of the repeated scanning glass frit, and avoiding the adverse effect on the quality of the glass packaging body caused by the overhigh temperature of the repeated scanning area due to the overlarge repeated scanning area of the transition area O. Referring to fig. 6, in the transition region O, the laser spot 117 of the first period and the laser spot 117 of the second period may also transition in an overlapped path switching manner, that is, line superposition.
Referring to fig. 4, in the method for packaging a laser scanning sealing glass package according to the present invention, the transition region O is disposed in a linear region of the sealing line, and the transition region O and a turning region of the sealing line are disposed at a distance. That is, the transition region O is disposed in any one section of a straight line region of four sides of the rounded rectangular frit 122, and is not disposed in a corner region, a lead angle, or other turning regions of the rounded rectangular frit 122.
In a preferred embodiment, the arrangement of the transition region O may be set to be one or more when the cycle period is scanned for multiple times. For example, when scanning 10 cycle periods, 1 to 10 transition regions O may be set. The arrangement of the transition areas O can disperse the transition areas O in the linear area of the sealing line, so that the danger that the temperature of the same transition area is too concentrated to cause too high temperature is avoided. The transition area O is set to one at a single scan of the cycle period.
In a preferred embodiment, in the method for packaging a laser scanning sealing glass package according to the present invention, the shape of the laser spot 117 is a circle, and the radius of the laser spot 117 is the radius of the circle. The shape of the laser spot 117 may also be a regular polygon, and the radius of the laser spot 117 is the radius of a circumscribed circle of the regular polygon. That is, the present embodiment does not need to perform shaping processing of a particular shape such as an "M" shape for the laser light.
Referring to fig. 3, in the process of scanning the first period and the second period, the offset distance δ between the geometric center of the laser spot 117 and the symmetric center line 122a of the sealing line formed by the frit 122 is equal, that is, the offset distances δ on both sides are equal; the offset distance δ should satisfy: r + delta < La; where R is the radius of the laser spot 117, and La is the distance from the symmetric center line 122a of the frit 122 along the scanning direction to the Active Area (a-a), which may be an Active device Area of a semiconductor device, such as a thermal sensitive material Area in the middle of a light emitting display device. Wherein the radius of the laser spot 117 satisfies: w/2< R < La; w is the line width of the frit 122, and La is the distance from the center line 122a of the frit 122 to the active region along the scanning direction. In a preferred embodiment, the relationship between the radius of the laser spot 117 and the offset distance δ is as follows: δ < R, W/2< R- δ < La-2 δ; where W is the line width of the frit 122 and δ is the offset distance between the geometric center of the laser spot 117 and the center line 122a of symmetry of the sealing line formed by the frit 122. The parameter conditions are such that the laser spot 117 impinges on the frit 122 and avoids impingement on other areas not associated with the frit 112. Of course, the main purpose is to make the temperature distribution of the frit 122 more uniform in the non-scanning direction.
As a preferred embodiment, in the method for packaging a laser scanning sealed glass package provided by the present invention, the movement locus of the laser spot 117 in the transition region O has an intersection region, and on the movement locus line in the same offset direction, the distance S between the starting point and the end point of the laser spot 117 should satisfy: s < 2R; where R is the radius of the laser spot 117. The purpose is to make the area enclosed by the turning points of the transition region O as small as possible, and to make the track line formed by the laser spots 117 distributed on both sides of the symmetric center line 122a in the scanning direction of the seal line as long as possible, so that the temperature distribution of the frit 122 in the non-scanning direction is more uniform.
FIG. 8 is a schematic view of a scanning trajectory of an improved quasi-synchronous scanning scheme. Referring to fig. 8, in the method for encapsulating a laser scanning sealed glass package according to the present invention, when the sealing line of the frit 122 is a single straight line, in the step S1, the method further includes a step of starting to scan from a first end E of the single straight line to a second end F of the single straight line as an end point, so that the laser spot 117 is projected onto the frit 122 to form a first cycle; in step S2, the method further includes a step of jumping from the end point of the first period to the start point of the second period, and starting to scan from the first end E or F of the single straight line to the other end F or E of the single straight line as the end point, so that the laser spot 117 is projected onto the frit 122 to form the second period; when the cyclic period is scanned for multiple times, the method comprises the step of skip from the end point of the second period to the start point of the first period, and when the start point of the current first period and the start point or the end point of the last first period are located at the same end of the single straight line, the start point of the current first period and the start point or the end point of the last first period are separated by a step distance L2. Optionally, jumping from the end of the first period to the start of the second period; and when the starting point of the current second period and the starting point or the end point of the previous second period are positioned at the same end of the single straight line, setting a step distance between the starting point of the current second period and the starting point or the end point of the previous second period. Wherein, the step distance is L2, and the following should be satisfied: l2 ═ L/M; wherein, M is the number of cycles, and L is the length of a single section of straight line. This approach is referred to as an improved quasi-synchronous scanning packaging approach. Fig. 8 illustrates only a specific embodiment where the start of the first cycle and the start of the second cycle are both at the same end of the single length of linear frit 122, but is not to be taken as a limitation of embodiments where the start of the first cycle and the start of the second cycle can be at different ends of the single length of linear frit 122.
In a preferred embodiment, the method for packaging a laser scanning sealed glass package according to the present invention is configured such that the energy of the laser spot 117 is kept constant or variable during a plurality of scanning cycles. Wherein, the variable mode is an energy increasing mode, an energy decreasing mode or a combination mode of the energy increasing mode and the energy decreasing mode, and the purpose is to ensure that the melting rate of the glass material in each area section is basically consistent so as to ensure the sealing quality of the glass packaging body.
As a preferred embodiment, in the method for packaging a glass package by laser scanning sealing provided by the present invention, in the hermetic sealing packaging process of the glass package, the energy of the laser spot 117 is set to be variable, and the laser spot 117 in the linear region of the sealing line formed by the frit 122 of the glass package is scanned in a manner that the energy intensity of the laser spot 117 in the bending region of the sealing line formed by the frit 122 of the glass package is greater than the energy intensity of the laser spot 117 in the bending region of the sealing line formed by the frit 122 of the glass package, so as to ensure the sealing quality of the frit 122.
As a preferred embodiment, in the method for packaging a glass package by laser scanning sealing provided by the present invention, during the hermetic sealing packaging process of the glass package, the energy of the laser spot 117 is set to be variable, and the laser spot 117 in the linear region of the sealing line formed by the frit 122 of the glass package is scanned in such a manner that the energy intensity of the laser spot 117 in the linear region is greater than the energy intensity of the laser spot 117 in the electrode region of the glass package, thereby ensuring the sealing quality of the frit 122.
Fig. 9 is a temperature profile of the frit in the non-scanning direction during scanning of the laser spot. Where the abscissa is the laser wavelength and is represented by Y length, the ordinate is the Temperature and is the Temperature, and the center line of symmetry of the frit 122 is represented by Fri center. Referring to fig. 3 and 9, the curve is the offset distance δ between the geometric center of the laser spot 117 and the symmetric center line of the sealing line formed by the frit. The curve in fig. 9 is 7 different offset distances δ, and the offset distances from top to bottom are 0um, 100um, 200um, 300um, 400um, 450um, 500um in sequence, where 0um is not the technical solution adopted in this embodiment. As can be seen from fig. 9, the temperature is lower as the offset distance is larger, whereas the temperature is higher as the offset distance is smaller. The offset distance can be set during the manufacturing process of the glass packaging body such as an OLED display, so that the temperature distribution of the glass material in the non-scanning direction is more uniform.
The present invention is not limited to the above-described embodiments, and various changes made within the spirit and scope of the claims of the present invention are within the scope of the present invention.
Claims (21)
1. A packaging method for laser scanning sealed glass packaging body is characterized by comprising the following steps:
step S1, using a sealing line formed by the glass material of the glass packaging body as a scanning direction, and enabling the geometric center of the laser spot to deviate a certain distance along any side of a symmetrical center line of the scanning direction of the sealing line so as to enable the laser spot to be projected on the glass material to scan to form a first period;
step S2, using a sealing line formed by the glass material of the glass packaging body as a scanning direction, and enabling the geometric center of the laser spot to deviate a certain distance along the other side of the symmetrical center line of the scanning direction of the sealing line so as to enable the laser spot to be projected on the glass material to scan to form a second period;
step S3, setting the first period and the second period as a cycle period, scanning at least once to form one or more cycle periods, and projecting the two times of scanning on the glass frit on two sides of the symmetrical center line by using the same laser spot to form a first period and a second period which are separated from each other, wherein the first period and the second period are formed in a one-time scanning mode; and the laser spots of the first period and the laser spots of the second period are in transition areas so as to melt the glass frits, so that the upper substrate glass and the lower substrate glass of the glass packaging body are connected together to form the hermetically sealed package.
2. The method of claim 1, wherein in the transition region, the first period of laser spots and the second period of laser spots transition in a cross-type path switching manner.
3. The method of claim 1, wherein in the transition region, the first period of laser spots and the second period of laser spots transition in an overlapping path switching manner.
4. The method for laser scanning and sealing a glass package according to claim 1, wherein during the scanning of the first period and the scanning of the second period, an offset distance between a geometric center of the laser spot and a symmetric center line of a sealing line formed by the frit is equal, wherein the offset distance is δ and satisfies: r + delta < La; wherein, R is the radius of the laser facula, and La is the distance between the symmetrical central line of the glass material along the scanning direction and the active area.
5. The method for packaging a laser scanning sealing glass package according to claim 4, wherein the radius of the laser spot is such that: w/2< R < La; wherein, W is the line width of the glass material, and La is the distance between the symmetrical central line of the glass material along the scanning direction and the active region.
6. The method for packaging a laser scanning sealed glass package according to claim 4 or 5, wherein the shape of the laser spot is a circle, and the radius of the laser spot is the radius of the circle.
7. The method for packaging a laser scanning sealing glass package according to claim 4 or 5, wherein the shape of the laser spot is a regular polygon, and the radius of the laser spot is the radius of a circumscribed circle of the regular polygon.
8. The method for packaging a laser scanning sealing glass package according to claim 5, wherein the relationship between the radius of the laser spot and the offset distance is as follows: δ < R, W/2< R- δ < La-2 δ; wherein, W is the line width of the glass material, R is the radius of the laser spot, La is the distance between the symmetrical central line of the glass material along the scanning direction and the active area, and delta is the offset distance between the geometric center of the laser spot and the symmetrical central line of the sealing line formed by the glass material.
9. The method for packaging a laser scanning sealed glass package according to claim 1, wherein the arbitrary side and the another side are both inside or outside a center line of symmetry of a scanning direction of the laser spot and the sealing line, and the arbitrary side and the another side are in a complementary manner.
10. The method according to claim 9, wherein the inner side of the symmetric center line of the scanning direction of the laser spot and the sealing line is in the direction of the sealed area of the pattern of the sealing line formed by the frit; the outer side of the symmetric center line of the scanning direction of the laser spot and the sealing line refers to the opening area direction of the sealing line pattern formed by the glass frit.
11. The method of claim 1, wherein the transition region is disposed in a straight region of the sealing line and the transition region is disposed at a distance from a turning region of the sealing line.
12. The method of claim 11, wherein the transition region is set to one in a single scan of the cycle period.
13. The method of claim 11, wherein the transition region is set to one or more at a plurality of scans of the cycle period.
14. The method for packaging a laser scanning sealed glass package according to claim 12 or 13, wherein the movement locus of the laser spot in the transition region has an intersection region, and on the movement locus line in the same offset direction, the distance S between the starting point and the end point of the laser spot is satisfied: s < 2R; wherein R is the radius of the laser spot.
15. The method for laser scanning and sealing a glass package according to claim 1, wherein when the sealing line is a single straight line, in step S1, the method further comprises the step of starting scanning from a first end of the single straight line to a second end of the single straight line, so that a laser spot is projected onto the frit for a first period; in step S2, the method further includes a step of jumping from the end point of the first period to the start point of the second period, and starting scanning from one end of the single straight line as the start point to the other end of the single straight line as the end point, so that the laser spot is projected onto the frit to form the second period.
16. The method of claim 15, wherein scanning the cycle period a plurality of times comprises the step of jumping from an end of the second period to a beginning of the first period; and when the starting point of the current first period and the starting point or the end point of the previous first period are positioned at the same end of the single straight line, setting a step distance between the starting point of the current first period and the starting point or the end point of the previous first period.
17. The method for laser scanning sealing glass package encapsulation according to claim 15, wherein in the step of jumping from the end point of the first period to the start point of the second period during a plurality of scanning cycles; and when the starting point of the current second period and the starting point or the end point of the previous second period are positioned at the same end of the single straight line, setting a step distance between the starting point of the current second period and the starting point or the end point of the previous second period.
18. The method for packaging a laser scanning sealing glass package according to claim 16 or 17, wherein the step distance is L2, and the following are satisfied: l2 ═ L/M; wherein, M is the number of cycles, and L is the length of a single section of straight line.
19. The method of claim 1, wherein the energy of the laser spot is maintained or varied over the cycle of the plurality of scans.
20. The method for laser scanning sealing a glass package according to claim 1, wherein the energy of the laser spot is set to be variable during the hermetic sealing of the glass package, and the scanning is performed in such a manner that the energy intensity of the laser spot in a straight area of the sealing line formed by the frit of the glass package is greater than the energy intensity of the laser spot in a bent area of the sealing line formed by the frit of the glass package.
21. The method for laser scanning sealing of a glass package according to claim 1, wherein the energy of the laser spot is set to be variable during the hermetic sealing of the glass package, and the scanning is performed in such a manner that the energy intensity of the laser spot in the linear region of the sealing line formed by the frit of the glass package is greater than the energy intensity of the laser spot in the electrode region of the glass package.
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| CN1572473A (en) * | 2003-06-11 | 2005-02-02 | 爱信精机株式会社 | Process for laser welding resinous members, apparatus for the same and laser-welded resinous product |
| CN102311220A (en) * | 2010-07-05 | 2012-01-11 | 三星移动显示器株式会社 | Bombardment with laser beams device and the base plate seals device that comprises the bombardment with laser beams device |
| TW201213030A (en) * | 2010-09-30 | 2012-04-01 | Lts Co Ltd | Method of sealing wide frit using laser |
| CN103846559A (en) * | 2012-11-30 | 2014-06-11 | Lts有限公司 | Apparatus for sealing frit using laser |
| CN103878497A (en) * | 2012-12-21 | 2014-06-25 | 三星显示有限公司 | Laser beam irradiation apparatus and substrate sealing method |
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| CN1572473A (en) * | 2003-06-11 | 2005-02-02 | 爱信精机株式会社 | Process for laser welding resinous members, apparatus for the same and laser-welded resinous product |
| CN102311220A (en) * | 2010-07-05 | 2012-01-11 | 三星移动显示器株式会社 | Bombardment with laser beams device and the base plate seals device that comprises the bombardment with laser beams device |
| TW201213030A (en) * | 2010-09-30 | 2012-04-01 | Lts Co Ltd | Method of sealing wide frit using laser |
| CN103846559A (en) * | 2012-11-30 | 2014-06-11 | Lts有限公司 | Apparatus for sealing frit using laser |
| CN103878497A (en) * | 2012-12-21 | 2014-06-25 | 三星显示有限公司 | Laser beam irradiation apparatus and substrate sealing method |
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