CN107329072A - Surface photovoltage measuring system and method based on Labview - Google Patents
Surface photovoltage measuring system and method based on Labview Download PDFInfo
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- CN107329072A CN107329072A CN201710632115.6A CN201710632115A CN107329072A CN 107329072 A CN107329072 A CN 107329072A CN 201710632115 A CN201710632115 A CN 201710632115A CN 107329072 A CN107329072 A CN 107329072A
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- labview
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- surface photovoltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2648—Characterising semiconductor materials
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Abstract
The invention discloses the surface photovoltage measuring system based on Labview and method, belong to investigation of materials field.The present invention utilizes Labview software programmings, using the photoelectric signal of quick response as trigger signal, Program Generating is identical with modulating light frequency, two mutually orthogonal sinusoidal signals are reference signal, make measured signal synchronous with reference signal realization, phase difference problem caused by reduction reference signal is different from measured signal transmission path, and using the real-time of wavelet transformation improvement signal.The present invention ensure that the measurement accuracy at phase angle, denoising effect are good, data comparativity is strong, photoelectric signal real-time change error is small.
Description
Technical field
The invention belongs to investigation of materials FIELD OF THE INVENTIONThe, and in particular to surface photovoltage measuring system based on Labview and
Method.
Background technology
Surface photovoltaic spectroscopy（ SPV）It is a kind of critically important research meanses in semiconductor and modern many high-tech areas.Half
Conductor and metal contact position produce surface potential barrier, when light irradiation is on the contact interface of sample and metal, in plane of illumination and non-
Electromotive difference of potential is set up between plane of illumination, the relation for recording this potential difference and lambda1-wavelength obtains surface photovoltaic spectroscopy.Surface
Band-to-band transition of optical absorption property, electronics of photovoltaic spectrum reaction material etc., while being influenceed by the photo-generated carrier life-span.
SPV is used for measuring the life-span of non-equilibrium minority carrier, the steady state measurement method used more.It makes half using stable illumination
The distribution of non-equilibrium few son reaches stabilization in conductor, so as to accurately and fast extrapolate minority carrier life time.Surface photovoltage (SPV)
Spectrum is to study one of most sensitive method of nature of solid surface.Its sensitivity is higher than several numbers of XPS and Auger electron spectrums
Magnitude, simple to operate, repeatability is good, and sample is not destroyed in test, does not change the pattern of sample.Photovoltage refers to that illumination causes
Surface potential change.Surface photovoltaic spectroscopy (SSP) can be used for the characterisitic parameter of non-destructive investigation semi-conducting material, such as deep
Energy level and surface energy level position, energy gap etc..
Existing surface photoelectricity spectral measurement system basic composition is：Light source, monochromator, chopper, sample cell, lock are mutually put
Greatly, computer.The serial surface photovoltaic spectroscopy measuring system of in the market mainly has xenon source, automatically scanning monochromator, optical fiber
The part such as beam, lock-in amplifier, optical chopper, darkroom and data acquisition software is constituted.One in surface photovoltage spectrometry
Crucial measurement uncertain factor is the stability of light source, and data acquisition software can directly control monochromator to carry out wavelength and surface
Photoelectric signal is gathered.
The problem of existing system is present be：1. reference signal and surface photovoltage signal enter not going the same way for lock-in amplifier
Low-pass filter circuit inside footpath, amplifier influences the synchronous input phaselocked loop of two signals, and then influences the measurement essence at phase angle
Degree；2. circuit time constant is different, comparativity as a result is deteriorated；3. operation principle is the correlation using signal to light
Electric signal carries out amplitude discrimination phase demodulation using lock-in amplifier, but when signal is weaker, denoising effect is unsatisfactory.In addition, in fixation
Under the light action of wavelength, the real-time change error for observing photoelectric signal is larger.
There is the assay method of some surface photovoltages in the prior art.
Publication No. CN105629079 A patent document discloses a kind of AFM and surface photovoltaic spectroscopy connection
With method, determination step therein is 4 opening monochromatic light spectrometers, opens xenon lamp, 380 nanometers of selection is used as initial sweep ripple
It is long.5 open chopper, and setpoint frequency is 6 hertz, and chopper frequencies signal is input into lock-in amplifier；6 will lock
The scanning step of the setting monochromatic light spectrometer of data collecting card 7 for amplitude and phase signal the access host computer that phase amplifier is obtained
A length of 5 nanometers, repeat step 5 and 6, it is 600 nanometers to terminate scanning wavelength；8 are obtained by microcomputer with monochromator splitting
To a length of abscissa of monochromatic optical wave, the amplitude signal exported using lock-in amplifier is drawn out to be measured solid as ordinate on microcomputer
The surface photovoltage spectrogram on measured zone surface needed for body sample；And/or, a length of horizontal stroke of monochromatic optical wave is obtained with monochromator splitting
Coordinate, the phase angle signal exported using lock-in amplifier draws out measurement needed for solid sample to be measured as ordinate on microcomputer
The phase angle spectrogram of region surface.
Notification number discloses a kind of anti-interference Ga As photovoltages of novel constant-temperature for CN 203929696U patent document
Spectrum testing system, its overall structure is by computer, programmable power supply, halogen tungsten lamp, grating monochromator, chopper, constant temperature photovoltage
Cell system and lock-in amplifier composition.The white light that light source is sent carries out monochromatic optical scanning, chopper pair by grating monochromator
Monochromatic light is modulated, then through being incorporated into by optical fiber in photovoltage pond after optical system is converged, the surface that sample is produced
Photoelectric signal is transmitted to lock-in amplifier by ITO electro-conductive glass and carries out signal amplification, and bottom ITO electro-conductive glass is grounded,
It is last that spectrogram collection and calculating are carried out by computer.
Above-mentioned photovoltage test system and method, are method present in prior art, reference signal and surface photovoltage signal
The synchronous input phaselocked loop of two signals is influenceed into the low-pass filter circuit inside the different paths of lock-in amplifier, amplifier,
And then influence the measurement accuracy at phase angle；When circuit time constant is different, comparativity as a result is deteriorated；In addition, in fixed wave length
Light action under, observe photoelectric signal real-time change error it is larger.
Photovoltage spectrogram is as the exact method of the materials such as research semiconductor, it is necessary to enter to existing measurement system and method
Row is improved, and meets the requirement of the acquisition to the precise information of material.
The content of the invention
To overcome problem above, the present invention proposes a kind of surface photovoltage measuring system and method based on Labview.
LabVIEW is general programing system, there is a huge function library for completing any programmed tasks.LabVIEW's
Function library includes data acquisition, GPIB, serial ports control, data analysis, the display of data LabVIEW marks and data storage, etc..
LabVIEW also has traditional program debugging tool, as set breakpoint, with animation mode display data and its subprogram (sub- VI)
As a result, single step execution etc., is easy to the debugging of program.
LabVIEW is a kind of graphical programming language for replacing line of text to create application program with icon.Traditional text is compiled
Cheng Yuyan is according to sentence and the sequencing determination procedure execution sequence of instruction, and LabVIEW is then using data flow programming side
Data flow between formula, flow chart interior joint determines the execution sequence of VI and function.VI refers to virtual instrument, is
LabVIEW program module.
LabVIEW provides many outward appearances the control similar with traditional instrument (such as oscillograph, universal meter), can be used to conveniently
Ground creates user interface.User interface is referred to as front panel in LabVIEW.Using icon and line, programming can be passed through
Object on front panel is controlled.Here it is graphical source code, also known as G code.LabVIEW graphical source code
Flow chart is somewhat similarly to, therefore also referred to as flow chart code.
LABVIEW initially designs for test measurement, i.e. thus the present LABVIEW of test measurement is most extensive
Application field.By development for many years, LABVIEW is obtained in test fields of measurement widely to be recognized.So far, most of masters
Tester, the data acquisition equipment of stream are owned by special LabVIEW drivers, can be very convenient using LabVIEW
Control these hardware devices.Meanwhile, user can also very easily find various suitable for testing fields of measurement
LabVIEW kits.Institute needed for these kits almost cover user is functional, and user is on the basis of these kits
Redevelopment program is easy for many.Sometimes the function in several kits need to simply only even be called, it is possible to constitute one
Individual complete test measurement application program.
The present invention utilizes Labview software programmings, proposes a kind of surface photovoltage measuring system based on Labview, bag
Light source, monochromator, chopper, sample cell, amplifier, sampling module and host computer are included, the light-emitting window of light source is cut just to monochromator
Ripple device is modulated to the optical signal of monochromator, and sample cell is used to place sample, the signal output part connection amplifier of sample cell
Signal input part, host computer connected by the COM1 of serial ports and monochromator, the end that host computer passes through serial ports and chopper
Mouth connection.
Further, the speed of monochromator stepped parameter and chopper is controlled using Labview systems.
Further, using photoelectric signal as trigger signal, photosignal triggering produces two synchronized orthogonal sines
Signal makees reference signal.
Further, using the surface photovoltage measuring system based on Labview, including step：
（1）, equipment initialization and parameter setting；
（2）, produce surface photovoltage, using the surface photovoltage trigger two synchronized orthogonal sinusoidal signals；
（3）, application sample module samples；
（4）, carry out phase demodulation, amplitude discrimination computing, show and store photovoltage SPV and phase theta；
（5）, reach final value until wavelength, terminate.
Further, described（1）In, parameter setting include exciting light just, final value, the stepping rate of monochromator and
The rotary speed of chopper.
Further, described（2）In, if surface photovoltage is zero, then return parameters are set, until determining surface photoelectricity
Pressure is not zero.
Further, described（3）In, such as sampled data not enough, then proceeds sampling, is required until meeting.
A kind of surface photovoltage measuring method based on Labview, using the surface photovoltage based on Labview
Measuring system, including step：
（1）, equipment initialization；
（2）, excitation wavelength setting, chopper rotary speed setting；
（3）, sampling storage；
（4）, wavelet analysis；
（5）, display storage；
（6）, terminate.
Further, described（3）In, such as sampled data not enough, then proceeds sampling, is required until meeting.
The beneficial effects of the invention are as follows：
1st, the present invention proposes a kind of surface photovoltage measuring system based on Labview, including light source, monochromator, chopper, sample
Product pond, amplifier, sampling module and host computer, the light-emitting window of light source is just to monochromator, and chopper enters to the optical signal of monochromator
Row modulation, sample cell is used to place sample, and the signal output part of sample cell connects the signal input part of amplifier, and host computer passes through
The COM1 connection of serial ports and monochromator, host computer is connected by the port of serial ports and chopper.
It applies Labview, and the light-emitting window of light source is just to monochromator, and chopper is modulated to be formed to monochromatic optical signal
Exchange optical signal, light source can use grating using conventional deuterium lamp, monochromator, using the photoelectric signal of quick response as
Trigger signal, Program Generating is identical with modulating light frequency, and mutually orthogonal two sinusoidal signals are reference signal, make measured signal with
Reference signal realize it is synchronous, reduce reference signal it is different from measured signal transmission path caused by phase difference problem.
The stepping rate of monochromator and the rotary speed of chopper are controlled using Labview.
2nd, borrow software and complete phase demodulation and amplitude discrimination computing, the correlation compared to traditional utilization signal is utilized to photosignal
Lock-in amplifier carries out amplitude discrimination phase demodulation, but when signal is weaker, and denoising effect is unsatisfactory the problem of exist, to improve noise
Than.
3rd, in the case of fixed wave length, the measurement that surface photovoltage SPV changes with time solves light of the prior art
The larger technical problem of the real-time change error of voltage signal.
4th, wavelet analysis is used after data acquisition, improves the real-time of signal.
5th, the present invention is when being sampled, including determines the enough steps of sampling, ensure that data are accurate, information is complete
Entirely.
Brief description of the drawings
Fig. 1, surface photovoltage measuring system of the present invention structured flowchart；
Fig. 2, the present invention measuring system λ-SPV, θ measurement block diagrams；
Fig. 3, photovoltage SPV-t of the present invention measure block diagram.
Embodiment
For a better understanding of the present invention, present disclosure is further fairly set out with reference to embodiment, but the present invention
Protection content is not limited solely to the following examples.In the following description, a large amount of concrete details are given to provide
More thorough understanding of the invention.It will be apparent, however, to one skilled in the art that the present invention can need not
One or more of these details and be carried out.
This method is described further below in conjunction with the accompanying drawings.
As shown in figure 1, the surface photovoltage measuring system based on Labview of the present invention, including light source, monochromator, cut
Ripple device, sample cell, amplifier, sampling module, host computer, optical signal are sent from light source, and the delivery outlet of light source is just to monochromator
Input port, light source can use deuterium lamp, and its complex light sent passes through the modulation of chopper, as exchange optical signal, monochromator
Grating can be selected, sample cell is used to place sample, and provides required dark situation, the signal output part connection amplification of sample cell
The signal input part of device, host computer is connected by the COM1 of serial ports and monochromator, the stepped parameter for controlling monochromator,
Host computer is connected by the port of serial ports and chopper, the speed to control chopper.Applied in host computer
Labview virtual softwares, because photoelectric respone is in femtosecond, so selection photoelectric signal is used as trigger signal.Photosignal is touched
Hair produces two synchronized orthogonal sinusoidal signals and makees reference signal,（Fig. 2）Produce photovoltage SPV and phase theta.
As shown in Fig. 2 carry out equipment initialization and basic parameter set, parameter setting can include exciting light it is initial,
End of a period value, the stepping rate of monochromator and the rotary speed of chopper etc. confirm whether surface photovoltage is zero, if it is,
Step is reset in return, if it is not, then prove there is surface photovoltage signal, photoelectric respone in femtosecond, so
Selection photoelectric signal is used as trigger signal.Photosignal triggering produces two synchronized orthogonal sinusoidal signals and makees reference signal, such as
This makes measured signal synchronous with reference signal realization, so as to solve reference signal of the prior art and surface photovoltage signal enters
Entering the different paths of lock-in amplifier, the low-pass filter circuit inside amplifier influences the synchronous input phaselocked loop of two signals, enters
And the problem of influence the measurement accuracy at phase angle；
Sampled, whether system interrogation hits meets, required if it is not, then proceeding sampling until hits is met,
Phase demodulation, amplitude discrimination computing are carried out afterwards, are shown and are stored photovoltage SPV and phase theta, if wavelength does not reach final value, continue
Sampled, computing, obtain photovoltage SPV and phase theta, until wavelength reaches final value, terminate continuous mode.
The present embodiment uses Labview virtual softwares, and selection photoelectric signal is used as trigger signal.Photosignal triggering production
Raw two synchronized orthogonal sinusoidal signals make reference signal, so make measured signal synchronous with reference signal realization, so as to solve existing
There are reference signal and surface photovoltage signal in technology into the low pass filtered inside the different paths of lock-in amplifier, amplifier
Wave circuit influences the synchronous input phaselocked loop of two signals, and then the problem of the measurement accuracy at influence phase angle；Software is borrowed to complete
Phase demodulation and amplitude discrimination computing, improve signal to noise ratio.
Under conditions of fixed excitation wavelength, measurement photovoltage SPV changes with time, setting procedure such as Fig. 3：
Equipment initialization, setting excitation wavelength and chopper speed are proceeded by, photovoltage is measured using said system, adopted
Sample is stored, and wavelet analysis is carried out afterwards, and result is carried out into display storage.Host computer is using Labview virtual softwares to monochromator
Stepped parameter, the speed of chopper are controlled；Because photoelectric respone is in femtosecond, so selection photoelectric signal is as tactile
Signal.Photosignal triggering produces two synchronized orthogonal sinusoidal signals and makees reference signal, and using small after data acquisition
Wave analysis, improves the real-time of signal, reference signal and surface photovoltage signal enter lock-in amplifier in the prior art for solution
Different paths, the low-pass filter circuit inside amplifier influences the synchronous input phaselocked loop of two signals, and then influences phase angle
Measurement accuracy technical problem；When solving circuit time constant difference simultaneously, comparativity as a result, which is deteriorated and utilized, locks phase
Amplifier carries out amplitude discrimination phase demodulation, but when signal is weaker, the unsatisfactory technical problem of denoising effect, in addition, it is to avoid in fixation
Under the light action of wavelength, the larger technical problem of the real-time change error of photoelectric signal is observed.
Finally illustrate, the above embodiments are merely illustrative of the technical solutions of the present invention and unrestricted, ordinary skill
Other modifications or equivalent substitution that personnel are made to technical scheme, without departing from the essence of technical solution of the present invention
God and scope, all should cover among scope of the presently claimed invention.
Claims (9)
1. a kind of surface photovoltage measuring system based on Labview, it is characterised in that including light source, monochromator, chopper,
Sample cell, amplifier, sampling module and host computer, the light-emitting window of light source is just to monochromator, optical signal of the chopper to monochromator
It is modulated, sample cell is used to place sample, and the signal output part of sample cell connects the signal input part of amplifier, and host computer leads to
The COM1 for crossing serial ports and monochromator is connected, and host computer is connected by the port of serial ports and chopper.
2. a kind of surface photovoltage measuring system based on Labview as claimed in claim 1, it is characterised in that use
Labview systems are controlled to the speed of monochromator stepped parameter and chopper.
3. a kind of surface photovoltage measuring system based on Labview as claimed in claim 1, it is characterised in that apply light
Voltage signal is as trigger signal, and photosignal triggering produces two synchronized orthogonal sinusoidal signals and makees reference signal.
4. a kind of surface photovoltage measuring method based on Labview, it is characterised in that any one of application claim 1-3 institutes
The surface photovoltage measuring system based on Labview stated, including step：
（1）, equipment initialization and parameter setting；
（2）, produce surface photovoltage, using the surface photovoltage trigger two synchronized orthogonal sinusoidal signals；
（3）, application sample module samples；
（4）, carry out phase demodulation, amplitude discrimination computing, show and store photovoltage SPV and phase theta；
（5）, reach final value until wavelength, terminate.
5. a kind of surface photovoltage measuring method based on Labview as claimed in claim 4, it is characterised in that described
（1）In, parameter setting includes the first of exciting light, final value, the stepping rate of monochromator and the rotary speed of chopper.
6. a kind of surface photovoltage measuring method based on Labview as claimed in claim 4, it is characterised in that described
（2）In, if surface photovoltage is zero, then return parameters are set, and are not zero until determining surface photovoltage.
7. a kind of surface photovoltage measuring method based on Labview as claimed in claim 4, it is characterised in that described
（3）In, such as sampled data not enough, then proceeds sampling, is required until meeting.
8. a kind of surface photovoltage measuring method based on Labview, it is characterised in that any one of application claim 1-3 institutes
The surface photovoltage measuring system based on Labview stated, including step：
（1）, equipment initialization；
（2）, excitation wavelength setting, chopper rotary speed setting；
（3）, sampling storage；
（4）, wavelet analysis；
（5）, display storage；
（6）, terminate.
9. a kind of surface photovoltage measuring method based on Labview as claimed in claim 8, it is characterised in that described
（3）In, such as sampled data not enough, then proceeds sampling, is required until meeting.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114355142A (en) * | 2022-01-04 | 2022-04-15 | 山东大学 | Device for measuring sample surface photovoltage spectrum and luminescence spectrum |
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| CN106383302A (en) * | 2016-08-22 | 2017-02-08 | 南京理工大学 | Ultraviolet emitting material surface photovoltage spectrum testing device and testing method |
| CN106932093A (en) * | 2017-02-21 | 2017-07-07 | 上海理工大学 | Auto frequency locking photoelectricity active balance system |
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| CN101377420A (en) * | 2008-10-07 | 2009-03-04 | 北京航空航天大学 | Wide spectrum optical fiber light source with stable optical power and average wave length |
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| CN203929696U (en) * | 2014-05-23 | 2014-11-05 | 中国计量学院 | The anti-interference GaAs photovoltaic spectrum of a kind of novel constant-temperature test macro |
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Application publication date: 20171107 |