CN107306098A - Magnetic suspension guider and its control system and control method - Google Patents
Magnetic suspension guider and its control system and control method Download PDFInfo
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- CN107306098A CN107306098A CN201610240775.5A CN201610240775A CN107306098A CN 107306098 A CN107306098 A CN 107306098A CN 201610240775 A CN201610240775 A CN 201610240775A CN 107306098 A CN107306098 A CN 107306098A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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Abstract
It is used for magnetic suspension guider and its control system and control method the invention discloses one kind.Magnetic suspension guider includes mover slide unit and rail unit, and mover slide unit is arranged in pairs in the both sides of rail unit.Each pair mover includes the first mover slide unit and the second mover slide unit.Control system includes position setting device, gap measuring sensor and control circuit.Position setting device is used to set mover slide unit relative to the elemental height that rail unit suspends.The levitation gap height that gap measuring sensor is used to measure between mover slide unit and rail unit.Circuit is controlled to be communicated to connect with position setting device and gap measuring sensor, and for according to the value obtained by position setting device and gap measuring sensor, to obtain the expectation electric current needed for mover slide unit.The magnetic suspension guider of the application has bigger preload force, and preload force is adjustable and with higher dynamic response capability.
Description
Technical field
The present invention relates to a kind of magnetic suspension guider, it is adaptable at a high speed without the Jing Yin telecontrol equipment that rubs,
Sports platform positioner in such as semiconductor manufacturing facility, liquid crystal display manufacturing equipment, detection device,
Silicon chip, mask, substrate of glass or similar substrate are carried on sports platform to expose or detect.
Background technology
Progress and semi-conductor industry with photoetching technique is fast-developing, has four substantially for lithographic equipment
Performance indications：Line width uniformity (CD, Critical Dimension Uniformity), depth of focus (Focus),
Alignment (Overlay) and yield (Throughput).In order to improve line width uniformity, litho machine work
Part platform mask platform must improve the standard to precision positioning ability.In order to improve depth of focus error precision, workpiece
Platform mask platform must improve vertical precision positioning ability.In order to improve litho machine overlay error precision, work
Part platform mask platform must improve its internal mode to lift dynamic locating features.In addition, lithographic equipment must
Yield, therefore the necessary high-speed motion of work stage must be increased, it is quick to start and stop.The height of lithographic equipment
Speed, high acceleration and high-accuracy stationkeeping ability are conflicting.In order to overcome this contradiction, currently
Workpiece platform mask platform technology employs rough micro-moving mechanism structure, realizes and is separated with high-precision technology at a high speed.Slightly
Dynamic structure is mainly made up of linear electric motors, it is possible to achieve big stroke and at high speed motion.Micropositioner then layer
It is folded to be installed on coarse motion platform, deviations can be dynamically compensated, micropositioner realizes nano-precision, and has
There is multifreedom motion to carry out photolithographic exposure and alignment.
Current this structure drives designing technique using air-bearing structure, it is impossible to realize that multiple degrees of freedom is transported
The dynamic integrated Coupling Design with actuator, causes the quality of system motion structure to increase, driving force with
Increase, the residual oscillation that driving counter-force is applied to system also increases, so as to have impact on the dynamic of system
Performance.Further, since productivity requirements high acceleration causes additional tilting moment to increase, work stage mask
The air supporting Static stiffness constraint of platform to guide surface degree, preloads deformation, air supporting work using high rigidity design
Skill parameter designing requires very high.Simultaneously, it is contemplated that supporting electricity, gas and water, vacuum passage and cabinet,
Work stage reticle stage system is complicated, huge, reliability is low, maintenance maintenance
Traditional precision air supporting sports platform is supported using high pressure air-bearing, it is ensured that sports platform makees nothing on platform
Fricting movement, its key part structure is mainly made up of the high-accuracy gentle slick and frivolous block structure of air-float guide rail.
Air floating structure is by floating cushion and vacuum pretightning force (or magnetic attraction is preloaded) structure of offer malleation by processing
Integrally.When air supporting guider works, air floating structure is passed through barotropic gas, in floating cushion and Dali
Air film is formed between stone guide rail, floating cushion is supported by lift of gas N, it is ensured that floating cushion is in Dali
Make frictionless motion on stone platform.Vacuum pre-fastening structure is then passed through negative-pressure gas, makes vacuum pretightning force
Structure is acted on by the vacuum pretightning force F in opposite direction with lift of gas N.By adjust lift of gas N and
Vacuum pretightning force F size, can adjust the air supporting rigidity of floating cushion and air supporting guider.If
The air supporting rigidity of floating cushion is improved, it is necessary to increase air supporting pressure N and vacuum pretightning force F simultaneously, and increase
Plus vacuum pretightning force F can cause floating cushion to produce precompressed bending, because pneumatically supported air-film thickness δ is general
Only several microns to more than ten microns, therefore, when amount of bow σ crosses ambassador's floating cushion with guide rail contact,
Floating cushion motion will produce mechanical friction, make air floating structure ineffective.When improving bearing capacity, need
Supply air pressure is further improved, air supporting easily occurs gas and shaken, and the guiding dress of air supporting and vacuum preload
Putting can not but use in the sports platform applied based on vacuum environment.
Fig. 1 shows a kind of traditional guide rail guiding device.As shown in figure 1, the guider includes：
Rail unit 100, mover slide unit 101 and the part of guide rail pair unit 102 3 are collectively formed.Lead
Rail unit 100 is generally with metal guide rail or the high ceramic guide rail of rigidity.Mover slide unit 101 is main
Including mechanical slide or aerostatic slide, mechanical part (such as crossed roller guide rail) or air supporting generally may be designed as
Part (such as floating cushion).Guide rail pair unit 102 is made up of mechanical roller bearing or by high pressure gas suspension
Bearing is constituted, or is made up of permanent-magnet suspension bearing.Guider has multiple freedoms of motion, first
Freedom of motion direction is X-direction, points to the long axis direction of rail unit 100.Second freedom of motion
Degree direction is Y-direction, orthogonal orthogonal with the long axis direction of rail unit 100.Guider
3rd freedom of motion direction is Z-direction, and it is with the first freedom of motion direction and the second freedom of motion
The equal perpendicular quadrature in direction is spent, mover slide unit 101 is pointed to.Wherein, mover slide unit 101 is being led
Being capable of free movement along the first freedom of motion direction on rail unit 100.Mover slide unit 101
There is free movement function or with Gao Gang along the second freedom of motion direction on rail unit 100
Property constraint.Sliding block 101 has high rigidity on rail unit 100 along the 3rd freedom of motion direction
Constraint, can undertake moving loads.
Mechanical roller bearing 102 is directly contacted with rail unit 100 and mover slide unit 101, is had
High structural rigidity and bearing capacity, but noise is big under High-speed Circumstance application, it is difficult to accomplish high accuracy.
High pressure gas suspension bearing and rail unit 100 and the non-direct contact of mover slide unit 101, with compared with
High structural rigidity and bearing capacity, noise are low, but high to application environmental requirement.Permanent-magnet suspension bearing
With rail unit 100 and the non-direct contact of mover slide unit 101, with relatively low bearing rigidity and compared with
High bearing capacity, noiseless, but be difficult in static state in stable suspersion state.
Traditional precise motion platform also utilizes the motion of mechanical bearing guide supporting sports platform, typical mechanical bearing
Including：Ball bearing, roller bearing, sliding contact bearing.But in order to reduce sliding bearing or roller
The vibration of bearing and noise, often using lubricating oil, can produce particle contamination in moving contact friction process
Application environment, and contact friction force can also limit the speed and precision of sports platform.The reality of this scheme
Apply difficulty big.
In summary, traditional air supporting or mechanical guide bearing arrangement or method for supporting can not meet precision
Application environment demand in sports platform.
The content of the invention
There is bigger preload force it is an object of the invention to provide a kind of, preload force is adjustable, and has
The magnetic suspension guider of higher dynamic response capability.
To achieve the above object, it is used for magnetic suspension guide to dress there is provided one kind according to an aspect of the present invention
The control system put, the magnetic suspension guider includes mover slide unit and rail unit, described
Mover slide unit is arranged in pairs in the both sides of the rail unit, and mover described in each pair includes first
Mover slide unit and the second mover slide unit.The control system includes：Position setting device,
The position setting device is used to set what the mover slide unit suspended relative to the rail unit
Elemental height；Gap measuring sensor, the gap measuring sensor is used to measure the mover sliding block
Levitation gap height between unit and the rail unit；And control circuit, the control circuit
Communicated to connect with the position setting device and the gap measuring sensor, and for according to institute's rheme
The value obtained by setting device and the gap measuring sensor is put, to obtain the mover slide unit
Required expectation electric current.
In one embodiment, it is described control circuit may include the first summer, controller, preload force loader,
Second summer, the 3rd summer, the first non-linear compensator, the second non-linear compensator, first
Current driver, the second current driver and the 4th summer, wherein the position setting device
The input of output end and first summer is communicated to connect, the output end of first summer with
The input communication connection of the controller, the output end of the controller and second summer
The input communication connection of input and the 3rd summer；The output end of the preload force loader
Communicated to connect with the input of second summer and the input of the 3rd summer；Described
The output end of two summers and the 3rd summer and the first non-linear compensator and the second linear compensation
The input communication connection of device；The input of the gap measuring sensor and the described first non-linear benefit
Repay the input communication connection of device and the second non-linear compensator；First non-linear compensator and institute
State the output end of the second non-linear compensator respectively with first current driver and second electric current
The input communication connection of driver；And first current driver and second electric current driving
The output end of device is electrically connected with the first mover slide unit and the second mover slide unit respectively
Connect, the motion for controlling the first mover slide unit and the second mover slide unit.
In one embodiment, the mover slide unit may include iron core and coil windings, the coil windings
It is wound on the iron core, wherein first current driver and second current driver difference
The coil windings of coil windings and the second mover slide unit for the first mover slide unit
Power supply.
In one embodiment, the gap measuring sensor may include to be arranged on the mover slide unit
First gap measuring sensor and the second gap measuring sensor, first gap measuring sensor are used
Between the mover slide unit and the iron core described in a pair of measurement in mover slide unit away from
From, and second gap measuring sensor is for measuring another in this pair of mover slide unit
The distance between one mover slide unit and the iron core.
In one embodiment, the iron core of the mover slide unit can be E shaped iron cores and the coil windings are twined
In the prominent branch for being around in the centre of the E shaped iron cores, and the rail unit is I shaped iron cores；Or,
The iron core of the mover slide unit can be c-type iron core and the coil winding wound in the c-type iron
On the middle part of core, and the rail unit is I shaped iron cores.
In one embodiment, iron core can be made up of soft magnetic materials.
In one embodiment, the magnetic suspension guider may include multigroup mover sliding block list arranged in pairs
Member, multigroup mover slide unit is according to asymmetric topology structure, symmetrically circumferentially in the guide rail
Unit both sides.
In one embodiment, the cross section of the guide rail of the rail unit is square shape, cross or I-shaped,
Multigroup mover slide unit is arranged in pairs on the opposite side of each cross section.
In one embodiment, the mover slide unit may also include air gap adjusting device, wherein the air gap
Adjusting means is arranged at the pre-position of the iron core, and in the precalculated position, the air gap is adjusted
Regulating device interrupts at least a portion of the magnetic line of force produced by the coil windings.
In one embodiment, the air gap adjusting device may include to be arranged at predetermined on the side of the iron core
Otch at position and the regulating block with the notches fit, the regulating block can be along the otch
Movement is so as to adjust the gap between the regulating block and the otch.
In one embodiment, the surface of the iron core can be provided with supporting plate, and the regulating block is movably pacified
Loaded in the supporting plate and extending into the otch.
In one embodiment, the supporting plate is provided with screwed hole, and the regulating block is installed on institute by bolt
State in supporting plate, wherein the bolt coordinates with the screwed hole, extended into adjusting the regulating block
The distance of the otch.
In one embodiment, the supporting plate is provided with positioner, and the positioner is used to adjust to described
Locking nub is positioned.
According to another aspect of the invention, a kind of magnetic suspension guider, the magnetic suspension guide are additionally provided
Include above-mentioned control system to device.
According to another aspect of the invention, a kind of control method of magnetic suspension guider, institute are additionally provided
Stating magnetic suspension guider includes mover slide unit and rail unit, and the mover slide unit is paired
Ground is arranged in the both sides of the rail unit, and mover described in each pair includes the first mover slide unit and the
Two mover slide units, the control method includes step：
Step 1：Set the preload force of the sliding block of mover slide unit；
Step 2：Mover slide unit is set relative to the height set that rail unit suspends；
Step 3：Measure the clearance height between mover slide unit and rail unit；
Step 4：Above-mentioned clearance height and above-mentioned height set sum obtaining a deviation；
Step 5：The deviation progress is handled and obtains controling power output；
Step 6：Controling power output and above-mentioned preload force sum obtaining desired output power；
Step 7：Expectation electric current is obtained according to above-mentioned desired output power and above-mentioned clearance height；And
Step 8：Mover slide unit is driven according to above-mentioned expectation electric current.
In one embodiment, the processing is carried out by PID controller, and the controling power is exported
Gcs(s) calculated by equation below：
Wherein, KpFor controller gain, fiFor integration frequencies, fdFor differential-frequency, controller gain
KpDeviation proportional linear relationship is converted into controling power,The cumulative departure of control deviation value is pressed
Linear static difference adjusting force, 2 π f are converted to according to linear relationshipdS differentiators are by control deviation value according to linear pass
System is converted to linear damping power.
In one embodiment, the calculation formula of the expectation electric current is as follows：
Wherein, i1It is expectation electric current, g1It is the gap between mover slide unit and rail unit, F1It is
Absorption affinity between mover slide unit and rail unit, K1It is the electromagnetic constant of mover slide unit.
According to the further aspect of the present invention, there is provided a kind of magnetic suspension guider, including mover sliding block list
Member and rail unit, the mover slide unit are arranged in pairs in the both sides of the rail unit, institute
Stating mover slide unit includes iron core and coil windings, and the coil winding wound is on the iron core.
The mover slide unit further comprises air gap adjusting device, wherein the air gap adjusting device is set
In the pre-position of the iron core, and in the precalculated position, the air gap adjusting device interrupt by
At least a portion for the magnetic line of force that the coil windings are produced.
In one embodiment, the air gap adjusting device may include to be arranged at predetermined on the side of the iron core
Otch at position and the regulating block with the notches fit, the regulating block can be along the otch
Movement is so as to adjust the gap between the regulating block and the otch.
In one embodiment, the surface of the iron core can be provided with supporting plate, and the regulating block is movably pacified
Loaded in the supporting plate and extending into the otch.
In one embodiment, screwed hole can be provided with the supporting plate, the regulating block is installed on by bolt
In the supporting plate, wherein the bolt coordinates with the screwed hole, extended with adjusting the regulating block
Enter the distance of the otch.
In one embodiment, positioner can be provided with the supporting plate, the positioner is used for described
Regulating block is positioned.
In one embodiment, the otch is conical otch, and the regulating block is cone；Or,
The otch is wedge-formed incision, and the regulating block is sphenoid.
In one embodiment, the adjustable clearance size between the regulating block and the otch is
1 μm~200 μm.
In one embodiment, one or more otch and phase can be provided with one or more sides of the iron core
Answer the regulating block of quantity.
In one embodiment, the iron core of the mover slide unit can be E shaped iron cores and the coil windings are twined
In the prominent branch for being around in the centre of the E shaped iron cores, and the rail unit is I shaped iron cores；Or,
The iron core of the mover slide unit can be c-type iron core and the coil winding wound in the c-type iron
On the middle part of core, and the rail unit is I shaped iron cores.
In one embodiment, iron core can be made up of soft magnetic materials.
In one embodiment, rail unit can be by such as silicon steel or lamination silicon steel or with low remanent magnetism ability
Material processing and manufacturing form.
In one embodiment, the magnetic suspension guider may include multigroup mover sliding block list arranged in pairs
Member, multigroup mover slide unit is according to asymmetric topology structure, symmetrically circumferentially in the guide rail
Unit both sides.
In one embodiment, the cross section of the guide rail of the rail unit can be square shape, cross or I-shaped
Shape, multigroup mover slide unit can be arranged in pairs on the opposite side of each cross section.
In one embodiment, the mover slide unit may also include gap measuring apparatus, the clearance measurement
Device includes the first gap measuring sensor being arranged on the mover slide unit and the second gap is surveyed
Quantity sensor, first gap measuring sensor is used to measure in mover slide unit described in a pair
The distance between one mover slide unit and the iron core, and second gap measuring sensor
For measuring between another mover slide unit and the iron core in this pair of mover slide unit
Distance.
According to another aspect of the present invention, a kind of control method of magnetic suspension guider, institute are additionally provided
Stating magnetic suspension guider includes mover slide unit and rail unit, and the mover slide unit is paired
Ground is arranged in the both sides of the rail unit, and the mover slide unit includes iron core and coil windings,
The coil winding wound is on the iron core, and the control method is used to control the mover sliding block list
First absorption affinity between the rail unit, it is characterised in that the control method includes step：
Step 1：Air gap adjusting device is set on the mover slide unit, wherein the air gap is adjusted
Device is arranged at the pre-position of the iron core, and in the precalculated position, the air gap regulation dress
Put at least a portion for interrupting the magnetic line of force produced by the coil windings；
Step 2：The absorption affinity is calculated by below equation：
Wherein, i10For the nominal current of winding, g10For in geometrically symmetric in the magnetic suspension guider
The magnetic air gap of the heart, and Δ g are the additional magnetic air gap that air gap adjusting device is adjusted.
In one embodiment, the g10Calculated by below equation
Wherein, F0For the static preload force between mover sliding block and guide rail, determined by design.
In one embodiment, the additional air gap Δ g is calculated by below equation
Wherein, M is the gross mass of moving loads on mover sliding block, and g is acceleration of gravity.
The advantageous effects of the present invention：
(1) a kind of new magnetic gap adjusting means is proposed, magnetic circuit can be manually or automatically adjusted
In magnetic resistance, further improve easily carry out hoverheight regulation during heavily loaded guide rail is debug,
The scene that the load that is particularly suitable for use in changes；
(2) " E " type or " C " type electromagnet core structure proposed, in the freedom of motion of guide rail
Degree direction can carry out periodic array expansion as desired, can effectively lift magnetic suspended guide and carry out heavy duty
The ability of suspension, and then lift the anti-torsion ability of the non-athletic free degree；
(3) nonlinear control techniques proposed actively adjust suspension dynamic stiffness and suspension air gap height, energy
The dynamic response capability of the low guide rail Static stiffness of enough positioning kinematic system acquisitions for suspend and Geng Gao,
The incoming moving slide block of external vibration can effectively be deadened and reside in system.
Brief description of the drawings
Fig. 1 is the structural representation of the guide rail guiding device of traditional form.
Fig. 2 is " E " type magnetic suspension guide with air gap adjusting device according to one embodiment of the invention
To the structural representation of device.
Fig. 2A shows the structural representation of the air gap adjusting device according to one embodiment of the invention.
Fig. 3 is array " E " type magnetcisuspension with air gap adjusting device according to one embodiment of the invention
The structural representation of floating guider.
Fig. 4 is the control system block diagram according to one embodiment of the invention " E " magnetic suspension guider.
Fig. 5 is the simulation of the absorption affinity according to one embodiment of the invention " E " magnetic suspension guider
Calculated curve figure.
Fig. 6 is the schematic layout pattern of " E " magnetic suspension guider according to another embodiment of the present invention.
Fig. 7 is the schematic layout pattern of " E " magnetic suspension guider according to still another embodiment of the invention.
Fig. 8 is the schematic layout pattern of " E " magnetic suspension guider according to still another embodiment of the invention.
Fig. 9 is " C " type magnetic suspension with air gap adjusting device according to another embodiment of the present invention
The structural representation of guider.
Figure 10 is " C " type magnetcisuspension with air gap adjusting device array according to one embodiment of the invention
The structural representation of floating guider.
Figure 11 is the layout signal of " C " magnetic suspension guider according to another embodiment of the present invention
Figure.
Figure 12 is the layout signal of " C " magnetic suspension guider according to still another embodiment of the invention
Figure.
Figure 13 is the layout signal of " C " magnetic suspension guider according to still another embodiment of the invention
Figure.
Embodiment
Presently preferred embodiments of the present invention is described in detail below with reference to accompanying drawing, to become apparent from understanding this
The objects, features and advantages of invention.It should be understood that embodiment shown in the drawings is not to model of the present invention
The limitation enclosed, and simply to illustrate that the connotation of technical solution of the present invention.
Fig. 2 shows the structural representation of the magnetic suspension guider 200 according to one embodiment of the invention.
As shown in Fig. 2 magnetic suspension guider 200 includes rail unit 25, slide unit 201 and magnetic
Suspension control system (also referred to as active levitation control unit), wherein, rail unit 25 includes first
The I shaped iron cores 36 of I shaped iron cores 26 and the 2nd.Slide unit includes the first E shaped iron cores winding 20 and second
E shaped iron cores winding 30.First E shaped iron cores winding 20 by the first E shaped iron cores 21 and first coil around
Group 24, and the first gap measuring sensor 22, air gap adjusting device 23 are constituted.2nd E sections
Core winding 30 is sensed by the 2nd E shaped iron cores 31 and second coil winding 34, and the second clearance measurement
Device 32 is constituted.First gap measuring sensor 22 measures the first E shaped iron cores 21 and the first I shaped iron cores
The distance between 26.Second gap measuring sensor 32 measures the 2nd E shaped iron cores 31 and the 2nd I types
The distance between iron core 36.Guider has 2 freedoms of motion, the first freedom of motion direction
For X-direction, the long axis direction of rail unit 25 is pointed to, the second free degree direction is Y-direction, with
The long axis direction of rail unit 25 is orthogonal orthogonal, and the 3rd freedom of motion direction of guider is
Z-direction, it refers to the first freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction
To the 2nd E shaped iron cores winding 30, away from the first E shaped iron cores winding 20.Here, the first clearance measurement
Sensor and the second gap measuring sensor may, for example, be capacitance sensor, current vortex sensor or
Proximity position measurement sensor etc., 0~10mm of measurement stroke range.
As shown in Fig. 2 wherein, the first E shaped iron cores winding 20 is in coil electricity, and electric current i is surround
Coil flowing, the magnetic line of force as shown in Figure 2 is produced according to the right-hand rule in the iron core of hub of a spool
Path, magnetic line of force path causes the generation of the first E shaped iron cores winding 20 and the first I shaped iron cores 26 to inhale
Attached power F1, is pointed to away from the surface direction of the first I shaped iron cores 26 along Three Degree Of Freedom direction；2nd E
Shaped iron core winding 30 is in coil electricity, electric current i wound coils flowing, according to the right-hand rule in coil
Magnetic line of force path as shown in Figure 2 is produced in the iron core at center, magnetic line of force path causes the 2nd E types
The generation absorption affinity F2 of the I shaped iron cores 36 of iron core winding 30 and the 2nd, refers to along Three Degree Of Freedom direction
To away from the sensing surface direction of the 2nd I shaped iron cores 36；Load gravity F on power F1, F2 and sliding blockPreload
During in poised state, sliding block stable suspersion is in the upper surface of guide rail 25.
FPreload=F1-F2
Power F (F1 or F2) shown in Fig. 2 is passed through between E types winding iron core and I shaped iron cores
The magnetic attraction that magnetic gap g is produced, magnetic attraction is calculated as follows formula：
Wherein, μ0For air permeability (h/m)
ApFor the area (m2) of magnetic gap
G is magnetic gap (m)
I is electric current (A)
N is the coil turn on E shaped iron cores；
K is electromagnetic constant
The coil galvanization size 83a current driver in Fig. 4 of first E shaped iron cores winding 20 enters
Row modulation supply, the coil galvanization size 83b in Fig. 4 of the 2nd E shaped iron cores winding 30 electric current
Driver is modulated supply.
As shown in Fig. 2 a pair of EI iron core actuator groups, equilibrant force is described as：
F1=F10+ΔF1
F2=F20-ΔF2
Wherein, F10And F20For bias force, Δ F1For the controller of the first E shaped iron core windings export it is dynamic
State balancing force, Δ F2The dynamic balancing force exported for the controller of the 2nd E shaped iron core windings.Each EI
The nominal force F of actuator10And F20The given nominal current i of actuator is come from respectively10And i20.Each EI
The dynamic balancing force Δ F of actuator output1With Δ F2Amplitude is equal, and symbol is opposite.In theoretical place-centric
On line, Δ F1=Δ F2=0, FPreload=F10-F20。
Air gap adjusting device 23 is designed as a Wedge device, along perpendicular to the table of the first E shaped iron cores 21
Face carries out position movement.Air gap adjusting device 23 includes regulating block 231 and cutting on iron core 21
Mouth 211.Regulating block can be moved relative to otch 211, and then change regulating block 231 and cutting on iron core
Gap between mouthfuls 211, and then can change loop air gap Δ g, and then change the magnetic resistance of the magnetic circuit,
And then change absorption affinity between the E shaped iron cores 21 of sliding block the first and guide rail 25, and then first can be changed
Power between the absorption affinity F2 of the absorption affinity F1 of E shaped iron cores 21 and the 2nd E shaped iron cores winding 30 is poor,
And then the load force on sliding block (preload force) size can be changed.First E shaped iron core windings can
Become absorption affinity to be calculated as follows：
The 2nd variable absorption affinity of E shaped iron core windings is calculated as follows：
Wherein, i10、i20The nominal current inputted for the actuator of the first and second E shaped iron cores, g10、
g20For the magnetic air gap on theoretical place-centric line, Δ g is the additional air gap that air gap adjusting device is adjusted,
Δ g minimum values are 0.
g10、g20Calculated by equation below：
Wherein, F0For the static preload force between mover sliding block and guide rail, determined by design.
Δ g is calculated by equation below：
Wherein, M is the gross mass of moving loads on mover sliding block, and g is acceleration of gravity.
In one embodiment, regulating block 231 is designed as a sphenoid.Correspondingly, the otch on iron core is wedge
Shape otch.
In another embodiment, the otch on iron core is conical otch.Correspondingly, regulating block is cone.
In one embodiment, as shown in Figure 2 A, the surface of iron core is provided with supporting plate 48.Regulating block 23
It is movably mounted in supporting plate, and the otch that can be extended into by bolt 49 on iron core.
Specifically, regulating block 23 is fixedly connected with regulating bolt 49.Supporting plate 48 is provided with screwed hole,
So as to which regulating bolt coordinates with screwed hole so that regulating block 53 can be moved relative to supporting plate, and then
The depth for the otch that regulation regulating block 23 is stretched on iron core, and then adjust outer surface and the formation of regulating block
Gap between the surface of otch.
It is pointed out that the positioning of regulating block on the supporting plate can be by known in the art or wait out
Any suitable positioner of hair is realized, as long as the positioner can be moved to by regulating block
After precalculated position, regulating block is positioned.
(not shown) in another embodiment, air gap adjusting device includes the adjustment sheet for being affixed on iron core surface,
And adjustment sheet is made up of diamagnetic material.The structure setting of the adjustment sheet into its size can be changed so that
Its area for covering iron core surface can be adjusted.
It should be understood that the air gap adjusting device of the present invention is primarily used to change the magnetic resistance of magnetic circuit, enter
And change absorption affinity between slide unit and guide rail, and then the absorption affinity of the first slide unit can be changed
Power between the second slide unit absorption affinity is poor, or the equilibrant force size between sliding block gravity load.
Under above-mentioned principle, air gap adjusting device can use any suitable structure.
Fig. 3 is array " E " type magnetic with air gap adjusting device according to one embodiment of the invention
The structural representation of suspension guider.As shown in figure 3, array " E " the type magnetic suspension guide is to dress
Put including I shaped iron cores 700, array " E " shaped iron core winding, gap measuring sensor 710 and
Air gap adjusting device 720.I shaped iron cores 700 as stator guiding track a part.Array " E " type
Iron core winding 730 is as Slipper, and it includes E shaped iron cores array 730, coil windings 711, line
Enclose winding 712 and coil windings 713.The coil windings of array " E " shaped iron core winding can be 1
Group, 2 groups, 3 groups, 4 groups, 5 groups, 6 groups, 7 groups, 8 groups, extended with this and analogized.Clearance measurement
The distance between the measurement E shaped iron cores of sensor 710 array 730 and I shaped iron cores 700.
Guider has 2 freedoms of motion, and the first freedom of motion direction is X-direction, is pointed to
The long axis direction of I shaped iron cores 700, the second free degree direction is Y-direction, the length with I shaped iron cores 700
Direction of principal axis is orthogonal orthogonal, and the 3rd freedom of motion direction of guider is Z-direction, and it is with the
One freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction, point to E shaped iron core windings
Array.
E shaped iron core arrays winding 711,712,713 is in coil electricity, the flowing of electric current i wound coils,
Magnetic line of force path as shown in Figure 3, magnetic force are produced in the iron core of hub of a spool according to the right-hand rule
Line path causes the generation absorption affinity F of E shaped iron cores winding 711,712,713 and I shaped iron cores 700,
Pointed to along Three Degree Of Freedom direction away from the surface direction of I shaped iron cores 700.
Array " E " type magnetic suspension guider with adjustable air gap device unilateral can be applied,
Can be simultaneously common using the first and second arrays " E " shaped iron core winding in the symmetrical both sides of I shaped iron cores
Combination application.When array " E " type magnetic suspension guider is applied in one side, the suction produced between EI
Attached power F can be with the load gravity direction on sliding block on the contrary, amplitude is identical with balancing gravity, at the two
When poised state, " E " type array iron core 730 is as Slipper stable suspersion in I shaped iron cores 700
Upper surface is sent out as guide rail.
During work, the winding common combination application of the first and second arrays " E " shaped iron core, the 2nd E types
Iron core is opposite with the first E shaped iron core winding array directions around group pattern.In coil electricity, electric current i
Wound coil is flowed, and magnetic as shown in Figure 3 is produced in the iron core of hub of a spool according to the right-hand rule
Line of force path, array " E " shaped iron core of magnetic line of force path first and second winding respectively with I shaped iron cores
700 generation absorption affinity F1 and F2, is pointed to away from the table of I shaped iron cores 700 along Three Degree Of Freedom direction
The direction in face.Load gravity F on power F1, F2 and sliding blockPreloadDuring in poised state, sliding block is steady
Surely it is suspended in the guide rail upper surface where I shaped iron cores 700.
First E shaped iron cores are around coil galvanization size the first EI devices 84a in Fig. 4 of group pattern 730
Current driver 83a be modulated supply, the 2nd E shaped iron core winding array midline circle galvanizations are big
Small the 2nd EI devices 84b in Fig. 4 current driver 83b is modulated supply.
Air gap adjusting device 720 can change the magnetic resistance of the magnetic circuit, and then change sliding block E shaped iron cores
The absorption affinity between group pattern 730 and I shaped iron cores 700, and then E shaped iron cores winding battle array can be changed
Power of the absorption affinity F and the 2nd E shaped iron cores of row 730 between group pattern absorption affinity is poor, or and sliding block
Equilibrant force size between gravity load.
Fig. 4 shows the control system block diagram of the magnetic suspension guider according to one embodiment of the invention.
As shown in figure 4, the control system include position setting device 60, summer 80, controller 81, in advance
Power loader 88 is carried, summer 90, summer 89, non-linear compensator 82a, 82b, electric current drives
Dynamic device 83a, 83b, summer 86, and gap measuring sensor module 91.The control system is main
For controlling the first mover slide unit 84a and the second mover slide unit 84b.Here, position is set
Device is used to set slide unit relative to the height that rail unit suspends.This highly can be when dispatching from the factory
It is presetting.Gap measuring sensor module 91 includes above-mentioned gap measuring sensor 22 and 32.Control
Device 81 processed is conventional PID controller, is exported for obtaining controling power by gain amplification and tuning.
Summer 89, summer 90, non-linear compensator 82a, 82b, and current driver 83a, 83b
Any suitable device known in the art can be used, as long as it can realize function described below i.e.
Can.
The output end of preload force loader 88 is communicated to connect with the input of summer 89 and 90.Position
The input of setting device 60 is communicated to connect with the input of summer 80.The output end of summer 80
Communicated to connect with the input of controller 81.The output end of controller 81 and summer 89 and 90
Input is communicated to connect.The output end of summer 89 and 90 respectively with non-linear compensator 82a and 82b
Input communication connection.Meanwhile, the output end and nonlinear compensation of gap measuring sensor module 91
Device 82a and 82b input communication connection.Non-linear compensator 82a and 82b output end difference
Communicated to connect with current driver 83a and 83b.Current driver 83a and 83b are dynamic with first respectively
Sub- slide unit and the electrical connection of the second mover slide unit, for controlling the first mover slide unit and the
The motion of two mover slide units.
During work, above-mentioned FpreloadIn sliding block gravity preload force setting value write-in preload force loader 88,
(go out in the height set writing position setting device 60 that mover slide unit opposite rail unit suspends
Pre-set value during factory).Gap measuring sensor 22,32 measure mover slide unit and rail unit it
Between levitation gap height the distance between (i.e. E iron cores with I iron cores), its measure obtain position and
Height set is calculated by summer 80 and obtains deviation, is inputed to controller 81, is put by gain
Big and tuning obtains controling power output.The controling power is exported inputs to summation jointly with preload force setting value
Device 89 and summer 90, calculate obtain the first mover slide unit 84a and the second mover sliding block list respectively
The first of first 84b expects that power output and second expects power output.First expectation power output inputs to first
Non-linear compensator 82a, the second expectation power output inputs to the second non-linear compensator 82b.Meanwhile,
On first mover slide unit 84a and the second mover slide unit 84b between E iron cores and I iron cores
Distance by gap measuring sensor 22,32 measurement inputed to respectively non-linear compensator 83a and
83b, required for calculating the first mover slide unit 84a and the second mover slide unit 84b respectively
Expectation electric current, calculation formula is as follows：
Expectation electric current point required for first mover slide unit 84a and the second mover slide unit 84b
Current driver 83a and 83b are not inputed to.First mover slide unit 84a and the second mover sliding block list
First 84b exports actual driving force common under the current excitation that current driver 83a and 83b are provided
Act on magnetic suspended guide 85.Two driving forces by formation power vector superposed of summer 86 and,
So that sliding block stable suspersion is on guide rail.
As shown in figure 5, under given typical set-up parameter, air gap (Gap) adjustable range from
During 200 μm~500 μm changes, when electric current (Current) 0A~5A changes are passed through in E type coils, E
Absorption affinity (Force) between type coil sliding block and I shaped iron core guide rails can be from 0N~7600N, soon
Speed is according to exponential change.Gravity is carried out by a pair of EI symmetric configurations to preload, can be with relatively low energy
Consumption and sliding block volume realize heavy load carrying capacity.
According to one embodiment of the invention, the control method of the magnetic suspension guider of the application may include
Following steps：
Step 1：Set the preload force of the sliding block of mover slide unit；
Step 2：Mover slide unit is set relative to the height set that rail unit suspends；
Step 3：Measure the clearance height between mover slide unit and rail unit；
Step 4：Above-mentioned clearance height and above-mentioned height set sum obtaining a deviation；
Step 5：The deviation progress is handled and obtains controling power output；
Step 6：Controling power output and above-mentioned preload force sum obtaining desired output power；
Step 7：Expectation electric current is obtained according to above-mentioned desired output power and above-mentioned clearance height；And
Step 8：Mover slide unit is driven according to above-mentioned expectation electric current.
Wherein, step 3 is carried out by being arranged at the gap measuring sensor on mover slide unit.
Step 4 is obtained by inputting summer and being handled above-mentioned clearance height and above-mentioned height set
.Step 5 is carried out by the way that deviation is inputted into PID controller.Step 6 is entered by summer
OK.Step 7 by by desired output power and above-mentioned clearance height input corresponding non-linear compensator come
Carry out.Step 8 is driven by current driver by by above-mentioned expectation electric current input current driver
Mover slide unit is carried out.
In one embodiment, in step 5, the processing is carried out by typical PID controller.At this
Reason includes controller proportional gain, controller storage gain and the controller differential gain, controling power Gcs(s)
Calculated by equation below：
Wherein, KpFor controller gain, fiFor integration frequencies, fdFor differential-frequency, controller gain
KpDeviation proportional linear relationship is converted into controling power,The cumulative departure of control deviation value is pressed
Linear static difference adjusting force, 2 π f are converted to according to linear relationshipdS differentiators are by control deviation value according to linear pass
System is converted to linear damping power.
Fig. 6 is the schematic layout pattern of " E " magnetic suspension guider according to another embodiment of the present invention.
The present embodiment is essentially identical with above-described embodiment, is that the mover of the present embodiment is slided in place of its main difference
Block portion point has the surrounding that 4 E shaped iron cores coil windings are distributed in guide rail according to 90 °, including E sections
Core coil winding 1001, E shaped iron cores coil windings 1002, E shaped iron cores coil windings 1003, E types
Iron-core coil winding 1004.Rail sections are built into three-back-shaped iron core guide rail by 4 I shaped iron cores
1000.Sliding block can make big stroke in the first free degree direction along guide rail as movable part and move, edge
Second or Three Degree Of Freedom direction make bit shift compensation adjustment.First freedom of motion direction is X-direction,
The long axis direction of rail unit 1000 is pointed to, the second freedom of motion direction is Y-direction, with guide rail list
The long axis direction of member 1000 is orthogonal orthogonal, and the Three Degree Of Freedom direction of guider is Z-direction,
It points to sliding block with the first freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction
1001、1002、1003、1004.Wherein, mover sliding block 1001,1002,1003,1004 is being led
There is free movement function, and/or sliding block along the first freedom of motion direction on rail unit 1000
1001st, 1002,1003,1004 on rail unit 1000 along second or the 3rd freedom of motion side
To with micro-displacement motor function or with high rigidity constraint.
Wherein, the structure of mover sliding block 1001,1002,1003,1004 is configured in rail unit 1000
On along the first freedom of motion direction can according to 2 groups, 3 groups, 4 groups, by that analogy carry out expansion match somebody with somebody
Put.
The structure and its control mode of the mover slide unit of the present embodiment and operation principle and above-mentioned implementation
Example is identical, will not be described in detail herein.
Fig. 7 is the schematic layout pattern of " E " magnetic suspension guider according to still another embodiment of the invention.
As shown in fig. 7, the magnetic suspension guider of the present embodiment includes mover slide unit and rail unit
2000, wherein rail unit 2000 is made up of 1 cross guide rail, and each spider constitutes I sections
In core structure, each arm branch of cross guide rail by one constitute to E shaped iron cores coil windings (i.e. move
Sub- slide unit), the surrounding that 4 groups of E shaped iron cores coil windings are distributed in guide rail according to 90 ° altogether,
Including E shaped iron cores coil windings to 2001,2002, E shaped iron cores coil windings to 2003,2004,
E shaped iron cores coil windings are to 2005,2006 and E shaped iron cores coil windings to 2007,2008.It is dynamic
Sub- slide unit can make big stroke in the first free degree direction along guide rail as movable part and move, edge
Second or Three Degree Of Freedom direction make bit shift compensation adjustment.First freedom of motion direction is X-direction,
The long axis direction of rail unit 2000 is pointed to, the second freedom of motion direction is Y-direction, with guide rail list
The long axis direction of member 2000 is orthogonal orthogonal, and the Three Degree Of Freedom direction of guider is Z-direction,
It points to sliding block with the first freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction
2001st, 2002,2003,2004,2005,2006,2007 and 2008.Wherein, sliding block 2001,
2002nd, 2003,2004,2005,2006,2007 and 2008 on rail unit 2000 along
One freedom of motion direction has free movement function, with or sliding block 2001,2002,2003,2004,
2005th, 2006,2007 and 2008 on rail unit 2000 along second or the 3rd freedom of motion
Direction has micro-displacement motor function or with high rigidity constraint.
Wherein, mover sliding block 2001,2002,2003,2004,2005,2006,2007 and 2008
Structure configure on rail unit 2000 along the first freedom of motion direction can according to 2 groups, 3 groups,
4 groups, expansion configuration is carried out by that analogy.
The structure and its control mode of the mover slide unit of the present embodiment and operation principle and above-mentioned implementation
Example is identical, will not be described in detail herein.
Fig. 8 is the schematic layout pattern of " E " magnetic suspension guider according to still another embodiment of the invention.
As shown in figure 8, magnetic suspension guider includes mover sliding block and rail unit 3000, its middle guide list
Member 3000 is made up of 1 I-shaped guide rail, and the beam of each I-shaped constitutes I shaped iron core structures, and I-beam is led
In each arm branch of rail by one constitute to E shaped iron core coil windings, altogether 6 groups E sections
The surrounding that core coil winding is distributed in guide rail according to 90 °, including E shaped iron cores coil windings to 3001,
3002, E shaped iron core coil windings to 3003,3004, E shaped iron cores coil windings to 3005,3006,
Sliding block can make big stroke in the first free degree direction along guide rail as movable part and move, along second
Or bit shift compensation adjustment is made in Three Degree Of Freedom direction.First freedom of motion direction is X-direction, is pointed to
The long axis direction of rail unit 3000, the second freedom of motion direction is Y-direction, with rail unit
3000 long axis direction is orthogonal orthogonal, and the Three Degree Of Freedom direction of guider is Z-direction, it
With the first freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction, mover sliding block is pointed to
3001st, 3002,3003,3004,3005 and 3006.Wherein, mover sliding block 3001,3002,3003,
3004th, 3005 and 3006 have freely on rail unit 3000 along the first freedom of motion direction
Motor function, with or mover sliding block 3001,3002,3003,3004,3005 and 3006 in guide rail
On unit 3000 along second or the 3rd freedom of motion direction there is micro-displacement motor function or with height
Rigid constraint.
Wherein, the structure configuration of mover sliding block 3001,3002,3003,3004,3005 and 3006
On rail unit 3000 along the first freedom of motion direction can according to 2 groups, 3 groups, 4 groups, with
It is such to promote row to expand configuration.The structure and its control mode and work of the mover slide unit of the present embodiment
Make principle same as the previously described embodiments, will not be described in detail herein.
Fig. 9-13 shows the structural representation and layout of " C " magnetic suspension guider according to the present invention
Schematic diagram.Magnetic suspension guider and the main difference of the embodiment shown in Fig. 1-8 shown in Fig. 9-13
Part is the shape of iron core.Specifically, in the embodiment shown in Fig. 1-8, iron core 21 is E shapes,
And the iron core of the embodiment shown in Fig. 9-13 is C-shaped.
As shown in figure 9, magnetic suspension guider 300 include rail unit 25, slide unit 201 with
And magnetic suspension control system (also referred to as active levitation control unit), wherein, rail unit 25 includes
First I shaped iron cores 26 and the 2nd I shaped iron cores 36.Slide unit includes the first c-type iron core winding 50
With the second c-type iron core winding 60.First c-type iron core winding 50 is by the first c-type iron core 51 and first
Coil windings 54, and the first gap measuring sensor 52, air gap adjusting device 53 are constituted, wherein
Air gap adjusting device 53 is identical with the air gap adjusting device 23 shown in Fig. 2, will not be described in detail herein.The
Two c-type iron core windings 60 are by the second c-type iron core 61 and second coil winding 64, and the second gap
Measurement sensor 62 is constituted.First gap measuring sensor 52 measures the first c-type iron core 51 and first
The distance between I shaped iron cores 26.Second gap measuring sensor 62 measures the He of the second c-type iron core 61
The distance between 2nd I shaped iron cores 36.Guider has 2 freedoms of motion, and the first motion is certainly
It is X-direction by spending direction, points to the long axis direction of rail unit 25, the second free degree direction is Y
Direction, threeth freedom of motion of guider orthogonal orthogonal with the long axis direction of rail unit 25
Degree direction is Z-direction, and it is vertical with the first freedom of motion direction and the second freedom of motion direction
It is orthogonal, the second c-type iron core winding 60 is pointed to, away from the first c-type iron core winding 50.Here,
One gap measuring sensor and the second gap measuring sensor may, for example, be capacitance sensor, current vortex
Sensor or proximity position measurement sensor etc., 0~10mm of measurement stroke range.The present embodiment
Magnetic suspension guider 300 and its air gap adjusting device and gap measuring sensor working method with
Embodiment illustrated in fig. 2 is identical, will not be described in detail herein.
With Fig. 3 similarly, the magnetic suspension guider of the present embodiment may also comprise array " C " type magnetic
The structural representation of suspension guider.As shown in Figure 10, array " E " the type magnetic suspension guide to
Device include I shaped iron cores 620, array " C " shaped iron core winding, gap measuring sensor 610 with
And air gap adjusting device 640, wherein air gap adjusting device is identical with the air gap adjusting device shown in Fig. 2,
It will not be described in detail herein.I shaped iron cores 620 as stator guiding track a part.Array " C " shaped iron core
Winding 730 as Slipper, it include c-type iron core array 630, coil windings 611, coil around
Group 612, coil windings 613 and coil windings 614, wherein coil windings 611, coil windings 612,
Coil windings 613 and coil windings 614 constituted respectively with corresponding core packet iron core winding 621,622,
623 and 624.The coil windings of array " C " shaped iron core winding can be 1 group, 2 groups, 3 groups,
4 groups, 5 groups, 6 groups, 7 groups, 8 groups, extended with this and analogized.Gap measuring sensor 610 measures C
The distance between shaped iron core array 630 and I shaped iron cores 620.
Figure 11 is the layout signal of " C " magnetic suspension guider according to another embodiment of the present invention
Figure.The present embodiment and embodiment shown in Fig. 6 are essentially identical, as shown in Figure 10, mover Slipper
There are the surrounding that 4 c-type iron-core coil windings are distributed in guide rail according to 90 °, including c-type iron-core coil
Winding 4001, c-type iron-core coil winding 4002, c-type iron-core coil winding 4003, c-type iron core line
Enclose winding 4004.Rail sections are built into three-back-shaped iron core guide rail 4000 by 4 I shaped iron cores.It is sliding
Block can make big stroke in the first free degree direction along guide rail as movable part and move, along second or
Make bit shift compensation adjustment in Three Degree Of Freedom direction.First freedom of motion direction is X-direction, and sensing is led
The long axis direction of rail unit 4000, the second freedom of motion direction is Y-direction, with rail unit 4000
Long axis direction it is orthogonal orthogonal, the Three Degree Of Freedom direction of guider is Z-direction, and it is with the
One freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction, sensing sliding block 4001,
4002、4003、4004.Wherein, mover sliding block 4001,4002,4003,4004 is in rail unit
There is free movement function along the first freedom of motion direction on 4000, and/or sliding block 4001,4002,
4003rd, 4004 on rail unit 4000 along second or the 3rd freedom of motion direction there is micro-displacement
Motor function is constrained with high rigidity.
Wherein, the structure of mover sliding block 4001,4002,4003,4004 is configured in rail unit 4000
On along the first freedom of motion direction can according to 2 groups, 3 groups, 4 groups, by that analogy carry out expansion match somebody with somebody
Put.
The structure and its control mode of the mover slide unit of the present embodiment and operation principle and above-mentioned implementation
Example is identical, will not be described in detail herein.
Figure 12 is the layout signal of " C " magnetic suspension guider according to still another embodiment of the invention
Figure.The present embodiment and embodiment shown in Fig. 7 are essentially identical, as shown in figure 11, and magnetic suspension guide is to dress
Put including mover slide unit and rail unit 5000, wherein rail unit 5000 is led by 1 cross
Rail is constituted, and each spider, which is constituted in I shaped iron core structures, each arm branch of cross guide rail, one group
Paired c-type iron-core coil winding (i.e. mover slide unit), altogether 4 groups of c-type iron-core coil
The surrounding that winding is distributed in guide rail according to 90 °, including c-type iron-core coil winding is to 5001,5002,
C-type iron-core coil winding is to 5003,5004, and c-type iron-core coil winding is to 5005,5006 and C
Shaped iron core coil windings are to 5007,5008.Mover slide unit can exist as movable part along guide rail
Big stroke movement is made in first free degree direction, and bit shift compensation tune is made along second or Three Degree Of Freedom direction
It is whole.First freedom of motion direction is X-direction, points to the long axis direction of rail unit 5000, second
Freedom of motion direction is Y-direction, orthogonal orthogonal with the long axis direction of rail unit 5000, is led
It is Z-direction to the Three Degree Of Freedom direction of device, it is moved with the first freedom of motion direction and second
The equal perpendicular quadrature in free degree direction, point to sliding block 5001,5002,5003,5004,5005,5006,
5007 and 5008.Wherein, sliding block 5001,5002,5003,5004,5005,5006,5007
And 5008 have free movement function on rail unit 5000 along the first freedom of motion direction,
With or sliding block 5001,5002,5003,5004,5005,5006,5007 and 5008 in guide rail list
Member 5000 on along second or the 3rd freedom of motion direction there is micro-displacement motor function or with Gao Gang
Property constraint.
Wherein, mover sliding block 5001,5002,5003,5004,5005,5006,5007 and 5008
Structure configure on rail unit 5000 along the first freedom of motion direction can according to 2 groups, 3 groups,
4 groups, expansion configuration is carried out by that analogy.
The structure and its control mode of the mover slide unit of the present embodiment and operation principle and above-mentioned implementation
Example is identical, will not be described in detail herein.
Figure 13 is the layout signal of " C " magnetic suspension guider according to still another embodiment of the invention
Figure.The present embodiment and embodiment shown in Fig. 8 are essentially identical, as shown in figure 13, and magnetic suspension guide is to dress
Put including mover sliding block and the part of rail unit 6000, wherein rail unit 6000 is I-shaped by 1
Guide rail is constituted, and the beam of each I-shaped is constituted in I shaped iron core structures, each arm branch of I-beam guide rail
By one constitute to c-type iron-core coil winding, 6 groups of c-type iron-core coil winding is according to 90 ° altogether
The surrounding of guide rail, including c-type iron-core coil winding are distributed in 6001,6002, c-type iron-core coil
Winding is to 6003,6004, and c-type iron-core coil winding is to 6005,6006, and sliding block is used as movable part
Big stroke can be made in the first free degree direction along guide rail to move, along second or Three Degree Of Freedom direction
Make bit shift compensation adjustment.First freedom of motion direction is X-direction, points to the length of rail unit 6000
Direction of principal axis, the second freedom of motion direction is Y-direction, and the long axis direction with rail unit 6000 is mutual
Perpendicular quadrature, the Three Degree Of Freedom direction of guider is Z-direction, it and the first freedom of motion side
To with the second equal perpendicular quadrature in freedom of motion direction, point to mover sliding block 6001,6002,6003,
6004th, 6005 and 6006.Wherein, mover sliding block 6001,6002,6003,6004,6005 and
6006 have free movement function on rail unit 6000 along the first freedom of motion direction, with or
Mover sliding block 6001,6002,6003,6004,6005 and 6006 on rail unit 6000 along
Second or the 3rd freedom of motion direction have micro-displacement motor function or with high rigidity constraint.
Wherein, the structure configuration of mover sliding block 6001,6002,6003,6004,6005 and 6006
On rail unit 6000 along the first freedom of motion direction can according to 2 groups, 3 groups, 4 groups, with
It is such to promote row to expand configuration.The structure and its control mode and work of the mover slide unit of the present embodiment
Make principle same as the previously described embodiments, will not be described in detail herein.
The magnetic suspension guider of the application has air gap adjusting device, and air gap adjusting device can increase
Or reduce magnetic circuit reluctance size in " E " shaped iron core, and then change mover slide unit and rail unit it
Between absorption affinity, and then advantageously can adjust manually between mover slide unit and rail unit it is relative between
Gap position, with or and then adjustable guide rail load.Especially in rail unit assembling stage,
Easily motion can be carried out using air gap adjusting device to debug.
Further, the magnetic suspension guider of the application suspension direction be Low rigidity, heavy load, together
Shi Liyong active levitation control units have the active of highly-responsive, and be particularly suitable for use in high-accuracy motion
Platform structure of guide-rail, the conduct vibrations that can reduce non-athletic direction enter in mover.
The magnetic suspension guider of the application can provide basic buoyancy stably and larger under fully loaded transportation condition
Clearance issues.The mover slide unit of the application has higher than the air gap of air-float guide rail with rail unit
Air gap (i.e. gap).Typically, the air gap of air-float guide rail is 5um~20um, and the application magnetic
The air gap height of suspension is 10um~2mm., can be by adjusting internal magnetic circuit knot for different counterweights
Structure changes buoyancy in wider scope, reaches the purpose in adjustment gap.Meanwhile, solve in heavily loaded feelings
Problem is debug under condition.The present invention is suitable for the application of the motion positions platform of high speed High acceleration and high precision
Occasion.
Presently preferred embodiments of the present invention is described in detail above, it is understood that reading this hair
After bright above-mentioned instruction content, those skilled in the art can make various changes or modifications to the present invention.
These equivalent form of values equally fall within the application appended claims limited range.
Claims (10)
1. a kind of control system for magnetic suspension guider, the magnetic suspension guider includes mover
Slide unit and rail unit, the mover slide unit are arranged in pairs two in the rail unit
Side, mover described in each pair includes the first mover slide unit and the second mover slide unit, and its feature exists
In the control system includes：
Position setting device, the position setting device is used to set the mover slide unit relative to institute
State the elemental height of rail unit suspension；
Gap measuring sensor, the gap measuring sensor is used to measure the mover slide unit and institute
State the levitation gap height between rail unit；And
Circuit is controlled, the control circuit and the position setting device and the gap measuring sensor are logical
Letter connection, and be used for according to the value obtained by the position setting device and the gap measuring sensor,
To obtain the expectation electric current needed for the mover slide unit.
2. the control system of magnetic suspension guider according to claim 1, it is characterised in that institute
Stating control circuit includes the first summer, controller, preload force loader, the second summer, the 3rd
Summer, the first non-linear compensator, the second non-linear compensator, the first current driver, second
Current driver and the 4th summer, wherein the output end of the position setting device and described first
The input communication connection of summer, the output end of first summer and the input of the controller
End communication connection, the output end of the controller and the input and the described 3rd of second summer
The input communication connection of summer；The output end of the preload force loader and second summer
Input and the 3rd summer input communication connection；Second summer and described
The output end of three summers and the input communication link of the first non-linear compensator and the second linearity compensator
Connect；The input of the gap measuring sensor and first non-linear compensator and second are non-linear
The input communication connection of compensator；First non-linear compensator and second nonlinear compensation
The output end of device is led to the input of first current driver and second current driver respectively
Letter connection；And the output end of first current driver and second current driver respectively with
The first mover slide unit and the second mover slide unit electrical connection, for controlling described the
The motion of one mover slide unit and the second mover slide unit.
3. the control system of magnetic suspension guider according to claim 1, it is characterised in that institute
Mover slide unit is stated including iron core and coil windings, the coil winding wound on the iron core,
Wherein described first current driver and second current driver are respectively the first mover sliding block
The coil windings of unit and the coil windings of the second mover slide unit are powered.
4. the control system of magnetic suspension guider according to claim 1, it is characterised in that institute
State the first gap measuring sensor that gap measuring sensor includes being arranged on the mover slide unit
With the second gap measuring sensor, first gap measuring sensor is used to measure mover described in a pair
The distance between a mover slide unit and the iron core in slide unit, and between described second
Gap measurement sensor be used to measuring another mover slide unit in this pair of mover slide unit with
The distance between described iron core.
5. the control system of magnetic suspension guider according to claim 1, it is characterised in that institute
It is E shaped iron cores and the coil winding wound in the E shaped iron cores to state the iron core of mover slide unit
In middle prominent branch, and the rail unit is I shaped iron cores；Or, the mover slide unit
Iron core be c-type iron core and the coil winding wound on the middle part of the c-type iron core, Yi Jisuo
Rail unit is stated for I shaped iron cores.
In one embodiment, iron core is made up of soft magnetic materials.
6. the control system of magnetic suspension guider according to claim 1, it is characterised in that institute
Stating magnetic suspension guider includes multigroup mover slide unit arranged in pairs, multigroup mover sliding block
Unit is according to asymmetric topology structure, symmetrically circumferentially in the rail unit both sides.
In one embodiment, the cross section of the guide rail of the rail unit is square shape, cross or I-shaped,
Multigroup mover slide unit is arranged in pairs on the opposite side of each cross section.
7. the control system of magnetic suspension guider according to claim 1, it is characterised in that institute
Stating mover slide unit also includes air gap adjusting device, wherein the air gap adjusting device be arranged at it is described
The pre-position of iron core, and in the precalculated position, the air gap adjusting device is interrupted by the line
Enclose at least a portion for the magnetic line of force that winding is produced.
8. the control system of magnetic suspension guider according to claim 7, it is characterised in that institute
State otch that air gap adjusting device includes being arranged at pre-position on the side of the iron core and with
The regulating block of the notches fit, the regulating block can move to adjust the tune along the otch
Gap between locking nub and the otch.
In one embodiment, the surface of the iron core is provided with supporting plate, and the regulating block is movably mounted
In in the supporting plate and extending into the otch.
In one embodiment, the supporting plate is provided with screwed hole, and the regulating block is installed on institute by bolt
State in supporting plate, wherein the bolt coordinates with the screwed hole, extended into adjusting the regulating block
The distance of the otch.
In one embodiment, the supporting plate is provided with positioner, and the positioner is used to adjust to described
Locking nub is positioned.
9. a kind of magnetic suspension guider, it is characterised in that the magnetic suspension guider includes such as right
It is required that the control system any one of 1-8.
10. a kind of control method of magnetic suspension guider, the magnetic suspension guider is slided including mover
Module unit and rail unit, the mover slide unit are arranged in pairs in the both sides of the rail unit,
Mover described in each pair includes the first mover slide unit and the second mover slide unit, it is characterised in that
The control method includes step：
Step 1：Set the preload force of the sliding block of mover slide unit；
Step 2：Mover slide unit is set relative to the height set that rail unit suspends；
Step 3：Measure the clearance height between mover slide unit and rail unit；
Step 4：Above-mentioned clearance height and above-mentioned height set sum obtaining a deviation；
Step 5：The deviation progress is handled and obtains controling power output；
Step 6：Controling power output and above-mentioned preload force sum obtaining desired output power；
Step 7：Expectation electric current is obtained according to above-mentioned desired output power and above-mentioned clearance height；And
Step 8：Mover slide unit is driven according to above-mentioned expectation electric current.
In one embodiment, the processing is carried out by PID controller, and the controling power is exported
Gcs(s) calculated by equation below：
<mrow>
<msub>
<mi>G</mi>
<mrow>
<mi>c</mi>
<mi>s</mi>
</mrow>
</msub>
<mrow>
<mo>(</mo>
<mi>s</mi>
<mo>)</mo>
</mrow>
<mo>=</mo>
<msub>
<mi>K</mi>
<mi>p</mi>
</msub>
<mo>+</mo>
<mfrac>
<mrow>
<mn>2</mn>
<msub>
<mi>&pi;f</mi>
<mi>i</mi>
</msub>
</mrow>
<mi>s</mi>
</mfrac>
<mo>+</mo>
<mn>2</mn>
<msub>
<mi>&pi;f</mi>
<mi>d</mi>
</msub>
<mi>s</mi>
</mrow>
Wherein, KpFor controller gain, fiFor integration frequencies, fdFor differential-frequency, controller gain
KpDeviation proportional linear relationship is converted into controling power,The cumulative departure of control deviation value is pressed
Linear static difference adjusting force, 2 π f are converted to according to linear relationshipdS differentiators are by control deviation value according to linear pass
System is converted to linear damping power.
In one embodiment, the calculation formula of the expectation electric current is as follows：
<mrow>
<msub>
<mi>i</mi>
<mn>1</mn>
</msub>
<mo>=</mo>
<msub>
<mi>g</mi>
<mn>1</mn>
</msub>
<msqrt>
<mfrac>
<msub>
<mi>F</mi>
<mn>1</mn>
</msub>
<msub>
<mi>K</mi>
<mn>1</mn>
</msub>
</mfrac>
</msqrt>
</mrow>
Wherein, i1It is expectation electric current, g1It is the gap between mover slide unit and rail unit, F1It is
Absorption affinity between mover slide unit and rail unit, K1It is the electromagnetic constant of mover slide unit.
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| CN110231662A (en) * | 2019-06-21 | 2019-09-13 | 华中科技大学 | A kind of preparation method of the MEMS inertial sensor to be suspended based on diamagnetic body |
| CN110231664A (en) * | 2019-06-21 | 2019-09-13 | 华中科技大学 | A kind of MEMS inertial sensor to be suspended based on diamagnetic body |
| CN113340195A (en) * | 2021-05-25 | 2021-09-03 | 中国人民解放军国防科技大学 | Interference splicing measurement device for long-stroke strip-shaped guide rail and application method |
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| CN110231662A (en) * | 2019-06-21 | 2019-09-13 | 华中科技大学 | A kind of preparation method of the MEMS inertial sensor to be suspended based on diamagnetic body |
| CN110231664A (en) * | 2019-06-21 | 2019-09-13 | 华中科技大学 | A kind of MEMS inertial sensor to be suspended based on diamagnetic body |
| CN113340195A (en) * | 2021-05-25 | 2021-09-03 | 中国人民解放军国防科技大学 | Interference splicing measurement device for long-stroke strip-shaped guide rail and application method |
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